CN113818076A - Bearing device and vapor phase epitaxy equipment - Google Patents
Bearing device and vapor phase epitaxy equipment Download PDFInfo
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- CN113818076A CN113818076A CN202111384254.4A CN202111384254A CN113818076A CN 113818076 A CN113818076 A CN 113818076A CN 202111384254 A CN202111384254 A CN 202111384254A CN 113818076 A CN113818076 A CN 113818076A
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- tray
- driving mechanism
- translation driving
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- tray assembly
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a bearing device and vapor phase epitaxy equipment, belonging to the technical field of semiconductor equipment, wherein the bearing device is used for transmitting workpieces between a preposed vacuum chamber and a reaction chamber, a first translation driving mechanism is arranged in the preposed vacuum chamber, and the bearing device comprises a tray component, a second translation driving mechanism and a connecting piece; the second translation driving mechanism is arranged on the back of the tray assembly and movably arranged in the first translation driving mechanism through a connecting piece; and the first translation driving mechanism drives the tray assembly to translate along a first direction, the second translation driving mechanism drives the tray assembly to translate along a second direction, and the first direction is different from the second direction. The bearing device can enable the tray component to move horizontally in different directions, so that the one-time access of the workpieces in the reaction chamber is realized, the working efficiency is greatly improved, and the risk of workpiece damage caused by multiple access is reduced.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and particularly relates to a bearing device and vapor phase epitaxy equipment.
Background
With the wide application of vapor phase epitaxy equipment in the semiconductor industry, the number of times of operation of the front vacuum chamber bearing platform related to daily maintenance and operation is increased. The bearing table device in the preposed vacuum cavity of the vapor phase epitaxy equipment used at present is simple, and most of the bearing table devices consist of a linear guide rail, a tray frame and a tray. The bearing device is easy to find in daily maintenance, and the work of disassembling and installing the workpiece in the reaction chamber can be completed only by circulating for many times, so that the working efficiency is greatly reduced. And the tray can also shift in the operation process, thereby increasing the difficulty of placing the workpiece.
Therefore, in order to solve the above problems, it is necessary to develop a carrier and a vapor phase epitaxy apparatus with reasonable design and capable of effectively improving the above problems.
Disclosure of Invention
The present invention is directed to at least one of the technical problems of the prior art, and provides a carrier and a vapor phase epitaxy apparatus.
One aspect of the invention provides a bearing device for conveying workpieces between a pre-vacuum chamber and a reaction chamber, wherein a first translation driving mechanism is arranged in the pre-vacuum chamber, and the bearing device comprises a tray assembly, a second translation driving mechanism and a connecting piece;
the second translation driving mechanism is arranged on the back of the tray assembly, and the second translation driving mechanism is movably arranged in the first translation driving mechanism through the connecting piece; and the number of the first and second electrodes,
the first translation driving mechanism drives the tray assembly to translate along a first direction, the second translation driving mechanism drives the tray assembly to translate along a second direction, and the first direction is different from the second direction.
Optionally, the tray assembly includes a first tray and a second tray which are oppositely arranged at an interval, and the second translation driving mechanism is arranged on the back of the first tray;
the carrying device further comprises at least one vertical driving mechanism, and the vertical driving mechanism is arranged between the first tray and the second tray to drive the second tray to lift.
Optionally, the vertical driving mechanism comprises a fixed sleeve and a telescopic piece; the fixed sleeve is arranged on one side, facing the second tray, of the first tray, the first end of the telescopic piece is arranged in the fixed sleeve in a telescopic mode, and the second end of the telescopic piece is abutted to the second tray.
Optionally, the vertical driving mechanism further comprises a button disposed on the outer peripheral wall of the fixed sleeve;
when the button is in a pressed state, the telescopic piece moves towards the direction close to or away from the fixed sleeve;
when the button is in a reset state, the telescopic piece is fixed in the fixed sleeve.
Optionally, the lateral wall of tray subassembly is provided with first joint spare, the outer tool to lock periphery of reaction chamber is provided with the safety cover, be provided with second joint spare on the safety cover, first joint spare card is established in the second joint spare.
Optionally, the second joint spare is including setting up fixed cardboard on the safety cover and through first hinge with fixed cardboard swing joint's buckle, the buckle card is established in the first joint spare.
Optionally, the carrying device further comprises a support component, and the support component is arranged at the back of the tray component in a foldable manner;
when the tray assembly is positioned inside the pre-vacuum chamber, the support assembly is in a folded state;
when the tray assembly is located outside the pre-vacuum chamber, the support assembly is in an open state to support the tray assembly.
Optionally, the supporting assembly includes a limiting member, a supporting member disposed opposite to the limiting member at an interval, and a linkage shaft respectively connected to the limiting member and the supporting member, and both the limiting member and the supporting member are rotatably disposed on the first tray;
when the tray assembly moves to the inner side of the preposed vacuum chamber, the limiting piece is driven to rotate to a first limiting position, and the supporting piece is driven to rotate to a folded state through the linkage shaft;
when the tray assembly moves to the outer side of the front vacuum chamber, the limiting part is driven to rotate to a second limiting position, and the supporting part is driven to rotate to an open state through the linkage shaft.
Optionally, the support assembly further comprises a rolling member and a movable member; the rolling piece is connected with the limiting piece and the first tray respectively, and the moving piece is connected with the supporting piece and the first tray respectively.
Another aspect of the present invention provides a vapor phase epitaxy apparatus, including a pre-vacuum chamber, a reaction chamber, and a carrying device, where the carrying device is the carrying device described above.
The bearing device is used for conveying workpieces between a preposed vacuum chamber and a reaction chamber, a first translation driving mechanism is arranged in the preposed vacuum chamber, and the bearing device comprises a tray assembly, a second translation driving mechanism and a connecting piece; the second translation driving mechanism is arranged on the back of the tray assembly and movably arranged in the first translation driving mechanism through a connecting piece; and the first translation driving mechanism drives the tray assembly to translate along a first direction, the second translation driving mechanism drives the tray assembly to translate along a second direction, and the first direction is different from the second direction. The bearing device can enable the tray component to move horizontally in different directions, so that the one-time access of the workpieces in the reaction chamber is realized, the working efficiency is greatly improved, and the risk of workpiece damage caused by multiple access is reduced.
Drawings
Fig. 1 is a schematic position relationship diagram of a carrying device according to an embodiment of the invention;
FIG. 2 is a schematic partial structural diagram of a carrier apparatus according to an embodiment of the invention;
FIG. 3 is a schematic structural diagram of a first translation driving mechanism in a pre-vacuum chamber according to another embodiment of the present invention;
FIG. 4 is a schematic structural view of a second translation driving mechanism in a tray assembly according to another embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a tray of the tray assembly according to another embodiment of the present invention;
FIG. 6 is a schematic structural view of a tray assembly and a vertical driving mechanism according to another embodiment of the present invention;
FIG. 7 is a schematic structural view of a vertical drive mechanism according to another embodiment of the present invention;
FIG. 8 is a schematic view of the position and structure of a vertical driving mechanism according to another embodiment of the present invention;
fig. 9 is a schematic view illustrating a position and a structure of a first clip according to another embodiment of the present invention;
fig. 10 is a schematic view of a second clip member according to another embodiment of the present invention;
fig. 11 is a schematic view illustrating a first clip member and a second clip member according to another embodiment of the present invention;
fig. 12 is a schematic diagram illustrating a positional relationship between a first clip member and a second clip member according to another embodiment of the present invention;
fig. 13 is a partially enlarged schematic structural view of a second clamping member according to another embodiment of the invention;
FIG. 14 is a schematic structural view of a support assembly according to another embodiment of the present invention in an open state;
FIG. 15 is a schematic structural view of a support assembly according to another embodiment of the present invention in a folded state;
fig. 16 is a schematic structural diagram of a support assembly according to another embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1 and 2, an aspect of the present invention provides a carrier 100 for transferring workpieces between a pre-vacuum chamber 200 and a reaction chamber 300. As shown in fig. 3, the front vacuum chamber 200 is provided therein with a first translation driving mechanism 210, that is, the front vacuum chamber 200 is provided at the bottom thereof with the first translation driving mechanism 210. As shown in fig. 1, 2 and 4, the carrying device 100 includes a tray assembly 110, a second translation driving mechanism 120 and a connecting member (not shown), wherein, as shown in fig. 5, the tray assembly 110 is a concave tray in the present embodiment.
As shown in fig. 4, the second translation driving mechanism 120 is provided at the rear of the tray assembly 110, and the second translation driving mechanism 120 is movably provided in the first translation driving mechanism 210 through a link. Also, as shown in fig. 3 and 4, the first translation driving mechanism 210 drives the tray assembly 110 to translate in a first direction, and the second translation driving mechanism 120 drives the tray assembly 110 to translate in a second direction, the first direction being different from the second direction.
In the present embodiment, the first translation driving mechanism 210 and the second translation driving mechanism 120 are both linear guide rails, and the connecting member is a slider corresponding to the linear guide rails. The first translation driving mechanism 210 and the second translation driving mechanism 120 may also be other translation driving mechanisms, such as a rack and pinion, a crank slider, and the like, and this embodiment is not particularly limited as long as the tray assembly 110 can translate along different directions, and may be selected according to actual needs.
It should be further noted that, in the present embodiment, two first translation driving mechanisms 210 are disposed at intervals along the length direction of the tray assembly 110, and two second translation driving mechanisms 120 are disposed at intervals along the width direction of the tray assembly 110, so that the tray assembly 110 can finally move in 4 directions, i.e., front, back, left, and right. The directions and numbers of the first translation driving mechanism 210 and the second translation driving mechanism 120 are not specifically limited in this embodiment, and can be selected according to actual needs.
The bearing device can enable the tray component to move horizontally in different directions, so that the one-time access of the workpieces in the reaction chamber is realized, the working efficiency is greatly improved, and the risk of workpiece damage caused by multiple access is reduced.
Illustratively, as shown in fig. 6, the tray assembly 110 includes a first tray 111 and a second tray 112 disposed at an opposite interval, and a second translation driving mechanism 120 is disposed at a rear surface of the first tray 112. That is, the second translation drive mechanism 120 is provided on the back surface of the lower tray. The carrying device 100 further includes at least one vertical driving mechanism 130, and the vertical driving mechanism 130 is disposed between the first tray 111 and the second tray 112 to drive the second tray 112 to ascend and descend.
It should be noted that, in the present embodiment, as shown in fig. 6, four vertical driving mechanisms 130 are disposed between the first tray 111 and the second tray 112, and the four vertical driving mechanisms 130 are disposed at four corner ends of the first tray 111 and the second tray 112, respectively. The number and the arrangement position of the vertical driving mechanisms 130 are not particularly limited in this embodiment, and can be selected according to actual needs. The material that tray component 110 adopted is high temperature resistant, non-deformable, and can guarantee its cleanliness factor, and this embodiment does not restrict the material of tray component, can select according to concrete need.
Illustratively, as shown in fig. 7 and 8, the vertical driving mechanism 130 includes a fixed sleeve 131 and a telescopic member 132, the fixed sleeve 131 is disposed on a side of the first tray 111 facing the second tray 112, a first end of the telescopic member 132 is telescopically disposed in the fixed sleeve 131, and a second end of the telescopic member 132 abuts against the second tray 112. In this embodiment, the telescopic member 132 may be a telescopic rod, a telescopic column, or the like, and this embodiment is not particularly limited. Similarly, the vertical driving mechanism 130 may be another device as long as the position of the second tray 112 in the vertical direction can be adjusted, and the embodiment is not particularly limited.
Illustratively, as shown in fig. 7 and 8, the vertical driving mechanism 130 further includes a button 133 disposed on the outer peripheral wall of the fixed sleeve 131, and the telescopic member 132 moves toward or away from the fixed sleeve 131 when the button 133 is in a pressed state. When the push button 133 is in the reset state, the telescopic member 132 is fixed in the fixed sleeve 131.
Specifically, when it is necessary to increase the position between the first tray 111 and the second tray 112, the button 133 is pressed to move the telescopic member 132 away from the fixed sleeve 131, and the button 133 is reset to move the telescopic member 132 to a proper position to fix the telescopic member 132 in the fixed sleeve 131. When the position between the first tray 111 and the second tray 112 in the vertical direction needs to be reduced, the button 133 can be pressed to move the telescopic rod 132 toward the fixed sleeve 131, and the button 133 is reset when the telescopic rod is moved to a proper position to fix the telescopic member 132 in the fixed sleeve 131. That is, by pressing or resetting the button 133, the distance between the first tray 111 and the second tray 112 can be adjusted, thereby driving the second tray 112 to be lifted and lowered, thereby achieving variability of the operable space of the second tray 112. The position of the second tray in the vertical direction can be adjusted according to different requirements through the vertical driving mechanism, one-time access of the related workpieces in the reaction chamber is realized, the working efficiency is greatly improved, and the risk of workpiece damage caused by multiple access is also reduced.
Illustratively, as shown in fig. 9, the outer side wall of the tray assembly 110 is provided with a first snap 140, and specifically, the outer side wall of the first tray 111 is provided with a first snap 140. As shown in fig. 10, a protective cover 310 is disposed around the lock around the reaction chamber, and a second engaging member 311 is disposed on the protective cover 310, as shown in fig. 11, the first engaging member 140 is engaged with the second engaging member 311. The first engaging member 140 is engaged with the second engaging member 311 to fix and support the tray assembly 110, so as to fix the position of the tray assembly 110.
Further preferably, fig. 13 is a partial enlarged view of the first clamping member 140 and the second clamping member 311 shown in the area a of fig. 12, the second clamping member 311 includes a fixed clamping plate 311a disposed on the protective cover 310 and a buckling plate 311b movably connected with the fixed clamping plate 311a, and the buckling plate 311b is buckled in the first clamping member 140. In this embodiment, the fixed clamping plate 311a and the clamping plate 311b are movably connected by a hinge 311c, and the first clamping member 140 is a fixed plate. The buckle plate 311b can move in the range of 0 to 180 degrees in the vertical direction of the outer side wall of the protective cover 310 through the hinge 311 c. When the reaction chamber 300 is maintained, the tray assembly 110 is pulled out, and the first clamping pieces 140 on the tray assembly 110 are clamped in the second clamping pieces 311 on the protective cover 310, so that the workpieces related to installation and disassembly in the reaction chamber can be safely placed in the first tray 111 and the second tray 112 shown in fig. 11, and therefore, the workpieces can be fed in and out at one time, the working efficiency is improved, and the risk of workpiece damage caused by multiple feeding in and out is reduced.
Illustratively, as shown in fig. 14, 15 and 16, the carrying device 100 further includes a support assembly 150, and the support assembly 150 is foldably disposed on the back of the tray assembly 110, that is, on the back of the first tray 111. As shown in fig. 14, when the tray assembly 110 is located outside the front vacuum chamber 200, the support assembly 150 is in an open state to support the fixed tray assembly 110. The supporting component plays a role in supporting and fixing the tray component, and the stability of the tray component is improved. As shown in fig. 15, the support assembly 150 is in a folded state when the tray assembly 110 is located inside the pre-vacuum chamber 200.
Further preferably, as shown in fig. 16, the supporting assembly 150 includes a limiting member 153, a supporting member 151 disposed opposite to the limiting member 153 at an interval, and a linkage shaft 152 respectively connecting the limiting member 153 and the supporting member 151, wherein the limiting member 153 and the supporting member 151 are both rotatably disposed on the first tray 111. In the present embodiment, the limiting member 153 may be a limiting plate, and the supporting member 151 may be a supporting rod.
Specifically, as shown in fig. 14, when the tray assembly 110 moves to the outside of the front vacuum chamber 200, the limiting member 153 is driven to rotate to the second limiting position, and the supporting member 151 is driven to rotate to the open state by the linkage shaft 152. That is, the support 151 is perpendicular to the bottom of the glove box 400, and serves to support and fix the entire tray assembly 110. The second position of the limiting member 153 is the position of the limiting member 153 in the open state.
As shown in fig. 15, when the tray assembly 110 moves to the inside of the front vacuum chamber 200, the limiting member 153 is driven to rotate to the first limiting position, and the linking shaft 152 drives the supporting member 151 to rotate to the folded state. That is, when the tray assembly 110 is pushed back from the glove box 400 to the front vacuum chamber 200, the support assembly 150 is also folded following the movement of the tray assembly 110, and the retracting and releasing of the support 151 does not need to be manually performed. The first position of the limiting member 153 is the position of the limiting member 153 in the folded state.
Illustratively, as shown in fig. 14 and 15, the support assembly 150 further includes a rolling member 154 and a movable member 155, in this embodiment, the rolling member 154 may be a roller, and the movable member 155 may be a hinge, such as a hinge, and the like, and this embodiment is not particularly limited. The rolling members 154 are respectively connected to the stopper 153 and the first tray 111, and fix the stopper 153 to the first tray 111. The movable members 155 are respectively connected to the supporting member 151 and the first tray 111, and fix the supporting member 151 to the first tray 111.
It should be noted that the materials of the components involved in the present invention are not limited to a specific material, but the materials are ensured to be resistant to deformation and high temperature and necessarily have the characteristics of high cleanliness of the clean room.
Another aspect of the present invention provides a vapor phase epitaxy apparatus, which includes a pre-vacuum chamber 200, a reaction chamber 300, and a carrier 100, wherein the carrier 100 is the carrier 100 described above. The specific structure of the carrying device 100 has been described in detail above, and is not described herein again.
According to the vapor phase epitaxy equipment provided by the invention, the internal space of the preposed vacuum chamber and the external structure of the reaction chamber are utilized, the one-time access of the workpiece related to maintenance in the reaction chamber can be realized by adjusting the position of the tray component in the bearing device, and meanwhile, the support component can also ensure the stability of the tray component, so that the working efficiency is greatly improved, and the risk of workpiece damage caused by multiple access is also reduced.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A bearing device is used for transferring workpieces between a pre-vacuum chamber and a reaction chamber, and is characterized in that a first translation driving mechanism is arranged in the pre-vacuum chamber, and the bearing device comprises a tray assembly, a second translation driving mechanism and a connecting piece;
the second translation driving mechanism is arranged on the back of the tray assembly, and the second translation driving mechanism is movably arranged in the first translation driving mechanism through the connecting piece; and the number of the first and second electrodes,
the first translation driving mechanism drives the tray assembly to translate along a first direction, the second translation driving mechanism drives the tray assembly to translate along a second direction, and the first direction is different from the second direction.
2. The carrier in accordance with claim 1 wherein the tray assembly includes first and second trays disposed in spaced relation to one another, the second translation drive mechanism being disposed behind the first tray;
the carrying device further comprises at least one vertical driving mechanism, and the vertical driving mechanism is arranged between the first tray and the second tray to drive the second tray to lift.
3. The carrier in accordance with claim 2 wherein the vertical drive mechanism comprises a fixed sleeve and a telescoping member;
the fixed sleeve is arranged on one side, facing the second tray, of the first tray, the first end of the telescopic piece is arranged in the fixed sleeve in a telescopic mode, and the second end of the telescopic piece is abutted to the second tray.
4. The carrier in accordance with claim 3 wherein the vertical drive mechanism further comprises a button disposed on the fixed sleeve peripheral wall;
when the button is in a pressed state, the telescopic piece moves towards the direction close to or away from the fixed sleeve;
when the button is in a reset state, the telescopic piece is fixed in the fixed sleeve.
5. The carrying device as claimed in claim 1, wherein the outer side wall of the tray assembly is provided with a first clamping member, the periphery of the outer lock of the reaction chamber is provided with a protective cover, the protective cover is provided with a second clamping member, and the first clamping member is clamped in the second clamping member.
6. The carrying device as claimed in claim 5, wherein the second engaging member comprises a fixed clip plate disposed on the protective cover and a buckle plate movably connected to the fixed clip plate, the buckle plate being engaged with the first engaging member.
7. The carrier as claimed in claim 2, further comprising a support assembly foldably disposed at a back side of the tray assembly;
when the tray assembly is positioned inside the pre-vacuum chamber, the support assembly is in a folded state;
when the tray assembly is located outside the pre-vacuum chamber, the support assembly is in an open state to support the tray assembly.
8. The carrying device according to claim 7, wherein the supporting assembly comprises a limiting member, a supporting member disposed opposite to the limiting member at a distance, and a linkage shaft connecting the limiting member and the supporting member, respectively, and both the limiting member and the supporting member are rotatably disposed on the first tray;
when the tray assembly moves to the inner side of the preposed vacuum chamber, the limiting piece is driven to rotate to a first limiting position, and the supporting piece is driven to rotate to a folded state through the linkage shaft;
when the tray assembly moves to the outer side of the front vacuum chamber, the limiting part is driven to rotate to a second limiting position, and the supporting part is driven to rotate to an open state through the linkage shaft.
9. The load carrying apparatus of claim 8, wherein said support assembly further comprises a rolling member and a movable member;
the rolling piece is connected with the limiting piece and the first tray respectively, and the moving piece is connected with the supporting piece and the first tray respectively.
10. A vapor phase epitaxy apparatus comprising a pre-vacuum chamber, a reaction chamber and a carrying device, wherein the carrying device adopts the carrying device of any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111384254.4A CN113818076B (en) | 2021-11-19 | 2021-11-19 | Bearing device and vapor phase epitaxy equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111384254.4A CN113818076B (en) | 2021-11-19 | 2021-11-19 | Bearing device and vapor phase epitaxy equipment |
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| CN113818076A true CN113818076A (en) | 2021-12-21 |
| CN113818076B CN113818076B (en) | 2022-03-15 |
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4828224A (en) * | 1987-10-15 | 1989-05-09 | Epsilon Technology, Inc. | Chemical vapor deposition system |
| US4895107A (en) * | 1987-07-06 | 1990-01-23 | Kabushiki Kaisha Toshiba | Photo chemical reaction apparatus |
| US5020475A (en) * | 1987-10-15 | 1991-06-04 | Epsilon Technology, Inc. | Substrate handling and transporting apparatus |
| JPH03212932A (en) * | 1990-01-18 | 1991-09-18 | Ulvac Japan Ltd | Vacuum processing apparatus |
| JPH0637019A (en) * | 1992-07-15 | 1994-02-10 | Nec Yamaguchi Ltd | Atmospheric pressure vapor phase growth device |
| JP2010192720A (en) * | 2009-02-19 | 2010-09-02 | Hitachi Cable Ltd | Semiconductor vapor-phase epitaxial device |
| CN104250849A (en) * | 2013-06-25 | 2014-12-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction cavity and epitaxial growth equipment |
| CN104916572A (en) * | 2014-03-14 | 2015-09-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bearing device and plasma processing device |
| CN105088167A (en) * | 2014-05-20 | 2015-11-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bearing device, reaction chamber and semiconductor machining equipment |
| KR101608916B1 (en) * | 2015-10-28 | 2016-04-04 | (주)엠에프에스 | Driving apparatus for semiconductor vacuum facility |
| CN108796467A (en) * | 2017-05-03 | 2018-11-13 | 北京北方华创微电子装备有限公司 | Bogey, reaction chamber and semiconductor processing equipment |
| CN111824764A (en) * | 2020-08-10 | 2020-10-27 | 苏州欣华锐电子有限公司 | Conveying device for chip tray |
| CN112133657A (en) * | 2020-09-25 | 2020-12-25 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and method for transmitting wafer |
| CN112309941A (en) * | 2020-10-29 | 2021-02-02 | 北京北方华创微电子装备有限公司 | A transport subassembly and semiconductor processing equipment for semiconductor processing equipment |
-
2021
- 2021-11-19 CN CN202111384254.4A patent/CN113818076B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4895107A (en) * | 1987-07-06 | 1990-01-23 | Kabushiki Kaisha Toshiba | Photo chemical reaction apparatus |
| US4828224A (en) * | 1987-10-15 | 1989-05-09 | Epsilon Technology, Inc. | Chemical vapor deposition system |
| US5020475A (en) * | 1987-10-15 | 1991-06-04 | Epsilon Technology, Inc. | Substrate handling and transporting apparatus |
| JPH03212932A (en) * | 1990-01-18 | 1991-09-18 | Ulvac Japan Ltd | Vacuum processing apparatus |
| JPH0637019A (en) * | 1992-07-15 | 1994-02-10 | Nec Yamaguchi Ltd | Atmospheric pressure vapor phase growth device |
| JP2010192720A (en) * | 2009-02-19 | 2010-09-02 | Hitachi Cable Ltd | Semiconductor vapor-phase epitaxial device |
| CN104250849A (en) * | 2013-06-25 | 2014-12-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction cavity and epitaxial growth equipment |
| CN104916572A (en) * | 2014-03-14 | 2015-09-16 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bearing device and plasma processing device |
| CN105088167A (en) * | 2014-05-20 | 2015-11-25 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Bearing device, reaction chamber and semiconductor machining equipment |
| KR101608916B1 (en) * | 2015-10-28 | 2016-04-04 | (주)엠에프에스 | Driving apparatus for semiconductor vacuum facility |
| CN108796467A (en) * | 2017-05-03 | 2018-11-13 | 北京北方华创微电子装备有限公司 | Bogey, reaction chamber and semiconductor processing equipment |
| CN111824764A (en) * | 2020-08-10 | 2020-10-27 | 苏州欣华锐电子有限公司 | Conveying device for chip tray |
| CN112133657A (en) * | 2020-09-25 | 2020-12-25 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and method for transmitting wafer |
| CN112309941A (en) * | 2020-10-29 | 2021-02-02 | 北京北方华创微电子装备有限公司 | A transport subassembly and semiconductor processing equipment for semiconductor processing equipment |
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