CN113464409A - Thin gas transmission device - Google Patents

Thin gas transmission device Download PDF

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Publication number
CN113464409A
CN113464409A CN202010241639.4A CN202010241639A CN113464409A CN 113464409 A CN113464409 A CN 113464409A CN 202010241639 A CN202010241639 A CN 202010241639A CN 113464409 A CN113464409 A CN 113464409A
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CN
China
Prior art keywords
plate
hole
gas
groove
vent
Prior art date
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Granted
Application number
CN202010241639.4A
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Chinese (zh)
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CN113464409B (en
Inventor
莫皓然
陈世昌
廖家淯
廖鸿信
高中伟
黄启峰
韩永隆
蔡长谚
李伟铭
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Priority to CN202010241639.4A priority Critical patent/CN113464409B/en
Publication of CN113464409A publication Critical patent/CN113464409A/en
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Publication of CN113464409B publication Critical patent/CN113464409B/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • F04B39/1006Adaptations or arrangements of distribution members the members being ball valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/121Casings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

A thin gas delivery device, comprising: a base plate having: a first bottom surface; a second bottom surface; the accommodating groove is formed by sinking from the first bottom surface and is provided with an accommodating bottom surface; the air outlet groove is formed by sinking from the accommodating bottom surface and is provided with an air outlet channel; the positioning part surrounds the accommodating groove; the vent hole is positioned on the positioning part and is provided with an air inlet end and a vent end, and the vent end is communicated with the accommodating groove, wherein the vent hole is gradually reduced from the vent end to the air inlet end; the locking bead is accommodated in the vent hole; the air inlet pipe is communicated with the air inlet end of the vent hole; the air outlet pipe is communicated with the air outlet channel of the air outlet groove; the gas pump is arranged on the accommodating bottom surface of the accommodating groove and covers the gas outlet groove; and the top cover is fixedly arranged on the positioning part and covers the containing groove, wherein the diameter of the locking bead is between the diameter of the ventilation end and the diameter of the air inlet end.

Description

Thin gas transmission device
Technical Field
The present invention relates to a thin gas transmission device, and more particularly, to a thin gas transmission device capable of preventing gas from flowing back.
Background
With the increasing development of technology, gas delivery devices are being used more and more frequently, and even recently, the image is seen in wearable devices, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and conventional pumps are gradually becoming smaller and larger.
After an air bag is inflated by the conventional thin gas transmission device, when the inflation is completed and the thin gas transmission device stops operating, the phenomenon of gas backflow often occurs, so that the air pressure in the air bag is insufficient, and the problem how to avoid the gas backflow when the thin gas transmission device stops is solved at present.
Disclosure of Invention
The main purpose of the present invention is to provide a thin gas transmission device, which utilizes a tapered vent hole to contain a locking bead to achieve the effect of inhibiting gas backflow.
One broad aspect of the present disclosure is a thin gas delivery device, comprising: a base plate having: a first bottom surface; a second bottom surface opposite to the first bottom surface; a containing groove formed by sinking from the first bottom surface and provided with a containing bottom surface; an air outlet groove formed by sinking from the bottom of the containing groove and provided with an air outlet channel; a positioning part protruding from the first bottom surface and surrounding the accommodating groove; a vent hole located at the fixing part and having an air inlet end and a vent end, the vent end being communicated with the accommodating groove, wherein the vent hole is gradually reduced from the vent end to the air inlet end; a locking bead accommodated in the vent hole; an air inlet pipe communicated with the air inlet end of the vent hole; and an air outlet pipe communicated with the air outlet channel of the air outlet groove; the gas pump is arranged on the accommodating bottom surface of the accommodating groove and covers the gas outlet groove in a sealing manner; and the top cover is fixedly arranged on the positioning part and covers the containing groove, wherein the diameter of the locking bead is between the diameter of the ventilation end and the diameter of the air inlet end.
Drawings
Fig. 1A is a perspective view of the thin gas transmission device.
Fig. 1B is an exploded view of the thin gas transmission device.
Fig. 2A is a perspective view of the bottom plate of the present disclosure.
Fig. 2B is a view of the bottom plate of the present application in an overhead view.
Fig. 3A is an exploded view of the gas pump of the present invention.
Fig. 3B is another exploded view of the gas pump of the present invention.
Fig. 4A is a schematic cross-sectional view of the gas pump of the present invention.
Fig. 4B to 4D are operation diagrams of the gas pump according to the present disclosure.
Fig. 5A and 5B are schematic views of gas flows of the thin gas transmission device.
FIG. 5C is a schematic view of the thin gas transmission device for preventing gas backflow.
Description of the reference numerals
100: thin gas transmission device
1: base plate
11: first bottom surface
12: second bottom surface
13: containing groove
131: accommodating bottom surface
14: air outlet groove
141: side wall part
142: air outlet channel
15: positioning part
151: fixing hole
16: vent hole
161: air inlet end
162: ventilation end
17: locking bead
18: air inlet pipe
19: air outlet pipe
1 a: first side wall
1 b: second side wall
1 c: third side wall
1 d: the fourth side wall
2: gas pump
21: intake plate
21 a: inlet orifice
21 b: bus bar groove
21 c: confluence chamber
22: resonance sheet
22 a: hollow hole
22 b: movable part
22 c: fixing part
23: piezoelectric actuator
23 a: suspension plate
23 b: outer frame
23 c: support frame
23 d: piezoelectric element
23 e: gap
23 f: convex part
24: first insulating sheet
25: conductive sheet
26: second insulating sheet
27: chamber space
3: top cover
31: fixing column
A-A, B-B: section line
Detailed Description
Some exemplary embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.
Referring to fig. 1A and 1B, a thin gas transmission device 100 is provided, which includes a base plate 1, a gas pump 2 and a top cover 3, wherein the gas pump 2 is accommodated in the base plate 1, and is fixed on the base plate 1 by the top cover 3.
Referring to fig. 2A and 2B, the bottom plate 1 includes a first bottom surface 11, a second bottom surface 12, a receiving groove 13, an air outlet groove 14, a positioning portion 15, a vent hole 16, a locking bead 17, an air inlet pipe 18, an air outlet pipe 19, a first side wall 1a, a second side wall 1B, a third side wall 1c, and a fourth side wall 1d, the first bottom surface 11 and the second bottom surface 12 are two surfaces opposite to each other, the receiving groove 13 is formed by recessing from the first bottom surface 11 and has a receiving bottom surface 131, the air outlet groove 14 is formed by recessing from the receiving bottom surface 131, the air outlet groove 14 has a side wall portion 141 and an air outlet channel 142, the air outlet channel 142 is located on the side wall portion 141, the positioning portion 15 is square and protrudes from the first bottom surface 11 and is disposed around the receiving groove 13, the vent hole 16 is located on the positioning portion 15 and has an air inlet end 161 and a vent end 162, the air inlet pipe 18 extends outwards from the first side wall 1a and is communicated with the air inlet end 161 of the air vent 16, the air outlet pipe 19 extends outwards from the third side wall 1c of the first side wall 1a and is communicated with the air outlet channel 142 of the air outlet groove 14, wherein the air inlet pipe 18 and the air outlet pipe 19 are arranged in a staggered manner; it should be noted that the air inlet pipe 18 and the air outlet pipe 19 may also be disposed on the second side wall 1b or the fourth side wall 1d, and not limited thereto.
As mentioned above, the locking bead 17 is a circular bead, the vent hole 16 is a circular through hole, and the diameter of the locking bead 17 is between the diameter of the vent end 162 of the vent hole 16 and the diameter of the air inlet end 161; the diameter of the locking bead 17 may be between 0.5mm and 1mm, in one embodiment, the diameter of the locking bead 17 is 0.8mm, and the locking bead 17 may be a steel ball.
The vent hole 16 is tapered from the vent end 162 to the air inlet end 161, and the locking bead 17 is accommodated in the tapered vent hole 16, and the inclined angle of the tapered vent hole 16 is 10 degrees to 14 degrees, in one embodiment, the inclined angle is 12 degrees, wherein the diameter of the air inlet end 161 is 0.68mm, and the diameter of the vent end 162 is 1.2 mm.
As shown in fig. 1, the gas pump 2 is disposed on the accommodating bottom surface 131 of the accommodating groove 13 and covers the gas outlet groove 14, and referring to fig. 3A and 3B, the gas pump 2 includes a flow inlet plate 21, a resonant plate 22, a piezoelectric actuator 23, a first insulating plate 24, a conductive plate 25, and a second insulating plate 26, which are sequentially stacked and combined. The inlet plate 21 has at least one inlet hole 21a, at least one bus groove 21b and a collecting chamber 21c, the inlet hole 21a is used for introducing gas, the inlet hole 21a correspondingly penetrates through the bus groove 21b, and the bus groove 21b is collected to the collecting chamber 21c, so that the gas introduced from the inlet hole 21a is collected to the collecting chamber 21 c. In the present embodiment, the number of the inflow holes 21a and the number of the bus grooves 21b are the same, the number of the inflow holes 21a and the number of the bus grooves 21b are 4, and the 4 inflow holes 21a penetrate the 4 bus grooves 21b, and the 4 bus grooves 21b are converged into the bus chamber 21 c.
Referring to fig. 3A, 3B and 4A, the resonator plate 22 is assembled on the flow inlet plate 21 by a bonding method, and the resonator plate 22 has a hollow hole 22a, a movable portion 22B and a fixing portion 22c, the hollow hole 22a is located at the center of the resonator plate 22 and corresponds to the collecting chamber 21c of the flow inlet plate 21, the movable portion 22B is disposed at the periphery of the hollow hole 22a and is opposite to the collecting chamber 21c, and the fixing portion 22c is disposed at the outer peripheral edge portion of the resonator plate 22 and is bonded to the flow inlet plate 21.
As shown in fig. 3A, fig. 3B and fig. 4A, the piezoelectric actuator 23 is connected to the resonator plate 22 and disposed corresponding to the resonator plate 22, and includes a suspension plate 23A, an outer frame 23B, at least one support 23c, a piezoelectric element 23d, at least one gap 23e and a protrusion 23 f. The suspension plate 23a is in a square shape, the suspension plate 23a is square, compared with the design of a circular suspension plate, the structure of the square suspension plate 23a obviously has the advantage of power saving, the consumed power of the square suspension plate 23a is increased along with the increase of the frequency due to the capacitive load operated under the resonance frequency, and the relative consumed power of the square suspension plate 23a is obviously lower due to the resonance frequency of the square suspension plate 23a is obviously lower than that of the circular suspension plate, namely, the square suspension plate 23a adopted by the scheme has the benefit of power saving; the outer frame 23b is disposed around the outer side of the suspension plate 23 a; at least one bracket 23c is connected between the suspension plate 23a and the outer frame 23b to provide a supporting force for elastically supporting the suspension plate 23 a; and a piezoelectric element 23d having a side length less than or equal to a side length of a suspension plate 23a of the suspension plate 23a, and the piezoelectric element 23d is attached to a surface of the suspension plate 23a for applying a voltage to drive the suspension plate 23a to vibrate in a bending manner; at least one gap 23e is formed among the suspension plate 23a, the outer frame 23b and the bracket 23c for air to pass through; the protrusion 23f is disposed on the other surface of the suspension plate 23a opposite to the surface to which the piezoelectric element 23d is attached, and in the present embodiment, the protrusion 23f is a protrusion integrally formed on the other surface of the suspension plate 23a opposite to the surface to which the piezoelectric element 23d is attached by an etching process.
Referring to fig. 3A, fig. 3B and fig. 4A, the flow inlet plate 21, the resonator plate 22, the piezoelectric actuator 23, the first insulating plate 24, the conductive plate 25 and the second insulating plate 26 are sequentially stacked and combined, wherein a cavity space 27 is required to be formed between the suspension plate 23A of the piezoelectric actuator 23 and the resonator plate 22, and the cavity space 27 can be formed by filling a material in a gap between the resonator plate 22 and the outer frame 23B of the piezoelectric actuator 23, for example: the conductive adhesive, but not limited thereto, can maintain a certain depth between the resonator plate 22 and a surface of the suspension plate 23a to form the cavity space 27, and further can guide the gas to flow more rapidly, and because the suspension plate 23a and the resonator plate 22 keep a proper distance, the mutual contact interference is reduced, and the noise generation is reduced, in another embodiment, the height of the outer frame 23b of the piezoelectric actuator 23 can also be increased to reduce the thickness of the conductive adhesive filled in the gap between the resonator plate 22 and the outer frame 23b of the piezoelectric actuator 23, so that the overall structural assembly of the gas pump 2 is not affected by the thermal compression temperature and the cooling temperature indirectly, and the filling material of the conductive adhesive is not affected by the thermal contraction temperature to the actual distance of the cavity space 27 after molding, but not limited thereto. In addition, the chamber space 27 will affect the transmission efficiency of the gas pump 2, so it is important to maintain a fixed chamber space 27 to provide stable transmission efficiency of the gas pump 2.
In order to understand the output actuation manner of the gas pump 2 for providing gas transmission, please refer to fig. 4B to 4D, please refer to fig. 4B first, the piezoelectric element 23D of the piezoelectric actuator 23 is deformed to drive the suspension plate 23a to move downward after being applied with the driving voltage, at this time, the volume of the chamber space 27 is increased, a negative pressure is formed in the chamber space 27, so as to draw the gas in the bus chamber 21c into the chamber space 27, and the resonance plate 22 is synchronously moved downward under the influence of the resonance principle, so as to increase the volume of the bus chamber 21c, and the gas in the bus chamber 21c is also in a negative pressure state due to the relationship that the gas in the bus chamber 21c enters the chamber space 27, and further, the gas is drawn into the bus chamber 21c through the inflow hole 21a and the bus groove 21B; referring to fig. 4C, the piezoelectric element 23d drives the suspension plate 23a to move upward to compress the chamber space 27, and similarly, the resonator 22 is moved upward by the suspension plate 23a due to resonance, so as to force the gas in the chamber space 27 to be pushed synchronously downward and to be transmitted downward through the gap 23e, thereby achieving the effect of transmitting the gas; finally, referring to fig. 4D, when the floating plate 23a returns to the original position, the resonator plate 22 still moves downward due to inertia, and the resonator plate 22 moves the gas in the compression chamber space 27 toward the gap 23e and increases the volume in the converging chamber 21C, so that the gas can continuously pass through the inflow hole 21a and the converging groove 21b to converge in the converging chamber 21C, and by continuously repeating the gas transmission actuation steps provided by the gas pump 2 shown in fig. 4C to 4D, the gas pump 2 can continuously enter the flow channel formed by the inflow hole 21a and the resonator plate 21 to generate a pressure gradient, and then the gas is transmitted downward through the gap 23e, so that the gas flows at a high speed, and the actuation operation of the gas pump 2 for outputting the transmitted gas is achieved.
Fig. 5A is a sectional view taken along line a-a of fig. 1A, and fig. 5B is a sectional view taken along line B-B of fig. 1A, please refer to fig. 5A, when the gas pump 2 is actuated to draw the gas in the accommodating groove 13 and deliver the gas downward to the gas outlet groove 14, at this time, the accommodating groove 13 is in a negative pressure state, the gas outside the thin gas transmission device 100 will enter from the gas inlet pipe 18 of the bottom plate 1 and push the locking bead 17 located in the vent hole 16 upward, so that the locking bead 17 is separated from the gas inlet end 161 of the vent hole 16, the gas can enter from the gas inlet pipe 18 to the vent hole 16 through the gas inlet end 161, and since the diameter of the vent end 162 is larger than the diameter of the locking bead 17, the locking bead 17 cannot close the vent end 162, so that the gas will enter into the accommodating groove 13 through the vent end 162 and continue to be delivered to the gas outlet groove 14; referring to fig. 5B, after the gas is guided to the gas outlet groove 14, the gas enters the gas outlet pipe 19 through the gas outlet channel 142 and is discharged from the gas outlet pipe 19, thereby completing the gas conveying process.
Referring to fig. 5C, when the gas pump 2 stops operating, the gas pressure in the containing groove 13 is higher than the gas pressure outside the thin gas transmission device 100, so that the gas is guided from the containing groove 13 to the vent hole 16, and the locking bead 17 at the vent end 162 is pushed to the gas inlet 161, since the diameter of the locking bead 17 is larger than that of the gas inlet 161, when the locking bead 17 is pushed to the gas inlet 161, the gas inlet 161 is closed, and the gas is stopped from passing through the gas inlet 161, thereby achieving the effect of preventing the gas from flowing backwards.
Referring to fig. 1B and 5C, the positioning portion 15 of the bottom plate 1 has at least one fixing hole 151, in the embodiment, the number of the fixing holes 151 is 3, but not limited thereto, the top cover 3 has at least one fixing post 31, and the number and the position of the fixing posts 31 correspond to the fixing holes 151, and the fixing posts 31 respectively penetrate through the corresponding fixing holes 151 for positioning and fixing.
In summary, the thin gas transmission device provided by the present invention has the advantages that the locking bead is disposed in the tapered vent hole, when the gas pump operates, the locking bead is guided to the vent end by the gas pressure, so that the gas outside the micro gas transmission device can enter from the gas inlet end, when the gas pump stops operating, the locking bead is guided to the gas inlet end by the gas pressure, and the gas inlet end is sealed, so as to prevent the gas from flowing back from the gas inlet pipe, which is very useful in industry.
Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

Claims (8)

1. A thin gas delivery device, comprising:
a base plate having:
a first bottom surface;
a second bottom surface opposite to the first bottom surface;
a containing groove formed by sinking from the first bottom surface and provided with a containing bottom surface;
an air outlet groove formed by sinking from the bottom of the containing groove and provided with an air outlet channel;
a positioning part protruding from the first bottom surface and surrounding the accommodating groove;
the vent hole is positioned in the positioning part and is provided with an air inlet end and a vent end, the vent end is communicated with the containing groove, and the vent hole is gradually reduced from the vent end to the air inlet end;
a locking bead accommodated in the vent hole;
an air inlet pipe communicated with the air inlet end of the vent hole; and
the air outlet pipe is communicated with the air outlet channel of the air outlet groove;
the gas pump is arranged on the accommodating bottom surface of the accommodating groove and covers the gas outlet groove in a sealing manner; and
the top cover is fixedly arranged on the positioning part and covers the accommodating groove;
wherein the diameter of the locking bead is between the diameter of the vent end and the diameter of the air inlet end.
2. The thin gas delivery device according to claim 1, wherein the diameter of the locking bead is between 0.5mm and 1 mm.
3. The thin gas delivery device according to claim 2, wherein the locking bead has a diameter of 0.8 mm.
4. The thin gas delivery device according to claim 1, wherein the locking bead is a steel ball.
5. The thin gas delivery device as claimed in claim 1, wherein the positioning portion has at least one fixing hole, and the top cover has at least one fixing post passing through the at least one fixing hole.
6. The thin gas delivery device according to claim 1, wherein the gas pump comprises:
the inflow plate is provided with at least one inflow hole, at least one bus groove and a confluence chamber, wherein the inflow hole is used for introducing a gas, the inflow hole correspondingly penetrates through the bus groove, the bus groove is confluent to the confluence chamber, and the gas introduced by the inflow hole is confluent to the confluence chamber;
a resonance sheet, which is connected on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the flow inlet plate, the movable part is arranged at the area around the hollow hole and opposite to the confluence chamber, and the fixed part is arranged at the outer peripheral part of the resonance sheet and is attached on the flow inlet plate; and
a piezoelectric actuator, which is jointed on the resonance sheet and is arranged corresponding to the resonance sheet;
the resonance plate is provided with a flow inlet hole, a flow outlet hole and a flow inlet hole, wherein a cavity space is arranged between the resonance plate and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas is led in from the flow inlet hole of the flow inlet plate, is collected into the flow inlet cavity through the bus groove, flows through the hollow hole of the resonance plate, and is subjected to resonance transmission by the piezoelectric actuator and the movable part of the resonance plate.
7. The thin gas delivery device according to claim 6, wherein the piezoelectric actuator comprises:
a suspension plate having a square shape and capable of bending and vibrating;
an outer frame surrounding the suspension plate;
at least one bracket connected between the suspension plate and the outer frame to provide elastic support for the suspension plate; and
the piezoelectric element is attached to one surface of the suspension plate and used for applying voltage to drive the suspension plate to vibrate in a bending mode.
8. The thin gas delivery device according to claim 7, wherein the gas pump further comprises a first insulating plate, a conducting plate and a second insulating plate, wherein the flow inlet plate, the resonator plate, the piezoelectric actuator, the first insulating plate, the conducting plate and the second insulating plate are sequentially stacked and combined.
CN202010241639.4A 2020-03-31 2020-03-31 Thin gas transmission device Active CN113464409B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010241639.4A CN113464409B (en) 2020-03-31 2020-03-31 Thin gas transmission device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010241639.4A CN113464409B (en) 2020-03-31 2020-03-31 Thin gas transmission device

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Publication Number Publication Date
CN113464409A true CN113464409A (en) 2021-10-01
CN113464409B CN113464409B (en) 2023-07-04

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008106865A (en) * 2006-10-26 2008-05-08 Alps Electric Co Ltd Check valve and manufacturing method
CN104470551A (en) * 2012-05-15 2015-03-25 史密夫及内修公开有限公司 Negative pressure wound therapy apparatus
CN107023467A (en) * 2016-01-29 2017-08-08 研能科技股份有限公司 Minisize fluid control device
CN108468636A (en) * 2018-01-09 2018-08-31 合肥工业大学 A kind of Piezoelectric Driving using lightweight ball valve pumps
TWM582533U (en) * 2019-05-10 2019-08-21 研能科技股份有限公司 Micro piezoelectric pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008106865A (en) * 2006-10-26 2008-05-08 Alps Electric Co Ltd Check valve and manufacturing method
CN104470551A (en) * 2012-05-15 2015-03-25 史密夫及内修公开有限公司 Negative pressure wound therapy apparatus
CN107023467A (en) * 2016-01-29 2017-08-08 研能科技股份有限公司 Minisize fluid control device
CN108468636A (en) * 2018-01-09 2018-08-31 合肥工业大学 A kind of Piezoelectric Driving using lightweight ball valve pumps
TWM582533U (en) * 2019-05-10 2019-08-21 研能科技股份有限公司 Micro piezoelectric pump

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