CN113140349B - White-light water-cooling adjustable diaphragm device - Google Patents
White-light water-cooling adjustable diaphragm device Download PDFInfo
- Publication number
- CN113140349B CN113140349B CN202110441979.6A CN202110441979A CN113140349B CN 113140349 B CN113140349 B CN 113140349B CN 202110441979 A CN202110441979 A CN 202110441979A CN 113140349 B CN113140349 B CN 113140349B
- Authority
- CN
- China
- Prior art keywords
- absorber
- main body
- corrugated pipe
- light
- adjusting mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers
Abstract
The invention discloses a white light water-cooling adjustable diaphragm device which is characterized by comprising two absorber main body structures, namely an upstream absorber main body, a downstream absorber main body, two groups of blades, a fixed supporting structure and a movement adjusting mechanism; wherein, a single light-transmitting aperture is respectively processed on the main body structures of the two absorbers, and one side of each single light-transmitting aperture is provided with a group of blades; the fixed supporting structure is provided with a light through hole, and the two absorber main body structures are arranged on the movement adjusting mechanism; the front end of the upstream absorber main body is hermetically connected with the first welding corrugated pipe, the rear end of the upstream absorber main body is hermetically connected with the second welding corrugated pipe, and the other end of the second welding corrugated pipe is hermetically connected with the front end of the fixed support structure; the rear end of the fixed supporting structure is hermetically connected with the front end of the downstream absorber main body through a third welding corrugated pipe; the rear end of the downstream absorber main body is hermetically connected with one end of a fourth welding corrugated pipe; the main body structures of the two absorbers are respectively provided with a water cooling pore passage.
Description
Technical Field
The invention relates to a white light water-cooling adjustable diaphragm device which is applied to a beam line of a synchrotron radiation device and used in a high-vacuum environment. The adjustable diaphragm device can bear synchrotron radiation high heat load, the water cooling pipeline is arranged outside vacuum, the structure is simple, and the leading-out opening angle of a beam line can be regulated and controlled according to the requirements of experimental users so as to protect downstream optical elements.
Background
When the velocity or direction of motion of a charged particle having a relativistic property is changed, the electromagnetic radiation emitted in the original direction of motion is called synchrotron radiation. Since the 20 th century and 60 th century discovered that synchrotron radiation plays a very important role in research on condensed substances, synchrotron radiation devices are gradually built, and have been developed from the first generation to the fourth generation to become a comprehensive research platform in multiple fields. The high brightness means high heat load, and the peak power density of synchrotron radiation generated by a high-energy light source can reach 700-800 kW/mrad2The power density corresponding to the electron beam welding can easily cut various metals without cooling. Synchrotron radiation device for carrying out various scientific experiments of different types needs synchrotron radiationAnd modulating to meet the experiment requirement. The apparatus typically used to modulate the synchrotron radiation comprises: white light mirror, monochromator, focusing mirror, etc. Due to the limitations of the manufacturing process, any optical device has a certain receiving aperture. Before these optical devices, a diaphragm is installed to limit the synchrotron radiation projected from the light source to a certain size. The adjustable diaphragm is a key optical device capable of adjusting the spread angle of synchronous radiation propagating downstream, and generally consists of four knife edges which are respectively and independently adjusted. When the adjustable diaphragm is used for limiting unmodulated synchronous radiation, the adjustable diaphragm is generally called a white light adjustable diaphragm, and the heat load borne by the adjustable diaphragm is 1-2 orders of magnitude higher than that of the adjustable diaphragm used for monochromatic light. Four knife edges of the white light adjustable diaphragm need to be protected by water cooling to prevent the knife edges from being damaged by heat load. Because the atmosphere can strongly absorb the synchrotron radiation and generate a large amount of ozone, a common synchrotron radiation beam line can maintain an ultrahigh vacuum environment, and is more favorable for the spread of the synchrotron radiation. This requires that the water-cooled edge of the white light adjustable diaphragm must be placed in an ultra-high vacuum environment. Ultrahigh vacuum has extremely high requirements on sealing, mechanism lubrication and high-precision motion control.
The common white light adjustable diaphragm in the synchrotron radiation device is generally a four-blade independent motion structure, an absorber, blades and corresponding motion supporting mechanisms of the diaphragm are all arranged in a vacuum cavity, two blades move independently in the horizontal direction and the vertical direction respectively to realize different leading-out opening angles of light beam lines, and a water cooling pipeline is generally arranged on the absorber for cooling. Although the common four-blade adjustable diaphragm can realize the independent motion of four blades and can reach higher motion precision, the internal structure of the vacuum cavity is complex, the installation and motion debugging difficulty is high, the realization difficulty of an ultrahigh vacuum environment can be improved, the cost is higher, and the later maintenance and the replacement are inconvenient.
Although the current white-light water-cooling adjustable diaphragm used by each light source can limit the beam leading-out field angle, most absorbers and blades are arranged in a cavity, and the diaphragm is characterized by complex motion structure, large transverse space size occupied by a beam line, long processing period, high cost and difficult equipment maintenance.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to disclose a white light adjustable diaphragm device which is used for synchronously radiating X-rays and has simple structure and low cost. The invention directly processes the sealing knife edge on the absorber and directly controls the motion of the absorber, has the characteristics of compact structure, simple processing, low cost, convenient later equipment maintenance and the like, greatly saves time and space cost and simultaneously achieves the same performance index.
The technical scheme adopted by the invention is as follows:
a white light water-cooling adjustable diaphragm device is characterized by comprising two absorber main body structures, namely an upstream absorber main body, a downstream absorber main body, two groups of blades for forming a diaphragm, a fixed supporting structure and a movement adjusting mechanism; the two absorber main body structures are respectively provided with a single light-transmitting aperture for transmitting synchronous radiation beams, and one side of each single light-transmitting aperture is provided with a group of blades; the fixed supporting structure is provided with a light through hole for transmitting a synchronous radiation beam; the two absorber main body structures are arranged on the motion adjusting mechanism outside the vacuum environment, and the two-dimensional motion adjustment of the absorber main body structures in the direction vertical to the light beam propagation direction is realized through the motion adjusting mechanism, so that two groups of blades form a diaphragm in the light beam propagation direction; the front end of the upstream absorber main body is hermetically connected with a first welding corrugated pipe, the other end of the first welding corrugated pipe is used for being hermetically connected with a light beam input port, the rear end of the upstream absorber main body is hermetically connected with a second welding corrugated pipe, and the other end of the second welding corrugated pipe is hermetically connected with the front end of the fixed supporting structure; the rear end of the fixed supporting structure is hermetically connected with the front end of the downstream absorber main body through a third welding corrugated pipe; the rear end of the downstream absorber main body is hermetically connected with one end of a fourth welding corrugated pipe, and the other end of the fourth welding corrugated pipe is hermetically connected with a light beam output port; and water cooling pore channels are respectively processed on the main body structures of the two absorbers and are used for being connected with water cooling pipelines positioned outside the vacuum environment.
Furthermore, sealing knife edges are processed at the front end and the rear end of each of the two absorber main body structures and are used for being connected with the welding corrugated pipe in a sealing mode, and square holes are processed in the middle of the sealing knife edges and serve as the aperture of the single light-transmitting hole.
Further, the single light-transmitting aperture is determined according to the size of the light spot at the position, and the single light-transmitting aperture is larger than the maximum size of the light spot at the corresponding position.
Furthermore, each group of blades comprises two I-shaped blades which are spliced into an L-shaped blade and are arranged at the rear end of the absorber main body structure.
Further, the motion adjusting mechanism comprises a coarse adjusting structure and a two-dimensional precise adjusting mechanism; wherein the two-dimensional precise adjustment mechanism is mounted on the coarse adjustment structure.
Further, the upstream absorber body structure comprises an upstream absorber, a left blade, an upper blade, a target seat and a supporting plate; the upstream absorber is in a regular octagon shape, and two end faces of the upstream absorber are respectively provided with a sealing knife edge for sealing with a welding corrugated pipe knife edge flange to form a vacuum environment; a square hole is formed in the middle of the upstream absorber, water cooling pore channels are processed on the upper side and the lower side of the square hole, and the left blade and the upper blade are respectively arranged on the left side and the upper side of the square hole to form an L-shaped blade; a target seat is arranged on the upper end face of the upstream absorber and used for placing a target ball during collimation; the upstream absorber is fixed on a supporting plate through a bracket and a bolt, and the upstream absorber main body structure is arranged on the two-dimensional precision adjusting mechanism through the supporting plate; the downstream absorber main body structure comprises a downstream absorber, a lower blade, a right blade, a target seat and a supporting plate; the downstream absorber is in a regular octagon shape, and two end faces of the downstream absorber are respectively provided with a sealing knife edge and are used for sealing with a welding corrugated pipe knife edge flange to form a vacuum environment; a square hole is formed in the middle of the downstream absorber, water cooling pore channels are processed on the upper side and the lower side of the square hole, and the lower blade and the right blade are respectively arranged below and on the right side of the square hole to form an L-shaped blade; a target seat is arranged on the upper end face of the downstream absorber and used for placing a target ball during collimation; the downstream absorber is fixed on a supporting plate through a support and a bolt, and the downstream absorber main body structure is arranged on the two-dimensional precision adjusting mechanism through the supporting plate.
Furthermore, the fixed supporting structure comprises a double-sided fixed flange, a fixed plate, a supporting structure and a target seat; sealing knife edges are processed on the front end face and the rear end face of the double-sided fixed flange and are used for sealing the knife edge flange of the welded corrugated pipe to form a vacuum environment; the double-sided fixed flange is fixed on a supporting structure below the double-sided fixed flange through a fixing plate, and the fixed supporting structure is fixedly connected to the bottom coarse adjustment structure.
Furthermore, the rough adjusting mechanism comprises an elevation adjusting plate, a plurality of wedge-shaped block lifting tables, a translation adjusting plate, a translation adjusting assembly, a fixing assembly and a bottom plate; the two-dimensional precise adjusting mechanism is installed on the elevation adjusting plate, each wedge-shaped block lifting platform is installed between the elevation adjusting plate and the translation adjusting plate and used for manually leveling the height of the elevation adjusting plate, a plurality of translation adjusting assemblies are arranged on the translation adjusting plate respectively and used for adjusting the horizontal position of the translation adjusting assembly, and the two-dimensional precise adjusting mechanism is fixed through the locking fixing assembly after the position is adjusted.
Further, the wedge-shaped block lifting platform comprises an upper wedge-shaped block, a lower wedge-shaped block, a mounting base, a trapezoidal screw rod, a screw rod nut, a bearing block supporting end, a bearing block fixing end, a screw rod, a locking nut, a spherical washer and a conical washer; the wedge block lifting platform is installed on the translation adjusting plate through a screw rod, the elevation adjusting plate is installed between the two conical surface washers, when the height is adjusted, the nut is unscrewed firstly, then the trapezoidal screw rod is rotated, the overall height is adjusted through the movement of the lower wedge block, and the lower wedge block is locked through the locking nut after being adjusted.
Further, the light through hole is larger than the single light through hole diameter.
The white light adjustable diaphragm device mainly comprises an absorber, a blade, a fixed supporting structure, a welded corrugated pipe and a motion adjusting mechanism. The absorber main body is arranged on the motion adjusting mechanism, and the two-dimensional motion of the absorber main body is realized through the motion adjusting mechanism, so that the function of changing the leading-out opening angle of the adjustable diaphragm is realized.
The absorber mainly comprises an upstream absorber and a downstream absorber, wherein the absorber body is made of a copper alloy with high hardness, excellent thermomechanical property and excellent thermomechanical property, such as chromium-zirconium-copper or dispersed copper. Sealing knife edges are processed at the upper end and the lower end of the absorber main body, and square holes are processed at the middle position of the absorber main body to be used as the light-transmitting aperture of the monomer. The single light-transmitting aperture is determined according to the spot size at the position, and the specific requirement is that the single light-transmitting aperture is larger than the maximum spot size at the position. Cooling water pipes are processed at the upper part and the lower part of the single light-transmitting aperture, an L-shaped blade is respectively installed at one end of the absorber main body at the lower part of the single light-transmitting aperture along a square hole, and the square hole formed by combining the two L-shaped blades is the actual light-transmitting aperture. The L-shaped blade can be an integrally formed L-shaped blade or an L-shaped blade formed by splicing two I-shaped blades, wherein the blade is made of a metal material with high density and high melting point, and the L-shaped blade has the function of enabling the light spot boundary to be sharper after the light beam passes through the actual light-passing aperture of the mouth shape of the stroke of the double L-shaped blades so as to achieve the effect of obviously improving the quality of the light beam.
The vacuum sealing device is characterized in that a section of welding corrugated pipe is respectively arranged at the upstream end and the downstream end of the upstream absorber and the downstream end of the downstream absorber, the metal sealing washer is extruded by a sealing knife edge to deform so as to connect the upstream absorber and the downstream absorber in a vacuum sealing manner, and the specific specification size of the corrugated pipe is determined according to the size of a light spot at the installation position and the transverse (horizontal and vertical to the beam line direction) displacement stroke of the absorber.
The flanges at the two ends of the corrugated pipe are arranged in a manner that one end of the flange is an inner welding type flange, and the other end of the flange is a loose sleeve type flange, so that the hole position of a connecting bolt can be conveniently adjusted when equipment is installed.
The fixed supporting structure is arranged in the middle of the upstream absorber and the downstream absorber and comprises a double-sided fixed flange and a supporting part thereof, wherein the upper end and the lower end of the double-sided fixed flange are provided with knife edges and sealing screw hole characteristics which are the same as those of a corrugated pipe flange connected with the double-sided fixed flange, the center of the double-sided fixed flange is provided with a clear aperture with the size not smaller than the maximum light spot size, and the supporting part is arranged under the double-sided fixed flange. The fixed support structure has the functions of fixing the flange butted with the middle corrugated pipe and keeping vacuum sealing, so that interference generated when two absorbers generate relative motion is avoided.
And a collimation target seat is arranged above the absorber main body and the fixed flange and used for placing an optical target ball during laser tracker collimation equipment.
The motion adjusting mechanism comprises a coarse adjusting mechanism and a two-dimensional precise adjusting mechanism. The rough adjusting mechanism mainly comprises a manual wedge-shaped lifting table and a manual translation ejector rod adjusting assembly, and has the functions of roughly placing the main body device at a theoretical position on a wire harness and leveling; the two-dimensional precise adjusting mechanism comprises an electric lifting sliding table in the vertical direction and an electric linear sliding table in the horizontal direction, and has the functions of precisely adjusting the initial position of the absorber and changing the position of the absorber in the application process of the device to obtain different clear aperture diameters.
The white light adjustable diaphragm device is an important optical component on a beam line, is generally arranged at the upstream of the beam line, can obtain different beam line leading-out opening angles according to the requirements of experimental users, can absorb redundant heat load at the same time, further protects important optical elements at the downstream, can absorb stray light at the edge of a light spot, and effectively improves the quality of the light spot. The invention has the following characteristics:
1) the water-cooling adjustable diaphragm absorber is directly processed from chromium-zirconium-copper, dispersed copper or oxygen-free copper materials, and sealing flange knife edges are processed on both the upstream and downstream end faces, so that the water-cooling adjustable diaphragm absorber can be directly connected with a welded corrugated pipe to be used in a high-vacuum environment;
2) on the premise of simple structure, the integral device can still realize integral position adjustment in all directions and high-precision movement of the blade;
3) the driving structure for the movement of the blade is out of vacuum, so that later debugging, maintenance and replacement are facilitated;
4) the rough adjustment in the elevation direction is adjusted by a wedge-shaped block lifting table, and the wedge-shaped block lifting table has higher load and better stability than the common screw support.
Compared with the prior art, the invention has the following advantages:
firstly, the absorber is integrally processed by chromium-zirconium-copper, dispersed copper or oxygen-free copper materials, and a water cooling pipeline is arranged in the absorber, so that the influence of excessive thermal deformation caused by high temperature of the absorber on the light blocking effect can be avoided when light is blocked; secondly, sealing flange knife edges are directly processed at two ends of the absorber and can be directly connected with a welding corrugated pipe to form a vacuum environment, the structure is simple, the occupied space of a wire harness is small, and meanwhile, the processing period and the processing cost are greatly shortened; thirdly, the driving mechanisms of the absorber and the blade are arranged outside the vacuum environment, and the simplification of the structure in the vacuum environment is beneficial to realizing the vacuum degree of the high vacuum environment, so that the difficulty in installation and debugging is reduced, and the later maintenance and replacement are facilitated; fourthly, the wedge block lifting platform used for elevation adjustment has larger bearing capacity and good stability.
Drawings
FIG. 1 is a structural diagram of a white light water-cooling adjustable diaphragm device of the present invention;
FIG. 2 is a schematic representation of an upstream absorbent structure of the present invention;
FIG. 3 is a schematic representation of a downstream absorbent structure of the present invention;
FIG. 4 is a schematic view of a fixed support structure according to the present invention;
FIG. 5 is a schematic structural view of a two-dimensional precision adjustment mechanism according to the present invention;
FIG. 6 is a schematic view of the coarse adjustment mechanism of the present invention;
FIG. 7 is a schematic structural view of a wedge lifter of the present invention;
fig. 8 is a schematic view of the translational adjustment seat of the present invention.
Detailed Description
To facilitate an understanding of the key technology of the present invention, the following description is given by way of a specific example:
fig. 1 shows a white light water-cooling adjustable diaphragm device according to an embodiment of the present invention, which mainly includes an upstream absorber body 1, a downstream absorber body 2, a welding bellows 3, a fixed support structure 4, a two-dimensional fine adjustment mechanism 5, and a coarse adjustment mechanism 6. The device comprises an upstream absorber body 1, a fixed supporting structure 4 and a downstream absorber body 2, wherein the upstream absorber body, the fixed supporting structure and the downstream absorber body are connected through a welded corrugated pipe 3, a metal sealing gasket is extruded through paired knife edge flanges to realize vacuum sealing, a two-dimensional precise adjusting mechanism 5 is arranged below a main body structure and used for positioning and adjusting the main body structure and controlling the displacement of the absorber body to obtain different clear aperture diameters, and a coarse adjusting mechanism 6 is arranged at the lowest part of the whole structure and has the function of roughly installing the whole device at the correct position on a wire harness.
As shown in fig. 2, the upstream absorber body 1 is mainly composed of an upstream absorber 101, a left blade 102, an upper blade 103, a target holder 105, and a support plate 106. The upstream absorber 101 is mainly formed by integrally processing chromium, zirconium and copper materials, and is convenient to install and fix, the absorber is made into a regular octagon shape, knife edges 107 are processed on two end faces, and the absorber and the knife edge flanges of the upstream and downstream welding bellows are respectively sealed to form a vacuum environment. A square hole is formed in the middle of the absorber, water cooling pore canals 104 are arranged on the upper side and the lower side of the square hole, and two blades 102 and 103 are respectively arranged above and on the left side of the square hole to form an L-shaped blade. And a target seat is arranged on the upper end face of the absorber and used for placing a target ball during collimation. The absorber is fixed to the support plate 106 by a bracket and a bolt, which facilitates the installation of the absorber main body 1 on the two-dimensional precision adjustment mechanism. As shown in fig. 3, the downstream absorber 2 is mainly composed of a downstream absorber 201, a lower blade 202, a right blade 203, a target holder 205, and a support plate 206. The downstream absorber body 2 is similar in structure to the upstream absorber body 1 except that the blade distribution positions are different. The blades of the downstream absorber are arranged at the lower side and the right side of the opening, namely the upstream absorber and the downstream absorber respectively clamp light in two directions.
As shown in fig. 4, the fixed support structure 4 is mainly composed of a double-sided fixing flange 401, a fixing plate 402, a support structure 403, and a target holder 404. The structure is used as a fixed structure to isolate the lateral displacement of the corrugated pipes at two sides in different directions, and interference generated when the absorbers at two sides move is prevented. The double-sided mounting flange 401 is made of 304 stainless steel material, and two end faces are also provided with sealing knife edges 405, and are fixed on a supporting structure 403 below through a fixing plate 402. This fixed stay structure 4 rigid coupling is on bottom coarse adjustment structure 6, carries out sealing connection through sealed edge of a knife 405 with both sides welding bellows, and when the bellows produced the side displacement respectively in both sides, the rigidity of two-sided mounting flange 401 was motionless, made the motion of keeping apart both sides bellows, produced mutual interference when avoiding two absorbers simultaneous movement. As shown in fig. 5, the two-dimensional precision adjustment mechanism 5 is composed of an X-direction electric linear sliding table 501 and a Z-direction electric lifting table 502, and is used for controlling precision movement of the absorber main body in the X and Z directions, respectively, and the light beam transmission direction is set to be the horizontal Y direction.
As shown in fig. 6, the coarse adjustment mechanism 6 is composed of an elevation adjustment plate 601, a wedge block lifting table 602, a translational adjustment plate 603, a translational adjustment assembly 604, a fixing assembly 605, and a bottom plate 606. The two-dimensional precise adjusting mechanism 5 is installed on the elevation adjusting plate 601, the three wedge-shaped block lifting platforms 602 are installed between the elevation adjusting plate 601 and the translation adjusting plate 603 and used for manually leveling the height of the elevation adjusting plate 601, two translation adjusting assemblies 604 are respectively arranged in four directions of the translation adjusting plate and used for adjusting the horizontal position of the translation adjusting plate, and the adjustment of the whole position is realized in a matching manner. After the overall position is adjusted, the fixing assembly 605 is locked to fix the overall position.
As shown in fig. 7, the wedge block elevating platform 602 is composed of an upper wedge block 602a, a lower wedge block 602b, a mounting base 602c, a trapezoidal lead screw 602d, a lead screw nut 602e, a bearing seat supporting end 602f, a bearing seat fixing end 602g, a lead screw 602h, a locking nut 602i, a spherical washer 602j, and a conical washer 602 k. The wedge block lifting platform 602 is integrally installed on the translation adjusting plate 603 through a screw 602h, the elevation adjusting plate 601 is installed between two conical washers 602k, when the height is adjusted, a nut 602i is firstly unscrewed, then a trapezoidal screw 602d is rotated, the overall height is adjusted through the movement of the lower wedge block 602b, and the height is locked through a locking nut 602i after the height is adjusted.
As shown in fig. 8, the translational adjusting seat 604 is composed of a fixed block 604a, a fastening screw 604b, a nut 604c, and a ball screw 604d, and there are two translational adjusting seats in each direction for adjusting the horizontal position of the translational adjusting plate 603. The fixed block 604a is mounted on the bottom plate 606 by a fastening screw 604b, and the horizontal position of the translational adjustment plate 603 is adjusted by rotating a ball screw 604d during adjustment.
The device can also be made into a structure with four blades moving independently, so that the movement interference among the blades can be avoided, but compared with the structure of the invention, the four-blade adjustable diaphragm has the advantages of more complex structure, higher cost, large occupied space and capability of adopting the complex structure for the beam line with higher requirement on the movement precision of the blades.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, and those skilled in the art may make modifications and variations within the spirit of the present invention, and all modifications, equivalents and modifications of the above embodiments according to the technical spirit of the present invention are within the scope of the present invention.
Claims (10)
1. A white light water-cooling adjustable diaphragm device is characterized by comprising two absorber main body structures, namely an upstream absorber main body, a downstream absorber main body, two groups of blades for forming a diaphragm, a fixed supporting structure and a movement adjusting mechanism; the two absorber main body structures are respectively provided with a single light through hole for transmitting synchronous radiation beams, and one side of each single light through hole is provided with a group of blades; the fixed supporting structure is provided with a light through hole for transmitting a synchronous radiation beam; the two absorber main body structures are arranged on the motion adjusting mechanism outside the vacuum environment, and the motion adjusting mechanism is used for realizing two-dimensional motion adjustment of the absorber main body structures in the direction vertical to the light beam propagation direction, so that the two groups of blades form a diaphragm in the light beam propagation direction; the front end of the upstream absorber main body is hermetically connected with a first welding corrugated pipe, the other end of the first welding corrugated pipe is used for being hermetically connected with a light beam input port, the rear end of the upstream absorber main body is hermetically connected with a second welding corrugated pipe, and the other end of the second welding corrugated pipe is hermetically connected with the front end of the fixed supporting structure; the rear end of the fixed supporting structure is hermetically connected with the front end of the downstream absorber main body through a third welding corrugated pipe; the rear end of the downstream absorber main body is hermetically connected with one end of a fourth welding corrugated pipe, and the other end of the fourth welding corrugated pipe is hermetically connected with a light beam output port; and water cooling pore canals are respectively processed on the two absorber main body structures and are used for being connected with a water cooling pipeline positioned outside the vacuum environment.
2. The white-light water-cooling adjustable diaphragm device of claim 1, wherein sealing blades are formed at the front end and the rear end of each of the two absorber main body structures for being in sealing connection with a welding corrugated pipe, and a square hole is formed in the middle of each sealing blade and serves as the single light through hole.
3. The white light water-cooling adjustable diaphragm device of claim 1 or 2, wherein the aperture of the single light through hole is determined according to the spot size at the position, and the aperture of the single light through hole is larger than the maximum spot size at the corresponding position.
4. The white-light water-cooled adjustable diaphragm device of claim 1, wherein each group of blades comprises two I-shaped blades which are spliced into an L-shaped blade and are arranged at the rear end of the absorber main body structure.
5. The white-light water-cooled adjustable diaphragm device of claim 1, wherein the motion adjusting mechanism comprises a coarse adjusting mechanism and a two-dimensional fine adjusting mechanism; and the two-dimensional precise adjusting mechanism is arranged on the coarse adjusting mechanism.
6. The white-light water-cooled adjustable diaphragm device of claim 5, wherein the upstream absorber body comprises an upstream absorber, a left blade, an upper blade, a first target holder and a first support plate; the upstream absorber is in a regular octagon shape, and two end faces of the upstream absorber are respectively provided with a first sealing knife edge for sealing with a welding corrugated pipe knife edge flange to form a vacuum environment; a first square hole is formed in the middle of the upstream absorber, first water-cooling pore passages are formed in the upper side and the lower side of the first square hole, and the left blade and the upper blade are respectively arranged on the left side and the upper side of the first square hole to form an L-shaped blade; a first target seat is arranged on the upper end face of the upstream absorber and used for placing a first target ball during alignment; the upstream absorber is fixed on a first supporting plate through a first bracket and a first bolt, and the main body structure of the upstream absorber is arranged on the two-dimensional precise adjusting mechanism through the first supporting plate; the downstream absorber main body structure comprises a downstream absorber, a lower blade, a right blade, a second target seat and a second supporting plate; the downstream absorber is in a regular octagon shape, and two end faces of the downstream absorber are respectively provided with a second sealing knife edge for sealing with a welding corrugated pipe knife edge flange to form a vacuum environment; a second square hole is formed in the middle of the downstream absorber, second water-cooling pore passages are formed in the upper side and the lower side of the second square hole, and the lower blade and the right blade are respectively arranged below and on the right side of the second square hole to form an L-shaped blade; a second target seat is arranged on the upper end face of the downstream absorber and used for placing a second target ball during collimation; the downstream absorber is fixed on a second supporting plate through a second support and a second bolt, and the downstream absorber main body structure is installed on the two-dimensional precision adjusting mechanism through the second supporting plate.
7. The white-light water-cooled adjustable diaphragm device of claim 5, wherein the fixed support structure comprises a double-sided fixed flange, a fixed plate, a support structure and a third target holder; third sealing knife edges are processed on the front end face and the rear end face of the double-sided fixed flange and are used for sealing the knife edge flange of the welding corrugated pipe to form a vacuum environment; the double-sided fixed flange is fixed on a supporting structure below through a fixing plate, and the fixed supporting structure is fixedly connected to the bottom coarse adjusting mechanism.
8. The white-light water-cooled adjustable diaphragm device of claim 5, wherein the coarse adjustment mechanism comprises an elevation adjustment plate, a plurality of wedge-shaped block lifting tables, a translation adjustment plate, a translation adjustment assembly, a fixing assembly and a bottom plate; the two-dimensional precise adjusting mechanism is installed on the elevation adjusting plate, each wedge-shaped block lifting platform is installed between the elevation adjusting plate and the translation adjusting plate and used for manually leveling the height of the elevation adjusting plate, a plurality of translation adjusting assemblies are arranged on the translation adjusting plate respectively and used for adjusting the horizontal position of the elevation adjusting plate, and the two-dimensional precise adjusting mechanism is fixed through the locking fixing assembly after the position is adjusted.
9. The white-light water-cooled adjustable diaphragm device of claim 8, wherein the wedge block lifting platform consists of an upper wedge block, a lower wedge block, a mounting base, a trapezoidal lead screw, a lead screw nut, a bearing block supporting end, a bearing block fixing end, a screw, a locking nut, a spherical washer and a conical washer; the wedge block lifting platform is installed on the translation adjusting plate through a screw rod, the elevation adjusting plate is installed between the two conical surface washers, when the height is adjusted, the nut is unscrewed firstly, then the trapezoidal screw rod is rotated, the overall height is adjusted through the movement of the lower wedge block, and the lower wedge block is locked through the locking nut after being adjusted.
10. The white-light water-cooled adjustable diaphragm device of claim 1, wherein the aperture of the light through hole is larger than that of the single light through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110441979.6A CN113140349B (en) | 2021-04-23 | 2021-04-23 | White-light water-cooling adjustable diaphragm device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110441979.6A CN113140349B (en) | 2021-04-23 | 2021-04-23 | White-light water-cooling adjustable diaphragm device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113140349A CN113140349A (en) | 2021-07-20 |
| CN113140349B true CN113140349B (en) | 2022-06-21 |
Family
ID=76811888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110441979.6A Active CN113140349B (en) | 2021-04-23 | 2021-04-23 | White-light water-cooling adjustable diaphragm device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113140349B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8278623B2 (en) * | 2011-01-14 | 2012-10-02 | Kla-Tencor Corporation | High-vacuum variable aperture mechanism and method of using same |
| CN105137563B (en) * | 2015-10-16 | 2017-09-29 | 中国科学院上海应用物理研究所 | A kind of light splitting aperture device |
| CN208283309U (en) * | 2018-06-29 | 2018-12-25 | 天津敬慎坊科技有限公司 | A kind of automatically controlled slit of synchrotron radiation |
| CN108983334A (en) * | 2018-09-05 | 2018-12-11 | 中国科学院上海应用物理研究所 | A kind of photon shutter device |
| CN109709632A (en) * | 2019-01-15 | 2019-05-03 | 中国科学院上海应用物理研究所 | A kind of aperture device |
| CN211630477U (en) * | 2020-01-16 | 2020-10-02 | 中国科学院高能物理研究所 | Water-cooling aluminum window absorber device |
-
2021
- 2021-04-23 CN CN202110441979.6A patent/CN113140349B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN113140349A (en) | 2021-07-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111069770A (en) | Light path light splitting unit and coaxial wire feeding cladding head thereof | |
| EP0813745B1 (en) | Electron beam pattern-writing column | |
| CN113140349B (en) | White-light water-cooling adjustable diaphragm device | |
| CN105158870B (en) | A kind of high power condenser lens of adjustable focus | |
| JP6262428B2 (en) | Drift control in charged particle beam systems | |
| CN105140088A (en) | Focusing device of large-beam electron beam shooting micro-beam spot X-ray source and application method of focusing device | |
| CN1033342C (en) | Uniform line focusing optical system with continuously adjustable focal line length | |
| CN113889836A (en) | High-precision multi-section cooling type deflection mirror | |
| CN211630477U (en) | Water-cooling aluminum window absorber device | |
| CN117270089A (en) | High-precision white light adjustable aperture device for various use conditions | |
| DE102011005840A1 (en) | A controllable multi-mirror arrangement, optical system with a controllable multi-mirror arrangement and method for operating a controllable multi-mirror arrangement | |
| Wang et al. | A sagittally focusing double-multilayer monochromator for ultrafast X-ray imaging applications | |
| Comin | A cryogenically cooled, sagittal focusing scanning monochromator for ESRF | |
| DiGennaro et al. | A directly cooled grating substrate for ALS undulator beam lines | |
| CN101490597B (en) | Apparatus for homogenizing light and laser apparatus for producing a linear intensity distribution in a work plane | |
| CN220065617U (en) | Clamping type multidirectional translation electron microscope sample stage | |
| CN212665193U (en) | A accurate displacement adjustment frame of good heat conduction heavy load for laser beam machining head | |
| WO2021205779A1 (en) | Laser processing apparatus | |
| WO2023197099A1 (en) | Particle corrector and particle system | |
| CN116047777B (en) | Variable multiple uniform laser generating device | |
| JP2013161733A (en) | Shield device and charged particle beam exposure device | |
| Shu et al. | Design of high heat load white‐beam slits for wiggler/undulator beamlines at the Advanced Photon Source | |
| CN208141058U (en) | The optical system device of SLM device | |
| Bianco et al. | Kirkpatrick-Baez elliptical bendable mirrors at the Nanospectroscopy beamline: metrological results and x-ray performance | |
| Benson et al. | Beam splitting mirror for advanced photon source sector 34 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |