JP7446683B2 - cutting equipment - Google Patents

Description

The present invention relates to a cutting device that cuts a workpiece such as a wafer.

By dividing a wafer in which devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed into areas divided by a plurality of dividing lines (street) arranged in a grid pattern, each device is divided into regions. A plurality of device chips are manufactured. This device chip is installed in various electrical devices such as mobile phones and personal computers.

For example, a cutting device is used to divide the wafer. The cutting device includes a holding means (holding table) for holding a workpiece, and a cutting means to which an annular cutting blade for cutting the workpiece is attached. The workpiece is cut and divided by rotating the cutting blade and cutting into the workpiece held by the holding means.

The cutting device also includes a display unit that displays various information regarding the cutting process, and an operation panel that allows an operator to input predetermined information into the cutting device. For example, Patent Document 1 discloses a cutting device in which a display means and an operation panel are installed at a position where an operator performs operations. The operator inputs information such as processing conditions into the cutting device by operating the operation panel while referring to the information displayed on the display means.

Japanese Patent Application Publication No. 2006-156809

When a cutting blade continues cutting a workpiece, wear and chipping occur at the tip (edge) of the cutting blade. Therefore, after a cutting blade has been used for a certain period of time, a blade replacement operation is performed to replace the used cutting blade with an unused cutting blade (replacement cutting blade).

When exchanging a cutting blade, the operator inputs information about the unused cutting blade using the operation panel while displaying a screen for performing blade exchange work (blade exchange screen) on the display means. Further, removal of a used cutting blade and attachment of an unused cutting blade are performed manually or automatically. Thereafter, the operator selects an end key (confirmation key) included in the blade exchange screen to confirm the cutting blade exchange process.

However, while operating the cutting device, the operator may accidentally select the end key on the blade replacement screen for various reasons. For example, if an emergency situation occurs immediately after the blade replacement screen is displayed on the display, the operator hurriedly leaves the area to deal with the emergency, and then presses the exit button on the blade replacement screen without having forgotten to replace the cutting blade. There is a risk that you may end up selecting. Further, when the blade replacement screen is unintentionally displayed on the display means due to an operational error or the like, the operator may accidentally select the end key to close the blade replacement screen.

If the exit key is selected without replacing the cutting blade, the cutting device will be replaced with an unused one without wear or chipping, even though the used cutting blade is still attached to the cutting means. Start machining the workpiece on the premise that the cutting blade is attached. As a result, a situation may occur in which the workpiece is not machined as intended, such as an insufficient amount of cut into the workpiece by the cutting blade, and processing defects may occur.

The present invention has been made in view of such problems, and an object of the present invention is to provide a cutting device that can reliably replace a cutting blade and prevent machining defects.

According to one aspect of the present invention, a holding means for holding a workpiece, a cutting means rotatably equipped with a cutting blade for cutting the workpiece held by the holding means, and a cutting means for rotatably cutting the workpiece held by the holding means; a processing feed means for moving the cutting means relatively along the processing feed direction; a cutting feed means for moving the cutting means along the cutting direction; a detection means for detecting the tip position of the cutting blade; A cutting device comprising a cover that can be opened and closed to close a processing area in which a cutting means is disposed, and a display means, the cutting means having a rotating shaft and rotatably supporting the rotating shaft. a flange disposed at the tip of the rotating shaft and to which the cutting blade is removably attached; the display means displays a blade replacement screen; A first display section that displays the outer diameter and amount of cutting edge extension of an unused cutting blade to be replaced with the blade, a second display section that displays the amount of wear on the cutting edge of the cutting blade, and replacement of the cutting blade. and an end key for terminating the process, and when the end key is selected, the tip position of the cutting blade is detected by the detection means, and the outer diameter of the cutting blade attached to the cutting means is detected by the detection means. If the outer diameter of the unused cutting blade displayed on the first display corresponds to the outer diameter of the unused cutting blade, the cutting blade is permitted to be replaced, and the outer diameter of the cutting blade attached to the cutting means corresponds to the outer diameter of the unused cutting blade displayed on the first display. A cutting device is provided which does not permit replacement of the cutting blade and issues a warning if the outer diameter of the unused cutting blade does not correspond to the outer diameter displayed on the display section of the cutting blade.

Preferably, the amount of consumption displayed on the second display section is backed up . Preferably, when the blade replacement screen is displayed on the display means, the cover can be opened and closed, and the cutting device is configured such that the end key is selected even though there is no information that the cover has been opened. If so, before the position of the tip of the cutting blade is detected by the detection means, replacement of the cutting blade is not permitted and a warning is issued.

According to another aspect of the present invention, a cutting means includes a holding means for holding a workpiece, a cutting means rotatably equipped with a cutting blade for cutting the workpiece held by the holding means, and a cutting means for rotatably cutting the workpiece held by the holding means. A processing feed means for relatively moving the holding means and the cutting means along the processing feed direction, a cutting feed means for moving the cutting means along the cutting direction, and a processing area in which the cutting means is arranged. A cutting device that includes a cover that can be opened and closed to close the shaft, and a display means, the cutting means comprising a rotating shaft, a housing that rotatably supports the rotating shaft, and a distal end of the rotating shaft. a flange disposed in the section and to which a cutting blade is removably attached, the display means displaying a blade replacement screen, and the blade replacement screen displays an unused cutting blade to be replaced with the cutting blade. a first display section that displays the outer diameter of the cutting blade and the amount of protrusion of the cutting edge; a second display section that displays the wear amount of the cutting edge of the cutting blade; and an end key that ends the replacement process of the cutting blade. When the blade replacement screen is displayed on the display means, the cover can be opened and closed, and when the end key is selected even though there is no information that the cover has been opened, the cutting blade is replaced. A cutting device is provided that disallows and issues a warning.

In the cutting device according to one aspect of the present invention, when the outer diameter of the cutting blade attached to the cutting means does not correspond to the outer diameter of an unused cutting blade, or when the cover blocking the cutting means is opened. If there is no information, the cutting blade will not be allowed to be replaced even if the end key on the blade replacement screen is selected, and a warning will be issued. Therefore, the workpiece is prevented from being unintentionally machined with a used cutting blade, and the operator can easily recognize that the cutting blade has not been replaced correctly. This makes it possible to reliably replace the cutting blade and prevent machining defects from occurring.

It is a perspective view showing a cutting device. FIG. 2(A) is a perspective view showing the cutting means, and FIG. 2(B) is a perspective view showing the cutting means with a blade cover attached. It is a side view which shows a detection means. It is a front view which shows the display means which displays a blade exchange screen. It is a flowchart showing the operation of the cutting device.

Hereinafter, embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a cutting device according to this embodiment will be described. FIG. 1 is a perspective view showing the cutting device 2. FIG.

The cutting device 2 includes a base 4 that supports each component that constitutes the cutting device 2. An opening 4a is formed in the front corner of the base 4, and a cassette that moves along the Z-axis direction (incision direction, vertical direction, up and down direction) by an elevating mechanism (not shown) is inserted into this opening 4a. A support stand 6 is provided. A cassette 8 that can accommodate a plurality of workpieces 11 to be cut by the cutting device 2 is mounted on the cassette support base 6 . In addition, in FIG. 1, the outline of the cassette 8 is shown by a broken line.

For example, the workpiece 11 includes a disk-shaped wafer 13 made of silicon or the like. The wafer 13 is divided into a plurality of regions by a plurality of dividing lines (streets) arranged in a grid pattern so as to intersect with each other. In addition, devices such as ICs and LSIs are formed on the surface sides of the plurality of regions, respectively. When the cutting device 2 cuts and divides the wafer 13 along the dividing line, a plurality of device chips each having a device are obtained.

A circular tape (dicing tape) 15 made of resin or the like and having a larger diameter than the wafer 13 is attached to the back side of the wafer 13 . Furthermore, an annular frame 17 made of metal or the like and having a circular opening with a diameter larger than the wafer 13 in the center is attached to the outer circumference of the tape 15 . Thereby, the wafer 13 is supported by the frame 17 via the tape 15. That is, the workpiece 11 shown in FIG. 1 is a frame unit including a wafer 13, a tape 15, and a frame 17.

However, there are no restrictions on the type, material, shape, structure, size, etc. of the workpiece 11 processed by the cutting device 2. For example, the workpiece 11 may include a wafer 13 made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, ceramics, resin, metal, or the like. Furthermore, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of devices formed on the wafer 13, and the wafer 13 may not have any devices formed thereon.

Further, the workpiece 11 may include a wafer 13 that is not supported by the frame 17 or a wafer 13 to which the tape 15 is not attached. Further, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate.

A transport means (transport unit) 10 is provided behind the opening 4a for carrying out the workpiece 11 from the cassette 8 and transporting the workpiece 11 into the cassette 8. The conveyance means 10 is constituted by a conveyance mechanism that is movable along the Y-axis direction (index feed direction, front-back direction). Furthermore, a gripping portion 10a that grips an end of the workpiece 11 (for example, the frame 17) is provided at the end of the transport means 10 located on the opening 4a side (cassette 8 side).

A temporary holding area 12 is provided between the opening 4a and the transport means 10, in which the workpiece 11 carried out from the cassette 8 or the workpiece 11 carried into the cassette 8 is temporarily placed. This temporary storage area 12 is provided with a pair of guide rails 14 that are arranged generally parallel to each other along the Y-axis direction. The pair of guide rails 14 move toward and away from each other along the X-axis direction (processing feed direction, left-right direction), and position the workpiece 11 by sandwiching the workpiece 11 therebetween.

A transport means (transport unit) 16 for transporting the workpiece 11 is provided near the temporary storage area 12 . For example, the conveyance means 16 is constituted by a conveyance mechanism including a suction pad that suction-holds the upper surface side of the workpiece 11 (for example, the upper surface side of the frame 17).

A rectangular opening 4b whose longitudinal direction is along the X-axis direction is formed on the side of the opening 4a. Inside this opening 4b, a processing feed means (first moving unit) 18 and a dust-proof and drip-proof cover 20 that covers a part of the processing feed means 18 are provided. The processing feed means 18 is constituted by, for example, a ball screw type moving mechanism, and includes a moving table 18a whose upper surface is exposed from the dust-proof and drip-proof cover 20.

A holding means (holding table) 22 for holding the workpiece 11 is provided on the moving table 18a. The upper surface of the holding means 22 constitutes a holding surface 22a that holds the workpiece 11. The holding surface 22a is connected to a suction source (not shown) such as an ejector via a suction path (not shown) formed inside the holding means 22. Further, a plurality of clamps 24 are provided around the holding means 22 to grip and fix the end portion (for example, the frame 17) of the workpiece 11.

The processing feed means 18 moves the holding means 22 along the X-axis direction together with the moving table 18a. The holding means 22 is positioned by the processing and feeding means 18 in a transport area A where the workpiece 11 is transported and a processing area B where the workpiece 11 is processed. Further, a rotation drive source (not shown) such as a motor is connected to the holding means 22, and this rotation drive source rotates the holding means 22 around a rotation axis that is generally parallel to the Z-axis direction.

The processing area B is provided with a cutting means (cutting unit) 26 that cuts the workpiece 11 held by the holding means 22. The cutting means 26 rotatably includes an annular cutting blade 40 that cuts the workpiece 11 . Further, the cutting means 26 is connected to a cutting feed means (second moving unit) 28 that moves the cutting means 26 along the Y-axis direction and the Z-axis direction. For example, the cutting feed means 28 is constituted by a ball screw type moving mechanism including a Y-axis ball screw extending in the Y-axis direction and a Z-axis ball screw extending in the Z-axis direction.

FIG. 2(A) is a perspective view showing the cutting means 26. The cutting means 26 includes a cylindrical housing 30, and a cylindrical rotating shaft (spindle) 32 is accommodated in the housing 30. The rotating shaft 32 is rotatably supported by the housing 30, and a tip (one end side) of the rotating shaft 32 is exposed to the outside of the housing 30.

A flange (mount) 34 that supports the cutting blade 40 is disposed at the tip of the rotating shaft 32 . Further, a rotational drive source (not shown) such as a motor that rotates the rotating shaft 32 is connected to the base end (the other end side) of the rotating shaft 32 .

The flange 34 includes a disk-shaped flange portion 36 and a cylindrical support shaft 38 protruding from the center of the surface 36a of the flange portion 36. An annular convex portion 36b protruding from the surface 36a is provided on the surface 36a side of the outer peripheral portion of the flange portion 36. Note that the tip end surface of the convex portion 36b is formed approximately parallel to the surface 36a. Furthermore, a threaded portion 38a is formed on the outer peripheral surface of the support shaft 38.

An annular cutting blade 40 for cutting the workpiece 11 is detachably attached to the flange 34 . The cutting blade 40 includes an annular base 42 made of metal or the like, and an annular cutting edge 44 formed along the outer edge of the base 42. A circular opening 42a is provided in the center of the base 42, passing through the base 42 in the thickness direction. Furthermore, an annular grip portion 42b that protrudes in the thickness direction of the base 42 is formed around the opening 42a of the base 42. For example, the operator attaches the cutting blade 40 to the flange 34 by holding the grip portion 42b.

The cutting blade 44 is formed to protrude from the outer peripheral edge of the base 42 toward the outside in the radial direction of the base 42. The amount of protrusion of the cutting blade 44 from the outer peripheral edge of the base 42 (the amount of protrusion of the cutting edge) is adjusted as appropriate according to the specifications of the cutting blade 40. For example, the cutting edge 44 is formed by fixing abrasive grains made of diamond or the like with a binding material such as nickel plating.

However, the materials of the abrasive grains and the binding material of the cutting blade 44 are not limited, and are appropriately selected depending on the material of the workpiece 11, the details of processing, and the like. Further, although FIG. 2(A) shows a hub-type cutting blade 40 in which a base 42 and a cutting blade 44 are integrated, the abrasive grains are made of a binding material such as metal, ceramics, or resin. A washer type cutting blade consisting of an annular cutting edge fixed by a washer type may also be used.

An annular fixing nut 46 for fixing the cutting blade 40 is fastened to the threaded portion 38a of the support shaft 38. A circular opening 46a corresponding to the diameter of the support shaft 38 is formed in the center of the fixing nut 46, and a thread groove corresponding to the threaded portion 38a of the support shaft 38 is formed in this opening 46a.

The cutting blade 40 is attached to the flange 34 such that the support shaft 38 is inserted into the opening 42a of the base 42. In this state, when the fixing nut 46 is screwed onto the threaded portion 38a of the support shaft 38 and tightened, the cutting blade 40 is held between the distal end surface of the convex portion 36b of the flange portion 36 and the fixing nut 46. Note that by removing the fixing nut 46 tightened to the support shaft 38, the cutting blade 40 attached to the flange portion 36 can be removed. In this way, the cutting blade 40 is detachably attached to the tip (flange 34) of the rotating shaft 32.

FIG. 2(B) is a perspective view showing the cutting means 26 with the blade cover 48 attached. As shown in FIG. 2(B), a rectangular parallelepiped-shaped blade cover 48 is fixed to the tip of the housing 30, and the cutting blade 40 attached to the cutting means 26 is covered by the blade cover 48.

The blade cover 48 includes a pipe 50 to which cutting fluid is supplied, and a nozzle 52 that is connected to the pipe 50 and opens toward the back side of the cutting blade 40. Further, a removable cover 54 is attached to the front side of the blade cover 48, and a removable cover 62 is attached to the upper side of the blade cover 48. The upper part of the cutting blade 40 is covered by the blade cover 48 and the removable covers 54 and 62.

The removable cover 54 includes a pipe 56 to which cutting fluid is supplied, and a nozzle 58 connected to the pipe 56. The nozzle 58 is provided so as to open toward the surface of the cutting blade 40 when the removable cover 54 is attached to the blade cover 48. The removable cover 54 is fixed to the blade cover 48 by inserting screws 60 into round holes 54a formed in the removable cover 54 and screwing them into screw holes 48a formed in the blade cover 48.

Further, the removable cover 62 is fixed to the blade cover 48 by inserting screws 64 into round holes 62a formed in the removable cover 62 and screwing them into screw holes 48b formed in the blade cover 48. Note that a laser irradiation means (laser irradiation unit) for irradiating a laser beam for dressing the cutting blade 40 may be provided inside the removable cover 62.

When cutting the workpiece 11 by the cutting means 26, a cutting fluid such as pure water is supplied to the pipes 50 and 56. This cutting fluid is supplied to the front and back surfaces of the cutting blade 40 via the nozzles 52 and 58. As a result, the workpiece 11 and the cutting blade 40 are cooled, and debris (cutting debris) generated by cutting is washed away.

As shown in FIG. 1, an imaging means (imaging unit) 66 is provided at a position overlapping the movement path of the holding means 22 (between the transport area A and the processing area B). The imaging means 66 is constituted by a camera or the like, and takes an image of the workpiece 11 held by the holding means 22. Based on the image acquired by the imaging means 66, alignment between the workpiece 11 and the cutting means 26 is performed.

Further, a detection means (detection unit) 68 is provided near the cutting means 26 (for example, on the moving table 18a) for detecting the position of the tip of the cutting blade 40 attached to the cutting means 26. Based on the position of the tip of the cutting blade 40 detected by the detection means 68, the outer diameter of the cutting blade 40 can be specified.

FIG. 3 is a side view showing the detection means 68. For example, the detection means 68 includes a rectangular parallelepiped-shaped base 70 with a recess 70a formed on the upper surface side. This concave portion 70a is provided with a light projecting portion 72a and a light receiving portion 72b that face each other.

For example, the light projecting section 72a is connected to a light source (not shown) such as an LED (Light Emitting Diode) via an optical fiber or the like, and emits light toward the light receiving section 72b. The light emitted from the light projecting section 72a is received by the light receiving section 72b. For example, the light receiving section 72b is connected to a photoelectric conversion section (not shown) including a photoelectric conversion element via an optical fiber or the like. Then, an electric signal (voltage) corresponding to the amount of light received by the light receiving section 72b is generated by the photoelectric conversion section and input to a control section 88 (see FIG. 1), which will be described later.

When the detection means 68 is provided on the moving table 18a (see FIG. 1), the position of the detection means 68 in the X-axis direction is controlled by the processing feed means 18. Then, with the cutting means 26 and the detection means 68 arranged so that the cutting edge 44 of the cutting blade 40 overlaps the area between the light emitting part 72a and the light receiving part 72b, the cutting means 26 is moved by the cutting feed means 28. When lowered, the tip (edge) of the cutting blade 40 is inserted between the light projecting section 72a and the light receiving section 72b.

When the cutting means 26 is lowered to a predetermined height position, the light directed from the light projecting part 72a to the light receiving part 72b is blocked by the tip of the cutting blade 40, and the amount of light received by the light receiving part 72b is reduced. The height position of the cutting means 26 when the amount of received light decreases varies depending on the outer diameter of the cutting blade 40 (the outer diameter of the cutting blade 44). Therefore, the outer diameter of the cutting blade 40 can be determined by monitoring the amount of light received by the light receiving section 72b and the height position of the cutting means 26 while lowering the cutting means 26.

As shown in FIG. 1, behind the holding means 22, a cleaning means (cleaning unit) 74 for cleaning the workpiece 11 is provided. For example, the cleaning means 74 includes a spinner table that holds the workpiece 11 and a nozzle that supplies a cleaning liquid such as pure water toward the workpiece 11 held by the spinner table. Moreover, above the cleaning means 74, a conveyance means (conveyance unit) 76 for conveying the workpiece 11 between the holding means 22 and the cleaning means 74 is provided. For example, the conveyance means 76 is constituted by a conveyance mechanism including a suction pad that suction-holds the upper surface side of the workpiece 11 (for example, the upper surface side of the frame 17).

Further, on the support stand 78 provided at the rear of the processing area B, a display unit ( A display section (display unit) 80 is provided. Further, on the front side of the base 4, an input means (input section, input unit) 82 is provided for an operator to input various information (processing conditions, etc.) to the cutting device 2.

For example, various types of displays are used as the display means 80, and an operation panel including a plurality of operation keys is used as the input means 82. However, the cutting device 2 may include a touch panel serving as a user interface. In this case, the touch panel functions as display means 80 and input means 82, and the operator can input information by touching the touch panel.

Furthermore, a frame 84 is provided on the base 4 to cover the upper surface side of the base 4. A cover that covers the components of the cutting device 2 and can be opened and closed is attached to the support base 78 and the frame 84.

For example, a cover 86a that closes the cassette 8 placed on the cassette support stand 6, a cover 86b that closes the transport area A, and a cover 86c that closes the processing area B in which the cutting means 26 is disposed are supported. It is fixed to the stand 78 or the frame 84. In FIG. 1, the outlines of the covers 86a, 86b, and 86c are shown by two-dot chain lines. During processing of the workpiece 11, the covers 86a, 86b, and 86c are each locked in a closed state, and are opened and closed by the operator as necessary.

Each component constituting the cutting device 2 (cassette support 6, conveyance means 10, guide rail 14, conveyance means 16, processing feed means 18, holding means 22, clamp 24, cutting means 26, incision feed means 28, imaging means 66, detection means 68, cleaning means 72, conveyance means 76, display means 80, input means 82, etc.) are connected to a control section (control means, control unit) 88. The control unit 88 controls the operation of each component of the cutting device 2.

For example, the control unit 88 is configured by a computer. Specifically, the control unit 88 includes a processing unit that performs processing such as calculations necessary for the operation of the cutting device 2, and a storage unit that stores various information (data, programs, etc.) used in processing by the processing unit. Equipped with. The processing unit includes, for example, a processor such as a CPU (Central Processing Unit). Further, the storage unit is configured by memory such as ROM (Read Only Memory) and RAM (Random Access Memory). The processing section and the storage section are connected to each other via a bus. Note that details of the configuration and functions of the control unit 88 will be described later.

When processing the workpieces 11, first, the end portion (for example, the frame 17) of one of the workpieces 11 housed in the cassette 8 is gripped by the gripping portion 10a of the conveying means 10. When the transport means 10 is moved backward along the Y-axis direction in this state, the workpiece 11 is pulled out from the cassette 8 and placed on the pair of guide rails 14 .

The pair of guide rails 14 move toward each other along the X-axis direction while supporting the workpiece 11 (for example, the frame 17) from below. As a result, the workpiece 11 is sandwiched between the pair of guide rails 14, and the workpiece 11 is aligned. Thereafter, the workpiece 11 is suction-held by the conveyance means 16 and conveyed onto the holding means 22 .

For example, when processing a workpiece 11 that includes a wafer 13, a tape 15, and a frame 17, the wafer 13 is placed on the holding means 22 via the tape 15, and the frame 17 is fixed by the clamp 24. . In this state, when negative pressure from a suction source is applied to the holding surface 22a, the wafer 13 is suction-held by the holding means 22 via the tape 15.

Thereafter, the cutting blade 40 attached to the cutting means 26 is rotated to cut into the wafer 13 held by the holding means 22. For example, the holding means 22 is moved by the processing feed means 18 while the lower end of the cutting blade 40 is positioned below the upper surface of the workpiece 11. As a result, the holding means 22 and the cutting means 26 move relative to each other along the processing feed direction, and the wafer 13 is cut linearly.

Incidentally, index feeding is performed by moving the cutting means 26 in the Y-axis direction using a cutting feed means 28 connected to the cutting means 26. Further, by moving the cutting means 26 in the Z-axis direction using the cutting feed means 28, the amount of cut into the workpiece 11 by the cutting blade 40 is adjusted. During processing of the wafer 13, a cutting fluid such as pure water is supplied to the wafer 13 and the cutting blade 40.

When the processing of the workpiece 11 is completed, the workpiece 11 is conveyed from above the holding means 22 to the cleaning means 74 by the conveying means 76, and is cleaned by the cleaning means 74. After the cleaned workpiece 11 is transported onto the pair of guide rails 14 by the transport means 16, it is held by the grip portion 10a of the transport means 10 and stored in the cassette 8.

Here, when the workpiece 11 is cut by the cutting blade 40, the cutting edge 44 of the cutting blade 40 is worn out, and the amount of protrusion of the cutting edge 44 from the outer peripheral edge of the base 42 (the amount of protrusion of the cutting edge) gradually decreases. . Therefore, after the cutting blade 40 has been used for a certain period of time, a blade replacement operation is performed in which the used cutting blade 40 is replaced with an unused cutting blade. At this time, the operator operates the input means 82 to cause the display means 80 to display a screen for replacing the cutting blade 40 (blade replacement screen).

FIG. 4 is a front view showing the display means 80 that displays the blade replacement screen 100. The blade replacement screen 100 includes a first display section (unused blade information display section) 102 that displays information regarding unused cutting blades (replacement cutting blades), and a cutting blade 40 attached to the cutting means 26. The cutting blade 40 includes a second display section (blade usage information display section) 104 that displays information regarding the usage status of the cutting blade 40, and an end key (confirmation key) 106 that ends the cutting blade 40 replacement process.

The first display section 102 displays various information regarding an unused cutting blade to be replaced with the cutting blade 40 attached to the cutting means 26. For example, the first display section 102 includes a display column 102a in which the ID (name, etc.) of an unused cutting blade is displayed, a display column 102b in which the type (material, etc.) of the unused cutting blade is displayed, and a display column 102b in which the ID (name, etc.) of an unused cutting blade is displayed; It includes a display field 102c where the ID (letters, numbers, symbols, etc.) indicated by the barcode attached to the cutting blade is displayed, and a display field 102d where the reason for replacing the cutting blade 40 with an unused cutting blade is displayed. .

Further, the first display section 102 includes a display column 102e in which the outer diameter of an unused cutting blade (outer diameter of the cutting edge) is displayed, and a display column in which the thickness of the cutting edge of the unused cutting blade is displayed. 102f, a display field 102g in which the type of unused cutting blade (for example, hub type or washer type) is displayed, and a display field 102h in which the cutting edge protrusion amount of the unused cutting blade is displayed.

For example, by reading a barcode attached to an unused cutting blade, information corresponding to the display fields 102a to 102h is automatically input and displayed in the display fields 102a to 102h. However, by operating the input means 82, the operator can also manually input the information displayed in the display fields 102a to 102h.

The second display section 104 displays the usage status of the cutting blade 40 (the cutting blade to be replaced) attached to the cutting means 26. For example, the second display section 104 includes a display field 104a in which the number of lines processed by the cutting blade 40 (number of lines to be divided, etc.) is displayed, and a display field in which the distance of the area processed by the cutting blade 40 is displayed. Column 104b, display column 104c in which the amount of wear of the cutting blade 40 is displayed, and the maximum number of rotations of the rotating shaft 32 (see FIG. 2(A)) when the cutting blade 40 processes the workpiece 11 is displayed. It includes a display field 104d. Note that the amount of wear of the cutting blade 40 corresponds to the difference between the outer diameter of the cutting blade 40 (blade tip extension amount) before processing the workpiece 11 and the current outer diameter (blade tip extension amount) of the cutting blade 40. do.

When the end key 106 is selected using the input means 82 while various information regarding an unused cutting blade is input to the cutting device 2 and displayed on the first display unit 102, the blade replacement screen 100 is closed. . At this time, the information displayed on the first display section 102 is confirmed, and the information regarding the usage status of the used cutting blade 40 displayed on the second display section 104 is reset.

In addition, when the display means 80 and the input means 82 are configured by a touch panel, the operator can input information by a touch operation on the touch panel on which the blade replacement screen 100 is displayed. For example, by tapping an area in which display fields 102a to 102h and display fields 104a to 104d are displayed to select a predetermined display field, characters and numbers can be input into the selected display field. Further, the end key 106 is selected by tapping the area where the end key 106 is displayed.

When replacing the cutting blade, the blade replacement screen 100 is displayed on the display means 80, and information regarding the unused cutting blade is input. Further, the cutting blade 40 attached to the cutting means 26 is removed, and an unused cutting blade is attached to the cutting means 26. Thereafter, when the end key 106 is selected while the input information is displayed on the first display section 102, the cutting blade replacement operation is completed and processing of the workpiece 11 is restarted.

Here, in the cutting device 2 according to the present embodiment, when the end key 106 is selected, it is confirmed whether or not the cutting blade has actually been attached or detached. If it is determined that the cutting blade has not been attached or detached, the cutting device 2 issues a warning without allowing the cutting blade to be replaced. As a result, the workpiece 11 can be prevented from being erroneously machined by a worn cutting blade, and the occurrence of machining defects can be prevented.

FIG. 5 is a flowchart showing the operation of the cutting device 2. Hereinafter, a specific example of the operation of the cutting device 2 will be described with reference to FIGS. 1 and 5. The operation of each component of the cutting device 2 during cutting blade replacement work is controlled by a control unit 88 (see FIG. 1).

FIG. 1 shows a functional configuration of the control section 88 in a block diagram. The control section 88 includes an outer diameter calculation section 90 that calculates the outer diameter of the cutting blade attached to the cutting means 26, and an outer diameter calculation section 90 that calculates the outer diameter of the cutting blade attached to the cutting means 26, based on the outer diameter calculated by the outer diameter calculation section 90. The blade determination unit 92 determines whether or not the present cutting blade is an unused cutting blade. The control unit 88 also includes a cover opening/closing determination unit 94 that determines whether the cover 86c that closes the processing area B is opened or closed.

The determination result by the blade determination section 92 and the determination result by the cover open/close determination section 94 are each input to the drive section 96. The drive unit 96 then drives each component of the cutting device 2 based on the input determination result. The outer diameter calculating section 90, the blade determining section 92, and the cover opening/closing determining section 94 are each connected to a storage section 98, and perform processing by referring to information stored in the storage section 98.

As shown in FIG. 5, the operator first operates the input means 82 to display the blade replacement screen 100 (see FIG. 3) on the display means 80 (step S1). Then, the operator inputs information regarding the unused cutting blade (replacement cutting blade) by operating the input means 82. As a result, various types of input information are displayed on the first display section 102 (display columns 102a to 102h) of the blade replacement screen 100.

Further, when the blade exchange screen 100 is displayed on the display means 80, the lock of the cover 86c covering the processing area B is released by the control unit 88, and the cover 86c can be opened and closed. Then, the operator opens the cover 86c and replaces the used cutting blade 40 attached to the cutting means 26 with an unused cutting blade, and then closes the cover 86c. Thereafter, the operator operates the input means 82 to select the end key 106 on the blade replacement screen 100 and gives an instruction to complete the cutting blade replacement process.

When the end key 106 is selected (YES in step S2), the control section 88 stores the information displayed on the second display section 104 (display fields 104a to 104d) of the blade replacement screen 100 in the storage section 98. do. This backs up the usage status of the used cutting blade 40 (number of machining lines, machining distance, amount of wear of the cutting blade 40, maximum rotation speed of the rotating shaft 32). However, there is no limit to the timing at which the usage status of the cutting blade 40 is backed up.

Then, the control unit 88 checks whether the cover 86c covering the cutting means 26 has been opened or closed after the previous cutting blade replacement operation (step S3). For example, the cutting device 2 is provided with a push button switch (safety button) that is pressed by the operator when opening and closing the cover 86c. Further, a sensor for detecting opening/closing of the cover 86c may be provided near the cover 86c.

Information on whether the safety button has been pressed and the detection results of the opening and closing of the cover 86c by the sensor are stored in the storage unit 98. When the end key 106 is selected, the cover opening/closing determination section 94 accesses the storage section 98 and refers to the information stored in the storage section 98 to determine whether or not the cover 86c has been opened or closed.

Here, if the cutting blade is not actually attached or detached, the information that the cover 86c was opened (information that the safety button was pressed, information that the cover 86c was opened/closed detected by the sensor, etc.) is stored. It is not stored in section 98. In this case, the cover opening/closing determination unit 94 determines that the cover 86c is not opened or closed (NO in step S4), and does not permit replacement of the cutting blade (step S5). In this case, the control unit 88 does not perform the process of closing the blade replacement screen 100 and the process of determining the information displayed on the first display unit 102 of the blade replacement screen 100.

Further, the result of the determination by the cover opening/closing determining section 94 (cover 86c is not open/closing) is input to the driving section 96. The drive unit 96 into which the determination result is input drives predetermined components (display means 80, etc.) of the cutting device 2 to issue a warning that the cutting blade has not been attached or detached (step S6).

Note that there are no restrictions on the method of sending the warning. For example, the drive unit 96 causes the display unit 80 to display information indicating that the cutting blade has not been replaced. Further, the cutting device 2 may include a warning light, and the drive unit 96 may cause the warning light to turn on or blink. Furthermore, the cutting device 2 may be equipped with a speaker, and the drive unit 96 may cause the speaker to emit a warning sound or a sound informing the content of the warning.

Furthermore, the control unit 88 reads out information regarding the usage status of the cutting blade 40 backed up in the storage unit 98, and returns (redisplays) the information to the second display unit 104 (display fields 104a to 104d) of the blade replacement screen 100. (step S7). Thereby, the second display section 104 returns to the state when the blade replacement screen 100 was displayed on the display means 80 (step S1).

On the other hand, if the cover opening/closing determining unit 94 determines that the cover 86c is opened or closed (YES in step S4), the determination result is input to the driving unit 96. Then, the drive unit 96 controls the detection means 68 and the cutting feed means 28, and causes the detection means 68 to detect the tip position (lower end position) of the cutting blade 40 (step S8). Then, the detection result is inputted from the detection means 68 to the outer diameter calculation section 90, and information about the height position of the cutting means 26 during detection is inputted from the cutting feed means 28 to the outer diameter calculation section 90.

The outer diameter calculation section 90 calculates the outer diameter of the cutting blade attached to the cutting means 26 based on the signals input from the detection means 68 and the cutting feed means 28 . For example, the storage section 98 stores the height position of the cutting means 26 when the light emitted from the light projecting section 72a of the detecting means 68 to the light receiving section 72b (see FIG. 3) is blocked by the cutting blade, and the height position of the cutting means 26 when the light emitted from the light projecting section 72a of the detecting means 68 to the light receiving section 72b (see FIG. 3) is blocked by the cutting blade. Information representing the relationship between the outer diameter and the outer diameter is stored in advance. Then, the outer diameter calculation section 90 refers to the information stored in the storage section 98 and specifies the outer diameter of the cutting blade attached to the cutting means 26 .

The value of the outer diameter calculated by the outer diameter calculating section 90 is input to the blade determining section 92. Then, the blade determination section 92 determines whether the cutting blade attached to the cutting means 26 is an unused cutting blade based on the outer diameter input from the outer diameter calculation section 90. Specifically, the storage unit 98 stores in advance an outer diameter value (reference outer diameter value) of an unused cutting blade to be replaced with the used cutting blade 40. This reference outer diameter value corresponds to the outer diameter value of an unused cutting blade displayed on the first display section 102 (display field 102e) of the blade replacement screen 100.

Then, the blade determination section 92 compares the outer diameter value input from the outer diameter calculation section 90 and the reference outer diameter value. Here, if an unused cutting blade is correctly attached to the cutting means 26, the outer diameter value calculated by the outer diameter calculating section 90 and the reference outer diameter value match, or the difference therebetween is a predetermined value. It falls within the error range (for example, ±10 μm). In this case, the blade determination unit 92 determines that the outer diameter of the cutting blade attached to the cutting means 26 corresponds to the outer diameter of the replacement blade (YES in step S9), and permits replacement of the cutting blade. (Step S10).

When replacement of the cutting blade is permitted, the information displayed on the first display section 102 of the blade replacement screen 100 is confirmed and stored in the storage section 98, and is also displayed on the second display section 104. information will be reset. This completes the cutting blade replacement work.

On the other hand, if the cutting blade is not attached or detached and the used cutting blade 40 remains attached to the cutting means 26, the outer diameter value calculated by the outer diameter calculation unit 90 is the reference value. It becomes smaller than the outer diameter value. Then, if the outer diameter value inputted from the outer diameter calculating section 90 is different from the reference outer diameter value, or the difference is outside a predetermined error range, the blade determining section 92 determines that the blade is attached to the cutting means 26. It is determined that the outer diameter of the cutting blade does not correspond to the outer diameter of the replacement blade (NO in step S9), and replacement of the blade is not permitted (step S5). Then, as in the case where opening/closing of the cover 86c is not confirmed, a warning is issued (step S6) and the display on the second display section 104 is restored (step S7).

When the cutting device 2 issues a warning, the operator correctly attaches an unused cutting blade to the cutting means 26 and then selects the end key 106 on the blade replacement screen 100 again. As a result, the cutting blade replacement work is completed, and it becomes possible to start machining the workpiece 11 using the unused cutting blade.

The operation of the cutting device 2 described above is controlled by the control section 88. Specifically, the storage unit 98 stores a program that describes the series of operations shown in FIG. 5, and the control unit 88 reads the program from the storage unit 98 and executes it. As a result, a control signal for controlling the operation of each component of the cutting device 2 is generated, and a cutting blade replacement process is realized.

As described above, in the cutting device 2 according to the present embodiment, when the outer diameter of the cutting blade attached to the cutting means 26 does not correspond to the outer diameter of an unused cutting blade, or when the cutting means 26 is blocked. If there is no information that the cover 86c has been opened, even if the end key 106 on the blade replacement screen 100 is selected, the cutting blade replacement is not permitted and a warning is issued. Therefore, the workpiece 11 is prevented from being unintentionally machined with a used cutting blade, and the operator can easily recognize that the cutting blade has not been replaced correctly. This makes it possible to reliably replace the cutting blade, and prevents machining defects from occurring.

In this embodiment, the cutting blade attached to the cutting means 26 is determined to be used, based on whether the cover 86c is opened or closed (step S4) and the correspondence between the outer diameters of the cutting blade (step S9). An example of determining whether the item is or is unused has been described. However, the cutting device 2 may determine whether the cutting blade is used or unused based only on one of whether the cover 86c is opened and closed and the correspondence between the outer diameter of the cutting blade.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

11 Workpiece 13 Wafer 15 Tape (dicing tape)
17 Frame 2 Cutting device 4 Base 4a Opening 4b Opening 6 Cassette support 8 Cassette 10 Transport means (transport unit)
10a Gripping part 12 Temporary storage area 14 Guide rail 16 Transport means (transport unit)
18 Processing feed means (first moving unit)
18a Moving table 20 Dust-proof and drip-proof cover 22 Holding means (holding table)
22a Holding surface 24 Clamp 26 Cutting means (cutting unit)
28 Cut feeding means (second moving unit)
30 Housing 32 Rotating shaft (spindle)
34 Flange (mount)
36 Flange portion 36a Surface 36b Convex portion 38 Support shaft 38a Threaded portion 40 Cutting blade 42 Base 42a Opening 42b Gripping portion 44 Cutting blade 46 Fixing nut 46a Opening 48 Blade cover 48a, 48b Screw hole 50 Pipe 52 Nozzle 54 Removable cover 54a Round Hole 56 Pipe 58 Nozzle 60 Screw 62 Detachable cover 62a Round hole 64 Screw 66 Imaging means (imaging unit)
68 Detection means (detection unit)
70 base 70a recess 72a light projecting section 72b light receiving section 74 cleaning means (cleaning unit)
76 Transport means (transport unit)
78 Support stand 80 Display means (display section, display unit)
82 Input means (input section, input unit)
84 Frame 86a, 86b, 86c Cover 88 Control section (control means, control unit)
90 Outer diameter calculation unit 92 Blade determination unit 94 Cover opening/closing determination unit 96 Drive unit 98 Storage unit 100 Blade replacement screen 102 First display unit (unused blade information display unit)
102a, 102b, 102c, 102d, 102e, 102f, 102g, 102h Display column 104 Second display section (blade usage information display section)
104a, 104b, 104c, 104d Display field 106 End key (confirmation key)

Claims (4)

a holding means for holding the workpiece;
A cutting means rotatably equipped with a cutting blade that cuts the workpiece held by the holding means;
processing feeding means for relatively moving the holding means and the cutting means along a processing feeding direction;
a cutting feed means for moving the cutting means along the cutting direction;
detection means for detecting the tip position of the cutting blade;
a cover that can be opened and closed to close a processing area in which the cutting means is disposed;
A cutting device comprising: a display means;
The cutting means includes a rotating shaft, a housing that rotatably supports the rotating shaft, and a flange disposed at the tip of the rotating shaft and to which the cutting blade is detachably attached,
The display means displays a blade replacement screen,
The blade replacement screen includes a first display section that displays the outer diameter and amount of cutting edge extension of an unused cutting blade to be replaced with the cutting blade, and a second display section that displays the amount of wear on the cutting edge of the cutting blade. and an end key for ending the cutting blade replacement process,
When the end key is selected, the detection means detects the tip position of the cutting blade;
If the outer diameter of the cutting blade attached to the cutting means corresponds to the outer diameter of the unused cutting blade displayed on the first display section, permit replacement of the cutting blade; If the outer diameter of the cutting blade attached to the cutting means does not correspond to the outer diameter of the unused cutting blade displayed on the first display section, replacement of the cutting blade is not permitted and a warning is issued. A cutting device that emits light. The cutting device according to claim 1, wherein the amount of consumption displayed on the second display section is backed up . When the blade replacement screen is displayed on the display means, the cover can be opened and closed;
If the end key is selected even though there is no information that the cover has been opened, replacement of the cutting blade is not permitted and a warning is issued before the tip position of the cutting blade is detected by the detection means. The cutting device according to claim 1 or 2, characterized in that the cutting device emits light. a holding means for holding the workpiece;
A cutting means rotatably equipped with a cutting blade that cuts the workpiece held by the holding means;
processing feeding means for relatively moving the holding means and the cutting means along a processing feeding direction;
a cutting feed means for moving the cutting means along the cutting direction;
a cover that can be opened and closed to close a processing area in which the cutting means is disposed;
A cutting device comprising: a display means;
The cutting means includes a rotating shaft, a housing that rotatably supports the rotating shaft, and a flange disposed at the tip of the rotating shaft and to which a cutting blade is detachably attached,
The display means displays a blade replacement screen,
The blade replacement screen includes a first display section that displays the outer diameter and amount of cutting edge extension of an unused cutting blade to be replaced with the cutting blade, and a second display section that displays the amount of wear on the cutting edge of the cutting blade. and an end key for ending the cutting blade replacement process,
When the blade replacement screen is displayed on the display means, the cover can be opened and closed;
A cutting device characterized in that when the end key is selected even though there is no information that the cover has been opened, replacement of the cutting blade is not permitted and a warning is issued.

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