CN112775724B - Large-caliber optical mirror surface rapid polishing method based on multi-polishing system - Google Patents
Large-caliber optical mirror surface rapid polishing method based on multi-polishing system Download PDFInfo
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- 238000005498 polishing Methods 0.000 title claims abstract description 267
- 230000003287 optical effect Effects 0.000 title claims abstract description 164
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000000227 grinding Methods 0.000 claims abstract description 75
- 238000012545 processing Methods 0.000 claims abstract description 37
- 238000003801 milling Methods 0.000 claims abstract description 7
- 238000004458 analytical method Methods 0.000 claims description 20
- 238000004364 calculation method Methods 0.000 claims description 20
- 238000004088 simulation Methods 0.000 claims description 20
- 238000012360 testing method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 239000004429 Calibre Substances 0.000 abstract 1
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
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- 239000002184 metal Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
Abstract
The invention provides a large-caliber optical mirror surface rapid polishing method based on a multi-polishing system, belonging to the field of optical element processing. The problem of current heavy-calibre optical mirror surface processing cycle length, influence production efficiency is solved. The device comprises a plurality of polishing systems, wherein after mirror surface milling and forming processing and optical mirror positioning and fixing are carried out, surface shape rough grinding, surface shape fine grinding, surface shape grinding and polishing are carried out for a plurality of times of iterative processing through the plurality of polishing systems until surface shape processing is finished. It is mainly used for fast polishing of large-caliber optical mirror surfaces.
Description
Technical Field
The invention belongs to the field of optical element processing, and particularly relates to a large-caliber optical mirror surface rapid polishing method based on a multi-polishing system.
Background
In the design of modern optical imaging systems, aspheric reflective optical systems are widely adopted, and the system has the obvious advantages of simple structure and strong imaging resolution. In the design, production and integrated debugging process of the traditional optical system, the processing of the optical element is the link with the longest relative period, in particular to a medium-large aperture optical mirror with the aperture of more than 500 mm.
In the processing stage of the optical element, the main process section comprises the main links of milling and grinding molding, mirror grinding and polishing, mirror finishing and the like of a mirror surface. The mirror grinding and the surface shape state of the optical element in the polishing ring section in the processing process, such as surface shape error, waviness, roughness and the like, are directly related to whether the imaging quality of the optical system can meet the design requirement. After the mirror surface is milled and ground into a basic shape required by design by adopting a numerical control machine tool quickly according to the process flow, the surface of the mirror needs to be precisely polished so as to meet the requirements of high precision of surface shape error less than 10nmRMS and low roughness of Ra3 nm. Because the removal amount is only dozens of micrometers, repeated iteration fine grinding and polishing are needed, and finally, the requirements of various indexes are met. Therefore, precise trace removal is needed, and a large removal amount cannot be ground and polished, so that excessive removal is avoided; meanwhile, the mirror surface needs to be polished slowly and repeatedly, so that the mirror surface roughness is reduced. Therefore, the optical processing consumes a long time, and particularly in the processing of meter-level large-caliber, the production efficiency of the optical system is limited by the long processing period, and the requirement of the rapidly-developed optical manufacturing industry is difficult to meet.
Disclosure of Invention
The invention provides a large-caliber optical mirror surface rapid polishing method based on a multi-polishing system, aiming at solving the problems in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme: a large-caliber optical mirror surface rapid polishing method based on a multi-polishing system is provided, wherein the large-caliber optical mirror surface is a rotationally symmetric circular optical mirror, and the method comprises the following steps:
step 1: carrying out mirror surface milling and forming treatment on the circular optical lens to ensure that the PV value of the mirror surface of the circular optical lens is less than 60 microns;
step 2: positioning and fixing the circular optical lens on a supporting rotary table, so that the circular optical lens, the supporting rotary table and a plurality of grinding and polishing systems are unified in coordinate;
and step 3: roughly grinding the surface shape of the round optical mirror surface, enabling the supporting rotary table to rotate at a constant speed, enabling the plurality of grinding and polishing systems to move linearly along the radius direction of the round optical mirror, enabling the grinding and polishing heads to rotate at an angle along the normal direction of the mirror surface, enabling the grinding and polishing heads to roughly grind the round optical mirror surface according to set speed and pressure intensity, controlling the plurality of grinding and polishing systems to integrally operate according to track planning and residence time simulation analysis calculation of the plurality of grinding and polishing systems based on the mirror surface state, and finishing rough grinding of the round optical mirror surface, wherein the PV value is smaller than 10 microns;
and 4, step 4: the method comprises the steps of finely grinding the surface shape of a circular optical mirror surface, enabling a supporting rotary table to rotate at a constant speed, enabling a plurality of grinding and polishing systems to move linearly along the radius direction of the circular optical mirror, enabling a grinding and polishing head to rotate at an angle along the normal direction of the mirror surface, enabling the grinding and polishing head to finely grind the circular optical mirror surface according to set speed and pressure, controlling the plurality of grinding and polishing systems to integrally operate according to track planning and residence time simulation analysis calculation of the plurality of grinding and polishing systems based on the mirror surface state, and finishing the fine grinding of the circular optical mirror surface, wherein the PV value is smaller than 5 micrometers;
and 5: grinding and repairing the surface shape of the round optical lens surface, stopping the rotation of the supporting rotary table, and controlling a grinding and polishing system to grind and repair the fixed point of the round optical lens surface locally according to the test result through simulation analysis calculation, wherein the PV value is less than 1 micron;
step 6: polishing the surface shape of the round optical mirror surface, enabling the supporting rotary table to rotate at a constant speed, enabling the plurality of polishing systems to move linearly along the radius direction of the round optical mirror, enabling the polishing head to rotate at an angle along the normal direction of the mirror surface, enabling the polishing head to polish the round optical mirror surface according to set speed and pressure, controlling the plurality of polishing systems to operate integrally according to the track planning and the residence time simulation analysis calculation of the plurality of polishing systems, and finishing the polishing of the round optical mirror surface;
and 7: and (3) analyzing the test result, repeating the step (5) and the step (6), and performing iterative processing for multiple times according to the processing process flow to enable the RMS value of the mirror surface to be less than 10nm and the roughness to be less than Ra3nm, thereby finishing the surface shape processing of the mirror surface of the circular optical mirror.
Furthermore, the number of the polishing systems is multiple, and the polishing systems are uniformly arranged along the circumferential direction of the circular optical lens.
Furthermore, the number of the polishing systems is two, the two polishing systems are respectively a first polishing system and a second polishing system, the first polishing system is connected with the first polishing head, the second polishing system is connected with the second polishing head, and the first polishing system and the second polishing system are symmetrically arranged along the center of the circle of the circular optical lens.
Furthermore, the number of the polishing systems is three, the three polishing systems are respectively a first polishing system, a second polishing system and a third polishing system, the first polishing system is connected with the first polishing head, the second polishing system is connected with the second polishing head, the third polishing system is connected with the third polishing head, and the first polishing system, the second polishing system and the third polishing system are uniformly arranged along the circumferential direction of the circular optical lens.
Furthermore, the grinding and polishing system is connected with the electric cabinet, the circular optical lens is connected with the supporting rotary table through the positioning blocks, and the positioning blocks are uniformly arranged along the circumferential direction of the circular optical lens.
A large-caliber optical mirror surface rapid polishing method based on a multi-polishing system is disclosed, wherein the large-caliber optical mirror surface is an asymmetric special-shaped optical mirror, and the method comprises the following steps:
step 1: carrying out mirror surface milling and forming treatment on the special-shaped optical lens to ensure that the PV value of the mirror surface of the special-shaped optical lens is less than 60 microns;
step 2: positioning and fixing the special-shaped optical lens on a supporting platform to enable the special-shaped optical lens to be unified with the supporting platform and a plurality of grinding and polishing systems;
and step 3: roughly grinding the surface shape of the special-shaped optical mirror surface, controlling the whole operation of a plurality of grinding and polishing systems according to the shape, the size and the surface shape characteristics of a special-shaped optical mirror blank and the track planning and the residence time simulation analysis calculation of the plurality of grinding and polishing systems to finish the rough grinding of the special-shaped optical mirror surface, wherein the PV value is less than 10 microns;
and 4, step 4: finely grinding the mirror surface shape of the special-shaped optical mirror, controlling the whole operation of a plurality of grinding and polishing systems according to the shape, the size and the surface shape characteristics of a special-shaped optical mirror blank and the track planning and the residence time simulation analysis calculation of the plurality of grinding and polishing systems to finish the finely grinding of the mirror surface of the special-shaped optical mirror, wherein the PV value is less than 5 microns;
and 5: grinding and repairing the surface shape of the special-shaped optical lens surface, and controlling a grinding and polishing system to grind and repair the fixed point of the lens surface locally according to the test result through simulation analysis calculation, wherein the PV value is less than 1 micron;
step 6: polishing the mirror surface shape of the special-shaped optical mirror, and controlling the whole operation of the polishing system according to the track planning mode and the residence time simulation analysis calculation of the plurality of polishing systems in the step 3 to finish the mirror surface polishing of the special-shaped optical mirror;
and 7: and (3) analyzing the test result, repeating the step (5) and the step (6), and performing iterative processing for multiple times according to the processing process flow to enable the RMS value of the mirror surface to be less than 10nm and the roughness to be less than Ra3nm, thereby finishing the surface shape processing of the mirror surface of the special-shaped optical mirror.
Furthermore, the number of the polishing systems is two, the two polishing systems are respectively a first polishing system and a second polishing system, the first polishing system and the second polishing system are respectively connected with the first polishing head and the second polishing head, and the trajectory planning of the plurality of polishing systems in the step 3 is grating-type trajectory planning or regional-type trajectory planning.
Further, the grating type track is defined as: the first polishing system and the second polishing system are respectively arranged at two sides of the special-shaped optical lens, the first polishing system drives the first polishing head to move along the length direction of the special-shaped optical lens, and the second polishing system drives the second polishing head to move along the length direction of the special-shaped optical lens.
Furthermore, the partitioned trajectory is: the first polishing system and the second polishing system are respectively arranged on two sides of the special-shaped optical lens, the special-shaped optical lens is divided into two areas, the first polishing system drives the first polishing head to move along the length direction of the first area, and the second polishing system drives the second polishing head to move along the length direction of the second area.
Furthermore, the partitioned trajectory is: the first polishing system and the second polishing system are respectively arranged on two sides of the special-shaped optical lens, the special-shaped optical lens is divided into two areas, the first polishing system drives the first polishing head to move along the width direction of the first area, and the second polishing system drives the second polishing head to move along the width direction of the second area.
Compared with the prior art, the invention has the beneficial effects that: the invention solves the problems that the processing cycle of the existing large-caliber optical mirror surface is long and the production efficiency is influenced. The invention is based on the structure and technical index characteristics of the optical element, combines the modern numerical control technology, adopts an intelligent manufacturing process mode, realizes the simultaneous work of a plurality of groups of polishing systems based on the skillful combination mode of a plurality of polishing systems in the rough and fine polishing link of long time consumption of optical processing, realizes high-efficiency processing, solves the problem of long production and manufacturing period of the large-caliber optical element, reduces the cost, and meets the fast-growing mass production requirement of the high-precision and large-caliber optical processing market. The invention provides an efficient and rapid processing method for the large-aperture optical lens. The intelligent degree of production is improved, the working strength and the production cost are reduced, and the batch large-caliber and high-precision optical processing becomes possible.
Drawings
FIG. 1 is a diagram illustrating a method for rapidly polishing a large-diameter circular optical mirror surface of two polishing systems according to the present invention;
FIG. 2 is a schematic diagram of a method for rapidly polishing a large-diameter circular optical mirror surface of a three-polishing system according to the present invention;
FIG. 3 is a diagram illustrating a method for rapidly polishing a special-shaped optical mirror surface with a grating-type track planning according to the present invention;
FIG. 4 is a first method for rapidly polishing a special-shaped optical mirror surface with a partitioned track plan according to the present invention;
FIG. 5 is a second method for rapidly polishing a special-shaped optical mirror according to the second sectional type track planning of the present invention.
1-a circular optical lens, 2-a supporting turntable, 3-a positioning block, 4-a first polishing system, 5-a second polishing system, 6-a first polishing head, 7-a second polishing head, 8-an electric cabinet, 9-a third polishing system, 10-a third polishing head, 11-a special-shaped optical lens and 12-a supporting platform.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely explained below with reference to the drawings in the embodiments of the present invention.
In order to realize rapid high-precision large-caliber optical processing, the traditional processing of a single polishing system is changed in a polishing link consuming long time, a plurality of polishing systems are combined, and the simultaneous and orderly work of the plurality of polishing systems is realized through a numerical control system and an intelligent synchronous control mode, so that the problem of low polishing efficiency is solved, the production efficiency is greatly improved, and the cost is reduced.
Based on the high, medium and low frequency band states of the mirror surface shape, polishing tools with different sizes and different characteristics can be adopted. Such as a metal grinding disc, an air bag head, magnetorheological, an asphalt disc and the like, so as to realize the damage removal, the shape modification and the polishing of the mirror surface and achieve the high precision and the low roughness of the final mirror surface shape. A plurality of grinding and polishing systems are combined into an efficient processing platform based on a high-stability numerical control machine tool or an intelligent mechanical arm, the running tracks of the grinding and polishing systems and the matching among the grinding and polishing systems are controlled in real time, and the large-caliber high-precision optical processing is realized by combining a numerical control optical processing technology and a process. And designing an optimal combination mode according to the characteristics of the aperture and the surface shape of the mirror blank.
Referring to fig. 1-2, the present embodiment will be described, in which the large-aperture optical mirror surface of the present embodiment is a rotationally symmetric circular optical mirror 1, and the mirror surface is in various aspheric forms, which includes the following steps:
step 1: carrying out mirror surface milling and forming treatment on the circular optical lens 1 to ensure that the PV value of the mirror surface of the circular optical lens 1 is less than 60 microns, wherein the PV value is one of indexes for evaluating the surface shape of the mirror surface;
step 2: positioning and fixing the circular optical lens 1 on the supporting rotary table 2, so that the circular optical lens 1, the supporting rotary table 2 and a plurality of grinding and polishing systems have the same coordinate;
and step 3: roughly grinding the surface shape of the mirror surface of the circular optical mirror 1, wherein the main purpose is to remove damage, the supporting rotary table 2 rotates at a constant speed, the plurality of grinding and polishing systems all move linearly along the radius direction of the circular optical mirror 1, the grinding and polishing head rotates along the normal direction of the mirror surface or rotates at an angle, so that the grinding and polishing head roughly grinds the mirror surface of the circular optical mirror 1 at a set speed and pressure, based on the state of the mirror surface, the whole operation of the plurality of grinding and polishing systems is controlled according to the track planning and the residence time simulation analysis calculation of the plurality of grinding and polishing systems, the rough grinding of the mirror surface of the circular optical mirror 1 is completed, and the PV value is less than 10 microns;
and 4, step 4: the mirror surface shape of the circular optical mirror 1 is finely ground, the supporting rotary table 2 rotates at a constant speed, the plurality of polishing systems all move linearly along the radius direction of the circular optical mirror 1, the polishing head rotates along the normal direction of the mirror surface or rotates at an angle, the polishing head is enabled to finely grind the mirror surface of the circular optical mirror 1 according to the set speed and pressure, based on the mirror surface state, the whole operation of the plurality of polishing systems is controlled according to the track planning and the residence time simulation analysis calculation of the plurality of polishing systems, the mirror surface fine grinding of the circular optical mirror 1 is completed, and the PV value is less than 5 microns;
and 5: grinding and repairing the surface shape of the mirror surface of the circular optical lens 1, stopping the rotation of the supporting rotary table 2, and controlling a grinding and polishing system to grind and repair the fixed point of the mirror surface locally according to the test result through simulation analysis calculation, wherein the PV value is less than 1 micron;
step 6: polishing the surface shape of the mirror surface of the circular optical mirror 1, enabling the supporting rotary table 2 to rotate at a constant speed, enabling the plurality of polishing systems to linearly move along the radius direction of the circular optical mirror 1, enabling the polishing head to rotate at an angle along the normal direction of the mirror surface, enabling the polishing head to polish the mirror surface of the circular optical mirror 1 at a set speed and pressure, controlling the plurality of polishing systems to integrally operate according to the track planning and the residence time simulation analysis calculation of the plurality of polishing systems, and finishing the mirror surface polishing of the circular optical mirror 1;
and 7: and (3) analyzing the test result, repeating the step (5) and the step (6), and performing iterative processing for multiple times according to the processing process flow to enable the RMS value of the mirror surface to be less than 10nm and the roughness to be less than Ra3nm, thereby finishing the surface shape processing of the mirror surface of the circular optical mirror 1.
In this embodiment, the number of the polishing systems is plural, and the plurality of polishing systems are uniformly arranged along the circumferential direction of the circular optical lens 1.
As shown in fig. 1, the number of the polishing systems is two, the two polishing systems are respectively a first polishing system 4 and a second polishing system 5, the first polishing system 4 is connected with a first polishing head 6, the second polishing system 5 is connected with a second polishing head 7, and the first polishing system 4 and the second polishing system 5 are symmetrically arranged along the center of the circle of the circular optical lens 1.
As shown in fig. 2, the number of the polishing systems is three, the three polishing systems are respectively a first polishing system 4, a second polishing system 5 and a third polishing system 9, the first polishing system 4 is connected with a first polishing head 6, the second polishing system 5 is connected with a second polishing head 7, the third polishing system 9 is connected with a third polishing head 10, and the first polishing system 4, the second polishing system 5 and the third polishing system 9 are uniformly arranged along the circumferential direction of the circular optical lens 1.
In the embodiment, the grinding and polishing system is connected with an electric cabinet 8, the circular optical lens 1 is connected with the supporting turntable 2 through the positioning block 3, and the positioning blocks 3 are uniformly arranged along the circumferential direction of the circular optical lens 1.
Referring to fig. 3-5, the present embodiment will be described, in which the large-aperture optical mirror surface of the present embodiment is an asymmetric special-shaped optical mirror 11, and the mirror surface has various aspheric surface forms, which includes the following steps:
step 1: carrying out mirror surface milling and forming treatment on the special-shaped optical lens 11 to ensure that the PV value of the mirror surface of the special-shaped optical lens 11 is less than 60 microns;
step 2: positioning and fixing the special-shaped optical lens 11 on the supporting platform 12, so that the special-shaped optical lens 11, the supporting platform 12 and the grinding and polishing systems are unified in coordinate, and the number of the grinding and polishing systems is multiple;
and step 3: roughly grinding the mirror surface shape of the special-shaped optical lens 11, wherein the main purpose is to remove tool marks, control the whole operation of a plurality of grinding and polishing systems according to the shape, the size and the surface shape characteristics of a mirror blank of the special-shaped optical lens 11, according to the track planning and the residence time simulation analysis calculation of the plurality of grinding and polishing systems, and finish the rough grinding of the mirror surface of the special-shaped optical lens 11, and the PV value is less than 10 microns;
and 4, step 4: finely grinding the mirror surface shape of the special-shaped optical mirror 11, controlling the whole operation of a plurality of polishing systems according to the shape, the size and the surface shape characteristics of a mirror blank of the special-shaped optical mirror 11 and the track planning and the residence time simulation analysis calculation of the plurality of polishing systems to finish the finely grinding of the mirror surface of the special-shaped optical mirror 11, wherein the PV value is less than 5 microns;
and 5: grinding and repairing the surface shape of the mirror surface of the special-shaped optical lens 11, and controlling a grinding and polishing system to grind and repair the fixed-point local part of the mirror surface according to the test result through simulation analysis calculation, wherein the PV value is less than 1 micron;
step 6: polishing the mirror surface shape of the special-shaped optical mirror 11, and controlling the whole operation of the polishing system according to the track planning mode and the residence time simulation analysis calculation of the plurality of polishing systems in the step 3 to finish the mirror surface polishing of the special-shaped optical mirror 11;
and 7: and (3) analyzing the test result, repeating the step 5 and the step 6, and performing iterative processing for multiple times according to the processing process flow to enable the RMS value of the mirror surface to be less than 10nm and the roughness to be less than Ra3nm, thereby finishing the surface shape processing of the mirror surface of the special-shaped optical mirror 11.
In the embodiment, the number of the polishing systems is two, the two polishing systems are respectively a first polishing system 4 and a second polishing system 5, the first polishing system 4 and the second polishing system 5 are respectively connected with a first polishing head 6 and a second polishing head 7, and the trajectory planning of the plurality of polishing systems in step 3 is grating-type trajectory planning or regional-type trajectory planning.
As shown in fig. 3, the grating-type track is planned as: the first polishing system 4 and the second polishing system 5 are respectively arranged at two sides of the special-shaped optical mirror 11, the first polishing system 4 drives the first polishing head 6 to move along the length direction of the special-shaped optical mirror 11, and the second polishing system 5 drives the second polishing head 7 to move along the length direction of the special-shaped optical mirror 11.
As shown in fig. 4, the first zoned trajectory is: the first polishing system 4 and the second polishing system 5 are respectively arranged at two sides of the special-shaped optical mirror 11, the special-shaped optical mirror 11 is divided into two areas, the first polishing system 4 drives the first polishing head 6 to move along the length direction of the first area, and the second polishing system 5 drives the second polishing head 7 to move along the length direction of the second area.
As shown in fig. 5, the second zoned trajectory is: the first polishing system 4 and the second polishing system 5 are respectively arranged at two sides of the special-shaped optical mirror 11, the special-shaped optical mirror 11 is divided into two areas, the first polishing system 4 drives the first polishing head 6 to move along the width direction of the first area, and the second polishing system 5 drives the second polishing head 7 to move along the width direction of the second area.
The method for rapidly polishing a large-caliber optical mirror surface based on a multi-polishing system provided by the invention is described in detail, a specific example is applied in the method for explaining the principle and the implementation mode of the invention, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (5)
1. A large-caliber optical mirror surface rapid polishing method based on a multi-polishing system is characterized in that the large-caliber optical mirror surface is a rotationally symmetric circular optical mirror (1): it comprises the following steps:
step 1: carrying out mirror surface milling and forming treatment on the circular optical lens (1) to ensure that the PV value of the mirror surface of the circular optical lens (1) is less than 60 microns;
step 2: positioning and fixing the circular optical lens (1) on the supporting rotary table (2) to ensure that the circular optical lens (1), the supporting rotary table (2) and the grinding and polishing systems have the same coordinate, wherein the grinding and polishing systems are multiple in number;
and step 3: roughly grinding the surface shape of the mirror surface of the circular optical mirror (1), enabling the supporting rotary table (2) to rotate at a constant speed, enabling the plurality of grinding and polishing systems to linearly move along the radius direction of the circular optical mirror (1), enabling the grinding and polishing head to rotate at an angle along the normal direction of the mirror surface, enabling the grinding and polishing head to roughly grind the mirror surface of the circular optical mirror (1) according to set speed and pressure, controlling the plurality of grinding and polishing systems to integrally operate according to track planning and residence time simulation analysis calculation of the plurality of grinding and polishing systems based on the state of the mirror surface, finishing rough grinding of the mirror surface of the circular optical mirror (1), and enabling the PV value to be smaller than 10 microns;
and 4, step 4: the mirror surface shape of the circular optical mirror (1) is lapped, the supporting rotary table (2) rotates at a constant speed, the plurality of polishing systems all move linearly along the radius direction of the circular optical mirror (1), the polishing heads rotate along the normal direction of the mirror surface or at an angle, the polishing heads are enabled to lap the mirror surface of the circular optical mirror (1) according to set speed and pressure, based on the mirror surface state, the whole operation of the plurality of polishing systems is controlled according to the track planning and the residence time simulation analysis calculation of the plurality of polishing systems, the mirror surface lapping of the circular optical mirror (1) is completed, and the PV value is smaller than 5 microns;
and 5: grinding and repairing the surface shape of the mirror surface of the circular optical mirror (1), stopping the rotation of the supporting rotary table (2), and controlling a grinding and polishing system to grind and repair the fixed point of the mirror surface locally according to the test result through simulation analysis calculation, wherein the PV value is less than 1 micron;
step 6: polishing the surface shape of the mirror surface of the circular optical mirror (1), enabling the supporting rotary table (2) to rotate at a constant speed, enabling the plurality of polishing systems to linearly move along the radius direction of the circular optical mirror (1), enabling the polishing head to rotate at an angle along the normal direction of the mirror surface, enabling the polishing head to polish the mirror surface of the circular optical mirror (1) according to set speed and pressure, planning according to the track of the plurality of polishing systems and performing simulation analysis and calculation according to residence time, controlling the plurality of polishing systems to integrally operate, and finishing mirror surface polishing of the circular optical mirror (1);
and 7: and (3) analyzing the test result, repeating the step (5) and the step (6), and performing iterative processing for multiple times according to the processing process flow to enable the RMS value of the mirror surface to be less than 10nm and the roughness to be less than Ra and less than 3nm, thereby finishing the surface shape processing of the mirror surface of the circular optical mirror (1).
2. The method according to claim 1, wherein the method comprises: the number of the grinding and polishing systems is multiple, and the grinding and polishing systems are uniformly arranged along the circumferential direction of the circular optical lens (1).
3. The method according to claim 1, wherein the method comprises: the number of the polishing systems is two, the two polishing systems are respectively a first polishing system (4) and a second polishing system (5), the first polishing system (4) is connected with a first polishing head (6), the second polishing system (5) is connected with a second polishing head (7), and the first polishing system (4) and the second polishing system (5) are symmetrically arranged along the circle center of the circular optical mirror (1).
4. The method according to claim 1, wherein the method comprises: the number of the polishing systems is three, the three polishing systems are respectively a first polishing system (4), a second polishing system (5) and a third polishing system (9), the first polishing system (4) is connected with a first polishing head (6), the second polishing system (5) is connected with a second polishing head (7), the third polishing system (9) is connected with a third polishing head (10), and the first polishing system (4), the second polishing system (5) and the third polishing system (9) are uniformly arranged along the circumferential direction of the circular optical mirror (1).
5. The method for rapidly polishing the large-aperture optical mirror surface based on the multi-polishing system as claimed in any one of claims 1 to 4, wherein: the polishing system is connected with an electric cabinet (8), the circular optical lens (1) is connected with the supporting rotary table (2) through a positioning block (3), and the positioning blocks (3) are uniformly arranged along the circumferential direction of the circular optical lens (1).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011636851.7A CN112775724B (en) | 2020-12-31 | 2020-12-31 | Large-caliber optical mirror surface rapid polishing method based on multi-polishing system |
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