WO2023273585A1

WO2023273585A1 - Modulator-possessing laser, and optical module

Info

Publication number: WO2023273585A1
Application number: PCT/CN2022/090061
Authority: WO
Inventors: 李静思; 刘志程; 赵昀松
Original assignee: 青岛海信宽带多媒体技术有限公司
Priority date: 2021-06-29
Filing date: 2022-04-28
Publication date: 2023-01-05
Also published as: CN113488832A; CN113488832B

Abstract

A modulator-possessing laser (600) and an optical module (200), the modulator-possessing laser (600) comprising: a body (610) and an optical waveguide (620), the optical waveguide (620) being arranged on the body (610); the optical waveguide (620) comprises: a light incident surface (621), a light emergent surface (622), a first arced side surface (623), and a second arced side surface (624); the light incident surface (621) is located at one end surface of the optical waveguide (620); the light emergent surface (622) is located at an other end surface of the optical waveguide (620); the first arced side surface (623) as located at one side of the optical waveguide (620); and the second arced side surface (624) is located at an other side of the optical waveguide (620), the center of the arc of the second arced side surface (624) and the center of the arc of the first arced side surface (623) being located at a same side of the optical waveguide (620), and the radius of the arc of the second arced side surface (624) being greater than the radius of the arc of the first arced side surface (623).

Description

A kind of laser with modulator and optical module

This disclosure claims the priority of a patent submitted to the China Patent Office on June 29, 2021 with application number 202110729335.7, the entire contents of which are incorporated in this disclosure by reference.

technical field

The present disclosure relates to the technical field of optical communication, in particular to a laser with a modulator and an optical module.

Background technique

With the application of information optoelectronic technology in wireless applications, transmission networks, data center interconnection, access networks and other communication fields, the related industries have more and more requirements for single-channel transmission rate and multi-channel integration of optoelectronic devices. The increase in speed and integration will directly lead to higher and higher requirements for the design and manufacture of optoelectronic devices.

Contents of the invention

In a first aspect, some embodiments of the present disclosure provide a laser with a modulator. The laser with modulator includes: a body and an optical waveguide. The optical waveguide is disposed on the body. The optical waveguide includes: a light incident surface, a light exit surface, a first arc side and a second arc side. The light incident surface is located at one end surface of the optical waveguide. The light emitting surface is located at the other end surface of the optical waveguide. The first arc side is located on one side of the optical waveguide. The second arc side is located on the other side of the optical waveguide, the center of the second arc side and the first arc side are located on the same side of the optical waveguide, and the second The arc radius of the arc side is larger than the arc radius of the first arc side.

In a second aspect, the present disclosure further provides an optical module, where the optical module includes a laser with a modulator, and the laser with a modulator is the laser with a modulator described in the first aspect.

Description of drawings

In order to illustrate the technical solutions in the present disclosure more clearly, the following will briefly introduce the accompanying drawings used in some embodiments of the present disclosure. Apparently, the accompanying drawings in the following description are only appendices to some embodiments of the present disclosure. Figures, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings. In addition, the drawings in the following description can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of signals, and the like.

Fig. 1 is a connection diagram of an optical communication system according to some embodiments;

Fig. 2 is a structural diagram of an optical network terminal according to some embodiments;

Fig. 3 is a structural diagram of an optical module according to some embodiments;

Figure 4 is an exploded view of an optical module according to some embodiments;

Fig. 5 is a schematic diagram of the internal structure of an optical module according to some embodiments;

Fig. 6 is an outline structure diagram of a light emitting sub-module according to some embodiments;

Fig. 7 is a schematic structural diagram of separation of a tube base and a tube cap in a light emitting component according to some embodiments;

Fig. 8 is a schematic structural diagram of a laser device according to some embodiments;

Fig. 9 is a schematic structural diagram of a laser with a modulator according to some embodiments;

Fig. 10 is a schematic structural diagram of an optical waveguide according to some embodiments;

Figure 11 is a front view of an optical waveguide according to some embodiments;

Fig. 12 is a schematic structural diagram of a first optical waveguide according to some embodiments;

Fig. 13 is a schematic structural diagram of a second optical waveguide according to some embodiments;

Fig. 14 is a schematic structural diagram of a third optical waveguide according to some embodiments.

detailed description

The technical solutions in some embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present disclosure, not all of them. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments provided in the present disclosure belong to the protection scope of the present disclosure.

Throughout the specification and claims, unless the context requires otherwise, the term "comprise" and other forms such as the third person singular "comprises" and the present participle "comprising" are used Interpreted as the meaning of openness and inclusion, that is, "including, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "example", "specific examples" example)" or "some examples" and the like are intended to indicate that specific features, structures, materials or characteristics related to the embodiment or examples are included in at least one embodiment or example of the present disclosure. Schematic representations of the above terms are not necessarily referring to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be included in any suitable manner in any one or more embodiments or examples.

In describing the present disclosure, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientations or positional relationships indicated by "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying References to devices or elements must have a particular orientation, be constructed, and operate in a particular orientation and therefore should not be construed as limiting the present disclosure.

Hereinafter, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the embodiments of the present disclosure, unless otherwise specified, "plurality" means two or more.

In describing some embodiments, the expressions "coupled" and "connected" and their derivatives may be used. For example, the term "connected" may be used in describing some embodiments to indicate that two or more elements are in direct physical or electrical contact with each other. As another example, the term "coupled" may be used when describing some embodiments to indicate that two or more elements are in direct physical or electrical contact. However, the terms "coupled" or "communicatively coupled" may also mean that two or more elements are not in direct contact with each other, but yet still co-operate or interact with each other. The embodiments disclosed herein are not necessarily limited by the context herein.

"At least one of A, B and C" has the same meaning as "at least one of A, B or C" and both include the following combinations of A, B and C: A only, B only, C only, A and B A combination of A and C, a combination of B and C, and a combination of A, B and C.

"A and/or B" includes the following three combinations: A only, B only, and a combination of A and B.

The use of "configured to" herein means open and inclusive language that does not exclude devices configured to perform additional tasks or steps.

As used herein, "about", "approximately" or "approximately" includes the stated value as well as the average within the acceptable deviation range of the specified value, wherein the acceptable deviation range is as determined by one of ordinary skill in the art. Determined taking into account the measurement in question and the errors associated with the measurement of a particular quantity (ie, limitations of the measurement system).

In optical communication technology, light is used to carry information to be transmitted, and the optical signal carrying information is transmitted to information processing equipment such as a computer through optical fiber or optical waveguide and other information transmission equipment to complete the information transmission. Because optical signals have passive transmission characteristics when they are transmitted through optical fibers or optical waveguides, low-cost, low-loss information transmission can be achieved. In addition, the signals transmitted by information transmission equipment such as optical fibers or optical waveguides are optical signals, while the signals that can be recognized and processed by information processing equipment such as computers are electrical signals. To establish an information connection between devices, it is necessary to realize the mutual conversion between electrical signals and optical signals.

The optical module is used in the technical field of optical fiber communication to realize the mutual conversion function of the above-mentioned optical signal and electrical signal. The optical module includes an optical port and an electrical port. The optical module realizes optical communication with information transmission equipment such as an optical fiber or an optical waveguide through the optical port, and realizes electrical connection with an optical network terminal (for example, an optical modem) through the electrical port. The electrical connection is mainly configured to implement power supply, I2C signal transmission, data signal transmission, and grounding. Optical network terminals transmit electrical signals to information processing equipment such as computers through network cables or wireless fidelity technology (Wi-Fi).

Fig. 1 is a connection diagram of an optical communication system according to some embodiments. As shown in FIG. 1 , the optical communication system mainly includes a remote server 1000 , a local information processing device 2000 , an optical network terminal 100 , an optical module 200 , an optical fiber 101 and a network cable 103 .

One end of the optical fiber 101 is connected to the remote server 1000 , and the other end is connected to the optical network terminal 100 through the optical module 200 . Optical fiber itself can support long-distance signal transmission, such as signal transmission of several kilometers (6 kilometers to 8 kilometers). On this basis, if repeaters are used, ultra-long-distance transmission can theoretically be achieved. Therefore, in a common optical communication system, the distance between the remote server 1000 and the optical network terminal 100 can usually reach thousands of kilometers, tens of kilometers or hundreds of kilometers.

One end of the network cable 103 is connected to the local information processing device 2000 , and the other end is connected to the optical network terminal 100 . The local information processing device 2000 may be any one or more of the following devices: routers, switches, computers, mobile phones, tablet computers, televisions, and so on.

The physical distance between the remote server 1000 and the optical network terminal 100 is greater than the physical distance between the local information processing device 2000 and the optical network terminal 100 . The connection between the local information processing device 2000 and the remote server 1000 is completed by the optical fiber 101 and the network cable 103 ; and the connection between the optical fiber 101 and the network cable 103 is completed by the optical module 200 and the optical network terminal 100 .

The optical module 200 includes an optical port and an electrical port. The optical port is configured to be connected to the optical fiber 101, so that the optical module 200 establishes a bidirectional optical signal connection with the optical fiber 101; electrical signal connection. The optical module 200 implements mutual conversion between optical signals and electrical signals, so that a connection is established between the optical fiber 101 and the optical network terminal 100 . For example, the optical signal from the optical fiber 101 is converted into an electrical signal by the optical module 200 and then input to the optical network terminal 100 , and the electrical signal from the optical network terminal 100 is converted into an optical signal by the optical module 200 and input to the optical fiber 101 .

The optical network terminal 100 includes a substantially rectangular parallelepiped housing (housing), and an optical module interface 102 and a network cable interface 104 disposed on the housing. The optical module interface 102 is configured to access the optical module 200, so that the optical network terminal 100 and the optical module 200 establish a bidirectional electrical signal connection; the network cable interface 104 is configured to access the network cable 103, so that the optical network terminal 100 and the network cable 103 A two-way electrical signal connection is established. A connection is established between the optical module 200 and the network cable 103 through the optical network terminal 100 . For example, the optical network terminal 100 transmits the electrical signal from the optical module 200 to the network cable 103, and transmits the signal from the network cable 103 to the optical module 200, so the optical network terminal 100, as the host computer of the optical module 200, can monitor the optical module 200 work. In addition to the optical network terminal 100, the host computer of the optical module 200 may also include an optical line terminal (Optical Line Terminal, OLT) and the like.

The remote server 1000 establishes a two-way signal transmission channel with the local information processing device 2000 through the optical fiber 101 , the optical module 200 , the optical network terminal 100 and the network cable 103 .

FIG. 2 is a structural diagram of an optical network terminal according to some embodiments. In order to clearly show the connection relationship between the optical module 200 and the optical network terminal 100, FIG. 2 only shows the optical network terminal 100 related to the optical module 200. structure. As shown in FIG. 2 , the optical network terminal 100 also includes a PCB circuit board 105 disposed in the casing, a cage 106 disposed on the surface of the PCB circuit board 105 , an electrical connector and a heat sink 107 disposed inside the cage 106 . The electrical connector is configured to be connected to an electrical port of the optical module 200 . The heat sink 107 has protrusions such as fins that increase the heat dissipation area.

The optical module 200 is inserted into the cage 106 of the optical network terminal 100 , and the optical module 200 is fixed by the cage 106 . The heat generated by the optical module 200 is conducted to the cage 106 and then diffused through the radiator 107 . After the optical module 200 is inserted into the cage 106 , the electrical port of the optical module 200 is connected to the electrical connector inside the cage 106 , so that the optical module 200 establishes a bidirectional electrical signal connection with the optical network terminal 100 . In addition, the optical port of the optical module 200 is connected to the optical fiber 101 , so that the optical module 200 and the optical fiber 101 establish a bidirectional electrical signal connection.

Fig. 3 is a structural diagram of an optical module according to some embodiments, and Fig. 4 is an exploded view of an optical module according to some embodiments. As shown in FIGS. 3 and 4 , the optical module 200 includes an upper housing 201 , a lower housing 202 , a circuit board 203 , a round and square tube 300 , a light emitting component 400 and a light receiving component 500 .

The housing includes an upper housing 201 and a lower housing 202 , and the upper housing 201 covers the lower housing 202 to form the above housing with two

openings

204 and 205 . The outer contour of the casing generally presents a square body.

In some embodiments of the present disclosure, the lower housing 202 includes a bottom plate and two lower side plates located on both sides of the bottom plate and perpendicular to the bottom plate. The upper case 201 includes a cover plate, and two upper side plates perpendicular to the cover plate on both sides of the cover plate, and the two side walls are combined with the two side plates to realize that the upper case 201 is covered by the lower case 202 superior.

The direction of the line connecting the two

openings

204 and 205 may be consistent with the length direction of the optical module 200 , or may not be consistent with the length direction of the optical module 200 . For example, the opening 204 is located at the end of the optical module 200 (the right end in FIG. 3 ), and the opening 205 is also located at the end of the optical module 200 (the left end in FIG. 3 ). Alternatively, the opening 204 is located at the end of the optical module 200 , while the opening 205 is located at the side of the optical module 200 . The opening 204 is an electrical port, and the golden finger of the circuit board 203 is extended from the electrical port, and inserted into the host computer (such as the optical network terminal 100); the opening 205 is an optical port, configured to connect to the external optical fiber 101, so that the optical fiber 101 inside of the optical module 200 .

The combination of the upper case 201 and the lower case 202 is used to facilitate the installation of components such as the circuit board 203 into the case, and the upper case 201 and the lower case 202 can form packaging protection for these devices. In addition, when assembling components such as the circuit board 203 , it is convenient to deploy positioning components, heat dissipation components and electromagnetic shielding components of these components, which is conducive to automatic implementation of production.

In some embodiments, the upper shell 201 and the lower shell 202 are generally made of metal materials, which is beneficial to realize electromagnetic shielding and heat dissipation.

In some embodiments, the optical module 200 further includes an unlocking component 206 located on the outer wall of its casing, and the unlocking component 206 is configured to realize a fixed connection between the optical module 200 and the host computer, or release the connection between the optical module 200 and the host computer. fixed connection.

Exemplarily, the unlocking component 206 is located on the outer walls of the two lower side panels of the lower housing 202 , and includes an engaging component matching with a cage of the upper computer (eg, the cage 106 of the optical network terminal 100 ). When the optical module 200 is inserted into the cage of the host computer, the optical module 200 is fixed in the cage of the host computer by the engaging part of the unlocking part 206; when the unlocking part 206 is pulled, the engaging part of the unlocking part 206 moves accordingly, thereby changing The connection relationship between the engaging part and the host computer is to release the engagement relationship between the optical module 200 and the host computer, so that the optical module 200 can be pulled out from the cage of the host computer.

The circuit board 203 includes circuit traces, electronic components and chips, through which the electronic components and chips are connected together according to the circuit design, so as to realize functions such as power supply, electrical signal transmission and grounding. The electronic components may include, for example, capacitors, resistors, triodes, and metal-oxide-semiconductor field-effect transistors (Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET). The chip can include, for example, a Microcontroller Unit (MCU), a Limiting Amplifier (Limiting Amplifier), a Clock and Data Recovery chip (CDR), a power management chip, and a Digital Signal Processing (DSP) chip. .

The circuit board 203 is generally a rigid circuit board. Due to its relatively hard material, the rigid circuit board can also realize the bearing function. For example, the rigid circuit board can carry the chip smoothly; the rigid circuit board can also be inserted into the electrical connector in the cage of the host computer. Of course, flexible circuit boards are also used in some optical modules. Flexible circuit boards are generally used in conjunction with rigid circuit boards as a supplement to rigid circuit boards.

The circuit board 203 also includes a golden finger formed on the surface of its end, and the golden finger is composed of a plurality of independent pins. The circuit board 203 is inserted into the cage 106 and electrically connected with the electrical connector in the cage 106 by the gold fingers. Gold fingers can be arranged only on one side of the circuit board 203 (such as the upper surface shown in FIG. 4 ), or on the upper and lower sides of the circuit board 203, so as to meet the occasions where the number of pins is large. The golden finger is configured to establish an electrical connection with the host computer to realize power supply, grounding, I2C signal transmission, data signal transmission, etc.

As shown in FIG. 4 , the interior of the optical module 200 includes a round and square tube body 300 , a light emitting component 400 and a light receiving component 500 . Both the light emitting component 400 and the light receiving component 500 are disposed on the round and square tube body 300 . The light emitting component 400 is used to generate and output signal light, and the light receiving component 500 is used to receive signal light from the outside of the optical module. A fiber optic adapter is arranged on the round square tube body 300, and the fiber optic adapter is used to realize the connection between the optical module and the external optical fiber, and the round square tube body 300 is usually provided with a lens assembly, and the lens assembly is used to change the output signal light of the light emitting assembly 400 or the external optical fiber. Propagation direction of optical fiber input signal light. Since the light emitting component 400 and the light receiving component 500 are physically separated from the circuit board 203, it is difficult for the light emitting component 400 and the light receiving component 500 to be directly connected to the circuit board 203. Therefore, in some embodiments of the present disclosure, the light emitting component 400 and the light receiving component 500 The electrical connection is respectively realized through the flexible circuit board. However, the assembly structure of the light-emitting assembly 400 and the light-receiving assembly 500 is not limited to the structure shown in FIG. 3 and FIG. This embodiment only takes the structure shown in FIG. 3 and FIG. 4 as an example.

Fig. 5 is a schematic diagram of an internal structure of an optical module according to some embodiments. As shown in Figure 5, the light emitting assembly 400 is arranged on the round square tube body 300 and is coaxial with the fiber optic adapter of the round square tube body 300, and the light receiving assembly 500 is arranged on the side of the round square tube body 300, which is not connected with the fiber optic adapter coaxial. However, in some embodiments of the present disclosure, an arrangement in which the light receiving component 500 is coaxial with the fiber adapter and the light emitting component 400 is not coaxial with the fiber adapter may be adopted. Passing the light emitting component 400 and the light receiving component 500 through the round and square tube body 300, on the one hand, it is convenient to realize the control of the signal light transmission optical path, on the other hand, it is convenient to realize the compact design inside the optical module, and reduce the space occupied by the signal light transmission optical path. In addition, with the development of wavelength division multiplexing technology, in some optical modules, more than one light emitting component 400 and light receiving component 500 can be arranged on the round square tube body 300 .

In some embodiments of the present disclosure, a mirror is also arranged in the round square tube body 300, and the propagation direction of the signal light to be received by the light receiving component 500 is changed through the mirror, or the direction of the signal light of the signal light generated by the light emitting component 400 is changed. The propagation direction is convenient for the light receiving component 500 to receive the signal light or output the signal light generated by the light emitting component 400 .

Fig. 6 is an outline structure diagram of a light emitting sub-module according to some embodiments. As shown in FIG. 6 , the light emitting component 400 includes a tube base 410 , a tube cap 420 and other devices disposed in the tube cap 420 and the tube base 410 . The tube cap 420 is set on one end of the tube base 410, and the tube base 410 includes several pins, and the pins are used to realize the electrical connection between the flexible circuit board and other electrical devices in the light emitting assembly 400, thereby realizing the connection between the light emitting assembly 400 and the circuit. For the electrical connection of the board 203, this embodiment only takes the structure shown in FIG. 6 as an example.

Fig. 7 is a schematic structural diagram of the separation of the tube base and the tube cap in a light emitting component according to some embodiments. As shown in FIG. 7 , the light emitting component 400 includes a laser device 430 , the laser device 430 is used to generate signal light and the generated signal light passes through the tube cap 420 . The laser device 430 shown in FIG. 7 includes DML or EML or the like.

Fig. 8 is a schematic structural diagram of a laser device according to some embodiments. As shown in FIG. 8, the laser device 430 includes a laser 600 with a modulator and a ceramic substrate 431. Circuits are laid on the upper surface of the ceramic substrate 431. The laser 600 with a modulator is connected to the corresponding circuit on the ceramic substrate 431 by bonding. The ceramic substrate 431 and the bonding wires between the laser with modulator 600 and the ceramic substrate 431 are packaging structures. In some embodiments of the present disclosure, the structure of the laser device 430 is not limited to the structure shown in FIG. 8 , and may also be a laser device with other structural forms. In addition, the arrangement of the laser 600 with a modulator is not limited to that shown in FIG. Available in other packages.

The high-speed performance and modulation efficiency of the laser 600 with the modulator is one of the important factors affecting the transmission rate of the optical module. At the same time, the laser 600 with modulator includes an optical waveguide, and the reflective performance of the light guide surface directly affects the performance of the laser 600 with modulator, which in turn affects the quality of the optical module.

In order to control the influence of the reflective performance of the light wave exporting surface on the performance of the laser with modulator 600, some embodiments of the present disclosure provide a laser with a modulator. FIG. 9 is a schematic structural diagram of a laser with a modulator according to some embodiments, which shows the basic structure of a laser with a modulator 600 . As shown in FIG. 9 , a laser 600 with a modulator includes a body 610 on which an optical waveguide 620 is disposed, and the optical waveguide 620 is a curved waveguide.

Fig. 10 is a schematic structural diagram of an optical waveguide according to some embodiments. As shown in FIG. 10 , the optical waveguide 620 includes: a light incident surface 621 , a light exit surface 622 , a first arc side 623 and a second arc side 624 . The light incident surface 621 is located at one end of the optical waveguide 620 and serves as a waveguide entrance of the optical waveguide 620 . The light output surface 622 is located at the other end of the optical waveguide 620 and serves as a waveguide exit of the optical waveguide 620 . The first arc side 623 is located on one side of the optical waveguide 620, the second arc side 624 is located on the other side of the optical waveguide 620, and the first arc side 623 and the second arc side 624 are oppositely arranged on both sides of the optical waveguide 620. side, the first arc side 623 and the second arc side 624 are used to connect the light incident surface 621 and the light exit surface 622 to realize a smooth transition from the light incident surface 621 to the light exit surface 622 .

In some embodiments of the present disclosure, the center of the first arc side 623 and the center of the second arc side 624 are located on the same side of the optical waveguide 620, so that the optical waveguide 620 bends to the same side of the optical waveguide 620, and the first circle The arc radius of the arc side 623 is smaller than the arc radius of the second arc side 624 , therefore, the optical waveguide 620 bends toward the direction of the first arc side 623 from one end of the light incident surface 621 to one end of the light exit surface 622 . In this way, by making the side of the optical waveguide include the first arc side 623 and the second arc side 624, the light waveguide is bent on one side, and the arc radius of the second arc side 624 is greater than that of the first arc side 623 The radius of the arc makes the bending degrees on both sides of the optical waveguide different, forming a double smooth and continuous adjustment of the waveguide itself in width and direction (angle), which can maximize the degree of freedom in waveguide design, reduce waveguide bending loss, reduce The reflection of the end face facilitates its use in optoelectronic devices and optical modules.

In some embodiments of the present disclosure, the center of the first arc side 623 and the center of the second arc side 624 are located on the plane where the light incident surface 621 is located, and the center of the first arc side 623 and the second arc side The centers of 624 are collinear.

In the optical waveguide 620 provided in some embodiments of the present disclosure, the arc of the first arc side 623 on the optical waveguide 620 can be calculated according to the width of the light incident surface 621, the width of the light exit surface 622, and the output angle of the target optical waveguide. Radius and the arc radius of the second arc side 624, the distance between the center of the first arc side 623 and the center of the second arc side 624, make the double smoothness of the optical waveguide 620 in width and direction (angle) Continuous adjustment optimizes the freedom of waveguide design to the greatest extent, reduces waveguide bending loss, and reduces end-face reflection.

Figure 11 is a front view of an optical waveguide according to some embodiments. As shown in FIG. 11 , the width of the light incident surface 621 of the optical waveguide 620 is w ₁ , the width of the light exit surface 622 is w ₂ , the light exit angle is θ, the distance between the light entrance surface 621 and the light exit surface 622 is L, the first The radian of the arc side 623 is θ ₁ , the arc of the second arc side 624 is θ ₂ , the arc radius of the first arc side 623 is R ₁ , the arc radius of the second arc side 624 is R ₂ and The distance between the center of the first arc side 623 and the center of the second arc side 624 is D, and the light output angle is the angle between the waveguide exit direction of the optical waveguide 620 and the normal direction of the light output surface. In some embodiments of the present disclosure, the arc radius R ₁ of the first arc side 623 , the arc radius R ₂ of the second arc side 624 , the center of the first arc side 623 and the second arc side 624 The distance D between the centers of circles satisfies the following conditions:

R ₂ sinθ ₂ = R ₁ sinθ ₁ = L (1)

w ₁ =R ₂ -R ₁ -D (2)

w ₂ ＝R ₂ cosθ ₂ -R ₁ cosθ ₁ -D (3)

θ _1/2 is a small amount, there may be an approximation

Then combined with formula (3), we can get:

Note that the angle θ between the waveguide exit direction of the optical waveguide 620 and the normal direction of the light-emitting surface satisfies

Then combined with formula (4), we can get:

D = R ₂ -R ₁ -w ₁ .

The optical waveguides provided by some embodiments of the present disclosure are shown below through specific examples. 12 is a schematic structural diagram of the first optical waveguide according to some embodiments, wherein the width of the light incident surface of the optical waveguide is 1 μm, the width of the light exit surface is 2.5 μm, the length of the optical waveguide is 30 μm, and the light exit angle is 8°; FIG. 13 is a schematic structural diagram of a second optical waveguide according to some embodiments, wherein the width of the light-incoming surface of the optical waveguide is 1 μm, the width of the light-emitting surface is 2.5 μm, the length of the optical waveguide is 50 μm, and the light-emitting angle is 8°; FIG. 14 It is a schematic structural diagram of a third optical waveguide according to some embodiments, wherein the width of the light incident surface of the optical waveguide is 1 μm, the width of the light exit surface is 3.5 μm, the length of the optical waveguide is 50 μm, and the light exit angle is 8°.

Through the above relational formula, all the parameters of the optical waveguide 620 can be customized to calculate the waveguide extension of the smooth arc, so as to achieve an optimized waveguide design, reduce the bending loss of the waveguide, and reduce the reflection of the end face, so that it can be easily Used in optoelectronic devices and optical modules. In the optical waveguide provided by some embodiments of the present disclosure, the determination of its width and angle needs to be combined with factors such as the structure, material, refractive index, and shape of the optical field of the waveguide, and determined according to actual conditions. Calculated by the method of time-domain finite element difference, through the adjustment of angle and width, this scheme can reduce the reflection of the end face to a level much lower than 0.01%.

In some embodiments of the present disclosure, the optical waveguide 620 is a single-mode waveguide, and the thickness of the optical waveguide 620 may range from 0.5-10 μm. If the optical waveguide 620 has a shallow ridge structure, the thickness of the optical waveguide 620 ranges from 0.5-3 μm; if the optical waveguide 620 has a deep ridge structure, the thickness of the optical waveguide 620 ranges from 1-10 μm.

The optical waveguide 620 provided by some embodiments of the present disclosure is not only applicable to the laser 600 with a modulator shown in FIG. 12 and FIG. 13 , and the laser 600 with a modulator shown in FIG. 12 and FIG. For example, the optical waveguide 620 provided in the present disclosure can also be used in other structural forms such as DML, EML and other lasers with modulators or optoelectronic devices such as silicon optical chips.

In some embodiments of the present disclosure, in the laser 600 with a modulator, the first P-electrode layer 631 is set on the optical waveguide 620, the second P-electrode layer 611 is set on the body 610, and the first P-electrode layer 631 passes through the suspension electrode 632 is electrically connected to the second P-electrode layer 611 , and the suspended electrode 632 is suspended on the waveguide groove at the side of the optical waveguide 620 . The laser 600 with a modulator adopts a suspended electrode 632, and the suspended electrode 632 straddles the waveguide groove. When the electric injection is performed through the suspended electrode 632, the suspended electrode 632 is suspended in the air for crossing, and the suspended electrode 632 is not in contact with the waveguide groove. The passivation layer at the bottom and the sidewall is in contact, thereby greatly reducing the parasitic capacitance generated when the electrode covers the bottom and sidewall of the ridge waveguide groove, and achieving the effect of increasing the rate of the laser with the modulator.

The above is only a specific embodiment of the present disclosure, but the scope of protection of the present disclosure is not limited thereto. Anyone familiar with the technical field who thinks of changes or substitutions within the technical scope of the present disclosure should cover all within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be determined by the protection scope of the claims.

Claims

A laser with a modulator comprising:

Ontology;

an optical waveguide disposed on the body;

Wherein, the optical waveguide includes:

a light incident surface located at one end surface of the optical waveguide;

a light exit surface located at the other end surface of the optical waveguide;

a first arc side, located on one side of the optical waveguide;

The second arc side is located on the other side of the optical waveguide, the center of the second arc side is located on the same side of the optical waveguide as the center of the first arc side, and the second arc The arc radius of the side is larger than the arc radius of the first arc side.
The laser with a modulator according to claim 1, wherein if the width of the light incident surface is w 1 , the width of the light exit surface is w 2 , and the distance between the light incident surface and the light exit surface is L and the light emitting angle are θ, then the arc of the first arc side is θ 1 , the arc of the second arc is θ 2 , the arc radius of the first arc is R 1 , and The arc radius of the second arc side is R2 and the distance between the center of the first arc side and the center of the second arc side is D;

in:
D = R 2 -R 1 -w 1 .
The laser with modulator according to claim 1, wherein the thickness of the optical waveguide is in the range of 0.5-10 μm.
The laser with a modulator according to claim 1, wherein if the optical waveguide has a shallow ridge structure, the thickness of the optical waveguide is in the range of 0.5-3 μm;

If the optical waveguide has a deep ridge structure, the thickness of the optical waveguide is in the range of 1-10 μm.
A laser with a modulator according to claim 1, wherein,

A first P electrode layer is set on the optical waveguide, a second P electrode layer is set on the body, the first P electrode layer is electrically connected to the second P electrode layer through a suspension electrode, and the suspension electrode is suspended on the on the waveguide groove on the side of the optical waveguide.
An optical module, wherein the optical module includes an optoelectronic device, and the optoelectronic device is the laser with a modulator according to any one of claims 1-5.