CN113488832A - Laser with modulator and optical module - Google Patents
Laser with modulator and optical module Download PDFInfo
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- CN113488832A CN113488832A CN202110729335.7A CN202110729335A CN113488832A CN 113488832 A CN113488832 A CN 113488832A CN 202110729335 A CN202110729335 A CN 202110729335A CN 113488832 A CN113488832 A CN 113488832A
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- optical waveguide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
Abstract
In the laser instrument and optical module with modulator that this application provided, include: a body; an optical waveguide disposed on the body; the optical waveguide includes: the light incident surface is positioned on one end surface of the optical waveguide; the light-emitting surface is positioned on the other end surface of the optical waveguide; a first arc side surface located at one side of the optical waveguide; and the circle center of the second arc side surface and the circle center of the first arc side surface are positioned on the same side of the optical waveguide, and the arc radius of the second arc side surface is larger than that of the first arc side surface. The application provides a laser instrument and optical module with modulator, includes that first circular arc side and second circular arc side make the optical waveguide to its one side bending through the optical waveguide side, utilizes the circular arc radius of second circular arc side to be greater than the circular arc radius of first circular arc side again, makes the double level and smooth continuous control of optical waveguide self on width and angle, but furthest's optimization waveguide design freedom, reduction waveguide bending loss, reduction terminal surface reflection.
Description
Technical Field
The application relates to the technical field of optical fiber communication, in particular to a laser with a modulator and an optical module.
Background
With the increasingly wide application of information photoelectric technology in the communication fields of wireless application, transmission networks, data center interconnection, access networks and the like, the requirements of related industries on the single-channel transmission rate and the multi-channel integration level of the photoelectric device are increasingly high, and the requirements on the design and manufacture of the photoelectric device are directly increased due to the improvement of the speed and the integration level. Optoelectronic devices include high-speed Semiconductor lasers, modulators, Optical amplifiers, etc., such as high-speed lasers with modulators based on III-V group compounds, which mainly include Distributed Feedback (DFB) Direct Modulated Lasers (DML), external cavity modulators (EML) of integrated Electro-absorption modulators (EAM), external cavity Modulated lasers of integrated Mach-Zehnder interferometers (MZI), Semiconductor Optical Amplifiers (SOA), etc. Most of the above-mentioned photoelectric devices (especially integrated devices) are based on a ridge waveguide structure, and the light-emitting end face thereof is mostly composed of a semiconductor crystal cleavage surface and an antireflection coating or an etched end face and an antireflection coating.
Due to the characteristics of the optical device, the various photoelectric devices are extremely sensitive to end face reflection, and very small reflection can cause functional failure of the photoelectric devices. For example, reflection encountered by a DFB laser may cause multimode or mode-hopping phenomena, resulting in a higher bit error rate in the transmission system, resulting in transmission link failure; the EML device meets reflection, which may cause the self-stabilization of the integrated DFB device, thereby causing overshoot or depression related to modulation voltage on the frequency response, and further causing the situation that an eye pattern in the transmission does not reach the standard, so that the transmission fails; even statically operating DFB lasers suffer from lasing instability, multimode and relative intensity noise failures when they encounter reflections. And in most cases this Reflection will resonate with the other facet (typically the High-Reflection facet) of the single High-speed device. In an integrated device, such resonance may occur between any two reflective interfaces; these interfaces may be intentionally designed or may be formed as a result of device structure and manufacturing non-intentional design; at the same time, the resonance forms different resonance strengths and phases for different wavelengths. Therefore, the influence caused by reflection also has different periodic responses to different wavelengths, so that the problem also has certain randomness. This wavelength dependent periodic response adds an additional level of uncontrollability to the effect of reflection on device performance.
The above problem appears as gain instability in the semiconductor optical amplifier and as extinction ratio instability in the MZ modulator. In the operating state, small changes in wavelength or temperature can cause such instability to occur and directly affect the performance of the optoelectronic device, even directly leading to failure of the optoelectronic device.
Disclosure of Invention
The embodiment of the application provides a laser with a modulator and an optical module, which optimize the design freedom of a waveguide in the laser with the modulator, reduce the bending loss of the waveguide and reduce the end surface reflection.
In a first aspect, an embodiment of the present application provides a laser with a modulator, including:
a body;
an optical waveguide disposed on the body;
wherein the optical waveguide includes:
the light incident surface is positioned on one end surface of the optical waveguide;
the light emitting surface is positioned on the other end surface of the optical waveguide;
a first arc side surface located at one side of the optical waveguide;
and the circle center of the second arc side surface and the circle center of the first arc side surface are positioned on the same side of the optical waveguide, and the arc radius of the second arc side surface is larger than that of the first arc side surface.
In a second aspect, the present application further provides an optical module including a laser having a modulator, where the laser having a modulator is the laser having a modulator according to the first aspect.
In laser instrument and optical module with modulator that this application embodiment provided, including the optical waveguide, the optical waveguide includes income plain noodles and goes out the plain noodles, goes into the plain noodles and is provided with first circular arc side and second circular arc side to going out between the plain noodles, and first circular arc side is located one side of optical waveguide, and second circular arc side is the opposite side of optical waveguide, the centre of a circle of second circular arc side with the centre of a circle of first circular arc side is located the circular arc radius that is greater than first circular arc side with one side and second circular arc side of optical waveguide. The application provides an optical waveguide, include first circular arc side and second circular arc side through the optical waveguide side and make the optical waveguide to its one side bending, and utilize the circular arc radius of second circular arc side to be greater than the circular arc radius of first circular arc side again, make the degree of curvature of optical waveguide both sides different, form the double level and smooth continuous adjustment of waveguide itself on width and direction (angle), but furthest optimization waveguide design freedom, reduce waveguide bending loss, reduce the terminal surface reflection, and then be convenient for it to use in photoelectric device and optical module.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic diagram of a connection relationship of an optical communication terminal;
FIG. 2 is a schematic diagram of an optical network unit;
fig. 3 is a schematic structural diagram of an optical module according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram of an exploded structure of an optical module according to an embodiment of the present application;
fig. 5 is an internal structural schematic diagram of an optical module provided in an embodiment of the present application;
fig. 6 is a schematic diagram of an tosa according to an embodiment of the present disclosure;
FIG. 7 is a schematic view showing a structure in which a stem and a cap are separated in a light emitting section according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a laser device according to an embodiment of the present disclosure;
fig. 9 is a schematic structural diagram of a laser with a modulator according to an embodiment of the present disclosure;
fig. 10 is a schematic structural diagram of an optical waveguide according to an embodiment of the present application;
FIG. 11 is an elevation view of an optical waveguide provided in an embodiment of the present application;
fig. 12 is a schematic structural diagram of a first optical waveguide provided in an embodiment of the present application;
fig. 13 is a schematic structural diagram of a second optical waveguide provided in an embodiment of the present application;
fig. 14 is a schematic structural diagram of a third optical waveguide provided in an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
One of the core links of optical fiber communication is the interconversion of optical and electrical signals. The optical fiber communication uses optical signals carrying information to transmit in information transmission equipment such as optical fibers/optical waveguides, and the information transmission with low cost and low loss can be realized by using the passive transmission characteristic of light in the optical fibers/optical waveguides; meanwhile, the information processing device such as a computer uses an electric signal, and in order to establish information connection between the information transmission device such as an optical fiber or an optical waveguide and the information processing device such as a computer, it is necessary to perform interconversion between the electric signal and the optical signal.
The optical module realizes the function of interconversion of optical signals and electrical signals in the technical field of optical fiber communication, and the interconversion of the optical signals and the electrical signals is the core function of the optical module. The optical module is electrically connected with an external upper computer through a golden finger on an internal circuit board of the optical module, and the main electrical connection comprises power supply, I2C signals, data signals, grounding and the like; the electrical connection mode realized by the gold finger has become the mainstream connection mode of the optical module industry, and on the basis of the mainstream connection mode, the definition of the pin on the gold finger forms various industry protocols/specifications.
Fig. 1 is a schematic diagram of connection relationship of an optical communication terminal. As shown in fig. 1, the connection of the optical communication terminal mainly includes the interconnection among the optical network terminal 100, the optical module 200, the optical fiber 101 and the network cable 103;
one end of the optical fiber 101 is connected with a far-end server, one end of the network cable 103 is connected with local information processing equipment, and the connection between the local information processing equipment and the far-end server is completed by the connection between the optical fiber 101 and the network cable 103; and the connection between the optical fiber 101 and the network cable 103 is made by the optical network terminal 100 having the optical module 200.
An optical port of the optical module 200 is externally accessed to the optical fiber 101, and establishes bidirectional optical signal connection with the optical fiber 101; an electrical port of the optical module 200 is externally connected to the optical network terminal 100, and establishes bidirectional electrical signal connection with the optical network terminal 100; the optical module realizes the interconversion of optical signals and electric signals, thereby realizing the establishment of information connection between the optical fiber and the optical network terminal; specifically, the optical signal from the optical fiber is converted into an electrical signal by the optical module and then input to the optical network terminal 100, and the electrical signal from the optical network terminal 100 is converted into an optical signal by the optical module and input to the optical fiber.
The optical network terminal is provided with an optical module interface 102, which is used for accessing an optical module 200 and establishing bidirectional electric signal connection with the optical module 200; the optical network terminal is provided with a network cable interface 104, which is used for accessing the network cable 103 and establishing bidirectional electric signal connection with the network cable 103; the optical module 200 is connected to the network cable 103 through the optical network terminal 100, specifically, the optical network terminal transmits a signal from the optical module to the network cable and transmits the signal from the network cable to the optical module, and the optical network terminal serves as an upper computer of the optical module to monitor the operation of the optical module.
At this point, a bidirectional signal transmission channel is established between the remote server and the local information processing device through the optical fiber, the optical module, the optical network terminal and the network cable.
Common information processing apparatuses include routers, switches, electronic computers, and the like; the optical network terminal is an upper computer of the optical module, provides data signals for the optical module, and receives the data signals from the optical module, and the common upper computer of the optical module also comprises an optical line terminal and the like.
Fig. 2 is a schematic diagram of an optical network terminal structure. As shown in fig. 2, the optical network terminal 100 has a circuit board 105, and a cage 106 is disposed on a surface of the circuit board 105; an electric connector is arranged in the cage 106 and used for connecting an electric port of an optical module such as a golden finger; the cage 106 is provided with a heat sink 107, and the heat sink 107 has a projection such as a fin that increases a heat radiation area.
The optical module 200 is inserted into the optical network terminal, specifically: the electrical port of the optical module is inserted into an electrical connector inside the cage 106, and the optical port of the optical module is connected to the optical fiber 101.
The cage 106 is positioned on the circuit board, and the electrical connector on the circuit board is wrapped in the cage, so that the electrical connector is arranged in the cage; the optical module is inserted into the cage, held by the cage, and the heat generated by the optical module is conducted to the cage 106 and then diffused by the heat sink 107 on the cage.
The fifth generation mobile communication technology (5G) currently meets the current growing demand for high-speed wireless transmission. The frequency spectrum adopted by the 5G communication is much higher than that adopted by the 4G communication, which brings a greatly improved communication rate for the 5G communication, but the transmission attenuation of the signal is relatively obviously increased.
The new service characteristics and higher index requirements of 5G provide new challenges for the bearer network architecture and each layer of technical solutions, wherein the optical module serving as a basic constituent unit of the physical layer of the 5G network also faces technical innovation and upgrade, which is mainly reflected in that the optical module applied to 5G transmission needs to have two basic technical characteristics of high-speed transmission and low return loss. In order to meet the requirement of an optical module in a 5G communication network, an embodiment of the present application provides an optical module.
Fig. 3 is a schematic diagram of an optical module according to an embodiment of the present disclosure, and fig. 4 is an exploded schematic diagram of an optical module according to an embodiment of the present disclosure. As shown in fig. 3 and 4, an optical module 200 provided in an embodiment of the present application includes an upper housing 201, a lower housing 202, a circuit board 203, a circular-square tube 300, a light emitting part 400, and a light receiving part 500.
The upper shell 201 is covered on the lower shell 202 to form a wrapping cavity with two openings; the outer contour of the wrapping cavity is generally a square body, and specifically, the lower shell comprises a main plate and two side plates which are positioned at two sides of the main plate and are perpendicular to the main plate; the upper shell comprises a cover plate, and the cover plate covers two side plates of the upper shell to form a wrapping cavity; the upper shell can also comprise two side walls which are positioned at two sides of the cover plate and are perpendicular to the cover plate, and the two side walls are combined with the two side plates to realize that the upper shell covers the lower shell.
The two openings may be two ends (204, 205) in the same direction, or two openings in different directions; one opening is an electric port 204, and a gold finger of the circuit board extends out of the electric port 204 and is inserted into an upper computer such as an optical network terminal; the other opening is an optical port 205 for external optical fiber access; optoelectronic devices such as the circuit board 203, the circular-square tube 300, the light emitting part 400, and the light receiving part 500 are located in the package cavities formed in the upper and lower cases.
The upper shell 201 and the lower shell 202 are combined in an assembly mode, so that devices such as the round square tube body 300, the light emitting component 400, the light receiving component 500 and the like can be conveniently installed in the shells, and the outermost packaging protection shell of the optical module is formed by the upper shell 201 and the lower shell 202; the upper shell 201 and the lower shell 202 are generally made of metal materials, which is beneficial to realizing electromagnetic shielding and heat dissipation; generally, the housing of the optical module is not made into an integrated component, so that when devices such as a circuit board and the like are assembled, the positioning component, the heat dissipation component and the electromagnetic shielding component cannot be installed, and the production automation is not facilitated.
Typically, the optical module 200 further includes an unlocking component located on an outer wall of the package cavity/lower housing 202 for implementing a fixed connection between the optical module and the upper computer or releasing the fixed connection between the optical module and the upper computer.
The unlocking component is provided with a clamping component matched with the upper computer cage; the end of the unlocking component can be pulled to enable the unlocking component to move relatively on the surface of the outer wall; the optical module is inserted into a cage of the upper computer, and the optical module is fixed in the cage of the upper computer by a clamping component of the unlocking component; by pulling the unlocking component, the clamping component of the unlocking component moves along with the unlocking component, so that the connection relation between the clamping component and the upper computer is changed, the clamping relation between the optical module and the upper computer is released, and the optical module can be drawn out from the cage of the upper computer.
The circuit board 203 is provided with circuit traces, electronic components (such as capacitors, resistors, triodes, and MOS transistors), and chips (such as an MCU, a clock data recovery CDR, a power management chip, and a data processing chip DSP).
The circuit board 203 connects the electrical appliances in the optical module together according to the circuit design through circuit wiring to realize the electrical functions of power supply, electrical signal transmission, grounding and the like.
The circuit board 203 is generally a rigid circuit board, which can also realize a bearing effect due to its relatively hard material, for example, the rigid circuit board can stably bear a chip; when the optical transceiver is positioned on the circuit board, the rigid circuit board can also provide stable bearing; the hard circuit board can also be inserted into an electric connector in the upper computer cage, and specifically, a metal pin/golden finger is formed on the surface of the tail end of one side of the hard circuit board and is used for being connected with the electric connector; these are not easily implemented with flexible circuit boards.
A flexible circuit board is also used in a part of the optical module to supplement a rigid circuit board; the flexible circuit board is generally used in combination with a rigid circuit board, for example, the rigid circuit board may be connected to the optical transceiver device through the flexible circuit board.
The light emitting part and the light receiving part may be collectively referred to as an optical sub-module. As shown in fig. 4, the present embodiment provides an optical module in which a light emitting part 400 and a light receiving part 500 are both disposed on a circular square tube 300, the light emitting part 400 is used to generate and output signal light, and the light receiving part 500 is used to receive signal light from the outside of the optical module. The round and square tube 300 is provided with an optical fiber adapter for connecting an optical module with an external optical fiber, and the round and square tube 300 is usually provided with a lens assembly for changing the propagation direction of the signal light output from the light emitting part 400 or the signal light input from the external optical fiber. The light emitting part 400 and the light receiving part 500 are physically separated from the circuit board 203, and thus it is difficult to directly connect the light emitting part 400 and the light receiving part 500 to the circuit board 203, so that the light emitting part 400 and the light receiving part 500 are electrically connected through a flexible circuit board, respectively, in the embodiment of the present application. However, in the embodiment of the present application, the assembling structure of the light emitting device 400 and the light receiving device 500 is not limited to the structure shown in fig. 3 and 4, and other assembling and combining structures may be used, such as the light emitting device 400 and the light receiving device 500 are disposed on different tubes, and the embodiment is only exemplified by the structure shown in fig. 3 and 4.
Fig. 5 is an internal structural schematic diagram of an optical module according to an embodiment of the present application. As shown in fig. 5, an optical module 200 according to an embodiment of the present application includes a circular-square tube 300, a light emitting part 400, and a light receiving part 500. The light emitting part 400 is arranged on the round and square tube 300 and is coaxial with the optical fiber adapter of the round and square tube 300, and the light receiving part 500 is arranged at the side of the round and square tube 300 and is not coaxial with the optical fiber adapter; however, in the embodiment of the present application, the light receiving member 500 may be coaxial with the optical fiber adapter, and the light emitting member 400 may be non-coaxial with the optical fiber adapter. The light emitting part 400 and the light receiving part 500 are configured to be a round-square tube 300, which facilitates the control of the signal light transmission path, the compact design of the interior of the optical module, and the reduction of the space occupied by the signal light transmission path. In addition, with the development of the wavelength division multiplexing technology, in some optical modules, more than one light emitting part 400 and light receiving part 500 are disposed on the circular square tube body 300.
In some embodiments of the present application, a transflective mirror is further disposed in the circular-square tube 300, and the transflective mirror is used to change the propagation direction of the signal light to be received by the light receiving part 500 or change the propagation direction of the signal light generated by the light emitting part 400, so as to facilitate the output of the signal light received by the light receiving part 500 or the signal light generated by the light emitting part 400.
Fig. 6 is an outline structural view of a light emitting member according to an embodiment of the present application. As shown in fig. 6, the light emitting component 400 provided in this embodiment includes a socket 410, a cap 420, and other devices disposed in the cap 420 and the socket 410, the cap 420 is covered at one end of the socket 410, the socket 410 includes a plurality of pins, and the pins are used to electrically connect the flexible circuit board with other electrical devices in the light emitting component 400, and further electrically connect the light emitting component 400 with the circuit board 203.
Fig. 7 is a schematic structural view illustrating a separation between a stem and a cap in a light emitting section according to an embodiment of the present application. As shown in fig. 7, the light emitting part 400 includes a laser device 430 therein, and the laser device 430 generates signal light and the generated signal light passes through the cap 420. The laser device 430 shown in fig. 7 includes a DML, an EML, or the like.
Fig. 8 is a schematic structural diagram of a laser device according to an embodiment of the present application. As shown in fig. 8, the laser device 430 includes a laser 600 with a modulator and a ceramic substrate 431, a circuit is laid on the upper surface of the ceramic substrate 431, and the laser 600 with the modulator is connected with the corresponding circuit on the ceramic substrate 431 by wire bonding. The ceramic substrate 431 and the bonding wire between the laser 600 with the modulator and the ceramic substrate 431 are package structures. In the embodiment of the present application, the structure of the laser device 430 is not limited to the structure shown in fig. 8, and may be a laser device having another structure. In addition, in the optical module provided in the embodiment of the present application, the use form of the laser 600 having the modulator is not limited to that shown in fig. 8, and this embodiment is only an example shown in fig. 8, and the laser 600 having the modulator may also be directly mounted on the circuit board 203 or in another package form.
In the embodiment of the present application, the high-speed performance and the modulation efficiency of the laser 600 having the modulator are one of the important factors affecting the transmission rate of the optical module. Meanwhile, the laser 600 with the modulator includes an optical waveguide, and the reflection performance of the light-exiting surface of the optical waveguide directly affects the performance of the laser 600 with the modulator, thereby affecting the quality of the optical module.
In order to control the influence of the reflection performance of the light-exiting surface of the optical waveguide on the performance of the laser 600 with the modulator, the embodiment of the present application provides a laser with a modulator. Fig. 9 is a schematic structural diagram of a laser with a modulator according to an embodiment of the present application, and fig. 9 shows a basic structure of a laser 600 with a modulator according to some embodiments of the present application. As shown in fig. 9, a laser 600 with a modulator provided in the embodiment of the present application includes a body 610, an optical waveguide 620 is disposed on the body 610, and the optical waveguide 620 is a curved waveguide.
Fig. 6 is a schematic structural diagram of an optical waveguide according to an embodiment of the present application. As shown in fig. 6, an optical waveguide 620 provided in the embodiment of the present application includes: a light incident surface 621, a light emitting surface 622, a first arc side surface 623 and a second arc side surface 624; the light incident surface 621 is located at one end of the optical waveguide 620, and serves as a waveguide entrance of the optical waveguide 620; the light-emitting surface 622 is located at the other end of the optical waveguide 620 and serves as a waveguide outlet of the optical waveguide 620; the first arc-shaped side surface 623 is located on one side of the optical waveguide 620, the second arc-shaped side surface 624 is located on the other side of the optical waveguide 620, the first arc-shaped side surface 623 and the second arc-shaped side surface 624 are oppositely arranged on two sides of the optical waveguide 620, and the first arc-shaped side surface 623 and the second arc-shaped side surface 624 are used for connecting the light incident surface 621 and the light emitting surface 622 to realize smooth transition from the light incident surface 621 to the light emitting surface 622.
In the embodiment of the present application, the center of the first arc-shaped side surface 623 and the center of the second arc-shaped side surface 624 are located on the same side of the optical waveguide 620, and then the optical waveguide 620 bends toward the same side of the optical waveguide 620, and the arc radius of the first arc-shaped side surface 623 is greater than the arc radius of the second arc-shaped side surface 624, so that the optical waveguide 620 bends toward the direction of the first arc-shaped side surface 623 from one end of the light incident surface 621 to one end of the light emitting surface 622. The optical waveguide 620 provided in this embodiment of the present application, the side surfaces of the optical waveguide include the first arc side surface 623 and the second arc side surface 624, so that the optical waveguide is bent toward one side thereof, and the arc radius of the second arc side surface 624 is larger than the arc radius of the first arc side surface 623, so that the bending degrees of the two sides of the optical waveguide are different, thereby forming double smooth continuous adjustment of the waveguide itself in the width and direction (angle), and being capable of optimizing the waveguide design freedom degree to the maximum extent, reducing the waveguide bending loss, and reducing the end surface reflection, thereby facilitating the use of the optical waveguide in the optoelectronic device and the optical module.
In some embodiments of the present disclosure, the center of the first circular arc side surface 623 and the center of the second circular arc side surface 624 are both located on the plane where the light incident surface 621 is located, and the center of the first circular arc side surface 623 and the center of the second circular arc side surface 624 are collinear.
In the optical waveguide 620 provided in the embodiment of the present application, the arc radius of the first arc-shaped side surface 623 and the arc radius of the second arc-shaped side surface 624, and the distance between the center of the first arc-shaped side surface 623 and the center of the second arc-shaped side surface 624 on the optical waveguide 620 can be respectively calculated according to the width of the light incident surface 621, the width of the light emitting surface 622, and the output angle of the target optical waveguide, so that the optical waveguide 620 can be adjusted smoothly and continuously in the width and direction (angle), and the design freedom of the waveguide can be optimized to the greatest extent, the bending loss of the waveguide can be reduced, and the end surface reflection can be reduced.
Fig. 7 is a front view of an optical waveguide provided in an embodiment of the present application. In the embodiment of the present application, as shown in fig. 7, the width of the light incident surface 621 of the light guide 620 is w1Width w of the light emitting surface 6222The light-emitting angle is θ, the distance between the light-in surface 621 and the light-out surface 622 is L, and the radian of the first arc-shaped side surface 623 is θ1The radian of the second arc side surface 624 is theta2The arc radius of the first arc side surface 623 is R1The arc radius of the second arc side 624 is R2And the distance between the circle center of the first arc side 623 and the circle center of the second arc side 624 is D, and the waveguide outlet direction of the light exit angle optical waveguide 620 forms an included angle with the normal direction of the light exit surface. In the embodiment of the present application, the arc radius of the first arc side 623 is R1The arc radius of the second arc side 624 is R2And the distance between the circle center of the first arc side surface 623 and the circle center of the second arc side surface 624 is D, which satisfies the following condition:
R2sinθ2＝R1sinθ1＝L (1)
w1＝R2-R1-D (2)
w2＝R2cosθ2-R1cosθ1-D(3)
θ1/2in small quantities, may be approximated
Further, in combination with the formula (3), the following can be obtained:
note that the included angle theta between the waveguide exit direction of the optical waveguide 620 and the normal direction of the light exit surface satisfies
Then the formula (4) is combined to obtain:
the following shows an optical waveguide provided in an embodiment of the present application by way of specific example. Fig. 8 is a schematic structural diagram of a first optical waveguide provided in an embodiment of the present application, where a width of a light incident surface of the optical waveguide is 1 μm, a width of a light exit surface of the optical waveguide is 2.5 μm, a length of the optical waveguide is 30 μm, and a light exit angle is 8 °; fig. 9 is a schematic structural diagram of a second optical waveguide provided in the embodiment of the present application, in which a width of a light incident surface of the optical waveguide is 1 μm, a width of a light exit surface of the optical waveguide is 2.5 μm, a length of the optical waveguide is 50 μm, and a light exit angle is 8 °; fig. 10 is a schematic structural diagram of a third optical waveguide provided in this embodiment, in which a width of a light incident surface of the optical waveguide is 1 μm, a width of a light exit surface of the optical waveguide is 3.5 μm, a length of the optical waveguide is 50 μm, and an angle of light exit is 8 °.
Through the relationship, all parameters of the optical waveguide 620 can be customized to calculate the waveguide inner extension of the smooth circular arc, so that the optimized waveguide design is achieved, the waveguide bending loss is reduced, and the end surface reflection is reduced, so that the optical waveguide can be used in photoelectric devices and optical modules conveniently. In the optical waveguide provided by the embodiment of the application, the determination requirements of the width and the angle are combined with factors such as the structure, the material, the refractive index and the optical field shape of the waveguide, and the determination is carried out according to the actual situation. Through the calculation of a time domain finite element difference method, the scheme can reduce the end face reflection to a level far lower than 0.01% through the adjustment of the angle and the width.
In some embodiments of the present application, the optical waveguide 620 is a single mode waveguide, and the thickness of the optical waveguide 620 may be 0.5-10 μm. Specifically, if the optical waveguide 620 has a shallow ridge structure, the thickness of the optical waveguide 620 is 0.5 to 3 μm; if the optical waveguide 620 is a deep ridge structure, the thickness of the optical waveguide 620 is 1-10 μm.
The optical waveguide 620 provided in the embodiment of the present application is not only applicable to the laser 600 with a modulator shown in fig. 8 and 9, but the laser 600 with a modulator shown in fig. 8 and 9 is only an example in the present application, and the optical waveguide 620 provided in the present application can also be used in optoelectronic devices with modulators, such as DML, EML, and the like, or silicon optical chips, and the like, in other structural forms.
Further, in the laser 600 with the modulator provided in the embodiment of the present application, the first P electrode layer 631 is disposed on the optical waveguide 620, the second P electrode layer 611 is disposed on the body 610, the first P electrode layer 631 is electrically connected to the second P electrode layer 611 through the floating electrode 632, and the floating electrode 632 is suspended in the waveguide trench on the side of the optical waveguide 620. The laser 600 with the modulator adopts the suspended electrode 632, the suspended electrode 632 spans over the waveguide trench, when the electric injection is performed through the suspended electrode 632, the suspended electrode 632 is suspended in the air to span, and the suspended electrode 632 is not in contact with the passivation layers of the bottom and the side wall of the waveguide trench, so that the parasitic capacitance generated when the electrode covers the bottom and the side wall of the ridge waveguide trench is greatly reduced, and the effect of improving the speed of the laser with the modulator is achieved.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (6)
1. A laser having a modulator, comprising:
a body;
an optical waveguide disposed on the body;
wherein the optical waveguide includes:
the light incident surface is positioned on one end surface of the optical waveguide;
the light emitting surface is positioned on the other end surface of the optical waveguide;
a first arc side surface located at one side of the optical waveguide;
and the circle center of the second arc side surface and the circle center of the first arc side surface are positioned on the same side of the optical waveguide, and the arc radius of the second arc side surface is larger than that of the first arc side surface.
2. The laser with a modulator of claim 1, wherein if the width of the input surface is w1The width of the light-emitting surface is w2The distance between the light incident surface and the light emergent surface is L, the light emergent angle is theta, and the radian of the first arc side surface is theta1The radian of the side surface of the second arc is theta2The arc radius of the first arc side surface is R1The arc radius of the second arc side surface is R2And the distance between the circle center of the first arc side surface and the circle center of the second arc side surface is D;
wherein:
D＝R2-R1-w1。
3. the laser with modulator of claim 1, wherein the optical waveguide has a thickness of 0.5-10 μ ι η.
4. The laser with a modulator according to claim 1, wherein if the optical waveguide is a shallow ridge structure, the thickness of the optical waveguide is 0.5-3 μm;
and if the optical waveguide is of a deep ridge structure, the thickness of the optical waveguide is 1-10 μm.
5. The laser with the modulator according to claim 1, wherein a first P electrode layer is disposed on the optical waveguide, a second P electrode layer is disposed on the body, the first P electrode layer is electrically connected to the second P electrode layer through a floating electrode, and the floating electrode is suspended on a waveguide trench at a side of the optical waveguide.
6. A light module characterized by comprising an optoelectronic device, said optoelectronic device being a laser with a modulator according to any one of claims 1 to 5.
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| CN202110729335.7A CN113488832B (en) | 2021-06-29 | 2021-06-29 | Laser with modulator and optical module |
| PCT/CN2022/090061 WO2023273585A1 (en) | 2021-06-29 | 2022-04-28 | Modulator-possessing laser, and optical module |
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| CN202110729335.7A CN113488832B (en) | 2021-06-29 | 2021-06-29 | Laser with modulator and optical module |
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| WO2023273585A1 (en) * | 2021-06-29 | 2023-01-05 | 青岛海信宽带多媒体技术有限公司 | Modulator-possessing laser, and optical module |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110103735A1 (en) * | 2008-03-31 | 2011-05-05 | Sumitomo Osaka Cement Co. Ltd | Mach-zehnder waveguide type optical modulator |
| CN106154415A (en) * | 2016-08-31 | 2016-11-23 | 欧阳征标 | The controlled unidirectional waveguide of turning round of low damage magneto-optic space magnetic surface fast mould any direction |
| WO2018041177A1 (en) * | 2016-08-31 | 2018-03-08 | 深圳大学 | Magnetic surface fast-mode arbitrary-direction controllable unidirectional bend waveguide with low-loss magneto-optic thin film |
| US20190072767A1 (en) * | 2017-09-07 | 2019-03-07 | Microsoft Technology Licensing, Llc | Display apparatuses, systems and methods including curved waveguides |
| CN109597219A (en) * | 2019-01-31 | 2019-04-09 | 中南民族大学 | Adjustable frequency-selecting filter based on sub-wavelength grate structure |
| CN112462469A (en) * | 2020-12-15 | 2021-03-09 | 中国科学院上海微系统与信息技术研究所 | Silicon-based Mach-Zehnder interferometer based on Y-branch symmetric structure |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001063331A1 (en) * | 2000-02-25 | 2001-08-30 | Princeton Lightwave, Inc. | Multi-pass, arcuate bent waveguide, high power superluminescent diode |
| JP5439953B2 (en) * | 2008-10-30 | 2014-03-12 | ソニー株式会社 | Semiconductor laser and manufacturing method thereof |
| JP2011077339A (en) * | 2009-09-30 | 2011-04-14 | Sony Corp | Semiconductor laser |
| JP2016018894A (en) * | 2014-07-08 | 2016-02-01 | 日本電信電話株式会社 | Integrated semiconductor optical element |
| JP7259699B2 (en) * | 2019-10-29 | 2023-04-18 | 住友電気工業株式会社 | semiconductor optical device |
| CN113488832B (en) * | 2021-06-29 | 2022-09-30 | 青岛海信宽带多媒体技术有限公司 | Laser with modulator and optical module |
-
2021
- 2021-06-29 CN CN202110729335.7A patent/CN113488832B/en active Active
-
2022
- 2022-04-28 WO PCT/CN2022/090061 patent/WO2023273585A1/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110103735A1 (en) * | 2008-03-31 | 2011-05-05 | Sumitomo Osaka Cement Co. Ltd | Mach-zehnder waveguide type optical modulator |
| CN106154415A (en) * | 2016-08-31 | 2016-11-23 | 欧阳征标 | The controlled unidirectional waveguide of turning round of low damage magneto-optic space magnetic surface fast mould any direction |
| WO2018041177A1 (en) * | 2016-08-31 | 2018-03-08 | 深圳大学 | Magnetic surface fast-mode arbitrary-direction controllable unidirectional bend waveguide with low-loss magneto-optic thin film |
| US20190072767A1 (en) * | 2017-09-07 | 2019-03-07 | Microsoft Technology Licensing, Llc | Display apparatuses, systems and methods including curved waveguides |
| CN109597219A (en) * | 2019-01-31 | 2019-04-09 | 中南民族大学 | Adjustable frequency-selecting filter based on sub-wavelength grate structure |
| CN112462469A (en) * | 2020-12-15 | 2021-03-09 | 中国科学院上海微系统与信息技术研究所 | Silicon-based Mach-Zehnder interferometer based on Y-branch symmetric structure |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023273585A1 (en) * | 2021-06-29 | 2023-01-05 | 青岛海信宽带多媒体技术有限公司 | Modulator-possessing laser, and optical module |
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