CN114914700B - Dynamic multifunctional terahertz reflection array based on vanadium dioxide and preparation method - Google Patents
Dynamic multifunctional terahertz reflection array based on vanadium dioxide and preparation method Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
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- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
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- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
- H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
- H01Q15/0026—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices having a stacked geometry or having multiple layers
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- H01Q15/148—Reflecting surfaces; Equivalent structures with means for varying the reflecting properties
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- H01Q15/24—Polarising devices; Polarisation filters
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- H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
- H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
- H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
- H01Q3/34—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
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Abstract
The invention belongs to the technical field of metamaterial and electromagnetic functional devices, and particularly relates to a dynamic multifunctional terahertz reflective array based on vanadium dioxide, which is used for solving the problem of VO-based reflection 2 The tunable terahertz metamaterial has the advantages of multiple functions and singleness. The invention discloses a dynamic multifunctional terahertz reflective array based on vanadium oxide, which is used for carrying out VO (volatile organic compound) 2 In combination with the optimized metamaterial containing double SRRs, VO is utilized 2 The phase change characteristics of the (C) and the accurate control capability of the metamaterial on electromagnetic waves, and the VO of the phase change material is controlled through external physical stimulation 2 In turn controlling the resonant mode switching of the artificial electromagnetic medium such that the metal-VO 2 The composite regulation and control unit has independent 360-degree phase modulation range in a metal state and a medium state, and can keep higher polarization conversion efficiency, so that different functional designs can be carried out on the two states, and VO is changed through external stimulation 2 The dynamic function switching is realized in the working state of (a).
Description
Technical Field
The invention relates to the field of metamaterial and electromagnetic functional devices, in particular to a dynamic multifunctional terahertz reflective array based on vanadium dioxide and a preparation method thereof.
Background
Tunable terahertz devices are a popular direction and development trend in the field of terahertz technology at present. Compared with the traditional method of tuning the performance of the device by changing the size of the structure, the tunable device does not need multiple processing tests, and has more abundant functions. The metamaterial is a special electromagnetic material, electromagnetic waves can be flexibly regulated and controlled in a special mode, and is a sub-wavelength metal resonance unit generally, and the ultra-conventional property which is difficult to realize by the material in the nature is shown by manual accurate design, so that the electromagnetic waves are controlled, and special electromagnetic characteristics and functions are shown. Because the terahertz wave wavelength size is in the micron order, devices and electronic elements in the microwave band cannot be directly applied to the terahertz wave band. The tunable terahertz device based on the metamaterial is generally characterized in that an active material is embedded in a microstructure sensitive area, and the performance of the active material is excited through different external physical field stimuli such as light, an electric field, heat and the like, so that the resonance frequency point or the resonance mode of a resonance structure is changed, and the dynamic modulation of terahertz waves is realized.
Vanadium dioxide (VO) 2 ) As a phase-change material, the phase-change conversion from a medium phase to a metal phase can be realized under various external driving of light, heat and electricity, and VO grown on different substrates can be realized 2 The film has conductivity variation range of 3-5 orders of magnitude in terahertz frequency band, phase change rate of only tens of femtoseconds, is approximately in an insulating state at 300K, and VO when the temperature exceeds 355K phase change temperature 2 Will undergo a transition from the insulating state to the metallic state with a concomitant sharp increase in conductivity. Patterned VO 2 The composite design combined with the artificial microstructure can be realized by controlling VO 2 The conductivity of the micro-structure is regulated in a resonance mode under the terahertz wave, so that the amplitude and the phase of the terahertz wave are regulated.
But is currently based on VO 2 The tunable terahertz metamaterial is multifunctional and single, is not easy to integrate, has phase regulation capability only in one state like paper Thermally switchable terahertz wavefront metasurface modulators based on the insulator-to-metal transition of vanadium dioxide and Terahertz Tunable Metasurface Lens Based on Vanadium Dioxide Phase Transition, has single function, adopts a zonal modulation method like paper Terahertz Switchable Focusing Planar Lens With a Nanoscale Vanadium Dioxide Integrated Metasurface and Multifunctional Metasurface LensWith Tunable Focus Based on Phase Transition Material, and greatly reduces energy utilization rate.
Disclosure of Invention
Aiming at the problems in the background art, the invention provides a dynamic multifunctional terahertz reflection array based on vanadium dioxide and a preparation method thereof, and aims to design a dynamic multifunctional device capable of working in a terahertz frequency band, integrate different functions into single equipment and dynamically switch between different functions through external physical stimulation control.
The invention solves the technical problems and provides the following technical proposal:
a dynamic multifunctional terahertz reflection array based on vanadium dioxide comprises a back metal base plate, a substrate and a phase modulation structure formed on the substrate;
the phase modulation structure comprises a plurality of phase modulation unit structures which are arranged in an array manner;
the phase modulation unit structure is metal and phase change material VO 2 A composite structure is formed;
the phase modulation unit structure comprises a concentric annular inner ring and an outer ring, wherein the inner ring consists of a complementary metal opening ring and VO 2 The split ring consists of an outer ring, and one side of the outer ring is provided with an opening;
the outer ring is made of VO 2 ；
The symmetry axis of the metal split ring on the x-y plane and the x-axis are at an angle of +45 degrees or-45 degrees, and the symmetry axis of the outer ring on the x-y plane and the x-axis are at an angle of +45 degrees or-45 degrees.
According to the dynamic multifunctional terahertz reflective array based on vanadium dioxide, the modulation effect of the modulation unit in two states is independent, so that any two groups of wavefront modulation functions can be combined together, and multifunctional dynamic switching is realized.
Further, the substrate is one of quartz or sapphire.
Further, in the metal reflective bottom plate and the phase modulation structure, the metal is one of gold, silver, copper or aluminum.
Further, the phase modulation structure is an m×n array formed by a plurality of modulation units, where M and N are positive integers; and M >3, N >3.
In the phase modulation structure, the opening sizes and the opening directions of the metal opening ring and the outer ring can influence VO respectively 2 Reflection phases of the reflective array in the dielectric state and the metallic state.
Further, the VO-based 2 Dynamic multifunctional reflective array of (2) is arranged on VO 2 In the dielectric state and the metal state, the reflection phases are completely independent.
Further, the VO-based 2 Dynamic multifunctional reflective array through control VO 2 The state change of (2) realizes the function switching of terahertz waves.
The invention provides a preparation method of a dynamic multifunctional terahertz reflective array based on vanadium dioxide, which comprises the following steps:
step one, determining VO 2 For the modulation functions required by the medium state and the metal state respectively, such as focusing, beam deflection and the like, then determining the phase distribution required by the two states respectively, namely the phase required by the position of each unit structure according to the set functions and the three-dimensional phase modulation principle;
step two, according to VO 2 Determining a modulation phase value of each unit structure position for the phase distribution required by the modulation function in the medium state, and changing the reflection phase of the terahertz wave by adjusting the size and the opening orientation of a metal opening ring in the unit structure at the corresponding position so as to realize the phase modulation of the corresponding unit structure in the medium state;
step three, according to VO 2 Determining a modulation phase value of each unit structure position for the phase distribution required by the modulation function in the metal state, and changing the reflection phase of the terahertz wave by adjusting the opening size and the opening orientation of an outer ring in the unit structure at the corresponding position so as to realize the phase modulation of the corresponding unit structure in the metal state;
filling VO in the opening of the metal opening ring in each unit structure 2 The microstructure enables the inner ring to be a complete closed ring, so that the phase modulation effects of the two states have independence, and the dynamic multifunctional terahertz reflection can be obtainedAn array.
In summary, due to the adoption of the technical scheme, the beneficial effects of the invention are as follows:
1. according to the dynamic multifunctional terahertz reflective array based on vanadium dioxide, the modulation effect of the modulation unit in two states is independent, so that any two groups of wavefront modulation functions can be combined together, and multifunctional dynamic switching is realized.
2. According to the dynamic multifunctional terahertz reflective array based on vanadium dioxide, through adjusting the size and the opening direction of the openings of the inner ring and the outer ring of the unit, 0-360-degree phase coverage can be realized in two states, so that the dynamic multifunctional terahertz reflective array based on vanadium dioxide has high polarization conversion efficiency, the average reflectivity of a medium state unit is 0.75, and the average reflectivity of a metal state unit is 0.5.
3. The dynamic multifunctional terahertz reflective array based on vanadium dioxide provided by the invention has polarization conversion and phase modulation effects on THz waves with various polarizations such as x polarization, y polarization, left-hand polarization, right-hand polarization and the like, and has polarization insensitivity.
4. The dynamic multifunctional terahertz reflection array provided by the invention adopts a phase change material VO 2 The phase change device can be excited by light, electricity, heat and the like, and the phase change speed is in the femtosecond level, so that high-speed function switching can be realized.
5. The dynamic multifunctional terahertz reflective array based on vanadium dioxide provided by the invention has a two-dimensional planar structure in a phase modulation structure, can be realized through a fine processing technology, is mature in technology and easy to manufacture, and avoids high difficulty in processing caused by the design of a complex three-dimensional structure.
6. The invention can work in the environment of normal temperature and normal pressure, is convenient to manufacture and use, and has good application potential and prospect.
Drawings
Fig. 1 is a schematic diagram of an overall design of a device in an embodiment.
Fig. 2 is a schematic perspective view of a device modulation unit in an embodiment.
FIG. 3 is a graph showing the distribution pattern of the electric field and the surface current of the modulation unit in the dielectric state.
FIG. 4 is a graph showing the distribution of electric field and surface current of a modulation unit in a metal state.
Fig. 5 is a graph showing the amplitude-phase characteristics of selected cells of the device in the dielectric state according to an embodiment.
Fig. 6 is a graph showing the amplitude-phase characteristics of selected cells of the device in the metallic state according to the embodiment.
In the figure: 1-back metal bottom plate, 2-substrate, 3-front phase modulation structure, 4-inner ring, 401-VO 2 Split ring, 402-metal split ring, 5-outer ring.
Detailed Description
In order to make the technical means, features and effects achieved by the present invention easier to understand, the technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the embodiments and the drawings in the embodiments of the present invention.
As shown in fig. 1 to 6, the present invention provides the following technical solutions:
dynamic multifunctional terahertz reflection array based on vanadium dioxide and VO (volatile organic compound) 2 In combination with the optimized metamaterial containing the double-opening resonant ring (Split Resonant Ring, SRR) and VO 2 The phase change characteristics of the (C) and the accurate control capability of the metamaterial on electromagnetic waves, and the VO of the phase change material is controlled through external physical stimulation 2 In turn controlling the resonant mode switching of the artificial electromagnetic medium such that the metal-VO 2 The composite regulation and control unit has independent 360-degree phase modulation range in two states (metal state and medium state), can maintain certain efficiency, and controls VO 2 The dynamic switching of the terahertz wave modulation function is realized.
The invention is thus a dynamic multifunctional reflective array based on vanadium dioxide, comprising: the phase modulation structure comprises a plurality of phase modulation unit structures which are arranged in an array, wherein the phase modulation unit structures are composite structures formed by metal and phase change material vanadium dioxide, and the composite structures comprise concentric inner rings and outer rings, and the inner rings are formed by complementary metal opening rings and VO 2 An openingThe ring is composed of VO 2 The symmetry axis of the metal split ring and the x-axis are at an angle of +45 degrees or-45 degrees, and the symmetry axis of the outer ring and the x-axis are at an angle of +45 degrees or-45 degrees.
Further, the substrate is one of quartz or sapphire.
Further, in the metal reflective bottom plate and the phase modulation structure, the metal is one of gold, silver, copper or aluminum.
Further, the phase modulation structure is an m×n array formed by a plurality of modulation units, where M and N are positive integers and M >3 and N >3.
In the phase modulation structure, the opening sizes and the opening directions of the metal opening ring and the outer ring can influence VO respectively 2 Reflection phases of the reflective array in the dielectric state and the metallic state.
Further, the VO-based 2 Dynamic multifunctional reflective array of (2) is arranged on VO 2 In the dielectric state and the metal state, the reflection phases are completely independent.
Further, the VO-based 2 Dynamic multifunctional reflective array through control VO 2 The state change of (2) realizes the function switching of terahertz waves.
The invention provides a preparation method of a dynamic multifunctional terahertz reflective array based on vanadium dioxide, which comprises the following steps:
step one, determining VO 2 For the modulation functions required by the medium state and the metal state respectively, such as focusing, beam deflection and the like, then determining the phase distribution required by the two states respectively, namely the phase required by the position of each unit structure according to the set functions and the three-dimensional phase modulation principle;
step two, according to VO 2 Determining a modulation phase value of each unit structure position for the phase distribution required by the modulation function in the medium state, and changing the reflection phase of the terahertz wave by adjusting the size and the opening orientation of a metal opening ring in the unit structure at the corresponding position so as to realize the phase modulation of the corresponding unit structure in the medium state;
step three, according to VO 2 Modulation function in metallic stateThe required phase distribution determines the modulation phase value of each unit structure position, and the reflection phase of the terahertz wave is changed by adjusting the opening size and the opening orientation of an outer ring in the unit structure at the corresponding position so as to realize the phase modulation of the corresponding unit structure in a metal state;
filling VO in the opening of the metal opening ring in each unit structure 2 The micro structure enables the inner ring to be a complete closed ring, so that the phase modulation effects of the two states have independence, and the dynamic multifunctional terahertz reflection array can be obtained.
For a better understanding of the principles of the present invention, reference is made to the following description, taken in conjunction with the accompanying drawings, in which:
the dynamic multifunctional terahertz reflection array in the invention is VO 2 A double-ring composite array structure skillfully and effectively combined with a metal microstructure. We pass through the optimization design of the double LC resonance structure and VO 2 Is high in binding efficiency, so that VO 2 When the medium state is switched to the metal state, the phase modulation effect is not phase compensation, but is thoroughly phase reconstruction, so that the modulation effect of the modulation unit in the two states is independent, and therefore independent functional design can be carried out on the two states respectively. The device controls VO by laser 2 The phase change process enables the regulation and control unit to be rapidly converted among different resonance modes, so that the regulation and control unit can realize dynamic function switching. Simulation calculation shows that the dynamic multi-functional THz regulating device has great development potential and practical value.
As shown in fig. 1 and 2, the invention comprises a metal reflective bottom plate 1, a substrate 2 and a phase modulation structure 3 formed on the substrate, wherein the phase modulation structure 3 comprises a plurality of phase modulation units arranged in an array, each phase modulation unit structure is a composite structure composed of metal and vanadium dioxide, the composite structure comprises a concentric inner ring 4 and an outer ring 5, and the inner ring 4 consists of a complementary metal opening ring 402 and VO 2 The split ring 401 is composed of an outer ring 5 made of VO 2 Wherein the symmetry axis of the metal split ring 402 is at a +45 deg. or-45 deg. to the x-axis and the symmetry axis of the outer ring 5 is at a +45 deg. or-45 deg. to the x-axis. By a means ofThe substrate of the composite microstructure array element adopts quartz, the thickness of the substrate is 100 mu m, and the side length is 270 mu m; VO (VO) 2 The thickness is 300nm, the metal material adopts gold, VO 2 And gold are 300nm thick; the outer ring radius is 115 μm, and the inner ring radius is 67 μm; all microstructure linewidths were 20 μm.
When vanadium oxide is in a medium state, the conductivity is about 30S/m, the effect is equal to that of the medium in a terahertz wave band, the transmissivity is high, when terahertz waves are vertically incident, as shown in fig. 3, the surface current is mainly distributed on the metal split ring, the electric field is concentrated at the two ends of the metal split ring due to LC resonance, and VO is generated at the moment 2 The method has little effect on THz waves, only the metal split ring has an independent modulation effect, and the polarization and phase modulation effect of the reflection field mainly depends on the parameter change of the metal split ring; VO when there is external physical stimulus 2 The phase change characteristics of (a) are excited, and the conductivity increases to about 3 x 10 x as the transition from the insulating state to the metal state occurs 5 S/m, the transmissivity is greatly reduced, as shown in figure 4, the surface current and the electric field are distributed on the inner ring and the outer ring, the reflection field is acted by the inner ring and the outer ring together, and the modulation effect is mainly dependent on the parameter change of the outer ring because the inner ring is similar to the metal closed ring.
As shown in fig. 1, in the dielectric state, when the x-direction (or y-direction) linear polarization (i.e. linear polarization) THz wave is vertically incident, due to the anisotropy of the metal split ring, the reflected wave undergoes polarization conversion and generates a certain phase shift, and by changing the size of the opening of the metal split ring, the cross polarization wave can realize 180 ° phase shift change. Similarly, in the metallic state, the outer ring provides anisotropy, the reflected wave undergoes polarization transformation and produces a certain phase shift, when we change the external VO 2 The size of the opening of the ring can realize 180 DEG phase shift change of the cross polarized wave in the metal state. As shown in fig. 5 and fig. 6, when the opening directions of the metal opening ring and the outer ring are +45° relative to the x-axis, four modulation units are respectively selected in two states by changing the corresponding opening sizes, the phase gradient is 45 °, the phase shift change of the cross polarization wave covers 180 °, and the working frequency bands cover the terahertz key frequency point of 0.34THz. At a frequency point of 0.34THzThe average amplitude of the dielectric state is about 0.75 and the average amplitude of the metal state is about 0.5.
Meanwhile, according to the geometric phase modulation principle, the C-shaped structure inclined at 45 degrees rotates by 90 degrees under the same opening size, namely, when the C-shaped structure is 45 degrees relative to the x-axis, the phase change can be increased by 180 degrees, and the amplitude is kept unchanged, so that the structure can realize independent 360-degree phase full coverage under two states, different functional designs can be carried out, and VO can be changed through external stimulation 2 The dynamic function switching is realized in the working state of (a). In addition, the modulation unit of the present invention is symmetrical about the x=y plane, so that not only the x-polarized (or y-polarized) terahertz wave is modulated, but also the circularly polarized terahertz wave is effective; further, the combination of the invention with convolution theory can further enrich the functional design thereof.
In conclusion, the dynamic multifunctional terahertz reflection array based on vanadium dioxide is a multifunctional terahertz wave band dynamic device with great development potential and practicality.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (7)
1. A dynamic multifunctional terahertz reflection array based on vanadium dioxide is characterized by comprising a back metal bottom plate (1),
A substrate (2), and a phase modulating structure (3) formed over the substrate;
the phase modulation structure (3) comprises a plurality of phase modulation unit structures which are arranged in an array manner;
the phase modulation unit structure is a composite structure composed of metal and a phase change material VO2;
the phase modulation unit structure comprises a concentric annular inner ring (4) and an outer ring (5), wherein the inner ring (4) is a closed ring body formed by a complementary metal split ring (402) and a VO2 split ring (401), and an opening is formed in one side of the outer ring (5);
VO2 is adopted as a material of the outer ring (5); the symmetry axis of the metal split ring (402) in the x-y plane forms an angle of +45 DEG or-45 DEG with the x-axis, and the symmetry axis of the outer ring (5) in the x-y plane forms an angle of +45 DEG or-45 DEG with the x-axis.
2. A dynamic multifunctional terahertz reflective array based on vanadium dioxide as claimed in claim 1, characterized in that the substrate (2) is one of quartz or sapphire.
3. The dynamic multifunctional terahertz reflection array based on vanadium dioxide as set forth in claim 1, wherein the back metal base plate (1) and the phase modulation structure (3) are made of one of gold, silver, copper or aluminum.
4. The dynamic multifunctional terahertz reflection array based on vanadium dioxide as set forth in claim 1, wherein the phase modulation structure (3) is an M x N type array composed of a plurality of modulation units, where M and N are positive integers; and M >3, N >3.
5. The dynamic multifunctional terahertz reflection array based on vanadium dioxide according to claim 1, wherein the reflection phases of VO2 in a dielectric state and a metal state are completely independent.
6. The dynamic multifunctional terahertz reflection array based on vanadium dioxide according to claim 1, wherein the function switching of terahertz waves is realized by controlling the state change of VO 2.
7. A method for preparing a dynamic multifunctional terahertz reflective array based on vanadium dioxide, which is characterized by being used for preparing the dynamic multifunctional terahertz reflective array based on vanadium dioxide as set forth in any one of claims 1-6, and comprising the following steps:
step one, determining VO2 as a modulation function required by a medium state and a metal state respectively, and then determining phase distribution required by the medium state and the metal state respectively, namely the phase required by the position of each unit structure according to the set modulation function and a three-dimensional phase modulation principle;
step two, determining a modulation phase value of each unit structure position according to the phase distribution required by the modulation function when VO2 is in a medium state, and changing the reflection phase of the terahertz wave by adjusting the size and the opening orientation of a metal opening ring in the unit structure at the corresponding position so as to realize the phase modulation of the corresponding unit structure in the medium state;
determining a modulation phase value of each unit structure position according to the phase distribution required by the modulation function when VO2 is in a metal state, and changing the reflection phase of terahertz waves by adjusting the opening size and the opening orientation of an outer ring in the unit structure at the corresponding position so as to realize the phase modulation of the corresponding unit structure in the metal state;
and fourthly, filling a VO2 microstructure at the opening of the metal opening ring in each unit structure, so that the inner ring becomes a complete closed ring, and the phase modulation effect of the two states has independence, thus the dynamic multifunctional terahertz reflection array can be obtained.
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| CN110492250A (en) * | 2019-07-31 | 2019-11-22 | 电子科技大学 | A kind of tunable super lens of flexibility based on the super surface of dynamic |
| CN113972498A (en) * | 2021-10-27 | 2022-01-25 | 中国计量大学 | Bidirectional double-frequency point terahertz modulator-controller |
| CN114094340A (en) * | 2021-10-29 | 2022-02-25 | 西安理工大学 | Vanadium dioxide P-B phase multifunctional artificial electromagnetic structure for lens antenna |
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| WO2014158107A1 (en) * | 2013-03-29 | 2014-10-02 | Haluk Kulah | Phase shifting method for reconfigurable transmitarrays and reflectarrays and a unit element thereof |
| CN113346249A (en) * | 2021-06-10 | 2021-09-03 | 西安电子科技大学 | Water-based interlayer super-surface adjustable coherent wave absorber |
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