CN104175559A - Liquid phase laser three-dimensional printing system and method based on nanoparticles - Google Patents
Liquid phase laser three-dimensional printing system and method based on nanoparticles Download PDFInfo
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- CN104175559A CN104175559A CN201410402880.5A CN201410402880A CN104175559A CN 104175559 A CN104175559 A CN 104175559A CN 201410402880 A CN201410402880 A CN 201410402880A CN 104175559 A CN104175559 A CN 104175559A
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Abstract
The invention relates to a liquid phase laser three-dimensional printing system and a liquid phase laser three-dimensional printing method based on nanoparticles. The system comprises a laser light source, a transmission control unit, a scanning focusing unit, a monitoring device, a liquid tank, a bearing substrate, an objective table, a moving table and a computer. The method comprises the following steps: establishing a geometrical model by utilizing computer drawing software, slicing and delaminating data, and planning a scanning path; putting liquid which contains to-be-printed nanoparticles into the liquid tank; adjusting the moving table, adjusting the upper surface of the bearing substrate placed on the objective table to a position which approaches the upper surface of the liquid in the liquid tank, so as to be positioned on the laser focusing plane after focusing; enabling the nanoparticles in the solution to move towards a laser focus by utilizing the action of laser tweezers, and generating fusion under the photothermal action, so as to form single-layer structures by virtue of laser scanning; lowering the objective table by the thickness of one single-layer structure, and scanning the other single-layer structure until the design structure is printed; taking out the printed structure, and cleaning residual nanoparticles on the surface of the structure.
Description
Technical field
The present invention relates to 3D printing technique field, particularly a kind of liquid laser three-dimensional laser print system and method based on nano particle
Background technology
It towards miniaturization, function integrated development, is an important trend of structure and device development.And structure and device dimension reduce the integrated raising that all depends on machining resolution and precision with function.Conventional subtracts ability manufacturing technology for some small-scale structures, and particularly complicated small-scale structure is manufactured difficulty.By comparison, laser three-D printing technique is that a kind of flexible, simple, programmable structure increases material manufacture method, can realize the direct manufacture of Arbitrary 3 D structure.Precinct laser sintering and precinct laser fusion are two kinds of high-precision laser 3 D-printing methods that develop at present.Yet, at present the machining resolution of these two kinds of methods only can reach 40 μ m left and right (referring to P.Regenfuss etc., Rapid Prototyping Journal, 2007,13,204-212), and processing structure rough surface, inner in conjunction with defective tightness, be difficult to meet the manufacture demand of complicated small-sized three-dimensional structure.Due to adhesiveness increase, poor fluidity, the paving powder difficulty of the powder of small scale, this has limited the more development of high-resolution, more high-precision laser three-D printing technique.Therefore, in the urgent need to developing new laser three-D printing technique, realize the more manufacture of high-resolution, more high-precision complex three-dimensional structure.
Summary of the invention
In view of this, the object of the invention is to overcome above-mentioned deficiency, a kind of liquid laser 3 D-printing system and method based on nano particle is provided, realize high accuracy and high-resolution 3 D-printing.
One of object of the present invention is to propose a kind of liquid laser 3 D-printing system based on nano particle, and realizes by following technical scheme:
This system comprises laser printing assembly, liquid cell, carrying moving assembly and monitoring device,
Described laser printing assembly comprises LASER Light Source, transmission control unit and scanning focused unit, and three arranges successively;
On the laser optical path at rear, scanning focused unit, be provided with light inlet window and dichroscope, the lower end of described light inlet window is positioned at liquid cell, for the liquid in seal fluid pond and guarantee laser and monitoring the seeing through of light; Described dichroscope is positioned at light inlet window top, for realizing the total reflection of laser and the full impregnated mistake of monitoring light;
Described carrying moving assembly comprises carrying substrates, objective table and travelling carriage, and described carrying substrates is used for carrying 3 D-printing structure, and carrying substrates is arranged on objective table, and carrying substrates and objective table are all positioned at liquid cell; Described travelling carriage is connected with objective table, for regulating the position of objective table.
Further, also comprise for controlling the computer of whole print procedure.
Further, described LASER Light Source provides continuous laser and pulse laser for system, and the wavelength of continuous laser and pulse laser is 157nm-1600nm.
Further, described transmission control unit comprises for controlling the optical gate of laser break-make, for realizing the beam expanding lens of laser beam expanding, and for controlling the attenuator of the laser power variation of incident printing surface.
Further, described scanning focused unit comprises for the laser condensing lens of Laser Focusing with for realizing the scanning galvanometer of laser scanning.
Further, the mobile accuracy of described travelling carriage is 0.1nm-50 μ m, and travel range is 1nm-200mm.
Further, described carrying substrates is glass substrate, quartz substrate, ito glass substrate, FTO glass substrate, ceramic substrate, oxide substrate, semiconductor chip, and the substrate that applies or be deposited with different films.
Two of object of the present invention is to propose a kind of liquid laser 3 D-printing method based on nano particle, and realizes by following technical scheme:
The method comprises the following steps:
1) utilize computer graphics software to set up the geometrical model of object to be printed, and to this model cut into slices, layering, planning scanning pattern;
2) liquid that contains nano particle is inserted in liquid cell;
3) regulate travelling carriage, the carrying substrates upper surface that is placed in objective table is adjusted to the position that approaches liquid upper surface in liquid cell, and on the laser focal plane after focusing on;
4) utilize laser optical tweezer effect to make the nano particle in solution move and fuse under photothermy to laser spot, by laser scanning, form single layer structure;
5) objective table is reduced to the thickness of a single layer structure, carry out the scanning of another layer of structure, until the printing of complete design structure;
6) take out print structure, the residual nano particle of cleaning body structure surface.
Further, described nano particle comprises metal nanoparticle, inorganic non-metallic nano particle, polymer nano granules and compound nano particle thereof.
Further, described metal nanoparticle comprises gold nano grain, silver nano-grain, copper nano particles, Pt nanoparticle, palladium nano-particles, aluminum nanoparticles, iron nano-particle.
Useful technique effect of the present invention is:
1. the present invention is the liquid laser three-dimensional printing technology based on nano particle, can obtain high print resolution and printing precision;
2. employing nano particle of the present invention, because nano particle fusing point is low, therefore can reduce to print laser power used, realizes more high efficiency printing.
Other advantage of the present invention, target and feature will be set forth to a certain extent in the following description, and to a certain extent, based on will be apparent to those skilled in the art to investigating below, or can be instructed from the practice of the present invention.
Accompanying drawing explanation
In order to make the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing, the present invention is described in further detail, wherein:
Fig. 1 is the schematic diagram that the present invention is based on the liquid laser 3 D-printing system of nano particle;
Fig. 2 is the flow chart that the present invention is based on the liquid laser 3 D-printing method of nano particle;
In figure: 1-liquid cell; 2-LASER Light Source; 3-transmission control unit; The scanning focused unit of 4-; 5-dichroscope; 6-light inlet window; 7-carrying substrates; 8-objective table; 9-travelling carriage; 10-monitoring device.
The specific embodiment
Be below the detailed description of the preferred embodiment of the present invention, should be appreciated that preferred embodiment is only for the present invention is described, rather than in order to limit the scope of the invention.
Fig. 1 is the schematic diagram of the liquid laser 3 D-printing system based on nano particle, and as shown in the figure, this system comprises: for carrying the liquid cell 1 of the liquid that contains nano particle, and LASER Light Source 2, transmission control unit 3, scanning focused unit 4; Dichroscope 5, light inlet window 6, carrying substrates 7, objective table 8, travelling carriage 9 and monitoring device 10.LASER Light Source, transmission control unit and the burnt unit three of poly-scanning arrange in turn, realize generation, the transmission control and scanning focused of laser; On the laser optical path at rear, scanning focused unit, be provided with light inlet window and dichroscope, described light inlet window lower end is positioned at liquid cell, and described light inlet window is used for the liquid in seal fluid pond and guarantees laser and monitor seeing through of light; Described dichroscope is positioned at light inlet window top, for realizing the total reflection of laser and the full impregnated mistake of monitoring light; Described carrying substrates is used for carrying 3 D-printing structure, and carrying substrates is arranged on objective table, and carrying substrates and objective table are all positioned at liquid cell; Described travelling carriage is connected with objective table, for regulating the position of objective table.
The laser beam that LASER Light Source 2 is 157nm-1600nm for generation of wave-length coverage, laser beam is respectively continuously, pulse or quasi-continuous lasing.Transmission control unit 3 comprises optical gate, beam expanding lens, and attenuator; For controlling the opening and closing of LASER Light Source 2 outgoing laser beams, expand the laser power variation of incident printing surface.Scanning focused unit 4 comprises for realizing the scanning galvanometer of laser scanning and the laser condensing lens focusing on for laser beam.Dichroscope 5 is for realizing the total reflection of laser beam and the full impregnated mistake of monitoring light.Light inlet window 6 sees through for seal fluid and assurance laser beam and monitoring light.Carrying substrates 7 is for carrying the structure of making.Objective table 8 is for carrying and fixing carrying substrates 7.Travelling carriage 9 is for realizing the lifting of objective table 8, and the mobile accuracy of travelling carriage is 0.1nm-50 μ m, and travel range is 1nm-200mm.Monitoring device 10 comprises illumination path and monitoring light path, for realizing the Real Time Monitoring of print procedure.
Fig. 2 shows the flow chart of the liquid laser 3 D-printing method based on nano particle of the present invention.
First, utilize computer graphics software to set up geometrical model, and to data cut into slices, layering, planning scanning pattern.
The liquid that contains nano particle to be printed is inserted in liquid cell.
Described nano particle comprises metal nanoparticle, medium nano particle and both compounds.Inorganic non-metallic nano particle, polymer nano granules and compound nano particle thereof.Described metal nanoparticle further comprises gold nano grain, silver nano-grain, copper nano particles, Pt nanoparticle, palladium nano-particles, aluminum nanoparticles, iron nano-particle.
Regulate travelling carriage, the carrying substrates upper surface that is placed in objective table is adjusted to the position that approaches liquid upper surface in liquid cell, and on the laser focal plane after focusing on.
The mobile accuracy of described travelling carriage is 0.1nm-50 μ m, and travel range is 1nm-200mm.
Described carrying substrates is glass substrate, quartz substrate, ito glass substrate, FTO glass substrate, ceramic substrate, oxide substrate, semiconductor chip, and the substrate that applies or be deposited with different films.
Utilize laser optical tweezer effect to make the nano particle in solution move and fuse under photothermy to laser spot, by laser scanning, form single layer structure.
The thickness that objective table is reduced to a single layer structure, carries out the scanning of another layer of structure, until the printing of complete design structure.
Take out print structure, the residual nano particle of cleaning body structure surface.
Embodiment 1
Below in conjunction with Fig. 1 and Fig. 2, the present invention will be described in detail as example to take the liquid laser 3 D-printing system and method based on nano particle of golden structure.The particle diameter of the gold nano grain of selecting is 5nm.
First, utilize computer graphics software to set up geometrical model, and to data cut into slices, layering, planning scanning pattern.
The liquid that contains gold nano grain to be printed is inserted in liquid cell 1.
Regulate travelling carriage 9, the upper surface that is placed in the carrying substrates 7 of objective table 8 is adjusted to the position that approaches liquid upper surface in liquid cell, and on the laser focal plane after focusing on.
Select the green laser of 532nm as LASER Light Source 2, laser power is 20-100mW.Utilize laser optical tweezer effect to make the gold nano grain in solution move and fuse under photothermy to laser spot, by laser scanning, form single layer structure.
The thickness that objective table 8 is reduced to a single layer structure, carries out the scanning of another layer of structure, until the printing of complete design structure.
Take out print structure, the residual nano particle of cleaning body structure surface.
Finally explanation is, above preferred embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is described in detail by above preferred embodiment, but those skilled in the art are to be understood that, can to it, make various changes in the form and details, and not depart from the claims in the present invention book limited range.
Claims (10)
1. the liquid laser 3 D-printing system based on nano particle, comprises laser printing assembly, liquid cell, carrying moving assembly and monitoring device, it is characterized in that:
Described laser printing assembly comprises LASER Light Source, transmission control unit and scanning focused unit, and three arranges successively;
On the laser optical path at rear, scanning focused unit, be provided with light inlet window and dichroscope, the lower end of described light inlet window is positioned at liquid cell, for the liquid in seal fluid pond and guarantee laser and monitoring the seeing through of light; Described dichroscope is positioned at light inlet window top, for realizing the total reflection of laser and the full impregnated mistake of monitoring light;
Described carrying moving assembly comprises carrying substrates, objective table and travelling carriage, and described carrying substrates is used for carrying 3 D-printing structure, and carrying substrates is arranged on objective table, and carrying substrates and objective table are all positioned at liquid cell; Described travelling carriage is connected with objective table, for regulating the position of objective table.
2. the liquid laser 3 D-printing system based on nano particle according to claim 1, is characterized in that: also comprise for controlling the computer of whole print procedure.
3. the liquid laser 3 D-printing system based on nano particle according to claim 2, is characterized in that: described LASER Light Source provides continuous laser and pulse laser for system, and the wavelength of continuous laser and pulse laser is 157nm-1600nm.
4. the liquid laser 3 D-printing system based on nano particle according to claim 2, it is characterized in that: described transmission control unit comprises for controlling the optical gate of laser break-make, for realizing the beam expanding lens of laser beam expanding, and for controlling the attenuator of the laser power variation of incident printing surface.
5. the liquid laser 3 D-printing system based on nano particle according to claim 4, is characterized in that, described scanning focused unit comprises for the laser condensing lens of Laser Focusing with for realizing the scanning galvanometer of laser scanning.
6. the liquid laser 3 D-printing system based on nano particle according to claim 4, is characterized in that, the mobile accuracy of described travelling carriage is 0.1nm-50 μ m, and travel range is 1nm-200mm.
7. the liquid laser 3 D-printing method based on nano particle as claimed in claim 1, it is characterized in that, described carrying substrates is glass substrate, quartz substrate, ito glass substrate, FTO glass substrate, ceramic substrate, oxide substrate, semiconductor chip, and the substrate that applies or be deposited with different films.
8. the liquid laser 3 D-printing method based on nano particle, is characterized in that, the method comprises the following steps:
1) utilize computer graphics software to set up the geometrical model of object to be printed, and to this model cut into slices, layering, planning scanning pattern;
2) liquid that contains nano particle is inserted in liquid cell;
3) regulate travelling carriage, the carrying substrates upper surface that is placed in objective table is adjusted to the position that approaches liquid upper surface in liquid cell, and on the laser focal plane after focusing on;
4) utilize laser optical tweezer effect to make the nano particle in solution move and fuse under photothermy to laser spot, by laser scanning, form single layer structure;
5) objective table is reduced to the thickness of a single layer structure, carry out the scanning of another layer of structure, until the printing of complete design structure;
6) take out print structure, the residual nano particle of cleaning body structure surface.
9. the liquid laser 3 D-printing method based on nano particle as claimed in claim 8, is characterized in that, described nano particle comprises metal nanoparticle, inorganic non-metallic nano particle, polymer nano granules and compound nano particle thereof.
10. the liquid laser 3 D-printing method based on nano particle as claimed in claim 9, it is characterized in that, described metal nanoparticle comprises gold nano grain, silver nano-grain, copper nano particles, Pt nanoparticle, palladium nano-particles, aluminum nanoparticles, iron nano-particle.
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104890240A (en) * | 2015-05-23 | 2015-09-09 | 哈尔滨工业大学 | Nanopowder laser selective melting additive manufacturing system and method |
| CN105690772A (en) * | 2016-04-08 | 2016-06-22 | 中国工程物理研究院机械制造工艺研究所 | Assembly-free manufacturing method and device used for micro mechanical structure |
| CN107107481A (en) * | 2015-01-14 | 2017-08-29 | Cl产权管理有限公司 | The equipment for for generating manufacturing three-dimensional structure part |
| CN107283835A (en) * | 2017-07-21 | 2017-10-24 | 中国科学院微电子研究所 | A kind of 3D printing device |
| CN107379528A (en) * | 2017-07-21 | 2017-11-24 | 中国科学院微电子研究所 | A kind of 3D printing device |
| WO2018111565A1 (en) * | 2016-12-15 | 2018-06-21 | General Electric Company | Hybridized light sources |
| CN113119457A (en) * | 2019-12-31 | 2021-07-16 | 王玉漫 | Three-dimensional printing method for nanoscale different materials |
| US11731367B2 (en) | 2021-06-23 | 2023-08-22 | General Electric Company | Drive system for additive manufacturing |
| US11813799B2 (en) | 2021-09-01 | 2023-11-14 | General Electric Company | Control systems and methods for additive manufacturing |
| US11826950B2 (en) | 2021-07-09 | 2023-11-28 | General Electric Company | Resin management system for additive manufacturing |
| US11951679B2 (en) | 2021-06-16 | 2024-04-09 | General Electric Company | Additive manufacturing system |
| US11958249B2 (en) | 2021-06-24 | 2024-04-16 | General Electric Company | Reclamation system for additive manufacturing |
| US11958250B2 (en) | 2021-06-24 | 2024-04-16 | General Electric Company | Reclamation system for additive manufacturing |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1635395A (en) * | 2003-12-31 | 2005-07-06 | 中国科学技术大学 | Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof |
| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro/nano processing system and method |
| CN203622599U (en) * | 2013-11-28 | 2014-06-04 | 西安中科麦特电子技术设备有限公司 | 3D (three-dimensional) printer adopting ceramics as raw material |
-
2014
- 2014-08-15 CN CN201410402880.5A patent/CN104175559A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1635395A (en) * | 2003-12-31 | 2005-07-06 | 中国科学技术大学 | Two-photon-confocal optical manufacturing equipment for 3D micromachining or high-density information storage and method thereof |
| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro/nano processing system and method |
| CN203622599U (en) * | 2013-11-28 | 2014-06-04 | 西安中科麦特电子技术设备有限公司 | 3D (three-dimensional) printer adopting ceramics as raw material |
Non-Patent Citations (5)
| Title |
|---|
| 楼益民等: "基于连续变频技术的三维图像激光打印方法与系统", 《中国激光》, 28 February 2014 (2014-02-28) * |
| 王唯一等: "激光立体造型系统", 《上海交通大学学报》, 31 October 1997 (1997-10-31), pages 72 - 76 * |
| 荆慧: "快速成型技术原理及成型精度分析", 《机械研究与应用》, 30 April 2013 (2013-04-30) * |
| 辛智青等: "纳米粒子的制备及其在打印印刷领域的应用", 《中国科学 ：化学》, 30 June 2013 (2013-06-30) * |
| 黄晓明等: "光固化立体成型技术及其最新发展", 《机电工程技术》, 31 October 2001 (2001-10-31), pages 21 - 29 * |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107107481A (en) * | 2015-01-14 | 2017-08-29 | Cl产权管理有限公司 | The equipment for for generating manufacturing three-dimensional structure part |
| CN107107481B (en) * | 2015-01-14 | 2019-08-20 | Cl产权管理有限公司 | For generating manufacture the equipment of three-dimensional structure part |
| CN104890240A (en) * | 2015-05-23 | 2015-09-09 | 哈尔滨工业大学 | Nanopowder laser selective melting additive manufacturing system and method |
| CN105690772A (en) * | 2016-04-08 | 2016-06-22 | 中国工程物理研究院机械制造工艺研究所 | Assembly-free manufacturing method and device used for micro mechanical structure |
| CN105690772B (en) * | 2016-04-08 | 2017-10-31 | 中国工程物理研究院机械制造工艺研究所 | Exempt from assembling manufacturing method and device for micromechanics mechanism |
| US11179926B2 (en) | 2016-12-15 | 2021-11-23 | General Electric Company | Hybridized light sources |
| WO2018111565A1 (en) * | 2016-12-15 | 2018-06-21 | General Electric Company | Hybridized light sources |
| CN107283835A (en) * | 2017-07-21 | 2017-10-24 | 中国科学院微电子研究所 | A kind of 3D printing device |
| CN107379528A (en) * | 2017-07-21 | 2017-11-24 | 中国科学院微电子研究所 | A kind of 3D printing device |
| CN113119457A (en) * | 2019-12-31 | 2021-07-16 | 王玉漫 | Three-dimensional printing method for nanoscale different materials |
| US11951679B2 (en) | 2021-06-16 | 2024-04-09 | General Electric Company | Additive manufacturing system |
| US11731367B2 (en) | 2021-06-23 | 2023-08-22 | General Electric Company | Drive system for additive manufacturing |
| US11958249B2 (en) | 2021-06-24 | 2024-04-16 | General Electric Company | Reclamation system for additive manufacturing |
| US11958250B2 (en) | 2021-06-24 | 2024-04-16 | General Electric Company | Reclamation system for additive manufacturing |
| US11826950B2 (en) | 2021-07-09 | 2023-11-28 | General Electric Company | Resin management system for additive manufacturing |
| US11813799B2 (en) | 2021-09-01 | 2023-11-14 | General Electric Company | Control systems and methods for additive manufacturing |
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