CN108466107A - A kind of processing unit (plant) and processing method using off-axis three anti-imaging systems - Google Patents
A kind of processing unit (plant) and processing method using off-axis three anti-imaging systems Download PDFInfo
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- CN108466107A CN108466107A CN201710098413.1A CN201710098413A CN108466107A CN 108466107 A CN108466107 A CN 108466107A CN 201710098413 A CN201710098413 A CN 201710098413A CN 108466107 A CN108466107 A CN 108466107A
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- 238000012545 processing Methods 0.000 title claims abstract description 53
- 238000003384 imaging method Methods 0.000 title claims abstract description 23
- 238000003672 processing method Methods 0.000 title claims abstract description 12
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 31
- 239000010432 diamond Substances 0.000 claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 238000013461 design Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 12
- 238000005457 optimization Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/2414—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for indicating desired positions guiding the positioning of tools or workpieces
- B23Q17/2423—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for indicating desired positions guiding the positioning of tools or workpieces by projecting crossing light beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B25/00—Accessories or auxiliary equipment for turning-machines
- B23B25/06—Measuring, gauging, or adjusting equipment on turning-machines for setting-on, feeding, controlling, or monitoring the cutting tools or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2717/00—Arrangements for indicating or measuring
- B23Q2717/003—Arrangements for indicating or measuring in lathes
Abstract
The present invention provides a kind of processing unit (plant)s and processing method using off-axis three anti-imaging systems,Including main shaft,Speculum group,Knife rest and diamond cutter,The main shaft is installed on the super precision lathe,The speculum group distribution is on the same circumference and the circumference is installed on main shaft,The speculum group includes the first speculum,Second speculum and third speculum,The knife rest is set to main shaft offside,The diamond cutter is installed on knife rest,Diamond cutter is connect with kinetic control system,The configuration of the present invention is simple,It is easy to use,The processing of off axis reflector system is realized using the mode of being integrally machined,Avoid alignment error,Ensure the imaging effect of off-axis three anti-systems well,The more complicated arbitrary free form surface of face type may be used in speculum,It can obtain more superior optical property,Speculum is distributed on the same circumference,It can effectively improve processing efficiency.
Description
Technical field
The present invention relates to Ultraprecision Machining field more particularly to a kind of processing dresses using off-axis three anti-imaging systems
It sets and processing method.
Background technology
Off axis reflector system is few with component, nothing is blocked, long-focus, big visual field, broadband, inhibition veiling glare ability is strong, adjusts
The features such as modulation trnasfer function is high is Space Optical System, astronomy and the indispensable optical device of high precision measuring system.From
Three anti-system of axis is that its most typical application can be to avoid central obscuration, moreover it is possible to reduce as the core component of space telescope
System bulk and weight, while improving the image quality of system.
More traditional coaxial reflecting system, off axis reflector system have preferable image quality and larger field.However, in legacy system
Mirror design degree of freedom is only limitted to the rotationally symmetrical shapes such as spherical surface is aspherical, and this kind of face shape is relatively more suitable for total light path system and sets
Meter, for off axis reflector system when need big visual field and small F numbers in application, image quality can be difficult to decline due to correction because of aberration.For
This, is needed the design freedom for being provided bigger using freeform optics surface, image quality is made to be improved.Freeform optics surface is
A kind of face shape is arbitrary, non-rotational symmetric optical surface, and being relatively more suitable for optical axis, there are the Off-axis systems that deviation changes.
The rotationally symmetrical shape curved surfaces such as general spherical surface/aspherical can by carrying out assistant resetting the characteristics of symmetrical optical axis, but
Freeform optics surface is without reference to face or reference axis, therefore, although excellent optical performance system is difficult to carry out adjustment.Currently,
Off-axis three anti-imaging system of common free form surface, general only there are one free-form surface mirror or two free form surface reflections
Mirror, other curved surfaces are still traditional surface of revolution, and purpose is exactly to reduce system resetting difficulty.It was assembled in free form surface off-axis system
Cheng Zhong is generally required in lens side or the specific assembly positioning surface of reverse side processing, is needed by interferometer or centering instrument pair
Eyeglass is adjusted one by one to just.The cost and processing cost of usual system assembly are suitable, and with eyeglass in reflecting system
Quantity increase, difficulty and the different degrees of increase of cost.
To reduce the resetting difficulty of free form surface off-axis system, the overall performance of system is improved, off-axis three anti-systems having
Design scheme is by a mirror(Primary mirror)With the design of three mirrors on same blank, forms the integrated processing of combined lens and avoid two mirrors
Assembly.But there are still certain alignment errors for this form, because, in order to ensure the assembly precision of two mirrors and combined lens,
General two mirror needs to select simple spherical surface or aspherical, and needs to process positioning surface respectively on two eyeglasses.Therefore,
How free form surface off-axis system assembly cost and difficulty are reduced to the maximum extent, become off axis reflector imaging and Ultra-precision Turning
The vital task in field, the deep application for being pushed further into free form surface off-axis system have realistic meaning.
Invention content
It is simple in structure the present invention provides a kind of processing unit (plant) using off-axis three anti-imaging systems, it is easy to use, it uses
The mode of being integrally machined realizes the processing of off axis reflector system, avoids alignment error, ensure well off-axis three anti-systems at
As effect, speculum may be used the more complicated arbitrary free form surface of face type, can obtain more superior optical property, reflect
Mirror is distributed on the same circumference, can effectively improve processing efficiency.
In order to solve the above technical problems, the embodiment of the present application provides a kind of processing dress using off-axis three anti-imaging systems
It sets, including main shaft, speculum group, knife rest and diamond cutter, the main shaft is installed on the super precision lathe, it is described
Speculum group distribution on the same circumference and the circumference is installed on main shaft, the speculum group include the first speculum,
Second speculum and third speculum, the knife rest are set to main shaft offside, and the diamond cutter is equipped on knife rest,
Diamond cutter is connect with kinetic control system.
As the preferred embodiment of this programme, the axis of the circumference of the rotary shaft of the main shaft and the distribution of three groups of speculums
Coaxially.
As the preferred embodiment of this programme, the diamond cutter lower part is equipped with X-direction tracks and Z-direction is transported
Dynamic rail road, the apparent height in different rotary angle is related with speculum for the movement of X-direction, the movement of the Z-direction with
The tool sharpening period is related.
As the preferred embodiment of this programme, the revolution radius of a circle of the diamond cutter is less than concave mirror song
Rate radius.
As the preferred embodiment of this programme, the revolution circle diameter of the diamond cutter be less than three groups of speculums it
Between minimum spacing.
As the preferred embodiment of this programme, first speculum, the second speculum and third speculum position
On the same circumference, and three groups of mirror surface types are close to same circumferential curvature.
A kind of processing method using off-axis three anti-imaging systems of the invention, includes the following steps:
S1, foundation basic optical index request carry out the design of the initial configuration of off axis reflector mirror, and the face shape of speculum uses XY
Multinomial is modeled;
S2, optimization design off axis reflector system, all speculums are all expressed using free form surface in design, in design according to
Certain optimization principles carry out system design;
S3, the design that system contour structures are carried out according to off axis reflector system design scheme, and together by all speculum blanks
It is installed in system structure;
S4, the off axis reflector system structure according to design, the tool holder system of reasonable design;
S5, entire off axis reflector system structure is installed on lathe, is integrally machined, i.e., after all speculum installation lathes
It no longer unloads, design processing method machines all mirror integrals, and the face shape of all speculums and position are completely by surpassing
The superhigh precision of precision machine tool controls and ensures.
After S6, off axis reflector system completion of processing, you can corresponding detector is installed.
8, a kind of processing method using off-axis three anti-imaging systems according to claim 7, feature
It is, the XY multinomials carry out modeling expression formula and are:
Whereinc,kRespectively aspherical curvature and circular cone coefficient,A mn For multinomial coefficient.c=1/rFor vertex curvature radius
It is reciprocal.In general the item number of XY expression formulas part can be 35 ~ 40 in XY multinomials formula;
The initial configuration of the off axis reflector mirror determines:According to system focal lengthfIt is required that determining cutter radius of gyration initial valueR 0
It is 1 ~ 2f;The initial curvature radius that a mirror and three mirrors is arranged isR 0, the initial curvature radius for calculating two mirrors is -2R 0;Three reflections
Mirror is initially distributed on radiusR 0Circumference on, remaining polynomial initial parameter values of XY in initial configuration in three speculums are equal
It is 0;
The optimization principles:Inevitably there is the case where mirror tilt in optimization design in order to meet image quality, to the greatest extent
Amount control its relative to revolution circumference tilt quantity within the scope of certain numerical value, generally take inclination angle within 2 °;
The rational tool holder system refers to:To consider in tool holder designs straight less than the minimum revolution of off axis reflector system
Diameter, for the speculum of the circle distribution of synchronous processing mode, cutter tactical diameter is less than speculum near axial ray
Point be formed by minimum tactical diameter;The cutter radius of gyration is less than the vertex curvature radius numerical value of three speculums simultaneously;
The mode that is integrally machined is divided into two kinds of forms:(1)Multiple speculums are distributed on the same circumference, and are installed simultaneously
In the main shaft of super precision lathe(C axis)On, the circumference axis of main shaft rotary shaft and speculum distribution is coaxial, and main shaft revolves in process
Circle, diamond cutter under kinetic control system SERVO CONTROL, in different rotary angle according to apparent height change into
Therefore the motion control of row X-direction respectively processes a knife all in accordance with required face shape to all speculums, often processes one week cutter in Z
It is fed under axis control, realizes the grid line processing of all surface, until surface processing is complete;(2)It can also select diamond
The processing structure of cutter rotation, diamond cutter vertical major(C axis)Axis is installed, and with main shaft(C axis)It rotates and rotates,
Off axis reflector system is positioned on linear motion axis Z axis, and when cutter rotates a circle, cutter is according to speculum in different angle
Face shape be distributed in X-axis and Y-axis SERVO CONTROL, can realize whole processing of circumferentially distributed all speculums, and along Z axis side
Grid line processing is realized to feeding, until processing all speculums.
One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:
It is simple in structure, it is easy to use, the processing of off axis reflector system is realized using the mode of being integrally machined, and avoids alignment error,
Ensure that the more complicated arbitrary free form surface of face type may be used in the imaging effect of off-axis three anti-systems, speculum well, it can
To obtain more superior optical property, speculum is distributed on the same circumference, can effectively improve processing efficiency.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, also
It can be obtain other attached drawings according to these attached drawings.
Fig. 1 is the structural schematic diagram of the embodiment of the present application;
In Fig. 1,1, main shaft, 2, knife rest, 3, diamond cutter, the 4, first speculum, the 5, second speculum, 6, third speculum,
7, X-direction tracks, 8, Z-direction tracks.
Specific implementation mode
It is simple in structure the present invention provides a kind of processing unit (plant) using off-axis three anti-imaging systems, it is easy to use, it uses
The mode of being integrally machined realizes the processing of off axis reflector system, avoids alignment error, ensure well off-axis three anti-systems at
As effect, speculum may be used the more complicated arbitrary free form surface of face type, can obtain more superior optical property, reflect
Mirror is distributed on the same circumference, can effectively improve processing efficiency.
In order to better understand the above technical scheme, in conjunction with appended figures and specific embodiments to upper
Technical solution is stated to be described in detail.
As shown in Figure 1, a kind of processing unit (plant) using off-axis three anti-imaging systems described in the present embodiment, including main shaft 1,
Speculum group, knife rest 2 and diamond cutter 3 are equipped with the main shaft 1, the speculum on the super precision lathe
Group distribution is on the same circumference and the circumference is installed on main shaft 1, and the speculum group includes that the first speculum 4, second is anti-
Mirror 5 and third speculum 6 are penetrated, the knife rest 2 is set to 1 offside of main shaft, and the diamond cutter 3 is equipped on knife rest 2,
Diamond cutter 3 is connect with kinetic control system.
Wherein, in practical applications, the axis of the rotary shaft of the main shaft 1 and the circumference of three groups of speculums distribution is same
Axis, to ensure machining accuracy.
Wherein, in practical applications, 3 lower part of diamond cutter is equipped with X-direction tracks 7 and Z-direction moves
Track 8, the apparent height in different rotary angle is related with speculum for the movement of X-direction, the movement of the Z-direction and knife
The tool process-cycle is related, changes the motion control for carrying out X-direction according to apparent height in different rotary angle, therefore, to institute
There is speculum respectively to process a knife all in accordance with required face shape, often processes one week cutter and fed under Z axis control, realize all tables
The grid line in face is processed, until surface processing is complete.
Wherein, in practical applications, the revolution radius of a circle of the diamond cutter 3 is less than concave reflection mirror curvature half
Diameter, when to avoid processing with the interference of speculum other parts.
Wherein, in practical applications, the revolution circle diameter of the diamond cutter 3 is less than between three groups of speculums
Minimum spacing, when to avoid processing with the interference of other speculums.
Wherein, in practical applications, the position of first speculum 4, the second speculum 5 and third speculum 6 exists
On same circumference, and three groups of mirror surface types are close to same circumferential curvature, to avoid cutter in the X direction excessive amount of exercise and
Reduce processing efficiency.
A kind of processing method using off-axis three anti-imaging systems described in the present embodiment, which is characterized in that including
Following steps:
S1, foundation basic optical index request carry out the design of the initial configuration of off axis reflector mirror, and the face shape of speculum uses XY
Multinomial is modeled;
S2, optimization design off axis reflector system, all speculums are all expressed using free form surface in design, in design according to
Certain optimization principles carry out system design;
S3, the design that system contour structures are carried out according to off axis reflector system design scheme, and together by all speculum blanks
It is installed in system structure;
S4, the off axis reflector system structure according to design, the tool holder system of reasonable design;
S5, entire off axis reflector system structure is installed on lathe, is integrally machined, i.e., after all speculum installation lathes
It no longer unloads, design processing method machines all mirror integrals, and the face shape of all speculums and position are completely by surpassing
The superhigh precision of precision machine tool controls and ensures.
After S6, off axis reflector system completion of processing, you can corresponding detector is installed.
Wherein, in the present embodiment, the XY multinomials carry out modeling expression formula be:
Whereinc,kRespectively aspherical curvature and circular cone coefficient,A mn For multinomial coefficient.c=1/rFor vertex curvature radius
It is reciprocal.In general the item number of XY expression formulas part can be 35 ~ 40 in XY multinomials formula;
The initial configuration of the off axis reflector mirror determines:According to system focal lengthfIt is required that determining cutter radius of gyration initial valueR 0
It is 1 ~ 2f;The initial curvature radius that a mirror and three mirrors is arranged isR 0, the initial curvature radius for calculating two mirrors is -2R 0;Three reflections
Mirror is initially distributed on radiusR 0Circumference on, remaining polynomial initial parameter values of XY in initial configuration in three speculums are equal
It is 0;
The optimization principles:Inevitably there is the case where mirror tilt in optimization design in order to meet image quality, to the greatest extent
Amount control its relative to revolution circumference tilt quantity within the scope of certain numerical value, generally take inclination angle within 2 °;
The rational tool holder system refers to:To consider in tool holder designs straight less than the minimum revolution of off axis reflector system
Diameter, for the speculum of the circle distribution of synchronous processing mode, cutter tactical diameter is less than speculum near axial ray
Point be formed by minimum tactical diameter;The cutter radius of gyration is less than the vertex curvature radius numerical value of three speculums simultaneously;
The mode that is integrally machined is divided into two kinds of forms:(1)Multiple speculums are distributed on the same circumference, and are installed simultaneously
In the main shaft of super precision lathe(C axis)On, the circumference axis of main shaft rotary shaft and speculum distribution is coaxial, and main shaft revolves in process
Circle, diamond cutter under kinetic control system SERVO CONTROL, in different rotary angle according to apparent height change into
Therefore the motion control of row X-direction respectively processes a knife all in accordance with required face shape to all speculums, often processes one week cutter in Z
It is fed under axis control, realizes the grid line processing of all surface, until surface processing is complete;(2)It can also select diamond
The processing structure of cutter rotation, diamond cutter vertical major(C axis)Axis is installed, and with main shaft(C axis)It rotates and rotates,
Off axis reflector system is positioned on linear motion axis Z axis, and when cutter rotates a circle, cutter is according to speculum in different angle
Face shape be distributed in X-axis and Y-axis SERVO CONTROL, can realize whole processing of circumferentially distributed all speculums, and along Z axis side
Grid line processing is realized to feeding, until processing all speculums.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, though
So the present invention has been disclosed as a preferred embodiment, and however, it is not intended to limit the invention, any technology people for being familiar with this profession
Member, without departing from the scope of the present invention, when the technology contents using the disclosure above make a little change or modification
For the equivalent embodiment of equivalent variations, as long as being the content without departing from technical solution of the present invention, according to the technical essence of the invention
To any simple modification, equivalent change and modification made by above example, in the range of still falling within technical solution of the present invention.
Claims (8)
1. a kind of processing unit (plant) using off-axis three anti-imaging systems, including main shaft(1), speculum group, knife rest(2)And diamond
Cutter(3), which is characterized in that the main shaft is installed on the super precision lathe(1), the speculum group is distributed in
On same circumference and the circumference is installed on main shaft(1)On, the speculum group includes the first speculum(4), the second speculum
(5)With third speculum(6), the knife rest(2)It is set to main shaft(1)Offside, knife rest(2)On the diamond is installed
Cutter(3), diamond cutter(3)It is connect with kinetic control system.
2. a kind of processing unit (plant) using off-axis three anti-imaging systems according to claim 1, which is characterized in that described
Main shaft(1)Rotary shaft and three groups of speculums distribution circumference axis coaxle.
3. a kind of processing unit (plant) using off-axis three anti-imaging systems according to claim 1, which is characterized in that described
Diamond cutter(3)Lower part is equipped with X-direction tracks(7)With Z-direction tracks(8), the movement of X-direction and speculum
In different rotary angle, apparent height is related, and the movement of the Z-direction is related with the tool sharpening period.
4. a kind of processing unit (plant) using off-axis three anti-imaging systems according to claim 1, which is characterized in that described
Diamond cutter(3)Revolution radius of a circle be less than concave reflection curvature radius.
5. a kind of processing unit (plant) using off-axis three anti-imaging systems according to claim 1, which is characterized in that described
Diamond cutter(3)Revolution circle diameter be less than the minimum spacing between three groups of speculums.
6. a kind of processing unit (plant) using off-axis three anti-imaging systems according to claim 1, which is characterized in that described
First speculum(4), the second speculum(5)With third speculum(6)Position on the same circumference, and three groups of mirror surface types
Close to same circumferential curvature.
7. a kind of processing method using off-axis three anti-imaging systems, which is characterized in that include the following steps:
S1, foundation basic optical index request carry out the design of the initial configuration of off axis reflector mirror, and the face shape of speculum uses XY
Multinomial is modeled;
S2, optimization design off axis reflector system, all speculums are all expressed using free form surface in design, in design according to
Certain optimization principles carry out system design;
S3, the design that system contour structures are carried out according to off axis reflector system design scheme, and together by all speculum blanks
It is installed in system structure;
S4, the off axis reflector system structure according to design, the tool holder system of reasonable design;
S5, entire off axis reflector system structure is installed on lathe, is integrally machined, i.e., after all speculum installation lathes
It no longer unloads, design processing method machines all mirror integrals, and the face shape of all speculums and position are completely by surpassing
The superhigh precision of precision machine tool controls and ensures;After S6, off axis reflector system completion of processing, you can the corresponding detection of installation
Device.
8. a kind of processing method using off-axis three anti-imaging systems according to claim 7, which is characterized in that described
XY multinomials carry out modeling expression formula:
Whereinc,kRespectively aspherical curvature and circular cone coefficient,A mn For multinomial coefficient,10. c=1/rFor vertex curvature half
The inverse of diameter;
In general the item number of XY expression formulas part can be 35 ~ 40 in XY multinomials formula;
The initial configuration of the off axis reflector mirror determines:According to system focal lengthfIt is required that determining cutter radius of gyration initial valueR 0
It is 1 ~ 2f;The initial curvature radius that a mirror and three mirrors is arranged isR 0, the initial curvature radius for calculating two mirrors is -2R 0;Three reflections
Mirror is initially distributed on radiusR 0Circumference on, remaining polynomial initial parameter values of XY in initial configuration in three speculums are equal
It is 0;
The optimization principles:Inevitably there is the case where mirror tilt in optimization design in order to meet image quality, to the greatest extent
Amount control its relative to revolution circumference tilt quantity within the scope of certain numerical value, generally take inclination angle within 2 °;
The rational tool holder system refers to:To consider in tool holder designs straight less than the minimum revolution of off axis reflector system
Diameter, for the speculum of the circle distribution of synchronous processing mode, cutter tactical diameter is less than speculum near axial ray
Point be formed by minimum tactical diameter;The cutter radius of gyration is less than the vertex curvature radius numerical value of three speculums simultaneously;
The mode that is integrally machined is divided into two kinds of forms:(1)Multiple speculums are distributed on the same circumference, and are installed simultaneously
In the main shaft of super precision lathe(C axis)On, the circumference axis of main shaft rotary shaft and speculum distribution is coaxial, and main shaft revolves in process
Circle, diamond cutter under kinetic control system SERVO CONTROL, in different rotary angle according to apparent height change into
Therefore the motion control of row X-direction respectively processes a knife all in accordance with required face shape to all speculums, often processes one week cutter in Z
It is fed under axis control, realizes the grid line processing of all surface, until surface processing is complete;(2)It can also select diamond
The processing structure of cutter rotation, diamond cutter vertical major(C axis)Axis is installed, and with main shaft(C axis)It rotates and rotates,
Off axis reflector system is positioned on linear motion axis Z axis, and when cutter rotates a circle, cutter is according to speculum in different angle
Face shape be distributed in X-axis and Y-axis SERVO CONTROL, can realize whole processing of circumferentially distributed all speculums, and along Z axis side
Grid line processing is realized to feeding, until processing all speculums.
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CN112378367A (en) * | 2020-11-05 | 2021-02-19 | 天津大学 | Method for measuring surface shape and position of multi-free-form surface reflector distributed in inner cavity |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111198408A (en) * | 2018-11-19 | 2020-05-26 | 三代光学科技(天津)有限公司 | Ultra-precision machining device and method for micro-lens array |
CN110126101A (en) * | 2019-05-25 | 2019-08-16 | 天津大学 | A kind of off-axis how anti-imaging system processing method |
CN110126101B (en) * | 2019-05-25 | 2021-05-04 | 天津大学 | Off-axis multi-reflector imaging system processing method |
CN110480365A (en) * | 2019-07-17 | 2019-11-22 | 深圳大学 | Turnery processing lathe and method for turning |
CN112378367A (en) * | 2020-11-05 | 2021-02-19 | 天津大学 | Method for measuring surface shape and position of multi-free-form surface reflector distributed in inner cavity |
CN112378367B (en) * | 2020-11-05 | 2021-10-22 | 天津大学 | Method for measuring surface shape and position of multi-free-form surface reflector distributed in inner cavity |
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