CN113253468A - Laser homogenizing and shaping system based on micro-lens array - Google Patents
Laser homogenizing and shaping system based on micro-lens array Download PDFInfo
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- CN113253468A CN113253468A CN202110396771.7A CN202110396771A CN113253468A CN 113253468 A CN113253468 A CN 113253468A CN 202110396771 A CN202110396771 A CN 202110396771A CN 113253468 A CN113253468 A CN 113253468A
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- 238000007493 shaping process Methods 0.000 title claims abstract description 31
- 239000005304 optical glass Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 abstract description 19
- 238000000265 homogenisation Methods 0.000 abstract description 9
- 238000003491 array Methods 0.000 description 13
- 238000005286 illumination Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 6
- 239000013307 optical fiber Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0961—Lens arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- Physics & Mathematics (AREA)
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- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
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Abstract
The invention discloses a laser homogenizing and shaping system based on a micro lens array, which can homogenize, shape and collimate a semiconductor laser beam by adopting the combination of the micro lens array and an aspheric lens, thereby achieving the aim of uniform laser energy. The technical scheme of the invention comprises a first cylindrical surface micro-lens array, a second cylindrical surface micro-lens array, a third cylindrical surface micro-lens array, a first micro-lens array, a second micro-lens array, a spherical lens and an aspheric lens which are coaxially arranged in sequence from front to back. The laser beam enters from the front, wherein the first cylindrical micro lens array collimates the laser beam in the slow axis direction of the light source, and the second cylindrical micro lens array and the third cylindrical micro lens array expand and collimate the laser beam in the fast axis direction of the light source; the first micro lens array, the second micro lens array, the spherical lens and the aspheric lens are combined to form laser beams to be homogenized and shaped, and therefore the result after laser homogenization and shaping is output.
Description
Technical Field
The invention relates to the technical field of semiconductor laser illumination, in particular to a laser homogenizing and shaping system based on a micro-lens array.
Background
Semiconductor lasers have been developed rapidly since their birth, and compared with other types of lasers, semiconductor lasers have the advantages of small size, low cost, high efficiency, long service life and the like, and have been widely used in the fields of industry, military, medical treatment and the like for a long time. Semiconductor lasers are mainly classified into single tubes, linear arrays, and stacked arrays according to their structures. The stacked array semiconductor has small volume and energy output power of more than kilowatt, so the stacked array semiconductor is widely applied in many fields. However, due to the limitation of the waveguide structure of the semiconductor laser, the light intensity distribution of the output light beam is not uniform, and the far-field light spot distribution is elliptical gaussian, i.e., the quality balance of the fast and slow axis light beam is poor, and the energy utilization rate is not high.
In order to meet the requirements of laser illumination of different application occasions, homogenization, circular or rectangular shaping and collimation variable divergence angle processing with different requirements are carried out on laser beams.
The technical scheme for realizing laser homogenizing and shaping at present mainly comprises a binary diffraction lens, an aspheric lens group, a laser homogenizing sheet, an optical fiber waveguide, a micro lens array and the like.
The binary diffraction lens is etched on the surface of the lens through a mask processing technology to obtain a step structure, the lens is a pure-phase optical device and has high diffraction efficiency, but the design method is complex, a proper phase distribution function such as a G-S algorithm, an annealing algorithm and the like needs to be selected, the more the steps are, the higher the etching precision is required, the more the processing difficulty is, and therefore the design period and the cost are difficult to control.
The aspheric lens group realizes the shaping, homogenizing and collimating treatment of the beams of the transverse axis and the longitudinal axis by utilizing a plurality of aspheric lenses, and the method has the advantages of simple structure and small energy loss, but the aspheric lens group can only homogenize the laser beams with specific energy distribution, has no universality, and has large processing difficulty and high cost. The laser homogenizing sheet can only realize the homogenizing aim of multimode laser, and the shaping effect is not ideal.
The optical fiber waveguide method utilizes the total reflection principle of light to reflect light coupled into an optical fiber for multiple times, so that light spots with uniform energy distribution are obtained on the exit surface of the optical fiber, but laser shaping and homogenization can be realized only at the focus, so that the size of the light spots is limited to a certain extent.
The micro-lens array has precise structure and large light transmission quantity, but the divergence angle of the homogenized light beam is large.
The homogenization, shaping and collimation effects of the semiconductor laser beam are difficult to realize by using the methods singly.
Therefore, a new system with laser shaping, homogenizing and collimating functions is needed to solve the above problems.
Disclosure of Invention
In view of this, the invention provides a laser homogenizing and shaping system based on a micro lens array, which can homogenize, shape and collimate a semiconductor laser beam by adopting a combination of the micro lens array and an aspheric lens, thereby achieving the purpose of uniform laser energy.
In order to achieve the purpose, the technical scheme of the invention is as follows: a laser homogenizing and shaping system based on a micro-lens array comprises a first cylindrical micro-lens array, a second cylindrical micro-lens array, a third cylindrical micro-lens array, a first micro-lens array, a second micro-lens array, a spherical lens and an aspheric lens, wherein the first cylindrical micro-lens array, the second cylindrical micro-lens array, the third cylindrical micro-lens array, the first micro-lens array, the second micro-lens array, the spherical lens and the aspheric lens are coaxially arranged in front of and behind the micro-lens array.
The laser beam enters from the front, wherein the first cylindrical micro lens array collimates the laser beam in the slow axis direction of the light source, and the second cylindrical micro lens array and the third cylindrical micro lens array expand and collimate the laser beam in the fast axis direction of the light source; the first micro lens array, the second micro lens array, the spherical lens and the aspheric lens are combined to form laser beams to be homogenized and shaped, and therefore the result after laser homogenization and shaping is output.
Further, the optical axis adjusting device further comprises a front sleeve and a rear sleeve which are coaxially arranged, and the front sleeve and the rear sleeve can move along the optical axis.
A first cylindrical surface micro-lens array, a second cylindrical surface micro-lens array, a third cylindrical surface micro-lens array and a first micro-lens array are sequentially arranged in the front sleeve from front to back.
The rear sleeve is provided with a second micro lens array, a spherical lens and an aspheric lens in sequence from front to back.
Furthermore, the first cylindrical surface micro-lens array material is optical glass BK-7, and the unit micro-cylindrical lenses are convex lenses.
Furthermore, the cylindrical micro-lens array material is optical glass BK-7, unit micro-cylindrical lenses of the cylindrical micro-lens array material are concave lenses, and the array direction is vertical to the cylindrical micro-lens array.
Furthermore, the cylindrical micro-lens array material is optical glass BK-7, unit micro-cylindrical lenses of the cylindrical micro-lens array material are convex lenses, and the array direction is vertical to the cylindrical micro-lens array.
Furthermore, the first microlens array material is optical glass BK-7, unit microlenses of the first microlens array material are circular or rectangular, and the unit microlenses are convex lenses.
All parameters of the second micro-lens array are consistent with those of the first micro-lens array, and the direction of the second micro-lens array is consistent.
Furthermore, the spherical lens material is optical glass S-LAH64, and the lens is a convex lens.
Furthermore, the aspheric lens material is optical glass BK-7.
Furthermore, a detector is arranged behind the aspheric lens, and the result after laser homogenization and shaping is projected on the detector to form a light spot; the size of the light spot is changed by adjusting the distance between the first sleeve and the second sleeve.
Has the advantages that:
in the working process of the invention, the cylindrical surface micro lens array is adopted to collimate the light beam output by the semiconductor stacked array light source, the micro lens array and the spherical lens are adopted to homogenize and shape uneven light beams, the aspheric lens is adopted to collimate the laser beam, and the size of far-field light spots is controlled by moving the relative positions of the two micro lens arrays along the optical axis direction, so that the laser beam meets the requirements of different application occasions. The three functions of light uniformization, shaping and zooming are realized by utilizing the two micro lens arrays and the spherical lens, the illumination light spot with a certain shape, uniform energy distribution and continuously adjustable divergence angle is obtained, the shape of the illumination light spot is the same as that of the micro lens array unit, zooming is simple, and realization and operation are easy.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of embodiment 1.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The principle of the invention is as follows: two mutually vertical cylindrical micro lens arrays are adopted to carry out fast and slow axis collimation on non-uniform light beams output by the semiconductor stacked array laser, one cylindrical micro lens array is adopted to expand the beam of the light beams output by the semiconductor stacked array laser in the fast axis direction, two identical micro lens arrays and one spherical lens are adopted to carry out homogenization and shaping on the collimated light beams, and one aspheric lens is adopted to carry out collimation on the homogenized and shaped light beams. When the distance between the two micro lens arrays is changed, the system zooming function can be realized, and the continuous adjustment of the divergence angle of the illumination laser can be realized. Finally, the laser energy is uniform, the laser has a certain shape such as a round shape or a rectangular shape, and the divergence angle is continuously adjustable, so that the requirements of laser illumination of different application occasions are met.
The invention provides a laser homogenizing and shaping system based on a micro-lens array, which is characterized in that: the device comprises a cylindrical micro-lens array 1, a cylindrical micro-lens array 2, a cylindrical micro-lens array 3, a micro-lens array 4, a micro-lens array 5, a spherical lens 6, an aspheric lens 7, a sleeve 8 and a sleeve 9.
A laser homogenizing and shaping system based on a micro-lens array is composed of three cylindrical surface micro-lens arrays, two micro-lens arrays, a spherical mirror and an aspherical mirror. Laser beams enter from the three cylindrical surface micro-lens arrays firstly, the first cylindrical surface micro-lens array realizes the light collimation in the slow axis direction of the light source, and the second cylindrical surface micro-lens array and the third cylindrical surface micro-lens array realize the beam expansion and collimation in the fast axis direction of the light source. The light homogenizing and shaping system composed of the two micro lens arrays and the spherical lens realizes light homogenizing and shaping of uneven light beams, and uniform light spots are obtained on a focal plane of the spherical lens. And a non-spherical lens is used for realizing the collimation of the homogenized and shaped light beam, and light spots with good illumination are obtained in a far field. The function of divergence angle change can be realized by adjusting the relative position of the two micro-lens arrays, and the size of far-field illumination light spots is changed.
The material of the cylindrical surface micro-lens array 1 is optical glass BK-7, and unit micro-cylindrical lenses of the cylindrical surface micro-lens array are convex lenses, so that the collimation of light beams in the slow axis direction of the semiconductor stacked array laser is realized.
The material of the cylindrical surface micro-lens array 2 is optical glass BK-7, unit micro-cylindrical lenses of the cylindrical surface micro-lens array are concave lenses, the array direction is vertical to the cylindrical surface micro-lens array 1, the cylindrical surface micro-lens array 1 is positioned behind the cylindrical surface micro-lens array 1, the distance between the cylindrical surface micro-lens array 1 and the unit micro-cylindrical lenses is fixed, the distance is determined by light source parameters, and beam expansion of light beams in the fast axis direction of the semiconductor stacked array laser is achieved.
The material of the cylindrical micro-lens array 3 is optical glass BK-7, unit micro-cylindrical lenses of the cylindrical micro-lens array are convex lenses, the array direction is vertical to the cylindrical micro-lens array 1, the cylindrical micro-lens array 2 is positioned behind the cylindrical micro-lens array, the distance between the cylindrical micro-lens array and the cylindrical micro-lens array 2 is fixed, the distance is determined by light source parameters, and collimation of light beams in the fast axis direction of the semiconductor stacked array laser is achieved.
The micro lens array 4, the micro lens array 5 and the spherical lens 6 realize homogenization and shaping processing of the non-uniform laser beams together.
The material of the micro-lens array 4 is optical glass BK-7, the unit micro-lenses can be round or rectangular and the like, the shapes of the unit micro-lenses can be determined according to application requirements, the unit micro-lenses are convex lenses, the unit micro-lenses are positioned behind the cylindrical micro-lens array 3, the distance between the unit micro-lenses and the cylindrical micro-lens array 3 is fixed, and differential processing and shaping processing of non-uniform laser beams are achieved.
All parameters of the micro lens array 5 are consistent with those of the micro lens array 4, the direction is also consistent, the distance between the micro lens array 5 and the micro lens array 4 is adjustable after the micro lens array 4, and differential and shaping processing of non-uniform laser beams is achieved.
The spherical lens 6 is made of optical glass S-LAH64, the lens is a convex lens, is positioned behind the micro lens array 5, has a fixed distance with the micro lens array 5, and the distance is determined by the parameters of the micro lens array 5 and the spherical lens 6, so that the integral homogenization treatment of the shaped light beam is realized.
The aspheric lens 7 is made of optical glass BK-7, is positioned behind the spherical lens 6, is fixed at a distance from the spherical lens 6, and is determined by parameters of the spherical lens 6 and the aspheric lens 7, so that the collimation treatment of the homogenized and shaped light beam is realized. The component does not need to be designed, and the existing products such as Thorlabs aspheric lens series can be selected according to the collimation requirement, so that the complex processing process of aspheric surfaces is avoided.
The sleeve 8 fixes the cylindrical microlens array 1, the cylindrical microlens array 2, the cylindrical microlens array 3, and the microlens array 4 so that the relative positions thereof are unchanged.
The sleeve 9 fixes the microlens array 5, the spherical lens 6, and the aspherical lens 7 so that their relative positions are unchanged.
By changing the distance between the microlens array 4 and the microlens array 5, that is, the distance between the two sleeves, in the direction of the optical axis, it is possible to continuously change the divergence angle of the illumination light beam and change the size of the far field illumination spot.
Example 1:
the system architecture is shown in figure 2. The embodiment is applied to laser active imaging illumination and comprises a semiconductor multi-row bar laser, a 3-piece cylindrical surface micro-lens array, a 2-piece micro-lens array, 1-piece spherical lens, 1-piece aspheric lens and a sleeve, wherein the aspheric lens is AL2550-B of Thorlabs company. The divergence angle of the final output laser can be continuously changed at 8-32mrad, and the shape of the light spot is a rectangle with the aspect ratio of 4: 3.
The parameters of the above system devices are shown in table 1:
TABLE 1
In the system, the divergence angle is continuously changed by adjusting the relative position of 2 micro lens arrays, and when the distance between the micro lens array 4 and the micro lens array 5 is changed from 9mm to 3mm, the divergence angle of the emitted laser is continuously changed from 8 mrad to 32 mrad.
A detector is arranged at 300m of the far field to receive the laser spot. The illumination device which does not adopt a micro-lens array and only uses an aspheric lens has poor brightness uniformity of light spots in a view field. The laser spot obtained at 300m far field of the invention is 4:3 rectangular shape, filling the whole field of view and having uniform brightness. Example 1 thus provides better illumination conditions enabling good imaging results with laser active imaging systems.
The invention relates to an optical system for shaping, homogenizing and collimating semiconductor laser beams, in particular to a device for shaping, homogenizing and collimating semiconductor laser beams by utilizing a micro-lens array and an aspheric lens combination.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A laser homogenizing and shaping system based on a micro-lens array is characterized by comprising a first cylindrical micro-lens array (1), a second cylindrical micro-lens array (2), a third cylindrical micro-lens array (3), a first micro-lens array (4), a second micro-lens array (5), a spherical lens (6) and an aspheric lens (7), which are coaxially arranged from front to back in sequence;
laser beams enter from the front, wherein the first cylindrical micro lens array (1) collimates the laser beams in the slow axis direction of a light source, and the second cylindrical micro lens array (2) and the third cylindrical micro lens array (3) expand and collimate the laser beams in the fast axis direction of the light source; the first micro lens array (4), the second micro lens array (5), the spherical lens (6) and the aspheric lens (7) are combined to carry out light homogenizing and shaping on the laser beam, so that the result of laser homogenizing and shaping is output.
2. The system of claim 1, further comprising a front sleeve (8) and a rear sleeve (9) coaxially arranged, the front sleeve (8) and the rear sleeve (9) being movable along the optical axis;
the front sleeve (8) is internally provided with the first cylindrical micro-lens array (1), the second cylindrical micro-lens array (2), the third cylindrical micro-lens array (3) and the first micro-lens array (4) from front to back in sequence;
the rear sleeve (9) is provided with the second micro lens array (5), the spherical lens (6) and the aspheric lens (7) in sequence from front to back.
3. The system as claimed in claim 1 or 2, wherein the first cylindrical microlens array (1) is made of optical glass BK-7, and the unit micro cylindrical lenses are convex lenses.
4. The system as claimed in claim 1 or 2, wherein the material of the cylindrical micro-lens array (2) is optical glass BK-7, the unit micro-cylindrical lenses of the cylindrical micro-lens array are concave lenses, and the array direction is perpendicular to the cylindrical micro-lens array (1).
5. The system as claimed in claim 1 or 2, wherein the material of the cylindrical micro-lens array (3) is optical glass BK-7, the unit micro-cylindrical lenses of the cylindrical micro-lens array are convex lenses, and the array direction is vertical to the cylindrical micro-lens array (1).
6. The system as claimed in claim 1 or 2, wherein the first microlens array (4) is made of optical glass BK-7, the unit microlenses of which are circular or rectangular and the unit microlenses are convex
All parameters of the second micro-lens array (5) are consistent with those of the first micro-lens array (4), and the direction is consistent.
7. The system according to claim 1 or 2, characterized in that the spherical lens (6) is made of optical glass S-LAH64 and is a convex lens.
8. A system as claimed in claim 1 or 2, characterized in that the aspherical lens (7) is made of optical glass BK-7.
9. The system according to claim 2, characterized in that a detector is arranged behind the aspheric lens (7), and the result of the laser homogenizing and shaping is projected to form a light spot on the detector;
the size of the light spot is changed by adjusting the distance between the first sleeve and the second sleeve.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116047777A (en) * | 2023-03-02 | 2023-05-02 | 季华实验室 | Variable multiple uniform laser generating device |
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