CN113514474A - Penetrant, preparation method thereof and ceramic part surface flaw detection method - Google Patents
Penetrant, preparation method thereof and ceramic part surface flaw detection method Download PDFInfo
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- CN113514474A CN113514474A CN202110731434.9A CN202110731434A CN113514474A CN 113514474 A CN113514474 A CN 113514474A CN 202110731434 A CN202110731434 A CN 202110731434A CN 113514474 A CN113514474 A CN 113514474A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/91—Investigating the presence of flaws or contamination using penetration of dyes, e.g. fluorescent ink
Abstract
The embodiment of the invention provides a penetrant, a preparation method thereof and a ceramic piece surface flaw detection method. The technical scheme of the penetrant, the preparation method thereof and the ceramic piece surface flaw detection method provided by the embodiment of the invention can obviously improve the adsorption effect of the fluorescent dye and the penetration effect of the fluorescent dye on the ceramic piece, and can improve the penetration depth of the fluorescent dye on the ceramic piece, thereby improving the accuracy of the detection result, expanding the detection range and optimizing the detection effect.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a penetrant, a preparation method thereof and a ceramic piece surface flaw detection method.
Background
The ceramic material has excellent performances of high temperature resistance, corrosion resistance, wear resistance, low density and the like, can be made into various parts in various engineering machines and precision operations to replace traditional materials, and has wide application prospect. However, various defects are often generated in the manufacturing and using processes of the ceramic material, and the service performance and the product life of the ceramic piece are affected, so that the application of the ceramic piece is limited. The defects of ceramic materials can be classified into: internal defects and surface defects, with surface defects being the most harmful. And because the ceramic defects are extremely tiny, great difficulty is brought to the flaw detection of the surface defects of the ceramic materials.
The current common surface flaw detection method is a surface soaking detection method, in which a penetrant (e.g. magenta) containing fluorescent dye or coloring dye is applied to the surface of the detected object, and after a certain time, the penetrant can penetrate into the opening defects of the surface of the detected object based on the capillary phenomenon of liquid; then, removing the redundant penetrating agent on the surface of the detected piece, drying, and then coating an adsorption medium (namely, a developer) on the surface of the detected piece; the imaging agent will wick the penetrant in the defect under capillary action, i.e., cause the penetrant to permeate back into the imaging agent. Under the irradiation of a specified light source (black light or white light), the penetrant traces at the defects can be shown in a specific color (yellow green fluorescence or bright red) on the surface of the detected piece, so that the appearance and distribution state of the defects on the surface of the detected piece can be detected.
The penetrant which is most widely applied at present is a fuchsin penetrant, and the main components of the penetrant comprise: dye Magenta (Magenta) and fluorescent whitening agent (fluorochentbright ener). Referring to fig. 1, fig. 1 shows the penetration effect of a ceramic test piece under the irradiation of a black light lamp after the surface penetration detection method is completed, wherein the ceramic test piece is a cylinder with a diameter of 50mm and a thickness of 20 mm. Fig. 1 shows (a) a front view of a ceramic test piece, (b) a side view of the ceramic test piece, and (c) a rear view of the ceramic test piece. As can be seen from the graphs (a) to (c), after the ceramic test piece described above was infiltrated with the magenta penetrant for two hours, there was almost no adsorption of the fluorescent agent on the test surface of the ceramic test piece, because: fluorescent whitening agents are less stable to ultraviolet light, are susceptible to ultraviolet light, and even fail under certain conditions of ultraviolet intensity and exposure time. In addition, the fluorescent whitening agent has poor adsorbability on the ceramic material, so that the fluorescent effect under defects is not obvious, and the fuchsin penetrant has poor permeability on the ceramic material, so that the overall detection effect of the fuchsin penetrant is poor.
Referring to fig. 2, fig. 2 shows the penetration effect of another ceramic test piece under the irradiation of a black light lamp after the surface penetration detection method is completed, the ceramic test piece is a cube, and the size of the cube is as follows: the length X width X height is 100mm X20 mm. Fig. 2 (a) to (d) are a side view, a front view, another side view, and a back view of the ceramic test piece, respectively. As can be seen from the graphs (a) to (d), after the ceramic test piece was infiltrated with the magenta infiltrant for two hours, there was no penetration mark on each surface of the ceramic test piece, and there were only a few fluorescent spots, because: the dye fuchsin has poor permeability on ceramic materials and has shallow penetration depth (about 30 mu m).
Therefore, when the fuchsin penetrant is used for carrying out flaw detection on the surface defects of the ceramic part, the flaw detection effect is poor, and the accuracy of the detection result is low.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides a penetrant, a preparation method thereof and a ceramic piece surface flaw detection method, which can obviously improve the adsorption effect of fluorescent dye and the penetration effect of the fluorescent dye on a ceramic piece, and can improve the penetration depth of the fluorescent dye on the ceramic piece, thereby improving the accuracy of a detection result, expanding the detection range and optimizing the detection effect.
In order to achieve the aim, the invention provides a penetrant for flaw detection of surface defects of ceramic parts, and the components of the penetrant comprise fluorescent dye, light oil, petroleum hydrocarbon mixture, mineral oil and surfactant.
Optionally, the mass fraction of the fluorescent dye is 1% -10%; the mass fraction of the light oil is 15-30%; the mass fraction of the petroleum hydrocarbon mixture is 15-30%; the mass fraction of the mineral oil is 20-40%; the mass fraction of the surfactant is 5-15%.
Optionally, the fluorescent dye comprises vat red 41.
Optionally, the light oil comprises naphtha.
Optionally, the petroleum hydrocarbon mixture includes diethylene glycol butyl ether.
Optionally, the mineral oil comprises liquid paraffin.
Optionally, the surfactant comprises a nonionic surfactant XL-90.
As another technical solution, the present invention further provides a preparation method of an osmotic agent, which is applied to the preparation of the osmotic agent provided by the present invention, and the preparation method includes:
s1, mixing the petroleum hydrocarbon mixture with the fluorescent dye, stirring uniformly to obtain a first mixture,
and S2, adding light oil and mineral oil into the first mixture, and adding a surfactant after uniformly stirring to obtain the penetrant.
Optionally, in step S1, the stirring time is 1.5h to 2h, and the stirring speed is 30rad/min to 50 rad/min.
Optionally, in the step S2,
the stirring treatment time is 0.5h-1h, and the stirring speed is 30rad/min-50 rad/min.
As another technical scheme, the invention also provides a ceramic piece surface flaw detection method, which comprises the following steps:
s11, carrying out a cleaning process on the ceramic piece to remove pollutants on the surface of the ceramic piece;
s12, adopting the penetrating agent provided by the invention to perform a penetrating process on the cleaned ceramic piece;
and S13, carrying out an imaging process on the penetrated ceramic piece by using an imaging agent so as to generate a defect pattern on the surface of the ceramic piece.
The invention has the beneficial effects that:
in the technical scheme of the penetrant, the preparation method thereof and the ceramic piece surface flaw detection method provided by the embodiment of the invention, the components of the penetrant comprise fluorescent dye, light oil, petroleum hydrocarbon mixture, mineral oil and surfactant, wherein the petroleum hydrocarbon mixture is mixed with the fluorescent dye, so that the coloring effect of the fluorescent dye can be improved, and the visible color of the fluorescent dye under the irradiation of a black light lamp is more bright; the light oil and the mineral oil can increase the adhesion of the fluorescent dye to the ceramic part. Therefore, compared with the penetrant adopting fuchsin in the prior art, the penetrant provided by the embodiment of the invention can obviously improve the adsorption effect of the fluorescent dye and the penetration effect of the fluorescent dye on the ceramic piece, and can improve the penetration depth (the depth can reach 0.1mm) of the fluorescent dye on the ceramic piece, so that the depth of flaw detection of the surface defect of the ceramic piece can be improved, the accuracy of a detection result can be improved, the detection range can be expanded, and the detection effect can be optimized.
Drawings
FIG. 1 is a diagram of the permeation effect of a ceramic test piece under irradiation of a black light lamp after a surface permeation detection method is completed by using a conventional penetrant;
FIG. 2 is a graph of permeation effect of another ceramic test piece under irradiation of a black light lamp after a surface permeation detection method is completed by using a conventional penetrant;
FIG. 3 is a diagram of the permeation effect of a ceramic test piece under irradiation of a black light lamp after the surface permeation detection method is completed by using the penetrant provided by the embodiment of the present invention;
FIG. 4A is a front side permeation effect graph of another ceramic test piece under irradiation of a black light lamp after the surface permeation detection method is completed by using the permeation agent provided by the embodiment of the present invention;
FIG. 4B is a side permeation effect graph of the ceramic test piece in FIG. 4A under irradiation of a black light lamp after the surface permeation detection method is completed by using the penetrant provided by the embodiment of the present invention;
FIG. 5 is a block flow diagram of a method for preparing an osmotic agent according to an embodiment of the present invention;
fig. 6 is a flowchart of a method for detecting flaws on a surface of a ceramic part according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical scheme of the present invention, the penetrating agent provided by the present invention, the preparation method thereof, and the ceramic piece surface flaw detection method are described in detail below with reference to the accompanying drawings.
The penetrant provided by the embodiment of the invention is used for flaw detection of the surface defects of the ceramic parts so as to detect the appearance and distribution state of the defects on the surface of the ceramic parts. The ceramic member is, for example, a dielectric window, a dielectric cylinder or a liner in a semiconductor device, or the like.
The components of the penetrant provided by the embodiment of the invention comprise fluorescent dye, light oil, petroleum hydrocarbon mixture, mineral oil and surfactant. The petroleum hydrocarbon mixture is mixed with the fluorescent dye, so that the coloring effect of the fluorescent dye can be improved, and the visible color (generally red) of the fluorescent dye under the irradiation of a black light lamp is more vivid; light oil and mineral oil can increase the adhesive force of fluorescent dye to the ceramic part to can improve fluorescent dye adsorption effect, improve the infiltration effect to the ceramic part simultaneously, improve the penetration depth (the degree of depth can reach 0.1mm) of fluorescent dye on the ceramic part, and then can improve the detection result accuracy that ceramic part surface defect detected a flaw.
In some embodiments, in order to further improve the adsorption effect of the fluorescent dye and improve the permeation effect of the fluorescent dye on the ceramic part, optionally, the mass fraction of the fluorescent dye is 1% to 10%; the mass fraction of the light oil is 15-30%; the mass fraction of the petroleum hydrocarbon mixture is 15-30%; the mass fraction of the mineral oil is 20-40%; the mass fraction of the surfactant is 5-15%.
In some embodiments, optionally, the fluorescent dye comprises vat RED 41 (also known as RED 242). The reduced red 41 chemical substance is assigned with registration number 522-75-8 (CAS). The vat red 41 has the advantages of low density (1.3686), high refractive index (1.5341), high color index (73300), good coloring effect, strong penetration effect to ceramic materials, bright visible color under the irradiation of a black light lamp, and further adsorption effect and penetration effect.
In some embodiments, optionally, the light oil comprises Naphtha (Naphtha). The naphtha chemistry is assigned a registry number of 8030-30-6. The naphtha is used as an organic solvent, and can well dissolve most organic matters, so that the penetration effect on the ceramic part can be improved.
In some embodiments, optionally, the petroleum hydrocarbon mixture comprises butyl diglycol (butyl diglycol). Diethylene glycol butyl ether was assigned the chemical registry number 112-34-5. Diethylene glycol butyl ether has the characteristics of low toxicity, low ether taste and the like, can be dissolved in water and ethanol, and is commonly used as an auxiliary solvent of emulsified oil.
In some embodiments, optionally, the mineral oil comprises liquid paraffin (Paraffinum Liquidum). The chemical registration number of the liquid paraffin is 8012-95-1. The liquid paraffin has high chemical stability, is neutral, has good oil solubility, low sensitivity and sealing property, and can be used as a catalytic cracking reaction reagent.
In some embodiments, the surfactant optionally comprises a nonionic surfactant XL-90 (oxide, 2-methyl-, polymeric surfactant, mono (2-propylhexyl)). The chemical make-up registration for nonionic surfactant XL-90 is 166736-08-9. The non-ionic surfactant XL-90 has a good emulsification effect, can form directional attraction under the surrounding of a hydrophilic group of the surfactant, enables a reagent to be well emulsified, has a solubilization effect, is more obvious in effect compared with other surfactants, and is small in stimulation, pollution-free, safer and more environment-friendly.
Fig. 3 is a diagram of the permeation effect of a ceramic test piece under irradiation of a black light lamp after the surface permeation detection method is completed by using the penetrant provided by the embodiment of the invention. Fig. 3 shows (a) a front view of a ceramic test piece, (b) a side view of the ceramic test piece, and (c) a rear view of the ceramic test piece. The ceramic test piece is a cylinder, the diameter of the cylinder is 50mm, and the thickness of the cylinder is 20 mm. As can be seen from the diagrams (a) to (c), after the ceramic test piece is permeated by the penetrant provided by the embodiment of the present invention for two hours, under the irradiation of the black light lamp, it can be seen that a large amount of fluorescent dyes are adsorbed on the front surface, the back surface and the side surfaces of the ceramic test piece, the coloring effect of the fluorescent dyes is better, and the visible color (generally, red) under the irradiation of the black light lamp is more vivid.
FIG. 4A is a front side permeation effect graph of another ceramic test piece under irradiation of a black light lamp after the surface permeation detection method is completed by using the permeation agent provided by the embodiment of the present invention; fig. 4B is a side permeation effect diagram of the ceramic test piece in fig. 4A under irradiation of a black light lamp after the surface permeation detection method is completed by using the penetrant provided by the embodiment of the present invention. In fig. 4B, (a) is a side view of the ceramic test piece, (B) is a side view of the ceramic test piece, (c) is a side view of the ceramic test piece, and (d) is a side view of the ceramic test piece. The ceramic test piece is a cube, and the size of the cube is as follows: the length X width X height is 20mm X5 mm. As can be seen from the diagrams (a) to (d), after the ceramic test piece is infiltrated by the infiltrant provided by the embodiment of the present invention for two hours, under the irradiation of the black light lamp, it can be seen that the side surfaces of the ceramic test piece have obvious penetration marks (depth marks infiltrated into the ceramic test piece from the front surface or the back surface of the ceramic test piece), and the penetration depth of the penetration marks can reach 0.1mm through precise measurement.
As can be seen from the above, compared with the magenta penetrant adopted in the prior art, the penetrant provided by the embodiment of the present invention can significantly improve the fluorescent dye adsorption effect and the penetration effect on the ceramic part, and can also improve the penetration depth of the fluorescent dye on the ceramic part, so as to improve the depth of flaw detection on the surface of the ceramic part, further improve the accuracy of the detection result, expand the detection range, and optimize the detection effect.
As another technical solution, an embodiment of the present invention further provides a preparation method of an osmotic agent, which is applied to the preparation of the osmotic agent provided in the embodiment of the present invention, with reference to fig. 5, the preparation method includes:
s1, mixing the petroleum hydrocarbon mixture with the fluorescent dye, stirring uniformly to obtain a first mixture,
and S2, adding light oil and mineral oil into the first mixture, uniformly stirring, and adding a surfactant to obtain the penetrant.
In some embodiments, in order to further improve the stirring uniformity, optionally, in step S1, the stirring time is 1.5h to 2h, and the stirring speed is 30rad/min to 50 rad/min.
In some embodiments, in order to further improve the stirring uniformity, optionally, in the step S2, the stirring time is 0.5h to 1h, and the stirring speed is 30rad/min to 50 rad/min.
It should be noted that the above-mentioned stirring speed is the moving speed of the stirring tool. The stirring tool in the embodiment of the present invention is not particularly limited.
As another technical solution, an embodiment of the present invention further provides a method for detecting a flaw on a surface of a ceramic part, including the following steps:
s11, performing a cleaning process on the ceramic piece to remove pollutants on the surface of the ceramic piece;
the cleaning process can adopt a conventional ceramic piece cleaning method to remove pollutants on the surface of the ceramic piece. The ceramic piece cleaning method is, for example, soaking with a cleaning solution, ultrasonic cleaning, or the like.
S12, carrying out a penetration process on the cleaned ceramic piece by adopting the penetrating agent provided by the embodiment of the invention;
the infiltration process can select a corresponding infiltration method according to parameters such as the size, shape, number and inspection position of the ceramic piece, and specifically, the infiltration method includes, for example, spraying, brushing, pouring, dipping and the like.
And S13, developing the penetrated ceramic piece by using a developer to generate a defect pattern on the surface of the ceramic piece.
In some optional embodiments, after completing the step S12 and before performing the step S13, the following steps may be further included:
and removing the penetrant on the ceramic piece.
Methods for removing the penetrant on the ceramic article include, for example, solvent removal, cleaning agent wiping, water jet cleaning, and the like.
Further, after the step of removing the penetrating agent on the ceramic member is completed and before the step S13 is performed, the method may further include the following steps:
drying the ceramic piece;
methods of drying the ceramic member include, for example, wiping (wiping the ceramic member with a clean cloth), blow-drying with compressed air, blow-drying with hot air, and the like.
During the drying process of the ceramic member, the surface temperature of the ceramic member is generally controlled within a range of not more than 52 ℃ to prevent the ceramic member from being damaged.
In summary, in the technical solutions of the penetrant and the preparation method thereof, and the ceramic piece surface flaw detection method provided by the embodiments of the present invention, the components of the penetrant include a fluorescent dye, light oil, a petroleum hydrocarbon mixture, mineral oil, and a surfactant, wherein the petroleum hydrocarbon mixture can be mixed with the fluorescent dye to improve the coloring effect of the fluorescent dye, so that the visible color of the mixture under the irradiation of a black-light lamp is more vivid; the light oil and the mineral oil can increase the adhesion of the fluorescent dye to the ceramic part. Therefore, compared with the penetrant adopting fuchsin in the prior art, the penetrant provided by the embodiment of the invention can obviously improve the adsorption effect of the fluorescent dye and the penetration effect of the fluorescent dye on the ceramic piece, and can improve the penetration depth (the depth can reach 0.1mm) of the fluorescent dye on the ceramic piece, so that the depth of flaw detection of the surface defect of the ceramic piece can be improved, the accuracy of a detection result can be improved, the detection range can be expanded, and the detection effect can be optimized.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (11)
1. The penetrant is used for flaw detection of surface defects of ceramic parts and is characterized in that the components of the penetrant comprise fluorescent dye, light oil, petroleum hydrocarbon mixture, mineral oil and surfactant.
2. The penetrant of claim 1, wherein the mass fraction of the fluorescent dye is 1-10%; the mass fraction of the light oil is 15-30%; the mass fraction of the petroleum hydrocarbon mixture is 15-30%; the mass fraction of the mineral oil is 20-40%; the mass fraction of the surfactant is 5-15%.
3. The penetrant of claim 1 or 2, wherein the fluorescent dye comprises vat red 41.
4. The penetrant of claim 1 or 2, wherein the light oil includes naphtha.
5. The penetrant of claim 1 or 2, wherein the petroleum hydrocarbon mixture includes diethylene glycol butyl ether.
6. The osmotic agent of claim 1 or 2, wherein the mineral oil comprises liquid paraffin.
7. The osmotic agent of claim 1 or 2, wherein the surfactant comprises a nonionic surfactant XL-90.
8. A method for producing an osmotic agent, which is applied to the production of the osmotic agent according to any one of claims 1 to 7, the method comprising:
s1, mixing the petroleum hydrocarbon mixture with the fluorescent dye, stirring uniformly to obtain a first mixture,
and S2, adding light oil and mineral oil into the first mixture, and adding a surfactant after uniformly stirring to obtain the penetrant.
9. The method for preparing the osmotic agent according to claim 8, wherein the stirring time is 1.5h to 2h and the stirring speed is 30rad/min to 50rad/min in the step S1.
10. The method for preparing an osmotic agent according to claim 8, wherein in the step S2,
the stirring treatment time is 0.5h-1h, and the stirring speed is 30rad/min-50 rad/min.
11. The ceramic piece surface flaw detection method is characterized by comprising the following steps:
s11, carrying out a cleaning process on the ceramic piece to remove pollutants on the surface of the ceramic piece;
s12, adopting the penetrating agent of any one of claims 1 to 7 to perform a penetrating process on the cleaned ceramic piece;
and S13, carrying out an imaging process on the penetrated ceramic piece by using an imaging agent so as to generate a defect pattern on the surface of the ceramic piece.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114371115A (en) * | 2021-12-21 | 2022-04-19 | 中国国检测试控股集团股份有限公司 | Method for measuring penetration depth of permeable liquid hardening agent in cement-based material |
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