CN1844867A - In-situ non-contact method for detecting MOCVD graphite temperature distribution - Google Patents
In-situ non-contact method for detecting MOCVD graphite temperature distribution Download PDFInfo
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- CN1844867A CN1844867A CN200510063801.3A CN200510063801A CN1844867A CN 1844867 A CN1844867 A CN 1844867A CN 200510063801 A CN200510063801 A CN 200510063801A CN 1844867 A CN1844867 A CN 1844867A
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Abstract
The invention discloses an original non-contact method for detecting the temperature distribution of metal organic chemical gas-phase deposition (MOCVD) graphite. It uses digital camera to shoot the graphite, while a filter can be added at the lens; then uses computer to read the data document of picture, according to the three basic points of each pixel (red, green, and blue) to find the temperature distribution character of graphite. The invention has lower cost, high temperature resolution and spatial resolution, while it can measure several points at one time, with high speed.
Description
Technical field
The present invention relates to a kind of method of detecting MOCVD equipment graphite Temperature Distribution.
Background technology
The metal-organic chemical vapor deposition equipment technology claims MOCVD (abbreviation of Metal-Organic ChemicalVapor Deposition) again.It has become the core technology of photoelectron material such as indium arsenide, indium phosphide and device production through the development of decades since nineteen sixties proposes first.In addition, metal-organic chemical vapor deposition equipment (MOCVD) still prepares the main stream approach of gallium nitride light-emitting diode and laser diode epitaxial wafer.Using metal-organic chemical vapor deposition equipment (MOCVD) equipment growth material, particularly will grow high-quality material, is very important for the monitoring of graphite temperature.Because epitaxial wafer is positioned on the graphite, therefore, the graphite temperature homogeneity influences the homogeneity of epitaxial film in the reaction chamber.Equipment in the past all is to place a thermopair to measure temperature in the reaction chamber in reaction chamber, but only represents that with this temperature the temperature of reaction chamber is very coarse that it can not reflect the Temperature Distribution of the Temperature Distribution in the reaction chamber, particularly graphite.If the measurement Temperature Distribution, conventional method is: (1) is measured at multiple spot simultaneously with a plurality of probes (as thermopair, leucoscope etc.); (2) with a probe a plurality of spot scans are measured.The former cost height, spatial resolution is limited; The latter can not measure simultaneously to a plurality of points, and needs the X-Y translation device to realize scan function.
Summary of the invention
In order to overcome the deficiencies in the prior art, the present invention proposes the method that the Temperature Distribution of graphite is surveyed in a kind of original position noncontact.The method as media, by analyzing the data of taken image, obtains the information of graphite Temperature Distribution with digital camera.Not only cost is low for this method, temperature resolution and spatial resolution are very high, and multiple spot measures simultaneously, and measuring speed is fast, can carry out digital processing, record and preservation.
In order to achieve the above object, technical solution of the present invention provides a kind of method of original position noncontact detecting MOCVD graphite Temperature Distribution, it adopts digital camera that graphite is taken pictures, and analyzes the characteristic of graphite Temperature Distribution according to the data of the picture that digital camera write down; Comprise step (1), monoblock graphite is taken pictures with digital camera; (2), read in the data of digital camera, analyze the component of each picture element with computer; (3), with the component data of the picture element of gained, the respective component value of contrast sampling pixel point, and determine the graphite Temperature Distribution according to " blackbody radiation " rule.
The method of described detecting MOCVD graphite Temperature Distribution, the digital camera that it is used is common visible light digital camera, or infrared digital camera.
The method of described detecting MOCVD graphite Temperature Distribution, its described second step, read in the data of digital camera with computer, analyze the component of each picture element, comprise three kinds of method: a, three-wavelength method: read in the data of digital camera with computer, analyze the red, green, blue colouring component of each picture element after, carried out for the 3rd step again, according to the rule of " blackbody radiation ", simulate the temperature of each picture element; B, double wave regular way: the data of reading in digital camera with computer, because the growth temperature of metal organic chemical vapour phase deposition reaction chamber is generally less than 2000 degrees centigrade, so in the emission spectrum of graphite blue light ingredient generally a little less than, digital camera Smalt component is very little, therefore after giving up the blue component of each pixel of digital camera, carried out for the 3rd step again, according to the ratio of red, the green component of each picture element, and the rule of " blackbody radiation ", calculate the temperature of each pixel; C, single wavelength method: the data of reading in digital camera with computer, in these data, only stay red color component value, after giving up green and blue component value, carried out for the 3rd step again, intensity according to each picture element red component, and contrast " blackbody radiation " rule, just can extrapolate the Temperature Distribution of graphite.
The method of described detecting MOCVD graphite Temperature Distribution, its described c, single wavelength method comprise arrowband list wavelength method: add an arrowband ruddiness wave filter before digital camera lens after, take pictures to monoblock graphite with digital camera (1); (2), read in the data of digital camera then with computer, only stay red color component value in these data, give up green and blue component value; Carry out again (3),, extrapolate the Temperature Distribution of graphite with the intensity of each picture element red component of sampling pixel point contrast.
Description of drawings
Fig. 1 is the technology path figure of original position noncontact detecting MOCVD graphite Temperature Distribution;
Fig. 2 is the synoptic diagram of the aglow graphite that photographs of digital camera.
Embodiment:
All temperature are higher than the object of absolute zero can emission of thermal radiation, is commonly called as " blackbody radiation ".When the temperature of object raise, heat radiation strengthened on the one hand, and glow color (frequency spectrum) also will change on the other hand.Generally speaking, we can observe with the naked eye this variation.But after the temperature height of object arrived to a certain degree, the heat radiation of object was very strong, and human eye can not differentiated the color distinction that is caused by temperature contrast.At this moment, just need substitute human eye by some relatively more accurate instruments writes down and observes.Digital camera can write down taken image information with digital mode, and very strong color identifying ability is arranged, but also can adjust the time shutter according to the object luminous intensity, to reach the best titime effect.Temperature Distribution when therefore, it is very suitable for monitoring object high temperature.
Digital camera is by camera lens, electric charge coupling apparatus (Charge Coupled Device, be called for short CCD), A/D converter (Analog Digital Converter, be called for short ADC or A/D), microprocessor (Micro-Processor Unit, be called for short MPU), internal memory, LCD (LiquidCrystal Display, be called for short LCD), removable memory (PC card) and interface (computer interface, the televisor interface) etc. part is formed, usually they all are installed in the inside of digital camera, also have the LCD of some digital cameras to separate with camera body.Have only the effect of camera lens identical with general camera in the digital camera, to sensor devices CCD (charge-coupled image sensor), CCD is a semiconductor devices with convergence of rays for it, and it has replaced the position of film in the general camera, and its function is that light signal is changed into electric signal.Like this, just obtained electronic image corresponding to photographed, but it can't be sent to Computer Processing at once, also need carry out conversion from the simulating signal to the digital signal according to the requirement of computing machine, and ADC (analog to digital converter) device is used for carrying out this work.Next MPU (microprocessor) compresses digital signal and is converted into specific picture format, for example jpeg format.At last, image file is stored in the internal memory.So far, the groundwork of digital camera is finished, and what be left to do is to check the photo that photographs by LCD (LCD).
Mention above, digital camera is to come recordable picture with a kind of special semiconductor material, and the special semiconductor of this class is called for short CCD the electric charge coupling apparatus.It is made up of thousands of independently light activated elements, and these light activated elements are arranged in and the corresponding matrix of view finder usually.When taking, the light transmission camera lens that extraneous scene reflected is radiated on the CCD, and is converted into electric charge, and the quantity of electric charge on each element depends on the intensity of illumination that it is suffered.When the button of pressing on the digital camera, CCD is sent to the information of each element on the analog to digital converter, and analog to digital converter is delivered among the RAM (random access memory) after with digital coding, obtains a complete digital pictures this moment.CCD itself can not differentiate color, and it only is a photoelectric commutator.The method that realizes colour phhotograpy has multiple, comprises to CCD device surface CFA (Color Filter Array, color filter lens array) in addition, perhaps uses beam splitting system that light is divided into red, green, blue three looks, respectively with 3 CCD receptions.The analog to digital converter of just having mentioned (A/D converter) is called ADC (Analog Digital Converter), i.e. analog-digital converter again.It is the device that analog electrical signal is converted to digital electric signal.In general CCD is quantified as some pixels with actual scenery on the direction of X and Y, and A/D converter then is that the brightness of each pixel or color-values are quantified as several grades.Specifically, every kind of primary colours adopt 8 (or 1O position) expression in the general digital camera (low and middle-grade digital camera), with 24 is example, three primary colours (red, green, blue) respectively account for 8 bits, that is to say that redness can be divided into 2^8=256 different grade, green and blueness also can be divided into 256 different grades respectively, and they is combined as 256 * 256 * 256=16777216, i.e. 1,600 ten thousand kinds of colors so.By analysis as can be seen, digital camera can adopt the accurately color information of the captured object of record of digital form.The high color identifying ability of digital camera helps it to realize the function of monitoring high temp objects Temperature Distribution.
Digital camera not only has very high color resolution, and has very high spatial resolution.Digital camera the point of each measurement " pixel ".The pixel of digital camera reaches more than 1,000,000 at present.
1. utilize digital camera that graphite base in the metal-organic chemical vapor deposition equipment (MOCVD) is taken, and before camera lens, add optical filtering as required, utilize computer to read data file in the captured image then, determine the temperature distributing characteristic of graphite according to the size of three primary colours (red, green, blue) component value of each picture element of formation that file write down.
2. during with metal-organic chemical vapor deposition equipment (MOCVD) growth material, growth temperature is generally more than 800 degrees centigrade, graphite this moment red heat, and main luminous wave band is at red light district.The Digital Image Data of utilizing digital camera can accurately write down captured object is the characteristic of rgb value (R, G, B represent the red, green, blue three primary colours respectively), the Temperature Distribution of coming in-situ monitoring graphite.
Concrete monitoring method has four kinds: (1) three-wavelength method: monoblock graphite is taken pictures with digital camera, read in the data of digital camera then with computer, analyze the RGB component (R, G, B represent red, green, blue respectively) of each picture element, according to the rule of " blackbody radiation ", simulate the temperature of each picture element.(2) double wave regular way: with digital camera monoblock graphite is taken pictures, read in the data of digital camera then with computer.Because the growth temperature of metal-organic chemical vapor deposition equipment (MOCVD) reaction chamber is generally less than 2000 degrees centigrade, so in the emission spectrum of graphite blue light ingredient generally a little less than, the B component is very little in the digital camera, therefore gives up the B component of each pixel of digital camera.According to the R of each picture element, the ratio (R/B) of G component, and the rule of " blackbody radiation ", just can calculate the temperature of each pixel.(3) single wavelength method: with digital camera monoblock graphite is taken pictures, read in the data of digital camera then with computer, only stay R (redness) component value in these data, give up G (green) and B (blueness) component value.According to the intensity of each picture element R component, and contrast " blackbody radiation " rule, just can extrapolate the Temperature Distribution of graphite.(4) arrowband list wavelength method: before digital camera lens, add an arrowband ruddiness wave filter (for prior art), with digital camera monoblock graphite is taken pictures, read in the data of digital camera then with computer, only stay R (redness) component value in these data, give up G (green) and B (blueness) component value (G, B component value very little, almost nil).Contrast the intensity of each picture element R component, just can extrapolate the Temperature Distribution of graphite.Its technology path as shown in Figure 1.
3. during as metal-organic chemical vapor deposition equipment (MOCVD) growth material, growth temperature is less than 800 degrees centigrade, and replace different digital cameras to get final product with infrared digital camera (being generally military use product) this moment.Concrete monitoring method has four kinds equally, with the 2nd all fours, repeats no more.
During with metal-organic chemical vapor deposition equipment (MOCVD) growth material, growth temperature is generally more than 800 degrees centigrade, graphite this moment red heat, and main luminous wave band is at red light district.The graphite Temperature Distribution adopts following method in in-situ monitoring metal-organic chemical vapor deposition equipment (MOCVD) growth course:
In the material growth course, take the photo of monoblock graphite with digital camera.Temperature is during greater than 800 degrees centigrade, the main red-emitting of graphite.The light transmission camera lens that this moment, graphite was launched is radiated on the CCD, and is converted into electric charge.Because there is Temperature Distribution in graphite, temperature difference, radiation intensity are also different.CCD is made up of light activated element in addition, and the quantity of electric charge on each element depends on the intensity of illumination that it is suffered.Therefore, show on the image to be exactly the temperature difference, taken color is also different.
When adopting the double wave regular way to measure, what digital camera photographed is coloured image, and the color of each picture element of image is by R, G, the decision of B value of this picture element.Consider that the B component gives up than I.Obtain the R of each pixel, the ratio (R/B) of G component, and contrast " blackbody radiation " rule just can calculate the Temperature Distribution of each pixel.Digital camera is far longer than the resolution degree of human eye to color to the resolution degree of color, therefore, the different point of sampling on graphite because the temperature of graphite is higher, ruddiness in the highest flight, promptly the R value will be far longer than the G value in the rgb value component.This moment is just can relatively the take a sample temperature of each point of R value only relatively, and the R value is big more, and temperature is high more.
When adopting arrowband list wavelength method to measure, before digital camera lens, add an arrowband ruddiness wave filter, with camera monoblock graphite is taken pictures then.Because arrowband ruddiness wave filter only allows ruddiness to pass through, therefore, each picture element of taken image has only R value component (G, B value component very little).As long as this moment is also the intensity of each pixel R value and contrast just can relatively the take a sample temperature of each point of " blackbody radiation " rule relatively.
Application example:
During with the MOCVD growing GaN, the temperature of graphite is greater than 1000 degrees centigrade, and this moment, graphite was aglow, based on red-emitting.The graphite base of certain MOCVD equipment adopts high-frequency induction heating, under the influence of skin effect, the graphite lip temperature is higher than central temperature, then the synoptic diagram that photographs picture with digital camera (this figure represents red light intensity with gray scale, and the high expression of core gray scale luminous intensity is weak) as shown in Figure 2.At this moment, read in the data of the captured image of digital camera with computer, analyze R, G, the B component of each picture element, then can analyze by contrast R component, the quality of temperature homogeneity on the radius of center O and edge M, can be the center of circle with O relatively also, be the quality of temperature homogeneity on the circumference of radius with any r＜=M, temperature that can also more any sampling pixel point whether identical.
If measure the temperature of center O and edge M with thermopair, then can go out the general Temperature Distribution of graphite according to the data analysis of captured picture.The temperature of supposing to record with thermopair center O is 1000 ℃, and edge M temperature is 1005 ℃; And the rgb value that draws the center O place this moment with computer for analysis is (205,11,0), and the rgb value at edge M place is (255,11,0).Because G and B value are very little, can ignore, then center edge R value difference distance is 255-205=50; And the temperature difference of center edge is 1005 ℃-1000 ℃=5 ℃.Assumed temperature changes evenly, and then the corresponding temperature change of each R value variation is 5 ℃/50=0.1.If it is 235 that the R value of a picture element is arranged on this radius of OM, the temperature of inferring this point that then can be rough is 1000 ℃+0.1* (235-205)=1003 ℃.
Claims (4)
1. the method for an original position noncontact detecting MOCVD graphite Temperature Distribution is characterized in that, adopts digital camera that graphite is taken pictures, and analyzes the characteristic of graphite Temperature Distribution according to the data of the picture that digital camera write down; Comprise step (1), monoblock graphite is taken pictures with digital camera; (2), read in the data of digital camera, analyze the component of each picture element with computer; (3), with the component data of the picture element of gained, the respective component value of contrast sampling pixel point, and determine the graphite Temperature Distribution according to " blackbody radiation " rule.
2. the method for detecting MOCVD graphite Temperature Distribution as claimed in claim 1 is characterized in that: used digital camera, be common visible light digital camera, or infrared digital camera.
3. the method for detecting MOCVD graphite Temperature Distribution as claimed in claim 1, it is characterized in that: described second step, read in the data of digital camera with computer, analyze the component of each picture element, comprise three kinds of method: a, three-wavelength method: read in the data of digital camera with computer, analyze the red, green, blue colouring component of each picture element after, carried out for the 3rd step again, according to the rule of " blackbody radiation ", simulate the temperature of each picture element; B, double wave regular way: the data of reading in digital camera with computer, because the growth temperature of metal organic chemical vapour phase deposition reaction chamber is generally less than 2000 degrees centigrade, so in the emission spectrum of graphite blue light ingredient generally a little less than, digital camera Smalt component is very little, therefore after giving up the blue component of each pixel of digital camera, carried out for the 3rd step again, according to the ratio of red, the green component of each picture element, and the rule of " blackbody radiation ", calculate the temperature of each pixel; C, single wavelength method: the data of reading in digital camera with computer, in these data, only stay red color component value, after giving up green and blue component value, carried out for the 3rd step again, intensity according to each picture element red component, and contrast " blackbody radiation " rule, just can extrapolate the Temperature Distribution of graphite.
4. the method for detecting MOCVD graphite Temperature Distribution as claimed in claim 3, it is characterized in that: described c, single wavelength method, comprise arrowband list wavelength method: add an arrowband ruddiness wave filter before digital camera lens after, take pictures to monoblock graphite with digital camera (1); (2), read in the data of digital camera then with computer, only stay red color component value in these data, give up green and blue component value; Carry out again (3),, extrapolate the Temperature Distribution of graphite with the intensity of each picture element red component of sampling pixel point contrast.
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| CN115561259A (en) * | 2022-11-11 | 2023-01-03 | 深圳市志橙半导体材料有限公司 | Performance test method of silicon carbide coating graphite plate and related device |
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