CN113774328A - AR (argon) coating process on resin sheet - Google Patents

AR (argon) coating process on resin sheet Download PDF

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Publication number
CN113774328A
CN113774328A CN202111098085.8A CN202111098085A CN113774328A CN 113774328 A CN113774328 A CN 113774328A CN 202111098085 A CN202111098085 A CN 202111098085A CN 113774328 A CN113774328 A CN 113774328A
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Prior art keywords
coating
resin sheet
film
small
sized
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CN202111098085.8A
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CN113774328B (en
Inventor
王刚
叶炜昊
张亚星
万维岩
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Zhejiang Meidikai Optical Semiconductor Co ltd
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Zhejiang Meidikai Optical Semiconductor Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/02Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention discloses an AR coating process on a resin sheet. According to the process, the large-size resin sheet is cut into small-size resin sheet pieces, the UV film is attached to the small-size resin sheet pieces for AR film coating, the power and the time interval of each film coating are strictly controlled during film coating, the phenomenon that the temperature exceeds 85 ℃ to cause the change of the characteristics of the resin sheet is prevented, the deformation of a product is reduced, the surface film crack of the product is prevented, the processing quality of the product is improved, and the yield is improved.

Description

AR (argon) coating process on resin sheet
Technical Field
The invention relates to the field of resin sheet coating processes, in particular to an AR coating process on a resin sheet.
Background
The resin sheet is a commonly used optical article material. The resin sheet coating is an inorganic substance (such as silicon oxide, that is, sand) coated on an organic substance (plastic). One significant difference with other coatings is that the substrate cannot be heated because the substrate is plastic and therefore the substantially stable state obtained is a room temperature condition. Further increases in temperature (or moisture absorption) cause the organic substrate to swell, while the inorganic film layer does not change much. This creates a stress between the two, which after a certain threshold is reached releases the film causing the film to tear or wrinkle.
The existing resin sheet AR coating process is characterized in that after a resin sheet is fixed through a clamp, direct coating is carried out, and coating is carried out on the back of the back surface of the resin sheet AR, but in the coating process, because the resin sheet is thin and the texture of the resin sheet is fragile, the sheet is easy to crack due to uneven force application, and the problem that the surface film of a product is cracked due to the fact that the product is easy to deform due to the change of temperature after coating is solved, so that the process is the main research direction of the application.
Disclosure of Invention
In order to solve the technical problem, the invention designs an AR coating process on a resin sheet.
The invention adopts the following technical scheme:
an AR coating process on a resin sheet comprises the following steps:
s1, slicing: adhering 77 x 0.21mm resin sheets on a UV film for fixing, cutting into 10 x 0.21mm resin sheet pieces on a special cutting machine, cooling and flushing scraps at a cutter head by continuously introducing water flow, performing linear cutting on the resin sheets during cutting, putting the resin sheet pieces on a special cleaning device for rotary cleaning after cutting, and performing debonding on the UV film by ultraviolet irradiation after cleaning to finish the whole process of cutting large-size resin sheets into small-size resin sheet pieces;
s2, film pasting: adhering a UV film on the bottom surface of the small-sized resin sheet chip, and fixing the small-sized resin sheet chip through the UV film;
s3, coating: performing AR coating on the surface of the small-sized resin sheet, and selecting SIO during AR coating2The coating power of the coating is 5kw, the Ar charging amount is 40sccm, and O2The charging rate is 50sccm, the plating rate is 1.75nm/s, Nb2O5The coating power is 4kw, the Ar charging amount is 270sccm, the plating rate is 2.1nm/s, the plating film is coated for 20nm every time, and the interval is 45 s;
s4, dispergation: performing dispergation on the UV film of the small-size resin sheet piece subjected to single-side AR coating by ultraviolet irradiation;
s5, film pouring: the small-sized resin sheet pieces are turned over, a UV film is adhered to the bottom surfaces of the turned small-sized resin sheet pieces, and the small-sized resin sheet pieces are fixed through the UV film;
s6, coating a second surface: performing AR coating on the surface of the turned small-size resin sheet, and selecting SIO during AR coating2The coating power of the coating is 5kw, the Ar charging amount is 40sccm, and O2The charging rate is 50sccm, the plating rate is 1.75nm/s, Nb2O5The coating power is 4kw, the Ar charge is 270sccm, the coating rate is 2.1nm/s, the coating is 20nm each time, and the interval is 45 s;
s7, dispergation: performing degumming on the UV film of the small-sized resin sheet piece subjected to double-sided AR coating by ultraviolet irradiation;
s8, taking and checking: and slightly taking out the small-sized resin sheet pieces subjected to double-sided AR coating by using forceps, and checking the film crack and appearance integrity under a microscope to complete the AR coating process on the whole resin sheet.
Preferably, the UV film is 5172-UV film. When coating, the UV film is needed to apply a full tensile force to the product at the lower part, thereby balancing the warping caused by coating. We therefore need to select a suitable UV film, normally a softer texture without high temperature resistance, by testing a number of UV films, and finally a 5172-UV film.
Preferably, the UV film is gently smoothed with a brush after being adhered. Because the resin sheet is thin and the texture is fragile, the sheet is easy to crack due to uneven force application, the film crack is easy to occur after the film is coated, and the brush is used for gently smoothing, so that the adsorption is facilitated, and the film crack is prevented.
Preferably, 80mW/cm is adopted for the dispergation of the UV film2Irradiating with ultraviolet ray of intensity to release the gel in the channel for 30 s.
Preferably, the AR plating film has a thickness of 200-300 nm. In designing an AR film system, it is necessary to reduce the deformation of the resin sheet by designing the film thickness as low as possible.
Preferably, before AR coating, a temperature sticker with the measurement temperature of 77-99 ℃ is attached to the surface of the cut waste resin sheet to carry out complete AR coating, the visible temperature is 77 ℃, three continuous repeated tests are carried out, the temperature is 77 ℃, and the temperature during AR coating is judged to meet the requirement.
Preferably, when the sheet is taken, the operation of removing the glue needs to be repeated twice after the UV film is removed, namely, a corner is torn from the edge of the UV film to confirm whether the small-sized resin sheet pieces naturally fall off or not, and if not, the glue needs to be removed again.
The invention has the beneficial effects that: according to the process, the large-size resin sheet is cut into small-size resin sheet pieces, the UV film is attached to the small-size resin sheet pieces for AR film coating, the power and the time interval of each film coating are strictly controlled during film coating, the phenomenon that the temperature exceeds 85 ℃ to cause the change of the characteristics of the resin sheet is prevented, the deformation of a product is reduced, the surface film crack of the product is prevented, the processing quality of the product is improved, and the yield is improved.
Drawings
FIG. 1 is a process flow diagram of the present invention;
Detailed Description
The technical scheme of the invention is further described in detail by the following specific embodiments in combination with the attached drawings:
example (b): as shown in the attached figure 1, the AR coating process on the resin sheet comprises the following steps:
s1, slicing: adhering 77 x 0.21mm resin sheets on a UV film for fixing, cutting into 10 x 0.21mm resin sheet pieces on a special cutting machine, cooling and flushing scraps at a cutter head by continuously introducing water flow, performing linear cutting on the resin sheets during cutting, putting the resin sheet pieces on a special cleaning device for rotary cleaning after cutting, and performing debonding on the UV film by ultraviolet irradiation after cleaning to finish the whole process of cutting large-size resin sheets into small-size resin sheet pieces;
s2, film pasting: adhering a UV film on the bottom surface of the small-sized resin sheet chip, and fixing the small-sized resin sheet chip through the UV film;
s3, coating: performing AR coating on the surface of the small-sized resin sheet, and selecting SIO during AR coating2The coating power of the coating is 5kw, the Ar charging amount is 40sccm, and O2The charging rate is 50sccm, the plating rate is 1.75nm/s, Nb2O5The coating power is 4kw, the Ar charge is 270sccm, the coating rate is 2.1nm/s, the coating is 20nm each time, and the interval is 45 s;
s4, dispergation: performing dispergation on the UV film of the small-size resin sheet piece subjected to single-side AR coating by ultraviolet irradiation;
s5, film pouring: the small-sized resin sheet pieces are turned over, a UV film is adhered to the bottom surfaces of the turned small-sized resin sheet pieces, and the small-sized resin sheet pieces are fixed through the UV film;
s6, coating a second surface: performing AR coating on the surface of the turned small-size resin sheet, and selecting SIO during AR coating2The coating power of the coating is 5kw, the Ar charging amount is 40sccm, and O2The charging rate is 50sccm, the plating rate is 1.75nm/s, Nb2O5The coating power is 4kw, the Ar charge is 270sccm, the coating rate is 2.1nm/s, the coating is 20nm each time, and the interval is 45 s;
s7, dispergation: performing degumming on the UV film of the small-sized resin sheet piece subjected to double-sided AR coating by ultraviolet irradiation;
s8, taking and checking: and slightly taking out the small-sized resin sheet pieces subjected to double-sided AR coating by using forceps, and checking the film crack and appearance integrity under a microscope to complete the AR coating process on the whole resin sheet.
The UV film is 5172-UV film. When coating, the UV film is needed to apply a full tensile force to the product at the lower part, thereby balancing the warping caused by coating. We therefore need to select a suitable UV film, normally a softer texture without high temperature resistance, by testing a number of UV films, and finally a 5172-UV film.
After the UV film was adhered, it was gently smoothed with a brush. Because the resin sheet is thin and the texture is fragile, the sheet is easy to crack due to uneven force application, the film crack is easy to occur after the film is coated, and the brush is used for gently smoothing, so that the adsorption is facilitated, and the film crack is prevented.
When the UV film is used for dispergating, 80mW/cm is adopted2Irradiating with ultraviolet ray of intensity to release the gel in the channel for 30 s.
The thickness of the AR coating film is 200-300 nm. In designing an AR film system, it is necessary to reduce the deformation of the resin sheet by designing the film thickness as low as possible.
Before AR coating, a temperature sticker with the measurement temperature of 77-99 ℃ is attached to the surface of the cut waste resin sheet to carry out complete AR coating, the visible temperature is 77 ℃, three continuous repeated tests are carried out, the temperature is 77 ℃, and the temperature during AR coating is judged to meet the requirement.
When the small resin sheet is taken, the glue removing action needs to be repeated twice after the UV film is removed, namely, one corner is torn from the edge of the UV film to confirm whether the small resin sheet is naturally fallen off or not, and if not, the small resin sheet needs to be removed again.
According to the process, the large-size resin sheet is cut into small-size resin sheet pieces, the UV film is attached to the small-size resin sheet pieces for AR film coating, the power and the time interval of each film coating are strictly controlled during film coating, the phenomenon that the temperature exceeds 85 ℃ to cause the change of the characteristics of the resin sheet is prevented, the deformation of a product is reduced, the surface film crack of the product is prevented, the processing quality of the product is improved, and the yield is improved.
The above-described embodiments are only preferred embodiments of the present invention, and are not intended to limit the present invention in any way, and other variations and modifications may be made without departing from the spirit of the invention as set forth in the claims.

Claims (7)

1. An AR coating process on a resin sheet is characterized by comprising the following steps:
s1, slicing: adhering 77 x 0.21mm resin sheets on a UV film for fixing, cutting into 10 x 0.21mm resin sheet pieces on a special cutting machine, cooling and flushing scraps at a cutter head by continuously introducing water flow, performing linear cutting on the resin sheets during cutting, putting the resin sheet pieces on a special cleaning device for rotary cleaning after cutting, and performing debonding on the UV film by ultraviolet irradiation after cleaning to finish the whole process of cutting large-size resin sheets into small-size resin sheet pieces;
s2, film pasting: adhering a UV film on the bottom surface of the small-sized resin sheet chip, and fixing the small-sized resin sheet chip through the UV film;
s3, coating: performing AR coating on the surface of the small-sized resin sheet, and selecting SIO during AR coating2The coating power of the coating is 5kw, the Ar charging amount is 40sccm, and O2The charging rate is 50sccm, the plating rate is 1.75nm/s, Nb2O5The coating power is 4kw, the Ar charge is 270sccm, the coating rate is 2.1nm/s, the coating is 20nm each time, and the interval is 45 s;
s4, dispergation: performing dispergation on the UV film of the small-size resin sheet piece subjected to single-side AR coating by ultraviolet irradiation;
s5, film pouring: the small-sized resin sheet pieces are turned over, a UV film is adhered to the bottom surfaces of the turned small-sized resin sheet pieces, and the small-sized resin sheet pieces are fixed through the UV film;
s6, coating a second surface: performing AR coating on the surface of the turned small-size resin sheet, and selecting SIO during AR coating2The coating power of the coating is 5kw, the Ar charging amount is 40sccm, and O2The charging rate is 50sccm, the plating rate is 1.75nm/s, Nb2O5The coating power is 4kw, the Ar charge is 270sccm, the coating rate is 2.1nm/s, the coating is 20nm each time, and the interval is 45 s;
s7, dispergation: performing degumming on the UV film of the small-sized resin sheet piece subjected to double-sided AR coating by ultraviolet irradiation;
s8, taking and checking: and slightly taking out the small-sized resin sheet pieces subjected to double-sided AR coating by using forceps, and checking the film crack and appearance integrity under a microscope to complete the AR coating process on the whole resin sheet.
2. The AR coating process on the resin sheet as claimed in claim 1, wherein the UV film is 5172-UV film.
3. The process of claim 1, wherein after the UV film is adhered, the UV film is gently smoothed by a brush.
4. The AR coating process on the resin sheet as claimed in claim 1, wherein the UV film is applied at 80mW/cm for dispergation2Irradiating with ultraviolet ray of intensity to release the gel in the channel for 30 s.
5. The process as claimed in claim 1, wherein the AR coating has a thickness of 200-300 nm.
6. The process of claim 1, wherein before AR coating, a temperature sticker with a measurement temperature of 77-99 ℃ is attached to the surface of the cut waste resin sheet to perform an entire AR coating, wherein the temperature is 77 ℃, three times of continuous repeated tests are carried out, and the temperature of the AR coating is judged to meet the requirement.
7. The AR coating process on the resin sheet as claimed in claim 1, wherein in the process of taking the sheet, the operation of removing the glue is repeated twice after the UV film is removed, namely, a corner is torn from the edge of the UV film to confirm whether the small-sized resin sheet piece naturally falls off or not, and if not, the glue is removed again.
CN202111098085.8A 2021-09-18 2021-09-18 AR coating process on resin sheet Active CN113774328B (en)

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CN113774328B CN113774328B (en) 2023-10-27

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005059382A (en) * 2003-08-12 2005-03-10 Shin Etsu Polymer Co Ltd Mirror surface sheet capable of being formed by three-dimensional forming machine and its manufacturing method
JP2007237466A (en) * 2006-03-06 2007-09-20 Toyota Central Res & Dev Lab Inc Resin sheet and electroluminescence display device
CN107502865A (en) * 2017-08-22 2017-12-22 苏州京浜光电科技股份有限公司 A kind of preparation method of wide-angle imaging module optical filter
CN110194596A (en) * 2019-06-12 2019-09-03 成都西偌帕斯光电科技有限责任公司 A kind of processing method of laser cutting etching glass mobile phone camera screening glass
CN110512431A (en) * 2019-09-05 2019-11-29 苏州吴坤纺织品有限公司 A kind of composite coloured dacron production technology of mostly micro- face reflection abnormity
CN111675491A (en) * 2020-06-09 2020-09-18 杭州美迪凯光电科技股份有限公司 Processing method of infrared narrow-band coated filter with extremely small size
CN112764147A (en) * 2021-01-27 2021-05-07 苏州京浜光电科技股份有限公司 Production method of camera module assembly

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005059382A (en) * 2003-08-12 2005-03-10 Shin Etsu Polymer Co Ltd Mirror surface sheet capable of being formed by three-dimensional forming machine and its manufacturing method
JP2007237466A (en) * 2006-03-06 2007-09-20 Toyota Central Res & Dev Lab Inc Resin sheet and electroluminescence display device
CN107502865A (en) * 2017-08-22 2017-12-22 苏州京浜光电科技股份有限公司 A kind of preparation method of wide-angle imaging module optical filter
CN110194596A (en) * 2019-06-12 2019-09-03 成都西偌帕斯光电科技有限责任公司 A kind of processing method of laser cutting etching glass mobile phone camera screening glass
CN110512431A (en) * 2019-09-05 2019-11-29 苏州吴坤纺织品有限公司 A kind of composite coloured dacron production technology of mostly micro- face reflection abnormity
CN111675491A (en) * 2020-06-09 2020-09-18 杭州美迪凯光电科技股份有限公司 Processing method of infrared narrow-band coated filter with extremely small size
CN112764147A (en) * 2021-01-27 2021-05-07 苏州京浜光电科技股份有限公司 Production method of camera module assembly

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