CN113685829A

CN113685829A - Waste gas treatment device suitable for semiconductor manufacturing process

Info

Publication number: CN113685829A
Application number: CN202110920706.XA
Authority: CN
Inventors: 郑洪�
Original assignee: Shanghai Xie Micro Environment Technology Co Ltd
Current assignee: Shanghai Xie Micro Environment Technology Co Ltd
Priority date: 2021-08-11
Filing date: 2021-08-11
Publication date: 2021-11-23
Anticipated expiration: 2041-08-11
Also published as: CN113685829B

Abstract

The invention relates to the technical field of semiconductor manufacturing, and discloses a waste gas treatment device suitable for a semiconductor manufacturing process, which comprises a first pipeline and is characterized in that: the left end of the first pipeline is fixedly communicated with a waste gas inlet pipe, and an inner cavity of the first pipeline is fixedly connected with a first filter screen. The waste gas enters the first pipeline through the waste gas inlet pipe, and then high-voltage positive current and negative current are respectively connected to the positive electrode sleeve and the negative electrode column, so that dust particles in the waste gas in the positive electrode sleeve are combined with negative ions and are charged with negative electricity, and then discharge towards the surface of the inner wall of the positive electrode sleeve to remove dust in the gas, so that scaling of the inner wall of the combustion chamber is reduced, the connecting column is pressed downwards to push the cleaning disc to move downwards in the combustion chamber, and meanwhile, the cleaning disc is matched with the limiting block to be inserted in the spiral limiting groove, so that the cleaning disc rotates while moving downwards, the inner wall of the combustion chamber can be conveniently, quickly and comprehensively cleaned, and the scaling cleaning effect is further improved.

Description

Waste gas treatment device suitable for semiconductor manufacturing process

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a waste gas treatment device suitable for a semiconductor manufacturing process.

Background

The use of a variety of special gases and large amounts of acids or bases are required in semiconductor manufacturing processes, and a large amount of exhaust gases are used and generated in various processes of semiconductor manufacturing, and are collected and treated by an exhaust system to prevent direct discharge with serious consequences to the environment and human health.

In the process of implementing the invention, the inventor finds that at least the following problems in the prior art are not solved: the ashes and the high temperature of gaseous burnout in current combustion chamber cause the scale deposit to the combustion chamber inner wall easily, reduce the life of combustion chamber, generally carry out periodic cleaning to the combustion chamber, it is comparatively troublesome current to the combustion chamber clearance, the effect of clearance is relatively poor, still can reduce its life, in addition, the processing of waste gas is except that burning, generally adopts the washing to remove dust more, thereby can waste a large amount of water resources, consequently, we propose a waste gas treatment device who is applicable to semiconductor manufacturing process.

Disclosure of Invention

The present invention is directed to an exhaust gas treatment device for semiconductor manufacturing processes, which solves the problems of the related art.

In order to achieve the purpose, the invention provides the following technical scheme: an exhaust gas treatment device suitable for a semiconductor manufacturing process, comprising a first pipe, characterized in that: the waste gas inlet pipe is fixedly communicated with the left end of the first pipeline, the first filter screen is fixedly connected with the inner cavity of the first pipeline, the negative pole column is fixedly connected with the top of the first filter screen, the positive pole sleeve is fixedly connected with the inner wall of the first pipeline on the upper side of the first filter screen, the diversion chamber is fixedly communicated with the top of the first pipeline, the motor is fixedly installed at the left end of the diversion chamber, the motor shaft of the motor penetrates through the diversion chamber and is arranged in the inner cavity of the diversion chamber, the fan blade is fixedly connected with the motor shaft of the motor, the air pipe is fixedly communicated with the right end of the diversion chamber, the combustion chamber is fixedly communicated with the right end of the air pipe, the connecting pipe is fixedly communicated with the right end of the combustion chamber, the first air feeder is fixedly communicated with the right end of the connecting pipe, the second pipeline is fixedly communicated with the right end of the combustion chamber, and the supporting table is fixedly connected with the right end of the combustion chamber, the top of the supporting table is fixedly connected with an adsorption tank, the second pipeline is fixedly communicated with the adsorption tank, an inner cavity of the adsorption tank is fixedly connected with an adsorption plate, and the right end of the adsorption tank is fixedly communicated with an air outlet pipe;

the combustion chamber is characterized in that a through hole is formed in the top of the combustion chamber, limiting blocks are fixedly connected to the left end and the right end of an inner cavity of the through hole, a connecting column is inserted in the through hole, a spiral limiting groove is formed in the outer wall of the connecting column, the limiting blocks are inserted in the spiral limiting groove, a cleaning disc is fixedly connected to the bottom of the connecting column, and an igniter is fixedly mounted at the bottom of the cleaning disc.

As a preferred embodiment of the present invention, a first electromagnetic valve is fixedly installed in an inner cavity of the air pipe, an air inlet pipe is fixedly communicated with a lower side of a right end of the combustion chamber, a second electromagnetic valve and an air flow sensor are fixedly installed in the inner cavity of the air inlet pipe, a controller is fixedly installed on the combustion chamber, an output end of the air flow sensor is electrically connected in series with an input end of the controller through a wire, and an output end of the controller is electrically connected with input ends of the first electromagnetic valve and the second electromagnetic valve through wires.

In a preferred embodiment of the present invention, a second blower is fixedly mounted at a left end of the first duct, the second blower is fixedly communicated with a blast pipe, a circular duct is fixedly connected to an upper side of an inner wall of the first duct, the circular duct is provided with a blast opening, and the blast pipe is fixedly communicated with the circular duct.

As a preferred embodiment of the invention, the top of the connecting column is movably connected with a steel ball.

As a preferred embodiment of the present invention, a material guiding plate is fixedly connected to the bottom end of the inner cavity of the first pipeline, a sewage draining outlet is formed at the lower side of the right end of the first pipeline, and a sealing plug is inserted into the sewage draining outlet.

In a preferred embodiment of the present invention, a second filter is fixedly installed in the air supply opening.

As a preferred embodiment of the present invention, the left and right ends of the connecting column are both fixedly connected with damping rotating shafts, and the two damping rotating shafts are both hinged with supporting plates.

Compared with the prior art, the invention has the following beneficial effects:

1. the invention arranges the anode sleeve, the cathode column, the waste gas inlet pipe, the first filter screen, the motor, the fan blade, the combustion chamber, the connecting column, the through hole, the spiral limiting groove, the limiting block and the cleaning disc, the waste gas enters the first pipeline through the waste gas inlet pipe, then high-voltage positive current and negative current are respectively connected to the positive electrode sleeve and the negative electrode column, so that dust particles in the waste gas in the positive electrode sleeve are combined with negative ions and charged with negative electricity and then tend to the surface of the inner wall of the positive electrode sleeve to discharge to remove dust in the gas, thereby reducing the scaling of the inner wall of the combustion chamber, and the connecting column is pressed downwards to push the cleaning disc to move downwards in the combustion chamber, and meanwhile, the cleaning disc is inserted in the spiral limiting groove in cooperation with the limiting block, thereby when the cleaning disc moves down and rotate to can conveniently, rapidly and comprehensively clean the inner wall of the combustion chamber, and further improve the effect of scaling cleaning.

2. According to the invention, through the arrangement of the air flow sensor, the controller, the first electromagnetic valve and the second electromagnetic valve, when the combustion in the combustion chamber is about to finish, and the air quantity of air entering the combustion chamber through the air inlet pipe is smaller than the threshold value set by the air flow sensor, the first electromagnetic valve and the second electromagnetic valve are closed, so that when the gas pressure in the combustion chamber is further prevented from being reduced, the fire at the combustion point can spread towards the air source direction through the air pipe and the air inlet pipe to generate backfire, the generation of backfire and explosion are further prevented, and the safety is improved.

Drawings

Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:

FIG. 1 is a schematic view showing the overall structure of an exhaust gas treatment apparatus for semiconductor manufacturing processes according to the present invention;

FIG. 2 is a top view of a combustion chamber of an exhaust gas treatment device suitable for use in a semiconductor manufacturing process according to the present invention;

FIG. 3 is a front view of a connecting post and a supporting plate of an exhaust gas treatment device for a semiconductor manufacturing process according to the present invention;

fig. 4 is a bottom front view of a circular duct of an exhaust gas treatment device for a semiconductor manufacturing process according to the present invention.

In the figure: 1. a first conduit; 2. an exhaust gas inlet pipe; 3. a first filter screen; 4. a positive electrode sleeve; 5. a second blower; 6. a negative pole post; 7. an air supply pipe; 8. a circular conduit; 9. a motor; 10. a flow diversion chamber; 11. a fan blade; 12. an air tube; 13. a first electromagnetic valve; 14. an igniter; 15. connecting columns; 16. a spiral limit groove; 17. a steel ball; 18. cleaning the disc; 19. a combustion chamber; 20. a connecting pipe; 21. A first blower; 22. a second conduit; 23. an adsorption tank; 24. an adsorption plate; 25. an air outlet pipe; 26. A support table; 27. a second electromagnetic valve; 28. an air inlet pipe; 29. an air flow sensor; 30. A controller; 31. an air supply outlet; 32. a second filter screen; 33. a sealing plug; 34. a sewage draining outlet; 35. A material guide plate; 36. a through hole; 37. a limiting block; 38. a damping rotating shaft; 39. and a support plate.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention; in the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can, for example, be fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-4, the present invention provides a technical solution: a waste gas treatment device suitable for a semiconductor manufacturing process comprises a first pipeline 1, a waste gas inlet pipe 2 is fixedly communicated with the left end of the first pipeline 1, a first filter screen 3 is fixedly connected to the inner cavity of the first pipeline 1, a negative pole 6 is fixedly connected to the top of the first filter screen 3, a positive pole sleeve 4 is fixedly connected to the inner wall of the first pipeline 1 on the upper side of the first filter screen 3, a diversion chamber 10 is fixedly communicated with the top of the first pipeline 1, a motor 9 is fixedly mounted at the left end of the diversion chamber 10, a motor shaft of the motor 9 penetrates through the diversion chamber 10 and is arranged in the inner cavity of the diversion chamber 10, a fan blade 11 is fixedly connected to the motor shaft of the motor 9, a gas pipe 12 is fixedly communicated with the right end of the diversion chamber 10, a combustion chamber 19 is fixedly communicated with the right end of the gas pipe 12, a connecting pipe 20 is fixedly communicated with the right end of the combustion chamber 19, the right end of the connecting pipe 20 is fixedly communicated with a first blower 21, the right end of the first blower 21 is fixedly communicated with a second pipeline 22, the right end of the combustion chamber 19 is fixedly connected with a support table 26, the top of the support table 26 is fixedly connected with an adsorption tank 23, the second pipeline 22 is fixedly communicated with the adsorption tank 23, an inner cavity of the adsorption tank 23 is fixedly connected with an adsorption plate 24, and the right end of the adsorption tank 23 is fixedly communicated with an air outlet pipe 25;

through-hole 36 has been seted up at the top of combustion chamber 19, the equal fixedly connected with stopper 37 in both ends about the inner chamber of through-hole 36, it has spliced pole 15 to peg graft in the through-hole 36, spiral spacing groove 16 has been seted up to spliced pole 15's outer wall, two stopper 37 all pegs graft in spiral spacing groove 16, the bottom fixedly connected with cleaning disc 18 of spliced pole 15, the bottom fixed mounting of cleaning disc 18 has some firearm 14, through the setting of anodal sleeve 4, negative pole post 6, waste gas advance pipe 2, first filter screen 3, motor 9, flabellum 11, combustion chamber 19, spliced pole 15, through-hole 36, spiral spacing groove 16, stopper 37 and cleaning disc 18, waste gas advances the pipe 2 through waste gas and gets into in the first pipeline 1, then insert high-pressure positive pole electric current and negative pole electric current respectively to anodal sleeve 4 and negative pole 6 combine to take on the negative electricity with the dust particle in the waste gas in the anodal sleeve 4 and tend to the inner wall surface of anodal sleeve 4 to put Electricity and the dust of detached gas to reduce the scale deposit of combustion chamber 19 inner wall, and press down spliced pole 15 and promote cleaning disc 18 and move down in combustion chamber 19, cooperate stopper 37 to peg graft in spiral spacing groove 16 simultaneously, thereby rotate when cleaning disc 18 moves down, thereby can carry out convenient quick comprehensive cleanness to combustion chamber 19 inner wall, further improvement scale deposit clear effect.

In this embodiment (see fig. 1), a first electromagnetic valve 13 is fixedly installed in an inner cavity of the air pipe 12, an air inlet pipe 28 is fixedly communicated with a lower side of a right end of the combustion chamber 19, a second electromagnetic valve 27 and an air flow sensor 29 are fixedly installed in the inner cavity of the air inlet pipe 28, a controller 30 is fixedly installed on the combustion chamber 19, an output end of the air flow sensor 29 is electrically connected in series with an input end of the controller 30 through a lead, an output end of the controller 30 is electrically connected with input ends of the first electromagnetic valve 13 and the second electromagnetic valve 27 through leads, through the arrangement of the air flow sensor 29, the controller 30, the first electromagnetic valve 13 and the second electromagnetic valve 27, when combustion in the combustion chamber 19 is about to end, and thus when an amount of air entering the combustion chamber 19 through the air inlet pipe 28 is smaller than a threshold value set by the air flow sensor 29, therefore, the first electromagnetic valve 13 and the second electromagnetic valve 27 are closed, and further, when the gas pressure in the combustion chamber 19 is prevented from being reduced, the fire at the combustion point can spread towards the gas source direction through the gas pipe 12 and the air inlet pipe 28 to generate backfire, further, the generation of backfire and explosion are prevented, and the safety is improved.

In this embodiment (please refer to fig. 1 and 4), a second blower 5 is fixedly mounted at the left end of the first pipeline 1, a blower pipe 7 is fixedly communicated with the second blower 5, a circular conduit 8 is fixedly connected to the upper side of the inner wall of the first pipeline 1, an air outlet 31 is formed in the circular conduit 8, the blower pipe 7 is fixedly communicated with the circular conduit 8, and the second blower 5, the blower pipe 7, the circular conduit 8 and the air outlet 31 are arranged to start the second blower 5 to blow air out from the air outlet 31, so that the air can separate dust adsorbed on the inner wall of the anode sleeve 4 from the anode sleeve 4, and further the dust adsorbed on the anode sleeve 4 can be conveniently cleaned.

In this embodiment (see fig. 3), the top of the connecting column 15 is movably connected with a steel ball 17, and the steel ball 17 reduces the friction between the hand of the operator and the connecting column 15, thereby facilitating the rotation of the connecting column 15.

In this embodiment (please refer to fig. 1), a material guide plate 35 is fixedly connected to the bottom end of the inner cavity of the first pipeline 1, a sewage discharge outlet 34 is formed in the lower side of the right end of the first pipeline 1, a sealing plug 33 is inserted into the sewage discharge outlet 34, and the sealing plug 33 is pulled out from the sewage discharge outlet 34, so that the material guide plate 35 is matched to rapidly discharge dust in the first pipeline 1 out of the first pipeline 1.

In this embodiment (see fig. 4), a second filter 32 is fixedly installed in the air supply opening 31, and the air supply opening 31 can be prevented from being blocked by dust through the arrangement of the second filter 32.

In this embodiment (see fig. 3), the left and right ends of the connecting column 15 are both fixedly connected with damping rotating shafts 38, the two damping rotating shafts 38 are both hinged with supporting plates 39, and the supporting plates 39 are rotated by the damping rotating shafts 38 to support the supporting plates 39 at the top of the combustion chamber 19, so as to support the connecting column 15 and prevent the connecting column 15 from automatically descending.

When the waste gas treatment device suitable for the semiconductor manufacturing process is used, it should be noted that the invention is a waste gas treatment device suitable for the semiconductor manufacturing process, which comprises a first pipeline 1, a waste gas inlet pipe 2, a first filter screen 3, an anode sleeve 4, a second blower 5, a cathode column 6, an air supply pipe 7, a circular guide pipe 8, a motor 9, a diversion chamber 10, fan blades 11, an air pipe 12, a first electromagnetic valve 13, an igniter 14, a connecting column 15, a spiral limiting groove 16, a steel ball 17, a cleaning disc 18, a combustion chamber 19, a connecting pipe 20, a first blower 21, a second pipeline 22, an adsorption box 23, an adsorption plate 24, an air outlet pipe 25, a support table 26, a second electromagnetic valve 27, an air inlet pipe 28, an air flow sensor 29, a controller 30, an air supply outlet 31, a second filter screen 32, a sealing plug 33, a sewage outlet 34, a material guide plate 35, a sewage guide plate 32, a second filter plate and a filter plate, The through hole 36, the limiting block 37, the damping rotating shaft 38 and the supporting plate 39 are all universal standard parts or parts known to those skilled in the art, and the structure and principle of the parts can be known by technical manuals or by conventional experimental methods.

When in use, firstly, waste gas enters the first pipeline 1 through the waste gas inlet pipe 2, then high-voltage positive current and negative current are respectively connected to the positive electrode sleeve 4 and the negative electrode column 6, so that dust particles in the waste gas in the positive electrode sleeve 4 and negative ions are combined to be charged with negative electricity and then tend to the inner wall surface of the positive electrode sleeve 4 to discharge electricity to remove dust in the gas, then the motor 9 is started to drive the fan blades 11 to rotate at high speed to enable the dust-removed waste gas to enter the combustion chamber 19 through the pipeline 12, then the waste gas is burnt through the igniter 14, so that the scaling of the inner wall of the combustion chamber 19 is reduced, when the inner wall of the combustion chamber 19 is scaled, the palm presses the top of the steel ball 17, then the connecting column 15 is pressed downwards to push the cleaning disc 18 to move downwards in the combustion chamber 19, and meanwhile, the limiting block 37 is matched with the spiral limiting groove 16 to be inserted in the spiral limiting groove 16, so that the cleaning disc 18 rotates while moving downwards, cooperation steel ball 17 reduces operating personnel hand and spliced pole 15's frictional force, thereby be favorable to spliced pole 15 to rotate, thereby can make things convenient for quick comprehensive cleanness to the 19 inner walls of combustion chamber, further improvement scale deposit clear effect, when the burning is ended soon in the combustion chamber 19, thereby when the air enters the air volume that pipe 28 enters into in the combustion chamber 19 through the air and is less than the threshold value that air flow sensor 29 set for, thereby close first solenoid valve 13 and second solenoid valve 27, further when avoiding the gas pressure reduction in the combustion chamber 19, the fire of burning point can advance pipe 28 through trachea 12 and air and stretch to the air supply direction and produce the tempering, further avoid producing the tempering and explode, the security is improved.

While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. An exhaust gas treatment device suitable for a semiconductor manufacturing process, comprising a first pipe (1), characterized in that: the waste gas inlet pipe (2) is fixedly communicated with the left end of the first pipeline (1), the first filter screen (3) is fixedly connected with the inner cavity of the first pipeline (1), the negative pole column (6) is fixedly connected with the top of the first filter screen (3), the positive pole sleeve (4) is fixedly connected with the inner wall of the first pipeline (1) at the upper side of the first filter screen (3), the diversion chamber (10) is fixedly communicated with the top of the first pipeline (1), the motor (9) is fixedly installed at the left end of the diversion chamber (10), the motor shaft of the motor (9) penetrates through the diversion chamber (10) and is arranged in the inner cavity of the diversion chamber (10), the fan blades (11) are fixedly connected with the motor shaft of the motor (9), the air pipe (12) is fixedly communicated with the right end of the diversion chamber (10), the combustion chamber (19) is fixedly communicated with the right end of the combustion chamber (19), and the connecting pipe (20) is fixedly communicated with the right end of the combustion chamber (19), the right end of the connecting pipe (20) is fixedly communicated with a first air feeder (21), the right end of the first air feeder (21) is fixedly communicated with a second pipeline (22), the right end of the combustion chamber (19) is fixedly connected with a supporting table (26), the top of the supporting table (26) is fixedly connected with an adsorption tank (23), the second pipeline (22) is fixedly communicated with the adsorption tank (23), an inner cavity of the adsorption tank (23) is fixedly connected with an adsorption plate (24), and the right end of the adsorption tank (23) is fixedly communicated with an air outlet pipe (25);

through-hole (36) have been seted up at the top of combustion chamber (19), equal fixedly connected with stopper (37) in both ends about the inner chamber of through-hole (36), it has spliced pole (15) to peg graft in through-hole (36), spiral spacing groove (16) have been seted up to the outer wall of spliced pole (15), two stopper (37) are all pegged graft in spiral spacing groove (16), the bottom fixedly connected with cleaning disc (18) of spliced pole (15), the bottom fixed mounting of cleaning disc (18) has some firearm (14).

2. The exhaust gas treatment device according to claim 1, wherein: inner chamber fixed mounting of trachea (12) has first solenoid valve (13), the fixed intercommunication of the right-hand member downside of combustion chamber (19) has the air to advance tub (28), the inner chamber fixed mounting that the air advances tub (28) has second solenoid valve (27) and air flow sensor (29), fixed mounting has controller (30) on combustion chamber (19), the output of air flow sensor (29) passes through the wire and establishes ties with the input electric property of controller (30), the output of controller (30) pass through the wire respectively with the input electric connection of first solenoid valve (13) and second solenoid valve (27).

3. The exhaust gas treatment device according to claim 1, wherein: the left end fixed mounting of first pipeline (1) has second forced draught blower (5), fixed intercommunication has blast pipe (7) on second forced draught blower (5), the circular pipe (8) of inner wall upside fixedly connected with of first pipeline (1), supply-air outlet (31) have been seted up on circular pipe (8), blast pipe (7) and circular pipe (8) fixed intercommunication.

4. The exhaust gas treatment device according to claim 1, wherein: the top of the connecting column (15) is movably connected with a steel ball (17).

5. The exhaust gas treatment device according to claim 1, wherein: the inner chamber bottom fixedly connected with stock guide (35) of first pipeline (1), drain (34) have been seted up to the right-hand member downside of first pipeline (1), it has sealing plug (33) to peg graft in drain (34).

6. The exhaust gas treatment device according to claim 3, wherein: and a second filter screen (32) is fixedly arranged in the air supply outlet (31).

7. The exhaust gas treatment device according to claim 1, wherein: the equal fixedly connected with damping pivot (38) in both ends about spliced pole (15), two all articulated backup pad (39) in going up of damping pivot (38).