CN113544556A - Optical element and light source device - Google Patents
Optical element and light source device Download PDFInfo
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- CN113544556A CN113544556A CN202080019345.5A CN202080019345A CN113544556A CN 113544556 A CN113544556 A CN 113544556A CN 202080019345 A CN202080019345 A CN 202080019345A CN 113544556 A CN113544556 A CN 113544556A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 51
- 238000000605 extraction Methods 0.000 claims abstract description 14
- 230000000737 periodic effect Effects 0.000 claims description 7
- 108010010803 Gelatin Proteins 0.000 claims description 4
- 229920000159 gelatin Polymers 0.000 claims description 4
- 239000008273 gelatin Substances 0.000 claims description 4
- 235000019322 gelatine Nutrition 0.000 claims description 4
- 235000011852 gelatine desserts Nutrition 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 3
- 108010025899 gelatin film Proteins 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000025 interference lithography Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/22—Processes or apparatus for obtaining an optical image from holograms
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Holo Graphy (AREA)
- Planar Illumination Modules (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention provides an optical element and a light source device which are small and light and can expand the light irradiation range. The optical element includes: a light guide unit (11) having a light incident surface (11a) on which light enters and a light extraction surface (11b) to which light reaches; a volume phase holographic grating (13) provided on the light extraction surface (11 b); and a diffraction grating section (12) provided on the volume phase hologram grating (13).
Description
Technical Field
The present invention relates to an optical element and a light source device, and more particularly, to an optical element and a light source device using a diffraction grating.
Background
Conventionally, an instrument panel in which icons are lighted has been used as a device for displaying various information in a vehicle. In addition, as the amount of information displayed increases, it has also been proposed to incorporate an image display device into the instrument panel and to configure the entire instrument panel with the image display device.
However, since the dashboard is located below the front windshield of the vehicle, the driver needs to move his or her line of sight downward during driving in order to visually recognize the information displayed on the dashboard, which may cause safety problems. Accordingly, a Head-Up Display (hereinafter, referred to as a HUD) has been proposed, which projects an image on a front windshield so that a driver can read information when viewing the front of the vehicle (see, for example, patent document 1). For the purpose of vehicle automatic driving technology and driving assistance technology, sensor technology has been developed that measures the inter-vehicle distance and inspects obstacles by using laser light irradiation and light reception.
In the head-up display and the sensor, an optical member such as a lens is used to irradiate a wide range of laser light. However, in an optical system using lenses, it is necessary to combine a plurality of lenses and increase the diameter of the lenses in order to irradiate a wide range with laser light, and it is difficult to miniaturize the light source device.
In order to solve the above problem, a technique of enlarging the irradiation range of the laser light using a diffraction grating instead of an optical lens has been proposed. Fig. 3 is a schematic diagram showing an outline of a conventional light source device using a diffraction grating. As shown in fig. 3, the conventional light source device includes a light guide unit 1, a diffraction grating unit 2, and a light source unit 4. The light emitted from the light source unit 4 enters the back surface side of the light guide unit 1 and is emitted at an angle Φ0The light passes through the light guide unit 1 and reaches the diffraction grating unit 2 formed on the light guide unit 1. In the diffraction grating section 2, light is diffracted under diffraction conditions so as to have an irradiation angle Φ1Irradiating to the outside. By appropriate design of the light emitted from the light source section 4The wavelength of light and the pitch of the diffraction grating part 2, thereby the irradiation angle phi of the emergent light can be adjusted1Greater than the irradiation angle phi in the light guide part 10。
Patent document 1: japanese patent laid-open publication No. 2018-118669
However, in the conventional light source device shown in fig. 3, the irradiation angle Φ of the light to be irradiated to the outside1Since the pitch of the diffraction grating section 2 is determined, there is a limit to the enlargement of the light irradiation range.
Disclosure of Invention
The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide an optical element and a light source device which are small and lightweight and can expand a light irradiation range.
In order to solve the above problems, an optical element of the present invention includes: a light guide section having a light incident surface on which light is incident and a light extraction surface to which the light reaches; a volume phase holographic grating disposed on the light extraction surface; and a diffraction grating section provided on the volume phase hologram grating.
In the optical element of the present invention, the volume phase hologram grating and the diffraction grating section are combined to form a multiple diffraction grating. Thus, the irradiation angle of light can be enlarged by the volume phase holographic grating, and the irradiation angle of light can be enlarged by the diffraction grating portion, so that the volume phase holographic grating is small and light, and the light irradiation range can be enlarged.
In one embodiment of the present invention, the volume phase holographic grating has a periodic structure having a refractive index formed inside a gelatin layer.
In one embodiment of the present invention, the diffraction grating portion is formed of a dielectric film.
Further, an image display device of the present invention includes: any one of the optical elements described above; and a light source unit that irradiates the light incident surface with the light and irradiates a part of the light to the outside from the diffraction grating unit.
In one embodiment of the present invention, the light source unit is an optical phased array in which a plurality of light emitting units are two-dimensionally arranged.
The present invention can provide an optical element and a light source device which are small and lightweight and can expand a light irradiation range.
Drawings
Fig. 1 is a perspective view schematically showing the structure of an optical element according to a first embodiment.
Fig. 2 is a schematic sectional view showing the structure and optical path of the light source device 10 using an optical element.
Fig. 3 is a schematic diagram showing an outline of a conventional light source device using a diffraction grating.
Detailed Description
(first embodiment)
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The same or equivalent structural elements, members and processes shown in the respective drawings are denoted by the same reference numerals, and overlapping descriptions are appropriately omitted. In addition, the drawings schematically show the structures of the optical element and the light source device, and the dimensions and angles in the drawings do not show actual dimensions in the optical element and the light source device 10.
Fig. 1 is a schematic perspective view showing the structure of an optical element in the present embodiment. As shown in fig. 1, the optical element includes a light guide 11, a diffraction grating 12, and a Volume Phase Holographic Grating (VPHG) 13.
The light guide portion 11 is a substantially plate-shaped portion made of a material that transmits light, and includes a light incident surface 11a and a light extraction surface 11 b. The dimensions of the light guide portion 11 are not limited, but may be, for example, about 10mm in width and 3mm in thickness. The material constituting the light guide portion 11 is not limited, but is preferably SiO2A glass having a refractive index of about 1.5 as a main component. The light incident surface 11a is a flat surface on which light from a light source disposed outside the optical element enters, and faces the light extraction surface 11 b. The light extraction surface 11b is a flat surface on the surface of which the volume phase hologram grating 13 is formed, and faces the light incident surface 11 a.
The diffraction grating portion 12 is a substantially plate-shaped portion formed on the volume phase hologram grating 13, and a plurality of projections 12a and recesses 12b are periodically formed on the surface to constitute a diffraction grating.
Fig. 1 shows an example in which the convex portions 12a and the concave portions 12b of the diffraction grating section 12 extend in parallel stripes, but the configuration is not limited to the stripes, and the convex portions 12a and the concave portions 12b may be two-dimensionally arranged. In fig. 1, the convex portions 12a and the concave portions 12b of the diffraction grating portion 12 are shown to have a rectangular cross section, but the cross-sectional shape is not limited thereto, and a slant grating or a blazed grating may be used.
The material constituting the diffraction grating portion 12 is not limited, but a dielectric material having a large refractive index difference from the volume phase hologram grating 13 is preferably used, and for example, TiO is preferably used2The dielectric material has a refractive index of about 2.5 as a main component. The size of the diffraction grating portion 12 is not particularly limited, but it is preferable to have a thickness that allows light to propagate also in the in-plane direction. The diffraction grating portion 12 can be formed by a known method, and for example, a nanoimprint technique, an EBL (Electron Beam Lithography) technique, or the like can be used.
The volume phase hologram grating 13 is formed on the light extraction surface 11b of the light guide unit 11, and is a layer in which a periodic structure 13a having a refractive index is three-dimensionally formed. A diffraction grating portion 12 is formed on the surface of the volume phase hologram grating 13. The material constituting the volume phase hologram grating 13 is not particularly limited, but a material having photosensitivity is preferably used, and a known material such as dichromated gelatin can be used.
The thickness of the volume phase hologram grating 13 is not limited, but is preferably about 10 to 30 μm. This is because when the volume phase hologram 13 is manufactured with a wavelength λ, a thickness t, an angle formed by two light beams in the hologram θ, and a refractive index n, the wavelength selection range of the reproduction light is set to be Δ λ ═ λ2And/nt (1-cos. theta.) is expressed. For example, in order to narrow the wavelength selection range of the reproduction light to about Δ λ of 20nm, t of about 24 μm is suitable under the conditions of λ of 532nm, n of 1.5, and θ of 90 °.
An example of a method of manufacturing the optical element shown in fig. 1 is explained. First, a plate-shaped light guide portion 11 is prepared in a substrate preparation step, and then a dichromate gelatin film is formed by coating a gelatin film on the light guide portion 11 and immersing the coated film in an ammonium dichromate aqueous solution in a deposition step. Next, in the photolithography step, the periodic structure 13a having a three-dimensional refractive index is exposed to the inside of the dichromate gelatin film by using a known interference lithography technique, thereby forming the volume phase hologram grating 13.
Next, in the dielectric forming step, TiO is formed on the volume phase hologram 13 by vapor deposition or the like2Layer, followed by formation of a diffraction grating on TiO2The diffraction grating portion 12 is formed by forming convex portions 12a and concave portions 12b on the layer surface by the EBL technique. Finally, the optical element of the present embodiment can be obtained by cutting the optical element into a predetermined size in the dicing step. Although not shown in fig. 1, a protective film such as glass may be formed on the side surface of the optical element as needed to seal the side surface of the volume phase hologram 13.
Fig. 2 is a schematic sectional view showing the structure and optical path of the light source device 10 using an optical element. As shown in fig. 2, in the light source device 10 of the present embodiment, light is irradiated from the light source unit 14 to the light incident surface 11a of the optical element shown in fig. 1. The light source unit 14 is not limited as long as it is a light source that irradiates coherent light of a predetermined wavelength, but an Optical Phased Array (OPA) in which a plurality of light emitting units that irradiate laser light are two-dimensionally arranged is preferably used.
As shown in fig. 2, the laser light emitted from the light source unit 14 enters the light incident surface 11a of the light guide unit 11 substantially perpendicularly, and irradiates the inside of the light guide unit 11 at an irradiation angle Φ0Travels and reaches the light extraction surface 11 b. The light reaching the light extraction surface 11b passes through the volume phase hologram grating 13 and the diffraction grating part 12 and is irradiated at an angle Φ2Irradiating to the outside. At this time, the laser beam is diffracted by the periodic structure 13a having the refractive index in the volume phase hologram grating 13, and then is diffracted by the diffraction grating portion 12. Thereby, the irradiation angle Φ can be enlarged as compared with the case where the diffraction grating section 12 or the volume phase hologram grating 13 is used alone2。
As shown in fig. 2, since the light transmitted through the diffraction grating portion 12 is light diffracted by the volume phase hologram grating 13, it is necessary to design the convex portion 12a and the concave portion 12b in the diffraction grating portion 12 on the premise of diffraction in the volume phase hologram grating 13. The angle at which the laser light emitted from the light source unit 14 enters the light guide unit 11 needs to satisfy the diffraction conditions of the diffraction grating unit 12 and the volume phase hologram grating 13.
In the optical element and the light source device 10 of the present embodiment, since the diffraction grating section 12 and the volume phase hologram grating 13 are combined to form a multiple diffraction grating, it is possible to achieve a reduction in size and weight as compared with a case where an irradiation angle is enlarged using an optical lens and a mirror. Further, by using the diffraction grating section 12 and the volume phase hologram grating 13, the light irradiation range can be expanded without setting the focal distance between the optical element and the light source section 14, and the degree of freedom in design is improved.
As the optical element of the present invention, instead of forming the diffraction grating portion 12 on the volume phase hologram grating 13, an additional volume phase hologram grating layer may be formed. However, when an additional volume phase hologram grating layer is formed on the volume phase hologram grating 13, an air gap may be generated between the two layers, and optical characteristics may be degraded.
In contrast, in the optical element and the light source device 10 of the present embodiment, since the diffraction grating portion 12 is formed by depositing a dielectric material on the volume phase hologram grating 13, it is possible to prevent air gaps from being generated at the interface and suppress deterioration of optical characteristics. Although the formation of the volume phase hologram 13 requires a large number of steps and a long manufacturing time, the manufacturing process can be simplified by forming only one layer of the volume phase hologram 13 and combining it with the diffraction grating portion 12.
Further, since the diffraction grating portion 12 made of a dielectric material is formed on the upper surface of the volume phase hologram grating 13 made of a material such as gelatin, the volume phase hologram grating 13 can be protected from air. Here, if a protective film such as glass is formed also on the side surface of the optical element, the volume phase hologram 13 can be sealed by the diffraction grating portion 12 and the protective film, which is more preferable.
In addition, the diffraction grating portion 12 may be formed by not only the convex portion 12a and the concave portion 12b having a rectangular cross section as described above, but also a slant grating, a blazed grating, or a two-dimensional diffraction grating. This improves the degree of freedom in optical design of the diffraction grating portion 12, and also facilitates adjustment of the optical characteristics of the optical element and the light source device 10.
As described above, the optical element and the light source device 10 of the present embodiment are smaller and lighter in weight, and can expand the light irradiation range, as compared with the case of using a mirror and an optical lens.
(second embodiment)
Next, a second embodiment of the present invention will be explained. The description overlapping with the first embodiment is omitted. Fig. 1 shows that light incident from the light source unit 14 is irradiated at an angle Φ in the light guide unit 110As an example of the travel, laser light from the light source unit 14 may be made incident on the light incident surface 11a as collimated light by a lens or the like. In this case, the irradiation angle Φ00 degrees.
By making the light entering the light guide unit 11 collimated, the area of the optical phased array used by the light source unit 14 can be made to be the same as that of the optical element, and the light intensity per unit area can be increased.
(third embodiment)
Next, a third embodiment of the present invention will be explained. The description overlapping with the first embodiment is omitted. In the first embodiment, the rear surface side of the light guide unit 11 is used as the light incident surface 11a, and the laser light is made to enter the light incident surface 11a substantially perpendicularly, but the laser light may be made to irradiate the light incident surface 11a at an incident angle inclined at a predetermined angle. In this case, it is necessary to appropriately design the periodic structure 13a of the refractive index formed inside the volume phase hologram grating 13, and the convex portion 12a and the concave portion 12b formed in the diffraction grating portion 12, respectively, corresponding to the incident angle.
Although the back surface side of the light guide unit 11 is referred to as the light incident surface 11a in fig. 1, the side surface may be referred to as the light incident surface 11a, and the laser light may be caused to reach the light extraction surface 11b at an incident angle inclined at a predetermined angle.
The present invention is not limited to the above embodiments, and various modifications can be made within the scope shown in the claims, and embodiments obtained by appropriately combining the technical means disclosed in the respective different embodiments are also included in the technical scope of the present invention.
The present international application claims priority to japanese patent application No. 2019-.
The foregoing descriptions of specific embodiments of the present invention are presented for purposes of illustration and description. The above description is not intended to be exhaustive or to limit the invention to the precise embodiment described. Those skilled in the art can make numerous variations and modifications with reference to the above description.
Description of the reference numerals
10 light source device
11 light guide part
11a light incident surface
11b light extraction surface
12 diffraction grating part
12a convex part
12b recess
13 volume phase holographic grating
Periodic structure of 13a refractive index
14 light source part.
Claims (5)
1. An optical element, comprising:
a light guide section having a light incident surface on which light is incident and a light extraction surface to which the light reaches;
a volume phase holographic grating disposed on the light extraction surface; and
and a diffraction grating section provided on the volume phase holographic grating.
2. The optical element of claim 1, wherein the volume phase holographic grating has a periodic structure of refractive index formed inside a gelatin layer.
3. The optical element according to claim 1 or 2, wherein the diffraction grating portion is constituted by a dielectric film.
4. A light source device, comprising:
an optical element according to any one of claims 1 to 3; and
a light source unit that irradiates the light onto the light incident surface,
and irradiating a part of the light from the diffraction grating section to the outside.
5. The light source device according to claim 4, wherein the light source unit is an optical phased array in which a plurality of light emitting units are two-dimensionally arranged.
Applications Claiming Priority (3)
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JP2019081905A JP7398878B2 (en) | 2019-04-23 | 2019-04-23 | Optical elements and light source devices |
JP2019-081905 | 2019-04-23 | ||
PCT/JP2020/016527 WO2020218106A1 (en) | 2019-04-23 | 2020-04-15 | Optical element and light source device |
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CN113544556A true CN113544556A (en) | 2021-10-22 |
CN113544556B CN113544556B (en) | 2023-08-25 |
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WO (1) | WO2020218106A1 (en) |
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JP2020181005A (en) | 2020-11-05 |
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