WO2020241598A1 - Spectrum determination device, spectrum determination method, spectrum determination program, illumination system, illumination device, and inspection device - Google Patents

Abstract

This spectrum determination device: acquires a captured image of a sampling subject part that includes a first region in which a first exterior abnormality included in a prescribed classification is positioned, as well as a second region, and also acquires spectrum information pertaining to sampling light with which the sampling subject part is irradiated in order to capture the captured image; calculates an evaluation index based on a brightness difference and/or a color difference between a portion of the captured image in which the first region is captured and a portion of the captured image in which the second region is captured; and determines, on the basis of the evaluation index and the spectrum information pertaining to the sampling light, the spectrum of inspection light with which an inspection subject part is irradiated in order to detect whether the inspection subject part includes a second exterior abnormality included in the prescribed classification.

Description

Spectral determination device, spectrum determination method, spectrum determination program, lighting system, lighting device and inspection device Cross-reference to related applications

This application claims the priority of Japanese Patent Application No. 2019-99723 (filed May 28, 2019), and the entire disclosure of the application is incorporated herein by reference.

The present disclosure relates to a spectrum determination device, a spectrum determination method, a spectrum determination program, a lighting system, a lighting device, and an inspection device.

Among the visual inspection devices for inspecting the appearance of an object, a lighting device for illuminating the object is known (see, for example, Patent Document 1).

International Publication No. 2018/150607

The spectrum determination device according to the embodiment of the present disclosure includes a processor. The processor acquires the captured image of the sampling target portion and the spectral information of the sampling light illuminating the sampling target portion in order to capture the captured image. The sampling target portion includes a first region in which the first appearance abnormality included in a predetermined classification is located and a region in which the first appearance abnormality is not located while extending from the first region to at least a part within a predetermined range. Includes a second region having. The processor calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion of the captured image in which the first region is imaged and a portion in which the second region is imaged. The processor uses the spectrum of the inspection light that illuminates the inspection target portion to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification, the evaluation index, and the spectrum information of the sampling light. Determined based on.

The spectrum determination method according to the embodiment of the present disclosure includes a step of acquiring a captured image of a sampling target portion and spectrum information of sampling light illuminating the sampling target portion in order to capture the captured image. The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located, and a second region extending from the first region to at least a part within a predetermined range. The spectrum determination method calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion in which the first region is imaged and a portion in which the second region is imaged in the captured image. Including steps. In the spectrum determination method, the spectrum of the inspection light that illuminates the inspection target portion in order to detect whether the inspection target portion contains the second appearance abnormality included in the predetermined classification is the spectrum of the evaluation index and the sampling light. Includes informed and informed decisions.

The spectrum determination program according to the embodiment of the present disclosure is executed by a processor. The spectrum determination program includes a step of acquiring a captured image of a sampling target portion and spectral information of sampling light illuminating the sampling target portion in order to capture the captured image. The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located, and a second region extending from the first region to at least a part within a predetermined range. The spectrum determination program calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion of the captured image in which the first region is imaged and a portion in which the second region is imaged. Including steps. The spectrum determination program uses the spectrum of the inspection light that illuminates the inspection target portion to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification, and the spectrum of the evaluation index and the sampling light. Includes informed and informed decisions.

The lighting system according to the embodiment of the present disclosure includes a lighting device and a spectrum determining device. The spectrum determination device acquires a captured image of the sampling target portion and spectrum information of the sampling light illuminating the sampling target portion in order to capture the captured image. The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located, and a second region extending from the first region to at least a part within a predetermined range. The spectrum determining device calculates an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion of the captured image in which the first region is imaged and a portion in which the second region is imaged. .. The spectrum determining device uses the spectrum of the inspection light that illuminates the inspection target portion to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification, and the spectrum of the evaluation index and the sampling light. Make an informed decision. The lighting device emits the inspection light to the inspection target portion.

The lighting device according to the embodiment of the present disclosure includes a light emitting unit and a lighting control unit that controls the light emitting unit. The illumination control unit acquires information on the spectrum determined based on the evaluation index calculated based on the captured image of the sampling target unit illuminated by the sampling light and the spectrum information of the sampling light. The illumination control unit emits the inspection light specified in the spectrum to the light emitting unit. The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located and a second region extending from the first region to at least a part within a predetermined range. The evaluation index is based on at least one of a difference in brightness and a difference in chromaticity between the portion in which the first region is imaged and the portion in which the second region is imaged. The light emitting unit emits the inspection light to the inspection target portion to be inspected for the second appearance abnormality included in the predetermined classification.

The inspection device according to the embodiment of the present disclosure includes a lighting device and a sample holder. The lighting device emits inspection light specified by a spectrum determined based on an evaluation index calculated based on an image captured by a sampling target portion illuminated by the sampling light and spectral information of the sampling light. To do. The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located and a second region extending from the first region to at least a part within a predetermined range. The evaluation index is based on at least one of a difference in brightness and a difference in chromaticity between the portion in which the first region is imaged and the portion in which the second region is imaged. The sample holder is configured so that the inspection object can be arranged so that the inspection object is illuminated by the inspection light. The inspection target includes an inspection target portion to be inspected for the second appearance abnormality included in the predetermined classification.

It is a block diagram which shows the structural example of the lighting system which concerns on one Embodiment. It is a figure which shows the structural example of a sample. It is a flowchart which shows the procedure example of the spectrum determination method which concerns on one Embodiment. It is an external perspective view which shows the structural example of the light emitting part. FIG. 4 is a cross-sectional view taken along the line AA of FIG. It is an enlarged view of the circled part of FIG. It is a block diagram which shows the structural example of the inspection apparatus which concerns on one Embodiment. It is sectional drawing which shows the structural example in which a sample is illuminated by ring illumination. It is sectional drawing which shows the structural example in which a sample is illuminated by telecentric illumination. It is a flowchart which shows the procedure example of the inspection method which concerns on one Embodiment.

Depending on the lighting method of the inspection target, appearance abnormalities such as defects or color unevenness contained in the inspection target may be easily detected or may be difficult to detect. It is required to improve the accuracy of visual inspection.

As shown in FIG. 1, the lighting system 1 according to the embodiment includes a lighting device 20 and a spectrum determining device 30. The illuminating device 20 illuminates the sample 50. The spectrum determination device 30 determines the spectrum of the light emitted by the illumination device 20 toward the sample 50. The light emitted by the illuminating device 20 toward the sample 50 is also referred to as illuminating light. The spectrum determination device 30 may determine the spectrum of the illumination light based on the information about the sample 50. The lighting system 1 may further include an imaging device 40 that captures an image of the sample 50 as information about the sample 50.

The lighting device 20 includes a light emitting unit 10 and a lighting control unit 22.

As will be described later, the light emitting unit 10 emits light specified in a predetermined spectrum as illumination light. The predetermined spectrum may have a peak wavelength in the wavelength region of 360 nm to 430 nm and a peak wavelength in the wavelength region of 360 nm to 780 nm, for example. Light having a peak wavelength in the wavelength region of 360 nm to 430 nm is also referred to as purple light. The wavelength region of 360 nm to 430 nm is also referred to as a purple light region. Light having a peak wavelength in the wavelength region of 360 nm to 780 nm is also referred to as visible light. The wavelength region of 360 nm to 780 nm is also referred to as a visible light region. The spectrum that identifies light is measured by spectroscopic methods using, for example, a spectrophotometer.

The illumination control unit 22 controls the spectrum or intensity of the light emitted by the light emitting unit 10. The illumination control unit 22 may include at least one processor in order to provide control and processing power for performing various functions. The processor can execute a program that realizes various functions of the lighting control unit 22. The processor may be implemented as a single integrated circuit. The integrated circuit is also called an IC (Integrated Circuit). The processor may be implemented as a plurality of communicably connected integrated circuits and discrete circuits. The processor may be implemented on the basis of various other known techniques.

The lighting control unit 22 may include an interface. The illumination control unit 22 may be communicably connected to the spectrum determining device 30 via an interface, either by wire or wirelessly. The interface may include a communication interface such as a LAN (Local Area Network). The interface may realize communication by various communication methods such as 4G (4th Generation), 5G (5th Generation), or LTE (Long Term Evolution). The interface may include a communication interface for non-contact communication such as infrared communication or NFC (Near Field Communication) communication. The interface may include a port capable of inputting and outputting signals based on a serial communication standard such as RS232C or RS485.

The lighting control unit 22 may include a storage unit. The storage unit may include an electromagnetic storage medium such as a magnetic disk, or may include a memory such as a semiconductor memory or a magnetic memory. The storage unit stores various information and programs executed by the lighting control unit 22. The storage unit may function as a work memory of the lighting control unit 22. At least a part of the storage unit may be configured separately from the lighting control unit 22.

The spectrum determination device 30 may include a determination unit 32. The determination unit 32 determines a spectrum that identifies the light emitted by the illuminating device 20. The determination unit 32 may include at least one processor to provide control and processing power to perform various functions. The processor included in the determination unit 32 may include the same or similar configuration as the processor of the lighting control unit 22. The determination unit 32 may include an interface. The determination unit 32 may be communicably connected to the lighting device 20 via an interface, either by wire or wirelessly. The interface included in the determination unit 32 may include the same or similar configuration as the interface of the lighting control unit 22.

The imaging device 40 includes an imaging device such as a camera that images the sample 50.

It is assumed that the lighting system 1 according to the present embodiment is installed in the inspection process of the production line of the industrial product as the sample 50. The sample 50 may include, for example, an electronic device or the like. The sample 50 may include a circuit board mounted inside the electronic device, or may include an electronic component or wiring mounted on the circuit board. Sample 50 may include the outer surface of the electronic device. Sample 50 is not limited to these examples. The lighting system 1 is not limited to the inspection process of industrial products, and may be installed in the inspection process of various products such as agricultural products such as vegetables or dairy products such as cheese. The lighting system 1 and the lighting device 20 may be for inspection of articles.

The lighting system 1 may be installed in an inspection device 200 (see FIG. 7) used by the inspector 8 to visually inspect the appearance of the sample 50. When the lighting system 1 is installed in the inspection device 200, the inspector 8 visually inspects the appearance of the sample 50 using the inspection device 200. The inspector 8 may detect an appearance abnormality of the sample 50 by visual inspection of the appearance. The lighting system 1 is required to control the irradiation light so that the inspector 8 can detect the appearance abnormality of the sample 50 with high accuracy.

The lighting system 1 may be installed in an abnormality detecting device that automatically detects an abnormality in the appearance of the sample 50 based on an image obtained by capturing the appearance of the sample 50 by the imaging device 40. Even when the lighting system 1 is installed in the abnormality detecting device, it is required to control the irradiation light so that the abnormality detecting device can detect the appearance abnormality of the sample 50 with high accuracy.

The illumination light emitted by the illumination system 1 toward the sample 50 to be inspected is also referred to as inspection light. The spectrum determination device 30 determines the spectrum of the inspection light so that the appearance abnormality of the sample 50 is detected with high accuracy by the inspector 8 or the abnormality detection device.

As shown in FIG. 2, the sample 50 includes a sampling target portion 51. The sampling target portion 51 includes a first region 51a including the abnormal portion 55 and a second region 51b not including the abnormal portion 55. The abnormal portion 55 corresponds to at least a part of the appearance abnormality of the sample 50. It is assumed that the second region 51b extends to at least a part of a predetermined range including the first region 51a. In other words, it is assumed that the second region 51b is located within a predetermined distance from the first region 51a.

Appearance abnormalities can include various aspects. The appearance abnormality may include an embodiment having unintended irregularities such as dents, bulges, or protrusions existing on the surface of the sample 50. The depression may include a dent. The protrusions may include curls on the painted or exterior surfaces. The appearance abnormality may include a damaged aspect such as a scratch, a crack or a crack contained in the sample 50. The appearance abnormality may include an aspect as a foreign substance such as dust or dirt adhering to the surface of the sample 50. The appearance abnormality may include an aspect in which the color of the surface of the sample 50 is different from the inspection standard or the color of the surface of the sample 50 is uneven. When the sample 50 is a circuit board, the appearance abnormality may include an aspect in which the pattern is abnormal, such as a blurring of the wiring mounted on the circuit board or a pattern defect of the wiring.

Appearance abnormalities may be classified based on the mode. For example, scratches and adhesion of foreign matter may be classified as different aspects of appearance abnormality. That is, the appearance abnormality may be classified into a predetermined mode. When the appearance abnormality is classified into a predetermined mode, it is also expressed that the appearance abnormality is included in the predetermined classification. Appearance abnormalities may be classified based on their degree. For example, when the appearance abnormality includes an aspect having unevenness, the appearance abnormality may be classified based on the size of the unevenness. The appearance abnormality included in the first region 51a is also referred to as a first appearance abnormality. When the first appearance abnormality is included in a predetermined classification, the classification is also referred to as the first classification.

Sample 50 may further include the inspection target portion 52. The inspection target portion 52 may be included in another sample 50 different from the sample 50 including the sampling target portion 51. In FIG. 2, the inspection target portion 52 is included in the same sample 50 as the sample 50 including the sampling target portion 51. The inspection target portion 52 may include at least a part of the appearance abnormality and may not include the appearance abnormality. That is, it is unclear whether the inspection target portion 52 includes at least a part of the appearance abnormality or does not include the appearance abnormality. When the inspection target portion 52 includes an appearance abnormality, the appearance abnormality is also referred to as a second appearance abnormality. The second appearance abnormality may be included in the first category and may be included in the second category different from the first category. That is, it is unclear which classification the second appearance abnormality is included in. In the present embodiment, the second appearance abnormality is included in the first classification.

The spectrum determination device 30 is inspected based on the inspection result of the first appearance abnormality so that the second appearance abnormality can be detected with high accuracy even when it is unknown whether the inspection target portion 52 includes the second appearance abnormality. Determine the spectrum of the test light that illuminates.

The spectrum determination device 30 may determine the spectrum of the inspection light, for example, by executing the procedure of the flowchart shown in FIG. The method in which the spectrum determination device 30 determines the spectrum of the inspection light is also referred to as a spectrum determination method. The procedure illustrated in FIG. 3 may be implemented as a program executed by a processor. The program executed by the spectrum determination device 30 to determine the spectrum of the inspection light is also referred to as a spectrum determination program.

The spectrum determination device 30 acquires an image in which the sampling target unit 51 is captured (step S1). The image in which the sampling target unit 51 is captured is also referred to as the captured image of the sampling target unit 51. The spectrum determination device 30 may acquire the captured image of the sampling target unit 51 from the imaging device 40, or may acquire the captured image of the sampling target unit 51 from an external device. The captured image of the sampling target portion 51 includes a portion in which the first region 51a is imaged and a portion in which the second region 51b is imaged. The portions obtained by imaging the first region 51a and the second region 51b are also referred to as a first captured image and a second captured image, respectively. The first captured image includes the first appearance abnormality.

The spectrum determination device 30 acquires information regarding the spectrum of the light that was illuminating the sampling target unit 51 when the sampling target unit 51 was imaged (step S2). The illumination light emitted toward the sampling target unit 51 when the sampling target unit 51 is imaged is also referred to as sampling light. Information about the spectrum of the sampled light is also referred to as spectral information of the sampled light.

The spectrum determination device 30 calculates an evaluation index based on the captured image (step S3). The spectrum determination device 30 may calculate at least one of the difference in brightness and the difference in chromaticity between the first captured image and the second captured image. The spectrum determination device 30 may calculate the evaluation index based on the calculation result of at least one of the brightness difference and the chromaticity difference. The spectrum determination device 30 may calculate a value obtained by weighting and adding at least one of the calculation results of the brightness difference and the chromaticity difference as an evaluation index.

The difference in brightness between the first captured image and the second captured image corresponds to the magnitude of the contrast of the gradation. The larger the gradation contrast, the easier it is for the inspector 8 to feel the difference between the first region 51a and the second region 51b, and that there is an appearance abnormality in either the first region 51a or the second region 51b. It will be easier to detect. Further, the larger the gradation contrast, the easier it is for the abnormality detection device to determine that the first region 51a and the second region 51b are different, and there is an appearance abnormality in either the first region 51a or the second region 51b. It becomes easier to detect what to do.

The chromaticity difference between the first captured image and the second captured image corresponds to the magnitude of the color contrast. The larger the color contrast, the easier it is for the inspector 8 to feel the difference between the first region 51a and the second region 51b, and detect that there is an appearance abnormality in either the first region 51a or the second region 51b. It will be easier. Further, the larger the color contrast, the easier it is for the abnormality detection device to determine that the first region 51a and the second region 51b are different, and the appearance abnormality exists in either the first region 51a or the second region 51b. Is easier to detect.

The spectrum determination device 30 may calculate the evaluation index as a larger value as the brightness difference between the first captured image and the second captured image is larger, or calculate the evaluation index as a larger value as the chromaticity difference is larger. You may. The spectrum determination device 30 may calculate the evaluation index to a larger value as at least one of the difference in brightness and the difference in chromaticity is larger.

The spectrum determination device 30 determines the spectrum of the inspection light based on the spectrum information of the sampled light and the evaluation index calculated by the sampling target unit 51 illuminated by the sampled light (step S4). The spectrum determination device 30 associates the evaluation index with the spectrum information of the sampled light. The spectrum determination device 30 may determine the spectrum of the sampled light associated with the high evaluation index as the spectrum of the inspection light. The spectrum determining device 30 may estimate the spectrum of light that can correspond to a high evaluation index based on the correspondence between the evaluation index and the spectrum information of the sampled light, and determine the estimated spectrum as the spectrum of the inspection light. ..

The spectrum determination device 30 outputs the determined spectrum of the inspection light to the illumination device 20 (step S5). After step S5, the spectrum determination device 30 ends the execution of the procedure shown in the flowchart of FIG. In the lighting system 1, the lighting device 20 irradiates the inspection target portion 52 with the inspection light specified by the spectrum acquired from the spectrum determining device 30. The inspection light determined according to the procedure example of FIG. 3 is based on the evaluation index calculated by the sampling target unit 51 including the first appearance abnormality. Therefore, when the first classification abnormality is included in the first classification, the appearance abnormality of the first classification is easily detected from the sample 50 illuminated by the determined inspection light. That is, when the inspection target portion 52 includes the appearance abnormality of the first category, the appearance abnormality is easily detected. As a result, the inspector 8 or the abnormality detection device can determine with high accuracy whether the inspection target unit 52 includes the appearance abnormality of the first category. When the inspection target unit 52 includes the appearance abnormality of the first category, the inspector 8 or the abnormality detection device can detect the appearance abnormality with high accuracy.

In step S1, the spectrum determining device 30 obtains an image captured by the sampling target unit 51 when illuminated by the first sampling light and an image captured by the sampling target unit 51 when illuminated by the second sampling light. You may get it. The spectrum determining device 30 may acquire the spectrum information of each of the first sampling light and the second sampling light in step S2. The spectra that specify the first sampling light and the second sampling light are also referred to as the first spectrum and the second spectrum, respectively. In step S3, the spectrum determination device 30 may calculate the first evaluation index as the evaluation index when the sampling target unit 51 is illuminated with the first sampling light. The spectrum determination device 30 may calculate a second evaluation index as an evaluation index when the sampling target unit 51 is illuminated with the second sampling light. In step S4, the spectrum determination device 30 may determine the spectrum of the sampling light when the larger evaluation index of the first evaluation index and the second evaluation index calculated in step S3 is obtained as the spectrum of the inspection light. .. The spectrum determination device 30 may calculate an evaluation index for each of the three or more types of sampled light, and determine the spectrum of the sampled light from which the largest evaluation index is obtained as the spectrum of the inspection light.

In step S1, the spectrum determination device 30 may acquire an captured image in which it is unknown whether or not the first appearance abnormality is included. The spectrum determination device 30 may further acquire a captured image that is clearly free of the first appearance anomaly. The captured image that is clearly free of the first appearance abnormality is also referred to as a non-defective image. The spectrum determination device 30 may detect the difference by comparing the captured image in which it is unknown whether or not the first appearance abnormality is included with the non-defective image. The spectrum determination device 30 may consider the detected difference as the first appearance abnormality. The spectrum determination device 30 may set the position or range of the sampling target unit 51 so that the sampling target unit 51 includes a portion deemed to be the first appearance abnormality.

The spectrum determination device 30 may acquire a captured image of the sampling target unit 51 including the appearance abnormality of the second classification different from the first classification. The spectrum determination device 30 may calculate an evaluation index associated with the sampled light based on the captured image. The spectrum determination device 30 may determine the spectrum of the sampled light associated with the high evaluation index as the spectrum of the inspection light. From the sample 50 illuminated by the inspection light determined in this way, the appearance abnormality of the second category is easily detected. The lighting system 1 determines the spectrum of the inspection light that facilitates the detection of the appearance abnormality of each classification, and changes the inspection light that illuminates the sample 50 when detecting the appearance abnormality of each classification. It is possible to improve the detection accuracy of appearance abnormalities.

The spectrum determination device 30 may determine the spectrum of a common inspection light that facilitates the detection of the abnormal portion 55 included in the plurality of classifications. By doing so, many kinds of appearance abnormalities can be easily detected by one kind of inspection light. As a result, inspection efficiency can be improved.

When the captured image is a monochrome image, the spectrum determination device 30 may calculate the brightness of the captured image as a grayscale gradation. The spectrum determination device 30 may calculate the gradation of a predetermined pixel included in the captured image as the brightness of the captured image. The spectrum determination device 30 may calculate the gradation of each pixel included in at least a part of the captured image and calculate the average value as the brightness of the captured image, or may weight the gradation of each pixel. The added value may be calculated as the brightness of the captured image.

When the captured image is a color image, the spectrum determination device 30 may calculate the brightness of the captured image based on each gradation of the three primary colors of red, green, and blue. The three primary colors of red, green and blue are collectively called RGB (Red Green Blue). The brightness of the captured image may be associated with, for example, the intensity of the luminance signal in the YUV system. The YUV method is a method of expressing a color space based on a luminance signal and two color difference signals. In the YUV method, the brightness of the captured image may be calculated based on the following formula (1).
Y = 0.299 × R + 0.587 × G + 0.114 × B (1)
Here, Y represents the intensity of the luminance signal and corresponds to the brightness. R, G and B represent gradations of red, green and blue, respectively.

For example, when each gradation of the three primary colors of the first captured image is specified by (R, G, B) = (56, 54, 42), the brightness of the first captured image is 53 based on the equation (1). Is calculated. For example, when each gradation of the three primary colors of the second captured image is specified by (R, G, B) = (167, 160, 144), the brightness of the second captured image is 160 based on the equation (1). Is calculated. In this case, the difference in brightness between the first captured image and the second captured image is calculated as 107.

The spectrum determination device 30 may calculate the brightness of a predetermined pixel included in the captured image. The spectrum determination device 30 may calculate the average value of the brightness of each of the plurality of pixels as the brightness of the captured image.

When the captured image is a color image, the spectrum determination device 30 may calculate the chromaticity difference of the captured image based on each gradation of RGB of the captured image. The spectrum determination device 30 may calculate the sum of the absolute values of the differences in gradations of R, G, and B as the chromaticity difference. For example, each RGB gradation of the first captured image is specified by (R, G, B) = (56, 54, 42), and each RGB gradation of the second captured image is (R, G, B). = (167,160,144). In this case, the absolute value of the difference in gradation of R is calculated as 111. The absolute value of the difference in gradation of G is calculated as 106. The absolute value of the difference in gradation of B is calculated as 102. The chromaticity difference is calculated as 319 as the sum of the absolute values of the differences in the gradations of R, G, and B. For example, each RGB gradation of the first captured image is specified by (R, G, B) = (0,0,255), and each RGB gradation of the second captured image is (R, G, B). When specified by = (255,255,0), the chromaticity difference is calculated as 765. The spectrum determination device 30 may calculate the value obtained by weighting and adding the absolute values of the differences in gradations of R, G, and B as the chromaticity difference. The coefficient used in the above equation (1) may be applied as a coefficient for weighting the absolute value of the difference between the gradations of R, G, and B.

When the captured image is a color image, the chromaticity of the captured image may be specified by each gradation of RGB, but is not limited to this, and a CMYK color model that specifies the color by four components of cyan, magenta, yellow, and black is used. It may be represented.

As described above, in the lighting system 1, the spectrum determining device 30 can determine the spectrum of the inspection light that makes it easy to detect the appearance abnormality included in the predetermined classification. The inspection light that makes it easier to detect an appearance abnormality included in a predetermined classification is also referred to as an inspection light corresponding to the predetermined classification. The illuminating device 20 acquires the spectrum determined by the spectrum determining device 30, and emits light specified in the spectrum as inspection light corresponding to a predetermined classification. When the lighting device 20 emits the inspection light corresponding to the predetermined classification toward the sample 50, the appearance abnormality included in the predetermined classification is easily detected in the sample 50.

The spectrum determining device 30 may determine, for example, the spectrum of the inspection light corresponding to the first classification and the spectrum of the inspection light corresponding to the second classification, respectively. The lighting device 20 may emit inspection light corresponding to each of the first classification and the second classification to the sample 50. By doing so, appearance abnormalities included in each of the plurality of classifications can be easily detected. As a result, the detection accuracy of the appearance abnormality can be improved. The lighting device 20 may change the inspection light based on the operation by the inspector 8, or may change the inspection light based on the control by the inspection device 200.

As described above, the lighting system 1 according to the present embodiment can determine the spectrum of the inspection light so that the appearance abnormality included in the predetermined classification can be detected with high accuracy. In addition, the lighting system 1 can emit the inspection light specified by the determined spectrum toward the sample 50. When the inspection device 200 used by the inspector 8 includes the lighting system 1, the inspector 8 can easily determine the presence or absence of the appearance abnormality in the sample 50 and can easily detect the appearance abnormality. By including the lighting system 1, the abnormality detection device makes it easy to determine the presence / absence of an appearance abnormality in the sample 50 and also makes it easy to detect an appearance abnormality. As a result, the accuracy of visual inspection can be improved.
Further, the spectrum of the inspection light may be sequentially switched and adjusted by an arbitrary adjustment value so that the chromaticity difference or the brightness difference between the first captured image and the second captured image is maximized. The inspector 8 may switch the adjustment value, or may automatically adjust the adjustment value by a program or the like.

<Light emitting part>
As shown in FIGS. 4, 5 and 6, the light emitting unit 10 includes a light emitting element 3 and a wavelength conversion member 6. The light emitting unit 10 may further include an element substrate 2, a frame body 4, and a sealing member 5.

The light emitting element 3 emits light having a peak wavelength in a wavelength region of 360 nm to 430 nm, that is, a violet light region.

The wavelength conversion member 6 converts the light incident on the wavelength conversion member 6 from the light emitting element 3 into light having a peak wavelength in the visible light region, and emits the converted light. Visible light is assumed to include purple light. It is assumed that the visible light region includes a purple light region. The wavelength conversion member 6 emits a peak wavelength region into a visible light region by being excited by the light emitted by the light emitting element 3. The light emitted by the light emitting element 3 is also referred to as excitation light. The light emitting element 3 included in the light emitting unit 10 is also referred to as an excitation light emitting element.

The light emitting unit 10 may have a plurality of wavelength conversion members 6. The plurality of wavelength conversion members 6 may emit light having different peak wavelengths. The light emitting unit 10 can emit light having various spectra by controlling the intensity of the light emitted by each wavelength conversion member 6.

The element substrate 2 may be formed of, for example, a material having an insulating property. The element substrate 2 may be formed of, for example, a ceramic material such as alumina or mullite, a glass ceramic material, or a composite material obtained by mixing a plurality of these materials. The element substrate 2 may be formed of a polymer resin material or the like in which metal oxide fine particles whose thermal expansion can be adjusted are dispersed.

The element substrate 2 may include a wiring conductor that electrically conducts components such as a light emitting element 3 mounted on the element substrate 2 inside the main surface 2A of the element substrate 2 or the element substrate 2. The wiring conductor may be made of a conductive material such as tungsten, molybdenum, manganese, or copper. The wiring conductor is formed, for example, by printing a metal paste obtained by adding an organic solvent to tungsten powder on a ceramic green sheet to be an element substrate 2 in a predetermined pattern, laminating a plurality of ceramic green sheets, and firing them. May be done. A plating layer such as nickel or gold may be formed on the surface of the wiring conductor to prevent oxidation.

The element substrate 2 may be provided with a metal reflective layer at a distance from the wiring conductor and the plating layer in order to efficiently emit the light emitted by the light emitting element 3 to the outside. The metal reflective layer may be formed of, for example, a metal material such as aluminum, silver, gold, copper or platinum.

In this embodiment, the light emitting element 3 is an LED. An LED emits light to the outside by recombination of electrons and holes in a PN junction in which a P-type semiconductor and an N-type semiconductor are bonded. The light emitting element 3 is not limited to the LED, and may be another light emitting device.

The light emitting element 3 is mounted on the main surface 2A of the element substrate 2. The light emitting element 3 is electrically connected to the plating layer provided on the surface of the wiring conductor provided on the element substrate 2 via, for example, a brazing material or solder. The number of light emitting elements 3 mounted on the main surface 2A of the element substrate 2 is not particularly limited.

The light emitting element 3 may include a translucent substrate and an optical semiconductor layer formed on the translucent substrate. The translucent substrate includes a material capable of growing an opto-semiconductor layer on it by using, for example, a chemical vapor deposition method such as an organic metal vapor phase growth method or a molecular beam epitaxial growth method. The translucent substrate may be formed of, for example, sapphire, gallium nitride, aluminum nitride, zinc oxide, zinc selenide, silicon carbide, silicon (Si), zirconium dibodium or the like. The thickness of the translucent substrate may be, for example, 50 μm or more and 1000 μm or less.

The optical semiconductor layer may include a first semiconductor layer formed on a translucent substrate, a light emitting layer formed on the first semiconductor layer, and a second semiconductor layer formed on the light emitting layer. The first semiconductor layer, the light emitting layer, and the second semiconductor layer are, for example, a group III nitride semiconductor, a group III-V semiconductor such as gallium phosphorus or gallium arsenide, or a group III such as gallium nitride, aluminum nitride, or indium nitride. It may be formed of a nitride semiconductor or the like.

The thickness of the first semiconductor layer may be, for example, 1 μm or more and 5 μm or less. The thickness of the light emitting layer may be, for example, 25 nm or more and 150 nm or less. The thickness of the second semiconductor layer may be, for example, 50 nm or more and 600 nm or less.

The frame 4 may be formed of, for example, a ceramic material such as aluminum oxide, titanium oxide, zirconium oxide, or yttrium oxide. The frame body 4 may be made of a porous material. The frame 4 may be formed of a resin material mixed with a powder containing a metal oxide such as aluminum oxide, titanium oxide, zirconium oxide or yttrium oxide. The frame body 4 is not limited to these materials, and may be formed of various materials.

The frame body 4 is connected to the main surface 2A of the element substrate 2 via, for example, resin, brazing material, solder, or the like. The frame body 4 is provided on the main surface 2A of the element substrate 2 so as to surround the light emitting element 3 at a distance from the light emitting element 3. The frame body 4 is provided so as to be inclined so that the inner wall surface expands outward as the distance from the main surface 2A of the element substrate 2 increases. The inner wall surface functions as a reflecting surface that reflects the light emitted by the light emitting element 3. The inner wall surface may include, for example, a metal layer formed of a metal material such as tungsten, molybdenum, or manganese, and a plating layer covering the metal layer and formed of a metal material such as nickel or gold. The plating layer reflects the light emitted by the light emitting element 3.

The shape of the inner wall surface of the frame body 4 may be circular in a plan view. Since the shape of the inner wall surface is circular, the frame body 4 can reflect the light emitted by the light emitting element 3 substantially uniformly toward the outside. The inclination angle of the inner wall surface of the frame body 4 may be set to, for example, an angle of 55 degrees or more and 70 degrees or less with respect to the main surface 2A of the element substrate 2.

The sealing member 5 is filled in the inner space surrounded by the element substrate 2 and the frame body 4, leaving a part of the upper part of the inner space surrounded by the frame body 4. The sealing member 5 seals the light emitting element 3 and transmits the light emitted by the light emitting element 3. The sealing member 5 may be made of, for example, a light-transmitting material. The sealing member 5 may be made of, for example, a light-transmitting insulating resin material such as a silicon resin, an acrylic resin or an epoxy resin, or a light-transmitting glass material. The refractive index of the sealing member 5 may be set to, for example, 1.4 or more and 1.6 or less.

When the light emitting unit 10 includes the sealing member 5, the purple light emitted from the light emitting element 3 passes through the sealing member 5 and is incident on the wavelength conversion member 6. As described above, the wavelength conversion member 6 converts the purple light incident from the light emitting element 3 into light having various peak wavelengths included in the visible light region. The light emitting element 3 is positioned so that the emitted purple light is incident on the wavelength conversion member 6. In other words, the wavelength conversion member 6 is positioned so that the light emitted from the light emitting element 3 is incident. In the configurations illustrated in FIGS. 4 to 6, the wavelength conversion member 6 is located along the upper surface of the sealing member 5 in a part of the upper part of the inner space surrounded by the element substrate 2 and the frame body 4. ing. Not limited to this example, for example, the wavelength conversion member 6 may be positioned so as to protrude from the upper part of the inner space surrounded by the element substrate 2 and the frame body 4.

As shown in FIG. 6, the wavelength conversion member 6 includes a translucent member 60 having translucency, a first phosphor 61, a second phosphor 62, a third phosphor 63, a fourth phosphor 64, and a third. 5 Fluorescent material 65 may be provided. The first phosphor 61, the second phosphor 62, the third phosphor 63, the fourth phosphor 64, and the fifth phosphor 65 are also simply referred to as phosphors. It is assumed that the phosphor is contained inside the translucent member 60. The phosphor may be dispersed substantially uniformly inside the translucent member 60. The phosphor converts the purple light incident on the wavelength conversion member 6 into light having a peak wavelength included in the wavelength region of 360 nm to 780 nm, and emits the converted light.

The translucent member 60 may be formed of, for example, a translucent insulating resin such as a fluororesin, a silicon resin, an acrylic resin or an epoxy resin, or a translucent glass material or the like.

The phosphor converts the incident purple light into light having various peak wavelengths.

The first phosphor 61 may convert violet light into light specified in a spectrum having a peak wavelength in, for example, a wavelength region of 400 nm to 500 nm, that is, blue light. The first phosphor 61 is, for example, BaMgAl ₁₀ O ₁₇ : Eu, or (Sr, Ca, Ba) ₁₀ (PO ₄ ) ₆ Cl ₂ : Eu, (Sr, Ba) ₁₀ (PO ₄ ) ₆ Cl ₂ : Eu. Etc. can be used.

The second phosphor 62 may convert violet light into light specified in the spectrum having a peak wavelength in the wavelength region of, for example, 450 nm to 550 nm, that is, blue-green light. As the second phosphor 62, for example, (Sr, Ba, Ca) ₅ (PO ₄ ) ₃ Cl: Eu, Sr ₄ Al ₁₄ O ₂₅ : Eu and the like can be used.

The third phosphor 63 may convert violet light into light specified in the spectrum having a peak wavelength in, for example, a wavelength region of 500 nm to 600 nm, that is, green light. The third phosphor 63 is, for example, SrSi ₂ (O, Cl) ₂ N ₂ : Eu, (Sr, Ba, Mg) ₂ SiO ₄ : Eu ²⁺ , or ZnS: Cu, Al, Zn ₂ SiO ₄ : Mn. Etc. can be used.

The fourth phosphor 64 may convert violet light into light specified in the spectrum having a peak wavelength in the wavelength region of, for example, 600 nm to 700 nm, that is, red light. As the fourth phosphor 64, for example, Y ₂ O ₂ S: Eu, Y ₂ O ₃ : Eu, SrCaClAlSiN ₃ : Eu ²⁺ , CaAlSiN ₃ : Eu, CaAlSi (ON) ₃ : Eu, or the like can be used. ..

The fifth phosphor 65 may convert violet light into light specified in the spectrum having a peak wavelength in the wavelength region of, for example, 680 nm to 800 nm, that is, near infrared light. Near-infrared light may include light in the wavelength region of 680 to 2500 nm. As the fifth phosphor 65, for example, 3Ga ₅ O ₁₂ : Cr or the like can be used.

The combination of types of phosphors contained in the wavelength conversion member 6 is not particularly limited. As shown in the region X of FIGS. 5 and 6, the wavelength conversion member 6 includes the first phosphor 61, the second phosphor 62, the third phosphor 63, the fourth phosphor 64, and the fifth phosphor 65. May have. The wavelength conversion member 6 may have another type of phosphor.

The light emitting unit 10 may include a plurality of wavelength conversion members 6. Each wavelength conversion member 6 may have a different combination of phosphors. The light emitting unit 10 may include a light emitting element 3 that emits purple light to each wavelength conversion member 6. The light emitting unit 10 can emit light having various spectra by controlling the intensity of purple light incident on each wavelength conversion member 6. One wavelength conversion member 6 may include, for example, a phosphor that emits blue fluorescence, a phosphor that emits blue-green fluorescence, and a phosphor that emits green fluorescence. One wavelength conversion member 6 may include only one type of phosphor. One wavelength conversion member 6 is not limited to these examples, and may contain a phosphor in various combinations. The color of the light emitted from the wavelength conversion member 6 is determined based on the type of phosphor contained in the wavelength conversion member 6.

The light emitting unit 10 according to the present embodiment can emit light having various spectra depending on the combination of the wavelength conversion members 6. The light emitting unit 10 emits, for example, a spectrum of direct sunlight from the sun, a spectrum of sunlight reaching a predetermined depth in the sea, a spectrum of light emitted by a candle flame, a spectrum of light of a firefly, or the like. it can. In other words, the light emitting unit 10 can emit light having various colors. Further, the light emitting unit 10 can emit light having various color temperatures.

The lighting device 20 may have a plurality of light emitting units 10. The plurality of light emitting units 10 may include a first light emitting unit and a second light emitting unit. The illumination control unit 22 may independently control the intensity of the light emitted by the first light emitting unit and the intensity of the light emitted by the second light emitting unit, or may control them in association with each other. The light emitting element 3 included in the first light emitting unit is also referred to as a first excited light emitting element. The light emitting element 3 included in the second light emitting unit is also referred to as a second excited light emitting element. The illumination control unit 22 controls the intensity of the first excitation light emitted by the first excitation light emitting element and the intensity of the second excitation light emitted by the second excitation light emitting element, respectively, to form the first light emitting unit. The intensity of the light emitted by the second light emitting unit and the intensity of the light emitted by the second light emitting unit may be controlled. The spectrum of the light emitted by the first light emitting unit may be different from the spectrum of the light emitted by the second light emitting unit. The illumination control unit 22 controls the intensity of the light emitted by the first light emitting unit and the intensity of the light emitted by the second light emitting unit in association with each other to control the light emitted by the first light emitting unit and the second light emitting unit. You may control the spectrum of the combined light with the light emitted by. The light obtained by combining the light emitted by the first light emitting unit and the light emitted by the second light emitting unit is also referred to as synthetic light. The lighting device 20 may emit synthetic light as illumination light. The lighting device 20 may select at least one of the first light emitting unit and the second light emitting unit to emit the illumination light.

<Inspection equipment>
As shown in FIG. 7, the inspection device 200 according to the embodiment includes a lighting device 20 and a sample holder 210. The sample holder 210 is configured so that the sample 50 can be mounted. The lighting device 20 is configured so that the sample 50 mounted on the sample holder 210 can be illuminated with the illumination light. The inspection device 200 may further include an optical microscope. The sample holder 210 may be configured as a stage of an optical microscope.

The inspection device 200 may further include a spectrum determination device 30. The inspection device 200 may be communicably connected to the spectrum determination device 30 provided outside without the spectrum determination device 30. The illuminating device 20 acquires the spectrum of the inspection light from the spectrum determining device 30.

The inspection device 200 may further include an optical system 220 that forms an image of the sample 50 mounted on the sample holder 210 so that the inspector 8 can observe it. The inspection device 200 may further include an eyepiece 230 that allows the light imaged by the optical system 220 to enter the eyes of the examiner 8. The inspector 8 may observe the sample 50 through the optical system 220 and the eyepiece lens 230 and detect an abnormality in the appearance of the sample 50. The optical system 220 may be configured so that the magnification at which the sample 50 is imaged can be changed. The sample holder 210, the optical system 220, and the eyepiece 230 may be configured as an optical microscope. The inspector 8 may directly observe the sample 50 on the sample holder 210 without going through the optical system 220 and the eyepiece 230, and detect an abnormality in the appearance of the sample 50.

The inspection device 200 may further include an image pickup device 40. The image pickup apparatus 40 may take an image of the sample 50 illuminated by the inspection light. The captured image of the sample 50 illuminated with the inspection light is also referred to as an inspection image. The image pickup apparatus 40 may image the sample 50 imaged by the optical system 220, or may image the sample 50 without going through the optical system 220.

The inspection device 200 may further include a display unit 240. The display unit 240 may acquire an inspection image from the image pickup apparatus 40 and display it. The inspector 8 may detect an appearance abnormality contained in the sample 50 based on the inspection image displayed on the display unit 240.

The inspection device 200 may further include an image processing unit 250. The image processing unit 250 may acquire an inspection image from the image pickup apparatus 40. The image processing unit 250 may analyze the inspection image and detect an appearance abnormality contained in the sample 50. The image processing unit 250 may detect a portion of the inspection image in which the difference in brightness or the difference in chromaticity is equal to or greater than a predetermined value as an appearance abnormality. The image processing unit 250 may detect an appearance abnormality based on various conditions.

The inspection device 200 may output the captured image of the sample 50 illuminated by the sampled light to the spectrum determination device 30 by emitting the sampled light to the lighting device 20 and causing the imaging device 40 to image the sample 50. When the inspection device 200 includes the spectrum determination device 30, the inspection device 200 can internally determine the spectrum of the inspection light.

As shown in FIG. 8, the lighting device 20 may include a ring-shaped housing 24 arranged so as to surround the sample 50. It can be said that the ring-shaped housing 24 constitutes ring illumination by mounting a light emitting unit 10 that emits illumination light toward the inside of the ring. The optical system 220 is located inside the ring-shaped housing 24. In this case, the direction in which the illumination light is incident on the sample 50 has a predetermined angle with respect to the optical axis of the optical system 220. As a result, the image formed by the optical system 220 is less likely to include shadows due to illumination.

As shown in FIG. 9, the illuminating device 20 may be configured so that the illuminating light emitted by the light emitting unit 10 via the half mirror 224 included in the optical system 220 is incident substantially perpendicular to the sample 50. Good. It can be said that the lighting device 20 constitutes telecentric lighting. In this case, the direction in which the illumination light is incident on the sample 50 is substantially the same with respect to the optical axis of the optical system 220. As a result, the image formed by the optical system 220 tends to include shadows due to illumination.

In the inspection device 200, the configuration in which the illumination light is incident on the sample 50 is not limited to the above example. The lighting device 20 may be configured in various forms. The illuminating device 20 may control the direction in which the illuminating light is incident on the sample 50. When the illumination light is incident on the sample 50 from different directions, the image captured by the image pickup apparatus 40 of the sample 50 may be different, and the appearance of the sample 50 by the inspector 8 may be different. The inspection device 200 may control the direction in which the illumination light is incident on the sample 50 so that the appearance abnormality included in the predetermined classification can be easily detected. The inspection device 200 may change the illumination form based on the aspect of the sample 50 or the classification of appearance abnormalities that may be contained in the sample 50. The spectrum determination device 30 may determine the spectrum of the inspection light based on the illumination form. By determining the spectrum of the inspection light based on the illumination form, the appearance abnormality included in the predetermined classification becomes more easily detected.

When the image processing unit 250 detects the appearance abnormality, the inspection device 200 may detect the appearance abnormality from the sample 50 by executing the procedure of the flowchart illustrated in FIG.

The lighting device 20 acquires the spectrum of the inspection light corresponding to the predetermined classification from the spectrum determining device 30 (step S11). The lighting device 20 may output information for designating the classification to the spectrum determining device 30 and acquire the spectrum of the inspection light corresponding to the classification from the spectrum determining device 30.

The lighting device 20 emits inspection light (step S12). The lighting device 20 emits the inspection light specified by the spectrum acquired from the spectrum determining device 30 to the light emitting unit 10.

The image processing unit 250 acquires an inspection image from the image pickup device 40 (step S13). The image pickup apparatus 40 takes an image of the sample 50 in a state where the light emitting unit 10 emits the inspection light corresponding to the predetermined classification toward the sample 50, and outputs the inspection image.

The image processing unit 250 calculates an evaluation value for determining whether the inspection target unit 52 includes an appearance abnormality (step S14). The image processing unit 250 may calculate at least one of the difference in brightness and the difference in chromaticity between the comparison target unit and the inspection target unit 52 as an evaluation value. The image processing unit 250 may calculate the evaluation value based on at least one of the difference in brightness and the difference in chromaticity. The image processing unit 250 may calculate as an evaluation value a value obtained by weighting and adding at least one of a lightness difference and a chromaticity difference. The image processing unit 250 may set a part of the inspection image as the inspection target unit 52 (see FIG. 2) and calculate the evaluation value for the inspection target unit 52. The image processing unit 250 may divide the inspection image into a plurality of parts, set each part as an inspection target part 52, and calculate an evaluation value for each inspection target part 52.

The image processing unit 250 determines whether the inspection target unit 52 for which the evaluation value is calculated satisfies the appearance abnormality detection condition (step S15). When the evaluation value is equal to or higher than a predetermined value, the image processing unit 250 may determine that the inspection target unit 52 satisfies the condition for detecting the appearance abnormality, that is, includes the appearance abnormality. The image processing unit 250 may determine that the inspection target unit 52 satisfies the condition for detecting an appearance abnormality when the difference in brightness or the difference in chromaticity is equal to or greater than a predetermined value. When the image processing unit 250 calculates the evaluation value, the brightness difference, or the chromaticity difference for the plurality of inspection target units 52 in step S14, the image processing unit 250 determines whether each inspection target unit 52 satisfies the detection condition of the appearance abnormality. Good.

When the image processing unit 250 determines that the appearance abnormality detection condition is not satisfied (step S15: NO), the image processing unit 250 proceeds to the procedure of step S17. When the image processing unit 250 determines that the condition for detecting the appearance abnormality is satisfied (step S15: YES), the image processing unit 250 detects the inspection target unit 52 as the appearance abnormality (step S16).

The lighting device 20 determines whether to change to the inspection light corresponding to another classification (step S17). From steps S11 to S16, the inspection device 200 can detect the appearance abnormality included in the predetermined classification with high accuracy. On the other hand, the inspection device 200 may not be able to detect the appearance abnormality included in other classifications. By emitting the inspection light corresponding to the other classification to the lighting device 20, the inspection device 200 may be able to detect the appearance abnormality included in the other classification, which has not been detected yet. The lighting device 20 may determine to change to the inspection light corresponding to another classification based on the operation of the administrator of the inspection device 200, or may automatically determine to change to the inspection light corresponding to the other classification. You may. The illuminating device 20 may acquire information regarding which classification the spectrum of the inspection light corresponding to the spectrum determining device 30 can output. Based on the information, the illuminating device 20 may determine whether to change to the inspection light corresponding to another classification, or may determine which classification to change to the inspection light.

When it is determined that the lighting device 20 does not change to the inspection light corresponding to another classification (step S17: NO), the processing of the flowchart of FIG. 10 ends. When the lighting device 20 determines that the inspection light is changed to the inspection light corresponding to another classification (step S17: YES), the illumination device 20 acquires the spectrum of the inspection light corresponding to the other classification from the spectrum determining device 30 (step S18). The lighting device 20 may output information for designating the classification to the spectrum determining device 30 and acquire the spectrum of the inspection light corresponding to the classification from the spectrum determining device 30. The lighting device 20 returns to the procedure of step S12 after executing the procedure of step S18. In step S12, the lighting device 20 emits the inspection light specified by the spectrum acquired from the spectrum determining device 30 to the light emitting unit 10. The inspection device 200 continues the procedure after step S13.

As described above, the inspection device 200 can improve the detection accuracy of the appearance abnormality in the sample 50 by emitting the inspection light corresponding to the predetermined classification to the lighting device 20.

When the inspector 8 detects the appearance abnormality of the sample 50 using the inspection device 200, the procedure for detecting the appearance abnormality in steps S15 and S16 may be replaced by the step of the inspector 8 inspecting. The procedure for changing the inspection light in step S17 may be replaced by a step in which the inspector 8 operates to change the inspection light.

<Spectrum management by database>
The spectrum determination device 30 may acquire information associated with the sample 50 to be inspected. The information associated with the sample 50 as an inspection target is also referred to as inspection target information. The inspection target information may include information that identifies the classification of appearance abnormalities that may be contained in the sample 50. The inspection target information may include information regarding the color or outer shape of the sample 50. The inspection target information may include information that identifies the sample 50. The sample 50 may be specified by information such as a part number of an electronic device. The inspection target information may be stored in an IC tag or the like attached to the sample 50. The spectrum determination device 30 may acquire inspection target information from an IC tag or the like.

When the spectrum determining device 30 determines the spectrum of the inspection light for facilitating the detection of a predetermined appearance abnormality, the inspection target information of the sample 50 referred to for determining the spectrum may be associated with the determined spectrum. .. The spectrum determination device 30 may generate a database in which the inspection target information and the determined spectrum are associated with each other. The spectrum determination device 30 may extract a spectrum associated with the inspection target information of the sample 50 from the database and output the extracted spectrum to the illumination device 20 as a spectrum of the inspection light. The inspection target information associated with the spectrum in the database may include the classification of appearance anomalies referenced to determine the spectrum. By including the classification of the appearance abnormality in the inspection target information, the inspection light is easily controlled so that the appearance abnormality included in the predetermined classification can be easily detected.

The database may be stored in the inspection device 200. The inspection device 200 may extract the spectrum of the inspection light from the database based on the inspection target information and emit the inspection light to the lighting device 20. When the inspection device 200 extracts the spectrum of the inspection light from the database, it becomes easy to control the spectrum of the inspection light based on the inspection target information. As a result, the detection accuracy of the appearance abnormality is likely to be improved.

<Other embodiments>
The spectrum determination device 30 may be configured independently of the inspection device 200. For example, the spectrum determination device 30 may acquire an image captured from an image pickup device 40 not included in the inspection device 200 and determine the spectrum of the inspection light based on the captured image. When the spectrum determining device 30 can acquire an captured image without using the inspection device 200, the time used for the inspection in the operating time of the inspection device 200 is compared with the case where the captured image is acquired by using the inspection device 200. It can be long. As a result, the operating rate of the inspection device 200 can be increased.

The spectrum determination device 30 may determine the spectrum of the inspection light corresponding to a plurality of different classifications. In this case, the spectrum determining device 30 may select an appropriate spectrum based on the inspection target information and output it to the lighting device 20. The spectrum determination device 30 may select a spectrum based on the classification specified by the lighting device 20 and output the spectrum to the lighting device 20. The spectrum may be automatically selected in the inspection device 200, or may be selected based on an operation from the operator of the inspection device 200.

When the inspection device 200 includes the spectrum determination device 30, the spectrum determination device 30 can detect the appearance abnormality contained in the sample 50 with high accuracy after the sample 50 to be inspected is carried into the inspection device 200. The spectrum of the inspection light may be determined.

When the light emitting unit 10 of the lighting device 20 includes a first light emitting unit and a second light emitting unit, the first light emitting unit and the second light emitting unit can emit inspection light corresponding to the first classification and the second classification, respectively. It may be configured. In this case, the inspection device 200 may select either the first light emitting unit or the second light emitting unit and emit the inspection light based on the inspection target information.

The diagram illustrating the embodiment according to the present disclosure is schematic. The dimensional ratios on the drawings do not always match the actual ones.

Although the embodiments relating to the present disclosure have been described based on various drawings and examples, it should be noted that those skilled in the art can easily make various modifications or modifications based on the present disclosure. It should be noted, therefore, that these modifications or modifications are within the scope of this disclosure. For example, the functions and the like included in each component and the like can be rearranged so as not to be logically inconsistent, and a plurality of components and the like can be combined or divided into one.

In this disclosure, the descriptions such as "first" and "second" are identifiers for distinguishing the configuration. The configurations distinguished by the descriptions such as "first" and "second" in the present disclosure can exchange numbers in the configurations. For example, in the first classification, the identifiers "first" and "second" can be exchanged with the second classification. The exchange of identifiers takes place at the same time. Even after exchanging identifiers, the configuration is distinguished. The identifier may be deleted. The configuration with the identifier removed is distinguished by a code. Based solely on the description of identifiers such as "first" and "second" in the present disclosure, it shall not be used as a basis for interpreting the order of the configurations and for the existence of identifiers with smaller numbers.

1 Lighting system 8 Inspector 10 Light emitting part (2: Element substrate, 2A: Main surface, 3: Light emitting element, 4: Frame, 5: Sealing member, 6: Wavelength conversion member, 60: Translucent member, 61 ~ 65: 1st to 5th phosphors)
20 Lighting device (22: Lighting control unit, 24: Housing)
30 Spectrum determination device (32: determination unit)
40 Imaging device 50 Samples 51 Sampling target area (51a: 1st region, 51b: 2nd region)
52 Inspection target part 55 Abnormal part 200 Inspection device (210: sample holder, 220: optical system, 224: half mirror, 230: eyepiece, 240: display part, 250: image processing part)

Claims (21)

1. Equipped with a processor
   The processor
   A first region in which the first appearance abnormality included in a predetermined classification is located and a second region having a region extending from the first region to at least a part within a predetermined range and in which the first appearance abnormality is not located. The captured image of the sampling target portion including the sampled image and the spectral information of the sampling light illuminating the sampling target portion in order to capture the captured image are acquired.
   An evaluation index based on at least one of the difference in brightness and the difference in chromaticity between the portion in which the first region is imaged and the portion in which the second region is imaged in the captured image is calculated.
   The spectrum of the inspection light that illuminates the inspection target portion in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification is determined based on the evaluation index and the spectrum information of the sampling light. To do,
   Spectrum determinant.
2. The processor
   An evaluation index based on the captured image of the sampling target portion illuminated by the first sampling light specified in the first spectrum is calculated as the first evaluation index.
   An evaluation index based on the captured image of the sampling target portion illuminated by the second sampling light specified in the second spectrum is calculated as the second evaluation index.
   The spectrum determining apparatus according to claim 1, wherein one of the first spectrum and the second spectrum is determined as the spectrum of the inspection light based on the first evaluation index and the second evaluation index.
3. The processor
   The spectrum determining apparatus according to claim 1 or 2, wherein a value obtained by weighting and adding at least one of the calculation results of the brightness difference and the chromaticity difference is calculated as the evaluation index.
4. The spectrum determining device according to any one of claims 1 to 3, wherein the predetermined classification includes a classification based on the size of the unevenness of the first appearance abnormality and the second appearance abnormality.
5. The spectrum determining device according to any one of claims 1 to 4, wherein the processor is communicably connected to a lighting device that emits the test light and outputs a spectrum of the test light to the lighting device.
6. The spectrum determining device according to claim 5, wherein the lighting device is for inspecting an article.
7. The captured image of the sampling target portion including the first region where the first appearance abnormality included in the predetermined classification is located and the second region extending from the first region to at least a part within the predetermined range, and the captured image. The step of acquiring the spectral information of the sampling light illuminating the sampling target portion for imaging, and
   A step of calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion in which the first region is imaged and a portion in which the second region is imaged in the captured image.
   The spectrum of the inspection light that illuminates the inspection target portion in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification is determined based on the evaluation index and the spectrum information of the sampling light. A method for determining the spectrum, including steps to be performed.
8. To the processor
   The captured image of the sampling target portion including the first region where the first appearance abnormality included in the predetermined classification is located and the second region extending from the first region to at least a part within the predetermined range, and the captured image. The step of acquiring the spectral information of the sampling light illuminating the sampling target portion for imaging, and
   A step of calculating an evaluation index based on at least one of a brightness difference and a chromaticity difference between a portion in which the first region is imaged and a portion in which the second region is imaged in the captured image.
   The spectrum of the inspection light that illuminates the inspection target portion in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification is determined based on the evaluation index and the spectrum information of the sampling light. A spectrum determination program that executes the steps to be performed.
9. Equipped with a lighting device and a spectrum determination device,
   The spectrum determining device is
   A captured image of a sampling target portion including a first region in which a first appearance abnormality included in a predetermined classification is located and a second region extending from the first region to at least a part within a predetermined range, and the captured image. Obtaining the spectral information of the sampling light illuminating the sampling target portion for imaging,
   An evaluation index based on at least one of the difference in brightness and the difference in chromaticity between the portion in which the first region is imaged and the portion in which the second region is imaged in the captured image is calculated.
   The spectrum of the inspection light that illuminates the inspection target portion in order to detect whether the inspection target portion includes the second appearance abnormality included in the predetermined classification is determined based on the evaluation index and the spectrum information of the sampling light. And
   The lighting device emits the inspection light to the inspection target portion.
   Lighting system.
10. The lighting system according to claim 9, wherein the lighting device is configured to be mounted on an optical microscope for observing the inspection target portion.
11. The lighting system according to claim 9 or 10, wherein the lighting device is configured as ring lighting.
12. The lighting system according to any one of claims 9 to 11, wherein the lighting device is for inspecting an article.
13. A light emitting unit and a lighting control unit that controls the light emitting unit are provided.
    The lighting control unit
    The evaluation index calculated based on the captured image of the sampling target portion illuminated by the sampling light and the information on the spectrum determined based on the spectrum information of the sampling light are acquired.
    The light emitting portion is emitted with the inspection light specified in the spectrum.
    The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located and a second region extending from the first region to at least a part within a predetermined range.
    The evaluation index is based on at least one of a difference in brightness and a difference in chromaticity between the portion in which the first region is imaged and the portion in which the second region is imaged.
    The light emitting unit emits the inspection light to the inspection target portion to be inspected for the second appearance abnormality included in the predetermined classification.
    Lighting device.
14. The lighting device according to claim 13, which is configured to be mounted on an optical microscope for observing the inspection target portion.
15. The lighting device according to claim 13 or 14, wherein the light emitting unit is arranged as ring lighting.
16. The light emitting unit
    A light emitting element that emits light having a peak wavelength in the wavelength region of 360 nm to 430 nm, and
    The lighting device according to any one of claims 13 to 15, further comprising a wavelength conversion member that converts the light emitted by the light emitting element into light having a peak wavelength in the wavelength region of 360 nm to 780 nm.
17. The lighting device according to any one of claims 13 to 16, which is used for inspecting articles.
18. Equipped with a lighting device and a sample holder
    The lighting device emits inspection light specified by a spectrum determined based on an evaluation index calculated based on an image captured by a sampling target portion illuminated by the sampling light and spectral information of the sampling light. And
    The sampling target portion includes a first region in which a first appearance abnormality included in a predetermined classification is located and a second region extending from the first region to at least a part within a predetermined range.
    The evaluation index is based on at least one of a difference in brightness and a difference in chromaticity between the portion in which the first region is imaged and the portion in which the second region is imaged.
    The sample holder is configured so that the inspection object can be arranged so that the inspection object is illuminated by the inspection light.
    The inspection target is an inspection device including an inspection target portion to be inspected for a second appearance abnormality included in the predetermined classification.
19. The lighting device is
    It is equipped with a first light emitting unit and a second light emitting unit that emit light specified by different spectra.
    The inspection device according to claim 18, wherein at least one of the first light emitting unit and the second light emitting unit is selected to emit the inspection light.
20. The lighting device is
    Obtain information about the inspection object and
    The inspection device according to claim 18 or 19, which controls the spectrum of the inspection light based on the information about the inspection object.
21. The sample holder is included in the optical microscope.
    The inspection device according to any one of claims 18 to 20, wherein the lighting device is configured to be mounted on the optical microscope.

Images