CN113732488B - Method and system for processing metal oxide nano grating by femtosecond laser - Google Patents
Method and system for processing metal oxide nano grating by femtosecond laser Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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Abstract
The invention belongs to the technical field of femtosecond laser processing, and particularly relates to a method and a system for processing a metal oxide nano grating by using femtosecond laser. The invention realizes the single-line direct writing of the metal oxide nano-grating by utilizing the local oxidation of metal under the action of high repetition frequency femtosecond laser, realizes the gap between adjacent nanowires to be smaller than the diffraction limit of light by depending on the localization effect of the generated metal oxide nano-grating on a subsequent light field, and further realizes the processing of the metal oxide nano-grating with the period smaller than the diffraction limit. The method determines the wavelength, repetition frequency, pulse width, laser pulse energy flux, scanning speed and scanning gap range of femtosecond laser used for processing the metal oxide nanometer grating. Compared with the existing processing method, the method can realize the flexible and adjustable processing of the nano-grating with super diffraction limit and grating period in the nano-scale range.
Description
Technical Field
The invention belongs to the technical field of femtosecond laser processing, and particularly relates to a method and a system for processing a metal oxide nano grating by using femtosecond laser.
Background
The grating is the core device of many precision optical instruments and is composed of a large number of parallel equal-width equidistant slits (scribed lines). Are commonly used to implement dispersive splitting functions. In recent years, the role of gratings is no longer limited to the field of spectroscopy, and many fields such as astronomy, quantum optics, optical communication and the like require the participation of gratings. These new applications also place higher demands on the precision and flexibility of the gratings, and in particular the processing of nano-gratings becomes more and more important. The traditional nanometer grating processing method comprises mechanical scribing, holographic lithography and the like, but the method has the defects of complex process, difficult control and the like.
Disclosure of Invention
The invention aims to solve the technical problems to at least a certain extent, and based on the discovery and the recognition of some facts and problems of the inventor, the femtosecond laser is a micro-nano processing method with wide application prospect, and can directly process the surfaces of almost all materials with high precision. The grating structure can be obtained by using a femtosecond laser direct ablation processing technology, but two adjacent lines are easy to overlap due to the diffraction limit of light, so that the grating structure cannot be used for processing the nano grating.
The invention aims to provide a method and a system for processing a metal oxide nano grating by using femtosecond laser, which realize single-line direct writing of the metal oxide nano grating by using local oxidation of metal in air under the action of the femtosecond laser. And then processing parallel metal oxide nanostructures beside the generated metal oxide nanostructures, wherein the gaps between the parallel metal oxide nanostructures can be smaller than the diffraction limit of light depending on the localization effect of the generated metal oxide nanostructures on the subsequent light field, and further processing of the metal oxide nano-grating with the period smaller than the diffraction limit of light is realized.
In a first aspect of the present invention, a metal oxide nano-grating is provided, wherein the nano-grating has a convex structure.
In a second aspect of the present invention, a system for processing a metal oxide nano-grating is provided, which includes:
an illumination system for illuminating the machining location;
an imaging system for imaging the process onto a computer display;
the processing light path is used for focusing the femtosecond laser pulse on the surface of the metal sheet to be processed;
the processing light path and the illumination system are overlapped after passing through the ultrafast laser reflector, and the imaging system and the illumination system are overlapped between the metal sheet to be processed and the semi-transparent semi-reflective mirror; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through a data line;
the control system is used for controlling the movement of the two-dimensional scanning galvanometer in the processing light path in the processing process to realize the processing of the nano grating; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through data lines, and the external control card and the precise electric control translation table are connected with a computer through data lines to form a control system.
Femtosecond laser is a micro-nano processing method with wide application prospect, and can directly carry out high-precision processing on the surfaces of almost all materials. The system for processing the metal oxide nano-grating by using the femtosecond laser can realize the precise adjustment of laser energy flux by using the neutral density attenuation sheet, and can realize the rapid and precise movement of a focusing light spot while realizing the high focusing of the laser by using the combination of the two-dimensional scanning galvanometer and the high-power objective lens. In addition, the system has the functions of illumination and imaging, and can realize the real-time monitoring of the processing process.
In one embodiment, in the illumination system, illumination light emitted by an illumination light source sequentially passes through a semi-transparent mirror, an ultrafast laser mirror, a two-dimensional scanning galvanometer and a high-power objective lens and then irradiates the surface of a metal sheet to be processed to form the illumination system.
In one embodiment, in the imaging system, the illumination light reflected by the surface of the metal sheet to be processed sequentially passes through the high power objective lens, the two-dimensional scanning galvanometer, the ultrafast laser reflector, the half-mirror and the imaging lens, then is irradiated onto the camera, and finally is imaged on a display of a computer through a data line, so as to form the imaging system.
In one embodiment, in the processing optical path, the femtosecond laser pulse emitted by the high repetition frequency femtosecond laser sequentially passes through the neutral density attenuation sheet, the electronic control shutter, the ultrafast laser reflector, the two-dimensional scanning galvanometer and the high-power objective lens and then is focused on the surface of the metal sheet to be processed to form the processing optical path.
In a third aspect of the present invention, a method for processing a metal oxide nanograting is provided, which includes:
(1) The processing system of the metal oxide nanometer grating is built according to claim 1, in the system, illumination light emitted by an illumination light source sequentially passes through a semi-transparent semi-reflecting mirror, an ultrafast laser reflecting mirror, a two-dimensional scanning galvanometer and a high-power objective lens and then irradiates the surface of a metal sheet to be processed to form an illumination system; illuminating light reflected by the surface of a metal sheet to be processed sequentially passes through the high-power objective lens, the two-dimensional scanning galvanometer, the ultrafast laser reflector, the semi-transparent semi-reflective mirror and the imaging lens, then is irradiated on the camera, and finally is imaged on a display of a computer through a data line to form an imaging system; the femtosecond laser pulse emitted by the high-repetition-frequency femtosecond laser sequentially passes through a neutral density attenuation sheet, an electric control shutter, an ultrafast laser reflector, a two-dimensional scanning galvanometer and a high-power objective lens and then is focused on the surface of a metal sheet to be processed to form a processing light path; the processing light path and the illumination system are overlapped after passing through the ultrafast laser reflector, and the imaging system and the illumination system are overlapped between the metal sheet to be processed and the semi-transparent semi-reflective mirror; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through a data line, and the external control card and the precise electric control translation table are connected with a computer through the data line to form a control system;
(2) Mounting a metal sheet to be processed on a precise electric control translation table of the control system;
(3) Turning on an illumination light source of the illumination system, so that illumination light emitted by the illumination light source sequentially passes through the illumination system consisting of a semi-transparent and semi-reflective mirror, an ultrafast laser reflector, a two-dimensional scanning galvanometer and a high power objective lens to be irradiated on the surface of the metal sheet to be processed;
(4) Adjusting the height of a precise electric control translation stage of the control system, utilizing the imaging system to enable the illumination light reflected by the surface of the metal sheet to be processed to sequentially pass through a high-power objective lens, a two-dimensional scanning galvanometer, an ultrafast laser reflector, a semi-transparent semi-reflective mirror and an imaging lens and then irradiate onto a camera, and finally imaging is carried out on a display of a computer through a data line, the image is clear, and focusing is achieved;
(5) The method comprises the steps that a high repetition frequency femtosecond laser is turned on, femtosecond laser pulses emitted by the high repetition frequency femtosecond laser sequentially pass through a neutral density attenuation sheet, an electric control shutter, an ultrafast laser reflector, a two-dimensional scanning vibration mirror and a high-power objective lens and then are focused on the surface of a metal sheet to be processed, the two-dimensional scanning vibration mirror is controlled by a control system to move, line-by-line scanning of focusing light spots is achieved, and therefore machining of the nano grating is achieved.
The grating structure can be obtained by using a femtosecond laser direct ablation processing technology, but two adjacent lines of the processed grating are easy to overlap due to the diffraction limit of light. The method for processing the metal oxide nano-grating by utilizing the femtosecond laser realizes the processing of the nano-grating with the grating period smaller than the laser diffraction limit by depending on the localization effect of the generated metal oxide nano-structure on a subsequent light field, and compared with the traditional interference method and the laser-induced periodic surface structure method, the method can also realize the flexible adjustment of the grating period in the nano-scale range.
In some embodiments, the femtosecond laser is linearly polarized light.
In some embodiments, the femtosecond laser has a wavelength of 800nm to 1064nm, a repetition frequency of 25kHz to 80MHz, and a pulse width of 50fs to 350fs.
In some embodiments, the femtosecond laser has a laser pulse energy fluence of 0.25 to 0.5J/cm 2 。
In some embodiments, the line-by-line scanning of the focused spots is: the motion direction of the focusing light spot is consistent with the polarization direction of the femtosecond laser, the scanning speed of the focusing light spot is 0.1-10 mm/s, and the scanning gap l is 300 nm-1 μm.
According to the embodiment of the invention, the metal oxide nano grating obtained by femtosecond laser processing has the following advantages:
1. femtosecond laser is a micro-nano processing method with wide application prospect, and can directly process the surfaces of all materials with high precision almost, but two adjacent lines are easy to overlap due to the diffraction limit of light, so that the femtosecond laser cannot be used for processing the nano grating. The method provided by the invention realizes the processing of the nano grating with the grating period less than the laser diffraction limit by depending on the localization effect of the generated metal oxide nano structure on the subsequent light field.
2. Compared with the traditional interference method and the laser-induced periodic surface structure method, the method can realize the flexible adjustment of the grating period in the nano-scale range.
3. The invention provides a special system for processing metal oxide nano-gratings on metal, which can realize flexible and rapid preparation of the metal oxide nano-gratings.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a schematic diagram of a system for processing a metal oxide nanograting using a femtosecond laser according to an embodiment of the present invention.
In the figure 1, 1 is a high repetition frequency femtosecond laser, 2 is a neutral density attenuation sheet, 3 is an electric control shutter, 4 is an ultrafast laser reflector, 5 is a two-dimensional scanning galvanometer, 6 is a high-power objective lens, 7 is a metal sheet to be processed, 8 is a precise electric control translation table, 9 is an external control card, 10 is a computer, 11 is a half-mirror, 12 is an illuminating light source, 13 is an imaging lens, and 14 is a camera.
Fig. 2 is a schematic view of a metal oxide nanograting processed in example 1 of the invention and a process for processing the same.
In FIG. 2, 15 is the femtosecond laser pulse, 16 is the laser spot scanning path, 17-21 are the metal oxide nano-gratings with different gaps, l represents the laser scanning gap, and Λ represents the grating period.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
One embodiment of the invention provides a metal oxide nano-grating, which is a convex structure.
One embodiment of the present invention provides a system for processing a metal oxide nanograting, a schematic diagram of which is shown in fig. 1, including:
an illumination system for illuminating the machining site; illuminating light emitted by an illuminating light source 12 sequentially passes through a semi-transparent semi-reflecting mirror 11, an ultrafast laser reflecting mirror 4, a two-dimensional scanning vibrating mirror 5 and a high-power objective lens 6 and then irradiates the surface of a metal sheet 7 to be processed to form an illuminating system;
an imaging system for imaging the process onto a computer display; the illumination light reflected by the surface of the metal sheet 7 to be processed sequentially passes through the high power objective 6, the two-dimensional scanning galvanometer 5, the ultrafast laser reflector 4, the semi-transparent semi-reflecting mirror 11 and the imaging lens 13 and then irradiates the camera 14, and finally is imaged on a display of a computer through a data line to form an imaging system;
the processing optical path is used for focusing the femtosecond laser pulse on the surface of the metal sheet to be processed; the femtosecond laser pulse emitted by the high repetition frequency femtosecond laser 1 sequentially passes through a neutral density attenuation sheet 2, an electric control shutter 3, an ultrafast laser reflector 4, a two-dimensional scanning galvanometer 5 and a high-power objective lens 6 and then is focused on the surface of a metal sheet 7 to be processed to form a processing light path;
the processing light path and the illumination system are overlapped after passing through the ultrafast laser reflector, and the imaging system and the illumination system are overlapped between the metal sheet to be processed and the semi-transparent semi-reflective mirror; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through a data wire;
the control system is used for controlling the motion of the two-dimensional scanning galvanometer in the processing light path in the processing process so as to realize the processing of the nano grating; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through data lines, and the external control card and the precise electric control translation table are connected with a computer through data lines to form a control system.
The femtosecond laser is a micro-nano processing method with wide application prospect, and can directly carry out high-precision processing on the surfaces of almost all materials. The system for processing the metal oxide nano-grating by using the femtosecond laser can realize the precise adjustment of laser energy flux by using the neutral density attenuation sheet, and can realize the rapid and precise movement of a focusing light spot while realizing the high focusing of the laser by using the combination of the two-dimensional scanning galvanometer and the high-power objective lens. In addition, the system has the functions of illumination and imaging, and can realize real-time monitoring of the processing process.
One embodiment of the present invention provides a method for processing a metal oxide nanograting, which comprises:
firstly, a processing system shown in fig. 1 is constructed, and the processing system comprises a high repetition frequency femtosecond laser 1, a neutral density attenuation sheet 2, an electric control shutter 3, an ultrafast laser reflector 4, a two-dimensional scanning galvanometer 5, a high-power objective lens 6, a metal sheet to be processed 7, a precise electric control translation table 8, an external control card 9, a computer 10, a half-transmitting and half-reflecting mirror 11, an illumination light source 12, an imaging lens 13 and a camera 14. The metal sheet 7 to be processed is arranged on the precise electric control translation table 8; the illumination light emitted by the illumination light source 12 sequentially passes through the semi-transparent semi-reflecting mirror 11, the ultrafast laser reflecting mirror 4, the two-dimensional scanning vibrating mirror 5 and the high power objective lens 6 and then irradiates the surface of the metal sheet 7 to be processed to form an illumination system; the illumination light reflected by the surface of the metal sheet 7 to be processed sequentially passes through the high power objective 6, the two-dimensional scanning galvanometer 5, the ultrafast laser reflector 4, the semi-transparent semi-reflecting mirror 11 and the imaging lens 13 and then irradiates the camera 14, and finally is imaged on a display of a computer 10 through a data line to form an imaging system; the femtosecond laser pulse emitted by the high repetition frequency femtosecond laser 1 sequentially passes through a neutral density attenuation sheet 2, an electric control shutter 3, an ultrafast laser reflector 4, a two-dimensional scanning galvanometer 5 and a high-power objective lens 6 and then is focused on the surface of a metal sheet 7 to be processed to form a processing light path; the processing light path and the lighting system are overlapped after passing through the ultrafast laser reflector 4, and the imaging system and the lighting system are overlapped between the metal sheet 7 to be processed and the semi-transparent semi-reflective mirror 11; the two-dimensional scanning galvanometer 5 and the electric control shutter 3 are connected with an external control card 9 through data lines, and the external control card 9 and the precise electric control translation table 8 are connected with a computer 10 through data lines to form a control system.
The following operations are performed on the system shown in fig. 1:
(1) Installation of the sample:
(1-1) mounting a metal sheet 7 to be processed on a precise electric control translation table 8;
(1-2) turning on an illumination light source 12, so that illumination light emitted by the illumination light source 12 irradiates the surface of a metal sheet 7 to be processed through an illumination system consisting of a semi-transparent semi-reflecting mirror 11, an ultrafast laser reflecting mirror 4, a two-dimensional scanning galvanometer 5 and a high-power objective lens 6, and by adjusting the height of a precise electrically controlled translation stage 8, the illumination light reflected by the surface of the metal sheet 7 to be processed irradiates a camera 14 after passing through the high-power objective lens 6, the two-dimensional scanning galvanometer 5, the ultrafast laser reflecting mirror 4, the semi-transparent semi-reflecting mirror 11 and an imaging lens 13 in sequence, and is finally imaged on a display of a computer 10 through a data line, and the image is clear, so that focusing is realized;
(2) Processing the metal oxide nano grating:
(2-1) turning on the high repetition frequency femtosecond laser 1, wherein femtosecond laser pulses emitted by the high repetition frequency femtosecond laser 1 sequentially pass through a neutral density attenuation sheet 2, an electric control shutter 3, an ultrafast laser reflector 4, a two-dimensional scanning galvanometer 5 and a high-power objective lens 6 and then are focused on the surface of a metal sheet 7 to be processed; the wavelength of the high-repetition-frequency femtosecond laser is 800nm to 1064nm, the repetition frequency is 25kHz to 80MHz, the pulse width is 50fs to 350fs, and the laser is linearly polarized light; the energy flux of the laser pulse is 0.25 to 0.5J/cm by adjusting the neutral density attenuation sheet 2 2 ；
(2-2) controlling a two-dimensional scanning galvanometer 5 by a control system to carry out progressive scanning processing, wherein the motion direction of a focusing light spot is consistent with the polarization direction of laser during scanning, the scanning speed is 0.1-10 mm/s, and the range of a scanning gap l is 300-1 mu m, so that the processing of the metal oxide nano grating is realized, and the metal oxide nano grating is of a convex structure.
The invention realizes the single-line direct writing of the metal oxide nano-grating by utilizing the local oxidation of metal under the action of high repetition frequency femtosecond laser, realizes the gap between adjacent nanowires to be smaller than the diffraction limit of light by depending on the localization effect of the generated metal oxide nano-grating on a subsequent light field, and further realizes the processing of the metal oxide nano-grating with the period smaller than the diffraction limit. The method determines the wavelength, repetition frequency, pulse width, laser pulse energy flux, scanning speed and scanning gap range of femtosecond laser used for processing the metal oxide nanometer grating. Compared with the existing processing method, the method can realize the flexible and adjustable processing of the nano-grating with super diffraction limit and grating period in the nano-scale range.
The grating structure can be obtained by using a femtosecond laser direct ablation processing technology, but two adjacent lines of the processed grating are easy to overlap due to the diffraction limit of light. The method for processing the metal oxide nano-grating by utilizing the femtosecond laser realizes the processing of the nano-grating with the grating period smaller than the laser diffraction limit by depending on the localization effect of the generated metal oxide nano-structure on a subsequent light field, and compared with the traditional interference method and the laser-induced periodic surface structure method, the method can also realize the flexible adjustment of the grating period in the nano-scale range.
The invention is further described with reference to the following figures and examples.
Example 1
In this embodiment, the metal sheet 7 is specifically a metal titanium sheet, and the obtained metal oxide nano-grating is specifically a titanium dioxide nano-grating.
Firstly, a system for processing the metal oxide nano grating by using femtosecond laser as shown in figure 1 is built;
the following operations are performed on the system shown in fig. 1:
(1) Installation of the sample:
(1-1) mounting a metal titanium sheet 7 to be processed on a precise electric control translation table 8;
(1-2) turning on an illumination light source 12, so that illumination light emitted by the illumination light source 12 irradiates the surface of a metal titanium sheet 7 to be processed through an illumination system consisting of a semi-transparent semi-reflective mirror 11, an ultrafast laser reflective mirror 4, a two-dimensional scanning galvanometer 5 and a high-power objective lens 6, and by adjusting the height of a precise electrically controlled translation stage 8, the illumination light reflected by the surface of the metal titanium sheet 7 to be processed sequentially passes through the high-power objective lens 6, the two-dimensional scanning galvanometer 5, the ultrafast laser reflective mirror 4, the semi-transparent semi-reflective mirror 11 and an imaging lens 13 and irradiates a camera 14, and is finally imaged on a display of a computer 10 through a data line, and an image is clear, so that focusing is realized;
(2) Processing the titanium dioxide nano grating:
(2-1) opening the high repetition frequency femtosecond laser 1, and focusing the femtosecond laser pulse 15 emitted by the high repetition frequency femtosecond laser 1 on the surface of a metal titanium sheet 7 to be processed after sequentially passing through a neutral density attenuation sheet 2, an electric control shutter 3, an ultrafast laser reflector 4, a two-dimensional scanning galvanometer 5 and a high-power objective lens 6; the high repetition frequency femtosecond laser adopted in the embodiment has the wavelength of 800nm, the repetition frequency of 80MHz and the pulse width of 50fs, and the laser is linearly polarized light; the energy flux of the laser pulse is 0.3J/cm by adjusting the neutral density attenuation sheet 2 2 ；
And (2-2) controlling the two-dimensional scanning galvanometer 5 by a control system to carry out progressive scanning processing, wherein the motion direction of a focusing light spot is consistent with the polarization direction of laser during scanning, and the scanning speed is 5mm/s. The scanning gaps l in the regions 17-21 are respectively set to be 300nm, 500nm, 900nm, 800nm and 700nm, so that the processing of the titanium dioxide nano-grating with different grating periods lambda is realized, the grating period lambda is consistent with the set scanning gaps l, and the titanium dioxide nano-grating is of a convex structure.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (5)
1. A processing system of metal oxide nanometer grating is characterized in that the nanometer grating is a convex structure, and the processing system comprises:
an illumination system for illuminating the machining location;
an imaging system for imaging the process onto a computer display;
the processing light path is used for focusing the femtosecond laser pulse on the surface of the metal sheet to be processed;
the processing light path and the illumination system are overlapped after passing through the ultrafast laser reflector, and the imaging system and the illumination system are overlapped between the metal sheet to be processed and the semi-transparent semi-reflective mirror;
the control system is used for controlling the movement of the two-dimensional scanning galvanometer in the processing light path in the processing process to realize the processing of the nano grating; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through a data line, the external control card and the precise electric control translation table are connected with a computer through a data line to form a control system,
in the processing light path, the femtosecond laser pulse emitted by the high-repetition-frequency femtosecond laser sequentially passes through the neutral density attenuation sheet, the electric control shutter, the ultrafast laser reflector, the two-dimensional scanning galvanometer and the high-power objective lens and then is focused on the surface of the metal sheet to be processed to form the processing light path,
the femtosecond laser has a wavelength of 800nm to 1064nm, a repetition frequency of 25kHz to 80MHz, and a pulse width of 50fs to 350fs,
the laser pulse energy flux of the femtosecond laser is 0.25-0.5J/cm 2 ，
The line-by-line scanning of the focused spot is: the motion direction of the focusing light spot is consistent with the polarization direction of the femtosecond laser, the scanning speed of the focusing light spot is 0.1-10 mm/s, and the scanning gapl300nm to 1 μm.
2. The system for processing metal oxide nano-gratings according to claim 1, wherein in the illumination system, illumination light emitted by the illumination light source passes through the half-mirror, the ultrafast laser mirror, the two-dimensional scanning galvanometer, and the high power objective lens in sequence and then irradiates the surface of the metal sheet to be processed to form the illumination system.
3. The system of claim 1, wherein in the imaging system, the illumination light reflected by the surface of the metal sheet to be processed passes through the high power objective lens, the two-dimensional scanning galvanometer, the ultrafast laser reflector, the half mirror and the imaging lens in sequence, then is irradiated onto the camera, and finally is imaged on the computer display through the data line to form the imaging system.
4. A method for processing metal oxide nanograms using the processing system of claim 1, comprising:
the processing system of the metal oxide nanometer grating is built according to claim 1, in the system, illumination light emitted by an illumination light source sequentially passes through a semi-transparent semi-reflecting mirror, an ultrafast laser reflecting mirror, a two-dimensional scanning galvanometer and a high-power objective lens and then irradiates the surface of a metal sheet to be processed to form an illumination system; illuminating light reflected by the surface of a metal sheet to be processed sequentially passes through the high-power objective lens, the two-dimensional scanning galvanometer, the ultrafast laser reflector, the semi-transparent semi-reflective mirror and the imaging lens, then is irradiated on the camera, and finally is imaged on a display of a computer through a data line to form an imaging system; the femtosecond laser pulse emitted by the high-repetition-frequency femtosecond laser sequentially passes through a neutral density attenuation sheet, an electric control shutter, an ultrafast laser reflector, a two-dimensional scanning galvanometer and a high-power objective lens and then is focused on the surface of a metal sheet to be processed to form a processing light path; the processing light path and the illumination system are overlapped after passing through the ultrafast laser reflector, and the imaging system and the illumination system are overlapped between the metal sheet to be processed and the semi-transparent semi-reflective mirror; the two-dimensional scanning galvanometer and the electric control shutter are connected with an external control card through a data line, and the external control card and the precise electric control translation table are connected with a computer through the data line to form a control system;
mounting a metal sheet to be processed on a precise electric control translation table of the control system;
turning on an illumination light source of the illumination system, so that illumination light emitted by the illumination light source sequentially passes through the illumination system consisting of a semi-transparent and semi-reflective mirror, an ultrafast laser reflector, a two-dimensional scanning galvanometer and a high power objective lens to be irradiated on the surface of the metal sheet to be processed;
adjusting the height of a precise electric control translation table of the control system, and utilizing the imaging system to enable the illumination light reflected by the surface of the metal sheet to be processed to sequentially pass through a high power objective lens, a two-dimensional scanning galvanometer, an ultrafast laser reflector, a semi-transmitting semi-reflecting mirror and an imaging lens and then irradiate a camera, and finally the image is imaged on a display of a computer through a data line, the image is clear, and focusing is realized;
turning on the high repetition frequency femtosecond laser, focusing the femtosecond laser pulse emitted by the high repetition frequency femtosecond laser on the surface of a metal sheet to be processed after sequentially passing through a neutral density attenuation sheet, an electric control shutter, an ultrafast laser reflector, a two-dimensional scanning galvanometer and a high-power objective lens, controlling the two-dimensional scanning galvanometer to move through the control system to realize line-by-line scanning of a focusing light spot so as to realize the processing of the nano grating,
the femtosecond laser has a wavelength of 800nm to 1064nm, a repetition frequency of 25kHz to 80MHz, and a pulse width of 50fs to 350fs,
the laser pulse energy flux of the femtosecond laser is 0.25-0.5J/cm 2 ，
The line-by-line scanning of the focusing light spot is as follows: the motion direction of the focusing light spot is consistent with the polarization direction of the femtosecond laser, the scanning speed of the focusing light spot is 0.1-10 mm/s, and the scanning gaplThe particle size is 300nm to 1 mu m.
5. The method of claim 4, wherein the femtosecond laser is linearly polarized light.
Priority Applications (1)
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