CN113826001A - Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device - Google Patents

Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device Download PDF

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Publication number
CN113826001A
CN113826001A CN202080035351.XA CN202080035351A CN113826001A CN 113826001 A CN113826001 A CN 113826001A CN 202080035351 A CN202080035351 A CN 202080035351A CN 113826001 A CN113826001 A CN 113826001A
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China
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light
spectrum
inspection
region
sampling
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CN202080035351.XA
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Chinese (zh)
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丹羽恒治
草野民男
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Kyocera Corp
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Kyocera Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Abstract

The spectrum determination device acquires a captured image of a sampling target portion including a first region and a second region where a first appearance abnormality included in a predetermined classification is present and spectrum information of sampling light for irradiating the sampling target portion to capture the captured image, calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image, and determines a spectrum of the inspection light for irradiating the inspection target portion to detect whether the inspection target portion includes a second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light.

Description

Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority from the japanese patent application No. 2019-99723 (application No. 5/28/2019), and the disclosure of this prior application is incorporated herein by reference in its entirety.
Technical Field
The present disclosure relates to a spectrum determination device, a spectrum determination method, a spectrum determination program, an illumination system, an illumination device, and an inspection device.
Background
As an appearance inspection apparatus for inspecting the appearance of an object, an illumination apparatus for illuminating the object is known (for example, see patent document 1).
Prior art documents
Patent document
Patent document 1: international publication No. 2018/150607
Disclosure of Invention
A spectrum determination device according to an embodiment of the present disclosure includes a processor. The processor acquires a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image. The sampling object part includes a first region in which a first appearance abnormality included in a given classification is located and a second region extending from the first region to at least a part of a given range, and the second region has a region in which the first appearance abnormality is not located. The processor calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image. The processor determines a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light.
A spectrum determination method according to an embodiment of the present disclosure includes a step of acquiring a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image. The sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range. The spectrum determination method includes a step of calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image. The spectrum determination method includes a step of determining a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification, based on the evaluation index and the spectrum information of the sampling light.
The spectrum determination program according to an embodiment of the present disclosure is executed by a processor. The spectrum determination program includes a step of acquiring a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image. The sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range. The spectrum determination program includes a step of calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image. The spectrum determination program includes a step of determining a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light.
An illumination system according to an embodiment of the present disclosure includes an illumination device and a spectrum determination device. The spectrum determining device acquires a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image. The sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range. The spectrum determination device calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image. The spectrum determination device determines a spectrum of the inspection light that irradiates the inspection target portion in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification, based on the evaluation index and the spectrum information of the sampling light. The illumination device emits the inspection light to the inspection target portion.
An illumination device according to an embodiment of the present disclosure includes: a light emitting section; and an illumination control unit that controls the light emitting unit. The illumination control unit acquires information on a spectrum determined based on an evaluation index calculated based on a captured image of a sampling target portion irradiated with sampling light and spectrum information of the sampling light. The illumination control unit causes the light emitting unit to emit inspection light determined by the spectrum. The sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range. The evaluation index is based on at least one of a brightness difference and a chromaticity difference between a portion obtained by imaging the first region and a portion obtained by imaging the second region. The light emitting unit emits the inspection light to an inspection target portion to be inspected for the second appearance abnormality included in the predetermined classification.
An inspection device according to an embodiment of the present disclosure includes an illumination device and a sample holder. The illumination device emits inspection light determined by a spectrum determined based on spectral information of sampling light and an evaluation index calculated based on a captured image of a sampling target portion irradiated with the sampling light. The sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range. The evaluation index is based on at least one of a brightness difference and a chromaticity difference between a portion obtained by imaging the first region and a portion obtained by imaging the second region. The sample holder is configured to be able to arrange the inspection object so that the inspection object is illuminated by the inspection light. The inspection object includes an inspection object portion to be an inspection object of a second appearance abnormality included in the predetermined classification.
Drawings
Fig. 1 is a block diagram showing a configuration example of an illumination system according to an embodiment.
Fig. 2 is a diagram showing a configuration example of a sample.
Fig. 3 is a flowchart showing an example of the procedure of the spectrum determination method according to the embodiment.
Fig. 4 is an external perspective view showing a structural example of the light emitting section.
Fig. 5 is a sectional view a-a of fig. 4.
Fig. 6 is an enlarged view of the circle portion of fig. 5.
Fig. 7 is a block diagram showing a configuration example of the inspection apparatus according to the embodiment.
Fig. 8 is a cross-sectional view showing a configuration example of illuminating a sample with ring illumination.
Fig. 9 is a sectional view showing an example of a configuration for illuminating a sample by telecentric illumination.
Fig. 10 is a flowchart showing an example of the steps of the inspection method according to the embodiment.
Detailed Description
By the illumination method of the inspection object, it is easy to detect defects or appearance abnormality such as color unevenness included in the inspection object, or it is difficult to detect. It is required to improve the accuracy of appearance inspection.
As shown in fig. 1, an illumination system 1 according to an embodiment includes an illumination device 20 and a spectrum determination device 30. The illumination device 20 illuminates the sample 50. The spectrum determining device 30 determines the spectrum of the light emitted from the illumination device 20 toward the sample 50. The light emitted by the illumination device 20 toward the specimen 50 is also referred to as illumination light. The spectrum decision means 30 can decide the spectrum of the illumination light based on the information on the specimen 50. The illumination system 1 may further include an imaging device 40 that captures an image of the specimen 50 as information on the specimen 50.
The illumination device 20 includes a light emitting unit 10 and an illumination control unit 22.
As described later, the light emitting unit 10 emits light having a predetermined spectrum as illumination light. The given spectrum may have a peak wavelength in a wavelength region of 360nm to 430nm, and a peak wavelength in a wavelength region of 360nm to 780nm, for example. Light having a peak wavelength in a wavelength region of 360nm to 430nm is also referred to as violet light. The wavelength region of 360nm to 430nm is also referred to as a violet light region. Light having a peak wavelength in a wavelength region of 360nm to 780nm is also referred to as visible light. The wavelength region of 360nm to 780nm is also referred to as a visible light region. The spectrum of the specific light is measured by a spectroscopic method using, for example, a spectroscopic photometer.
The illumination control unit 22 controls the spectrum or intensity of the light emitted from the light emitting unit 10. The lighting control unit 22 may include at least one processor to provide control and processing capabilities for performing various functions. The processor is capable of executing programs that implement various functions of the illumination control section 22. The processor may be implemented as a single integrated circuit. An Integrated Circuit is also called an IC (Integrated Circuit). The processor may be implemented as a plurality of communicatively coupled integrated circuits as well as discrete circuits. The processor may be implemented based on various other known technologies.
The lighting control section 22 may contain an interface. The lighting control section 22 may be communicably connected with the spectrum determination device 30 by wire or wirelessly via an interface. The interface may include a communication interface such as a LAN (Local Area Network). The interface may implement communication according to various communication schemes such as 4G (4th Generation), 5G (5th Generation), and LTE (Long Term Evolution). The interface may be provided with a Communication interface for non-contact Communication such as infrared Communication or NFC (Near Field Communication). The interface may include a port capable of inputting and outputting a signal based on serial communication standards such as RS232C or RS 485.
The lighting control section 22 may include a storage section. The storage unit may include an electromagnetic storage medium such as a magnetic disk, or may include a memory such as a semiconductor memory or a magnetic memory. The storage unit stores various information and programs executed by the illumination control unit 22. The storage unit may function as a work memory of the illumination control unit 22. At least a part of the storage unit may be configured separately from the illumination control unit 22.
The spectrum determination device 30 may include a determination section 32. The determination unit 32 determines and specifies the spectrum of the light emitted from the illumination device 20. The determination unit 32 may include at least one processor in order to provide control and processing capability for executing various functions. The processor included in the determination unit 32 may have the same or similar configuration as the processor of the illumination control unit 22. The determination section 32 may include an interface. The determination unit 32 may be communicably connected to the lighting device 20 via a wired or wireless interface. The interface included in the determination unit 32 may have the same or similar configuration as the interface of the lighting control unit 22.
The imaging device 40 includes an imaging device such as a camera that images the sample 50.
The illumination system 1 according to the present embodiment is provided in an inspection process of a production line of an industrial product serving as a sample 50. The sample 50 may also include, for example, electronic equipment. The sample 50 may include a circuit board mounted inside the electronic device, or may include electronic components or wires mounted on the circuit board. The sample 50 may also comprise the outer surface of an electronic device. The sample 50 is not limited to these examples. The illumination system 1 is not limited to the inspection process of industrial products, and may be provided in the inspection process of agricultural products such as vegetables, or various products such as dairy products such as cheese, for example. The illumination system 1 and the illumination device 20 may be used for inspecting an article.
The illumination system 1 may be provided in an inspection apparatus 200 (see fig. 7) used by the inspector 8 to visually inspect the appearance of the specimen 50. When the illumination system 1 is provided in the inspection apparatus 200, the inspector 8 visually inspects the appearance of the specimen 50 using the inspection apparatus 200. The inspector 8 can detect the appearance abnormality of the specimen 50 by visual inspection of the appearance. The illumination system 1 requires control of the irradiation light so that the inspector 8 can detect the appearance abnormality of the specimen 50 with high accuracy.
The illumination system 1 may be provided in an abnormality detection device that automatically detects an abnormality in the appearance of the specimen 50 based on an image obtained by imaging the appearance of the specimen 50 by the imaging device 40. Even when the illumination system 1 is provided in the abnormality detection device, the illumination light needs to be controlled so that the abnormality detection device can accurately detect an abnormality in the appearance of the specimen 50.
The illumination light emitted from the illumination system 1 toward the specimen 50 to be inspected is also referred to as inspection light. The spectrum determination device 30 determines the spectrum of the inspection light so that the inspector 8 or the abnormality detection device can accurately detect the appearance abnormality of the sample 50.
As shown in fig. 2, the sample 50 includes a sampling target portion 51. The sampling target unit 51 includes: a first region 51a including an abnormal portion 55; and a second region 51b not including the abnormal portion 55. The abnormal portion 55 corresponds to at least a part of the appearance abnormality of the specimen 50. The second region 51b extends over at least a part of a given range including the first region 51 a. In other words, the second region 51b is located within a given distance from the first region 51 a.
The appearance anomaly can include various means. The appearance abnormality may include an undesirable pattern of concavities, convexities, or protrusions existing on the surface of the specimen 50. The depressions may also comprise indentations. The protrusions may also comprise a curl of the coating or outer facing. The appearance anomaly may include damage such as a flaw, crack, or break into the sample 50. The appearance abnormality may include a form of foreign matter such as dust or dirt adhering to the surface of the sample 50. The appearance abnormality may include a manner in which the color tone of the surface of the sample 50 is different from the inspection standard or the color of the surface of the sample 50 is not uniform. When the sample 50 is a circuit board, the appearance abnormality may include a pattern abnormality such as a whitish line of a wiring mounted on the circuit board or a pattern defect of the wiring.
Appearance anomalies may be classified based on this approach. For example, the scars and the attachment of foreign matter may be classified into different ways of appearance abnormalities. In other words, the appearance anomalies may be classified in a given way. In the case where the appearance abnormality is classified in a given manner, it also appears that the appearance abnormality is included in the given classification. Appearance anomalies may also be classified based on their extent. For example, when the appearance abnormality includes a pattern having irregularities, the appearance abnormality may be classified based on the size of the irregularities. The appearance abnormality included in the first region 51a is also referred to as a first appearance abnormality. In the case where the first appearance anomaly is included in a given classification, that classification is also referred to as a first classification.
The specimen 50 may further include an inspection target portion 52. The examination target portion 52 may be included in another sample 50 different from the sample 50 including the sampling target portion 51. In fig. 2, the examination target portion 52 is included in the same sample 50 as the sample 50 including the sampling target portion 51. The inspection target portion 52 may include at least a part of the appearance abnormality and may not include the appearance abnormality. In other words, it is unclear whether the inspection target portion 52 includes at least a part of the appearance abnormality or does not include the appearance abnormality. When the inspection target portion 52 includes an appearance abnormality, the appearance abnormality is also referred to as a second appearance abnormality. The second appearance anomaly may be included in a first classification and may also be included in a second classification different from the first classification. In other words, it is unclear in which classification the second appearance abnormality is contained. In this embodiment, the second appearance abnormality is included in the first classification.
Even when it is unclear whether or not the inspection target portion 52 includes the second appearance abnormality, the spectrum determination device 30 determines the spectrum of the inspection light with which the inspection target portion 52 is irradiated based on the inspection result of the first appearance abnormality, so that the second appearance abnormality can be detected with high accuracy.
The spectrum determination device 30 may determine the spectrum of the inspection light by executing the steps of the flowchart shown in fig. 3, for example. The method of determining the spectrum of the inspection light by the spectrum determination device 30 is also referred to as a spectrum determination method. The steps illustrated in fig. 3 may also be implemented as a program executed by a processor. The program executed by the spectrum determination device 30 to determine the spectrum of the inspection light is also referred to as a spectrum determination program.
The spectrum determination device 30 acquires the image captured by the sampling target unit 51 (step S1). The image captured by the sampling target unit 51 is also referred to as a captured image of the sampling target unit 51. The spectrum determination device 30 may acquire the captured image of the sampling target portion 51 from the imaging device 40, or may acquire the captured image of the sampling target portion 51 from an external device. The captured image of the sampling target portion 51 includes a portion obtained by capturing the first region 51a and a portion obtained by capturing the second region 51 b. The portions obtained by imaging the first region 51a and the second region 51b are also referred to as a first captured image and a second captured image, respectively. The first captured image includes a first appearance anomaly.
The spectrum determination device 30 acquires information on the spectrum of the light illuminating the sampling target portion 51 when the sampling target portion 51 is imaged (step S2). The illumination light emitted toward the sampling target portion 51 when the sampling target portion 51 is imaged is also referred to as sampling light. The information related to the spectrum of the sampling light is also referred to as spectrum information of the sampling light.
The spectrum determination device 30 calculates an evaluation index based on the captured image (step S3). The spectrum determination device 30 may calculate at least one of a brightness difference and a chromaticity difference between the first captured image and the second captured image. Spectrum determination device 30 may calculate the evaluation index based on the calculation result of at least one of the brightness difference and the chromaticity difference. Spectrum determining apparatus 30 may calculate a value obtained by weighting and adding the calculation results of at least one of the brightness difference and the chromaticity difference as the evaluation index.
The brightness difference between the first captured image and the second captured image corresponds to the magnitude of the contrast of the gradation. The larger the contrast of the gradation is, the more easily the inspector 8 senses the difference between the first region 51a and the second region 51b, and the more easily detects the presence of the appearance abnormality in any one of the first region 51a and the second region 51 b. The larger the contrast of the gradation is, the more easily the abnormality detection device determines that the first region 51a and the second region 51b are different from each other, and the more easily it detects that there is an appearance abnormality in any one of the first region 51a and the second region 51 b.
The chromaticity difference between the first captured image and the second captured image corresponds to the magnitude of the color contrast. The larger the color contrast is, the more easily the inspector 8 feels the difference between the first region 51a and the second region 51b, and the more easily detects the presence of the appearance abnormality in any one of the first region 51a and the second region 51 b. The larger the color contrast is, the more easily the abnormality detection device determines that the first region 51a is different from the second region 51b, and the more easily it detects that there is an appearance abnormality in any one of the first region 51a and the second region 51 b.
The spectrum determination device 30 may calculate the evaluation index to be a larger value as the brightness difference between the first captured image and the second captured image is larger, or the spectrum determination device 30 may calculate the evaluation index to be a larger value as the chromaticity difference is larger. The spectrum determination device 30 may calculate the evaluation index to have a larger value as at least one of the brightness difference and the chromaticity difference is larger.
The spectrum determination device 30 determines the spectrum of the inspection light based on the spectrum information of the sampling light and the evaluation index calculated by the sampling target unit 51 illuminating the sampling light (step S4). The spectrum determination device 30 associates the evaluation index with the spectrum information of the sampling light. The spectrum determination device 30 may determine the spectrum of the sampling light corresponding to the high evaluation index as the spectrum of the inspection light. The spectrum determination device 30 may estimate a spectrum of light that may correspond to the high evaluation index based on the correspondence between the evaluation index and the spectrum information of the sampling light, and determine the estimated spectrum as the spectrum of the inspection light.
The spectrum determination device 30 outputs the determined spectrum of the inspection light to the illumination device 20 (step S5). After step S5, spectrum determination device 30 ends the execution of the steps in the flowchart in fig. 3. In the illumination system 1, the illumination device 20 irradiates the inspection light specified by the spectrum acquired from the spectrum determination device 30 to the inspection target portion 52. The inspection light determined along the step example of fig. 3 is based on the evaluation index calculated by the sampling target unit 51 including the first appearance abnormality. Therefore, in the case where the first appearance abnormality is included in the first classification, the appearance abnormality of the first classification is easily detected from the specimen 50 illuminated by the decided inspection light. In other words, when the inspection target portion 52 includes the appearance abnormality of the first classification, the appearance abnormality is easily detected. As a result, the inspector 8 or the abnormality detection apparatus can accurately determine whether or not the inspection target portion 52 includes the appearance abnormality of the first classification. When the inspection target portion 52 includes the appearance abnormality of the first classification, the inspector 8 or the abnormality detection device can detect the appearance abnormality with high accuracy.
In step S1, the spectrum determination device 30 may acquire the captured image of the sampling target portion 51 when illuminated with the first sampling light and the captured image of the sampling target portion 51 when illuminated with the second sampling light. The spectrum determination device 30 may acquire the spectrum information of each of the first and second sampling lights in step S2. Determining the spectra of the first and second sampled light is also referred to as first and second spectra, respectively. In step S3, the spectrum determination device 30 may calculate the first evaluation index as the evaluation index when the sampling target portion 51 is illuminated with the first sampling light. The spectrum determination device 30 may calculate the second evaluation index as the evaluation index when the sampling target portion 51 is illuminated with the second sampling light. In step S4, the spectrum determination device 30 may determine the spectrum of the sample light as the spectrum of the inspection light when the larger one of the first evaluation index and the second evaluation index calculated in step S3 is obtained. The spectrum determination device 30 may calculate the evaluation index for each of 3 or more kinds of sample light, and determine the spectrum of the sample light for which the maximum evaluation index is obtained as the spectrum of the inspection light.
The spectrum determination device 30 may acquire a captured image in which the first appearance abnormality is not clearly included or is not included in step S1. The spectrum determination device 30 may further acquire a captured image that clearly does not include the first appearance abnormality. The captured image that definitely does not include the first appearance abnormality is also referred to as a non-defective image. The spectrum decision device 30 may detect the difference by comparing the captured image, which does not clearly contain or does not contain the first appearance abnormality, with the non-defective product image. The spectrum decision means 30 may regard the detected difference as a first appearance anomaly. The spectrum determination device 30 may set the position or range of the sampling target portion 51 so that the sampling target portion 51 includes a portion regarded as the first appearance abnormality.
The spectrum determination device 30 can acquire the captured image of the sampling target portion 51 including the appearance abnormality of the second classification different from the first classification. The spectrum decision device 30 may calculate an evaluation index associated with the sampling light based on the captured image. The spectrum determination device 30 may determine the spectrum of the sampling light corresponding to the high evaluation index as the spectrum of the inspection light. The appearance abnormality of the second classification is easily detected from the sample 50 illuminated by the inspection light thus determined. The illumination system 1 determines the spectrum of the inspection light that is easy to detect the appearance abnormality of each of the different categories, and changes the inspection light that illuminates the specimen 50 when the appearance abnormality of each category is detected, thereby making it possible to improve the accuracy of detecting the appearance abnormality of each category.
The spectrum determination device 30 may determine the spectrum of the common inspection light that facilitates detection of each of the abnormal portions 55 included in the plurality of classifications. Thus, many kinds of appearance abnormalities are easily detected by 1 kind of inspection light. As a result, the inspection efficiency can be improved.
In the case where the captured image is a monochrome image, the spectrum determination device 30 may calculate the brightness of the captured image as the gray scale (gray scale). The spectrum decision means 30 may calculate the gradation of a given pixel included in the captured image as the brightness of the captured image. The spectrum determination device 30 may calculate the gradations of the respective pixels included in at least a part of the captured image and calculate the average value thereof as the brightness of the captured image, or may calculate the value obtained by weighting and adding the gradations of the respective pixels as the brightness of the captured image.
When the captured image is a color image, spectrum determining device 30 may calculate the brightness of the captured image based on the 3 primary colors of red, green, and blue. The 3 primary colors Red, Green and Blue are collectively called RGB (Red Green Blue ). The brightness of the captured image may be associated with the intensity of the luminance signal in the YUV system, for example. The YUV scheme is a scheme of expressing a color space based on a luminance signal and two color difference signals. In the YUV system, the brightness of a captured image can be calculated based on the following equation (1).
Y＝0.299×R+0.587×G+0.114×B (1)
Here, Y represents the intensity of the luminance signal and corresponds to the brightness. R, G and B represent the red, green and blue shades of gray, respectively.
For example, in the case where each gradation of the 3 primary colors of the first captured image is determined by (R, G, B) ═ 56, 54, 42, the brightness of the first captured image is calculated as 53 based on equation (1). For example, in the case where each gradation of the 3 primary colors of the second captured image is determined by (R, G, B) ═ (167, 160, 144), the brightness of the second captured image is calculated as 160 based on equation (1). In this case, the brightness difference between the first captured image and the second captured image is calculated as 107.
The spectrum decision means 30 may calculate the brightness for a given pixel contained in the captured image. Spectrum determining device 30 may calculate an average value of the brightness of each of the plurality of pixels as the brightness of the captured image.
In the case where the captured image is a color image, the spectrum decision means 30 may calculate the chromaticity difference of the captured image based on each gray scale of RGB of the captured image. Spectrum determining apparatus 30 may calculate the sum of the absolute values of the differences in the gray scales of R, G and B as the chromaticity difference. For example, it is assumed that each gradation of RGB of the first captured image is determined by (R, G, B) ═ 56, 54, 42, and each gradation of RGB of the second captured image is determined by (R, G, B) ═ 167, 160, 144. In this case, the absolute value of the difference in the gradation of R is calculated as 111. The absolute value of the difference in the gradation of G is calculated as 106. The absolute value of the difference in the gradation of B is calculated as 102. The chromaticity difference was calculated as 319 as the sum of absolute values of differences in the gradations of R, G and B. For example, in the case where each gray scale of RGB of the first captured image is determined by (R, G, B) ═ 0, 0, 255, and each gray scale of RGB of the second captured image is determined by (R, G, B) ═ 255, 255, 0, the chromaticity difference is calculated as 765. Spectrum determining apparatus 30 may calculate a value obtained by weighting and adding the absolute values of the differences in the gray scales of R, G and B as a chromaticity difference. The coefficient used in the above equation (1) may be applied as a coefficient for weighting the absolute value of the difference between the grayscales of R, G and B.
When the captured image is a color image, the chromaticity of the captured image may be determined by the respective gradations of RGB, but the chromaticity is not limited to this, and may be represented by a CMYK color model in which colors are determined by four components of blue, magenta, yellow, and black.
As described above, in the illumination system 1, the spectrum determination device 30 can determine the spectrum of the inspection light in which the appearance abnormality included in the predetermined classification is easily detected. The inspection light that easily detects an appearance abnormality included in a given classification is also referred to as inspection light corresponding to the given classification. The illumination device 20 acquires the spectrum determined by the spectrum determination device 30, and emits light determined by the spectrum as inspection light corresponding to a predetermined classification. The illumination device 20 emits inspection light corresponding to a predetermined classification to the sample 50, thereby easily detecting an appearance abnormality included in the predetermined classification in the sample 50.
The spectrum determination device 30 may determine, for example, a spectrum of the inspection light corresponding to the first classification and a spectrum of the inspection light corresponding to the second classification, respectively. The illumination device 20 may emit inspection light corresponding to each of the first classification and the second classification to the specimen 50. This makes it easy to detect appearance abnormalities included in each of the plurality of classifications. As a result, the accuracy of detecting the appearance abnormality can be improved. The illumination device 20 may change the inspection light based on the operation of the inspector 8, or may change the inspection light based on the control of the inspection device 200.
As described above, the illumination system 1 according to the present embodiment can determine the spectrum of the inspection light so that the appearance abnormality included in a predetermined category can be detected with high accuracy. Further, the illumination system 1 can emit inspection light determined by the decided spectrum toward the sample 50. When the inspection apparatus 200 used by the inspector 8 is provided with the illumination system 1, the inspector 8 can easily determine whether or not the appearance abnormality is present in the specimen 50, and can easily detect the appearance abnormality. The abnormality detection device is provided with the illumination system 1, and thereby, the presence or absence of an appearance abnormality in the specimen 50 can be easily determined, and the appearance abnormality can be easily detected. As a result, the accuracy of the appearance inspection can be improved.
Further, the spectrum of the inspection light may be sequentially switched at an arbitrary adjustment value to adjust the chromaticity difference or the brightness difference between the first captured image and the second captured image to be maximum. The adjustment value may be switched by the inspector 8, or may be automatically adjusted by a program or the like.
< light emitting part >
As shown in fig. 4, 5, and 6, the light emitting unit 10 includes the light emitting element 3 and the wavelength conversion member 6. The light emitting section 10 may further include the element substrate 2, the frame 4, and the sealing member 5.
The light emitting element 3 emits light having a peak wavelength in a wavelength region of 360nm to 430nm, that is, in a violet region.
The wavelength conversion member 6 converts light incident on the wavelength conversion member 6 from the light emitting element 3 into light having a peak wavelength in a visible light region, and emits the converted light. The visible light includes violet light. The visible light region includes the violet light region. The wavelength conversion member 6 is excited by the light emitted from the light emitting element 3, and emits a peak wavelength region in the visible light region. The light emitted from the light emitting element 3 is also referred to as excitation light. The light-emitting element 3 included in the light-emitting section 10 is also referred to as an excitation light-emitting element.
The light emitting section 10 may have a plurality of wavelength conversion members 6. The plurality of wavelength conversion members 6 can emit light having different peak wavelengths, respectively. The light emitting unit 10 can emit light having various spectra by controlling the intensity of light emitted from each wavelength conversion member 6.
The element substrate 2 may be formed of, for example, an insulating material. The element substrate 2 may be formed of a ceramic material such as alumina or mullite, a glass ceramic material, or a composite material in which a plurality of these materials are mixed. The element substrate 2 may be formed of a polymer resin material in which metal oxide fine particles capable of adjusting thermal expansion are dispersed.
The element substrate 2 may include a wiring conductor for electrically connecting components such as the light-emitting element 3 mounted on the element substrate 2 to the main surface 2A of the element substrate 2 or the inside of the element substrate 2. The wiring conductor may be formed of a conductive material such as tungsten, molybdenum, manganese, or copper, for example. The wiring conductor can be formed by, for example, printing a metal paste in which an organic solvent is added to tungsten powder on a ceramic green sheet serving as the element substrate 2 in a predetermined pattern, stacking a plurality of ceramic green sheets, and firing the stacked ceramic green sheets. In order to prevent oxidation, the wiring conductor may be formed with a plating layer of, for example, nickel or gold on its surface.
In order to efficiently emit light emitted from the light emitting element 3 to the outside, the element substrate 2 may be provided with a metal reflective layer at a distance from the wiring conductor and the plating layer. The metal reflective layer may be formed of a metal material such as aluminum, silver, gold, copper, or aluminum.
In the present embodiment, the light emitting element 3 is an LED. In the LED, electrons and holes are recombined in a PN junction formed by combining a P-type semiconductor and an N-type semiconductor, and light is emitted to the outside. The light emitting element 3 is not limited to the LED, and may be another light emitting device.
The light emitting element 3 is mounted on the main surface 2A of the element substrate 2. The light emitting element 3 is electrically connected to a plating layer covering the surface of the wiring conductor provided on the element substrate 2 via solder, or the like, for example. The number of light-emitting elements 3 mounted on the main surface 2A of the element substrate 2 is not particularly limited.
The light-emitting element 3 may include a light-transmitting substrate and a light semiconductor layer formed on the light-transmitting substrate. The light-transmitting substrate includes a material on which an optical semiconductor layer is grown by a chemical vapor deposition method such as a metal organic vapor deposition method or a molecular beam epitaxy method, for example. The light-transmissive substrate may be formed of, for example, sapphire, gallium nitride, aluminum nitride, zinc oxide, zinc selenide, silicon carbide, silicon (Si), zirconium diboride, or the like. The thickness of the light-transmitting substrate may be, for example, 50 μm or more and 1000 μm or less.
The light semiconductor layer may include a first semiconductor layer formed on the light-transmissive substrate, a light-emitting layer formed on the first semiconductor layer, and a second semiconductor layer formed on the light-emitting layer. The first semiconductor layer, the light-emitting layer, and the second semiconductor layer can be formed of, for example, a group III nitride semiconductor, a group III-V semiconductor such as gallium-phosphorus or gallium-arsenide, or a group III nitride semiconductor such as gallium nitride, aluminum nitride, or indium nitride.
The thickness of the first semiconductor layer may be, for example, 1 μm or more and 5 μm or less. The thickness of the light-emitting layer may be, for example, 25nm to 150 nm. The thickness of the second semiconductor layer may be, for example, 50nm or more and 600nm or less.
The frame 4 may be made of a ceramic material such as alumina, titania, zirconia, or yttria. The frame 4 may be formed of a porous material. The frame 4 may be formed of a resin material mixed with a powder containing a metal oxide such as alumina, titania, zirconia, or yttria. The frame body 4 is not limited to these materials, and may be formed of various materials.
The frame 4 is connected to the main surface 2A of the element substrate 2 via resin, solder, or the like, for example. The frame 4 is provided on the main surface 2A of the element substrate 2 so as to surround the light-emitting element 3 with a space from the light-emitting element 3. The inner wall surface of the frame 4 is inclined so as to spread outward as it is farther from the main surface 2A of the element substrate 2. The inner wall surface functions as a reflecting surface for reflecting light emitted from the light emitting element 3. The inner wall surface may include, for example, a metal layer made of a metal material such as tungsten, molybdenum, or manganese, and a plating layer made of a metal material such as nickel or gold covering the metal layer. The plating layer reflects light emitted from the light emitting element 3.
The shape of the inner wall surface of the housing 4 may be circular in plan view. Since the inner wall surface has a circular shape, the frame 4 can reflect light emitted from the light emitting element 3 to the outside substantially uniformly. The inclination angle of the inner wall surface of the housing 4 may be set to an angle of 55 degrees or more and 70 degrees or less with respect to the main surface 2A of the element substrate 2, for example.
The sealing member 5 remains in the inner space surrounded by the element substrate 2 and the frame 4, and is filled with a part of the upper portion of the inner space surrounded by the frame 4. The sealing member 5 seals the light emitting element 3 and transmits light emitted from the light emitting element 3. The sealing member 5 may be formed of a material having light transmittance, for example. The sealing member 5 may be formed of, for example, an insulating resin material having light transmittance such as silicone resin, acrylic resin, or epoxy resin, or a glass material having light transmittance. The refractive index of the sealing member 5 may be set to 1.4 or more and 1.6 or less, for example.
When the light emitting section 10 includes the sealing member 5, the violet light emitted from the light emitting element 3 passes through the sealing member 5 and enters the wavelength conversion member 6. As described above, the wavelength conversion member 6 converts the violet light incident from the light emitting element 3 into light having various peak wavelengths included in the visible light region. The light emitting element 3 is located at a position where the emitted violet light enters the wavelength conversion member 6. In other words, the wavelength conversion member 6 is located at a position where light emitted from the light emitting element 3 enters. In the configuration illustrated in fig. 4 to 6, the wavelength conversion member 6 is located along the upper surface of the sealing member 5 in a part of the upper portion of the inner space surrounded by the element substrate 2 and the frame 4. Not limited to this example, for example, the wavelength conversion member 6 may be located at a position protruding from an upper portion of the inner space surrounded by the element substrate 2 and the frame body 4.
As shown in fig. 6, the wavelength conversion member 6 may include a light-transmitting member 60 having light-transmitting properties, a first phosphor 61, a second phosphor 62, a third phosphor 63, a fourth phosphor 64, and a fifth phosphor 65. The first phosphor 61, the second phosphor 62, the third phosphor 63, the fourth phosphor 64, and the fifth phosphor 65 are also simply referred to as phosphors. The phosphor is contained inside the light transmitting member 60. The phosphor may be substantially uniformly dispersed inside the light-transmitting member 60. The phosphor converts violet light incident on the wavelength conversion member 6 into light having a peak wavelength included in a wavelength region of 360nm to 780nm, and emits the converted light.
The light-transmitting member 60 may be formed of, for example, an insulating resin having light-transmitting properties such as a fluororesin, a silicone resin, an acrylic resin, or an epoxy resin, or a glass material having light-transmitting properties.
The phosphor converts incident violet light into light having various peak wavelengths.
The first phosphor 61 can convert violet light to, for example, 40Light having a spectrum with a peak wavelength in a wavelength region of 0nm to 500nm, that is, blue light. BaMgAl can be used as the first phosphor 61, for example10O17: eu or (Sr, Ca, Ba)10(PO4)6Cl2：Eu、(Sr，Ba)10(PO4)6Cl2: eu, and the like.
The second phosphor 62 can convert violet light into light having a spectrum with a peak wavelength in a wavelength range of 450 to 550nm, for example, blue-green light. As the second phosphor 62, (Sr, Ba, Ca) can be used, for example5(PO4)3Cl：Eu、Sr4Al14O25: eu, and the like.
The third phosphor 63 can convert violet light into green light, which is light determined by a spectrum having a peak wavelength in a wavelength range of 500nm to 600nm, for example. For example, SrSi can be used as the third phosphor 632(O，Cl)2N2：Eu、(Sr，Ba，Mg)2SiO4：Eu2+Or ZnS: cu, Al, Zn2SiO4: mn and the like.
The fourth phosphor 64 can convert violet light into light determined by a spectrum having a peak wavelength in a wavelength range of 600nm to 700nm, for example, that is, red light. Y can be used as the fourth phosphor 64, for example2O2S：Eu、Y2O3：Eu、SrCaClAlSiN3：Eu2+、CaAlSiN3: eu or CaAlSi (ON)3: eu, etc
The fifth phosphor 65 can convert violet light into near-infrared light, which is determined by a spectrum having a peak wavelength in a wavelength range of 680nm to 800nm, for example. The near-infrared light may include light in a wavelength range of 680 to 2500 nm. For example, 3Ga can be used as the fifth phosphor 655O12: cr, and the like.
The combination of the types of the phosphors contained in the wavelength conversion member 6 is not particularly limited. As shown in fig. 5 and the region X of fig. 6, the wavelength conversion member 6 may have a first phosphor 61, a second phosphor 62, a third phosphor 63, a fourth phosphor 64, and a fifth phosphor 65. The wavelength conversion member 6 may have another kind of phosphor.
The light emitting section 10 may include a plurality of wavelength conversion members 6. The combination of the phosphors may be different for each wavelength conversion member 6. The light emitting section 10 may include a light emitting element 3 that emits violet light to each wavelength conversion member 6. The light emitting unit 10 can emit light having various spectra by controlling the intensity of the violet light incident on each wavelength conversion member 6. The single wavelength conversion member 6 may include, for example, a phosphor that emits blue fluorescence, a phosphor that emits blue-green fluorescence, and a phosphor that emits green fluorescence. One wavelength conversion member 6 may contain only one phosphor. The single wavelength conversion member 6 is not limited to these examples, and may include a phosphor in various combinations. The color of the light emitted from the wavelength conversion member 6 is determined based on the type of the phosphor included in the wavelength conversion member 6.
The light emitting portion 10 according to the present embodiment can emit light having various spectra by combining the wavelength conversion members 6. The light emitting unit 10 can emit light such as a spectrum of direct sunlight from the sun, a spectrum of sunlight reaching a predetermined depth in the sea, a spectrum of light emitted from a candle flame, or a spectrum having fluorescence. In other words, the light emitting section 10 can emit light having various colors. The light emitting unit 10 can emit light having various color temperatures.
The lighting device 20 may have a plurality of light emitting portions 10. The plurality of light-emitting portions 10 may include a first light-emitting portion and a second light-emitting portion. The illumination control unit 22 may control the intensity of light emitted from the first light emitting unit and the intensity of light emitted from the second light emitting unit independently or in association with each other. The light-emitting element 3 provided in the first light-emitting portion is also referred to as a first excitation light-emitting element. The light-emitting element 3 provided in the second light-emitting section is also referred to as a second excitation light-emitting element. The illumination control unit 22 can control the intensity of light emitted from the first light-emitting unit and the intensity of light emitted from the second light-emitting unit by controlling the intensity of the first excitation light emitted from the first excitation light-emitting unit and the intensity of the second excitation light emitted from the second excitation light-emitting unit, respectively. The spectrum of light emitted by the first light-emitting portion may be different from the spectrum of light emitted by the second light-emitting portion. The illumination control unit 22 may control the spectrum of light obtained by combining the light emitted from the first light-emitting unit and the light emitted from the second light-emitting unit by controlling the intensity of light emitted from the first light-emitting unit and the intensity of light emitted from the second light-emitting unit in association with each other. Light obtained by combining light emitted from the first light-emitting portion and light emitted from the second light-emitting portion is also referred to as combined light. The illumination device 20 may emit the combined light as illumination light. The illumination device 20 may emit illumination light by selecting at least one of the first light-emitting unit and the second light-emitting unit.
< inspection device >
As shown in fig. 7, the inspection apparatus 200 according to one embodiment includes an illumination device 20 and a sample holder 210. The specimen holder 210 is configured to be able to mount the specimen 50. The illumination device 20 is configured to illuminate the specimen 50 mounted on the specimen holder 210 with illumination light. The inspection apparatus 200 may further include an optical microscope. The sample holder 210 may also be configured as a stage of an optical microscope.
The inspection apparatus 200 may further include a spectrum determination apparatus 30. The inspection apparatus 200 may be communicably connected to the spectrum determination apparatus 30 provided outside without including the spectrum determination apparatus 30. The illumination device 20 acquires the spectrum of the inspection light from the spectrum determination device 30.
The inspection apparatus 200 may further include an optical system 220 for imaging the specimen 50 mounted on the specimen holder 210 to be observable by the inspector 8. The inspection apparatus 200 may further include an eyepiece 230 that makes the light imaged by the optical system 220 incident on the eye of the inspector 8. The inspector 8 may observe the specimen 50 through the optical system 220 and the eyepiece 230 to detect an appearance abnormality of the specimen 50. The optical system 220 may be configured to be able to change the magnification of the imaged sample 50. The sample holder 210, the optical system 220, and the eyepiece 230 may be configured as an optical microscope. The inspector 8 may directly observe the specimen 50 on the specimen holder 210 without going through the optical system 220 and the eyepiece 230, and may detect an appearance abnormality of the specimen 50.
The inspection apparatus 200 may further include an imaging apparatus 40. The imaging device 40 can photograph the sample 50 illuminated by the inspection light. The taken image of the sample 50 illuminated by the inspection light is also referred to as an inspection image. The imaging device 40 may image the sample 50 imaged by the optical system 220, or may image the sample 50 without the optical system 220.
The inspection apparatus 200 may further include a display unit 240. The display unit 240 can acquire and display an inspection image from the imaging device 40. The inspector 8 may detect the appearance abnormality included in the specimen 50 based on the inspection image displayed on the display unit 240.
The inspection apparatus 200 may further include an image processing unit 250. The image processing unit 250 can acquire an inspection image from the imaging device 40. The image processing unit 250 may analyze the inspection image to detect an appearance abnormality included in the sample 50. The image processing unit 250 may detect a portion of the inspection image where the brightness difference or the chromaticity difference is equal to or greater than a predetermined value as an appearance abnormality. The image processing section 250 may detect appearance abnormality based on various conditions.
The inspection apparatus 200 may output the captured image of the sample 50 illuminated with the sampling light to the spectrum determining apparatus 30 by causing the illumination apparatus 20 to emit the sampling light and causing the imaging apparatus 40 to capture the sample 50. When the inspection apparatus 200 includes the spectrum determination device 30, the inspection apparatus 200 can determine the spectrum of the inspection light inside.
As shown in fig. 8, the illumination device 20 may include a ring-shaped housing 24 configured to surround the specimen 50. The annular housing 24 can be said to constitute annular illumination by mounting the light emitting portion 10 that emits illumination light toward the inside of the ring. The optical system 220 is located inside the annular housing 24. In this case, the direction in which the illumination light is incident on the specimen 50 has a given angle with respect to the optical axis of the optical system 220. Thus, it is difficult for the image imaged by the optical system 220 to include a shadow due to illumination.
As shown in fig. 9, the illumination device 20 may be configured such that illumination light emitted from the light emitting unit 10 via the half mirror 224 included in the optical system 220 is incident substantially perpendicularly to the specimen 50. The illumination device 20 can also be said to constitute telecentric illumination. In this case, the direction in which the illumination light is incident on the specimen 50 is substantially the same as the optical axis of the optical system 220. This makes it easy for the image formed by the optical system 220 to include shadows due to illumination.
In the inspection apparatus 200, the structure of causing the illumination light to enter the specimen 50 is not limited to the above-described example. The illumination device 20 may be constructed in various ways. The illumination device 20 may control the direction in which illumination light is incident on the specimen 50. The illumination light is incident to the specimen 50 from different directions, whereby the captured image of the specimen 50 by the image pickup device 40 may differ, and the appearance of the specimen 50 from the inspector 8 may differ. The inspection apparatus 200 can control the direction in which the illumination light is incident on the specimen 50 so that the appearance abnormality contained in a given classification is easily detected. The inspection apparatus 200 may change the illumination form based on the mode of the specimen 50 or the classification of the appearance abnormality that may be included in the specimen 50. The spectrum determination device 30 may determine the spectrum of the inspection light based on the illumination pattern. By determining the spectrum of the inspection light based on the illumination mode, it is easier to detect appearance abnormalities included in a given classification.
When the appearance abnormality is detected by the image processing unit 250, the inspection apparatus 200 can detect the appearance abnormality from the specimen 50 by executing the steps of the flowchart illustrated in fig. 10.
The lighting device 20 acquires the spectrum of the inspection light corresponding to the predetermined classification from the spectrum determination device 30 (step S11). The illumination device 20 may output information for specifying the classification to the spectrum determination device 30, and acquire the spectrum of the inspection light corresponding to the classification from the spectrum determination device 30.
The illumination device 20 emits inspection light (step S12). The illumination device 20 causes the light emitting unit 10 to emit inspection light specified by the spectrum acquired from the spectrum determining device 30.
The image processing unit 250 acquires an inspection image from the imaging device 40 (step S13). The imaging device 40 images the specimen 50 in a state where the inspection light corresponding to a given classification is emitted from the light emitting unit 10 toward the specimen 50, and outputs an inspection image.
The image processing unit 250 calculates an evaluation value for determining whether or not the inspection target unit 52 includes an appearance abnormality (step S14). The image processing unit 250 may calculate at least one of a brightness difference and a chromaticity difference between the comparison target portion and the inspection target portion 52 as the evaluation value. The image processing unit 250 may calculate the evaluation value based on at least one of the brightness difference and the chromaticity difference. The image processing unit 250 may calculate a value obtained by weighting and adding at least one of the brightness difference and the chromaticity difference as the evaluation value. The image processing unit 250 may set a part of the inspection image as the inspection target portion 52 (see fig. 2), and calculate the evaluation value for the inspection target portion 52. The image processing unit 250 may divide the inspection image into a plurality of portions, set each portion as the inspection target portion 52, and calculate the evaluation value for each inspection target portion 52.
The image processing unit 250 determines whether or not the inspection target unit 52, which is the target of calculation of the evaluation value, satisfies the detection condition for the appearance abnormality (step S15). The image processing unit 250 may determine that the inspection target portion 52 satisfies the detection condition for the appearance abnormality, that is, that the appearance abnormality is included, when the evaluation value is equal to or greater than the given value. The image processing unit 250 may determine that the inspection target unit 52 satisfies the detection condition for the appearance abnormality when the brightness difference or the chromaticity difference is equal to or greater than a predetermined value. When the image processing unit 250 calculates the evaluation value, the brightness difference, or the chromaticity difference for the plurality of inspection target units 52 in step S14, it may be determined whether or not the detection condition for the appearance abnormality is satisfied for each inspection target unit 52.
If it is determined that the detection condition for the appearance abnormality is not satisfied (no in step S15), the image processing unit 250 proceeds to step S17. If it is determined that the detection condition for the appearance abnormality is satisfied (yes in step S15), the image processing unit 250 detects the inspection target portion 52 as the appearance abnormality (step S16).
The lighting device 20 determines whether or not to change the light to the inspection light corresponding to the other classification (step S17). From steps S11 to S16, the inspection apparatus 200 can detect appearance abnormalities contained in a given classification with high accuracy. On the other hand, the inspection apparatus 200 may not be able to detect appearance abnormalities included in other classifications. The inspection apparatus 200 may detect appearance abnormalities included in other categories that have not been detected by causing the illumination apparatus 20 to emit inspection light corresponding to the other categories. The illumination device 20 may determine to change to the inspection light corresponding to the other category based on an operation by the administrator of the inspection device 200, or may automatically determine to change to the inspection light corresponding to the other category. The illumination device 20 may acquire information on the spectrum of the inspection light corresponding to which classification the spectrum determination device 30 can output. The illumination device 20 may determine whether or not to change to the inspection light corresponding to another classification based on the information, or may determine which classification corresponds to which inspection light to change.
If it is determined that the inspection light corresponding to the other classification is not to be changed (no in step S17), the lighting device 20 ends the processing of the flowchart of fig. 10. When the lighting device 20 determines that the inspection light corresponding to the other category is changed (yes in step S17), the spectrum of the inspection light corresponding to the other category is acquired from the spectrum determination device 30 (step S18). The illumination device 20 may output information for specifying the classification to the spectrum determination device 30, and acquire the spectrum of the inspection light corresponding to the classification from the spectrum determination device 30. After executing the step of step S18, the lighting device 20 returns to the step of step S12. In step S12, the illumination device 20 causes the light emitting unit 10 to emit inspection light specified by the spectrum acquired from the spectrum determining device 30. The inspection apparatus 200 continues the steps after step S13.
As described above, the inspection apparatus 200 can improve the accuracy of detecting the appearance abnormality in the specimen 50 by causing the illumination apparatus 20 to emit the inspection light corresponding to the predetermined classification.
In the case where the inspector 8 uses the inspection apparatus 200 to detect the appearance abnormality of the specimen 50, the steps of detecting the appearance abnormality in steps S15 and S16 may be replaced by the process of inspecting by the inspector 8. The step of changing the inspection light in step S17 may be replaced with a step in which the inspector 8 operates to change the inspection light.
< management of database-based spectra >
The spectrum determination apparatus 30 can acquire information related to the sample 50 as the inspection target. Information associated with the specimen 50 as the inspection object is also referred to as inspection object information. The inspection object information may include information that determines a classification of appearance anomalies that may be included in the sample 50. The inspection object information may contain information on the color or the shape, etc., of the specimen 50. The inspection object information may contain information for determining the sample 50. The sample 50 may be determined by information such as the product number of the electronic device. The inspection target information may be stored in an IC tag or the like attached to the specimen 50. The spectrum determination device 30 can acquire inspection target information from an IC tag or the like.
When determining the spectrum of the inspection light for easily detecting a predetermined appearance abnormality, the spectrum determination device 30 may associate the determined spectrum with the inspection target information of the sample 50 to be referred to for determining the spectrum. The spectrum determination device 30 may generate a database in which the inspection target information is associated with the determined spectrum. The spectrum determination device 30 may extract a spectrum associated with the inspection target information of the sample 50 from the database, and output the extracted spectrum to the illumination device 20 as a spectrum of the inspection light. The inspection target information associated with the spectrum in the database may include a classification of an appearance abnormality referred to for determining the spectrum. By the inspection target information including the classification of the appearance abnormality, it is easy to control the inspection light so that the appearance abnormality included in a given classification is easily detected.
A database may also be stored in the inspection apparatus 200. The inspection apparatus 200 can extract the spectrum of the inspection light from the database based on the inspection target information, and cause the illumination apparatus 20 to emit the inspection light. By extracting the spectrum of the inspection light from the database by the inspection apparatus 200, the control of the spectrum of the inspection light based on the inspection target information becomes easy. As a result, the accuracy of detecting the appearance abnormality can be easily improved.
< other embodiments >
The spectrum determination device 30 may be configured independently of the inspection device 200. For example, the spectrum determination device 30 may acquire a captured image from the imaging device 40 not included in the inspection device 200, and determine the spectrum of the inspection light based on the captured image. In the case where the spectrum determination device 30 can acquire a captured image without using the inspection device 200, the time for inspection in the operation time of the inspection device 200 can be longer than the case where a captured image is acquired using the inspection device 200. As a result, the operation rate of the inspection apparatus 200 can be improved.
The spectrum determination device 30 may determine the spectrum of the inspection light corresponding to a plurality of different classifications. In this case, the spectrum determination device 30 may select an appropriate spectrum based on the inspection target information and output the selected spectrum to the illumination device 20. The spectrum determination device 30 may select a spectrum based on a classification designated from the illumination device 20 and output the spectrum to the illumination device 20. The spectrum may be automatically selected within the inspection apparatus 200 or may be selected based on an operation from an operator of the inspection apparatus 200.
When the inspection apparatus 200 includes the spectrum determination device 30, the spectrum determination device 30 may determine the spectrum of the inspection light capable of accurately detecting the appearance abnormality included in the sample 50 after the sample 50 to be inspected is carried into the inspection apparatus 200.
When the light-emitting portion 10 of the illumination device 20 includes the first light-emitting portion and the second light-emitting portion, the first light-emitting portion and the second light-emitting portion may be configured to be capable of emitting inspection light corresponding to the first classification and the second classification, respectively. In this case, the inspection apparatus 200 may select one of the first light-emitting unit and the second light-emitting unit based on the inspection target information, and emit the inspection light.
The drawings illustrating the embodiments according to the present disclosure are schematic drawings. The dimensional ratio and the like in the drawings do not necessarily coincide with the actual dimensional ratio.
The embodiments according to the present disclosure have been described based on the drawings and examples, but it should be noted that various modifications and corrections are easily made by those skilled in the art based on the present disclosure. Therefore, it should be noted that these variations or modifications are included in the scope of the present disclosure. For example, functions and the like included in each component can be rearranged in a logically inconspicuous manner, and a plurality of components and the like can be combined into one or divided.
In the present disclosure, the description of "first" and "second" is an identifier for distinguishing the structure. In the present disclosure, the structures identified in the description of "first" and "second" and the like can be exchanged by the numbers in the structures. For example, a first classification can exchange "first" and "second" as a second classification and identifier. The exchange of identifiers takes place simultaneously. The structure can also be distinguished after exchanging the identifiers. The identifier may be deleted. The structure in which the identifier is deleted is distinguished by a reference numeral. The description based on the identifiers such as "first" and "second" in the present disclosure is not used for the explanation of the order of the structures, and there is a basis for the small numbered identifiers.
Description of the symbols
1: lighting system
8: inspector
10: light emitting part (2: element substrate, 2A: main surface, 3: light emitting element, 4: frame, 5: sealing member, 6: wavelength conversion member, 60: light transmitting member, 61-65: first-fifth phosphors)
20: lighting fixture (22: lighting control part, 24: casing)
30: spectrum determining device (32: determining part)
40: image pickup apparatus
50: sample(s)
51: sample object part (51 a: first region, 51 b: second region)
52: examination object part
55: abnormal part
200: an inspection apparatus (210: a sample holder, 220: an optical system, 224: a half mirror, 230: an eyepiece, 240: a display unit, 250: an image processing unit).

Claims (21)

1. A spectrum determining apparatus is provided, which comprises a light source,
is provided with a processor which is used for processing,
the processor acquires a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image, the sampling target portion including a first region in which a first appearance abnormality included in a predetermined classification is present and a second region that extends from the first region to at least a part of a predetermined range and has a region in which the first appearance abnormality is not present,
the processor calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by imaging the first region and a portion obtained by imaging the second region in the captured image,
the processor determines a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light.
2. The spectrum determination apparatus according to claim 1,
the processor calculates, as a first evaluation index, an evaluation index of a captured image of the sampling target portion based on irradiation with first sampling light determined by a first spectrum,
the processor calculates, as a second evaluation index, an evaluation index of a captured image of the sampling target portion based on second sampling light irradiation determined by a second spectrum,
the processor determines one of the first spectrum and the second spectrum as a spectrum of the inspection light based on the first evaluation index and the second evaluation index.
3. The spectrum determination apparatus according to claim 1 or 2,
the processor calculates a value obtained by weighting and adding calculation results of at least one of the brightness difference and the chromaticity difference as the evaluation index.
4. The spectrum determination device according to any one of claims 1 to 3,
the given classification includes a classification based on a size of the irregularity of the first appearance abnormality and the second appearance abnormality.
5. The spectrum determination device according to any one of claims 1 to 4,
the processor is communicatively connected to an illumination device that emits the inspection light, and outputs a spectrum of the inspection light to the illumination device.
6. The spectrum determination apparatus according to claim 5,
the lighting device is used for checking articles.
7. A method of spectral determination, comprising:
acquiring a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image, the sampling target portion including a first region in which a first appearance abnormality included in a predetermined classification is present and a second region that extends from the first region to at least a part of a predetermined range;
calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image; and
and determining a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light.
8. A spectrum determination program for causing a processor to execute the steps of
Acquiring a captured image of a sampling target portion and spectrum information of sampling light that irradiates the sampling target portion to capture the captured image, the sampling target portion including a first region in which a first appearance abnormality included in a predetermined classification is present and a second region that extends from the first region to at least a part of a predetermined range;
calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image; and
and determining a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light.
9. An illumination system comprising an illumination device and a spectrum determining device,
the spectrum determining device acquires spectrum information of a captured image of a sampling target portion and sampling light that irradiates the sampling target portion to capture the captured image, the sampling target portion including a first region in which a first appearance abnormality included in a predetermined classification is present and a second region that extends from the first region to at least a part of a predetermined range,
calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion obtained by capturing the first region and a portion obtained by capturing the second region in the captured image,
determining a spectrum of the inspection light with which the inspection target portion is irradiated in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification based on the evaluation index and the spectrum information of the sampling light,
the illumination device emits the inspection light to the inspection target portion.
10. The lighting system of claim 9,
the illumination device is configured to be mountable on an optical microscope for observing the inspection target portion.
11. The lighting system according to claim 9 or 10,
the illumination device is designed as a ring light.
12. The lighting system according to any one of claims 9 to 11,
the lighting device is used for checking articles.
13. An illumination device includes a light emitting section and an illumination control section for controlling the light emitting section,
the illumination control unit acquires information on a spectrum determined based on an evaluation index calculated based on a captured image of a sampling target portion irradiated with sampling light and spectrum information of the sampling light,
the illumination control unit causes the light emitting unit to emit inspection light determined by the spectrum,
the sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range,
the evaluation index is based on at least one of a brightness difference and a chromaticity difference between a portion obtained by imaging the first region and a portion obtained by imaging the second region,
the light emitting unit emits the inspection light to an inspection target portion to be inspected for the second appearance abnormality included in the predetermined classification.
14. The lighting device of claim 13,
the optical microscope is configured to be mountable to the examination target portion for observation.
15. The lighting device of claim 13 or 14,
the light emitting portion is configured as an annular illumination.
16. The lighting device according to any one of claims 13 to 15,
the light emitting unit includes:
a light-emitting element that emits light having a peak wavelength in a wavelength region of 360nm to 430 nm; and
and a wavelength conversion member for converting light emitted from the light emitting element into light having a peak wavelength in a wavelength range of 360nm to 780 nm.
17. The lighting device according to any one of claims 13 to 16,
the lighting device is used for checking articles.
18. An inspection device for inspecting a semiconductor wafer is provided,
comprises an illumination device and a sample holder,
the illumination device emits inspection light determined by a spectrum determined based on spectral information of sampling light and an evaluation index calculated based on a captured image of a sampling target portion irradiated with the sampling light,
the sampling object part includes a first region in which a first appearance abnormality included in a given classification is present and a second region extending from the first region to at least a part of a given range,
the evaluation index is based on at least one of a brightness difference and a chromaticity difference between a portion obtained by imaging the first region and a portion obtained by imaging the second region,
the sample holder is configured to be capable of disposing the inspection object so that the inspection object is illuminated by the inspection light,
the inspection object includes an inspection object portion to be an inspection object of a second appearance abnormality included in the predetermined classification.
19. The inspection apparatus of claim 18,
the lighting device includes a first light emitting unit and a second light emitting unit that emit light having different spectra,
at least one of the first and second light-emitting units is selected to emit the inspection light.
20. The inspection apparatus according to claim 18 or 19,
the illumination device acquires information on the inspection object,
the spectrum of the inspection light is controlled based on the information on the inspection object.
21. The inspection apparatus according to any one of claims 18 to 20,
the sample holder is comprised in an optical microscope,
the illumination device is configured to be mountable on the optical microscope.
CN202080035351.XA 2019-05-28 2020-05-25 Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device Pending CN113826001A (en)

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