CN113741042A - Laser beam automatic shaping device - Google Patents

Laser beam automatic shaping device Download PDF

Info

Publication number
CN113741042A
CN113741042A CN202110945820.8A CN202110945820A CN113741042A CN 113741042 A CN113741042 A CN 113741042A CN 202110945820 A CN202110945820 A CN 202110945820A CN 113741042 A CN113741042 A CN 113741042A
Authority
CN
China
Prior art keywords
convex lens
spatial light
light modulator
laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110945820.8A
Other languages
Chinese (zh)
Inventor
丁海波
孙畅
郭一君
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Southeast University
Original Assignee
Southeast University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Southeast University filed Critical Southeast University
Priority to CN202110945820.8A priority Critical patent/CN113741042A/en
Publication of CN113741042A publication Critical patent/CN113741042A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明公开了激光光束自动整形装置,该装置由光束调制模块和自动控制模块组成,所述光束调制模块包括空间光调制器(1)、第一凸透镜(2)、分束器(3)和第二凸透镜(4),所述自动控制模块包括空间光调制器(1)、光束质量分析仪(5)和计算机(6),所述计算机(6)与空间光调制器(1)、光束质量分析仪(5)通过电缆连接形成闭环反馈系统。本发明以空间光调制器实施激光光束的波前整形,实现任意目标光斑的整形效果;通过引入光束质量分析仪形成闭环反馈系统,提高激光光束的整形质量,降低人工操作的难度与工作量。

Figure 202110945820

The invention discloses a laser beam automatic shaping device. The device is composed of a beam modulation module and an automatic control module. The beam modulation module includes a spatial light modulator (1), a first convex lens (2), a beam splitter (3) and The second convex lens (4), the automatic control module includes a spatial light modulator (1), a beam quality analyzer (5) and a computer (6), the computer (6) is connected with the spatial light modulator (1), the beam The mass analyzer (5) is connected by a cable to form a closed-loop feedback system. The invention implements the wavefront shaping of the laser beam with the spatial light modulator, and realizes the shaping effect of any target light spot; and forms a closed-loop feedback system by introducing a beam quality analyzer, improves the shaping quality of the laser beam, and reduces the difficulty and workload of manual operation.

Figure 202110945820

Description

Automatic shaping device for laser beam
Technical Field
The invention relates to the field of laser application, in particular to an automatic shaping device for a laser beam.
Background
With the rapid development of lasers, various types of lasers have been widely applied to the fields of microscopic imaging, optical measurement and micro-nano processing. In order to ensure the quality of imaging and processing, laser beam shaping becomes a core technology in the field.
To solve this key problem, beam shaping schemes based on devices such as slits, variable diaphragms, micro-lens arrays, deformable mirrors, spatial light modulators, etc. are gradually developed. The silicon-based liquid crystal spatial light modulator is based on the Fourier optical theory, can actively adjust incident laser to implement phase modulation, thereby realizing high-precision and full-range beam shaping, and is widely applied to holographic imaging, phase difference correction in a microscopic system and multi-beam parallel laser processing. However, in the practical implementation process, the standard monitoring means is lacked to evaluate the beam shaping effect, and the conventional method mainly depends on manual observation and judgment before system construction, so that the common operator is difficult to master and the shaping quality is not uniform. During the operation of the system, once the state of the incident laser changes, the incident laser cannot be found in real time and corrected quickly.
Therefore, an effective solution is needed to solve the difficulty of automatic control in beam shaping, provide an intelligent operation scheme for ordinary users, enhance the automation degree of the system, and improve the beam shaping effect.
Disclosure of Invention
The purpose of the invention is as follows: the invention aims to provide the automatic shaping device of the laser beam, which is convenient to operate and has high automation degree.
The technical scheme is as follows: the invention provides an automatic laser beam shaping device which comprises a beam modulation module and an automatic control module, wherein the beam modulation module comprises a spatial light modulator, a first convex lens, a beam splitter and a second convex lens, the automatic control module comprises the spatial light modulator, a beam quality analyzer and a computer, and the computer is connected with the spatial light modulator and the beam quality analyzer through cables to form a closed-loop feedback system.
Furthermore, the spatial light modulator is fixed on the in-situ rotating table, and the mirror surface arrangement direction of the spatial light modulator is consistent with the polarization direction of the incident laser. The first convex lens and the second convex lens construct a standard 4f system for adjusting the size of the emergent laser beam, and the ratio of the spot diameter of the emergent laser to the spot diameter of the incident laser is f2/f1. The beam splitter is a non-polarizing flat plate beam splitter or a non-polarizing beam splitting cube, and the distance between the beam splitter and the first convex lens is less than the focal length f of the first convex lens1. The optical path between the placing position of the beam quality analyzer and the first convex lens is equal to the focal length f of the first convex lens1
The spatial light modulator modulates the incident laser through the loading holographic phase diagram, the beam quality analyzer monitors the modulated emergent laser in real time, and the loading pattern of the spatial light modulator is adjusted according to the comparison result of the target beam and the emergent beam.
Has the advantages that: compared with the prior art, the invention adds the beam quality analyzer to provide real-time monitoring and form a closed-loop feedback system, and has the following advantages:
1. the automation degree of the beam shaping device is improved, the use difficulty of an operator is reduced, and possible laser safety accidents are avoided by removing manual operation.
2. The unified machine judgment replaces manual judgment, so that the method is not only suitable for the incident laser of any facula pattern, but also improves the quality of the emergent laser after beam shaping.
3. The spatial light modulator is used for implementing wave front shaping of the laser beam, and the shaping effect of any target light spot is realized.
Drawings
FIG. 1 is a schematic diagram of the structure of the apparatus;
fig. 2 is a flow chart of the operation of the apparatus.
Detailed Description
As shown in fig. 1, the laser beam automatic shaping device of the present embodiment is composed of a beam modulation module and an automatic control module. The light beam modulation module comprises a spatial light modulator 1, a first convex lens 2, a beam splitter 3 and a second convex lens 4, and the automatic control module comprises the spatial light modulator 1, a light beam quality analyzer 5 and a computer 6.
In this embodiment, the spatial light modulator 1 is fixed to the in-situ rotation stage, so that the mirror surface arrangement direction is consistent with the polarization direction of the incident laser.
In this embodiment, the first convex lens and the second convex lens constitute a standard 4f system for adjusting the size of the outgoing laser beam, and the ratio of the spot diameter of the outgoing laser beam to the spot diameter of the incoming laser beam is f2/f 1.
In this embodiment, the beam splitter 2 is a non-polarizing plate beam splitter or a non-polarizing beam splitting cube, the splitting ratio is less than 10: 90 (reflection: transmission), and the distance between the beam splitter and the first convex lens is less than the focal length f1 of the first convex lens.
In this embodiment, the optical path length between the placement position of the beam quality analyzer 5 and the first convex lens is equal to the focal length f1 of the first convex lens.
In this embodiment, the computer 6 is connected with the spatial light modulator 1 and the beam quality analyzer 5 through cables to form a closed-loop feedback system, and the provided control program can acquire measurement data of the beam quality analyzer in real time, calculate an appropriate holographic phase diagram and automatically load the holographic phase diagram to the spatial light modulator until the coincidence rate of the measurement data and the target beam reaches a preset threshold value or more.
As shown in fig. 2, a specific working flow of the automatic laser beam shaping device in this embodiment includes:
1) adjusting and fixing the installation angle of the spatial light modulator 1 to make the installation angle consistent with the polarization direction of incident laser;
2) inputting a target light beam pattern, which can be in a picture format or equation description, from a control program port of the computer 6, and setting a threshold value of a comparison result, wherein the recommended value is 99%;
3) after starting the operation program, the computer 6 automatically calculates the holographic phase diagram and loads the holographic phase diagram to the spatial light modulator 1;
4) the light beam quality analyzer 5 transmits the detection result back to the computer 6, and the control program compares the detection result with the comparison result of the target group;
5) if the comparison result is higher than the preset threshold value, the control program keeps loading the pattern until the operation is finished; and if the comparison result is lower than the preset threshold value, the control program returns to the step 3, and the hologram is recalculated and loaded until the comparison result exceeds the threshold value.
Example 1
This embodiment is directed to laser holographic imaging. The incident laser is continuous laser after beam expanding treatment, and the wavelength is 532 nanometers. According to the requirement of the imaging size, the focal lengths of the first convex lens 2 and the second convex lens 4 are 250 mm and 500 mm respectively, the beam splitter 3 selects a flat plate beam splitter with the splitting ratio of 50: 50, and finally the target pattern can be presented on the image plane of the second convex lens 4.
Example 2
This embodiment is directed to wavefront shaping for microscopic imaging. The incident laser is femtosecond laser processed by beam expansion, and the wavelength is 488 nanometers. Because the emergent laser needs to be further coupled to a focusing objective lens, the focal lengths of the first convex lens 2 and the second convex lens 4 are 500 mm and 400 mm respectively, the beam splitter 3 selects a beam splitting cube with the beam splitting ratio of 10: 90, the length-diameter ratio of the focus can be finally adjusted at the focus of the second convex lens 4, and the aberration influence after the observation depth is increased is reduced.
Example 3
The embodiment is directed to femtosecond laser parallel processing. The incident laser is femtosecond laser processed by beam expansion, and the wavelength is 800 nanometers. Because the emergent laser needs to be further coupled to the focusing objective lens, the focal lengths of the first convex lens 2 and the second convex lens 4 are 500 mm and 400 mm respectively, the beam splitter selects a beam splitting cube with the beam splitting ratio of 10: 90, and finally, a uniform multi-focus array can be formed on the focal plane of the subsequent focusing objective lens.

Claims (5)

1.一种激光光束自动整形装置,其特征在于:包括光束调制模块和自动控制模块组成,所述光束调制模块包括空间光调制器(1)、第一凸透镜(2)、分束器(3)和第二凸透镜(4),所述自动控制模块包括空间光调制器(1)、光束质量分析仪(5)和计算机(6),所述计算机(6)与空间光调制器(1)、光束质量分析仪(5)通过电缆连接形成闭环反馈系统。1. a laser beam automatic shaping device is characterized in that: comprise beam modulation module and automatic control module to form, described beam modulation module comprises spatial light modulator (1), first convex lens (2), beam splitter (3 ) and a second convex lens (4), the automatic control module includes a spatial light modulator (1), a beam quality analyzer (5) and a computer (6), the computer (6) and the spatial light modulator (1) . The beam quality analyzer (5) is connected by a cable to form a closed-loop feedback system. 2.根据权利要求1所述的激光光束自动整形装置,其特征在于:所述空间光调制器(1)固定于原位旋转台,其镜面摆放方向与入射激光的偏振方向一致。2 . The laser beam automatic shaping device according to claim 1 , wherein the spatial light modulator ( 1 ) is fixed on an in-situ rotating stage, and the orientation of the mirror surface is consistent with the polarization direction of the incident laser light. 3 . 3.根据权利要求1所述的激光光束自动整形装置,其特征在于:所述第一凸透镜(2)与第二凸透镜(4)构建成用于调节出射激光光束大小的标准4f系统,出射激光与入射激光的光斑直径比例为f2/f13. The laser beam automatic shaping device according to claim 1, wherein the first convex lens (2) and the second convex lens (4) are constructed as a standard 4f system for adjusting the size of the outgoing laser beam, and the outgoing laser The ratio to the spot diameter of the incident laser light is f 2 /f 1 . 4.根据权利要求1所述的激光光束自动整形装置,其特征在于:所述分束器(3)选用非偏振平板分束镜或非偏振分束立方,其与第一凸透镜(2)的距离小于第一凸透镜(2)的焦距f14. automatic laser beam shaping device according to claim 1, is characterized in that: described beam splitter (3) selects non-polarization flat plate beam splitter or non-polarization beam splitter cube for use, and it and the first convex lens (2) The distance is smaller than the focal length f 1 of the first convex lens (2). 5.根据权利要求1所述的激光光束自动整形装置,其特征在于:所述光束质量分析仪(5)的摆放位置与第一凸透镜(2)的光程等于第一凸透镜(2)的焦距f15. The laser beam automatic shaping device according to claim 1, characterized in that: the placement position of the beam quality analyzer (5) and the optical path of the first convex lens (2) are equal to the length of the first convex lens (2). focal length f 1 .
CN202110945820.8A 2021-08-17 2021-08-17 Laser beam automatic shaping device Pending CN113741042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110945820.8A CN113741042A (en) 2021-08-17 2021-08-17 Laser beam automatic shaping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110945820.8A CN113741042A (en) 2021-08-17 2021-08-17 Laser beam automatic shaping device

Publications (1)

Publication Number Publication Date
CN113741042A true CN113741042A (en) 2021-12-03

Family

ID=78731586

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110945820.8A Pending CN113741042A (en) 2021-08-17 2021-08-17 Laser beam automatic shaping device

Country Status (1)

Country Link
CN (1) CN113741042A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114453595A (en) * 2022-03-15 2022-05-10 季华实验室 Full-width beam quality measurement method and measurement device for selective laser melting equipment

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646895A (en) * 2017-01-13 2017-05-10 湖北工业大学 Laser beam shaping device and laser beam shaping method based on spatial light modulator
CN106735875A (en) * 2017-02-20 2017-05-31 湖北工业大学 A kind of laser flexible micro-machining system and method based on LCD space light modulator
CN110658631A (en) * 2019-09-05 2020-01-07 东南大学 Light beam shaping device based on anisotropic two-photon absorption effect
CN111142266A (en) * 2019-12-23 2020-05-12 南方科技大学 A device and method for generating and dynamically regulating a vector beam
CN111929911A (en) * 2020-07-16 2020-11-13 上海市激光技术研究所 Control device and method for laser beam form and quality
CN112730262A (en) * 2020-12-18 2021-04-30 中国科学院上海光学精密机械研究所 Device and method for improving femtosecond laser induced damage threshold of KDP (Potassium dihydrogen phosphate) crystal
CN112748581A (en) * 2020-12-30 2021-05-04 中国人民解放军国防科技大学 Semiconductor laser's circular flat top beam shaping system that can integrate

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646895A (en) * 2017-01-13 2017-05-10 湖北工业大学 Laser beam shaping device and laser beam shaping method based on spatial light modulator
CN106735875A (en) * 2017-02-20 2017-05-31 湖北工业大学 A kind of laser flexible micro-machining system and method based on LCD space light modulator
CN110658631A (en) * 2019-09-05 2020-01-07 东南大学 Light beam shaping device based on anisotropic two-photon absorption effect
CN111142266A (en) * 2019-12-23 2020-05-12 南方科技大学 A device and method for generating and dynamically regulating a vector beam
CN111929911A (en) * 2020-07-16 2020-11-13 上海市激光技术研究所 Control device and method for laser beam form and quality
CN112730262A (en) * 2020-12-18 2021-04-30 中国科学院上海光学精密机械研究所 Device and method for improving femtosecond laser induced damage threshold of KDP (Potassium dihydrogen phosphate) crystal
CN112748581A (en) * 2020-12-30 2021-05-04 中国人民解放军国防科技大学 Semiconductor laser's circular flat top beam shaping system that can integrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114453595A (en) * 2022-03-15 2022-05-10 季华实验室 Full-width beam quality measurement method and measurement device for selective laser melting equipment
CN114453595B (en) * 2022-03-15 2023-08-15 季华实验室 Method and device for measuring quality of full-breadth beam of selective laser melting equipment

Similar Documents

Publication Publication Date Title
US12246393B2 (en) Femtosecond laser system for processing micro-hole array
CN106735875B (en) A kind of laser flexible micro-machining system and method based on LCD space light modulator
US8198564B2 (en) Adaptive optic beamshaping in laser processing systems
CN112639421B (en) Adaptive laser beam shaping
CN106443872B (en) One kind inscribing any grid region length of fibre grating approach based on adjustable diaphragm
CN111900597B (en) Planar multi-beam laser parameter regulation and control method and system
CN111999902B (en) A femtosecond laser two-photon processing device
CN112859534A (en) Parallel direct-writing device and method based on edge light suppression array
US20240201484A1 (en) Method and device for generating airy light needle with long depth of focus and high aspect ratio
CN107102436A (en) A kind of wave plate group design method for compensating any optical phase put-off
CN114406450A (en) Regulating and controlling device and method for high-uniformity tight-focusing long-light needle in laser processing
CN113741042A (en) Laser beam automatic shaping device
CN107561604A (en) A kind of method and device that photonic crystal is prepared based on spatial light modulator
CN101975991A (en) Method for extending focal depth based on amplitude modulation, polarization and phase modulation and device thereof
CN109683306A (en) It is a kind of for overcoming the wavefront control method of thermal lensing effect
CN211072238U (en) Dynamic controllable laser beam splitting device
CN209525479U (en) Microlens array system of processing
WO2019170036A1 (en) Ultrafast Laser Fabrication Method and System
CN111323925A (en) An optical system for generating a controllable converging vortex beam
CN116851909A (en) Bessel beam-based femtosecond laser processing system and method
CN115519239A (en) Micro-nano processing system and method based on pulse sequence
CN115639729A (en) Optical fiber parallel laser direct writing method and system based on holographic phase splitting
CN211653311U (en) Dynamic light field generating device
CN210573037U (en) Optical imaging system based on reflective diffraction optical element
TW202202901A (en) Broadband illumination tuning

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20211203