CN111929911A - Control device and method for laser beam form and quality - Google Patents
Control device and method for laser beam form and quality Download PDFInfo
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- CN111929911A CN111929911A CN202010687298.3A CN202010687298A CN111929911A CN 111929911 A CN111929911 A CN 111929911A CN 202010687298 A CN202010687298 A CN 202010687298A CN 111929911 A CN111929911 A CN 111929911A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Abstract
The invention relates to the field of laser application, in particular to a device and a method for controlling the form and quality of a laser beam. The control device comprises a laser light source, a beam expander, a first reflector, a second reflector, a polarizer, a spatial light modulator, an analyzer, a first lens, a beam splitter, a second lens, a third reflector, a third lens, a CCD camera and a computer. The control method comprises the steps of firstly loading a processed mixed hologram on a spatial light modulator, adjusting the polarization angle of an incident beam, then enabling the incident beam to enter the spatial light modulator and reflect, and adjusting the reflectivity by controlling the gray value of the mixed hologram. The 4f system is used to transfer the image of the spatial light modulator near field to the surface of the worktable for processing, and the spectroscope is used to transfer the shaped light to the CCD camera for observation through the second 4f system. The invention utilizes the wave front modulation characteristic of the spatial light modulator and combines the wave front feedback technology, has simple operation and flexible use, and is a high-efficiency and high-quality laser shaping technology.
Description
Technical Field
The invention relates to a device and a method for controlling the form and quality of a Gaussian beam, in particular to a device and a method for controlling the form and quality of a laser beam based on a spatial light modulator, and belongs to the technical field of laser application.
Background
Laser is coherent radiation generated by medium stimulation, and has the excellent characteristics of good monochromaticity, high brightness, good coherence, strong directivity and collimation, etc., so that the application field of the laser technology is very wide. The laser processing technology utilizes the characteristic of interaction between a laser beam and a substance to process various materials including metal and nonmetal, and relates to various processing technologies such as welding, cutting, marking, punching, heat treatment, forming and the like. Laser machining is more precise, accurate and rapid than conventional machining. In the aerospace field, laser has become an effective means for machining special parts. An important characteristic of the international laser processing technology research at present is that the coverage is wide and the development speed is fast.
Because the light intensity of the laser beam emitted by the laser is in Gaussian distribution and the propagation path is hyperbolic, the characteristic of non-uniform energy distribution can cause the material to generate heat accumulation in a local range, thereby damaging the material characteristic, influencing the consistency of the processing effect and greatly restricting the application of the laser micromachining technology in the fields of aviation, aerospace and the like with higher requirements on the reliability of devices.
In the application of the fields of laser anti-counterfeiting and the like, a circular laser spot needs to be changed into a hollow annular, square or other special-shaped laser spot. Therefore, laser beam shaping techniques are very important. Among the numerous shaping methods, the aperture diaphragm method has low energy utilization rate and poor shaping effect, and for the modern industry which attaches importance to efficiency, the aperture diaphragm method still far fails to meet the requirement of industrialization. The methods such as the micro lens array, the diffractive optical element, the long focal depth shaping system, the birefringent lens group, the aspheric lens and the like can obtain the shaped light beam with high energy utilization rate or even light beam energy distribution, but most of the methods utilize expensive and precise optical devices, have single purpose and poor flexibility in controlling the light path in a complex way, and are not easy to meet the requirements of simplicity and convenience.
Disclosure of Invention
The invention aims to provide a control device for the form and quality of a laser beam, which can solve the problems of high processing cost, complex optical path and poor adaptability in the prior art.
In order to solve the problems, the technical scheme adopted by the invention is as follows:
a control device for laser beam shape and quality comprises a laser source, a beam expander, a first reflector, a second reflector, a polarizer, a spatial light modulator, an analyzer, a first lens, a beam splitter, a second lens, a third reflector, a third lens, a CCD camera and a computer;
gaussian light emitted by the laser source is expanded by the beam expander, the expanded light beam sequentially passes through the first reflector and the second reflector, is reflected by the polarizer, enters the polarizer to adjust the polarization angle, then enters the spatial light modulator to be reflected, the reflected light enters the first lens to be focused after passing through the analyzer, then is split by the beam splitter, a part of light enters the surface of the third reflector and enters the third lens after being reflected, the light beam shaped by the third lens enters the CCD camera to be subjected to quality observation, the other part of light is transmitted to the second lens, and the light beam acts on the workbench;
and the computer is respectively connected with the laser light source, the spatial light modulator and the CCD camera.
Further, the first lens and the second lens form a first 4f system, a focal length f1 of the first lens is far greater than a focal length f2 of the second lens, the first lens is located at a focal length f1 which is one time of the focal length behind the spatial light modulator, the second lens is located behind the first lens, and an optical path between the second lens and the first lens is the sum of the focal lengths of the second lens and the first lens;
the first lens and the third lens form a second 4f system, the focal lengths of the first lens and the third lens are equal, the third lens is positioned behind the first lens, the optical distance between the third lens and the first lens is the sum of the focal lengths of the third lens and the first lens, and the CCD camera is positioned at a focal length which is one time behind the third lens.
Further, the focal lengths of the first lens and the third lens are both 1000mm, and the focal length of the second lens is 30 mm.
Furthermore, the beam splitter is positioned behind the first lens, and the optical path between the beam splitter and the first lens 8 is f 1-3 f 1.
Further, the spatial light modulator is a liquid crystal spatial light modulator.
The invention also provides a control method of the laser beam form and quality, which is realized by the control device and comprises the following steps:
s1, generating a gray scale image by using control software of the spatial light modulator or Matlab software, and adding a geometric mask into the gray scale image by using mapping software to form a mixed hologram;
s2, loading the mixed hologram obtained in the step S1 on a spatial light modulator, and adjusting the angle alpha 1 of a polarizer and the included angle alpha between an analyzer and the polarizer2；
S3, enabling Gaussian light emitted by the laser source to enter the polarizer to adjust the polarization angle after being expanded, and then enabling the light to be incident on the spatial light modulator at an incident angle smaller than 10 degrees and enabling the light to be reflected;
s4, after the reflected light passes through the analyzer, splitting the beam by using a beam splitter;
and S5, transmitting the image on the spatial light modulator to a processing table by using the first 4f system after being transmitted by the beam splitter, and transmitting the shaped light beam to the CCD camera for observation by using the beam splitter to transmit the reflected light with the energy of 1% to the second 4f system.
Further, in step S1 of the above scheme, the gray scales of both the geometric mask region and the unmasked region in the hybrid hologram are 0-255.
Further, in step S1 of the above scheme, the grayscale value of the geometric mask region in the hybrid hologram is 0, and the grayscale value of the remaining grayscale images is 255.
Further, in step S1 of the above scheme, the gray-level values of the geometric mask region in the hybrid hologram are distributed according to inverse gaussian intensity to improve the energy utilization efficiency.
Further, in step S2 of the above scheme, the polarizer angle α 1 is 0 °, and the included angle α between the analyzer 7 and the polarizer 5 is20 ° or 90 °;
in step S5, the first 4f system is composed of a first lens and a second lens, the focal length of the first lens is 1000mm, and the focal length of the second lens is 30 mm;
the second 4f system is composed of a first lens and a third lens, and the focal lengths of the third lens and the first lens are equal.
Compared with the prior art, the invention has the beneficial effects that:
1. the control device of the invention utilizes the wave front modulation characteristic of the spatial light modulator, combines with the wave front feedback technology, has simple operation and flexible use, is a high-efficiency and high-quality laser shaping technology, and the spatial light modulator of the invention has convenient operation and flexible use.
2. The mixed hologram used in the control method of the invention is a graph combining a gray scale image and a geometric mask, does not need complex calculation and saves time.
3. The control method of the invention utilizes that the laser reflectivity is different corresponding to different gray scales in amplitude modulation, and the obtained shaped light beam does not need to be filtered, thereby avoiding the interference of a spatial filter to the shaped light beam and improving the light beam quality.
Drawings
Fig. 1 shows a hybrid hologram formed in step S1 in the control method of the present invention.
Fig. 2 is a schematic diagram of a control device for laser beam shape and quality according to the present invention.
Fig. 3 shows the reflectivity corresponding to different gray-scale values in step S1 of the control method according to the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. The objects, aspects and advantages of the present invention will become more apparent from the following description. It should be understood that the described embodiments are preferred embodiments of the invention, and not all embodiments.
Referring to fig. 2, a control device for laser beam shape and quality includes a laser light source 1, a beam expander 2, a first reflector 3, a second reflector 4, a polarizer 5, a spatial light modulator 6, an analyzer 7, a first lens 8, a beam splitter 9, a second lens 10, a third reflector 12, a third lens 13, a CCD camera 14, and a computer 15.
Gaussian light emitted by the laser source 1 is expanded by the expander lens 2, the expanded light beam sequentially passes through the first reflector 3 and the second reflector 4 to be reflected and enters the polarizer 5 to adjust the polarization angle, then enters the spatial light modulator 6 to be reflected, the reflected light passes through the analyzer 7 to enter the first lens 8 to be focused, then is split by the beam splitter 9, a part of light enters the surface of the third reflector 12 and enters the third lens 13 after being reflected, the light beam shaped by the third lens 13 enters the CCD camera 14 to be observed in quality, the other part of light is transmitted to the second lens 10 to act on the workbench 11 for processing, and the computer 15 is respectively connected with the laser source 1, the spatial light modulator 6 and the CCD camera 14 and is used for controlling the work of the laser source 1, the spatial light modulator 6 and the CCD camera 14. The spatial light modulator 6 is preferably a liquid crystal spatial light modulator, and can adopt a pure phase spatial light modulator produced by Hamamatsu, the model is X10468-02, and the frame rate is 60 Hz. The laser light source 1 may be a picosecond laser manufactured by EdgeWave corporation, and has a pulse width of 12ps and a single pulse energy of 100 muj.
The first lens 8 and the second lens 10 form a first 4f system, the focal length f1 of the first lens 8 is 1000mm, the focal length f2 of the second lens 10 is 30mm, the first lens 8 is located 1000mm behind the spatial light modulator 6, the second lens 10 is located 1030mm behind the first lens 8, and reflected light from the spatial light modulator 6 is finally imaged into parallel shaped light beams through the first 4f system.
The first lens 8 and the third lens 13 form a second 4f system, the focal length of the third lens 13 is also 1000mm, the optical path of the third lens 13 behind the first lens 8 is the sum of the focal lengths of the two, namely 2000mm, and the CCD camera 14 is located behind the third lens 13 at the position where the optical path is 1000 mm. The beam splitter 9 is positioned behind the first lens 8, and the distance between the beam splitter 9 and the first lens 8 is f 1-3 f 1. Through the second 4f system and the beam splitter 9, 1% of energy of the reflected light is shaped and guided into the CCD camera 14 for observing the shape and the energy distribution state of the shaped light spots. The detection result shows that the shaped light beam is flat-topped hexagon and square.
The invention also provides a control method of the laser beam form and quality, which is realized by the control device and comprises the following steps:
s1, generating a gray image by using control software or Matlab software of the spatial light modulator 6, adding a geometric mask into the gray image by using drawing software, taking a square as an example, adjusting the gray value of a graph of a geometric mask region to be 0, and the gray value of a non-mask region to be 255 to form the mixed hologram shown in FIG. 1, wherein the gray value of the geometric mask region in the mixed hologram is distributed according to inverse Gaussian intensity;
s2, loading the mixed hologram obtained in the step S1 on the spatial light modulator 6, moving the position of the hologram to enable the center of the pattern to coincide with the center of the laser spot, and adjusting the angle alpha of the polarizer1And the angle alpha between the analyzer 7 and the polarizer 52Adjusting the angle alpha of the polarizer 51Is 0 degree, and the included angle alpha between the analyzer 7 and the polarizer 520 ° or 90 ° to obtain the maximum amplitude modulation amount;
s3, after the Gaussian light emitted by the laser source 1 expands, the expanded light enters the polarizer 5 to adjust the polarization angle, and the polarization direction of the incident light is adjusted to be horizontal polarization. Then is incident on the spatial light modulator 6 at an incident angle of less than 10 DEG and is reflected;
s4, the reflected light is amplitude-modulated by the analyzer 7, and then split by the beam splitter 9. As shown in fig. 3, the holograms have different gray scale values and different reflectivities. Among the reflected light beams, the light beams with more uniform energy distribution in the central area of the Gaussian beam are reflected by the geometric mask area, and the reflectivity is far greater than that of the unmasked area;
s5, the first 4f system transmits the image on the spatial light modulator 6 through the beam splitter 9 and transmits the image to the processing stage 11 for processing, and the beam splitter 9 transmits the reflected light with 1% energy through the second 4f system and transmits the shaped light beam to the CCD camera for observation. In this step, the first 4f system is composed of a first lens 8 and a second lens 10, the focal length of the first lens 8 is 1000mm, the focal length of the second lens 10 is 30mm, and the second lens 10 is located 1030mm behind the first lens 8; finally imaged as a parallel shaped beam by the first 4f system.
The second 4f system is composed of a first lens 8 and a third lens 13, the focal lengths of the third lens 13 and the first lens 8 are equal, and the optical path of the third lens 13 behind the first lens 8 is the sum of the focal lengths of the third lens and the first lens, namely 2000 mm. The CCD camera 14 is positioned at the position of the third lens 13 with the rear optical path of 1000 mm. The beam splitter 9 is positioned behind the first lens 8, and the distance between the beam splitter 9 and the first lens 8 is f 1-3 f 1. Through the second 4f system and the beam splitter 9, 1% of energy of the reflected light is shaped and guided into the CCD camera 14 for observing the shape and the energy distribution state of the shaped light spots. And the detection result shows that the shaped light beam is a flat-top light beam.
The control method can also add the automatic conversion function of the mixed hologram, and realizes the high-quality processing with fast conversion of laser beam forms and controllable energy distribution by matching with the repetition frequency of the laser and the motion control of the platform.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, and it is obvious that any person skilled in the art can easily conceive of alternative or modified embodiments based on the above embodiments and these should be covered by the present invention.
Claims (10)
1. A control device for laser beam shape and quality is characterized in that:
the device comprises a laser light source, a beam expander, a first reflector, a second reflector, a polarizer, a spatial light modulator, an analyzer, a first lens, a beam splitter, a second lens, a third reflector, a third lens, a CCD camera and a computer;
gaussian light emitted by the laser source is expanded by the beam expander, the expanded light beam sequentially passes through the first reflector and the second reflector, is reflected by the polarizer, enters the polarizer to adjust the polarization angle, then enters the spatial light modulator to be reflected, the reflected light enters the first lens to be focused after passing through the analyzer, then is split by the beam splitter, a part of light enters the surface of the third reflector and enters the third lens after being reflected, the light beam shaped by the third lens enters the CCD camera to be subjected to quality observation, the other part of light is transmitted to the second lens, and the light beam acts on the workbench;
and the computer is respectively connected with the laser light source, the spatial light modulator and the CCD camera.
2. The apparatus of claim 1, wherein the control device is configured to control the shape and quality of the laser beam:
the first lens and the second lens form a first 4f system, the focal length f1 of the first lens is far greater than the focal length f2 of the second lens, the first lens is located at a focal length f1 which is one time of the focal length behind the spatial light modulator, the second lens is located behind the first lens, and the optical path between the second lens and the first lens is the sum of the focal lengths of the first lens and the second lens;
the first lens and the third lens form a second 4f system, the focal lengths of the first lens and the third lens are equal, the third lens is positioned behind the first lens, the optical distance between the third lens and the first lens is the sum of the focal lengths of the third lens and the first lens, and the CCD camera is positioned at a focal length which is one time behind the third lens.
3. The apparatus of claim 2, wherein the control device is further configured to:
the focal lengths of the first lens and the third lens are both 1000mm, and the focal length of the second lens is 30 mm.
4. The apparatus of claim 1, wherein the control device is configured to control the shape and quality of the laser beam:
the beam splitter is located behind the first lens, and the optical path between the beam splitter and the first lens is f 1-3 f 1.
5. The apparatus of claim 1, wherein the control device is configured to control the shape and quality of the laser beam:
the spatial light modulator is a liquid crystal spatial light modulator.
6. A method for controlling the form and quality of a laser beam, which is performed by the apparatus for controlling the form and quality of a laser beam according to claim 1, comprising the steps of:
s1, generating a gray scale image by using control software of the spatial light modulator or Matlab software, and adding a geometric mask into the gray scale image by using mapping software to form a mixed hologram;
s2, loading the mixed hologram obtained in the step S1 on a spatial light modulator, and adjusting the angle alpha of a polarizer1And the included angle alpha between the analyzer and the polarizer2；
S3, enabling Gaussian light emitted by the laser source to enter the polarizer to adjust the polarization angle after being expanded, and then enabling the light to be incident on the spatial light modulator at an incident angle smaller than 10 degrees and enabling the light to be reflected;
s4, after the reflected light passes through the analyzer, splitting the beam by using a beam splitter;
and S5, transmitting the image on the spatial light modulator to a processing table by using the first 4f system after being transmitted by the beam splitter, and transmitting the shaped light beam to the CCD camera for observation by using the beam splitter to transmit the reflected light with the energy of 1% to the second 4f system.
7. The method of claim 6, wherein the method further comprises:
in step S1, the gray scales of the geometric mask area and the non-mask area in the mixed hologram are both 0-255.
8. The method of claim 6, wherein the method further comprises:
in step S1, the grayscale value of the geometric mask region in the hybrid hologram is 0, and the grayscale value of the remaining grayscale images is 255.
9. The method of claim 6, wherein the method further comprises:
in step S1, the gray-scale values of the geometric mask regions in the hybrid hologram follow an inverse gaussian intensity distribution.
10. The method of claim 6, wherein the method further comprises:
in step S2, the polarizer angle α 1 is 0 °, and the included angle α between the analyzer and the polarizer20 ° or 90 °;
in step S5, the first 4f system is composed of a first lens and a second lens, the focal length of the first lens is 1000mm, and the focal length of the second lens is 30 mm;
the second 4f system is composed of a first lens and a third lens, and the focal lengths of the third lens and the first lens are equal.
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| CN202010687298.3A CN111929911A (en) | 2020-07-16 | 2020-07-16 | Control device and method for laser beam form and quality |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112817157A (en) * | 2020-12-28 | 2021-05-18 | 西南技术物理研究所 | Novel flat-top light beam generating device |
| CN113741042A (en) * | 2021-08-17 | 2021-12-03 | 东南大学 | Automatic shaping device for laser beam |
| CN114393311A (en) * | 2021-12-30 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | Pattern colored drawing processing device and processing method |
| TWI814431B (en) * | 2022-01-10 | 2023-09-01 | 大陸商武漢華工激光工程有限責任公司 | Method and system for automatic detection and compensation of gray scale value in real time |
-
2020
- 2020-07-16 CN CN202010687298.3A patent/CN111929911A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112817157A (en) * | 2020-12-28 | 2021-05-18 | 西南技术物理研究所 | Novel flat-top light beam generating device |
| CN113741042A (en) * | 2021-08-17 | 2021-12-03 | 东南大学 | Automatic shaping device for laser beam |
| CN114393311A (en) * | 2021-12-30 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | Pattern colored drawing processing device and processing method |
| CN114393311B (en) * | 2021-12-30 | 2022-10-04 | 中国科学院长春光学精密机械与物理研究所 | Pattern colored drawing processing device and processing method |
| TWI814431B (en) * | 2022-01-10 | 2023-09-01 | 大陸商武漢華工激光工程有限責任公司 | Method and system for automatic detection and compensation of gray scale value in real time |
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