CN113714859A - Method for processing aspheric surface based on three-axis linkage small grinding head polishing machine type plane - Google Patents
Method for processing aspheric surface based on three-axis linkage small grinding head polishing machine type plane Download PDFInfo
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- CN113714859A CN113714859A CN202111019961.3A CN202111019961A CN113714859A CN 113714859 A CN113714859 A CN 113714859A CN 202111019961 A CN202111019961 A CN 202111019961A CN 113714859 A CN113714859 A CN 113714859A
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- 238000005498 polishing Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 230000009466 transformation Effects 0.000 claims abstract description 5
- 238000003672 processing method Methods 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 4
- 238000003754 machining Methods 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000003854 Surface Print Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/10—Geometric CAD
- G06F30/17—Mechanical parametric or variational design
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Pure & Applied Mathematics (AREA)
- Mathematical Optimization (AREA)
- Computer Hardware Design (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Mathematical Analysis (AREA)
- Computational Mathematics (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to the field of optical numerical control machining, in particular to a method for machining an aspheric surface on an optical plane of a small grinding head polishing machine, which solves the problem that the aspheric surface cannot be machined with high precision by a three-axis linkage small grinding head and improves the utilization rate of the small grinding head polishing machine. The invention mainly utilizes the small rise of the processed element, the polishing head can be attached to the surface of the element, and the coordinate transformation is utilized to accurately convert the position of the measuring high point to the removal position of the quasi-plane, thereby realizing the convergence processing. And after repeated iterative polishing, the processing of the aspheric element can be finally realized.
Description
Technical Field
The invention belongs to the field of optical numerical control machining, relates to a small grinding head polishing machine for machining an aspheric optical element, and is particularly suitable for machining the aspheric element by a three-axis linkage small grinding head polishing machine.
Background
The five-axis linkage small grinding head polisher can machine various plane, spherical and non-spherical elements, and the small grinding head is controlled by a computer to move on the polished surface at different speeds according to the measured surface shape, so that higher machining precision is obtained. The small grinding head polishing machine can meet the requirement of high low-frequency surface shape precision, has high processing capacity for medium and high frequencies, and is an optical processing machine tool with wide application. Because the rotating shaft of the grinding head is contacted with the surface along the normal line of the processed curved surface in the processing process, X, Y, Z, A, B five shafts are required to be matched with each other for processing. Some small grinding head machine tools are limited by manufacturing cost, a B axis can be omitted, such machine tools can only machine aspheric surfaces along a spiral path, and compared with a grating path, the spiral path has poor convergence effect on the central area of an element, and an ideal machining result cannot be obtained. Therefore, the small grinding head polishing machine lacking the B axis does not have the aspheric surface high-precision shaping capability.
Disclosure of Invention
The invention aims to provide a method for processing an aspheric surface based on an optical plane of a three-axis linkage small grinding head polishing machine, which can realize high-precision polishing of the aspheric surface by using X, Y two-axis linkage, is beneficial to the processing precision and the processing efficiency of the original machine tool and increases the application range of the machine tool.
The technical solution of the invention is as follows:
a processing method of aspheric surface plane is characterized in that: the processing method comprises the following steps:
the method comprises the following steps: measuring the surface shape of the aspheric element by using an interferometer;
step two: p obtained by measurementi(xi，yi，zi) Carrying out coordinate transformation according to the following formula to obtain a new coordinate P'i(x’i，y’i，zi)：
In the formula, R is the radius of the element, D is the caliber of the element, and f is the focal length;
step three: importing the new surface shape data obtained in the step two into small grinding head polishing machine software, inputting the type of a processing element as a plane, and generating a processing code, wherein the path is a grating path;
step four: processing the aspheric element by using the processing code;
step five: and measuring the surface shape of the aspheric element by using an interferometer, finishing processing if the surface shape data meets the standard, repeating the step two to the step four if the surface shape data does not meet the standard, and repeating iteration for multiple times until the surface shape meets the requirement.
The method is suitable for the fine surface shape correction stage after the polishing of the element, and the result of the measurement of the interferometer is utilized.
The method is suitable for aspheric elements with a total sagittal height a not greater than 5mm, including convex and concave aspheric surfaces.
Compared with the prior art, the invention has the beneficial effects that: in the prior art, the three-axis linkage (X, Y, Z axis) and four-axis linkage (X, Y, Z, A axis) small grinding head polishing machine cannot process the aspherical mirror by utilizing a grating path, and the spiral path has poor convergence effect and is rarely used in the processing process of the aspherical mirror. The invention has been applied to the processing of aspherical mirrors, has good convergence,
drawings
Fig. 1 is a schematic structural diagram of a preferred embodiment of the small grinding head polishing machine for processing aspheric surface elements according to the present invention, wherein 1 is an aspheric surface element to be processed, and 2 is a polishing head of the small grinding head polishing machine;
FIG. 2 is a schematic diagram of coordinate transformation;
FIG. 3 is a graph of aspherical mirror surface processed by the method of the present invention, with PV value better than 1/4 λ and RMS value better than 1/30 λ.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and systematically explained in conjunction with the accompanying drawings in the embodiment of the present invention. Obviously, the embodiments described herein are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without any creative work are within the protection scope of the present invention.
The implementation process of the method is described by taking a parabolic mirror with a radius R of 700mm, a caliber D of 150mm and a focal length f of 350mm as an example.
A processing method of aspheric surface plane is characterized in that: the processing method comprises the following steps:
the method comprises the following steps: a measuring light path is set up, the surface shape of the aspheric element is measured by an interferometer, and surface shape data are stored;
step two: p obtained by measurementi(xi，yi，zi) Carrying out coordinate transformation according to the following formula to obtain a new coordinate P'i(x’i，y’i，zi)：
Wherein R is the radius of the element, D is the aperture of the element, and f is the focal length. The height Z value of the point A is biased to the point B, new surface shape data are generated by using the newly generated X, Y value and the Z value in the original data, the point (30, 0) can be calculated to be shifted to the point (30.29, 0), and the point (0, 50) can be shifted to the point (0, 50.32);
step three: importing the new surface shape data obtained in the step two into small grinding head polishing machine software (purchased from national defense science and technology university), selecting the type of a processing element as a plane and the path as a grating path, calculating the residence time, and generating a processing code;
step four: guiding the generated machining code into a small grinding head polishing machine, fixing an element on a machine tool platform, performing surface printing to determine that the center of the element is superposed with the center of the machine tool, wherein the deviation between the center of the element and a rotating shaft of the machine tool is not more than 0.02mm, dripping polishing liquid to tightly attach the polishing head to the surface of the element, starting machining, keeping the rotating shaft of the small grinding head vertical during machining, and keeping the dripping of the polishing liquid on the surface of the element uniform until the machining is finished;
step five: and after the processing is finished, measuring the surface shape of the aspheric element by using the established detection optical path, finishing the processing if the surface shape data reaches the standard, repeating the steps from two to four if the surface shape data does not reach the standard, and repeating iteration for multiple times until the surface shape meets the requirement.
FIG. 3 is a diagram of an aspherical mirror surface processed using the method of the present invention to provide an RMS of 1/30 λ advantage.
Claims (3)
1. An optical aspheric surface plane processing method is characterized in that: the processing method comprises the following steps:
the method comprises the following steps: setting radius R, caliber D and focal length f of the aspheric element, measuring surface shape P of the aspheric elementi(xi，yi，zi)；
Step two: the measured profile Pi(xi，yi，zi) Carrying out coordinate transformation according to the following formula to obtain a new surface shape coordinate P'i(x’i，y’i，zi)：
Step three: importing the new surface shape data obtained in the step two into small grinding head polishing machine software, inputting the type of a processing element as a plane, and generating a processing code, wherein the path is a grating path;
step four: processing the aspheric element by using the processing code;
step five: and measuring the surface shape of the aspheric element by using an interferometer, finishing processing if the surface shape data meets the standard, repeating the step two to the step four if the surface shape data does not meet the standard, and repeating iteration for multiple times until the surface shape meets the requirement.
2. An optical aspheric surface plane-like processing method as claimed in claim 1, characterized in that: the method is suitable for the fine surface shape correction stage after the polishing of the element, and the result of the measurement of the interferometer is utilized.
3. An optical aspheric surface plane-like processing method as claimed in claim 1, characterized in that: the method is suitable for aspheric elements with a total sagittal height a not greater than 5mm, including convex and concave aspheric surfaces.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111019961.3A CN113714859B (en) | 2021-09-01 | 2021-09-01 | Method for processing aspheric surface based on three-axis linkage small grinding head polishing machine class plane |
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| CN202111019961.3A CN113714859B (en) | 2021-09-01 | 2021-09-01 | Method for processing aspheric surface based on three-axis linkage small grinding head polishing machine class plane |
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| JP2002116019A (en) * | 2000-10-04 | 2002-04-19 | Olympus Optical Co Ltd | Probe-type shape measuring apparatus |
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| CN106826402A (en) * | 2016-07-25 | 2017-06-13 | 中国科学院长春光学精密机械与物理研究所 | A kind of magnetorheological polishing wheel carries out alignment processing method to aspherical optical element |
| CN108284369A (en) * | 2018-03-27 | 2018-07-17 | 广东工业大学 | A kind of polishing of Aspheric Ultra-precision Turning and form error compensation method |
| CN111189386A (en) * | 2020-01-13 | 2020-05-22 | 中国科学院上海光学精密机械研究所 | Correction method for surface shape projection distortion of off-axis parabolic reflector interferometry |
-
2021
- 2021-09-01 CN CN202111019961.3A patent/CN113714859B/en active Active
Patent Citations (11)
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| JP2002116019A (en) * | 2000-10-04 | 2002-04-19 | Olympus Optical Co Ltd | Probe-type shape measuring apparatus |
| CN1420339A (en) * | 2001-11-20 | 2003-05-28 | 奥林巴斯光学工业株式会社 | Non-spheric eccentricity measuring method and device |
| CN101088705A (en) * | 2007-02-14 | 2007-12-19 | 长春设备工艺研究所 | Efficient numerically controlled polishing process and apparatus for great aperture aspherical optical elements |
| CN102501162A (en) * | 2011-11-08 | 2012-06-20 | 苏州大学 | Machining method for aspheric surface of semiconductor |
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