CN100406374C - Laser cell microoperation control method and device for metal particle - Google Patents
Laser cell microoperation control method and device for metal particle Download PDFInfo
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- CN100406374C CN100406374C CNB2006100786325A CN200610078632A CN100406374C CN 100406374 C CN100406374 C CN 100406374C CN B2006100786325 A CNB2006100786325 A CN B2006100786325A CN 200610078632 A CN200610078632 A CN 200610078632A CN 100406374 C CN100406374 C CN 100406374C
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Abstract
The present invention relates to a laser optical tweezers micro-control method and a device thereof for metal particles, which belongs to the technical field of a laser micro-technology. The present invention uses a two-dimensional scanning polarizer system to circularly scan the metal particles by laser beams, a scanning track contains the metal particles, the acting force of each action spot of the laser beams to the metal particles points to a curvature center of the scanning track, and consequently, the force is used for bounding the metal particles in the center of the scanning track, and the control method of the metal particles is realized. The adopted device comprises a laser (5), a focusing mirror (7), a two-dimensional motion platform (8), a micro observation system (9) and the two-dimensional scanning polarizer system (6) which is used for controlling the direction of the laser beam scanning motion. The present invention can uses the laser optical tweezers control technology to realize the direct control of the metal particles. Metal powder under the control carries out a laser micro sintering process, and the quick forming manufacture of the micro device can be realized.
Description
Technical field
The invention belongs to the Laser Micro Technology field,, utilize the interaction between laser photon and the thing to realize the method that light is controlled according to the laser photon basic principle of dynamics.
Background technology
Since AshkinA invention laser optical tweezer technology in 1986, the laser optical tweezer technology has obtained swift and violent development, has become the effective means of catching and control micro-meter scale and biological cell.
Traditional laser optical tweezer technology is based upon on the laser photon principle of dynamics, by micro laser beam is focused near transparent particulate, near focusing center, produce very strong gradient force, form " ligh trap ", utilize and should " ligh trap " binding force that is in transparent particulate wherein to be realized that the laser optical tweezer of particulate catches and handle, be widely used among the biological study field of cell and molecular level.The control system device of traditional laser optical tweezer mainly comprises laser instrument, strong-focusing system, sample operating system, the micro-system that dynamic observes.Traditional laser optical tweezer is controlled the restriction that technology is subjected to principle; the object of being controlled mainly is transparent dielectric bead; can't realize directly controlling for material such as metal particle opaque, high reflectance, can carry out auxiliary operation by the thin dielectric film that coats layer of transparent in the metal particle outside.Rodney R.Agayan is at Proc.of SPIE Vol.5514, and this point has just been introduced in the article of delivering " the Opticalmanipulation of metal-silica hybrid nanoparticles " the inside in 503～513.
At present in the micro element rapid shaping manufacturing process of laser sintered metal dust, directly control the heat affecting that can effectively improve in the laser sintering process for metal particle, the accurate control sintering width and the degree of depth, however the transparent coating film of this layer all has certain influence for structure, intensity and the hardness etc. of micro element.
Summary of the invention
The objective of the invention is to realize defective that metal particle is directly controlled in order to solve traditional laser optical tweezer control method, make full use of metal particle laser is had this character of high reflectance, propose a kind of fine control method of laser optical tweezer that is used for metal particle, use this method can realize directly controlling metal particle.
Another object of the present invention is according to the proposed method, proposes to be used for the fine actuation means of laser optical tweezer of metal particle.
The fine control method of laser optical tweezer that is used for metal particle of the present invention, be to utilize the two-dimensional scan galvanometer system to make laser beam carry out circular scanning to metal particle, in track while scan is included in metal particle, make each application point of laser beam all point to the center of curvature of track while scan to the active force of metal particle, thereby utilize this power that metal particle is strapped in the center of track while scan, realize the method that metal particle is controlled; Concrete steps are as follows:
(1) use microscopic observation system to select suitable zone to be controlled;
(2) by two-dimension moving platform particulate to be controlled is moved to the laser irradiation zone of action;
(3) adjust the two-dimension moving platform height, make particulate be in the laser beam waist position;
(4) open laser instrument, utilize the control action of two-dimensional scan galvanometer, make laser beam center on particulate and carry out circular scanning, particulate is included within the scanning circular path the laser beam direction of motion;
(5) keep two-dimension moving platform motionless, adjust the mode of vibration of two-dimensional scan galvanometer, make laser beam do two-dimensional array motion simultaneously carrying out circular scanning, the increment of array is in micron dimension, adjust laser output power, make the direction motion of particulate along with the laser beam translation, this particulate is trapped within the scanning circular path simultaneously, realizes the carrying of particulate;
(6) readjust laser power, reduce the active force of laser, discharge metal particle metal particle.
Above-mentioned steps (5) also can be replaced by following steps: the opening movement platform, make the two-dimension moving platform motion, adjust laser output power simultaneously, the particulate of being caught by laser beam is not moved with motion platform, be that particulate still is in the laser scanning zone, realize the carrying of particulate.
The actuation means of the method according to this invention design comprises: laser instrument 5, two-dimensional scan galvanometer system 6, focus lamp 7, two-dimension moving platform 8 and microscopic observation system 9.Wherein, laser instrument emission laser beam pattern is a fundamental-mode gaussian beam, i.e. TEMOO mould, and the precision of two-dimensional scan galvanometer system is a micron dimension, the precision of two-dimension moving platform is a micron dimension, and microscopic observation system can select to carry out the system of online observation.
The effect of laser instrument 5 is emission LASER Light Sources, the effect of two-dimensional scan galvanometer system 6 is scanning motion directions of control laser beam, the effect of focus lamp 7 is that the laser beam that laser instrument emits is converged to fine laser beam, the effect of two-dimension moving platform 8 is the direction of motion that puts metal particle and control metal particle, and the effect of microscopic observation system 9 is auxiliary accurately location and online observations.
Emission laser beam by laser instrument 5 enters in the two-dimensional scan galvanometer system 6, the laser beam that comes out from galvanometer is focused mirror 7 and is converged to fine laser beam, this convergent beam irradiation is on the metal particle 4 that places on the two-dimension moving platform 8, utilize the laser photon active force that this metal particle is implemented to control, the object point correspondence of microscopic observation system 9 realizes auxiliary accurately location and online observation on metal particle.
Operation principle of the present invention: laser photon irradiation is on the high-reflectivity metal particulate, most laser photon is reflected, and the direction of motion of reflection photon is followed the determined direction of reflection law, the relative incident laser beam direction of this direction has certain variation, according to the photon dynamics principle, variation has taken place in the direction of motion of photon, must be subjected to the active force of particulate to it, photon also has a rightabout reaction force to metal particle simultaneously, if this reaction force is enough to overcome extraneous perturbed force, so just can utilize this power to realize capture particles, move and wait operation.Utilize of the control of two-dimensional scan galvanometer system to laser beam scanning motion direction, make laser beam center on particulate and carry out circular scanning, particulate is included within the scanning circular path, this moment, laser photon pointed to the center of curvature of circular path to the active force of metal particle, adjust the power output of laser instrument, utilize this power that metal particle is captured in the scanning circumferential area, mobile then two-dimension moving platform or utilize the motion of two-dimensional scan galvanometer system control laser beam can be realized operations such as moving of particulate.
Use method and apparatus of the present invention, can utilize laser optical tweezer to control technology and realize that the little sintering of metal dust enforcement laser this is controlled under can be realized the manufacturing of micro element rapid shaping to directly the controlling of metal particle.
Description of drawings
Fig. 1 is the light action power schematic diagram of laser photon to metal particle, and F represents laser focusing light beam 1 at this moment to the active force of metal particle among the figure, when F ' represents the laser focusing beam motion to position 2 to the active force of metal particle.
Fig. 2 is the composition schematic diagram of laser optical tweezer device of the present invention;
In the diagram, 1-laser focusing light beam, the position of 2-laser beam, 3-laser beam track while scan, 4-metal particle to be controlled, 5-laser instrument, 6-two-dimensional scan galvanometer system, 7-focus lamp, 8-two-dimension moving platform, 9-microscopic observation system.
The specific embodiment
Specify embodiments of the invention below in conjunction with accompanying drawing.
Fig. 2 is the composition schematic diagram of laser optical tweezer actuation means of the present invention.The actuation means of the method according to this invention design comprises: laser instrument 5, two-dimensional scan galvanometer system 6, focus lamp 7, two-dimension moving platform 8, microscopic observation system 9.
Wherein, the effect of laser instrument 5 is emission LASER Light Sources, the effect of focus lamp 7 is convergent laser light beams, the effect of two dimension surface sweeping galvanometer system 6 is scanning motion directions of control laser beam, the effect of two-dimension moving platform 8 is the direction of motion that puts metal particle and control metal particle, and the effect of microscopic observation system 9 is auxiliary accurately location and online observations.
Emission laser beam by laser instrument 5 enters in the two-dimensional scan galvanometer system 6, the laser beam that comes out from galvanometer is converged to fine laser beam by focus lamp 7 with laser beam, this converging light beam irradiation is on the metal particle 4 that places on the two-dimension moving platform 8, utilize the photon active force that this metal particle is implemented to control, the object point of microscopic observation system 9 places on this particulate, realizes auxiliary accurately location and online observation.
When metal particle was controlled, the concrete operations step was as follows in conjunction with this device:
(1) uses 9 pairs of microscopic observation systems to be positioned over metal particle to be controlled on the two-dimension moving platform 4 and carry out coarse positioning;
(2) by two-dimension moving platform 8 particulate to be controlled is moved to the laser irradiation zone of action;
(3) height of adjustment two-dimension moving platform 8 makes the laser instrument emission laser beam focus on the metal particle 4 that is positioned on the two-dimension moving platform 8 by focus lamp 7, makes particulate be in the laser beam waist position;
(4) open laser instrument 5 and two-dimensional scan galvanometer system 6, utilize the control action of two-dimensional scan galvanometer, laser beam is centered on wait to control metal particle 4 and carry out circular scanning, particulate is included within the scanning circular path the laser beam direction of motion;
(5) keep two-dimension moving platform motionless, adjust the mode of vibration of two-dimensional scan galvanometer, make laser beam do two-dimensional array motion simultaneously carrying out circular scanning, the increment of array is in micron dimension, adjust laser output power, make the direction motion of particulate along with the laser beam translation, this particulate is trapped within the scanning circular path simultaneously, realizes the carrying of particulate;
(6) readjust laser power, reduce the active force of laser, discharge metal particle metal particle.
Control method of the present invention can also adopt another kind of embodiment, other steps are with the above, step (5) can be replaced by following steps: open two-dimension moving platform 8, make the two-dimension moving platform motion, adjust laser output power simultaneously, the particulate of being caught by laser beam is not moved with motion platform, and promptly particulate still is in the laser scanning inclusion region, realizes the carrying of particulate;
Fundamental diagram of the present invention is referring to Fig. 1, and Fig. 1 is the photodynamic action schematic diagram of laser photon to metal particle.According to above-mentioned operation principle as can be known, laser beam 1 irradiation that focuses on produces the directed force F away from optical axis direction to this particulate on metal particle 4, this force direction is the normal direction of this point, when laser beam moved to position shown in 2, this laser beam produced one along this normal directed force F to metal particle equally '.Utilize the control action to the laser beam motion of two-dimensional scan galvanometer system 6 to make laser beam carry out circular scanning now along the track shown in 3, in this track while scan is included in metal particle, each application point at laser beam all has an active force to metal particle, and this active force points to the center of curvature of track while scan.Utilize this power metal particle can be strapped in the center of track while scan, can realize the laser capture of metal particle.
The present invention is used for the fine control method of laser optical tweezer and the device of metal particle, not only is applicable to the metal particle of micron dimension, and is applicable to that other are opaque, laser is had the material of highly reflective.
Claims (7)
1. fine control method of laser optical tweezer that is used for metal particle, at first use microscopic observation system to select suitable zone to be controlled, by two-dimension moving platform particulate to be controlled is moved to the laser irradiation zone of action then, adjust the two-dimension moving platform height, make particulate be in the laser beam waist position; It is characterized in that: it is to utilize the two-dimensional scan galvanometer system to make laser beam carry out circular scanning to metal particle, in track while scan is included in metal particle, make each application point of laser beam all point to the center of curvature of track while scan to the active force of metal particle, thereby utilize this power that metal particle is strapped in the center of track while scan, realize the method that metal particle is controlled; Further comprising the steps of:
1) opens laser instrument, utilize the control action of two-dimensional scan galvanometer system, make laser beam center on particulate and carry out circular scanning, particulate is included within the scanning circular path the laser beam direction of motion;
2) keep two-dimension moving platform motionless, adjust the mode of vibration of two-dimensional scan galvanometer, make laser beam do two-dimensional array motion simultaneously carrying out circular scanning, the increment of array is in micron dimension, adjust laser output power, make the direction motion of particulate along with the laser beam translation, this particulate is trapped within the scanning circular path simultaneously, realizes the carrying of particulate;
3) readjust laser power, reduce the active force of laser, discharge metal particle metal particle.
2. fine control method of laser optical tweezer that is used for metal particle, at first use microscopic observation system to select suitable zone to be controlled, by two-dimension moving platform particulate to be controlled is moved to the laser irradiation zone of action then, adjust the two-dimension moving platform height, make particulate be in the laser beam waist position; It is characterized in that: it is to utilize the two-dimensional scan galvanometer system to make laser beam carry out circular scanning to metal particle, in track while scan is included in metal particle, make each application point of laser beam all point to the center of curvature of track while scan to the active force of metal particle, thereby utilize this power that metal particle is strapped in the center of track while scan, realize the method that metal particle is controlled; Further comprising the steps of:
1) opens laser instrument, utilize the control action of two-dimensional scan galvanometer system, make laser beam center on particulate and carry out circular scanning, particulate is included within the scanning circular path the laser beam direction of motion;
2) opening movement platform makes the two-dimension moving platform motion, adjusts laser output power simultaneously, and the particulate of being caught by laser beam is not moved with motion platform, and promptly particulate still is in the laser scanning zone, realizes the carrying of particulate;
3) readjust laser power, reduce the active force of laser, discharge metal particle metal particle.
3. fine actuation means of laser optical tweezer that is used for metal particle, comprise the laser instrument (5) of launching LASER Light Source, the laser beam that laser instrument is emitted is converged to the focus lamp (7) of fine laser beam, put the two-dimension moving platform (8) and the microscopic observation system (9) of metal particle, it is characterized in that: the two-dimensional scan galvanometer system (6) that between laser instrument (5) and focus lamp (7), also is provided with the control laser beam flying direction of motion, entered in the two-dimensional scan galvanometer system (6) by laser instrument (5) emission laser beam, line focus mirror (7) is converged to fine laser beam again.
4. a kind of fine actuation means of laser optical tweezer that is used for metal particle according to claim 3, it is characterized in that: the scanning motion repetitive positioning accuracy of described two-dimensional scan galvanometer system (6) is a micron dimension.
5. a kind of fine actuation means of laser optical tweezer that is used for metal particle according to claim 3, it is characterized in that: described laser instrument (5) is the laser instrument of fundamental-mode gaussian beam for the emission laser beam pattern.
6. a kind of fine actuation means of laser optical tweezer that is used for metal particle according to claim 3 is characterized in that: the repetitive positioning accuracy of described two-dimension moving platform (8) motion is a micron dimension.
7. a kind of fine actuation means of laser optical tweezer that is used for metal particle according to claim 3, it is characterized in that: microscopic observation system (9) is the system that can carry out online observation.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100786325A CN100406374C (en) | 2006-04-29 | 2006-04-29 | Laser cell microoperation control method and device for metal particle |
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| CNB2006100786325A CN100406374C (en) | 2006-04-29 | 2006-04-29 | Laser cell microoperation control method and device for metal particle |
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| CN1830752A CN1830752A (en) | 2006-09-13 |
| CN100406374C true CN100406374C (en) | 2008-07-30 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102285630A (en) * | 2011-05-06 | 2011-12-21 | 中国科学技术大学苏州研究院 | Automatic particle handing method based on optical tweezers |
| CN103411561B (en) * | 2013-08-15 | 2015-12-09 | 哈尔滨工业大学 | Based on the image microstructures method of angular spectrum scanning illumination |
| CN104900291B (en) * | 2015-04-23 | 2017-03-15 | 深圳大学 | A kind of SPP optical optical tweezers systems |
| WO2019119369A1 (en) * | 2017-12-21 | 2019-06-27 | 深圳先进技术研究院 | Acoustic tweezer device |
| CN109887867B (en) | 2019-03-08 | 2021-03-09 | 京东方科技集团股份有限公司 | Micro device transfer device and micro device transfer method |
| WO2022178903A1 (en) * | 2021-02-28 | 2022-09-01 | 浙江大学 | Method and device for manufacturing microdevice |
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| CN1421686A (en) * | 2001-11-26 | 2003-06-04 | 中国科学院力学研究所 | Microscopic diagnosis method by means of stable dispersive system of microscopic devices |
| CN1438479A (en) * | 2002-12-31 | 2003-08-27 | 上海中科大光镊科技有限公司 | Technology for sorting and extracting matter in liquid cell using laser |
| US20040256542A1 (en) * | 2003-06-19 | 2004-12-23 | Fuji Photo Film Co., Ltd. | Optical tweezer device |
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- 2006-04-29 CN CNB2006100786325A patent/CN100406374C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1421686A (en) * | 2001-11-26 | 2003-06-04 | 中国科学院力学研究所 | Microscopic diagnosis method by means of stable dispersive system of microscopic devices |
| CN1438479A (en) * | 2002-12-31 | 2003-08-27 | 上海中科大光镊科技有限公司 | Technology for sorting and extracting matter in liquid cell using laser |
| US20040256542A1 (en) * | 2003-06-19 | 2004-12-23 | Fuji Photo Film Co., Ltd. | Optical tweezer device |
Non-Patent Citations (4)
| Title |
|---|
| Optical manipulation of metal-silica hybrid nanoparticles. Rodney R. Agayan et al.Proc. of SPIE,Vol.5514 . 2004 |
| Optical manipulation of metal-silica hybrid nanoparticles. Rodney R. Agayan et al.Proc. of SPIE,Vol.5514 . 2004 * |
| 单光束光镊光阱力分析. 赵海军等.河北师范大学学报(自然科学版)，第30卷第1期. 2006 |
| 单光束光镊光阱力分析. 赵海军等.河北师范大学学报(自然科学版)，第30卷第1期. 2006 * |
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