CN113534034B - Method for calibrating transmission amplitude of on-chip S parameter standard device - Google Patents
Method for calibrating transmission amplitude of on-chip S parameter standard device Download PDFInfo
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- CN113534034B CN113534034B CN202110670777.9A CN202110670777A CN113534034B CN 113534034 B CN113534034 B CN 113534034B CN 202110670777 A CN202110670777 A CN 202110670777A CN 113534034 B CN113534034 B CN 113534034B
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Abstract
One embodiment of the invention discloses a method for calibrating transmission amplitude of an on-chip S parameter etalon, which comprises the following steps: s10: selecting a corresponding waveguide variable attenuator according to the working frequency and the attenuation of the S parameter standard device of the measured on-chip; s30: constructing an on-chip S parameter measuring system and setting the frequencies of a radio frequency signal source and a local oscillator signal source; s50: the measured on-chip S parameter standard is not accessed to the on-chip S parameter measuring system, a first amplitude measuring value of the on-chip S parameter measuring system is initially calibrated, and a first position of the waveguide variable attenuator at the moment is recorded; s70: the measured on-chip S parameter standard is accessed to the on-chip S parameter measuring system, the waveguide variable attenuator is adjusted to enable the system to recover to the first amplitude measured value, and the second position of the waveguide variable attenuator at the moment is recorded; s90: and calculating a calibration value of the transmission amplitude of the measured on-chip S parameter standard according to the first position and the second position of the waveguide variable attenuator.
Description
Technical Field
The invention relates to the technical field of S parameter measurement of a chip, in particular to a method for calibrating transmission amplitude of an S parameter etalon of the chip.
Background
In recent years, modern military and civil electronic equipment has higher and higher requirements on high integration, high frequency, low power consumption and the like, and surface technologies are adopted in the design of devices in large quantity, so that the problem of measuring S parameters of the surface devices is solved firstly. The measurement of surface devices is usually realized by using an on-chip S-parameter measurement system, which includes a network analyzer, a probe station, a probe, and a calibration substrate.
The measurement accuracy of the on-chip S parameter measurement system is determined by residual errors of a network analyzer, technical indexes of probes, an adopted calibration method, the ideal degree of a calibration substrate, connection repeatability and the like, and because the relationship among the residual errors, the technical indexes of the probes, the ideal degree of the calibration substrate, the connection repeatability and the like is relatively complex and each component is difficult to accurately and independently determine, the measurement accuracy of the on-chip S parameter measurement system is difficult to determine by a subentry analysis method. In order to determine the measurement accuracy of the on-chip measurement system, it is usually necessary to calibrate the measurement parameters of the system by using a standard value of an etalon, and compare the calibrated value of the etalon with a value actually measured by using the on-chip S parameter measurement system, so as to obtain the measurement accuracy of the system.
The transmission amplitude measuring accuracy is an important parameter of an on-chip S parameter measuring system, and a transmission amplitude checking piece of the currently adopted on-chip S parameter measuring system is an attenuator in the form of a coplanar waveguide connecting line. As shown in fig. 1, 1 is a substrate, 2 is a ground line, 3 is a signal line, and 4 is a thin film resistor. The signal line is a metal layer with uniform width, the width of the metal layer is designed into a transmission line with the characteristic impedance of 50 omega according to the dielectric constant of a base material, the thickness of the base material, the thickness of a gold layer, the interval between the signal line and a ground wire and the like, the sheet resistance of a thin film resistor is generally 50 omega or 100 omega, an attenuator with corresponding attenuation is formed by designing a T-type or pi-type network, and the attenuation of the attenuator is generally 20dB, 40dB, 60dB and the like according to the transmission amplitude measuring range of a tested network analyzer in a chip measuring system.
After the on-chip S parameter measuring system is calibrated, the probes are lapped on two sides of the transmission amplitude inspection piece to measure the transmission amplitude, the calibration value of the transmission amplitude inspection piece is known as y, and the measured value of the on-chip S parameter measuring system obtained through measurement is y 0 By comparing y with y 0 The value of the on-chip measurement system is obtained with the system deviation so as to realize the calibration of the transmission amplitude of the on-chip measurement system.
At present, the calibration value of an on-chip attenuator used as an on-chip S parameter measurement system transmission amplitude standard is obtained mainly by measuring the size of each electrode in a theoretical calculation and simulation mode to obtain a geometric value, and then the geometric value is brought into electromagnetic simulation software to obtain a simulation value as the calibration value of the attenuation standard. The method is based on the premise of ideal medium and ideal processing, and when the actual processing technology has deviation or the dielectric constant of the used substrate is different from the theoretical value, the simulated value is not accurate as the calibration value.
Disclosure of Invention
The invention aims to provide a method for calibrating the transmission amplitude of an on-chip S parameter standard, which realizes the calibration of the transmission amplitude of the tested on-chip S parameter standard by using a standard waveguide variable attenuator as a previous-level standard and a millimeter wave attenuation substitution method.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a method for calibrating transmission amplitude of an S parameter etalon of an on-chip, which comprises the following steps:
s10: selecting a corresponding waveguide variable attenuator according to the working frequency and the attenuation of the measured on-chip S parameter standard device;
s30: constructing an on-chip S parameter measuring system and setting the frequencies of a radio frequency signal source and a local oscillator signal source;
s50: the measured on-chip S parameter standard device is not connected with the on-chip S parameter measuring system, a first amplitude measuring value of the on-chip S parameter measuring system is initially calibrated, and a first position of the waveguide variable attenuator at the moment is recorded;
s70: the measured on-chip S parameter standard device is connected to the on-chip S parameter measuring system, the waveguide variable attenuator is adjusted to enable the system to recover to the first amplitude measuring value, and the second position of the waveguide variable attenuator at the moment is recorded;
s90: and calculating a calibration value of the transmission amplitude of the measured on-chip S parameter standard according to the first position and the second position of the waveguide variable attenuator.
In a specific example, the operating frequency of the corresponding waveguide variable attenuator in step S10 can cover the operating frequency of the measured on-chip S parameter standard, and the attenuation is greater than that of the measured on-chip S parameter standard.
In one particular example, the waveguide variable attenuator is a polarized waveguide variable attenuator.
In a specific example, the on-chip S parameter measuring system is constructed by sequentially connecting a radio frequency signal source, a first isolation attenuator, a waveguide variable attenuator, an isolator, a first probe, a second isolation attenuator, a mixer, and a measuring receiver, wherein,
the signal output by the radio frequency signal source is used as an input signal of the S parameter standard device of the tested on-chip;
the first probe and the second probe are used for converting an input signal from a waveguide feed form into an on-chip signal feed provided for the on-chip S parameter standard to be tested.
In one specific example, the on-chip S parameter measurement system further includes: the local oscillator signal source, wherein,
the local oscillator signal source provides a signal which is different from the radio frequency signal source by a fixed frequency to the frequency mixer, the frequency mixer outputs an intermediate frequency signal, and the transmission amplitude of the intermediate frequency signal is measured by the measuring receiver.
In one specific example, the radio frequency signal source, the local oscillator signal source and the measurement receiver share a time base.
In a specific example, the measured on-chip S parameter standard is not connected to the on-chip S parameter measurement system, a first amplitude measurement value of the on-chip S parameter measurement system is initially calibrated, and a first position of the waveguide variable attenuator at that time is recorded; the method comprises the following steps:
the measured on-chip S parameter standard is not connected with the on-chip S parameter measuring system, the first probe and the second probe are connected through a transmission line, the waveguide variable attenuator is adjusted to the first position, the attenuation of the waveguide variable attenuator can cover the attenuation of the measured on-chip S parameter standard, the measuring receiver is adjusted to the corresponding intermediate frequency, and the first amplitude measured value of the measuring receiver at the moment is obtained.
In one specific example, the step of connecting the measured on-chip S parameter standard to the on-chip S parameter measurement system, adjusting the waveguide variable attenuator to restore the system to the first amplitude measurement value, and the step of recording the second position of the waveguide variable attenuator at the time includes:
and the measured S parameter standard device is connected between the first probe and the second probe, the amplitude measured value of the measuring receiver is monitored, the waveguide variable attenuator is adjusted until the amplitude measured value of the measuring receiver is restored to the first amplitude measured value, and the second position of the waveguide variable attenuator at the moment is recorded.
In a specific example, the second position of the waveguide variable attenuator is taken as a reference position, and the attenuation change from the second position of the waveguide variable attenuator to the first position of the waveguide variable attenuator is measured, and the change is a calibrated value of the transmission amplitude of the measured on-chip S parameter standard.
The invention has the following beneficial effects:
the method for calibrating the transmission amplitude of the on-chip S parameter etalon transmits the value of the traced variable waveguide attenuator to the attenuator in the coplanar waveguide form by a millimeter wave substitution method, wherein the method firstly utilizes two isolation attenuators to play a role in reducing mismatch, thereby reducing the influence of the mismatch on the transmission amplitude measurement and improving the attenuation calibration accuracy; secondly, the radio frequency or millimeter wave signals are changed into low frequency signals for measurement by using a frequency mixing mode, so that the rear-end amplitude measurement difficulty and the equipment cost are reduced; third, the amplitude measurement circuit is implemented using a measurement receiver having a dynamic range of at least 100dB that provides sufficient measurement accuracy for the transmission amplitude of large attenuation on-chip S-parameter etalons.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 shows a schematic view of a transmission amplitude check member of a currently employed on-chip S-parameter measurement system.
Fig. 2 shows a flow chart of a method for scaling the transmission amplitude of an on-chip S-parameter etalon according to one embodiment of the present invention.
FIG. 3 is a schematic diagram of an on-chip S parameter measurement system according to an embodiment of the present invention.
Detailed Description
In order to make the technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The method for calibrating the transmission amplitude of the on-chip S parameter standard device is to transmit the value of the traced waveguide variable attenuator to the attenuator in the form of the coplanar waveguide by using a millimeter wave substitution method.
The standard variable attenuator is in a waveguide joint form, and the calibration value of the attenuation is calibrated by a corresponding waveguide attenuation device, so that the standard variable attenuator has traceability. During initial normalization, the S parameter standard device is not connected into the system, a short transmission line is connected between the two probes, the waveguide standard attenuator is connected in the system in series, the attenuation of the waveguide standard attenuator is adjusted to be slightly larger than the attenuation of the S parameter standard device in the dynamic range of the receiver system, and the power reading of the measuring receiver is recorded; during measurement, the attenuation of the waveguide standard attenuator is reduced between the S parameter standard device access probes, so that the reading of a rear-end measurement receiver is consistent with the first reading, and the calibration value of the transmission amplitude of the S parameter standard device is calibrated through the variable value of the waveguide standard attenuator.
One embodiment of the present invention provides a method for scaling the transmission amplitude of an on-chip S-parameter etalon, as shown in fig. 2, comprising the steps of:
s10: selecting a corresponding waveguide variable attenuator according to the working frequency and the attenuation of the measured on-chip S parameter standard device;
s30: constructing an on-chip parameter measuring system and setting the frequencies of a radio frequency signal source and a local oscillator signal source;
s50: the measured on-chip S parameter standard device is not connected with the on-chip S parameter measuring system, a first amplitude measuring value of the on-chip S parameter measuring system is initially calibrated, and a first position of the waveguide variable attenuator at the moment is recorded;
s70: the measured on-chip S parameter standard is accessed to the on-chip S parameter measuring system, the waveguide variable attenuator is adjusted to enable the system to recover to the first amplitude measured value, and the second position of the waveguide variable attenuator at the moment is recorded;
s90: and calculating a calibration value of the transmission amplitude of the measured on-chip S parameter standard according to the first position and the second position of the waveguide variable attenuator.
In a specific embodiment, the operating frequency of the corresponding waveguide variable attenuator in step S10 should cover the operating frequency of the measured on-chip S parameter standard, and the attenuation should be greater than that of the measured on-chip S parameter standard.
In a specific embodiment, the waveguide variable attenuator is a polarized waveguide variable attenuator.
The waveguide polarization attenuator is used as a radio frequency substitute attenuator and is calibrated by the waveguide attenuation device, so that the traceability is high, and the calibration accuracy of the on-chip transmission amplitude standard device is improved;
the attenuation of the polarization attenuator is continuously adjustable, so that the resolution error of continuous two-gear attenuation is ignored, and the calibration accuracy of the S parameter attenuator on the chip is improved.
In one embodiment, as shown in fig. 3, the on-chip S parameter measuring system is constructed by sequentially connecting a radio frequency signal source 101, a first isolation attenuator 102, a waveguide variable attenuator 103, an isolator 104, a first probe 105, a second probe 107, a second isolation attenuator 108, a mixer 109, and a measuring receiver 110, wherein,
the signal output by the radio frequency signal source 101 is used as an input signal of the measured on-chip S parameter standard device and is 50GHz-500GHz;
the first probe 105 and the second probe 107 are used for converting an input signal from a waveguide feed form into an on-chip signal feed provided to the on-chip S parameter standard 106 to be tested.
In a specific embodiment, the on-chip S parameter measuring system further includes: the local oscillator signal source 111 may be, among other things,
the local oscillator signal source 111 provides a signal having a fixed intermediate frequency difference with the rf signal source 101 to the mixer, the mixer 109 outputs a low intermediate frequency signal within 500MHz, and the transmission amplitude of the low intermediate frequency signal is measured by the measurement receiver 110.
The first isolation attenuator has the function of reducing the influence of the mismatching of the incident signal on the transmission amplitude measurement, and the second isolation attenuator has the function of reducing the influence of the mismatching of the emergent signal on the transmission amplitude measurement;
the mixer is used for converting the radio frequency or millimeter wave signal into low frequency for measurement, so that the rear-end amplitude measurement difficulty and the equipment cost are reduced;
in a specific embodiment, the radio frequency signal source, the local oscillator signal source and the measurement receiver share a time base, and the reference is 10MHz;
the amplitude measurement circuit is realized by adopting a measurement receiver, the measurement receiver has a dynamic range of at least 100dB, and can provide enough measurement accuracy for the transmission amplitude of the on-chip S parameter standard with large attenuation.
In a specific embodiment, the measured on-chip S parameter standard is not connected to the on-chip S parameter measurement system, a first amplitude measurement value of the on-chip S parameter measurement system is initially calibrated, and a first position of the waveguide variable attenuator at that time is recorded; the method comprises the following steps:
the measured on-chip S parameter standard is not connected with the on-chip S parameter measuring system, the first probe and the second probe are connected through a short transmission line, the waveguide variable attenuator is adjusted to the first position, the attenuation of the waveguide variable attenuator can cover the attenuation of the measured on-chip S parameter standard, the measuring receiver is adjusted to the corresponding intermediate frequency, and the first amplitude measuring value of the measuring receiver at the moment is obtained.
In one embodiment, the step of switching the measured on-chip S parameter standard into the on-chip S parameter measurement system, adjusting the waveguide variable attenuator to restore the system to the first amplitude measurement value, and the step of recording the second position of the waveguide variable attenuator at the time includes:
and the measured S parameter standard device is connected between the first probe and the second probe, the amplitude measured value of the measuring receiver is reduced due to the increase of the attenuation in the system measuring channel, the amplitude measured value of the measuring receiver is monitored, the waveguide variable attenuator is adjusted until the amplitude measured value of the measuring receiver is restored to the first amplitude measured value, and the second position of the waveguide variable attenuator at the moment is recorded.
In a specific embodiment, the second position of the waveguide variable attenuator is taken as a reference position, and the attenuation change from the second position of the waveguide variable attenuator to the first position of the waveguide variable attenuator is measured, and the change is a calibrated value of the transmission amplitude of the measured on-chip S parameter standard.
It should be understood that the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention, and it will be obvious to those skilled in the art that other variations or modifications may be made on the basis of the above description, and all embodiments may not be exhaustive, and all obvious variations or modifications may be included within the scope of the present invention.
Claims (5)
1. A method for scaling the transmission amplitude of an S-parameter etalon in a chip, comprising the steps of:
s10: selecting a corresponding waveguide variable attenuator according to the working frequency and the attenuation of the measured on-chip S parameter standard device;
s30: constructing an on-chip S parameter measuring system and setting the frequencies of a radio frequency signal source and a local oscillator signal source;
s50: the measured on-chip S parameter standard device is not connected with the on-chip S parameter measuring system, a first amplitude measuring value of the on-chip S parameter measuring system is initially calibrated, and a first position of the waveguide variable attenuator at the moment is recorded;
s70: the measured on-chip S parameter standard device is connected to the on-chip S parameter measuring system, the waveguide variable attenuator is adjusted to enable the system to recover to the first amplitude measuring value, and the second position of the waveguide variable attenuator at the moment is recorded;
s90: calculating a calibration value of the transmission amplitude of the measured on-chip S parameter standard according to the first position and the second position of the waveguide variable attenuator;
the on-chip S parameter measuring system is constructed by sequentially connecting a radio frequency signal source, a first isolation attenuator, a waveguide variable attenuator, an isolator, a first probe, a second isolation attenuator, a mixer and a measuring receiver, wherein,
the signal output by the radio frequency signal source is used as an input signal of the S parameter standard device of the tested on-chip;
the first probe and the second probe are used for converting an input signal from a waveguide feed-in mode into an on-chip signal feed-in mode provided for an on-chip S parameter standard to be tested;
the on-chip S parameter measurement system further comprises: the local oscillator signal source, wherein,
the local oscillator signal source provides a signal which is different from the radio frequency signal source by a fixed frequency to the mixer, the mixer outputs an intermediate frequency signal, and the transmission amplitude of the intermediate frequency signal is measured by the measuring receiver;
the measured on-chip S parameter standard is not accessed to the on-chip S parameter measuring system, a first amplitude measuring value of the on-chip S parameter measuring system is initially calibrated, and a first position of the waveguide variable attenuator at the moment is recorded; the method comprises the following steps:
the measured on-chip S parameter standard is not connected with the on-chip S parameter measuring system, the first probe and the second probe are connected through a transmission line, the waveguide variable attenuator is adjusted to a first position, the attenuation of the waveguide variable attenuator can cover the attenuation of the measured on-chip S parameter standard, the measuring receiver is adjusted to a corresponding intermediate frequency, and a first amplitude measuring value of the measuring receiver at the moment is obtained;
connecting the measured on-chip S parameter standard device into the on-chip S parameter measuring system, adjusting the waveguide variable attenuator to restore the system to the first amplitude measurement value, and recording the second position of the waveguide variable attenuator at the moment comprises:
and the measured S parameter standard device is connected between the first probe and the second probe, the amplitude measured value of the measuring receiver is monitored, the waveguide variable attenuator is adjusted until the amplitude measured value of the measuring receiver is restored to the first amplitude measured value, and the second position of the waveguide variable attenuator at the moment is recorded.
2. The calibration method according to claim 1, wherein the operating frequency of the corresponding waveguide variable attenuator in step S10 is capable of covering the operating frequency of the measured on-chip S parameter standard, and the attenuation is greater than that of the measured on-chip S parameter standard.
3. The calibration method according to claim 1, wherein the waveguide variable attenuator is a polarized waveguide variable attenuator.
4. The calibration method according to claim 1, wherein the radio frequency signal source, the local oscillator signal source and the measurement receiver have a common time base.
5. The calibration method according to claim 1, wherein the second position of the waveguide variable attenuator is used as a reference position, and the attenuation variation from the first position of the waveguide variable attenuator is measured, and the variation is a calibration value of the transmission amplitude of the measured on-chip S parameter standard.
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| JP2009058348A (en) * | 2007-08-31 | 2009-03-19 | Campus Create Co Ltd | Measurement method using vector network analyzer, and calibration method and program of the same |
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| US20070136018A1 (en) * | 2005-12-09 | 2007-06-14 | Fernandez Andrew D | Nonlinear model calibration using attenuated stimuli |
| CN201600445U (en) * | 2010-02-03 | 2010-10-06 | 北京无线电计量测试研究所 | 1GHz-50GHz coaxial attenuation calibrator |
| CN103364752B (en) * | 2013-07-19 | 2015-12-23 | 中国电子科技集团公司第十三研究所 | A kind of field calibration method in sheet load balance factor measuring system |
| CN106772172B (en) * | 2016-10-25 | 2019-05-14 | 中国电子科技集团公司第十三研究所 | In the design method of piece high/low temperature S parameter TRL calibration component |
| CN110412495B (en) * | 2019-07-03 | 2021-07-13 | 北京无线电计量测试研究所 | Nonlinear S parameter inspection device |
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| TW346541B (en) * | 1997-10-15 | 1998-12-01 | Ind Tech Res Inst | Method for calibrating stepper attenuator a method for calibrating a stepper attenuator, comprises testing the S parameters with no attenuator; separately testing the S parameters for each attenuator; etc. |
| JP2009058348A (en) * | 2007-08-31 | 2009-03-19 | Campus Create Co Ltd | Measurement method using vector network analyzer, and calibration method and program of the same |
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