CN113773914A - Target material cleaning agent and cleaning method thereof - Google Patents
Target material cleaning agent and cleaning method thereof Download PDFInfo
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- CN113773914A CN113773914A CN202111051645.4A CN202111051645A CN113773914A CN 113773914 A CN113773914 A CN 113773914A CN 202111051645 A CN202111051645 A CN 202111051645A CN 113773914 A CN113773914 A CN 113773914A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 84
- 239000012459 cleaning agent Substances 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims abstract description 72
- 239000013077 target material Substances 0.000 title claims description 144
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims abstract description 40
- 150000002191 fatty alcohols Chemical class 0.000 claims abstract description 20
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 13
- 239000011734 sodium Substances 0.000 claims abstract description 13
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 63
- 238000005406 washing Methods 0.000 claims description 47
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 41
- 239000012498 ultrapure water Substances 0.000 claims description 41
- 239000002253 acid Substances 0.000 claims description 34
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 33
- 238000002791 soaking Methods 0.000 claims description 18
- 238000001035 drying Methods 0.000 claims description 12
- 238000007598 dipping method Methods 0.000 claims description 10
- 238000005201 scrubbing Methods 0.000 claims description 8
- 238000009210 therapy by ultrasound Methods 0.000 claims description 8
- -1 sodium alkyl sulfonate Chemical class 0.000 claims description 7
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 3
- 238000005554 pickling Methods 0.000 claims 2
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 abstract description 27
- 239000004365 Protease Substances 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 19
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 abstract description 17
- 229910052938 sodium sulfate Inorganic materials 0.000 abstract description 17
- 235000011152 sodium sulphate Nutrition 0.000 abstract description 17
- VLDHWMAJBNWALQ-UHFFFAOYSA-M sodium;1,3-benzothiazol-3-ide-2-thione Chemical compound [Na+].C1=CC=C2SC([S-])=NC2=C1 VLDHWMAJBNWALQ-UHFFFAOYSA-M 0.000 abstract description 15
- 108091005804 Peptidases Proteins 0.000 abstract description 9
- 102100037486 Reverse transcriptase/ribonuclease H Human genes 0.000 abstract description 8
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 abstract description 3
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 58
- 230000000052 comparative effect Effects 0.000 description 31
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 26
- 235000011187 glycerol Nutrition 0.000 description 20
- 230000008569 process Effects 0.000 description 20
- 238000004544 sputter deposition Methods 0.000 description 15
- 235000013162 Cocos nucifera Nutrition 0.000 description 10
- 244000060011 Cocos nucifera Species 0.000 description 10
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 10
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 10
- 108090000526 Papain Proteins 0.000 description 10
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 10
- 235000019834 papain Nutrition 0.000 description 10
- 229940055729 papain Drugs 0.000 description 10
- QGVQVNIIRBPOAM-UHFFFAOYSA-N dodecyl naphthalene-1-sulfonate;sodium Chemical compound [Na].C1=CC=C2C(S(=O)(=O)OCCCCCCCCCCCC)=CC=CC2=C1 QGVQVNIIRBPOAM-UHFFFAOYSA-N 0.000 description 9
- 239000012535 impurity Substances 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 235000019419 proteases Nutrition 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000005477 sputtering target Methods 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 230000001804 emulsifying effect Effects 0.000 description 3
- 238000011086 high cleaning Methods 0.000 description 3
- 231100000957 no side effect Toxicity 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 2
- 238000005202 decontamination Methods 0.000 description 2
- 230000003588 decontaminative effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004945 emulsification Methods 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 108010004032 Bromelains Proteins 0.000 description 1
- RCEAADKTGXTDOA-UHFFFAOYSA-N OS(O)(=O)=O.CCCCCCCCCCCC[Na] Chemical compound OS(O)(=O)=O.CCCCCCCCCCCC[Na] RCEAADKTGXTDOA-UHFFFAOYSA-N 0.000 description 1
- 102000035195 Peptidases Human genes 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 235000019835 bromelain Nutrition 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000013020 steam cleaning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/37—Mixtures of compounds all of which are anionic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/83—Mixtures of non-ionic with anionic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2065—Polyhydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/22—Carbohydrates or derivatives thereof
- C11D3/222—Natural or synthetic polysaccharides, e.g. cellulose, starch, gum, alginic acid or cyclodextrin
- C11D3/225—Natural or synthetic polysaccharides, e.g. cellulose, starch, gum, alginic acid or cyclodextrin etherified, e.g. CMC
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/34—Organic compounds containing sulfur
- C11D3/349—Organic compounds containing sulfur additionally containing nitrogen atoms, e.g. nitro, nitroso, amino, imino, nitrilo, nitrile groups containing compounds or their derivatives or thio urea
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/38—Products with no well-defined composition, e.g. natural products
- C11D3/386—Preparations containing enzymes, e.g. protease or amylase
- C11D3/38618—Protease or amylase in liquid compositions only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/24—Cleaning or pickling metallic material with solutions or molten salts with neutral solutions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/007—Heating the liquid
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/14—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aliphatic hydrocarbons or mono-alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/14—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aliphatic hydrocarbons or mono-alcohols
- C11D1/146—Sulfuric acid esters
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/22—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aromatic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/02—Anionic compounds
- C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
- C11D1/29—Sulfates of polyoxyalkylene ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/74—Carboxylates or sulfonates esters of polyoxyalkylene glycols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/40—Specific cleaning or washing processes
- C11D2111/44—Multi-step processes
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- Chemical & Material Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Health & Medical Sciences (AREA)
- Materials Engineering (AREA)
- Emergency Medicine (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Molecular Biology (AREA)
- Detergent Compositions (AREA)
Abstract
The invention provides a target cleaning agent and a cleaning method thereof, wherein the target cleaning agent comprises the following components in parts by weight: 9-20 parts of alkyl sodium sulfonate, 9-20 parts of fatty alcohol ether sodium sulfate, 1-5 parts of sodium mercaptobenzothiazole, 2-5 parts of protease and 2-7 parts of sodium dodecyl sulfate. The cleaning agent is simple in operation flow, good in cleaning effect, easy to prepare, low in cost and suitable for popularization and use.
Description
Technical Field
The invention belongs to the technical field of sputtering, relates to target cleaning, and particularly relates to a target cleaning agent and a cleaning method thereof.
Background
The sputtering process is a process of bombarding the surface of a solid with particles with certain energy to make atoms or molecules near the surface of the solid obtain enough energy and finally escape from the surface of the solid, and generally, gas ionization is generated by gas discharge, positive ions of the positive ions bombard a cathode target at high speed under the action of an electric field, and the atoms or molecules on the surface of the cathode target obtain enough energy to escape and fly to the surface of a plated substrate to deposit and form a film. During sputtering, if foreign matter such as oil stains, dust, and particulate impurities adhere to the surface of the target, arc discharge occurs, and the quality of the coating film is reduced.
CN101724818A discloses a cleaning method for copper or copper alloy sputtering target, which has at least two cleaning stages, including: in the first cleaning stage, a first cleaning agent solution is used for cleaning the copper or copper alloy sputtering target material for at least one time; and in the second cleaning stage, the copper or copper alloy sputtering target is cleaned at least once by using a second cleaning agent solution. The first cleaning agent and the second cleaning agent are different, and the first cleaning agent and the second cleaning agent are respectively and independently any one of water, an organic solvent and a mixture of a plurality of solvents. In addition, the cleaning method may further include a preheating process before the first cleaning stage and a steam cleaning stage after the second cleaning stage.
CN113231893A discloses a polishing and cleaning method of an ITO target, which comprises the following steps: (1) mounting the bound ITO target on a device capable of rotating the ITO target; (2) enabling the 60-100-mesh diamond sponge brush to contact the surface to be cleaned of the target material; (3) rough cleaning; (4) replacing the diamond sponge brush with 800-1200 meshes; (5) and (5) fine polishing to obtain the cleaned ITO target. According to the cleaning method, the rough cleaning in the step (3) and the fine polishing in the step (5), the diamond sponge brushes with different meshes are selected, and the grinding pressure and speed are controlled, so that the requirement on the surface roughness of the target material is met.
CN109930162A discloses a cleaning method for recovering a sputtering target, comprising the following steps of separating an old sputtering aluminum target panel from a back plate by using a grinding machine; placing the separated sputtering aluminum target panel in a container of an acid solution, wherein the mass concentration of the acid solution is 10-75%; step three, after the dissolution is finished, taking out the sputtering aluminum target panel, immersing the sputtering aluminum target panel into a sodium hydroxide solution, and neutralizing the acid solution on the surface of the target; the mass concentration of the sodium hydroxide solution is 10-20%; step four, after acid-base neutralization is completed, taking out the sputtering aluminum target panel and immersing the sputtering aluminum target panel into pure water; taking out the pure water, and observing whether residual attachments exist or not by naked eyes; and step six, drying in a greenhouse under the condition that the attachments do not exist, and finally obtaining the clean aluminum target material.
The cleaning efficiency of the target and the cleanliness of the surface of the target directly influence the efficiency and the quality of sputtering coating, so how to simplify the target cleaning process and improve the cleaning effect is very important.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the target cleaning agent and the cleaning method thereof, which have the advantages of simple operation process, good cleaning effect, easy preparation of the cleaning agent, low cost and suitability for popularization and use.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the invention provides a target cleaning agent, which comprises the following components in parts by weight:
the target cleaning agent provided by the invention has the advantages of high cleaning efficiency and wide cleaning range, can comprehensively remove oil stains, particles and other impurities attached to the surface of the target, effectively ensures the sputtering coating effect, can reduce the cost of the cleaning agent, ensures the cleaning efficiency, and has the characteristics of good safety and no side effect.
The amount of the sodium alkylsulfonate added to the target cleaning agent of the present invention is 9 to 20 parts by weight, and may be, for example, 9 parts by weight, 10 parts by weight, 11 parts by weight, 12 parts by weight, 13 parts by weight, 14 parts by weight, 15 parts by weight, 16 parts by weight, 17 parts by weight, 18 parts by weight, 19 parts by weight, or 20 parts by weight, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
The amount of the sodium fatty alcohol ether sulfate added to the target material cleaning agent provided by the present invention is 9 to 20 parts by weight, and may be, for example, 9 parts by weight, 10 parts by weight, 11 parts by weight, 12 parts by weight, 13 parts by weight, 14 parts by weight, 15 parts by weight, 16 parts by weight, 17 parts by weight, 18 parts by weight, 19 parts by weight, or 20 parts by weight, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range are also applicable.
The amount of the sodium mercaptobenzothiazole to be added to the target material cleaning agent of the present invention is 1 to 5 parts by weight, and may be, for example, 1 part by weight, 1.1 part by weight, 1.2 parts by weight, 1.5 parts by weight, 1.8 parts by weight, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, 3 parts by weight, 3.2 parts by weight, 3.5 parts by weight, 3.8 parts by weight, 4 parts by weight, 4.3 parts by weight, 4.5 parts by weight, 4.8 parts by weight, or 5 parts by weight.
The amount of protease added to the target material cleaning agent of the present invention is 2 to 5 parts by weight, and may be, for example, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, 3 parts by weight, 3.2 parts by weight, 3.5 parts by weight, 3.8 parts by weight, 4 parts by weight, 4.3 parts by weight, 4.5 parts by weight, 4.8 parts by weight, or 5 parts by weight, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned values are also applicable.
It should be noted that the protease of the present invention is not specifically required or limited, and it is understood that the protease having catalytic activity and capable of achieving cleaning efficacy falls within the scope and disclosure of the present invention, and therefore other proteases disclosed in the prior art or not disclosed in the new art can be used in the present invention, and for example, papain or bromelain can be selected.
The amount of sodium lauryl sulfate added to the target material cleaning agent of the present invention is 2 to 7 parts by weight, and may be, for example, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, 3 parts by weight, 3.2 parts by weight, 3.5 parts by weight, 3.8 parts by weight, 4 parts by weight, 4.3 parts by weight, 4.5 parts by weight, 4.8 parts by weight, 5 parts by weight, 5.2 parts by weight, 5.5 parts by weight, 5.8 parts by weight, 6 parts by weight, 6.3 parts by weight, 6.5 parts by weight, 6.8 parts by weight, or 7 parts by weight, but is not limited to the recited values, and other values not recited in the range of values are also applicable.
The sodium alkylsulfonate in the cleaning agent provided by the invention has high-efficiency emulsifying capacity, strong chemical stability and low temperature resistance, and can effectively remove oil stains on the surface of the target material; the fatty alcohol ether sodium sulfate is easy to dissolve in water, has good decontamination, emulsification and foaming effects, is mild in washing conditions, and can enhance the cleaning effect by being matched with the sodium alkyl sulfonate; the sodium mercaptobenzothiazole has good buffering and scale inhibiting effects; the protease can hydrolyze oil stains on the surface of the target material, and is favorable for improving the cleanliness; the lauryl sodium sulfate can reduce the surface tension of the target material and improve the cleaning effect.
As a preferable technical scheme of the invention, the target cleaning agent further comprises the following components in parts by weight:
the target material cleaning agent may further include 25 to 40 parts by weight of water, and for example, 25 parts by weight, 26 parts by weight, 27 parts by weight, 28 parts by weight, 29 parts by weight, 30 parts by weight, 31 parts by weight, 32 parts by weight, 33 parts by weight, 34 parts by weight, 35 parts by weight, 36 parts by weight, 37 parts by weight, 38 parts by weight, 39 parts by weight, or 40 parts by weight, but the target material cleaning agent is not limited to the above-mentioned values, and other values not shown in the above-mentioned values are also applicable.
The amount of the hydroxyethyl cellulose added to the target cleaning agent of the present invention is 1 to 5 parts by weight, and may be, for example, 1 part by weight, 1.1 part by weight, 1.2 parts by weight, 1.5 parts by weight, 1.8 parts by weight, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, 3 parts by weight, 3.2 parts by weight, 3.5 parts by weight, 3.8 parts by weight, 4 parts by weight, 4.3 parts by weight, 4.5 parts by weight, 4.8 parts by weight, or 5 parts by weight, but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are also applicable.
The amount of the sodium alkylnaphthalenesulfonate added to the target cleaning agent of the present invention is 2 to 5 parts by weight, and may be, for example, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, 3 parts by weight, 3.2 parts by weight, 3.5 parts by weight, 3.8 parts by weight, 4 parts by weight, 4.3 parts by weight, 4.5 parts by weight, 4.8 parts by weight, or 5 parts by weight, but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are also applicable.
It should be noted that the sodium alkylnaphthalene sulfonate in the present invention is used as a penetrating agent, so that the cleaning agent penetrates into the surface of the target material, which is beneficial for more sodium alkylnaphthalene sulfonate to act and enhance the cleaning effect.
The amount of the coconut acid glycerin added to the target material cleaning agent of the present invention is 2 to 6 parts by weight, and may be, for example, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, 3 parts by weight, 3.2 parts by weight, 3.5 parts by weight, 3.8 parts by weight, 4 parts by weight, 4.3 parts by weight, 4.5 parts by weight, 4.8 parts by weight, 5 parts by weight, 5.2 parts by weight, 5.5 parts by weight, 5.8 parts by weight, or 6 parts by weight, but is not limited to the above-mentioned values, and other values not mentioned in the above-mentioned range are also applicable.
The amount of glycerol added to the target material cleaning agent of the present invention is 1 to 3 parts by weight, and may be, for example, 1 part by weight, 1.1 part by weight, 1.2 parts by weight, 1.5 parts by weight, 1.8 parts by weight, 2 parts by weight, 2.1 parts by weight, 2.2 parts by weight, 2.4 parts by weight, 2.5 parts by weight, 2.8 parts by weight, or 3 parts by weight, but is not limited to the above-mentioned values, and other values not shown in the above-mentioned range of values are also applicable.
As a preferable technical scheme of the invention, the target cleaning agent comprises the following components in parts by weight:
as a preferred technical scheme, the mass ratio of the sodium alkyl sulfonate to the sodium fatty alcohol ether sulfate is (1-2): 1 can be, for example, 1:1, 1.2:1, 1.5:1, 1.8:1 or 2:1, but is not limited to the recited values, and other values not recited within the numerical range are equally applicable.
In a second aspect, the present invention provides a method for cleaning a target, wherein the target is scrubbed by using the target cleaning agent of the first aspect.
As a preferred embodiment of the present invention, the cleaning method includes:
and washing the surface of the target material after sequentially carrying out primary washing, acid washing, secondary washing and target material cleaning agent scrubbing on the target material, and then drying to obtain the clean target material.
The target cleaning method provided by the invention respectively adopts water washing, acid washing and target cleaning agent scrubbing, has simple operation process, has good effect of removing oil stains, dust and other impurities attached to the surface of the target, and effectively ensures the sputtering coating effect.
It should be noted that the cleaning method provided by the invention has wide application range and strong universality, and is particularly suitable for cleaning the sputtering surface of the ultra-pure TI sputtering target material (lettering).
As a preferable technical scheme of the invention, the primary water washing adopts pure water to soak the target material for cleaning.
Preferably, the pure water is ultrapure water.
Preferably, the water temperature of the ultrapure water is 20 to 25 ℃, and for example, it may be 20 ℃, 21 ℃, 22 ℃, 23 ℃, 24 ℃ or 25 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the ultrapure water has a resistivity of 18M Ω cm.
Preferably, the soaking time is 15-25 min, such as 15min, 16min, 17min, 18min, 19min, 20min, 21min, 22min, 23min, 24min or 25min, but not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the temperature of the primary water washing is 20 to 35 ℃, for example, 20 ℃, 21 ℃, 22 ℃, 23 ℃, 24 ℃, 25 ℃, 26 ℃, 27 ℃, 28 ℃, 29 ℃, 30 ℃, 31 ℃, 32 ℃, 33 ℃, 34 ℃ or 35 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the acid washing is performed by using an acid solution.
Preferably, the acid solution comprises citric acid.
Preferably, the concentration of citric acid is 7.5-20 g/L, such as 7.5g/L, 8g/L, 8.5g/L, 9g/L, 10g/L, 10.5g/L, 11g/L, 11.5g/L, 12g/L, 13g/L, 14g/L, 15g/L, 16g/L, 16.5g/L, 17g/L, 17.5g/L, 18g/L, 18.5g/L, 19g/L, or 20g/L, but not limited to the recited values, and other values not recited in this range are equally applicable.
Preferably, the temperature of the acid washing is 20 to 30 ℃, such as 20 ℃, 21 ℃, 22 ℃, 23 ℃, 24 ℃, 25 ℃, 26 ℃, 27 ℃, 28 ℃, 29 ℃ or 30 ℃, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the time for the acid washing is 8-15 min, such as 8min, 9min, 10min, 11min, 12min, 13min, 14min or 15min, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
As a preferred technical scheme of the invention, the secondary water washing adopts pure water to soak the target material and carries out ultrasonic cleaning.
Preferably, the pure water is the same as the pure water used in the first water washing.
Preferably, the temperature of the ultrasonic cleaning is 27 to 35 ℃, for example, 27 ℃, 28 ℃, 29 ℃, 30 ℃, 31 ℃, 32 ℃, 33 ℃, 34 ℃ or 35 ℃, but is not limited to the recited values, and other values not recited in the numerical range are also applicable.
Preferably, the ultrasonic cleaning time is 8-12 min, 8min, 9min, 10min, 11min or 12min, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the scrubbing of the cleaning agent comprises dipping the target cleaning agent and repeatedly wiping the surface of the target.
It should be noted that the wiping tool for dipping the cleaning agent and wiping the surface of the target material is not specifically required or limited, and for example, the nano-magic wiper may be used, but it is understood that other types of wiping tools capable of wiping the surface of the target material may also fall within the scope and disclosure of the present invention, and therefore other types of wiping tools that are disclosed in the prior art or are not disclosed in the new art may also be used in the present invention.
Preferably, the frequency of the wiping is 30 to 40 times per minute, for example, 30 times, 31 times, 32 times, 33 times, 34 times, 35 times, 36 times, 37 times, 38 times, 39 times or 40 times, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
The scrubbing can be performed by mechanical equipment, and the scrubbing frequency is set to be 30-40 times of reciprocating scrubbing per minute, so that the cleaning effect is improved.
As a preferred technical scheme of the invention, ultrapure water is adopted for the rinsing.
Preferably, the flow rate of the ultrapure water is 8 to 15m/s, and may be, for example, 8m/s, 9m/s, 10m/s, 11m/s, 12m/s, 13m/s, 14m/s or 15m/s, but is not limited to the enumerated values, and other non-enumerated values within the numerical range are also applicable.
Preferably, the water temperature of the ultrapure water is 15 to 25 ℃, and for example, it may be 15 ℃, 16 ℃, 17 ℃, 18 ℃, 19 ℃, 20 ℃, 21 ℃, 22 ℃, 23 ℃, 24 ℃ or 25 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the temperature of the drying is 320-380 ℃, for example, 320 ℃, 325 ℃, 330 ℃, 340 ℃, 350 ℃, 360 ℃, 365 ℃, 370 ℃, 375 ℃ or 380 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
As a preferred technical solution of the present invention, the cleaning method specifically comprises the following steps:
soaking a target material in ultrapure water for 15-25 min at the temperature of 20-35 ℃ for primary washing, wherein the temperature of the ultrapure water is 20-25 ℃, and the resistivity is 18M omega cm;
(II) then, under the condition that the temperature is 20-30 ℃, adopting citric acid with the concentration of 7.5-20 g/L to perform acid washing on the target material subjected to primary water washing for 8-15 min;
(III) soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 27-35 ℃ for 8-12 min, taking out the target material, dipping in a target material cleaning agent, and wiping the surface of the target material for 30-40 times in a reciprocating manner every minute;
and (IV) finally, washing the surface of the target material by adopting ultrapure water with the water temperature of 15-25 ℃ at the flow rate of 8-15 m/s, and drying at the temperature of 320-380 ℃ to obtain the clean target material.
Compared with the prior art, the invention has the beneficial effects that:
the target cleaning agent and the cleaning method thereof provided by the invention have the advantages of high cleaning efficiency and wide cleaning range, can comprehensively remove oil stains, particles and impurities attached to the surface of the target, effectively ensure the sputtering coating effect, reduce the cost of the cleaning agent, ensure the cleaning efficiency, and have the characteristics of good safety and no side effect.
Drawings
Fig. 1 is a flowchart of target cleaning according to embodiment 1 of the present invention.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Example 1
The embodiment provides a method for cleaning a target, as shown in fig. 1, which specifically includes the following steps:
(1) soaking the target material with ultrapure water for 20min at 25 ℃ for primary water washing, wherein the water temperature of the ultrapure water is 25 ℃, and the resistivity is 18M omega cm;
(2) then, under the condition that the temperature is 25 ℃, adopting citric acid with the concentration of 15g/L to carry out acid washing on the target material which is washed by water for one time for 10 min;
(3) and soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 30 ℃ for 10min, taking out the target material, dipping a target material cleaning agent, and wiping the surface of the target material for 35 times in a reciprocating manner every minute, wherein the target material cleaning agent comprises:
11g of sodium dodecyl sulfate; 11g of fatty alcohol ether sodium sulfate; 2g of sodium mercaptobenzothiazole; 2g of hydroxyethyl cellulose; 2.5g of sodium dodecyl naphthalene sulfonate; 2.5g of papain; 4g of sodium dodecyl sulfate; 4g of coconut acid glycerol; 1.5g of glycerol; 30g of water;
(4) finally, ultrapure water with the water temperature of 20 ℃ is adopted, the surface of the target material is washed at the flow rate of 10m/s, and then drying is carried out under the condition that the temperature is 350 ℃ to obtain the clean target material.
Example 2
The embodiment provides a method for cleaning a target, which specifically comprises the following steps:
(1) soaking the target material with ultrapure water for 15min at 20 ℃ for primary water washing, wherein the water temperature of the ultrapure water is 20 ℃, and the resistivity is 18M omega cm;
(2) then, under the condition that the temperature is 20 ℃, adopting citric acid with the concentration of 7.5g/L to carry out acid washing on the target material which is washed by water for one time for 8 min;
(3) and soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 27 ℃ for 8min, taking out the target material, dipping a target material cleaning agent, and wiping the surface of the target material for 30 times in a reciprocating manner every minute, wherein the target material cleaning agent comprises:
12g of sodium dodecyl sulfate; 12g of fatty alcohol ether sodium sulfate; 1.5g of sodium mercaptobenzothiazole; 1.5g of hydroxyethyl cellulose; 2.2g of sodium dodecyl naphthalene sulfonate; 2.2g of protease; 3.5g of sodium dodecyl sulfate; 3.5g of coconut acid glycerol; 1.2g of glycerol; 29g of water;
(4) finally, ultrapure water with the water temperature of 15 ℃ is adopted, the surface of the target material is washed at the flow rate of 8m/s, and then drying is carried out under the temperature of 320 ℃ to obtain the clean target material.
Example 3
The embodiment provides a method for cleaning a target, which specifically comprises the following steps:
(1) soaking the target material with ultrapure water for 18min at 23 ℃ for primary water washing, wherein the water temperature of the ultrapure water is 25 ℃, and the resistivity is 18M omega cm;
(2) then, under the condition that the temperature is 20 ℃, adopting citric acid with the concentration of 10g/L to carry out acid washing on the target material subjected to primary water washing for 12 min;
(3) and soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 30 ℃ for 10min, taking out the target material, dipping a target material cleaning agent, and wiping the surface of the target material repeatedly for 32 times per minute, wherein the target material cleaning agent comprises:
13g of sodium dodecyl sulfate; 13g of fatty alcohol ether sodium sulfate; 2g of sodium mercaptobenzothiazole; 2g of hydroxyethyl cellulose; 2.4g of sodium dodecyl naphthalene sulfonate; 2.4g of papain; 4g of sodium dodecyl sulfate; 4g of coconut acid glycerol; 1.4g of glycerol; 30g of water;
(4) finally, ultrapure water with the water temperature of 20 ℃ is adopted, the surface of the target material is washed at the flow rate of 12m/s, and then drying is carried out under the condition that the temperature is 330 ℃ to obtain the clean target material.
Example 4
The embodiment provides a method for cleaning a target, which specifically comprises the following steps:
(1) soaking the target material with ultrapure water for 23min at 25 ℃ for primary water washing, wherein the water temperature of the ultrapure water is 35 ℃, and the resistivity is 18M omega cm;
(2) then, under the condition that the temperature is 20 ℃, adopting citric acid with the concentration of 18g/L to carry out acid cleaning on the target material which is washed by water for one time for 14 min;
(3) and soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 33 ℃ for 10min, taking out the target material, dipping a target material cleaning agent, and wiping the surface of the target material for 38 times in a reciprocating manner every minute, wherein the target material cleaning agent comprises:
15g of sodium dodecyl sulfate; 15g of fatty alcohol ether sodium sulfate; 2.5g of sodium mercaptobenzothiazole; 2.5g of hydroxyethyl cellulose; 2.8g of sodium dodecyl naphthalene sulfonate; 2.8g of papain; 4.5g of sodium dodecyl sulfate; coconut acid glycerin 4.5 g; 1.8g of glycerol; 32g of water;
(4) finally, ultrapure water with the water temperature of 25 ℃ is adopted, the surface of the target material is washed at the flow rate of 14m/s, and then drying is carried out under the condition that the temperature is 350 ℃ to obtain the clean target material.
Example 5
The embodiment provides a method for cleaning a target, which specifically comprises the following steps:
(1) soaking the target material with ultrapure water at 25 deg.C for 25min for primary water washing, wherein the temperature of the ultrapure water is 35 deg.C, and the resistivity is 18M Ω cm;
(2) then, under the condition that the temperature is 25 ℃, adopting citric acid with the concentration of 20g/L to carry out acid washing on the target material subjected to primary water washing for 15 min;
(3) and soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 35 ℃ for 12min, taking out the target material, dipping a target material cleaning agent, and wiping the surface of the target material for 40 times in a reciprocating manner every minute, wherein the target material cleaning agent comprises:
16g of sodium dodecyl sulfate; 16g of fatty alcohol ether sodium sulfate; 3g of sodium mercaptobenzothiazole; 3g of hydroxyethyl cellulose; 3g of sodium dodecyl naphthalene sulfonate; 3g of papain; 5g of sodium dodecyl sulfate; 5g of coconut acid glycerol; 2g of glycerol and 40g of water;
(4) finally, ultrapure water with the water temperature of 25 ℃ is adopted, the surface of the target material is washed at the flow rate of 15m/s, and then drying is carried out under the condition that the temperature is 380 ℃ to obtain the clean target material.
Example 6
The present embodiment provides a method for cleaning a target, which is different from embodiment 1 in that:
the target material cleaning agent in the step (3) comprises:
9g of sodium dodecyl sulfate; 9g of fatty alcohol ether sodium sulfate; 1g of sodium mercaptobenzothiazole; 1g of hydroxyethyl cellulose; 2g of sodium dodecyl naphthalene sulfonate; 2g of papain; 2g of sodium dodecyl sulfate; 2g of coconut acid glycerol; 1g of glycerol and 25g of water;
the rest of the operation steps and the process conditions are exactly the same as in example 1.
Example 7
The present embodiment provides a method for cleaning a target, which is different from embodiment 1 in that:
the target material cleaning agent in the step (3) comprises:
20g of sodium dodecyl sulfate; 20g of fatty alcohol ether sodium sulfate; 5g of sodium mercaptobenzothiazole; 5g of hydroxyethyl cellulose; 5g of sodium dodecyl naphthalene sulfonate; 5g of papain; 7g of sodium dodecyl sulfate; 6g of coconut acid glycerol; 3g of glycerol and 40g of water;
the rest of the operation steps and the process conditions are exactly the same as in example 1.
Example 8
The present embodiment provides a method for cleaning a target, which is different from embodiment 1 in that:
the target material cleaning agent in the step (3) comprises:
8g of sodium dodecyl sulfate; 8g of fatty alcohol ether sodium sulfate; 0.5g of sodium mercaptobenzothiazole; 0.5g of hydroxyethyl cellulose; 1g of sodium dodecyl naphthalene sulfonate; 1g of papain; 1g of sodium dodecyl sulfate; 1g of coconut acid glycerol; 1g of glycerol and 20g of water;
the rest of the operation steps and the process conditions are exactly the same as in example 1.
Example 9
The present embodiment provides a method for cleaning a target, which is different from embodiment 1 in that:
the target material cleaning agent in the step (3) comprises:
25g of sodium dodecyl sulfate; 25g of fatty alcohol ether sodium sulfate; 6g of sodium mercaptobenzothiazole; 6g of hydroxyethyl cellulose; 6g of sodium dodecyl naphthalene sulfonate; 6g of papain; 8g of sodium dodecyl sulfate; 8g of coconut acid glycerol; 5g of glycerol and 45g of water;
the rest of the operation steps and the process conditions are exactly the same as in example 1.
Example 10
The present embodiment provides a method for cleaning a target, which is different from embodiment 1 in that: the acid washing process in the step (2) was not performed, and the remaining operation steps and process conditions were completely the same as those in example 1.
Example 11
The present embodiment provides a method for cleaning a target, which is different from embodiment 1 in that: the secondary washing process in step (3) was not performed, and the remaining operation steps and process conditions were completely the same as in example 1.
Comparative example 1
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: in the step (3), the target cleaning agent was not wiped off, and the remaining operation steps and process conditions were completely the same as those in example 1.
Comparative example 2
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: in the step (3), the target material cleaning agent is not added with sodium dodecyl sulfate, and the rest operation steps and the process conditions are completely the same as those of the example 1.
Comparative example 3
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: in the step (3), the target material detergent is not added with the fatty alcohol ether sodium sulfate, and the rest of the operation steps and the process conditions are completely the same as those in the example 1.
Comparative example 4
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: in the step (3), the target material cleaning agent is not added with sodium mercaptobenzothiazole, and the rest of the operation steps and the process conditions are completely the same as those in the embodiment 1.
Comparative example 5
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: in the step (3), papain is not added into the target material cleaning agent, and the rest of the operation steps and the process conditions are completely the same as those of the example 1.
Comparative example 6
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: in the step (3), the target material cleaning agent is not added with sodium dodecyl sulfate, and the rest of the operation steps and the process conditions are completely the same as those of the example 1.
Comparative example 7
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: the mass ratio of the sodium dodecyl sulfate to the fatty alcohol ether sodium sulfate in the target material cleaning agent in the step (3) is 0.5: 1, the rest of the operation steps and the process conditions are completely the same as those of the example 1.
Comparative example 8
The comparative example provides a target cleaning method, which is different from the method in example 1 in that: the mass ratio of the sodium dodecyl sulfate to the fatty alcohol ether sodium sulfate in the target material cleaning agent in the step (3) is 2.5: 1, the rest of the operation steps and the process conditions are completely the same as those of the example 1.
After the cleaning is finished, the surface roughness of different positions of the target materials in examples 1 to 11 and comparative examples 1 to 8 is tested, the test method is GB/T1031-:
TABLE 1
The target material is cleaned by the method provided by the embodiment 1-11, and as can be seen from table 1, the roughness of the surface of the target material is low, the uniformity of the roughness of each part of the surface of the target material is high, and the cleaning effect is good; the roughness of the target material cleaned in the example 10 is higher than that of the target material cleaned in the example 1, which is mainly because the step of acid cleaning is omitted in the example 10, so that the oil-containing impurities on the surface of the target material cannot be effectively removed, and the cleaning effect is poor; the roughness of the target material cleaned in the example 11 is higher than that of the target material cleaned in the example 1, which is mainly because the step of secondary water washing is omitted in the example 11, and the target material cleaned in the example 1 is soaked in ultrapure water and subjected to ultrasonic treatment after acid washing, so that the residues on the surface of the target material fall off, particles and oil sludge on the surface of the target material are effectively removed, secondary agglomeration is prevented, and the cleaning efficiency is improved.
As can be seen from table 1, the roughness of the target surface in example 7 is higher than that in example 1, which is mainly due to the fact that the content of each component of the target cleaning agent in the examples is low, particles or oil-containing impurities on the target surface cannot be effectively removed, and the cleaning efficiency is reduced; the target roughness in example 8 has no great difference from that in example 1, but in view of cost reduction, the target cleaning agent in example 1 was used for cleaning, and the cleanliness of the target was sufficiently satisfied.
As can be seen from table 1, the surface roughness of the target material in comparative example 1 is higher and the surface of the target material is not uniform compared to example 1, which is mainly because the target material in comparative example 1 is not wiped by the target material cleaning agent, particles and oil-containing impurities on the surface of the target material cannot be completely removed, agglomeration is easily caused, the roughness is increased, the cleaning is insufficient, and the target material cannot be completely cleaned, so that the roughness of the surface of the target material after cleaning is not uniform.
As can be seen from table 1, the surface roughness of the target material in comparative example 2 is higher than that of example 1, which is mainly because the target material cleaning agent in comparative example 2 does not contain sodium dodecyl sulfate, which reduces the emulsifying ability of the cleaning agent and cannot effectively remove the oil stains on the surface of the target material. The target material in the comparative example 3 has higher surface roughness compared with the target material in the example 1, which is mainly because the target material cleaning agent in the comparative example 3 is not added with the fatty alcohol ether sodium sulfate, the fatty alcohol ether sodium sulfate in the example 1 is easy to dissolve in water, has good decontamination, emulsification and foaming effects, is mild in washing conditions, and can enhance the cleaning effect by being matched with the sodium alkyl sulfonate. The target material in the comparative example 4 has higher surface roughness compared with the target material in the example 1, which is mainly because the target material cleaning agent in the comparative example 4 is not added with sodium mercaptobenzothiazole, and the sodium mercaptobenzothiazole in the example 1 has good buffering and scale inhibiting effects; compared with the target material in the embodiment 1, the target material in the comparative example 5 has higher surface roughness, which is mainly because the target material cleaning agent in the comparative example 5 is not added with protease, and the protease in the embodiment 1 can hydrolyze oil stains on the surface of the target material, thereby being beneficial to improving the cleanliness; the target material in comparative example 6 has higher surface roughness than that in example 1, which is mainly because the surface tension of the target material cannot be effectively reduced because sodium dodecyl sulfate is not added in comparative example 6, thereby affecting the cleaning effect.
The roughness of the target material of the comparative example 7 is higher than that of the target material of the example 1, mainly because the content of the sodium dodecyl sulfate in the target material cleaning agent is too low, the capability of the cleaning agent for emulsifying and removing oil dirt is reduced; the roughness of the target material in the comparative example 8 is higher than that of the target material in the example 1, mainly because the content of the fatty alcohol ether sodium sulfate is too low, the reduction of the surface tension is not facilitated, and the cleaning effect is further influenced.
The target cleaning agent and the cleaning method thereof provided by the invention have the advantages of high cleaning efficiency and wide cleaning range, can comprehensively remove oil stains, particles and impurities attached to the surface of the target, effectively ensure the sputtering coating effect, reduce the cost of the cleaning agent, ensure the cleaning efficiency, and have the characteristics of good safety and no side effect.
The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.
Claims (10)
1. The target cleaning agent is characterized by comprising the following components in parts by weight:
2. the target cleaning agent according to claim 1, further comprising the following components in parts by weight:
the target cleaning agent also comprises 25-40 parts by weight of water.
3. The target cleaning agent according to claim 1 or 2, which comprises the following components in parts by weight:
4. the target cleaning agent according to any one of claims 1 to 3, wherein the mass ratio of the sodium alkyl sulfonate to the sodium fatty alcohol ether sulfate is (1-2): 1.
5. a method for cleaning a target, characterized in that the target is scrubbed by using the target cleaning agent according to any one of claims 1 to 4.
6. The cleaning method according to claim 5, wherein the cleaning method comprises:
and washing the surface of the target material after sequentially carrying out primary washing, acid washing, secondary washing and target material cleaning agent scrubbing on the target material, and then drying to obtain the clean target material.
7. The cleaning method according to claim 6, wherein the primary water washing is performed by soaking the target material with pure water;
preferably, the pure water is ultrapure water;
preferably, the water temperature of the ultrapure water is 20-25 ℃;
preferably, the ultrapure water has a resistivity of 18M Ω cm;
preferably, the soaking time is 15-25 min;
preferably, the temperature of the primary water washing is 20-35 ℃;
preferably, the acid washing is performed by using acid liquor;
preferably, the acid solution comprises citric acid;
preferably, the concentration of the citric acid is 7.5-20 g/L;
preferably, the pickling temperature is 20-30 ℃;
preferably, the pickling time is 8-15 min.
8. The cleaning method according to any one of claims 6 or 7, wherein the secondary water washing is performed by soaking the target material with pure water and performing ultrasonic cleaning;
preferably, the pure water is the same as the pure water used in the primary water washing;
preferably, the temperature of the ultrasonic cleaning is 27-35 ℃;
preferably, the ultrasonic cleaning time is 8-12 min;
preferably, the cleaning agent scrubbing comprises dipping the target cleaning agent and repeatedly wiping the surface of the target;
preferably, the frequency of the wiping is 30-40 times of reciprocating every minute.
9. A cleaning method according to any one of claims 6 to 8, wherein the rinsing is with ultra pure water;
preferably, the flow rate of the ultrapure water is 8-15 m/s;
preferably, the water temperature of the ultrapure water is 15-25 ℃;
preferably, the drying temperature is 320-380 ℃.
10. The cleaning method according to any one of claims 6 to 9, characterized in that it comprises in particular the steps of:
soaking a target material in ultrapure water for 15-25 min at the temperature of 20-35 ℃ for primary washing, wherein the temperature of the ultrapure water is 20-25 ℃, and the resistivity is 18M omega cm;
(II) then, under the condition that the temperature is 20-30 ℃, adopting citric acid with the concentration of 7.5-20 g/L to perform acid washing on the target material subjected to primary water washing for 8-15 min;
(III) soaking the acid-washed target material in ultrapure water, performing ultrasonic treatment at the temperature of 27-35 ℃ for 8-12 min, taking out the target material, dipping in a target material cleaning agent, and wiping the surface of the target material for 30-40 times in a reciprocating manner every minute;
and (IV) finally, washing the surface of the target material by adopting ultrapure water with the water temperature of 15-25 ℃ at the flow rate of 8-15 m/s, and drying at the temperature of 320-380 ℃ to obtain the clean target material.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111051645.4A CN113773914A (en) | 2021-09-08 | 2021-09-08 | Target material cleaning agent and cleaning method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111051645.4A CN113773914A (en) | 2021-09-08 | 2021-09-08 | Target material cleaning agent and cleaning method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105647661A (en) * | 2016-03-07 | 2016-06-08 | 苏州龙腾万里化工科技有限公司 | Water-based cleaning agent without side effects |
| CN108546603A (en) * | 2018-04-16 | 2018-09-18 | 苏州龙腾万里化工科技有限公司 | The good cleaning agent of multifunctional cleaning effect |
| CN110670083A (en) * | 2019-11-08 | 2020-01-10 | 宁波江丰电子材料股份有限公司 | Target cleaning method |
| CN111378977A (en) * | 2018-12-28 | 2020-07-07 | 宁波江丰电子材料股份有限公司 | Target material processing method |
| JPWO2021153171A1 (en) * | 2020-01-28 | 2021-08-05 |
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2021
- 2021-09-08 CN CN202111051645.4A patent/CN113773914A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105647661A (en) * | 2016-03-07 | 2016-06-08 | 苏州龙腾万里化工科技有限公司 | Water-based cleaning agent without side effects |
| CN108546603A (en) * | 2018-04-16 | 2018-09-18 | 苏州龙腾万里化工科技有限公司 | The good cleaning agent of multifunctional cleaning effect |
| CN111378977A (en) * | 2018-12-28 | 2020-07-07 | 宁波江丰电子材料股份有限公司 | Target material processing method |
| CN110670083A (en) * | 2019-11-08 | 2020-01-10 | 宁波江丰电子材料股份有限公司 | Target cleaning method |
| JPWO2021153171A1 (en) * | 2020-01-28 | 2021-08-05 |
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