CN113685829B - Exhaust gas treatment device suitable for semiconductor manufacturing process - Google Patents

Exhaust gas treatment device suitable for semiconductor manufacturing process Download PDF

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Publication number
CN113685829B
CN113685829B CN202110920706.XA CN202110920706A CN113685829B CN 113685829 B CN113685829 B CN 113685829B CN 202110920706 A CN202110920706 A CN 202110920706A CN 113685829 B CN113685829 B CN 113685829B
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China
Prior art keywords
pipeline
fixedly connected
combustion chamber
pipe
semiconductor manufacturing
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CN202110920706.XA
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Chinese (zh)
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CN113685829A (en
Inventor
郑洪�
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Shanghai Xie Micro Environment Technology Co ltd
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Shanghai Xie Micro Environment Technology Co ltd
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Priority to CN202110920706.XA priority Critical patent/CN113685829B/en
Publication of CN113685829A publication Critical patent/CN113685829A/en
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Publication of CN113685829B publication Critical patent/CN113685829B/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/04—Plant or installations having external electricity supply dry type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/50—Control or safety arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J1/00—Removing ash, clinker, or slag from combustion chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2201/00—Pretreatment
    • F23G2201/60—Separating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2207/00—Control
    • F23G2207/30—Oxidant supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2208/00—Safety aspects
    • F23G2208/10—Preventing or abating fire or explosion, e.g. by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes

Abstract

The invention relates to the technical field of semiconductor manufacturing, and discloses an exhaust gas treatment device suitable for a semiconductor manufacturing process, which comprises a first pipeline and is characterized in that: the left end of the first pipeline is fixedly communicated with an exhaust gas inlet pipe, and the inner cavity of the first pipeline is fixedly connected with a first filter screen. According to the invention, waste gas enters the first pipeline through the waste gas inlet pipe, and then the high-voltage positive current and the high-voltage negative current are respectively connected to the positive electrode sleeve and the negative electrode column, so that dust particles in the waste gas in the positive electrode sleeve and negative ions are combined and negatively charged, and then the dust particles tend to discharge on the surface of the inner wall of the positive electrode sleeve, so that the scaling of the inner wall of a combustion chamber is reduced, the connecting column is pressed downwards to push the cleaning disc to move downwards in the combustion chamber, and meanwhile, the cleaning disc is matched with the limiting block to be inserted into the spiral limiting groove, so that the cleaning disc moves downwards and rotates, the inner wall of the combustion chamber can be cleaned conveniently, quickly and comprehensively, and the scaling cleaning effect is further improved.

Description

Exhaust gas treatment device suitable for semiconductor manufacturing process
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to an exhaust gas treatment device suitable for a semiconductor manufacturing process.
Background
The use of a plurality of special gases and a large amount of acid or alkali are required in the semiconductor manufacturing process, and a large amount of exhaust gas is used and generated in different processes of semiconductor manufacturing, and is collected and treated by an exhaust system to prevent serious consequences of direct discharge to the environment and physical health of people.
In the process of implementing the present invention, the inventor finds that at least the following problems in the prior art are not solved: the ash burnt out by the gas in the existing combustion chamber and the high temperature easily cause scaling on the inner wall of the combustion chamber, the service life of the combustion chamber is reduced, the combustion chamber is generally cleaned regularly, the existing combustion chamber is more troublesome to clean, the cleaning effect is poor, the service life of the combustion chamber is still reduced, in addition, besides the combustion, the waste gas is generally cleaned by water washing to remove dust, so that a large amount of water resources can be wasted, and therefore, the waste gas treatment device suitable for the semiconductor manufacturing process is provided.
Disclosure of Invention
The invention aims to provide an exhaust gas treatment device suitable for a semiconductor manufacturing process, and solves the problems in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions: an exhaust treatment device suitable for semiconductor manufacturing process, includes first pipeline, its characterized in that: the exhaust gas treatment device comprises a first pipeline, a first filter screen, a negative pole column, a positive pole sleeve, a diversion chamber, a motor, an adsorption box, an adsorption plate and an air outlet pipe, wherein the left end of the first pipeline is fixedly connected with an exhaust gas inlet pipe, the inner cavity of the first pipeline is fixedly connected with the first filter screen, the top of the first filter screen is fixedly connected with the negative pole column, the inner wall of the first pipeline on the upper side of the first filter screen is fixedly connected with the positive pole sleeve, the top of the first pipeline is fixedly connected with the diversion chamber, the motor is fixedly connected with the left end of the diversion chamber, the motor shaft penetrates through the inner cavity of the diversion chamber, which is arranged in the diversion chamber, of the motor, the motor shaft is fixedly connected with the fan blade, the right end of the diversion chamber is fixedly connected with the air pipe, the right end of the air pipe is fixedly connected with the combustion chamber, the right end of the combustion chamber is fixedly connected with the connecting pipe, the right end of the connecting pipe is fixedly connected with the first air feeder, the right end of the first air feeder is fixedly connected with the second pipeline, the right end of the combustion chamber is fixedly connected with a supporting table, the top of the adsorption box is fixedly connected with the adsorption box, and the adsorption plate is fixedly connected with the right outlet pipe of the adsorption plate;
the utility model discloses a combustion chamber, including the combustion chamber, the through-hole has been seted up at the top of combustion chamber, both ends all fixedly connected with stopper about the inner chamber of through-hole, peg graft in the through-hole has the spliced pole, spiral spacing groove has been seted up to the outer wall of spliced pole, two the stopper is all pegged graft in the spiral spacing inslot, the bottom fixedly connected with cleaning disc of spliced pole, the bottom fixed mounting of cleaning disc has the some firearm.
As a preferred implementation mode of the invention, the inner cavity of the air pipe is fixedly provided with the first electromagnetic valve, the lower side of the right end of the combustion chamber is fixedly communicated with the air inlet pipe, the inner cavity of the air inlet pipe is fixedly provided with the second electromagnetic valve and the air flow sensor, the combustion chamber is fixedly provided with the controller, the output end of the air flow sensor is electrically connected with the input end of the controller in series through a wire, and the output end of the controller is respectively electrically connected with the input ends of the first electromagnetic valve and the second electromagnetic valve through wires.
As a preferred embodiment of the invention, a second air feeder is fixedly arranged at the left end of the first pipeline, an air supply pipe is fixedly communicated with the second air feeder, a circular guide pipe is fixedly connected to the upper side of the inner wall of the first pipeline, an air supply opening is formed in the circular guide pipe, and the air supply pipe is fixedly communicated with the circular guide pipe.
As a preferable implementation mode of the invention, the top of the connecting column is movably connected with a steel ball.
As a preferred embodiment of the invention, the bottom end of the inner cavity of the first pipeline is fixedly connected with a guide plate, the lower side of the right end of the first pipeline is provided with a drain outlet, and a sealing plug is inserted into the drain outlet.
As a preferred embodiment of the present invention, a second filter screen is fixedly installed in the air supply port.
As a preferred embodiment of the invention, the left end and the right end of the connecting column are fixedly connected with damping rotating shafts, and the upper parts of the two damping rotating shafts are hinged with supporting plates.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, through the arrangement of the positive electrode sleeve, the negative electrode column, the waste gas inlet pipe, the first filter screen, the motor, the fan blade, the combustion chamber, the connecting column, the through hole, the spiral limit groove, the limiting block and the cleaning disc, waste gas enters the first pipeline through the waste gas inlet pipe, and then the positive electrode sleeve and the negative electrode column are respectively connected with high-voltage positive electrode current and negative electrode current, so that dust particles in the waste gas in the positive electrode sleeve and negative ions are combined with negative electricity and then tend to discharge on the surface of the inner wall of the positive electrode sleeve to remove dust of the gas, thereby reducing the scale formation on the inner wall of the combustion chamber, and the connecting column is pressed downwards to push the cleaning disc to move downwards in the combustion chamber, and meanwhile, the limiting block is matched with the limiting block to be inserted in the spiral limit groove, so that the inner wall of the combustion chamber can be cleaned conveniently, rapidly and comprehensively, and further the scale formation cleaning effect is improved.
2. According to the invention, through the arrangement of the air flow sensor, the controller, the first electromagnetic valve and the second electromagnetic valve, when combustion in the combustion chamber is finished, and the air quantity entering the combustion chamber through the air inlet pipe is smaller than the threshold value set by the air flow sensor, the first electromagnetic valve and the second electromagnetic valve are closed, so that backfire generated by the fire of the combustion point in the direction of the air source through the air pipe and the air inlet pipe when the gas pressure in the combustion chamber is further prevented from being reduced, and further the backfire is prevented from being generated to explode, and the safety is improved.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram showing the overall structure of an exhaust gas treatment apparatus suitable for use in a semiconductor manufacturing process according to the present invention;
FIG. 2 is a top view of a combustion chamber of an exhaust gas treatment device suitable for use in a semiconductor manufacturing process in accordance with the present invention;
fig. 3 is a front view showing connection between a connection post and a support plate of an exhaust gas treatment apparatus suitable for use in a semiconductor manufacturing process according to the present invention;
fig. 4 is a front view of the bottom of a circular duct of an exhaust gas treatment device suitable for use in a semiconductor manufacturing process according to the present invention.
In the figure: 1. a first pipe; 2. an exhaust gas inlet pipe; 3. a first filter screen; 4. a positive electrode sleeve; 5. a second blower; 6. a negative electrode column; 7. an air supply pipe; 8. a circular conduit; 9. a motor; 10. a diversion chamber; 11. a fan blade; 12. an air pipe; 13. a first electromagnetic valve; 14. an igniter; 15. a connecting column; 16. a spiral limit groove; 17. a steel ball; 18. a cleaning plate; 19. a combustion chamber; 20. a connecting pipe; 21. a first blower; 22. a second pipe; 23. an adsorption box; 24. an adsorption plate; 25. an air outlet pipe; 26. a support table; 27. a second electromagnetic valve; 28. an air inlet pipe; 29. an air flow sensor; 30. a controller; 31. an air supply port; 32. a second filter screen; 33. a sealing plug; 34. a sewage outlet; 35. a material guide plate; 36. a through hole; 37. a limiting block; 38. damping the rotating shaft; 39. and a support plate.
Detailed Description
The invention is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention; in the description of the present invention, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "disposed" are to be construed broadly, and may be fixedly connected, disposed, or detachably connected, disposed, or integrally connected, disposed, for example. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Referring to fig. 1-4, the present invention provides a technical solution: the utility model provides an exhaust treatment device suitable for semiconductor manufacturing process, including first pipeline 1, the left end fixedly connected with waste gas advances pipe 2 of first pipeline 1, the inner chamber fixedly connected with first filter screen 3 of first pipeline 1, the top fixedly connected with negative pole post 6 of first filter screen 3, the first pipeline 1 inner wall fixedly connected with positive pole sleeve 4 of first filter screen 3 upside, the top fixedly connected with current transfer chamber 10 of first pipeline 1, the left end fixedly connected with motor 9 of current transfer chamber 10, the motor shaft of motor 9 runs through current transfer chamber 10 and arranges in the inner chamber of current transfer chamber 10, the motor shaft fixedly connected with flabellum 11 of motor 9, the right-hand member fixedly connected with trachea 12 of current transfer chamber 10, the right-hand member fixedly connected with combustion chamber 19 of trachea 12, the right-hand member fixedly connected with connecting pipe 20, the right-hand member fixedly connected with first forced draught blower 21 of connecting pipe 21, the right-hand member fixedly connected with second pipeline 22 of combustion chamber 19, right-hand member fixedly connected with supporting table 26, supporting table 23 fixedly connected with second adsorption box 23, the adsorption box 23 fixedly connected with adsorption box 23;
the top of combustion chamber 19 has seted up through-hole 36, both ends all fixedly connected with stopper 37 about the inner chamber of through-hole 36, the spliced pole 15 has been inserted to through-hole 36, spiral spacing groove 16 has been seted up to the outer wall of spliced pole 15, two stopper 37 all peg graft in spiral spacing groove 16, the bottom fixedly connected with cleaning disc 18 of spliced pole 15, the bottom fixed mounting of cleaning disc 18 has the some firearm 14, through anodal sleeve 4, negative pole post 6, waste gas advances tub 2, first filter screen 3, motor 9, flabellum 11, combustion chamber 19, spliced pole 15, through-hole 36, spiral spacing groove 16, stopper 37 and cleaning disc 18's setting, waste gas enters into first pipeline 1 through waste gas advances tub 2, then inserts high-voltage anodal electric current and negative pole electric current respectively to anodal sleeve 4 and negative pole electric current, thereby dust particle and negative ion in the interior waste gas of anodal sleeve 4 combine and trend anodal sleeve 4 after the negative ion and go up the inner wall surface discharge of negative electricity and get rid of gas, thereby reduce the scale deposit of combustion chamber 19 inner wall, and promote down and connect the scale deposit 15 to clean the inner wall of combustion chamber 19, thereby clean the inner wall 19 and clean the scale deposit that the inner wall of combustion chamber 19 is carried out in the clean room 19 simultaneously, and the clean effect of the promotion is realized in the inner wall 19 and the clean room 19 is moved down in the spiral spacing groove 19, thereby the inner wall is realized and the cleaning disc is more completely, and the inner wall is moved down in the cleaning chamber is more convenient to the side of the inner wall is moved to the inner wall is 19.
In this embodiment (refer to fig. 1), the inner cavity of the air pipe 12 is fixedly provided with the first electromagnetic valve 13, the lower side of the right end of the combustion chamber 19 is fixedly connected with the air inlet pipe 28, the inner cavity of the air inlet pipe 28 is fixedly provided with the second electromagnetic valve 27 and the air flow sensor 29, the combustion chamber 19 is fixedly provided with the controller 30, the output end of the air flow sensor 29 is electrically connected in series with the input end of the controller 30 through a wire, the output end of the controller 30 is electrically connected with the input ends of the first electromagnetic valve 13 and the second electromagnetic valve 27 through the wire respectively, and by the arrangement of the air flow sensor 29, the controller 30, the first electromagnetic valve 13 and the second electromagnetic valve 27, when the combustion in the combustion chamber 19 is finished, the air amount entering the combustion chamber 19 through the air inlet pipe 28 is smaller than the threshold value set by the air flow sensor 29, thereby closing the first electromagnetic valve 13 and the second electromagnetic valve 27, further avoiding the occurrence of backfire of the combustion point in the combustion chamber 19 in the direction of the air inlet pipe 12 and the air inlet pipe 28, and further avoiding the backfire of the combustion point from spreading to the air source.
In this embodiment (refer to fig. 1 and fig. 4), the left end of the first pipe 1 is fixedly provided with the second blower 5, the second blower 5 is fixedly connected with the air supply pipe 7, the upper side of the inner wall of the first pipe 1 is fixedly connected with the circular duct 8, the circular duct 8 is provided with the air supply port 31, the air supply pipe 7 is fixedly connected with the circular duct 8, and the second blower 5 is started to blow out air from the air supply port 31 through the arrangement of the second blower 5, the air supply pipe 7, the circular duct 8 and the air supply port 31, so that the air can separate dust adsorbed on the inner wall of the positive electrode sleeve 4 from the positive electrode sleeve 4, and further cleaning of dust adsorbed in the positive electrode sleeve 4 is facilitated.
In this embodiment (refer to fig. 3), the steel ball 17 is movably connected to the top of the connecting post 15, and friction between the hands of the operator and the connecting post 15 is reduced by the steel ball 17, so that the connecting post 15 is facilitated to rotate.
In this embodiment (refer to fig. 1), the bottom end of the inner cavity of the first pipe 1 is fixedly connected with a guide plate 35, a drain outlet 34 is formed at the lower side of the right end of the first pipe 1, a sealing plug 33 is inserted into the drain outlet 34, and the sealing plug 33 is pulled out from the drain outlet 34, so that dust in the first pipe 1 can be quickly discharged out of the first pipe 1 by matching with the guide plate 35.
In this embodiment (refer to fig. 4), the second filter 32 is fixedly installed in the air supply opening 31, and the air supply opening 31 can be prevented from being blocked by dust through the arrangement of the second filter 32.
In this embodiment (refer to fig. 3), the left and right ends of the connecting post 15 are fixedly connected with damping rotating shafts 38, the upper parts of the two damping rotating shafts 38 are hinged with supporting plates 39, and the supporting plates 39 are supported at the top of the combustion chamber 19 by rotating the supporting plates 39 through the damping rotating shafts 38, so that the connecting post 15 is supported, and the automatic lowering of the connecting post 15 is avoided.
When an exhaust gas treatment device suitable for use in a semiconductor manufacturing process is used, it should be noted that the present invention is an exhaust gas treatment device suitable for use in a semiconductor manufacturing process, including a first pipe 1, an exhaust gas inlet pipe 2, a first filter screen 3, a positive electrode sleeve 4, a second blower 5, a negative electrode column 6, a blast pipe 7, a circular conduit 8, a motor 9, a diversion chamber 10, a fan blade 11, an air pipe 12, a first electromagnetic valve 13, an igniter 14, a connecting column 15, a spiral limit groove 16, a steel ball 17, a cleaning disc 18, a combustion chamber 19, a connecting pipe 20, a first blower 21, a second pipe 22, an adsorption box 23, an adsorption plate 24, an air outlet pipe 25, a support table 26, a second electromagnetic valve 27, an air inlet pipe 28, an air flow sensor 29, a controller 30, a blast opening 31, a second filter screen 32, a sealing plug 33, a drain 34, a guide plate 35, a through hole 36, a stopper 37, a damping shaft 38, a support plate 39, all of which are components known to a general standard or a person skilled in the art, whose structure and principle are known to the person through a manual or a conventional method.
When the air conditioner is used, firstly, waste gas enters the first pipeline 1 through the waste gas inlet pipe 2, then high-voltage positive current and negative current are respectively connected to the positive electrode sleeve 4 and the negative electrode column 6, dust particles in the waste gas in the positive electrode sleeve 4 and negative ions are combined and charged, then the dust particles tend to discharge on the surface of the inner wall of the positive electrode sleeve 4, and then the fan blade 11 is driven by the starting motor 9 to rotate at a high speed, the dust-removed waste gas enters the combustion chamber 19 through the pipeline 12, then the waste gas is burnt through the igniter 14, so that scaling of the inner wall of the combustion chamber 19 is reduced, when scaling is generated on the inner wall of the combustion chamber 19, the palm is pressed on the top of the steel ball 17, then the connecting column 15 is pressed downwards, the cleaning disc 18 is pushed to move downwards in the combustion chamber 19, and meanwhile the limiting block 37 is inserted into the spiral limiting groove 16, so that the cleaning disc 18 moves downwards and rotates simultaneously, the friction force between hands of operators and the connecting column 15 is reduced through the steel ball 17, the inner wall of the combustion chamber 19 is facilitated to rotate, the combustion chamber 19 is further improved, the scaling effect is further improved, and when the air is blown into the combustion chamber 19 through the valve 19, the air conditioner is further prevented from being blown to the air inlet valve 28, and the air conditioner is further blown to the air conditioner is prevented from being blown into the combustion chamber through the second electromagnetic valve 28, and the air heater is further blown to the air valve 28, and the air conditioner is prevented from being blown into the combustion valve, and the air is further blown into the air valve is further and the air valve is further and the air valve is prevented from being blown into the air valve and the air valve.
While the fundamental and principal features of the invention and advantages of the invention have been shown and described, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims (7)

1. An exhaust gas treatment device suitable for a semiconductor manufacturing process, comprising a first pipe (1), characterized in that: the utility model discloses a vacuum cleaner, including first pipeline (1), second pipeline (1), first pipeline (2) are fixed to left end intercommunication, inner chamber fixedly connected with first filter screen (3) of first pipeline (1), first filter screen (3) are connected with negative pole post (6) in top fixedly connected with, first pipeline (3) are connected with positive pole sleeve (4) in inner wall fixedly connected with of first pipeline (1), first pipeline (1) are connected with diversion chamber (10) in top fixedly connected with, diversion chamber (10) are fixed with motor (9), motor shaft of motor (9) runs through in diversion chamber (10) and arranges in diversion chamber (10)'s inner chamber, motor shaft fixedly connected with flabellum (11) in motor shaft (9), diversion chamber (10) are connected with trachea (12) in right-hand member fixedly connected with, combustion chamber (19) are connected with in right-hand member fixedly connected with connecting pipe (20) in right-hand member fixedly connected with of trachea (12), first pipeline (21) are connected with first pipeline (21) in right-hand member fixedly connected with, second pipeline (26) are connected with top fixedly connected with fan (23), the second pipeline (22) is fixedly communicated with the adsorption box (23), an inner cavity of the adsorption box (23) is fixedly connected with an adsorption plate (24), and the right end of the adsorption box (23) is fixedly communicated with an air outlet pipe (25);
the utility model discloses a clean dish of combustion chamber, including burning chamber (19), through-hole (36) have been seted up at the top of burning chamber (19), both ends all fixedly connected with stopper (37) about the inner chamber of through-hole (36), connecting column (15) have been inserted in through-hole (36), spiral spacing groove (16) have been seted up to the outer wall of connecting column (15), two stopper (37) all peg graft in spiral spacing groove (16), the bottom fixedly connected with cleaning dish (18) of connecting column (15), the bottom fixed mounting of cleaning dish (18) has some igniters (14).
2. An exhaust gas treatment device suitable for use in a semiconductor manufacturing process as claimed in claim 1, wherein: the inner cavity of the air pipe (12) is fixedly provided with a first electromagnetic valve (13), the lower side of the right end of the combustion chamber (19) is fixedly communicated with an air inlet pipe (28), the inner cavity of the air inlet pipe (28) is fixedly provided with a second electromagnetic valve (27) and an air flow sensor (29), the combustion chamber (19) is fixedly provided with a controller (30), the output end of the air flow sensor (29) is electrically connected with the input end of the controller (30) in series through a wire, and the output end of the controller (30) is electrically connected with the input ends of the first electromagnetic valve (13) and the second electromagnetic valve (27) through wires respectively.
3. An exhaust gas treatment device suitable for use in a semiconductor manufacturing process as claimed in claim 1, wherein: the novel air supply device is characterized in that a second air feeder (5) is fixedly arranged at the left end of the first pipeline (1), an air supply pipe (7) is fixedly communicated with the second air feeder (5), a circular guide pipe (8) is fixedly connected to the upper side of the inner wall of the first pipeline (1), an air supply opening (31) is formed in the circular guide pipe (8), and the air supply pipe (7) is fixedly communicated with the circular guide pipe (8).
4. An exhaust gas treatment device suitable for use in a semiconductor manufacturing process as claimed in claim 1, wherein: the top of the connecting column (15) is movably connected with a steel ball (17).
5. An exhaust gas treatment device suitable for use in a semiconductor manufacturing process as claimed in claim 1, wherein: the inner cavity bottom fixedly connected with stock guide (35) of first pipeline (1), drain (34) have been seted up to the right-hand member downside of first pipeline (1), peg graft in drain (34) have sealing plug (33).
6. An exhaust gas treatment device suitable for use in a semiconductor manufacturing process according to claim 3, wherein: a second filter screen (32) is fixedly arranged in the air supply opening (31).
7. An exhaust gas treatment device suitable for use in a semiconductor manufacturing process as claimed in claim 1, wherein: damping rotating shafts (38) are fixedly connected to the left end and the right end of the connecting column (15), and support plates (39) are hinged to the upper portions of the two damping rotating shafts (38).
CN202110920706.XA 2021-08-11 2021-08-11 Exhaust gas treatment device suitable for semiconductor manufacturing process Active CN113685829B (en)

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CN113685829B true CN113685829B (en) 2023-07-21

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Citations (8)

* Cited by examiner, † Cited by third party
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