CN1033342C - Uniform line focusing optical system with continuously adjustable focal line length - Google Patents
Uniform line focusing optical system with continuously adjustable focal line length Download PDFInfo
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- CN1033342C CN1033342C CN 93112629 CN93112629A CN1033342C CN 1033342 C CN1033342 C CN 1033342C CN 93112629 CN93112629 CN 93112629 CN 93112629 A CN93112629 A CN 93112629A CN 1033342 C CN1033342 C CN 1033342C
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Abstract
The invention relates to a uniform line focusing optical system with continuously adjustable focal line length. The laser focusing device is mainly used for high-power laser targeting experiments or work needing high-power light beam line focusing. It has an average focal length F which is freely movable along the optical axis1The movable array cylindrical lens and a relatively movable array cylindrical lens have a variable distance delta1Has an average focal length of F2The incident beam passes through the movable and fixed array cylindrical lenses and then passes through a relatively fixed array cylindrical lens which is coaxial with the incident beam and has a fixed distance delta2The aspherical lens can obtain a uniform linear light spot. The focal line obtained by the invention has the advantages of uniform light intensity distribution height, high aspect ratio, continuously adjustable length and the like.
Description
The present invention is the continuously adjustable uniform line Focused Optical system of a kind of focal line length.Be mainly used in practice shooting experiment or need in the work of high power-beam line focus of high power laser light.
In the research of X-ray laser, the high-power laser beam of incident need be pooled a focal line irradiation X-ray laser target usually, to obtain the output of X-ray laser.In experimental study, this focal line should satisfy: 1) high aspect ratio, and length is the cm magnitude, width is as far as possible little, is generally tens to hundred micron dimensions, to obtain high irradiance power density; 2) should be even as far as possible along the light distribution of focal line length direction, so that target surface is evenly thrown light on; 3) laser focal line length direction should be vertical as much as possible with the incoming laser beam that is converged, to improve the coupling efficiency of X-ray laser target to pump light; 4) focal line length elongates or shortens to two ends, upper edge Symmetrical Continuous in situ, to satisfy the various needs of Physical Experiment; 5) high capacity usage ratio.
High power laser light line focus optical system is a lot of at present, but mainly contain 1) non-spherical lens and single-column face (or the two relative column spinner faces) lens combination (L.G.Sappala of U.S.'s lawrence livermore laboratory (LLNL), LaserProgram Report (LLNL) 1984,2-47～52.); 2) non-spherical lens of Britain's Rutherford experiment chamber (RAL) and off-axis spherical mirror system (I.N.Ross et al, J.Phys.E:Science.Instrument, 18 (1), 169,1985; I.N.Ross et al, Appl.Opt., 26 (9), 1585,1987) and 3) Chinese Academy of Sciences's Shanghai ray machine non-spherical lens and cylindrical lenses array system (Chen Wannian, Wang Shusen etc., optics journal, 11 (9), 829,1991) etc.
The used system of LLNL and RAL can both produce high aspect ratio, the continuously adjustable focal line of length.But the light intensity of the every bit on these two kinds of focal lines that method produced all be incident beam along on the cross section perpendicular to the integration of the light intensity of the corresponding line element of focal line direction.For the pump beam (like this generally speaking) of a branch of circle, the light distribution of focal line length direction is the strongest in the middle of must being, weaken gradually to zero on both sides, i.e. light distribution is very uneven.Although diaphragm that can be specific according to the laser beam intensity distribution design for example can adopt rectangular aperture to obtain the uniform focal line of light distribution for the uniform incident beam of intensity distributions on the cross section.But so, the energy more than 36% of incident beam has just been fallen by retaining.And for any large laser system, the light distribution of its output beam all can not be uniform or regular distribution, even therefore add diaphragm, still can not get the uniform focal line of light distribution.Above-mentioned prior art 3) system that adopted of Chinese Academy of Sciences's Shanghai ray machine, incident beam is divided into some bundle beamlets, every bundle beamlet produces a focal line that length is identical alone, these focal lines are superimposed fully, compensation is average mutually, thereby obtain the focal line of a well-proportioned high aspect ratio of light distribution, and reduced requirement the incident beam quality.From the geometrical optics angle, establishing incident beam is equal width of cloth plane wave, if the unevenness of light distribution on the focal line is defined as
η＝(I
max-I
min)/(I
max+I
min) (1)
Then when the row array number is two, η is about 27%, and the row array number is 3 o'clock, and η is about 14%, and the row array number is 4 o'clock, and η is about 9%, when the row array number more than six the time, η is less than 5%.The energy loss of this system is mainly from the junction of each array unit, and the face that herein is in the light is very little, adds reflection of lens interface and medium absorption, and the gross energy utilization factor can reach more than 95%.The striped that is produced by multiple-beam interference is very fine and closely woven, can eliminate voluntarily by the heat-conduction effect of electronics in the plasma.But the shortcoming of this system is each Array System only can be produced a length and be
L=df
a/ f
c(2) focal line, wherein d is the width of cylindrical lenses array unit, f
aBe the focal length of non-spherical lens, f
cIt is the focal length of cylindrical lenses array unit.Because d, f
aAnd f
cAll be invariant, focal line length is nonadjustable.And often need change focal line length in the research experiment.For this reason, be necessary for this system of the many covers of various required focal line Design of length manufacturing, its cost is high, and conversion to get up be very inconvenient.The more important thing is that experiment and diffraction theory the analysis showed that actual conditions are, because the diffraction effect that array unit edge causes particularly locates that near the two ends of focal line tangible intensity fluctuation is arranged on the focal line, and this fluctuating can not come floating by increasing the array number.From Fig. 4 as seen, when the row array number is 4, because the heterogeneity that diffraction causes can be up to 25%, far above 9% of aforementioned geometrical optics prophesy.
In other application, some even lamp optical systems are also arranged, more representational 4) be " light beam integrating system " (Fahlen, Theodore.S et al, EUROPEANT PATENT 0 232 037 A2,1987) that are used for the semiconductor technology aspect.This is a baroque system, and to forming with a plus lens, every group of quadrature cylindrical lens is to being made up of two orthogonal cylindrical lenses of generatrix direction again by two groups of quadrature cylindrical lenses arrays for it.Said elements is contained on the specific adjusting mechanism, make two groups of quadrature cylindrical lenses between distance and the distance between every group of quadrature cylindrical lens centering two cylindrical lens adjustable, then when regulate two groups of cylindrical lenses between distance and every group of cylindrical lens centering two cylindrical lenses array between apart from the time, go up the size dimension and the continuously adjustable even surround of aspect ratio that just can obtain the field of illumination at working face (back focal plane of plus lens).Yet because its application purpose difference, it requires the very big (9-400mm of the even illumination size of light beam that power is lower
2) perform region, and this system is made up of five optical elements, and the light beam convergent point is arranged in the light path, thus it can not be in the x-ray laser experiment incident power up to 10
12W/cm
2Use under the condition of magnitude.Therefore the bigger aberration of two groups of quadrature cylindrical lenses to causing that also some are difficult to eliminate of this system in fact also can not produce the focal line that a live width has only tens to 100 microns high aspect ratio.And, the same with aforesaid cylindrical lenses array system, can not exempt the unevenness that diffraction causes.
In sum, present each big laboratory used line focusing system in the X-ray Laser Experiments in the world, main shortcoming or the light distribution inequality that exists, promptly illumination uniformity is bad, the incident optical energy loss is greatly that the energy utilization factor is low, or gained focal line length is non-adjustable.And resemble systems such as " light beam integrating systems ", because its application purpose and service condition differ widely, can not be applied to X-ray laser research experiment.In a word, still there is not the uniform line Focused Optical system that can satisfy aforementioned all requirements simultaneously at present.
The objective of the invention is to adopt a kind of special varifocal cylindrical lenses array optical system, overcome the shortcoming of above-mentioned each system, can under the situation of effectively utilizing the incident beam energy, obtain light distribution highly evenly, the focal line of high aspect ratio, simultaneously can make focal line length adjustable continuously, and the position of focal line, pump light incident angle etc. remain unchanged, and can overcome the illumination unevenness that diffraction causes.
Description of drawings:
Fig. 1: be the structural representation of the continuously adjustable uniform line Focused Optical system of focal line length of the present invention.Wherein the average focal length of 1. removable cylindrical lenses array 1 is F
1, 2. fixedly the average focal length of cylindrical lenses array 2 is F
2, 3. the focal length of non-spherical lens 3 is f
a
Fig. 2: removable or fixedly cylindrical lenses array 1 or 2 structural representations.4 is front elevation; 5 for side view be corresponding to F
i＞0 situation, 6 for top view be corresponding to F
i＜0 situation, i=1 wherein, 2.
Fig. 3: make the optical axis 8 of array unit 9 and the synoptic diagram that mechanical axis 7 departs from.δ wherein
IkBe the bias of optical axis 8 with mechanical axis 7, θ
IkBe transmission direction deflection angle after this array unit of central ray process, f
IkFor the focus of array unit (i=1 wherein, 2, k=1,2 ..., n).
Fig. 4: be the situation of prior art 3 non-spherical lenses and cylindrical lenses array system, the light distribution on the focal line length direction of consideration diffraction effect gained.Design conditions: n=4, f
c=4687.5mm, f
a=750mm, L=10mm.
Fig. 5: under Fig. 4 condition, make the centre two arrays unit focal length in the array change ± 12.5mm the light distribution on the focal line length direction of consideration diffraction effect gained respectively.
Fig. 6: under Fig. 4 condition, make the optical axis 8 of two the array units in centre in the array depart from δ respectively with mechanical axis 7
C2=0.78mm, δ
C3=-0.78mm, the light distribution on the focal line length direction of consideration diffraction effect gained.
The structure of the length-adjustable uniform line focusing system of focal line of the present invention and operation principle as Shown in Figure 1, it by a removable cylindrical lenses array 1, one fixedly the array cylinder is saturating Mirror 2 and a non-spherical lens 3 consist of. Removable cylindrical lenses array 1 and fixing Cylindrical lenses array 2 as shown in Figure 2, respectively by the cylindrical lens array of n block length bar shaped The generatrix direction of cylindrical axis is parallel along being parallel in unit, close-packed arrays and consist of all row Array element has identical width and has
D=D/n (3) wherein D is the incoming laser beam bore.N 〉=2 are the row array number.The focal length of the n of removable cylindrical lenses array 1 array unit is respectively f
11, f
12..., f
1n, their average focal length is F
1, fixedly the focal length of the array unit of cylindrical lenses array 2 is respectively f
21, f
22..., f
2n, their average focal length is F
2And satisfy
f
i1≠f
i2≠……≠f
in (i＝1，2) (4)
Δ f
Ik/ F
i=(f
Ik-F
i)/F
i≤ 5% (k=1,2 ..., n) the array unit bus orientation of (5) removable cylindrical lenses array 1 and fixing cylindrical lenses array 2 is identical, and the direction that they advance according to incident beam is placed on the vertical plane of optical axis of incident beam successively.Non-spherical lens 3 places fixedly after the cylindrical lenses array 2, the optical axis coincidence of its optical axis and incident beam.By geometrical optics relation, be not difficult to obtain focal line length and be
L＝-dfa(F
1+F
2+Δ
1)/(F
1F
2) (6)
Δ wherein
1Be removable and spacing that fix two cylindrical lenses arrays, f
aFocal length for non-spherical lens.By formula (6) and Fig. 1, if make the fixedly distance, delta between the cylindrical lenses array 2 and non-spherical lens 3
2Fixing (Δ
2Be constant) removable cylindrical lenses array 1 is moved freely before and after optical axis, then the focal line length L will be along with Δ
1Changing continuously and change continuously, is a kind of simple linear relationship between them.Know that by Fig. 1 when high power laser light incides the cylindrical lenses array system, be divided into n bundle beamlet, every bundle beamlet produces a focal line vertical with generatrix direction alone at non-spherical lens 3 back focal plane places.Every light intensity is the integrations of each array unit corresponding point along the incident beam light intensity of generatrix direction on the focal line.Therefore, the light distribution of the focal line that each array unit produces alone is uneven, but the focal line that all arrays unit produces all is superimposed, and compensation is average mutually, just can obtain a uniform focal line.Even the incident beam spatial intensity distribution is inhomogeneous, because the superposed average of many focal lines also can make this unevenness reduce about n doubly, thereby the inhomogeneity requirement of the space distribution of incident beam light intensity is also greatly reduced.In principle, n is big more, and uniformization effect is good more, just can obtain effect preferably during but general n=4-6.Yet, resemble shown in Figure 4 because diffraction caused inhomogeneously but can not come floatingly by increasing the row array number, the way of solution has two:
The one, the different each other or focal length that makes each array unit on the fixing cylindrical lenses array 2 of the focal length that makes each array unit on the removable cylindrical lenses array 1 is difference each other, promptly satisfy (4), (5) formula, make that the length of each sub-focal line is different, the stack of staggering each other of their diffraction pattern obtains a focal line uniformly.
The 2nd, make removable cylindrical lenses array 1 or fixedly in the cylindrical lenses array 2 optical axis 8 of each array unit 9 depart from 7 one δ of mechanical axis of array unit itself respectively
IkDistance, make beamlet by the array group after, the transmission direction of its central ray departs from a little angle theta
Ik=δ
Ik/ f
Ik, as shown in Figure 3.The online length direction of sub-focal line that this angle causes each beamlet to converge produces a displacement θ
Ik* f
a(usually less than L 5%) makes the stack of staggering each other of the diffraction pattern of each sub-focal line, thereby the diffraction heterogeneity is floating.
In zoom system, pancreatic system, when focal line length not simultaneously, for the variable quantity that obtains the desired array of best uniformization effect unit focal length or each array unit optical axis are different to the bias of its mechanical axis, but geometrical optics is calculated in conjunction with diffraction theory and is shown, can select one group of parameter, make focal line length can both obtain satisfied result in desired variation range.
When incident beam passes through the cylindrical lenses array system, the refraction of light beam occurs over just the direction vertical with bus, and be parallel to not refraction on the direction of bus, it is parallel with optical axis that transmission direction still keeps, therefore the horizontal focal line position that produces of system is all the time at the back focal plane place of non-spherical lens 3, and focal line length is flexible symmetrically along two ends.Removable cylindrical lenses array 1, fixedly cylindrical lenses array 2 and non-spherical lens 3 are done as a whole the design, carry out image difference balance, thereby obtain the focal line of high aspect ratio.
In fact, average focal length F
2Can just also can bear.Here we make F
1The＞0th, on perpendicular to generatrix direction, certain effect of converging is arranged by removable cylindrical lenses array 1 each beamlet of back for making incident beam, make this director light beam beamwidth less than d when arriving fixedly cylindrical lenses array 2, be unlikely to overflow.Each parameter can be according to actual needs determined by (6) formula, only notes to avoid in the light path light beam to converge too for a short time so that break optical element and get final product.
Advantage of the present invention:
1. it is adjustable continuously to adopt varifocal set of cylindrical lenses to realize that focal line length goes up in situ; 2. make removable cylindrical lenses array 1 or fixedly the focal length of each array unit of cylindrical lenses array 2 is different each other, perhaps make removable cylindrical lenses array 1 or fixedly the optical axis of cylindrical lenses array 2 each array unit depart from the way of its mechanical axis a little, make the stack of staggering each other of the diffraction pattern of each sub-focal line, to eliminate because the focal line illumination unevenness that diffraction was caused, thereby obtain more uniform focal line.3. relatively simple for structure, because the bus of all cylindrical lens array units all is parallel in the system, might be with removable cylindrical lenses array 1, fixedly cylindrical lenses array 2 and non-spherical lens 3 are done as a wholely to carry out optical design with the balance aberration, thereby obtain than the narrower focal line of " light beam integrating system " live width; 4. change the easy to operate of focal line length, can greatly increase work efficiency.
Embodiment:
Under the cylindrical lens array condition that Fig. 4 shows, make the focal length of two the array units in centre in the cylindrical lenses array change f respectively into
C2=4700mm and f
C3The focal line that it is η ≈ 11% that=4675mm can obtain a light distribution unevenness, as shown in Figure 5; Still under the cylindrical lens array condition that Fig. 4 shows, make the optical axis 8 of the centre two array units in the cylindrical lenses array depart from its mechanical axis 7 δ respectively
C2=0.78mm, δ
C3=-0.78mm is corresponding to θ
C2=0.17mrad and θ
C3=-0.17mrad can obtain the focal line of a η ≈ 10%, as shown in Figure 6.
In general X-ray Laser Experiments, required focal line length L is generally between the 10-30mm.If the beamwidth of incident laser light beam is 250mm, non-spherical lens 3 focal lengths are 900mm, adopt the zoom cylindrical lenses array group of n=4, then work as F
1=580mm, F
2During=-435mm, Δ
1In the 10-100mm scope, move and to satisfy., be to eliminate diffractive effect here, make the focal length of the centre two array units in the fixing cylindrical lenses array 2 change f respectively into
22=-436.5mm and f
23During=-433.8mm, just can obtain being similar to the result of Fig. 5; Make the optical axis 8 of the centre two array units in the fixing cylindrical lenses array 2 depart from its mechanical axis 7 δ respectively
22=0.1mm, δ
23=-0.1mm is corresponding to θ
22=0.23mrad, θ
23Can obtain the result similar during=-0.23mrad to Fig. 6.Because of F
1With Δ
1Compare enough greatly, when beamlet incided fixedly array 2, light beam converged not severely, was unlikely that laser power to occur too high and break the situation of array 2, was feasible on the engineering.
Claims (3)
1. continuously adjustable uniform line Focused Optical system of focal line length, contain by n strip cylindrical lens array unit and be arranged in parallel and the cylindrical lenses array (1), (2) that constitute along the generatrix direction that is parallel to cylindrical axis, with a non-spherical lens (3), it is characterized in that the cylindrical lenses array (1) that incident beam at first enters is to be respectively f along what the optical axis front and back moved freely by n focal length
11, f
12..., f
1nThe average focal length that constitutes of array unit be F
1Removable cylindrical lenses array (1), light beam injects removable relatively cylindrical lenses array (1) then transformable distance, delta
1Be respectively f by n focal length
21, f
22..., f
2nThe average focal length that constitutes of array unit be F
2The removable cylindrical lenses array of fixedly cylindrical lenses array (2) (1) and the array unit bus orientation of fixing cylindrical lenses array (2) identical, and two cylindrical lenses array all be placed on the face vertical with incident beam, entering with fixing cylindrical lenses array (2) through the fixing light beam of cylindrical lenses array (2) has the fixed range Δ again
2Optical axis and the focal length that coincides of incident beam optical axis be f
aNon-spherical lens (3).
2. according to the continuously adjustable uniform line Focused Optical system of the described a kind of focal line length of claim 1, it is characterized in that constituting the focal distance f of n array unit of removable cylindrical lenses array (1)
11, f
12..., f
1nWith their average focal length be F
1, and constitute the fixedly focal distance f of n array unit of cylindrical lenses array (2)
21, f
22..., f
2nWith their average focal length be F
2, should satisfy (1) and (2) formula:
f
i1≠f
i2≠…≠f
in (i＝1，2) (1)
Δf
ik/F
i＝(f
ik-F
i)/F
i≤5％(k＝1，2，…，n) (2)
3. according to the continuously adjustable uniform line Focused Optical system of the described a kind of focal line length of claim 1, it is characterized in that constituting removable cylindrical lenses array (1) or fixedly the optical axis (8) of each array unit (9) of cylindrical lenses array (2) mechanical axis (7) that departs from array unit itself respectively a δ is arranged
IkDistance, and common δ
Ik＜5%L (wherein L is a focal line length).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93112629 CN1033342C (en) | 1993-12-21 | 1993-12-21 | Uniform line focusing optical system with continuously adjustable focal line length |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93112629 CN1033342C (en) | 1993-12-21 | 1993-12-21 | Uniform line focusing optical system with continuously adjustable focal line length |
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| CN1090649A CN1090649A (en) | 1994-08-10 |
| CN1033342C true CN1033342C (en) | 1996-11-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 93112629 Expired - Fee Related CN1033342C (en) | 1993-12-21 | 1993-12-21 | Uniform line focusing optical system with continuously adjustable focal line length |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1440339B1 (en) * | 2001-08-28 | 2013-07-03 | Finisar Corporation | Method and apparatus for precision tuning an optical filter using a ball-end joint |
| DE102004020250A1 (en) * | 2004-04-26 | 2005-11-10 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg | Apparatus and method for optical beam homogenization |
| CN102566046B (en) * | 2011-11-03 | 2014-08-13 | 中国科学院上海光学精密机械研究所 | Design method of cylindrical lens array for improving homogeneous degree of focal line |
| CN105586486A (en) * | 2015-11-17 | 2016-05-18 | 中国航空工业集团公司北京航空制造工程研究所 | Power density compensation method for laser shock processing metal part surface |
| CN106695117A (en) * | 2017-02-13 | 2017-05-24 | 武汉澳谱激光科技有限公司 | Optical element achieving axial uniform linear focal spots |
| CN110435160A (en) * | 2019-09-09 | 2019-11-12 | 广东利元亨智能装备股份有限公司 | A kind of laser welding head and method for laser welding |
| CN113189013B (en) * | 2021-04-07 | 2023-03-24 | 山西大学 | Photoacoustic sensing device and method |
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