CN113690624B - Vortex optical spatial modulator based on geometric phase super-surface - Google Patents

Vortex optical spatial modulator based on geometric phase super-surface Download PDF

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CN113690624B
CN113690624B CN202110814668.XA CN202110814668A CN113690624B CN 113690624 B CN113690624 B CN 113690624B CN 202110814668 A CN202110814668 A CN 202110814668A CN 113690624 B CN113690624 B CN 113690624B
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super
phase
vortex
layer
vortex optical
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CN113690624A (en
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刘亮
周绍林
罗锐
李天�
陈志坚
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South China University of Technology SCUT
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
    • H01Q3/34—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
    • H01Q3/36—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means with variable phase-shifters

Abstract

The invention discloses a vortex optical spatial modulator based on a geometric phase super surface, which comprises M multiplied by M super surface pixel units arranged in an array mannerEach super-surface pixel unit can independently complete the generation and closing of vortex sub-beams, and further realize the space regulation of arrayed spiral phase regulation or vortex sub-beam arrays. The device works in a reflection mode, each subunit vortex optical super-surface generator adopts a metal-medium-metal three-layer structure, namely, the top layer is a nano antenna for realizing geometric phase regulation, and the middle layer is a phase change medium and SiO 2 The bottom layer is a metal layer; through electric control excitation loading based on TFT drive array design, when the phase change dielectric layer is in an amorphous state, incident electromagnetic waves work at a specific resonant frequency in an ideal impedance matching mode, cross polarization efficiency is high, and vortex light generation efficiency is high; when the amorphous state is switched to the crystalline state, the resonance shifts the original working waveband, the energy conversion rate is low, and the spiral phase is closed.

Description

Vortex optical space modulator based on geometric phase super surface
Technical Field
The invention belongs to the field of phase regulation of electromagnetic waves, and particularly relates to a vortex optical spatial modulator based on a geometric phase super-surface.
Background
The super surface is composed of sub-wavelength periodic units, and the characteristics which are not possessed by natural materials, such as negative refractive index, negative magnetic permeability and the like, can be realized by utilizing resonance among the units, so that the super surface has numerous applications in optical bands of visible light, infrared, terahertz and the like, such as superlenses, holography, abnormal deflection, vortex rotation and the like. The phase-modulated super surface can be divided into a transmission phase type super surface, a geometric phase type super surface and a circuit type super surface. Due to the characteristics of the super surface, the super surface device can only work in a specific narrow band, and is difficult in wiring and manufacturing process. The geometric phase super-surface utilizes anisotropic 'elements' with the same size to rotate a certain angle to obtain a change of a spatial phase, so that the electromagnetic wave is regulated and controlled, and the processing and manufacturing difficulty of the super-surface is reduced due to the characteristic of the geometric phase.
Once the material and structure parameters of a general super-surface device are determined, the working frequency, bandwidth and other properties of the super-surface device are determined, in order to realize the popularization and wide application of the super-surface device, dynamic active regulation is added into the super-surface device to become a great hot point, and the current mainstream method is to add a phase-change medium into the middle of the super-surface. The principle is mainly to change the dielectric constant of the super surface and realize good frequency shift effect. The phase change materials commonly used in the sub-wavelength structure design include GST, vanadium oxide and memory alloy, wherein the GST material has non-volatility and reversibility, good thermal stability and high switching speed, can generally realize the change of crystalline state and amorphous state through electric excitation, thermal excitation, optical excitation and the like, and is widely applied to the phase change materials.
The spatial light modulator is used as a key device for optical information processing, and has great regulation and control functions on the amplitude, the phase, the polarization state and the like of light. The spiral phase modulation in the phase control is a new research direction, vortex light has the characteristics of spiral phase, orbital angular momentum and the like, the edge enhancement effect can be obtained by combining radial Hilbert transformation in object imaging, the imaging quality of the object can be improved by utilizing the spiral phase and the annular light field of vortex optical rotation, the diffraction limit is broken through, and the application potential in the fields of space division multiplexing optical communication, stimulated radiation loss imaging, infrared imaging, sensing and the like is very great. However, at present, the transmissive optical modulator has the disadvantages of low light transmittance, large light energy loss, low light intensity contrast ratio and the like.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a vortex optical spatial modulator based on a geometric phase super surface, which is reconfigurable through a spiral of a super surface pixel unit, is reflective, and can reduce the volume of the spatial light modulator, reduce the optical energy loss and enhance the image quality.
In order to achieve the above purpose, the invention provides a vortex optical spatial modulator based on a geometric phase super-surface, and the device is composed of M × M array sub-super-surface pixel units, and each super-surface pixel unit can independently complete the generation and closing of vortex sub-beams, thereby achieving arrayed spiral phase regulation or spatial regulation of vortex sub-beam arrays. The single super-surface pixel unit can realize independent pixel point control through array.
Furthermore, each super-surface pixel unit can be regarded as a subunit vortex optical super-surface generator consisting of N multiplied by N sub-wavelength antennas which are arranged in an array, each subunit vortex optical super-surface generator can independently realize dynamic reconfiguration of a sub-beam spiral phase, each subunit vortex optical super-surface generator comprises a sub-wavelength antenna layer, a phase change dielectric layer, an insulating dielectric layer and a metal reflecting layer which are arranged from top to bottom, and dynamic reconfiguration of the sub-beam spiral phase is independently realized.
Furthermore, the subunit vortex optical super-surface generator can control state switching through electric excitation and optical excitation, and the like, realizes the switching effect of an on state and an off state in a middle infrared band, and can realize independent pixel point control through arraying of single super-surface pixel units.
Furthermore, the subunit vortex optical super-surface generator, the sub-wavelength antenna layer is made of noble metal material, and the phase change medium layer is made of Ge 2 Sb 2 Te 5 The medium insulating medium layer is made of SiO 2 The metal reflecting layer is made of noble metal.
Furthermore, the working wavelength is 3-4 μm of the intermediate infrared band, the thickness of the phase change medium layer is 0.03-0.07 μm, and the length and width of the phase change medium layer are consistent with those of the intermediate medium layer and the metal reflecting layer.
Further, the geometric phase is discrete, and the period of the sub-wavelength antenna layer is far less than the wavelength as possible, so that the continuous distribution of the generated vortex phase can be ensured.
Furthermore, after the super-surface pixel units are arrayed, each pixel is controlled through independent addressing of electric excitation loading, and electric addressing and switch control of the spatial light modulator are achieved.
Furthermore, the super-surface pixel unit is controlled by adopting a driving array design based on a TFT (thin film transistor) field effect transistor, a grid electrode, a source electrode and a drain electrode of the TFT field effect transistor are respectively connected with a row electrode, a column electrode and the super-surface pixel unit, and the transition between the crystalline state and the amorphous state is realized by electrically exciting GST (GST) phase change medium.
Compared with the prior art, the invention has at least the following beneficial effects:
the vortex reconfigurable spatial light modulator based on the geometric phase is characterized in that the uppermost layer of the super-surface pixel unit is a sub-wavelength antenna array, vortex light is generated by utilizing the characteristic of the geometric phase, spiral phase modulation is realized, the super-surface pixel unit can be analogized to a filter based on radial Hilbert transform, imaging has extremely high contrast, clearer image edge information can be obtained, and image quality is enhanced; and the phase change medium layer is adopted, the vortex reconfigurable based on the phase change medium layer optimizes the switching performance of the spatial light modulator, and when the thickness of the subunit vortex optical super-surface generator changes, the working wavelength changes. The invention can reflect the existence of vortex through the existence of geometric phase, and the subunit vortex optical super-surface generator and the material are Ge 2 Sb 2 Te 5 The phase change medium layer can realize good switching effect between the wavelengths of 3-4 mu m, and when the phase change medium layer is made of Ge 2 Sb 2 Te 5 (GST) is in an amorphous state, is in a switch on state of 1, has high geometric phase occupation ratio, and is made of Ge serving as a material of a phase change dielectric layer 2 Sb 2 Te 5 In the crystalline state, (GST) has little geometric phase, and is in the off state "0" of the switch.
Drawings
FIG. 1 is a circuit diagram of a single super-surface pixel cell array of the present invention.
Fig. 2 is a schematic structural diagram of a single super-surface pixel unit in an embodiment of the present invention.
FIG. 3 is a schematic diagram of a single subunit vortex optical super-surface generator in an embodiment of the present invention.
FIG. 4 is a schematic diagram illustrating placement of sub-wavelength antenna layers in a single super-surface pixel unit according to an embodiment of the present invention.
FIG. 5 shows the reflectivity R of cross polarization in the crystalline and amorphous states of a single pixel cell in an embodiment of the invention cross With respect to the wavelength lambda.
Fig. 6 shows the relationship between the cross-polarization ratio PCR of a single pixel unit in the crystalline state and the amorphous state and the wavelength λ.
FIG. 7a is a diagram of the light field of a single pixel unit of the present invention observed at a distance of 3.5 μm from the super-surface in the amorphous state.
FIG. 7b is a phase diagram of a single pixel cell of the present invention observed at 3.5 μm from the super-surface in the amorphous state for cross-polarized portions.
FIG. 7c is a diagram of the light field of a single pixel cell of the present invention in the crystalline state, viewed at 3.5 μm from the super-surface, for cross-polarization.
FIG. 7d is a phase diagram of a single pixel cell of the present invention in the crystalline state, viewed 3.5 μm from the super-surface, in cross-polarized mode.
Reference numerals are as follows: 1. the antenna comprises a metal reflecting layer, a metal insulating medium layer, a metal phase change medium layer, a metal sub-wavelength antenna layer and a metal phase change medium layer, wherein the metal reflecting layer 2 is an insulating medium layer, 3 is a phase change medium layer, and 4 is a sub-wavelength antenna layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the present invention, and the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, other embodiments obtained by persons of ordinary skill in the art without any creative effort belong to the protection scope of the present invention.
First, the design principle of the present invention is explained:
the vortex reconfigurable spatial light modulator based on the geometric phase, the sub-wavelength antenna array utilizes the geometric phase, the adjustment and control of the optical wavefront phase are realized by changing the antenna rotation angle, when a beam of circularly polarized light enters, two beams of reflected light with opposite rotation directions are generated, and the rotation of the incident light is generatedThe scattering towards the same so-called polarization conservation, i.e. co-polarization, and the scattering with opposite rotation direction, i.e. cross-polarization, only the cross-polarized part carries the geometric phase, so that the ratio of the geometric phase generation can be reflected by the reflectivity and cross-polarizability of the cross-polarization, and the ratio of the helical phase generation can be reflected, wherein R is cross ＝W cross /W i ，R co ＝W co /W i ，PCR＝R corss /(R corss +R co )，W cross Energy, W, representing cross-polarized part i Representing the energy of the incident wave, W co Represents the energy of the co-polarized part, PCR represents the cross-polarizability, R cross A phase distribution of 0-2 pi along the azimuthal direction is achieved in the metasurface, representing the reflectance of the cross polarization, and a helical phase is achieved when the cross polarization is large.
The invention relates to application of a geometric phase super-surface in a dynamic vortex phase or reconfigurable vortex optical rotation spatial modulator, and particularly provides a vortex optical spatial modulator based on a geometric phase super-surface. And the super surface pixel unit is very thin and can be similar to a two-dimensional plane, so that the volume of the device can be greatly reduced.
Fig. 1 is an array scheme of an embodiment of the present invention, in which super-surface pixel units are controlled by TFT field effect transistors, where gates, sources, and drains of TFTs are respectively connected to row electrodes, column electrodes, and super-surface pixel units, each super-surface pixel unit can be independently addressed and controlled, a certain super-surface pixel unit is gated by the row electrodes and the column electrodes as row line and column line addressing respectively to realize local electromagnetic wave control, a phase change medium layer is electrically activated to realize transition between a crystalline state and an amorphous state, when the phase change medium layer is in an amorphous state, heating to a temperature exceeding a crystallization temperature can cause a phase change to the crystalline state, which can generally apply a lower voltage drop to the phase change medium layer to realize the transition, and when the phase change medium layer is in the amorphous state, heating to a melting temperature needs to apply a short-time large voltage to change the phase change medium layer. This embodiment is a reflective spatial light modulator that implements electrical addressing because it is electrically activated to effect the transition of the phase change material state, and the super surface pixel cell is a MIM structured reflective super surface.
Fig. 2 is a schematic diagram of a super-surface pixel unit structure according to one embodiment of the present invention, fig. 3 is a super-surface structure of a single period in fig. 2, the vortex reconfigurable spatial light modulator based on a geometric phase super-surface is composed of a plurality of super-surface pixel units arranged in an M × M array, each super-surface pixel unit includes N × N sub-unit vortex optical super-surface generators arranged in an array, each sub-unit vortex optical super-surface generator can independently realize dynamic reconfiguration of a sub-beam spiral phase, and each sub-unit vortex optical super-surface generator includes a sub-wavelength antenna layer 4, a phase change dielectric layer 3, an insulating dielectric layer 2, and a metal reflective layer 1 arranged from top to bottom.
In the invention, the material of the sub-wavelength antenna layer 4 is noble metal, and the material of the phase change dielectric layer 3 is Ge 2 Sb 2 Te 5 The insulating medium layer 2 is made of SiO 2 The material of the metal reflecting layer 1 is noble metal. In one embodiment of the present invention, gold is used as the material of the sub-wavelength antenna layer 4 and the metal reflective layer 1.
In one embodiment of the present invention, the thickness of the phase change medium layer 3 is 0.03-0.07 μm, and the length and width of the phase change medium layer are consistent with those of the insulating medium layer 2 and the metal reflective layer 1.
In one embodiment of the present invention, the thicknesses h1= h2=0.1 μm of the metal reflective layer 1 and the insulating medium layer 2, the thickness h3=0.07 μm of the phase-change medium layer 3, the thickness h =0.07 μm of the sub-wavelength antenna layer 4, the length L =0.4 μm, the width W =0.2 μm, the period T =0.5 μm, and the arrangement of all the sub-wavelength antenna layers in each super-surface pixel unit is as shown in fig. 4, and it can be seen that a single super-surface pixel unit is a square with a side length of 5.5 μm and the sub-wavelength antennas are angularly rotated by an angle of Π (in this embodiment, each sub-wavelength antenna layer is rectangular, and Π is an angle of rectangular rotation, that is 180 degrees, where a coordinate can be constructed in fig. 4, the hollow place without a rectangle is the origin, the corners along the x axis are not identical, and they are periodically arranged), and according to the principle of geometric phase, a phase distribution along a spiral of 0-2 is achieved. The phase-change dielectric layer 3, the insulating dielectric layer 2 and the metal reflecting layer 1 are all just as long as the antenna array, as shown in fig. 2.
In one embodiment of the invention, each subunit vortex optical super-surface generator can independently realize the switching effect of vortex existence or not in '1' (on state) and '0' (off state), and the obtained R is simulated in FDTD corss The relationship with the incident light wavelength λ is shown in FIG. 5, which reflects the magnitude of cross-polarized reflectivity, while FIG. 6 shows the relationship of cross-polarization ratio, R, with respect to the wavelength, and the cross-polarization ratio, PCR cross And PCR are high, so that the majority of the geometric phase carried in the reflected light is guaranteed, it can be seen from fig. 5 and 6 that when the phase change material is changed from the amorphous state to the crystalline state, the resonance peak is red-shifted, the height is reduced, and the switching effect can occur after the frequency shift. R in amorphous state in 3-4 μm band cross And the PCR value is much higher than the R in the crystalline state cross And PCR value, and about 3.5 μm, amorphous R cross Can reach 0.92, the crystalline state is lower than 0.03, the amorphous PCR can reach 0.99 at about 3.5 mu m, and the crystalline state is about 0.03, and the switch effect is most obvious at the moment.
Because the geometric phase is discrete, a full continuous vortex phase is realized according to the working wavelength, the sub-wavelength antenna is required to be as small as possible, and the period is also required to be as small as possible. Therefore, in one embodiment of the present invention, the length L =0.4 μm, the width W =0.2 μm, the period T =0.5 μm, and the thickness is determined according to the operating wavelength, the wavelength band of the switching effect is most obvious at 3.5 μm in the case of h1= h2=0.1 μm, h3=0.07 μm, and h =0.07 μm, and the optical field (fig. 7 a) and the phase (fig. 7 b) of the cross-polarized part of the reflected light are observed by FDTD simulation when the GST is amorphous, and the optical field can be seenThe phase meets the characteristic of vortex rotation, the optical field is zero at a phase singularity, the phase realizes the gradual distribution of 0-2 pi on a two-dimensional plane along an angular direction, and the phase is spirally distributed. When GST is crystalline, then R cross And PCR are small, the optical field and phase of the cross-polarized portion of the observed reflected light are shown in fig. 7c and 7d, and it is found that the phase is deflected along an angular direction after the phase change, compared to the amorphous state, and the optical field in the crystalline state is not in an order of magnitude with the optical field in the amorphous state, which results in a small vortex phase in the crystalline state. When a beam of (left-handed or right-handed) circularly polarized light hits an anisotropic super-surface, namely a subunit vortex light super-surface, two lights (left-handed and right-handed) with different directions of rotation are generated in the reflected light or transmitted light of the beam, and the geometrical phase is carried only when the direction of rotation is opposite to that of the incident light.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such modifications are intended to be included in the scope of the present invention.

Claims (8)

1. A vortex optical spatial modulator based on a geometric phase super surface is characterized by comprising M multiplied by M super surface pixel units which are arranged in an array, wherein each super surface pixel unit can independently complete the generation and the closing of vortex sub-beams, so that the arrayed spiral phase regulation or the spatial regulation of a vortex sub-beam array is realized;
each super-surface pixel unit comprises a subunit vortex optical super-surface generator consisting of NxN subwavelength antennas arranged in an array, each subunit vortex optical super-surface generator can independently realize dynamic reconfiguration of a spiral phase of a sub-beam, each subunit vortex optical super-surface generator comprises a subwavelength antenna layer (4), a phase change dielectric layer (3), an insulating dielectric layer (2) and a metal reflecting layer (1) which are arranged from top to bottom, and in each super-surface pixel unit, reflected light is distributed gradually along an angular direction in a plane and meets the phase of 0-2 pi, so that spiral phase distribution is realized;
after the super-surface pixel units are arrayed, each pixel is independently addressed and controlled through electric excitation loading, and electric addressing and switch control of the spatial modulator are achieved.
2. A geometric phase super-surface based vortex optical spatial modulator according to claim 1, wherein each subunit vortex optical super-surface generator can control the switching of states by electrical or optical excitation, achieving the switching effect of on and off states in the mid-infrared band.
3. A vortex optical spatial modulator based on a geometric phase metasurface according to claim 1, wherein: the working wavelength of the vortex optical rotation spatial modulator is a middle infrared band of 3-4 mu m.
4. A vortex optical spatial modulator based on a geometric phase metasurface according to claim 1, wherein: the thickness of the phase change medium layer (3) is 0.03-0.07 μm, and the length and width of the phase change medium layer are consistent with those of the insulating medium layer (2) and the metal reflecting layer (1).
5. A vortex optical spatial modulator based on a geometric phase metasurface according to claim 1, wherein: in each subunit vortex optical super-surface generator, the sub-wavelength antenna layer (4) is made of noble metal, and the phase change medium layer (3) is made of Ge 2 Sb 2 Te 5 The insulating medium layer (2) is made of SiO 2 The material of the metal reflecting layer (1) isA noble metal.
6. A vortex optical spatial modulator based on a geometric phase metasurface according to claim 1, wherein: the period of the sub-wavelength antenna layer (4) is smaller than the wavelength.
7. A vortex optical spatial modulator based on a geometric phase metasurface according to claim 1, wherein: each super-surface pixel unit is square in cross section.
8. A vortex optical spatial modulator based on a geometric phase metasurface according to any of claims 1-7, wherein: the electric addressing control of the super-surface pixel unit adopts a driving array based on a TFT field effect tube, a grid electrode, a source electrode and a drain electrode of the TFT field effect tube are respectively connected with a row electrode, a column electrode and the super-surface pixel unit, and the transformation between the crystalline state and the amorphous state is realized by electrically exciting a phase change medium layer (3).
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