CN113635463A - Cutting device - Google Patents

Cutting device Download PDF

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Publication number
CN113635463A
CN113635463A CN202110498751.0A CN202110498751A CN113635463A CN 113635463 A CN113635463 A CN 113635463A CN 202110498751 A CN202110498751 A CN 202110498751A CN 113635463 A CN113635463 A CN 113635463A
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CN
China
Prior art keywords
cutting
unit
cutting tool
tool
display unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110498751.0A
Other languages
Chinese (zh)
Inventor
宫田谕
木佐贯诚
斋藤孝广
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN113635463A publication Critical patent/CN113635463A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a cutting blade mounted on a carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/024—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with the stock carried by a movable support for feeding stock into engagement with the cutting blade, e.g. stock carried by a pivoted arm or a carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Dicing (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

The invention provides a cutting device, which can reliably replace a cutting tool and prevent poor processing. The cutting device is configured to include: a cutting unit having a cutting tool for cutting a workpiece, the cutting tool being rotatable; a detection unit that detects a front end position of the cutting tool; and a display unit that displays a tool change screen, the tool change screen including: a first display unit that displays the outside diameter and the tip extension of an unused cutting tool that is to be replaced with a cutting tool; a second display unit that displays the consumption of the cutting edge of the cutting tool; and an end key for ending the replacement processing of the cutting tool, wherein when the end key is selected, the detection unit detects the front end position of the cutting tool.

Description

Cutting device
Technical Field
The present invention relates to a cutting apparatus for cutting a workpiece such as a wafer.
Background
A wafer on which devices such as ICs (Integrated circuits) and LSIs (Large Scale Integrated circuits) are formed in regions defined by a plurality of planned dividing lines (streets) arranged in a grid pattern is divided, whereby a plurality of device chips each having a device are manufactured. The device chip is mounted on various electronic devices such as a mobile phone and a personal computer.
For dividing the wafer, for example, a cutting device is used. The cutting device comprises: a holding unit (holding table) for holding a workpiece; and a cutting unit to which an annular cutting tool for cutting a workpiece is attached. The cutting tool is rotated to cut into the workpiece held by the holding means, thereby cutting and dividing the workpiece.
In addition, the cutting device includes: a display unit that displays various information related to cutting work; and an operation panel for an operator to input predetermined information to the cutting device. For example, patent document 1 discloses a cutting device in which a display unit and an operation panel are provided at a position where an operator operates. The operator operates the operation panel while referring to the information displayed on the display unit, and inputs information such as machining conditions to the cutting apparatus.
Patent document 1: japanese patent laid-open publication No. 2006 and 156809
When the cutting of the workpiece by the cutting tool is continued, wear or a defect occurs at the tip (cutting edge) of the cutting tool. Therefore, after the cutting tool is used for a certain period of time, a tool replacement operation is performed to replace the used cutting tool with an unused cutting tool (replacement cutting tool).
When a cutting tool is replaced, an operator displays a screen for performing a tool replacement operation (tool replacement screen) on the display unit and inputs information on an unused cutting tool using the operation panel. In addition, removal of the used cutting tool and attachment of the unused cutting tool are performed manually or automatically. Then, the operator selects an end key (determination key) included in the tool replacement screen to determine the replacement processing of the cutting tool.
However, during the operation of the cutting apparatus, the operator may erroneously select the end key of the tool replacement screen for various reasons. For example, when an emergency situation occurs immediately after the display unit displays the tool replacement screen, the operator may forget to replace the cutting tool and select the end key of the tool replacement screen after suddenly leaving the site to cope with the emergency situation. In addition, in a case where the tool replacement screen is unintentionally displayed on the display unit due to an operation error or the like, the operator may erroneously select the end key in order to close the tool replacement screen.
If the end key is selected in a state where the cutting tool is not replaced, the cutting apparatus starts machining the workpiece on the premise that an unused cutting tool without wear or defect is attached, even when the used cutting tool is attached to the cutting unit. As a result, a situation may occur in which the workpiece cannot be processed as desired, such as an insufficient cutting depth of the cutting tool into the workpiece, and a processing failure may occur.
Disclosure of Invention
The present invention has been made in view of the above problems, and an object thereof is to provide a cutting apparatus capable of reliably performing replacement of a cutting tool and preventing occurrence of machining defects.
According to one aspect of the present invention, there is provided a cutting apparatus including: a holding unit for holding a workpiece; a cutting unit having a cutting tool that can rotate, the cutting tool cutting the object to be processed held by the holding unit; a machining feed unit that relatively moves the holding unit and the cutting unit in a machining feed direction; a cutting feed unit that moves the cutting unit in a cutting direction; a detection unit that detects a front end position of the cutting tool; a cover which can be opened and closed freely and seals a processing area where the cutting unit is arranged; and a display unit, the cutting unit comprising: a rotating shaft; a housing that rotatably supports the rotary shaft; and a flange disposed at a front end portion of the rotary shaft, to which the cutting tool is detachably attached, the display unit displaying a tool replacement screen, the tool replacement screen including: a first display unit that displays the outside diameter and the tip extension of an unused cutting tool that is to be replaced with the cutting tool; a second display unit for displaying the consumption of the cutting edge of the cutting tool; and an end key that ends a replacement process of the cutting tool, wherein when the end key is selected, a tip position of the cutting tool is detected by the detection unit, the cutting tool is allowed to be replaced when an outer diameter of the cutting tool attached to the cutting unit corresponds to an outer diameter of the unused cutting tool displayed on the first display portion, and the cutting tool is not allowed to be replaced and a warning is issued when the outer diameter of the cutting tool attached to the cutting unit does not correspond to the outer diameter of the unused cutting tool displayed on the first display portion.
Preferably, the consumption amount displayed on the second display unit is backed up, and the cutting device is capable of restoring the consumption amount on the second display unit even when the end key is selected. Further, it is preferable that when the cutter replacement screen is displayed on the display unit, the cover is opened and closed, and the cutter is not permitted to be replaced and a warning is issued until the detection unit detects the tip position of the cutter by selecting the end key despite the absence of the information that the cover is opened.
Further, according to another aspect of the present invention, there is provided a cutting apparatus including: a holding unit for holding a workpiece; a cutting unit having a cutting tool that can rotate, the cutting tool cutting the object to be processed held by the holding unit; a machining feed unit that relatively moves the holding unit and the cutting unit in a machining feed direction; a cutting feed unit that moves the cutting unit in a cutting direction; a cover which can be opened and closed freely and seals a processing area where the cutting unit is arranged; and a display unit, the cutting unit comprising: a rotating shaft; a housing that rotatably supports the rotary shaft; and a flange disposed at a front end portion of the rotary shaft, to which the cutting tool is detachably attached, the display unit displaying a tool replacement screen, the tool replacement screen including: a first display unit that displays the outside diameter and the tip extension of an unused cutting tool that is to be replaced with the cutting tool; a second display unit for displaying the consumption of the cutting edge of the cutting tool; and an end key for ending the replacement processing of the cutting tool, wherein when the tool replacement screen is displayed on the display unit, the cover can be opened and closed, and when the end key is selected although the information that the cover is opened does not exist, the cutting tool is not allowed to be replaced and a warning is given.
In the cutting apparatus according to one aspect of the present invention, when the outer diameter of the cutting tool attached to the cutting unit does not correspond to the outer diameter of an unused cutting tool or when there is no information that the cover closing the cutting unit is opened, even if the end key of the tool replacement screen is selected, the cutting tool is not permitted to be replaced, and a warning is issued. Therefore, the workpiece can be prevented from being unintentionally machined by the used cutting tool, and the operator can easily recognize that the cutting tool has not been correctly replaced. This makes it possible to reliably replace the cutting tool and prevent the occurrence of machining defects.
Drawings
Fig. 1 is a perspective view showing a cutting device.
Fig. 2 (a) is a perspective view showing the cutting unit, and fig. 2 (B) is a perspective view showing the cutting unit with the tool cover attached.
Fig. 3 is a side view showing the detection unit.
Fig. 4 is a front view showing a display unit that displays a tool change screen.
Fig. 5 is a flowchart showing the operation of the cutting device.
Description of the reference symbols
11: a workpiece; 13: a wafer; 15: a belt (dicing belt); 17: a frame; 2: a cutting device; 4: a base station; 4 a: an opening; 4 b: an opening; 6: a cassette supporting table; 8: a cartridge; 10: a conveying unit (conveying member); 10 a: a grip portion; 12: temporarily placing the area; 14: a guide rail; 16: a conveying unit (conveying member); 18: a processing feeding unit (1 st moving assembly); 18 a: moving the working table; 20: a dustproof drip-proof cover; 22: a holding unit (holding table); 22 a: a holding surface; 24: a clamp; 26: a cutting unit (cutting assembly); 28: a cut-in feeding unit (2 nd moving assembly); 30: a housing; 32: a rotating shaft (spindle); 34: flanges (mounting seats); 36: a flange portion; 36 a: a front side; 36 b: a convex portion; 38: a support shaft; 38 a: a threaded portion; 40: a cutting tool; 42: a base station; 42 a: an opening; 42 b: a grip portion; 44: a cutting edge; 46: fixing a nut; 46 a: an opening; 48: a cutter cover; 48a, 48 b: a threaded hole; 50: a tube; 52: a nozzle; 54: assembling and disassembling the cover; 54 a: a circular hole; 56: a tube; 58: a nozzle; 60: a screw; 62: assembling and disassembling the cover; 62 a: a circular hole; 64: a screw; 66: a shooting unit (shooting component); 68: a detection unit (detection member); 70: a base station; 70 a: a recess; 72 a: a light projecting section; 72 b: a light receiving section; 74: a cleaning unit (cleaning assembly); 76: a conveying unit (conveying member); 78: a support table; 80: a display unit (display unit, display module); 82: an input unit (input unit ); 84: a frame body; 86a, 86b, 86 c: a cover; 88: a control unit (control unit ); 90: an outer diameter calculating section; 92: a tool determination unit; 94: a cover opening/closing determination unit; 96: a drive section; 98: a storage unit; 100: changing pictures of the cutter; 102: a first display unit (unused tool information display unit); 102a, 102b, 102c, 102d, 102e, 102f, 102g, 102 h: a display bar; 104: a second display unit (tool use information display unit); 104a, 104b, 104c, 104 d: a display bar; 106: end key (ok key).
Detailed Description
Hereinafter, an embodiment of one embodiment of the present invention will be described with reference to the drawings. First, a configuration example of the cutting apparatus of the present embodiment will be described. Fig. 1 is a perspective view showing a cutting device 2.
The cutting device 2 includes a base 4 that supports each component constituting the cutting device 2. An opening 4a is formed at a front corner of the base 4, a cartridge support base 6 is provided in the opening 4a, and the cartridge support base 6 is moved in the Z-axis direction (cutting direction, vertical direction) by an elevating mechanism (not shown). A cassette 8 is mounted on the cassette support base 6, and the cassette 8 can accommodate a plurality of workpieces 11 cut by the cutting device 2. In fig. 1, the outline of the cartridge 8 is indicated by a broken line.
For example, the workpiece 11 has a disk-shaped wafer 13 made of silicon or the like. The wafer 13 is divided into a plurality of regions by a plurality of lines to divide (streets) arranged in a grid shape so as to intersect with each other. Further, devices such as ICs and LSIs are formed on the front sides of the plurality of regions. When the wafer 13 is cut and divided along the planned dividing lines by the cutting device 2, a plurality of device chips each having a device can be obtained.
A circular tape (dicing tape) 15 made of resin or the like and having a larger diameter than the wafer 13 is attached to the back surface side of the wafer 13. An annular frame 17 is attached to the outer periphery of the belt 15, and the frame 17 is made of metal or the like and has a circular opening having a larger diameter than the wafer 13 in the center. Thereby, the wafer 13 is supported by the frame 17 via the belt 15. That is, the workpiece 11 shown in fig. 1 is a frame unit including the wafer 13, the belt 15, and the frame 17.
However, the type, material, shape, structure, size, and the like of the workpiece 11 processed by the cutting device 2 are not limited. For example, the workpiece 11 may have a wafer 13 made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, or the like), glass, ceramic, resin, metal, or the like. The type, number, shape, structure, size, arrangement, and the like of the devices formed on the wafer 13 are not limited, and no device may be formed on the wafer 13.
The workpiece 11 may have the wafer 13 not supported by the frame 17 or the wafer 13 to which the tape 15 is not attached. The workpiece 11 may be a Package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate.
A conveying unit (conveying means) 10 is provided behind the opening 4a, and the conveying unit 10 carries out carrying-out of the workpiece 11 from the magazine 8 and carrying-in of the workpiece 11 to the magazine 8. The conveyance unit 10 is constituted by a conveyance mechanism that is movable in the Y-axis direction (index direction, front-rear direction). A gripping portion 10a that grips an end of the workpiece 11 (e.g., the frame 17) is provided at an end of the conveying unit 10 on the opening 4a side (the cassette 8 side).
A temporary storage area 12 is provided between the opening 4a and the conveying unit 10, in which the workpiece 11 carried out of the cassette 8 or the workpiece 11 carried into the cassette 8 is temporarily stored. The pause region 12 is provided with a pair of guide rails 14 arranged substantially parallel to each other in the Y-axis direction. The pair of guide rails 14 move so as to approach and separate from each other in the X-axis direction (the machining feed direction, the left-right direction), and position the workpiece 11 with the workpiece 11 interposed therebetween.
A conveying unit (conveying means) 16 for conveying the workpiece 11 is provided in the vicinity of the temporary storage area 12. For example, the conveyance unit 16 is constituted by a conveyance mechanism having a suction pad that sucks and holds the upper surface side of the workpiece 11 (for example, the upper surface side of the frame 17).
A rectangular opening 4b having a longitudinal direction along the X-axis direction is formed on a side of the opening 4 a. Inside the opening 4b, a processing and feeding unit (1 st moving means) 18 and a dust-proof and drip-proof cover 20 covering a part of the processing and feeding unit 18 are provided. The machining feed unit 18 is constituted by, for example, a ball screw type moving mechanism, and has a moving table 18a whose upper surface is exposed from the dust-proof and drip-proof cover 20.
The movable table 18a is provided with a holding unit (holding table) 22 for holding the workpiece 11. The upper surface of the holding unit 22 constitutes a holding surface 22a for holding the workpiece 11. The holding surface 22a is connected to a suction source (not shown) such as an ejector via a suction passage (not shown) formed inside the holding unit 22. Further, a plurality of jigs 24 are provided around the holding unit 22, and the plurality of jigs 24 hold and fix the end portion (for example, the frame 17) of the workpiece 11.
The processing and feeding unit 18 moves the holding unit 22 along the X-axis direction together with the moving table 18 a. The holding unit 22 is positioned by the processing and feeding unit 18 in the conveying area a where the workpiece 11 is conveyed and the processing area B where the workpiece 11 is processed. The holding unit 22 is connected to a rotation driving source (not shown) such as a motor, and the rotation driving source rotates the holding unit 22 about a rotation axis substantially parallel to the Z-axis direction.
In the machining area B, a cutting unit (cutting unit) 26 that cuts the workpiece 11 held by the holding unit 22 is provided. The cutting unit 26 has an annular cutting tool 40 that cuts the workpiece 11, and the cutting tool 40 is rotatable. Further, the cutting unit 26 is connected to a cutting and feeding unit (2 nd moving unit) 28 that moves the cutting unit 26 in the Y-axis direction and the Z-axis direction. For example, the incision feeding unit 28 is configured by a ball screw type moving mechanism having a Y-axis ball screw along the Y-axis direction and a Z-axis ball screw along the Z-axis direction.
Fig. 2 (a) is a perspective view showing the cutting unit 26. The cutting unit 26 has a cylindrical housing 30, and a cylindrical rotating shaft (spindle) 32 is housed in the housing 30. The rotary shaft 32 is rotatably supported by the housing 30, and a tip end portion (one end side) of the rotary shaft 32 is exposed to the outside of the housing 30.
A flange (mount) 34 for supporting a cutting tool 40 is disposed at the distal end of the rotary shaft 32. A rotation driving source (not shown) such as a motor for rotating the rotation shaft 32 is connected to a base end portion (the other end side) of the rotation shaft 32.
The flange 34 has a disk-shaped flange portion 36 and a cylindrical support shaft 38 protruding from the center of the front surface 36a of the flange portion 36. An annular projection 36b projecting from the front surface 36a is provided on the front surface 36a side of the outer peripheral portion of the flange 36. The front end surface of the projection 36b is formed substantially parallel to the front surface 36 a. A threaded portion 38a is formed on the outer peripheral surface of the support shaft 38.
An annular cutting tool 40 for cutting the workpiece 11 is detachably attached to the flange 34. The cutting insert 40 includes an annular base 42 formed of metal or the like and an annular cutting edge 44 formed along an outer edge portion of the base 42. A circular opening 42a penetrating the base 42 in the thickness direction is provided in the center of the base 42. Further, an annular gripping portion 42b protruding in the thickness direction of the base 42 is formed around the opening 42a of the base 42. For example, the operator grips the grip portion 42b and attaches the cutting tool 40 to the flange 34.
The cutting edge 44 is formed to protrude outward in the radial direction of the base 42 from the outer peripheral edge of the base 42. The amount of protrusion of the cutting edge 44 from the outer peripheral edge of the base 42 (the amount of protrusion of the cutting edge) is appropriately adjusted in accordance with the specification of the cutting tool 40. For example, the cutting edge 44 is formed by fixing abrasive grains made of diamond or the like with a bonding material such as nickel plating.
However, the material of the abrasive grains and the bonding material of the cutting edge 44 is not limited, and is appropriately selected according to the material and the processing content of the workpiece 11. Fig. 2 (a) shows a hub-type cutting tool 40 in which the base 42 and the cutting edge 44 are integrally formed, but a washer-type cutting tool including an annular cutting edge in which abrasive grains are fixed by a bonding material made of metal, ceramic, resin, or the like may be used.
An annular fixing nut 46 for fixing the cutting tool 40 is fastened to the threaded portion 38a of the support shaft 38. A circular opening 46a corresponding to the diameter of the support shaft 38 is formed in the center of the fixing nut 46, and a thread groove corresponding to the thread portion 38a of the support shaft 38 is formed in the opening 46 a.
The cutting insert 40 is attached to the flange 34 so that the support shaft 38 is inserted into the opening 42a of the base 42. In this state, if the fixing nut 46 is screwed and fastened to the threaded portion 38a of the support shaft 38, the cutting tool 40 is sandwiched between the distal end surface of the convex portion 36b of the flange portion 36 and the fixing nut 46. Further, by removing the fixing nut 46 fastened to the support shaft 38, the cutting tool 40 attached to the flange portion 36 can be removed. Thus, the cutting tool 40 is detachably attached to the distal end portion (flange 34) of the rotating shaft 32.
Fig. 2 (B) is a perspective view showing the cutting unit 26 with the tool cover 48 attached. As shown in fig. 2 (B), a cutter cover 48 formed in a rectangular parallelepiped shape is fixed to the front end portion of the housing 30, and the cutting cutter 40 attached to the cutting unit 26 is covered with the cutter cover 48.
The tool cover 48 has: a tube 50 which supplies a cutting fluid; and a nozzle 52 connected to the pipe 50 and opened toward the back surface side of the cutting tool 40. Further, a mounting/dismounting cover 54 is attached to the front surface side of the tool cover 48, and a mounting/dismounting cover 62 is attached to the upper surface side of the tool cover 48. The upper portion of the cutting tool 40 is covered with the tool cover 48 and the attaching and detaching covers 54 and 62.
The loading and unloading cover 54 has a pipe 56 for supplying cutting fluid and a nozzle 58 connected to the pipe 56. The nozzle 58 is provided so as to open toward the front side of the cutting tool 40 when the attachment/detachment cover 54 is attached to the tool cover 48. The attachment/detachment cover 54 is fixed to the tool cover 48 by inserting screws 60 into round holes 54a formed in the attachment/detachment cover 54 and screwing them into screw holes 48a formed in the tool cover 48.
The detachable cover 62 is fixed to the tool cover 48 by inserting screws 64 into circular holes 62a formed in the detachable cover 62 and screwing the screws into screw holes 48b formed in the tool cover 48. Further, a laser irradiation unit (laser irradiation unit) for irradiating a laser beam for dressing the cutting tool 40 may be provided inside the detachable cover 62.
When the workpiece 11 is cut by the cutting unit 26, a cutting fluid such as pure water is supplied to the pipes 50 and 56. The cutting fluid is supplied to the front and back sides of the cutting tool 40 through the nozzles 52, 58. Thereby, the workpiece 11 and the cutting tool 40 are cooled, and chips (cutting chips) generated by cutting are washed away.
As shown in fig. 1, an imaging unit (imaging module) 66 is provided at a position overlapping the movement path of the holding unit 22 (between the conveying area a and the processing area B). The imaging unit 66 is configured by a camera or the like, and images the workpiece 11 held by the holding unit 22. The workpiece 11 and the cutting unit 26 are aligned and the like based on the image acquired by the imaging unit 66.
Further, a detection unit (detection unit) 68 is provided in the vicinity of the cutting unit 26 (for example, on the movable table 18 a), and the detection unit 68 detects the front end position of the cutting tool 40 attached to the cutting unit 26. The outer diameter of the cutting tool 40 can be determined from the position of the tip of the cutting tool 40 detected by the detection unit 68.
Fig. 3 is a side view showing the detection unit 68. For example, the detection unit 68 has a rectangular parallelepiped base 70 having a recess 70a formed on the upper surface side. The recess 70a is provided with a light projecting portion 72a and a light receiving portion 72b facing each other.
For example, the Light projecting section 72a is connected to a Light source (not shown) such as an LED (Light Emitting Diode) via an optical fiber or the like, and irradiates Light toward the Light receiving section 72 b. The light emitted from the light emitter 72a is received by the light receiver 72 b. For example, the light receiving unit 72b is connected to a photoelectric conversion unit (not shown) configured to include a photoelectric conversion element via an optical fiber or the like. Then, an electric signal (voltage) corresponding to the amount of light received by the light receiving unit 72b is generated by the photoelectric conversion unit and input to a control unit 88 (see fig. 1) described later.
In the case where the detection unit 68 is provided on the moving table 18a (see fig. 1), the position of the detection unit 68 in the X-axis direction is controlled by the machining feed unit 18. When the cutting unit 26 is lowered by the incision feed unit 28 in a state where the cutting unit 26 and the detection unit 68 are arranged such that the cutting edge 44 of the cutting tool 40 overlaps the region between the light projection unit 72a and the light receiving unit 72b, the tip (edge) of the cutting tool 40 is inserted between the light projection unit 72a and the light receiving unit 72 b.
When the cutting unit 26 is lowered to a predetermined height position, the light from the light projecting portion 72a toward the light receiving portion 72b is blocked by the tip portion of the cutting tool 40, and the amount of light received by the light receiving portion 72b decreases. The height position of the cutting unit 26 when the amount of received light decreases differs depending on the outer diameter of the cutting tool 40 (the outer diameter of the cutting edge 44). Therefore, the outer diameter of the cutting tool 40 can be determined by lowering the cutting unit 26 and monitoring the light receiving amount of the light receiving unit 72b and the height position of the cutting unit 26.
As shown in fig. 1, a cleaning unit (cleaning module) 74 for cleaning the workpiece 11 is provided behind the holding unit 22. For example, the cleaning unit 74 has: a rotary table for holding a workpiece 11; and a nozzle for supplying a cleaning liquid such as pure water to the workpiece 11 held by the rotary table. Further, a conveyance unit (conveyance unit) 76 that conveys the workpiece 11 between the holding unit 22 and the cleaning unit 74 is provided above the cleaning unit 74. For example, the conveyance unit 76 is constituted by a conveyance mechanism having a suction pad that suctions and holds the upper surface side of the workpiece 11 (for example, the upper surface side of the frame 17).
Further, a display unit (display unit )80 is provided on the support table 78 provided at the rear of the machining area B, and the display unit 80 displays various information (machining conditions and the like) related to the cutting process of the cutting apparatus 2, an image obtained by the imaging unit 66, and the like. Further, an input means (input unit )82 for an operator to input various information (machining conditions, etc.) to the cutting apparatus 2 is provided on the front surface side of the base 4.
For example, various displays are used as the display unit 80, and an operation panel having a plurality of operation keys is used as the input unit 82. However, the cutting device 2 may have a touch panel as a user interface. In this case, the touch panel functions as the display unit 80 and the input unit 82, and the operator can input information by touch operation of the touch panel.
Further, a frame 84 covering the upper surface side of the base 4 is provided on the base 4. A cover that can be opened and closed to cover the components of the cutting apparatus 2 is attached to the support base 78 and the housing 84.
For example, a cover 86a that closes the cassette 8 placed on the cassette support base 6, a cover 86B that closes the conveying area a, and a cover 86c that closes the processing area B where the cutting unit 26 is disposed are fixed to the support base 78 or the frame 84. In fig. 1, the outlines of the covers 86a, 86b, and 86c are indicated by two-dot chain lines. During the machining of the workpiece 11, the covers 86a, 86b, and 86c are locked in a closed state and opened and closed by an operator as needed.
The respective components (the cassette support base 6, the conveying unit 10, the guide rail 14, the conveying unit 16, the processing and feeding unit 18, the holding unit 22, the jig 24, the cutting unit 26, the cutting and feeding unit 28, the imaging unit 66, the detection unit 68, the cleaning unit 72, the conveying unit 76, the display unit 80, the input unit 82, and the like) constituting the cutting apparatus 2 are connected to a control section (control unit, control module) 88. The control unit 88 controls the operations of the components of the cutting apparatus 2.
For example, the control unit 88 is constituted by a computer. Specifically, the control unit 88 includes: a processing unit that performs processing such as calculation necessary for the operation of the cutting device 2; and a storage unit that stores various information (data, programs, etc.) used for processing by the processing unit. The Processing Unit includes a processor such as a CPU (Central Processing Unit). The storage unit is constituted by a Memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory). The processing unit and the storage unit are connected to each other via a bus. The configuration and function of the control unit 88 will be described in detail later.
When processing the workpiece 11, first, an end portion (for example, the frame 17) of one workpiece 11 accommodated in the cassette 8 is gripped by the gripping portion 10a of the conveying unit 10. When the conveyance unit 10 is moved backward in the Y-axis direction in this state, the workpiece 11 is pulled out from the cassette 8 and is disposed on the pair of guide rails 14.
The pair of guide rails 14 move in the X-axis direction so as to approach each other while supporting the workpiece 11 (e.g., the frame 17) from below. Thereby, the workpiece 11 is clamped by the pair of guide rails 14, and the workpiece 11 is aligned. Then, the workpiece 11 is sucked and held by the conveyance unit 16 and conveyed to the holding unit 22.
For example, when the workpiece 11 including the wafer 13, the belt 15, and the frame 17 is processed, the wafer 13 is disposed on the holding unit 22 with the belt 15 interposed therebetween, and the frame 17 is fixed by the jig 24. In this state, when the negative pressure of the suction source is applied to the holding surface 22a, the wafer 13 is sucked and held by the holding unit 22 via the tape 15.
Then, the cutting tool 40 attached to the cutting unit 26 is rotated to cut into the wafer 13 held by the holding unit 22. For example, the holding unit 22 is moved by the machining feed unit 18 in a state where the lower end of the cutting tool 40 is positioned below the upper surface of the workpiece 11. Thereby, the holding unit 22 and the cutting unit 26 are relatively moved in the machining feed direction, and the wafer 13 is linearly cut.
Further, the cutting unit 26 is moved in the Y-axis direction by the cutting feed unit 28 connected to the cutting unit 26, thereby performing indexing. Further, the cutting feed unit 28 moves the cutting unit 26 in the Z-axis direction, thereby adjusting the amount of cutting of the cutting tool 40 into the workpiece 11. In the processing of the wafer 13, a cutting fluid such as pure water is supplied to the wafer 13 and the cutting tool 40.
When the processing of the workpiece 11 is completed, the workpiece 11 is conveyed from the holding unit 22 to the cleaning unit 74 by the conveying unit 76, and is cleaned by the cleaning unit 74. The cleaned workpiece 11 is conveyed onto the pair of guide rails 14 by the conveying unit 16, and then held by the holding portion 10a of the conveying unit 10 and stored in the cassette 8.
Here, when the cutting tool 40 is used to cut the workpiece 11, the cutting edge 44 of the cutting tool 40 wears, and the amount of protrusion of the cutting edge 44 from the outer peripheral edge of the base 42 (the amount of protrusion of the cutting edge tip) gradually decreases. Therefore, after the cutting tool 40 is used for a certain period of time, a tool replacement operation is performed to replace the used cutting tool 40 with an unused cutting tool. At this time, the operator operates the input unit 82 to display a screen (tool replacement screen) for performing the replacement operation of the cutting tool 40 on the display unit 80.
Fig. 4 is a front view showing the display unit 80 displaying the tool change screen 100. The tool replacement screen 100 includes: a first display unit (unused tool information display unit) 102 that displays information relating to an unused cutting tool (replacement cutting tool); a second display unit (tool use information display unit) 104 that displays information relating to the use status of the cutting tool 40 attached to the cutting unit 26; and an end key (determination key) 106 that ends the replacement process of the cutting tool 40.
Various information about the unused cutting tool to be replaced with the cutting tool 40 attached to the cutting unit 26 is displayed on the first display portion 102. For example, the first display unit 102 includes: a display field 102a for displaying the ID (name, etc.) of the unused cutting tool; a display field 102b for displaying the type (material, etc.) of the unused cutting tool; a display field 102c for displaying an ID (characters, numerals, symbols, etc.) indicated by a barcode attached to an unused cutting tool; and a display column 102d for displaying the reason for replacing the cutting tool 40 with an unused cutting tool.
Further, the first display unit 102 includes: a display column 102e that displays the outer diameter of the unused cutting tool (outer diameter of the cutting edge); a display field 102f that displays the thickness of the cutting edge of the unused cutting tool; a display column 102g that displays the type of cutting tool that is not being used (e.g., hub-type or washer-type); and a display field 102h that displays the amount of tip extension of the unused cutting tool.
For example, information corresponding to the display fields 102a to 102h is automatically input by reading a barcode attached to an unused cutting tool, and is displayed in the display fields 102a to 102 h. However, the operator may manually input the information displayed in the display columns 102a to 102h by operating the input unit 82.
The second display unit 104 displays the use status of the cutting tool 40 (the cutting tool to be replaced) attached to the cutting unit 26. For example, the second display unit 104 includes: a display column 104a that displays the number of lines (the number of lines to be divided, etc.) machined by the cutting tool 40; a display column 104b that displays the distance of the region machined by the cutting tool 40; a display column 104c that displays the consumption amount of the cutting tool 40; and a display field 104d for displaying the maximum rotation speed of the rotary shaft 32 (see fig. 2 a) when the cutting tool 40 machines the workpiece 11. The consumption amount of the cutting tool 40 corresponds to a difference between the outer diameter (tip extension) of the cutting tool 40 before the workpiece 11 is machined and the current outer diameter (tip extension) of the cutting tool 40.
When the end key 106 is selected using the input unit 82 in a state where various information on an unused cutting tool is input to the cutting apparatus 2 and displayed on the first display unit 102, the tool change screen 100 is closed. At this time, the information displayed on the first display portion 102 is determined, and the information related to the use condition of the used cutting tool 40 displayed on the second display portion 104 is reset.
In addition, when the display unit 80 and the input unit 82 are configured by touch panels, the operator can input information by touch operation of the touch panels on which the tool replacement screen 100 is displayed. For example, by clicking on the area where the display fields 102a to 102h and 104a to 104d are displayed, a predetermined display field is selected, and characters or numerical values can be input in the selected display field. The end key 106 is selected by clicking the area where the end key 106 is displayed.
When the cutting tool is replaced, the display unit 80 displays the tool replacement screen 100 and inputs information on the unused cutting tool. Further, the cutting tool 40 attached to the cutting unit 26 is detached, and an unused cutting tool is attached to the cutting unit 26. When the end key 106 is selected in a state where the input information is displayed on the first display unit 102, the operation of replacing the cutting tool is completed, and the machining of the workpiece 11 is resumed.
Here, in the cutting apparatus 2 of the present embodiment, when the end key 106 is selected, it is checked whether or not the attachment and detachment of the cutting tool is actually performed. If it is determined that the cutting tool is not attached or detached, the cutting apparatus 2 issues a warning without allowing the replacement processing of the cutting tool. This prevents the workpiece 11 from being erroneously machined by the cutting tool consumed, thereby preventing occurrence of machining defects.
Fig. 5 is a flowchart showing the operation of the cutting device 2. A specific example of the operation of the cutting apparatus 2 will be described below with reference to fig. 1 and 5. The operations of the components of the cutting apparatus 2 during the cutting tool replacement operation are controlled by the control unit 88 (see fig. 1).
Fig. 1 is a block diagram showing a functional configuration of the control unit 88. The control unit 88 includes: an outer diameter calculation unit 90 that calculates the outer diameter of the cutting tool attached to the cutting unit 26; and a tool determination unit 92 that determines whether or not the cutting tool attached to the cutting unit 26 is an unused cutting tool based on the outer diameter calculated by the outer diameter calculation unit 90. The control unit 88 further includes a cover opening/closing determination unit 94, and the cover opening/closing determination unit 94 determines whether or not the cover 86c that closes the processing region B is opened or closed.
The determination result of the cutter determining unit 92 and the determination result of the cover opening/closing determining unit 94 are input to the driving unit 96, respectively. Then, the driving unit 96 drives each component of the cutting apparatus 2 based on the input determination result. The outer diameter calculation unit 90, the cutter determination unit 92, and the cover opening/closing determination unit 94 are connected to the storage unit 98, and perform processing with reference to information stored in the storage unit 98.
As shown in fig. 5, first, the operator operates the input unit 82 to cause the display unit 80 to display a tool replacement screen 100 (see fig. 3) (step S1). Then, the operator inputs information on an unused cutting tool (a cutting tool for replacement) by operating the input unit 82. As a result, the input various information is displayed on the first display unit 102 (display columns 102a to 102h) of the tool replacement screen 100.
When the tool replacement screen 100 is displayed on the display unit 80, the lock of the cover 86c covering the machining area B is released by the control unit 88, and the cover 86c can be opened and closed. Then, the operator opens the cover 86c to replace the used cutting tool 40 attached to the cutting unit 26 with an unused cutting tool, and then closes the cover 86 c. Then, the operator operates the input unit 82 to select the end key 106 of the tool replacement screen 100, and gives an instruction to complete the replacement process of the cutting tool.
When end key 106 is selected (yes in step S2), control unit 88 stores in storage unit 98 information displayed on second display unit 104 (display fields 104a to 104d) of tool exchange screen image 100. Thus, the use status (the number of machining lines, the machining distance, the consumption of the cutting tool 40, and the maximum rotation speed of the rotary shaft 32) of the used cutting tool 40 is backed up. However, the timing for backing up the use state of the cutting tool 40 is not limited.
After the previous cutting tool replacement operation, the control unit 88 checks whether or not the cover 86c covering the cutting unit 26 is opened or closed (step S3). For example, the cutting device 2 is provided with a push button switch (safety button) that is pushed by the operator when opening and closing the cover 86 c. Further, a sensor for detecting opening and closing of cover 86c may be provided in the vicinity of cover 86 c.
Information on whether or not the safety button is pressed and a detection result of opening and closing of the cover 86c by the sensor are stored in the storage unit 98. When end key 106 is selected, cover opening/closing determination unit 94 accesses storage unit 98, and determines whether or not there is opening/closing of cover 86c with reference to the information stored in storage unit 98.
Here, when the attachment/detachment operation of the cutting tool is not actually performed, information that the cover 86c is opened (information that the safety button is pressed, information that the cover 86c is opened/closed detected by the sensor, and the like) is not stored in the storage portion 98. In this case, the cover opening/closing determination unit 94 determines that the cover 86c is not opened or closed (no in step S4), and does not allow the replacement of the cutting tool (step S5). In this case, the control unit 88 does not perform the process of closing the tool change screen 100 and the process of checking the information displayed on the first display unit 102 of the tool change screen 100.
The determination result of the cover opening/closing determination unit 94 (the opening/closing of the cover 86c is not present) is input to the drive unit 96. Then, the driving unit 96 to which the determination result is input drives a predetermined component (the display unit 80 or the like) of the cutting apparatus 2, and issues a warning to notify that the cutting tool is not attached or detached (step S6).
In addition, the issuing method of the warning is not limited. For example, the driving unit 96 causes the display unit 80 to display information indicating that the cutting tool is not replaced. The cutting apparatus 2 may have a warning lamp, and the driving unit 96 may turn on or flash the warning lamp. The cutting device 2 may have a speaker, and the driver 96 may cause the speaker to emit a warning sound or a sound for notifying the warning content.
The control unit 88 reads the information about the use status of the cutting tool 40 backed up in the storage unit 98, and restores (redisplays) the information in the second display unit 104 (display fields 104a to 104d) of the tool replacement screen 100 (step S7). Thereby, the second display portion 104 returns to the state when the tool change screen 100 is displayed on the display unit 80 (step S1).
On the other hand, when the cover opening/closing determination unit 94 determines that the cover 86c is opened or closed (yes in step S4), the determination result is input to the drive unit 96. Then, the drive unit 96 controls the detection unit 68 and the cutting feed unit 28 so that the detection unit 68 detects the tip position (lower end position) of the cutting tool 40 (step S8). Then, the detection result is input from the detection unit 68 to the outer diameter calculation section 90, and information of the height position of the cutting unit 26 under detection is input from the incision feeding unit 28 to the outer diameter calculation section 90.
The outer diameter calculation unit 90 calculates the outer diameter of the cutting tool attached to the cutting unit 26 based on the signals input from the detection unit 68 and the incision feed unit 28. For example, the storage unit 98 stores information indicating a relationship between the height position of the cutting unit 26 and the outer diameter of the cutting tool when light (see fig. 3) emitted from the light emitter 72a of the detection unit 68 to the light receiver 72b is blocked by the cutting tool. The outer diameter calculation unit 90 refers to the information stored in the storage unit 98 to determine the outer diameter of the cutting tool attached to the cutting unit 26.
The value of the outer diameter calculated by the outer diameter calculating section 90 is input to the tool determining section 92. Then, the tool determination unit 92 determines whether or not the cutting tool attached to the cutting unit 26 is an unused cutting tool, based on the outer diameter input from the outer diameter calculation unit 90. Specifically, the storage unit 98 stores in advance a value of the outer diameter of an unused cutting tool (reference outer diameter value) to be replaced with the used cutting tool 40. The reference outer diameter value corresponds to the outer diameter of the unused cutting tool displayed on the first display unit 102 (display field 102e) of the tool replacement screen 100.
The tool determination unit 92 compares the value of the outer diameter input from the outer diameter calculation unit 90 with the reference outer diameter value. Here, when an unused cutting tool is correctly attached to the cutting unit 26, the value of the outer diameter calculated by the outer diameter calculation unit 90 matches the reference outer diameter value, or the difference falls within a predetermined error range (for example, ± 10 μm). In this case, the tool determination unit 92 determines that the outer diameter of the cutting tool attached to the cutting unit 26 corresponds to the outer diameter of the tool for replacement (yes in step S9) and allows replacement of the cutting tool (step S10).
When the cutting tool replacement is permitted, the information displayed on the first display portion 102 of the tool replacement screen 100 is determined and stored in the storage portion 98, and the information displayed on the second display portion 104 is reset. This completes the operation of replacing the cutting tool.
On the other hand, when the cutting tool 40 is not attached to or detached from the cutting unit 26 and is used, the value of the outer diameter calculated by the outer diameter calculating unit 90 is smaller than the reference outer diameter value. When the value of the outer diameter input from the outer diameter calculation unit 90 is different from the reference outer diameter value or the difference is out of the predetermined error range, the tool determination unit 92 determines that the outer diameter of the cutting tool attached to the cutting unit 26 does not correspond to the outer diameter of the tool for replacement (no in step S9), and does not allow the tool replacement (step S5). Then, as in the case where the opening and closing of the cover 86c is not confirmed, the warning is issued (step S6) and the display of the second display unit 104 is resumed (step S7).
When the cutting apparatus 2 issues a warning, the operator correctly attaches an unused cutting tool to the cutting unit 26, and then selects the end key 106 of the tool replacement screen 100 again. This completes the cutting tool replacement operation, and the workpiece 11 can be machined using the unused cutting tool.
The operation of the cutting device 2 is controlled by the control unit 88. Specifically, a program describing a series of operations shown in fig. 5 is stored in the storage unit 98, and the control unit 88 reads out the program from the storage unit 98 and executes the program. Thereby, a control signal for controlling the operation of each component of the cutting apparatus 2 is generated, and the replacement processing of the cutting tool is realized.
As described above, in the cutting apparatus 2 of the present embodiment, when the outer diameter of the cutting tool attached to the cutting unit 26 does not correspond to the outer diameter of an unused cutting tool or when there is no information that the cover 86c closing the cutting unit 26 is opened, even if the end key 106 of the tool replacement screen 100 is selected, the cutting tool is not permitted to be replaced, and a warning is issued. Therefore, the workpiece 11 can be prevented from being unintentionally machined by the used cutting tool, and the operator can easily recognize that the cutting tool has not been correctly replaced. This makes it possible to reliably replace the cutting tool and prevent the occurrence of machining defects.
In the present embodiment, an example of determining whether the cutting tool attached to the cutting unit 26 is used or unused based on the correspondence relationship between the presence or absence of opening and closing of the cover 86c (step S4) and the outer diameter of the cutting tool (step S9) is described. However, the cutting apparatus 2 may determine whether the cutting tool is used or unused only based on one of the correspondence relationships between the presence or absence of the opening and closing of the cover 86c and the outer diameter of the cutting tool.
In addition, the structure, method, and the like of the above embodiments can be modified as appropriate without departing from the object of the present invention.

Claims (4)

1. A cutting device is configured to include:
a holding unit for holding a workpiece;
a cutting unit having a cutting tool that can rotate, the cutting tool cutting the object to be processed held by the holding unit;
a machining feed unit that relatively moves the holding unit and the cutting unit in a machining feed direction;
a cutting feed unit that moves the cutting unit in a cutting direction;
a detection unit that detects a front end position of the cutting tool;
a cover which can be opened and closed freely and seals a processing area where the cutting unit is arranged; and
a display unit for displaying the image of the object,
it is characterized in that the preparation method is characterized in that,
the cutting unit includes:
a rotating shaft;
a housing that rotatably supports the rotary shaft; and
a flange disposed at a distal end portion of the rotary shaft and to which the cutting tool is detachably attached,
the display unit displays a tool change picture,
the cutter replacement picture includes:
a first display unit that displays the outside diameter and the tip extension of an unused cutting tool that is to be replaced with the cutting tool;
a second display unit for displaying the consumption of the cutting edge of the cutting tool; and
an end key for ending the replacement process of the cutting tool,
detecting a front end position of the cutting tool by the detecting unit when the end key is selected,
when the outer diameter of the cutting tool attached to the cutting unit corresponds to the outer diameter of the unused cutting tool displayed on the first display unit, the cutting tool is permitted to be replaced, and when the outer diameter of the cutting tool attached to the cutting unit does not correspond to the outer diameter of the unused cutting tool displayed on the first display unit, the cutting tool is not permitted to be replaced and a warning is issued.
2. The cutting device of claim 1,
the consumption amount displayed on the second display portion is backed up,
even if the end key is selected, the consumption amount can be restored in the second display unit.
3. The cutting device according to claim 1 or 2,
when the cutter replacing screen is displayed on the display unit, the cover can be opened and closed,
before the end key is selected to detect the leading end position of the cutting tool by the detection unit despite the absence of the information that the cover is opened, the replacement of the cutting tool is not permitted and a warning is issued.
4. A cutting device is configured to include:
a holding unit for holding a workpiece;
a cutting unit having a cutting tool that can rotate, the cutting tool cutting the object to be processed held by the holding unit;
a machining feed unit that relatively moves the holding unit and the cutting unit in a machining feed direction;
a cutting feed unit that moves the cutting unit in a cutting direction;
a cover which can be opened and closed freely and seals a processing area where the cutting unit is arranged; and
a display unit for displaying the image of the object,
it is characterized in that the preparation method is characterized in that,
the cutting unit includes:
a rotating shaft;
a housing that rotatably supports the rotary shaft; and
a flange disposed at a distal end portion of the rotary shaft and to which the cutting tool is detachably attached,
the display unit displays a tool change picture,
the cutter replacement picture includes:
a first display unit that displays the outside diameter and the tip extension of an unused cutting tool that is to be replaced with the cutting tool;
a second display unit for displaying the consumption of the cutting edge of the cutting tool; and
an end key for ending the replacement process of the cutting tool,
when the cutter replacing screen is displayed on the display unit, the cover can be opened and closed,
when the end key is selected although there is no information that the cover is opened, the cutting tool is not allowed to be replaced and a warning is issued.
CN202110498751.0A 2020-05-11 2021-05-08 Cutting device Pending CN113635463A (en)

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JP2020-082987 2020-05-11
JP2020082987A JP7446683B2 (en) 2020-05-11 2020-05-11 cutting equipment

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Publication number Priority date Publication date Assignee Title
JP4571851B2 (en) 2004-11-30 2010-10-27 株式会社ディスコ Cutting equipment
JP2009241177A (en) 2008-03-28 2009-10-22 Disco Abrasive Syst Ltd Blade changing tool
JP5415917B2 (en) 2009-11-27 2014-02-12 株式会社ディスコ Cutting equipment
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