CN113819868A - Hot-pressing detection system and method - Google Patents
Hot-pressing detection system and method Download PDFInfo
- Publication number
- CN113819868A CN113819868A CN202110127392.8A CN202110127392A CN113819868A CN 113819868 A CN113819868 A CN 113819868A CN 202110127392 A CN202110127392 A CN 202110127392A CN 113819868 A CN113819868 A CN 113819868A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- detection
- heating
- height
- station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The application discloses a hot-pressing detection system and a method, the hot-pressing detection system comprises a detection part, a heating and pressure-maintaining part and a conveying device, the detection part is arranged at a front station or a rear station of the heating and pressure-maintaining part, or the detection part is two, the two detection parts are respectively arranged at the front station and the rear station of the heating and pressure-maintaining part, and a loading jig loaded with a workpiece is conveyed to the detection part and the heating and pressure-maintaining part; the detection part is used for measuring the height of the workpiece at least one position on the workpiece and detecting the appearance of the workpiece, wherein the height of the workpiece refers to the height difference between the height of the position on the workpiece and the height of the position on the carrying jig, which is different from the position by a preset distance; the heating and pressure maintaining part is used for heating and maintaining the pressure of the workpiece at the position of the heating and pressure maintaining part. This application increases around the process of heating pressurize and detects the outward appearance AIO of work piece volume height and work piece, has increased the decision factor to heating pressurize effect, has improved the excellent rate of work piece encapsulation.
Description
Technical Field
The invention belongs to the technical field of workpiece hot pressing, and relates to a hot pressing detection system and method.
Background
The current trend of semiconductor industry development and application includes intelligent mobile devices, big data, Artificial Intelligence (AI), 5G communication network, High Performance Computer (HPC), internet of things (IoT), smart cars, industrial 4.0, cloud computing, etc. The applications promote the rapid development of electronic devices, a process of hot-pressing a workpiece is required in the packaging process of semiconductors, and the quality of the workpiece or the hot-pressing effect of the workpiece and the like need to be controlled strictly, so that the workpiece after hot-pressing can be further operated, and finally, a qualified workpiece packaging product is produced.
The existing hot pressing process may cause problems in workpieces, and further cause subsequent packaging of workpieces with defects after hot pressing, resulting in low quality of finished products, so that a solution is urgently needed.
Disclosure of Invention
In order to solve the problems of the related art, the application provides a hot-pressing detection system and a hot-pressing detection method, and the technical scheme is as follows:
in a first aspect, the application provides a hot pressing detecting system, hot pressing detecting system includes detection part, heating splenium and conveyor, detection part is one, detection part set up in the preceding station or the back of heating splenium is protected to the heating, perhaps, detection part is two, two detection part set up respectively in the preceding station and the back of heating splenium are protected, wherein:
conveying the loading jig loaded with the workpiece to the detection part and the heating and pressure-maintaining part;
the detection part is used for measuring the height of the workpiece at least one position on the workpiece and detecting the appearance of the workpiece, wherein the height of the workpiece is the height difference between the height of the position on the workpiece and the height of the position on the loading jig, which is different from the position by a preset distance;
the heating and pressure maintaining part is used for heating and maintaining the pressure of the workpiece at the position of the heating and pressure maintaining part.
Optionally, the number of the detection parts is two, the two detection parts are respectively a first detection part positioned at a front station of the heating and pressure maintaining part and a second detection part positioned at a rear station of the heating and pressure maintaining part,
the first detection part is used for measuring the height of the workpiece at least one position on the workpiece and detecting the appearance of the workpiece to obtain a first group of detection data;
the second detection part measures the height of the workpiece at least one position on the workpiece and detects the appearance of the workpiece to obtain a second group of detection data.
Optionally, the hot pressing detection system further includes a processor electrically connected to the first detection portion and the second detection portion, and the processor determines whether the process of heating and maintaining the pressure of the workpiece by the heating and pressure maintaining portion meets the requirements according to the first group of detection data and the second group of detection data.
Optionally, the detection part includes a traverse assembly, a height measuring sensor head and an AOI camera, the height measuring sensor head and the AOI camera are mounted on the traverse assembly and driven by the traverse assembly to move in a horizontal adjustment direction, the horizontal adjustment direction is perpendicular to the conveying direction of the conveying device, wherein:
the height measuring sensor head measures the height of a preset position of the workpiece and a position, which is different from the preset position by a preset distance, on the carrying jig;
and the AOI camera is used for photographing and detecting the appearance of the workpiece.
Optionally, the detection portion further includes a transfer device and a recovery magazine, and when the AOI camera detects that the appearance of the workpiece is not good, the transfer device transfers the workpiece and/or the loading jig to the recovery magazine.
In a second aspect, the present application further provides a hot press detection method, including:
conveying the loading jig loaded with the workpiece to a detection station and a heating and pressure maintaining station;
measuring the height of the workpiece at least one position on the workpiece at the detection station and detecting the appearance of the workpiece, wherein the height of the workpiece is the height difference between the height of the position on the workpiece and the height of the position on the carrying jig, which is different from the position by a preset distance;
and heating and maintaining the pressure of the workpiece at the heating and maintaining station.
Optionally, the conveying the loading jig loaded with the workpiece to the detection station and the heating and pressure maintaining station includes:
conveying the object carrying jig loaded with the workpiece to a first detection station, a heating and pressure maintaining station and a second detection station in sequence;
the measuring the height of the workpiece in at least one position on the workpiece and detecting the appearance of the workpiece comprises the following steps:
when the carrying jig is conveyed to the first detection station, the height of the workpiece at least one position on the workpiece is measured, and the appearance of the workpiece is detected to obtain a first group of detection data;
and when the object carrying jig is conveyed to the second detection station, measuring the height of the workpiece in at least one position on the workpiece and detecting the appearance of the workpiece to obtain a second group of detection data.
Optionally, after obtaining the first set of detection data, the method further includes:
judging whether the appearance of the workpiece is qualified or not according to the first group of detection data;
when the first group of detection data indicates that the detected appearance of the workpiece is unqualified, the workpiece and/or the carrying fixture are/is conveyed to a recovery box;
and when the first group of detection data indicate that the detected appearance of the workpiece is qualified, the loading jig is conveyed to the heating and pressure maintaining station.
Optionally, after obtaining the second set of detection data, the method further comprises:
judging whether the appearance of the workpiece is qualified or not according to the second group of detection data;
when the second group of detection data indicate that the detected appearance of the workpiece is unqualified, the workpiece and/or the carrying jig are/is conveyed to a recovery box;
and when the second group of detection data indicates that the detected appearance of the workpiece is proper, the object carrying jig is conveyed to the next station.
Optionally, after obtaining the first set of detection data and the second set of detection data, the method further comprises:
and judging whether the process of heating and maintaining the pressure of the workpiece meets the requirements or not according to the first group of detection data and the second group of detection data.
Based on the technical scheme, the application can at least realize the following beneficial effects:
by adding the height of the workpiece and the AIO detection of the appearance of the workpiece before and after the heating and pressure maintaining process, the judgment factor of the heating and pressure maintaining effect is increased, and the excellent rate of workpiece packaging is improved.
Appearance detection of the workpiece is added before the heating and pressure maintaining process, so that defective workpieces can be directly removed conveniently, and only qualified workpieces are heated and pressure maintained, so that heating and pressure maintaining of the defective workpieces are avoided, and the excellent rate of workpiece packaging is improved; appearance detection of the workpiece is added after the heating and pressure maintaining process, so that bad workpieces with quality problems generated after heating and pressure maintaining are convenient to remove, the bad workpieces after heating and pressure maintaining are prevented from flowing into a subsequent packaging process, and the excellent rate of workpiece packaging is further improved; the appearance detection and the workpiece height detection of the workpiece are increased before and after the heating and pressure maintaining process, so that whether the heating and pressure maintaining process meets the requirements or not can be analyzed according to the detection data of the workpiece before and after the heating and pressure maintaining, and then the corresponding process, structure or parameter in the heating and pressure maintaining process can be optimized.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and together with the description, serve to explain the principles of the application.
FIG. 1 is a schematic diagram of a thermocompression detection system provided in one embodiment of the present application;
fig. 2 is a schematic structural view of a detection portion provided in an embodiment of the present application;
FIG. 3 is a flow chart of a thermocompression detection method provided in one embodiment of the present application;
fig. 4 is a flow chart of a thermocompression detection method provided in another embodiment of the present application.
Wherein the reference numbers are as follows:
100. a first detection unit; 101. a second detection unit; 11. a traversing assembly; 12. a height sensor head; 13. an AOI camera; 20. heating the pressure maintaining part; 30. a conveying device; 40. carrying a fixture; 50. and (5) a workpiece.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present application, as detailed in the appended claims.
Fig. 1 is a schematic structural diagram of a hot press detection system provided in an embodiment of the present application, and the hot press detection system provided in the present application may include a detection portion (a first detection portion 100 and a second detection portion 101 are shown in fig. 1), a heating and pressure-maintaining portion 20, and a conveying device 30.
In one possible implementation manner, the number of the detection portions is one, and the detection portions are disposed at a previous station or a subsequent station of the heating and pressure maintaining portion 20.
In another possible implementation manner, as shown in fig. 1, there are two detection portions, which are respectively disposed at the previous station and the next station of the heating and pressure maintaining portion 20, and are respectively the first detection portion 100 and the second detection portion 101.
In practical applications, the detection part may be disposed at a previous station and/or a subsequent station of the heating and pressure-maintaining part 20 according to analysis requirements.
In actual production, the conveying device 30 conveys the loading jig 40 loaded with the workpiece 50 to the detection part and the heating and pressure-maintaining part 20.
The detection section measures the height of the workpiece at least one position on the workpiece 50 and detects the appearance of the workpiece 50.
The height of the workpiece is defined as a difference between a height of the workpiece 50 at a position different from the position by a predetermined distance and a height of the loading jig 40 at a position different from the position.
For example, if the height of the workpiece 50 at a position a is Ha and the height of the loading jig 40 at a position a' different from the position a by a predetermined distance is Ha, the height of the workpiece is Δ Ha-Ha. The predetermined distance mentioned here can be set according to the size of the workpiece 50, and generally, the distance between the position on the workpiece 50 for calculating the height of the workpiece and the position on the loading jig 40 is very close, so that the calculation error is relatively low.
The heating and pressure maintaining part 20 heats and maintains the pressure of the workpiece 50 at the position of the heating and pressure maintaining part 20.
Referring to fig. 2, which is a schematic structural diagram of a detection portion provided in an embodiment of the present application, the detection portion may include a traverse assembly 11, a height sensor head 12 and an AOI camera 13, and the height sensor head 12 and the AOI camera 13 are mounted on the traverse assembly 11 and are driven by the traverse assembly 11 to move in a horizontal adjustment direction, which is perpendicular to a conveying direction of the conveying device 30.
The height measuring sensor head 12 measures the height of a preset position of the workpiece 50 and a position which is different from the preset position by a preset distance on the carrying fixture 40; the AOI camera 13 performs photographing inspection of the appearance of the workpiece 50.
In one possible implementation, as shown in fig. 1, there are two detection portions, namely a first detection portion 100 located at a previous station of the heating and pressure-maintaining portion 20 and a second detection portion 101 located at a subsequent station of the heating and pressure-maintaining portion 20.
The first detecting portion 100 may measure the height of the workpiece 50 at least one position and detect the appearance of the workpiece 50 to obtain a first set of detection data.
For example, the height measuring sensor head 12 measures the height of 3 (or more) positions of the workpiece 50 (height data H1, H2, H3..), and also measures the height of a point where the loading jig 40 is close to the test point position of the workpiece 50 (height data H1, H2, h3.), and the height of the workpiece is generated for the test point: the novel solar cell is characterized by comprising (delta H1, delta H2 and delta h3.), wherein delta H1 is H1-H1, delta H2 is H2-H2, and delta H3 is H3-H3 ….
The second detecting portion 101 may measure the height of the workpiece 50 at least one position and detect the appearance of the workpiece 50 to obtain a second set of detection data.
For example, the height measuring sensor head 12 measures the height of 3 positions (or a plurality of positions) of the workpiece 50 (height data H1 ', H2', H3 '), and also measures the height of a point where the loading jig 40 is close to the test point position of the workpiece 50 (height data H1', H2 ', H3'), so that the height of the workpiece is generated for the test point: (. DELTA.h 1 ',. DELTA.h 2 ',. DELTA.h 3 ').
Generally, the hot press detection system further includes a processor electrically connected to the first detection unit 100 and the second detection unit 101, and the processor determines whether the process of heating and maintaining the pressure of the workpiece 50 by the heating and pressure maintaining unit 20 is satisfactory or not according to the first set of detection data and the second set of detection data.
Generally, the detection positions of the second group of detection data and the first group of detection data are the same, so that whether the heating and pressure maintaining process meets the requirements or not can be judged according to the comparison between the first group of detection data and the second group of detection data.
For example, after heating and pressure maintaining, the change rate of the height of the workpiece is lower than a preset threshold value, calculation is performed according to the second group of detection data and the first group of detection data, and the obtained change rate is lower than the preset threshold value, which indicates that the heating and pressure maintaining process meets the requirements; otherwise, judging that the heating and pressure maintaining process does not meet the requirements.
In one possible implementation, the rate of change may be calculated as the difference between the second set of test data and the first set of test data, and the absolute value of the difference is divided by the first set of test data to obtain the rate of change.
In actual production, when the appearance of the workpiece 50 is detected to be unqualified, the unqualified workpiece 50 is generally required to be removed, so the detection part provided by the application can further comprise a transfer device and a recovery material box, and when the AOI camera 13 detects that the appearance of the workpiece 50 is unqualified, the transfer device conveys the workpiece 50 and/or the carrying fixture 40 to the recovery material box.
To sum up, the hot pressing detecting system that this application provided detects through the outward appearance AIO that increases work piece volume height and work piece around the process of heating pressurize, has increased the decision factor to heating pressurize effect, has improved the goodness rate of work piece encapsulation.
Appearance detection of the workpiece is added before the heating and pressure maintaining process, so that defective workpieces can be directly removed conveniently, and only qualified workpieces are heated and pressure maintained, so that heating and pressure maintaining of the defective workpieces are avoided, and the excellent rate of workpiece packaging is improved; appearance detection of the workpiece is added after the heating and pressure maintaining process, so that bad workpieces with quality problems generated after heating and pressure maintaining are convenient to remove, the bad workpieces after heating and pressure maintaining are prevented from flowing into a subsequent packaging process, and the excellent rate of workpiece packaging is further improved; the appearance detection and the workpiece height detection of the workpiece are increased before and after the heating and pressure maintaining process, so that whether the heating and pressure maintaining process meets the requirements or not can be analyzed according to the detection data of the workpiece before and after the heating and pressure maintaining, and then the corresponding process, structure or parameter in the heating and pressure maintaining process can be optimized.
Referring to fig. 3, which is a flowchart illustrating a hot press detection method provided in an embodiment of the present application, the hot press detection method provided in the present application may be implemented by using the hot press detection system shown in fig. 1, and the hot press detection method may include the following steps:
302, measuring the height of the workpiece in at least one position on the workpiece at a detection station and detecting the appearance of the workpiece;
the height of the workpiece refers to the height difference between the height of a position on the workpiece and the height of a position on the loading jig, which is different from the position by a preset distance.
And step 303, heating and maintaining the pressure of the workpiece at a heating and pressure maintaining station.
To sum up, the hot pressing detecting system that this application provided detects through the outward appearance AIO that increases work piece volume height and work piece around the process of heating pressurize, has increased the decision factor to heating pressurize effect, has improved the goodness rate of work piece encapsulation.
Appearance detection of the workpiece is added before the heating and pressure maintaining process, so that defective workpieces can be directly removed conveniently, and only qualified workpieces are heated and pressure maintained, so that heating and pressure maintaining of the defective workpieces are avoided, and the excellent rate of workpiece packaging is improved; appearance detection of the workpiece is added after the heating and pressure maintaining process, so that bad workpieces with quality problems generated after heating and pressure maintaining are convenient to remove, the bad workpieces after heating and pressure maintaining are prevented from flowing into a subsequent packaging process, and the excellent rate of workpiece packaging is further improved; the appearance detection and the workpiece height detection of the workpiece are increased before and after the heating and pressure maintaining process, so that whether the heating and pressure maintaining process meets the requirements or not can be analyzed according to the detection data of the workpiece before and after the heating and pressure maintaining, and then the corresponding process, structure or parameter in the heating and pressure maintaining process can be optimized.
As shown in fig. 4, which is a flowchart of a thermocompression detection method provided in another embodiment of the present application, the thermocompression detection method provided in the present application may be implemented by using the thermocompression detection system shown in fig. 1, and the thermocompression detection method may include the following steps:
generally, the first set of inspection data may include a set of height values of the workpiece measured at predetermined locations and a determination of whether the workpiece is acceptable for appearance.
if the first set of detection data indicates that the detected appearance of the workpiece is unqualified, the workpiece is usually a defective product, and in order to avoid the influence on the good yield of the workpiece fixture, the workpiece and/or the carrying fixture with unqualified appearance can be carried to the recovery material box.
In a possible implementation mode, unqualified workpieces on the carrying jig can be conveyed to the recovery material box, and qualified workpieces on the carrying jig can still be conveyed to the next procedure along with the carrying jig. In another possible implementation mode, if only one workpiece is arranged on the carrying jig and the workpiece is unqualified, the workpiece can be conveyed to the recovery material box, and the carrying jig is conveyed to the circulating conveying mechanism of the carrying jig, so that the workpiece can be placed on the carrying jig again in the following process; alternatively, the loading jig may be directly conveyed to the recovery magazine when the workpiece is not qualified.
generally, the second set of inspection data may include a set of height values of the workpiece measured at predetermined locations and a determination of whether the workpiece is acceptable for appearance.
if the first set of detection data indicates that the detected appearance of the workpiece is not good, the workpiece is usually a defective product, and is usually caused by heating and pressure maintaining, in order to avoid the influence on the good rate of the workpiece fixture, the workpiece and/or the carrying fixture with the non-good appearance detected at the second detection station is carried to the recovery material box.
In a possible implementation mode, unqualified workpieces on the carrying jig can be conveyed to the recovery material box, and qualified workpieces on the carrying jig can still be conveyed to the next procedure along with the carrying jig. In another possible implementation mode, if only one workpiece is arranged on the carrying jig and the workpiece is unqualified, the workpiece can be conveyed to the recovery material box, and the carrying jig is conveyed to the circulating conveying mechanism, so that the workpiece can be placed on the carrying jig again in the following process; alternatively, the loading jig may be directly conveyed to the recovery magazine when the workpiece is not qualified.
and step 412, judging whether the process of heating and maintaining the pressure of the workpiece meets the requirements or not according to the first group of detection data and the second group of detection data.
After the first and second sets of inspection data are obtained, the process of heating and holding the pressure of the workpiece may be analyzed in real time according to the first and second sets of inspection data to determine whether the process meets the requirements, that is, step 412 may also be performed after step 408.
In a possible implementation manner, in order to reduce the calculation amount, when the second set of detection data indicates that the detected appearance of the workpiece is not appropriate, whether the process of heating and maintaining the pressure of the workpiece meets the requirement or not can be determined according to the first set of detection data and the second set of detection data.
In summary, the hot pressing detection method provided by the application increases the height of the workpiece and the AIO (air in outline) detection of the workpiece before and after the heating and pressure maintaining process, increases the judgment factor of the heating and pressure maintaining effect, and improves the excellent rate of workpiece packaging.
Appearance detection of the workpiece is added before the heating and pressure maintaining process, so that defective workpieces can be directly removed conveniently, and only qualified workpieces are heated and pressure maintained, so that heating and pressure maintaining of the defective workpieces are avoided, and the excellent rate of workpiece packaging is improved; appearance detection of the workpiece is added after the heating and pressure maintaining process, so that bad workpieces with quality problems generated after heating and pressure maintaining are convenient to remove, the bad workpieces after heating and pressure maintaining are prevented from flowing into a subsequent packaging process, and the excellent rate of workpiece packaging is further improved; the appearance detection and the workpiece height detection of the workpiece are increased before and after the heating and pressure maintaining process, so that whether the heating and pressure maintaining process meets the requirements or not can be analyzed according to the detection data of the workpiece before and after the heating and pressure maintaining, and then the corresponding process, structure or parameter in the heating and pressure maintaining process can be optimized.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
It will be understood that the present application is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.
Claims (10)
1. The utility model provides a hot pressing detecting system, its characterized in that hot pressing detecting system includes detection portion, heating splenium and conveyor, detection portion is one, detection portion set up in the preceding station or the next station of heating splenium, perhaps, detection portion is two, two detection portion set up respectively in the preceding station and the next station of heating splenium, wherein:
the conveying device conveys the loading jig loaded with the workpiece to the detection part and the heating and pressure-maintaining part;
the detection part is used for measuring the height of the workpiece at least one position on the workpiece and detecting the appearance of the workpiece, wherein the height of the workpiece is the height difference between the height of the position on the workpiece and the height of the position on the loading jig, which is different from the position by a preset distance;
the heating and pressure maintaining part is used for heating and maintaining the pressure of the workpiece at the position of the heating and pressure maintaining part.
2. The hot press detection system according to claim 1, wherein the number of the detection portions is two, and the two detection portions are a first detection portion located at a previous station of the heating and pressure holding portion and a second detection portion located at a subsequent station of the heating and pressure holding portion,
the first detection part is used for measuring the height of the workpiece at least one position on the workpiece and detecting the appearance of the workpiece to obtain a first group of detection data;
the second detection part measures the height of the workpiece at least one position on the workpiece and detects the appearance of the workpiece to obtain a second group of detection data.
3. The system according to claim 2, further comprising a processor electrically connected to the first and second detecting portions, wherein the processor determines whether the process of heating and holding the workpiece by the heating and holding portion meets the requirement according to the first and second sets of detection data.
4. The thermocompression detection system of claim 1, wherein the detection portion comprises a traverse assembly, a height sensor head and an AOI camera, the height sensor head and the AOI camera being mounted on the traverse assembly and moved by the traverse assembly in a horizontal adjustment direction perpendicular to a conveying direction of the conveying device, wherein:
the height measuring sensor head measures the height of a preset position of the workpiece and a position, which is different from the preset position by a preset distance, on the carrying jig;
and the AOI camera is used for photographing and detecting the appearance of the workpiece.
5. The hot press inspection system according to claim 4, wherein the inspection section further comprises a transfer device and a recovery magazine, and the transfer device transfers the workpiece and/or the loading jig to the recovery magazine when the AOI camera detects that the appearance of the workpiece is defective.
6. A hot press detection method, characterized in that the hot press detection method comprises:
conveying the loading jig loaded with the workpiece to a detection station and a heating and pressure maintaining station;
measuring the height of the workpiece at least one position on the workpiece at the detection station and detecting the appearance of the workpiece, wherein the height of the workpiece is the height difference between the height of the position on the workpiece and the height of the position on the carrying jig, which is different from the position by a preset distance;
and heating and maintaining the pressure of the workpiece at the heating and maintaining station.
7. The hot press testing method according to claim 6, wherein the conveying the loading jig loaded with the workpiece to the testing station and the heating and pressure maintaining station comprises:
conveying the object carrying jig loaded with the workpiece to a first detection station, a heating and pressure maintaining station and a second detection station in sequence;
the measuring the height of the workpiece in at least one position on the workpiece and detecting the appearance of the workpiece comprises the following steps:
when the carrying jig is conveyed to the first detection station, the height of the workpiece at least one position on the workpiece is measured, and the appearance of the workpiece is detected to obtain a first group of detection data;
and when the object carrying jig is conveyed to the second detection station, measuring the height of the workpiece in at least one position on the workpiece and detecting the appearance of the workpiece to obtain a second group of detection data.
8. The thermocompression bonding test method of claim 7, wherein after obtaining the first set of test data, the method further comprises:
judging whether the appearance of the workpiece is qualified or not according to the first group of detection data;
when the first group of detection data indicates that the detected appearance of the workpiece is unqualified, the workpiece and/or the carrying fixture are/is conveyed to a recovery box;
and when the first group of detection data indicate that the detected appearance of the workpiece is qualified, the loading jig is conveyed to the heating and pressure maintaining station.
9. The thermocompression bonding test method of claim 7, wherein after obtaining the second set of test data, the method further comprises:
judging whether the appearance of the workpiece is qualified or not according to the second group of detection data;
when the second group of detection data indicate that the detected appearance of the workpiece is unqualified, the workpiece and/or the carrying jig are/is conveyed to a recovery box;
and when the second group of detection data indicates that the detected appearance of the workpiece is proper, the object carrying jig is conveyed to the next station.
10. The thermocompression detection method of claim 7, wherein after obtaining the first set of test data and the second set of test data, the method further comprises:
and judging whether the process of heating and maintaining the pressure of the workpiece meets the requirements or not according to the first group of detection data and the second group of detection data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110127392.8A CN113819868A (en) | 2021-01-29 | 2021-01-29 | Hot-pressing detection system and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110127392.8A CN113819868A (en) | 2021-01-29 | 2021-01-29 | Hot-pressing detection system and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113819868A true CN113819868A (en) | 2021-12-21 |
Family
ID=78912365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110127392.8A Pending CN113819868A (en) | 2021-01-29 | 2021-01-29 | Hot-pressing detection system and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113819868A (en) |
Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145197A (en) * | 1997-11-10 | 1999-05-28 | Matsushita Electric Ind Co Ltd | Thermocompression bonding method for electronic parts having solder bump |
| JP2008149414A (en) * | 2006-12-18 | 2008-07-03 | Toshiba Corp | Assembling device and manufacturing method for structure |
| JP2010212505A (en) * | 2009-03-11 | 2010-09-24 | Toshiba Corp | Bonding device of semiconductor device and manufacturing method of semiconductor device |
| CN104201122A (en) * | 2014-08-13 | 2014-12-10 | 南通富士通微电子股份有限公司 | Method for horizontal adjustment of hot-pressure welding head |
| CN204347177U (en) * | 2015-01-08 | 2015-05-20 | 青岛科技大学 | Based on the terminal quality detecting system of DSP |
| CN105445275A (en) * | 2015-12-25 | 2016-03-30 | 珠海格力电器股份有限公司 | Electronic device appearance detection system and electronic device appearance detection method |
| CN105514754A (en) * | 2016-01-30 | 2016-04-20 | 宾兴 | Automatic press-connection machine of connector and press-connection system and press-connection process thereof |
| CN106817518A (en) * | 2015-11-30 | 2017-06-09 | 南昌欧菲光电技术有限公司 | Dual camera module |
| CN107175219A (en) * | 2017-06-30 | 2017-09-19 | 苏州优纳科技有限公司 | FPC appearance inspection machines and its two-sided inspection body, inspection method |
| CN207166868U (en) * | 2017-07-21 | 2018-03-30 | 江西崇政科技有限公司 | A kind of high sealed monitoring camera circuit board film sticking apparatus |
| CN207720414U (en) * | 2017-11-23 | 2018-08-10 | 东莞市纳声电子设备科技有限公司 | A kind of loud speaker side magnetic magnetic circuit automated production equipment |
| CN108637667A (en) * | 2018-04-23 | 2018-10-12 | 东莞利富高塑料制品有限公司 | A kind of assembly technology and production line of damper |
| KR20190020147A (en) * | 2016-07-26 | 2019-02-27 | 엘지전자 주식회사 | Cell stacking and thermocompression devices, and cell stacking and thermocompression methods |
| CN109451668A (en) * | 2018-11-30 | 2019-03-08 | 四川海英电子科技有限公司 | A kind of technique applied to electric supply printed circuit board |
| CN209319178U (en) * | 2018-12-03 | 2019-08-30 | 东莞鸿爱斯通信科技有限公司 | Connector presses measuring device |
| CN110339972A (en) * | 2019-07-10 | 2019-10-18 | 深圳市昆龙卓盈机电有限公司 | A kind of hydrogen fuel cell bipolar plates injecting glue production line |
| CN209567111U (en) * | 2019-01-08 | 2019-11-01 | 深圳市奥特姆自动化设备有限公司 | A kind of detection device and its CD writers |
| CN110605255A (en) * | 2019-09-06 | 2019-12-24 | 深圳市诺泰自动化设备有限公司 | Photosensitive device test sorting machine |
| CN210338399U (en) * | 2019-06-05 | 2020-04-17 | 深圳市诺泰自动化设备有限公司 | Turret type chip braider |
| CN111295054A (en) * | 2020-03-31 | 2020-06-16 | 东莞市沃德精密机械有限公司 | FPC forming equipment |
| CN211443013U (en) * | 2019-10-12 | 2020-09-08 | 东莞市国瓷新材料科技有限公司 | Full-automatic packaging equipment for ceramic substrate |
| CN112071783A (en) * | 2020-09-16 | 2020-12-11 | 广州正心科技有限公司 | Hot press unit for semiconductor processing |
| CN112103544A (en) * | 2020-10-26 | 2020-12-18 | 速博达(深圳)自动化有限公司 | Automatic membrane electrode assembling process equipment |
-
2021
- 2021-01-29 CN CN202110127392.8A patent/CN113819868A/en active Pending
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145197A (en) * | 1997-11-10 | 1999-05-28 | Matsushita Electric Ind Co Ltd | Thermocompression bonding method for electronic parts having solder bump |
| JP2008149414A (en) * | 2006-12-18 | 2008-07-03 | Toshiba Corp | Assembling device and manufacturing method for structure |
| JP2010212505A (en) * | 2009-03-11 | 2010-09-24 | Toshiba Corp | Bonding device of semiconductor device and manufacturing method of semiconductor device |
| CN104201122A (en) * | 2014-08-13 | 2014-12-10 | 南通富士通微电子股份有限公司 | Method for horizontal adjustment of hot-pressure welding head |
| CN204347177U (en) * | 2015-01-08 | 2015-05-20 | 青岛科技大学 | Based on the terminal quality detecting system of DSP |
| CN106817518A (en) * | 2015-11-30 | 2017-06-09 | 南昌欧菲光电技术有限公司 | Dual camera module |
| CN105445275A (en) * | 2015-12-25 | 2016-03-30 | 珠海格力电器股份有限公司 | Electronic device appearance detection system and electronic device appearance detection method |
| CN105514754A (en) * | 2016-01-30 | 2016-04-20 | 宾兴 | Automatic press-connection machine of connector and press-connection system and press-connection process thereof |
| KR20190020147A (en) * | 2016-07-26 | 2019-02-27 | 엘지전자 주식회사 | Cell stacking and thermocompression devices, and cell stacking and thermocompression methods |
| CN107175219A (en) * | 2017-06-30 | 2017-09-19 | 苏州优纳科技有限公司 | FPC appearance inspection machines and its two-sided inspection body, inspection method |
| CN207166868U (en) * | 2017-07-21 | 2018-03-30 | 江西崇政科技有限公司 | A kind of high sealed monitoring camera circuit board film sticking apparatus |
| CN207720414U (en) * | 2017-11-23 | 2018-08-10 | 东莞市纳声电子设备科技有限公司 | A kind of loud speaker side magnetic magnetic circuit automated production equipment |
| CN108637667A (en) * | 2018-04-23 | 2018-10-12 | 东莞利富高塑料制品有限公司 | A kind of assembly technology and production line of damper |
| CN109451668A (en) * | 2018-11-30 | 2019-03-08 | 四川海英电子科技有限公司 | A kind of technique applied to electric supply printed circuit board |
| CN209319178U (en) * | 2018-12-03 | 2019-08-30 | 东莞鸿爱斯通信科技有限公司 | Connector presses measuring device |
| CN209567111U (en) * | 2019-01-08 | 2019-11-01 | 深圳市奥特姆自动化设备有限公司 | A kind of detection device and its CD writers |
| CN210338399U (en) * | 2019-06-05 | 2020-04-17 | 深圳市诺泰自动化设备有限公司 | Turret type chip braider |
| CN110339972A (en) * | 2019-07-10 | 2019-10-18 | 深圳市昆龙卓盈机电有限公司 | A kind of hydrogen fuel cell bipolar plates injecting glue production line |
| CN110605255A (en) * | 2019-09-06 | 2019-12-24 | 深圳市诺泰自动化设备有限公司 | Photosensitive device test sorting machine |
| CN211443013U (en) * | 2019-10-12 | 2020-09-08 | 东莞市国瓷新材料科技有限公司 | Full-automatic packaging equipment for ceramic substrate |
| CN111295054A (en) * | 2020-03-31 | 2020-06-16 | 东莞市沃德精密机械有限公司 | FPC forming equipment |
| CN112071783A (en) * | 2020-09-16 | 2020-12-11 | 广州正心科技有限公司 | Hot press unit for semiconductor processing |
| CN112103544A (en) * | 2020-10-26 | 2020-12-18 | 速博达(深圳)自动化有限公司 | Automatic membrane electrode assembling process equipment |
Non-Patent Citations (2)
| Title |
|---|
| 吴德超等: "《构造地质学简明教程》", 30 September 2015, 北京：地质出版社 * |
| 孟月等: "视觉系统在全自动COG热压焊机中的应用", 《电子工艺技术》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108627457B (en) | Automatic optical inspection system and method of operation thereof | |
| CN207606399U (en) | A kind of automatic positioning welding equipment | |
| CN104807397A (en) | Product detection system and product detection method | |
| CN113871326A (en) | SOIC packaging high-temperature sorting test equipment | |
| TWI602256B (en) | Automatic packaging line, packaging method, and packaging system | |
| CN114485450B (en) | PCB warp detection device, method and system | |
| CN116352267A (en) | Terminal box welding detection method | |
| CN113819868A (en) | Hot-pressing detection system and method | |
| CN113109364B (en) | Method and device for detecting chip defects | |
| CN204834569U (en) | IC encapsulation chip assay device | |
| CN209379452U (en) | A kind of comprehensive chip appearance automatic optics inspection platform | |
| CN216500828U (en) | Cladding material product size detection sorter | |
| CN204373688U (en) | A kind of electroplating assembly line outward appearance and dimension control equipment | |
| CN106910694B (en) | A kind of automatic detection at circuit devcie angularity method and device | |
| CN115945404A (en) | Defect detection equipment and detection method | |
| CN109158325A (en) | The device for visual identification of IC punching system kind and recognition methods and application | |
| CN114308716B (en) | Battery leakage detection method, device, computer equipment, system and storage medium | |
| CN114705129B (en) | Packaging substrate deformation measuring equipment and method thereof | |
| CN209605764U (en) | Multifunctional detecting device is used in a kind of processing of battery | |
| CN109520404A (en) | A kind of device that pressure inductive detection foot is long | |
| CN211678855U (en) | Electronic component product appearance on-line measuring device | |
| CN110211088A (en) | Improvement type diaphragm film-making automatic testing method, electronic equipment and storage medium | |
| CN220700434U (en) | Automatic rivet hot check out test set | |
| CN117123640B (en) | Feeding positioning precision detection method and system for die processing equipment | |
| CN220407440U (en) | Full-automatic welding equipment, welding and measuring equipment of 3D location guide |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211221 |
|
| RJ01 | Rejection of invention patent application after publication |