CN113458588B - Small-caliber deep hole inner wall laser processing system - Google Patents

Small-caliber deep hole inner wall laser processing system Download PDF

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Publication number
CN113458588B
CN113458588B CN202110641768.7A CN202110641768A CN113458588B CN 113458588 B CN113458588 B CN 113458588B CN 202110641768 A CN202110641768 A CN 202110641768A CN 113458588 B CN113458588 B CN 113458588B
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laser
gear pair
transmission gear
axis
mounting
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CN113458588A (en
Inventor
沈丽峰
孙权权
秦声
蔡晓江
周如好
兰洁
焦威
许剑锋
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Huazhong University of Science and Technology
Shanghai Aerospace Control Technology Institute
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Huazhong University of Science and Technology
Shanghai Aerospace Control Technology Institute
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a small-caliber deep hole inner wall laser processing system which comprises an optical vibration isolation platform, a femtosecond laser, a laser modulation assembly, a laser incidence adjustment assembly, a laser deflection assembly, an auxiliary tool, a six-degree-of-freedom combined displacement platform and a base. According to the small-caliber deep hole inner wall laser processing system, the reflection direction of laser is adjusted through the laser deflection assembly, so that the laser is injected into a workpiece hole from different angles and the inner wall of the hole is processed, the workpiece can be driven by the six-degree-of-freedom combined displacement table to be close to or far away from the workpiece, and the workpiece can be moved or deflected in multiple angles, so that the inner walls of different holes are processed by the laser, the laser processing capacity and the processing effect are greatly improved, the use range of the system is expanded, and the small-caliber deep hole inner wall laser processing system has a good application prospect.

Description

Small-caliber deep hole inner wall laser processing system
Technical Field
The invention belongs to the field of precise special machining, and particularly relates to a laser machining system for the inner wall of a small-caliber deep hole.
Background
Laser machining has many applications in the treatment of the inner wall of tubular parts, such as desmear cleaning, pattern and microstructure etching, machining, and the like. Patent No. 201611075111 discloses a laser decontamination system for cleaning the inner wall of a pipeline, which is moved along the inside of the pipeline by a driving device, and the device has a simple structure and a large volume. Patent No. CN201510195584 discloses a laser processing head for inner wall of pipeline, which can generate ring focusing line beam with adjustable focal length, and can complete the processing of inner wall of tubular structure without rotation of pipeline or processing head, but its beam output angle is fixed and not adjustable, and its volume is also large. Patent No. 201510041886 discloses a laser etching device for the inner wall of an internal combustion engine cylinder, which is used for laser processing of the inner wall of a pipeline-shaped structure with a small aperture, but the angle of a laser head of the device is not adjustable, and the device is not suitable for processing characteristic structures such as inclined plane corners.
The analysis of the above-mentioned patent discloses can know that the laser head and the moving device that the laser processing device that aim at tubular part inner wall adopted at present are great in size to the laser head generally is fixed mode, can not change laser beam output angle, can only be used to the processing of the pipeline class part of structural feature such as heavy-calibre, cavity no complicated internal bevel and corner. The inner wall of a cylindrical structure part with the characteristics of a complex curved surface type, a small-caliber deep hole, an inclined plane in a cavity and a corner is subjected to laser processing, and no suitable laser processing solution is available at present.
Disclosure of Invention
The invention provides a system for laser processing the inner wall of a small-caliber deep hole, which aims to realize the laser processing of the inner wall of a cylindrical structure part with the characteristics of a complex curved surface type, a small-caliber deep hole, an inclined plane in a cavity and a corner.
The invention provides a small-caliber deep hole inner wall laser processing system which comprises an optical vibration isolation platform, a femtosecond laser, a laser modulation assembly, a laser incidence adjustment assembly, a laser deflection assembly, a six-degree-of-freedom combined displacement platform and a base;
the femtosecond laser is positioned on the optical vibration isolation platform and used for generating laser beams; the laser beam passes through the laser modulation assembly;
the laser modulation assembly is positioned on the optical vibration isolation platform and used for modulating the laser beam to form modulated laser; the modulated laser passes through the laser incidence adjusting component;
the laser incidence adjusting assembly is arranged on the base and used for adjusting the propagation direction of the modulated laser and enabling the modulated laser to enter the laser deflection assembly along the set incidence direction;
the laser deflection assembly is fixedly connected with the laser incidence adjusting assembly and is used for adjusting the reflection direction of the modulated laser, so that the modulated laser is incident into a workpiece along different directions and the inner wall of a hole of the workpiece is processed;
the six-degree-of-freedom combined displacement platform is arranged on the base and drives the workpiece to be close to or far away from the laser deflection assembly, multi-angle movement or deflection can be carried out, and the inner wall of a hole of the workpiece is processed.
Preferably, the laser modulation assembly comprises a mounting adjusting frame, and a shutter, a slide, a beam reducer and an attenuator which are arranged on the mounting adjusting frame; the mounting adjusting frame is arranged on the optical vibration isolation platform;
the laser beam generated by the femtosecond laser forms modulated laser through a shutter, a glass slide, a beam reducer and an attenuator; the shutter is used for controlling the on-off of the laser beam; the slide is used for adjusting the polarization direction of the laser; the beam reducer is used for adjusting the beam diameter of the laser beam; the attenuator is used for stepless adjustment of laser energy.
Preferably, the laser guiding assembly comprises a truss, a mounting table arranged on the truss, a first reflector and a first angle sensor arranged on the mounting table, and a lens barrel;
the truss is fixedly arranged on the base; the truss is of a door-shaped structure and comprises a cross beam and two support legs, wherein the two support legs are respectively arranged at two ends of the cross beam, one end of each support leg is fixedly connected with the cross beam, and the other end of each support leg is fixedly arranged on the base; the mounting table is arranged on the cross beam; one end of the lens cone is arranged on the cross beam, and the other end of the lens cone extends to the base and is provided with the laser deflection assembly;
the modulated laser injected into the laser guiding-in component is reflected by the first reflecting mirror, enters the lens barrel and is injected into the laser deflection component along the central axis of the lens barrel; the first angle sensor is used for monitoring the deflection angle of the first reflector in real time;
the set injection direction of the modulated laser entering the laser deflection assembly is the direction of injecting the modulated laser into the laser deflection assembly along the central axis of the lens barrel.
Preferably, the laser deflection assembly comprises a mounting frame, a flange, a driven shaft and a second reflector;
the mounting frame is provided with a groove structure, and the groove opening is downwards arranged; the mounting rack comprises a top plate, a first side plate and a second side plate;
the flange plate is fixedly arranged on the top plate, is fixedly connected with the lens cone and is used for realizing the connection of the laser deflection assembly and the laser leading-in assembly; the modulated laser emitted into the lens cone passes through the through holes of the flange plate and the top plate and enters the groove of the mounting frame;
the first side or the first end of each part is close to the first side plate, and the second side or the second end of each part is close to the second side plate;
the driven shaft horizontally penetrates through the first side plate and the second side plate of the mounting frame, and a first end of the driven shaft extends out of the first side plate and a second end of the driven shaft extends out of the second side plate;
the second reflector is positioned in the groove of the mounting rack, is fixedly arranged on the driven shaft and rotates along with the driven shaft; and the modulated laser entering the groove is reflected by the second reflecting mirror, and the modulated laser reaches the surface of the hole wall of the workpiece to be processed.
Preferably, the laser deflection assembly further comprises a servo motor, a reduction gear pair AA, a reduction gear pair AB, a mounting seat A, a rolling bearing A and a swing rod A which are positioned on the first side of the mounting frame,
a transmission gear pair BA, a transmission gear pair BB, a transmission gear pair BC, a transmission gear pair BD, a mounting seat B, a rolling bearing B and a swing rod B which are positioned at the second side of the mounting rack,
the driving shaft, the connecting rod, the laser head and the second angle sensor; the driving shaft horizontally penetrates through the first side plate and the second side plate of the mounting frame, and the first end of the driving shaft extends out of the first side plate while the second end of the driving shaft extends out of the second side plate;
the servo motor is fixedly arranged on the first side plate and used for controlling the rotation of the reduction gear pair AA; the reduction gear pair AB is fixedly arranged at the first end of the driving shaft and is meshed with the reduction gear pair AA; the reduction gear pair AA rotates to drive the reduction gear pair AB, and the driving shaft rotates along with the reduction gear pair AB; the transmission gear pair BA and the transmission gear pair BB are fixedly arranged at the second end of the driving shaft, and the driving shaft rotates to drive the transmission gear pair BA and the transmission gear pair BB to rotate;
the mounting seat A is fixedly arranged on the first side plate and penetrates through the first end of the driven shaft; the swing rod A is arranged on the mounting seat A through a rolling bearing A, wherein the inner ring of the rolling bearing A is arranged on the shaft neck of the mounting seat A, and the outer ring of the rolling bearing A is provided with the swing rod A;
the mounting seat B is fixedly arranged on the second side plate and penetrates through the second end of the driven shaft; the swing rod B is arranged on the mounting seat B through a rolling bearing B, wherein the inner ring of the rolling bearing B is arranged on the shaft neck of the mounting seat B, and the outer ring of the rolling bearing B is provided with the swing rod B;
the first end of the connecting rod is fixedly arranged in the mounting hole of the oscillating rod A, and the second end of the connecting rod is fixedly arranged in the mounting hole of the oscillating rod B; the laser head and the second angle sensor are arranged on the connecting rod;
a transmission gear pair BD is arranged at the second end of the driven shaft and is meshed with a transmission gear pair BB, the transmission gear pair BB rotates to drive the transmission gear pair BD to rotate, the driven shaft rotates along with the transmission gear pair BD, and a second reflecting mirror arranged on the driven shaft synchronously rotates, so that the angle of the second reflecting mirror and the reflecting direction of the second reflecting mirror to modulated laser are changed;
the oscillating rod B is provided with a transmission gear pair BC, the transmission gear pair BC is meshed with a transmission gear pair BA, the transmission gear pair BA rotates to drive the transmission gear pair BC to rotate, the oscillating rod B rotates along with the transmission gear pair BC, the connecting rod and a laser head arranged on the connecting rod synchronously rotate, so that modulated laser reflected by the second reflector can be shot to the inner wall of the hole of the workpiece through the laser head to process the inner walls of the holes at different positions;
and the second angle sensor is used for feeding back the deflection angle of the modulated laser emitted by the laser head in real time.
Preferably, the mounting seat a or the mounting seat B comprises a bottom plate and a journal arranged on one side of the bottom plate and perpendicular to the bottom plate, the mounting seat a or the mounting seat B has a through hole formed along the journal, and the driven shaft passes through the through hole; the bottom plate is provided with a fixing hole, the mounting seat A is fixedly mounted on the first side plate through the fixing hole, and the mounting seat B is fixedly mounted on the second side plate;
one end of the swinging rod A or the swinging rod B is provided with a convex circular table and a mounting hole formed along the circular table, and the swinging rod B is fixedly provided with a transmission gear pair BC through the mounting hole and is fixedly arranged on the outer ring of the rolling bearing B through interference connection; the oscillating rod A is fixedly arranged on an outer ring of the rolling bearing A through interference connection; the other end of the swing rod A or the swing rod B is also provided with a mounting hole, the swing rod A fixes one end of the connecting rod through the mounting hole, and the swing rod B fixes the other two ends of the connecting rod through the mounting hole.
Preferably, the transmission ratio I of the transmission gear pair BA and the transmission gear pair BC 1 Transmission ratio I with transmission gear pair BB and transmission gear pair BD 2 Satisfies the following conditions: i is 1 :I 2 =1:2。
Preferably, the six-degree-of-freedom combined displacement table comprises an X-axis angular displacement table, a Y-axis angular displacement table, a Z-axis electric rotating table, an X-axis electric displacement table, a Y-axis electric displacement table, a Z-axis electric lifting table and a third angle sensor; the X-axis angular displacement table and the Y-axis angular displacement table are combined to form a first combined translation table, and the first combined translation table is arranged on the Z-axis electric rotating table; the X-axis electric displacement table and the Y-axis electric displacement table are combined to form a second combined translation table, and the second combined translation table is arranged on the Z-axis electric lifting table; the Z-axis electric rotating table is arranged on the second combined translation table;
the six-degree-of-freedom combined displacement platform comprises an X-axis angular displacement platform, a Y-axis angular displacement platform, a Z-axis electric rotating platform, an X-axis electric displacement platform, a Y-axis electric displacement platform and a Z-axis electric lifting platform, wherein the X-axis angular displacement platform is used for rotating around an X axis, the Y-axis angular displacement platform is used for rotating around a Y axis, the Z-axis electric rotating platform is used for rotating around a Z axis, the X-axis electric displacement platform is used for moving along the X axis, the Y-axis electric displacement platform is used for moving along the Y axis, and the Z-axis electric lifting platform is used for moving along the Z axis, so that workpieces arranged on the six-degree-of-freedom combined displacement platform can move or rotate in different directions;
the third angle sensor is arranged on the X-axis angular displacement table and used for monitoring the deflection angles of the X-axis angular displacement table and the Y-axis angular displacement table in real time.
Preferably, the laser processing system for the inner wall of the small-caliber deep hole further comprises an auxiliary tool;
the auxiliary tool is of a hat-shaped structure and is provided with a groove and used for arranging a workpiece on the six-degree-of-freedom combined displacement table.
Preferably, the small-caliber deep hole inner wall laser processing system is suitable for workpieces with a through type variable-section multistage hole-shaped structure.
Compared with the prior art, the small-caliber deep hole inner wall laser processing system provided by the invention can adjust the reflection direction of laser through the laser deflection assembly, so that the laser is injected into a workpiece hole from different angles and the inner wall of the hole is processed, and can also drive the workpiece through the six-degree-of-freedom combined displacement table, so that the workpiece is close to or far away from the workpiece and can move or deflect the workpiece in multiple angles, so that the inner walls of different holes are processed by the laser, the laser processing capacity and the processing effect are greatly improved, the application range of the system is expanded, and the small-caliber deep hole inner wall laser processing system has a good application prospect.
Drawings
FIG. 1 is a schematic structural view of a laser processing system for the inner wall of a small-caliber deep hole according to the present invention;
FIG. 2 is a partially enlarged schematic view of a laser processing system for the inner wall of a small-caliber deep hole according to the present invention;
FIG. 3 is an enlarged partial view of the laser delivery assembly of the present invention;
FIGS. 4 and 5 are schematic views of the laser deflection assembly according to the present invention;
fig. 6 and 7 are schematic views of the structure of the mounting frame according to the present invention;
FIG. 8 is a sectional view of the mount B, the rolling bearing B and the swing lever B;
FIG. 9 is a schematic structural view of a mounting base B according to the present invention;
FIG. 10 is a schematic structural view of a swing lever B according to the present invention;
FIG. 11 is a schematic view of the movement principle of the laser deflection assembly according to the present invention;
FIG. 12 is a schematic view of a partial structure of a six-DOF combined displacement table according to the present invention;
fig. 13 and 14 are schematic structural views of the auxiliary tool according to the present invention;
fig. 15 is a schematic view of a workpiece structure according to the present invention.
Detailed Description
The present invention will now be described in further detail by way of the detailed description of preferred embodiments with reference to the accompanying drawings.
Fig. 1 is a schematic structural view of a laser processing system for the inner wall of a small-caliber deep hole according to the invention. As shown in fig. 1, the small-caliber deep-hole inner wall laser processing system includes an optical vibration isolation platform 100, a femtosecond laser 200, a laser modulation component, a laser incidence adjustment component, a laser deflection component 500, an auxiliary tool 600, a six-degree-of-freedom combined displacement table 700, and a base 800.
The femtosecond laser 200 and the laser modulation component are arranged on the optical vibration isolation platform 100. In the embodiment of the present invention, the optical isolation platform 100 is a standard component, and includes a base 101 and four legs 102. It should be noted that the structure of the optical vibration isolation platform 100 according to the present invention is not limited thereto, and the structure may be designed or adjusted according to the application requirements.
The femtosecond laser 200 is located on the submount 101, and the femtosecond laser is used to generate a laser beam.
The laser modulation assembly includes a mounting alignment jig 301, a shutter 302, a slide 303, a beam reducer 304, and an attenuator 305. In the embodiment of the present invention, the mounting adjustment frame 301 includes an upper top plate 3011, a lower bottom plate 3012, and a plurality of connecting rods 3013 located between the upper top plate and the lower bottom plate. The present invention does not limit the specific structure of the mounting and adjusting frame 301, and in practical applications, the mounting and adjusting frame can be designed accordingly as needed. The mount set 301 is located on the base 101, and the shutter 302, the slide 303, the beam reducer 304, and the attenuator 305 are mounted on the mount set 301 in this order. In the embodiment of the invention, a laser beam generated by the femtosecond laser sequentially passes through the shutter 302, the slide 303, the beam reducer 304 and the attenuator 305 to form modulated laser; wherein, the shutter 302 is used for controlling the on-off of the laser beam; the slide 303 is used for adjusting the polarization direction of the laser; the beam reducer 304 is used for adjusting the beam diameter of the laser beam; the attenuator 305 is used for stepless adjustment of the laser energy.
The laser guiding assembly is disposed on the base 800, and is used for adjusting a propagation direction of the modulated laser light, so that the modulated laser light enters the laser deflection assembly 500 along a set incident direction. FIG. 2 is a partially enlarged schematic view of a laser processing system for the inner wall of a small-caliber deep hole according to the present invention; fig. 3 is a partially enlarged schematic view of the laser introduction assembly according to the present invention. Referring to fig. 2 and 3 in combination, the laser introduction assembly includes a truss 401, a mounting table 402, a first mirror 403, a first angle sensor 404, and a lens barrel 405. The truss 401 is fixedly arranged on the base 800; in the embodiment of the invention, the truss 401 is a door-shaped structure and comprises a cross beam 4011 and two supporting legs 4012; two supporting legs 4012 are distributed at two ends of the cross beam 4011; one end of each supporting leg 4012 is fixedly connected with the cross beam 4011, and the other end of each supporting leg is fixedly arranged on the base 800. The mounting table 402 is arranged on a cross beam 4011 of the truss; a first mirror 403 and a first angle sensor 404 are provided on the mount 402; the cross beam 4011 is provided with a through hole O 1 One end of the lens barrel 405 is disposed in the through hole and fixedly connected to the cross beam 4011, and the other end extends to the base 800 and is provided with the laser deflection assembly 500.
The modulated laser light formed by the laser modulation assembly is emitted to the first reflection mirror 403, reflected by the first reflection mirror 403, enters the lens barrel 405, and is emitted to the laser deflection assembly 500 along the central axis of the lens barrel. The first angle sensor 404 is used to monitor the deflection angle of the first mirror 403 in real time. In the present invention, the set incident direction of the modulated laser entering the laser deflection assembly is the direction of the modulated laser entering the laser deflection assembly 500 along the central axis of the lens barrel.
The laser deflection assembly 500 is fixedly connected to the lens barrel 405, and the laser deflection assembly 500 adjusts the propagation direction of modulated laser incident along a set direction, so that the modulated laser is incident into the workpiece 900 along different directions to process the inner wall of the hole of the workpiece. Fig. 4 and 5 are schematic structural views of a laser deflection assembly according to the present invention. Referring to fig. 4 and 5, the laser deflection assembly 500 includes a mounting frame 501, a flange 502, a driven shaft 504, and a second mirror 505. In the embodiment of the present invention, the mounting frame 501 has a groove structure, and the notch is arranged downward; the mount 501 includes a top plate 5011, a first side plate 5012, and a second side plate 5013, as shown in fig. 6 and 7. The top plate 5011 is provided with a through hole O 2 Through hole O 2 A flange plate 502 is arranged; the flange 502 is fixedly arranged on the top plate 5011 and fixedly connected with the lens barrel 405, the lens barrel 405 is communicated with the groove of the mounting frame 501 through the flange 502 to realize the connection between the laser deflection assembly 500 and the laser guide-in assembly, so that modulated laser in the lens barrel 405 passes through the flange 502 and the through hole O of the top plate 5011 2 And enters the groove of the mounting frame.
The first side or end of each member is adjacent the first side plate 5012 of the mount and the second side or end is adjacent the second side plate 5013 of the mount. The driven shaft 504 horizontally passes through the first and second side plates of the mounting bracket, and the first end of the driven shaft protrudes out of the first side plate 5012 and the second end protrudes out of the second side plate 5013.
The second reflecting mirror 505 is positioned in the groove of the mounting rack, is fixedly arranged on the driven shaft 504, and can rotate along with the driven shaft 504 to realize angle adjustment; the modulated laser entering the groove is reflected by the second reflecting mirror 505 to reach the surface of the hole wall of the workpiece for processing.
With reference to fig. 4 and 5, the laser deflection assembly 500 further includes a servo motor 506, a reduction gear pair AA507, a reduction gear pair AB508, a mounting seat a509, a rolling bearing a510, a swing lever a511, a transmission gear pair BA512, a transmission gear pair BB513, a transmission gear pair BC514, a transmission gear pair BD515, a mounting seat B516, a rolling bearing B517, a swing lever B518, and a driving shaft 503, a connecting rod 519, a laser head 520, and a second angle sensor 521, which are located on a first side of the mounting frame.
In the embodiment of the present invention, the driving shaft 503 horizontally passes through the first side plate and the second side plate of the mounting bracket, and a first end of the driving shaft 503 protrudes out of the first side plate 5012 and a second end thereof protrudes out of the second side plate 5013. On the first side of the mounting rack, a reduction gear pair AB508 is fixedly disposed at a first end of the driving shaft 503, and the servo motor 506 is fixedly disposed on the first side plate 5012; the servo motor 506 is connected with the reduction gear pair AA507 through an output shaft of the servo motor to control the rotation of the reduction gear pair AA507, the reduction gear pair AA507 is meshed with the reduction gear pair AB508, the servo motor 506 is started, the output shaft of the servo motor drives the reduction gear pair AA507 to rotate, the reduction gear pair AA507 rotates to drive the reduction gear pair AB508, and the driving shaft 503 rotates along with the reduction gear pair AB 508. On the second side of the mounting rack, a transmission gear pair BA512 and a transmission gear pair BB513 are fixedly disposed at the second end of the driving shaft 503, and the driving shaft 503 rotates to drive the transmission gear pair BA512 and the transmission gear pair BB 513.
Fig. 8 is a sectional view of the mount B, the rolling bearing B, and the swing lever B to illustrate the relative positional relationship of their mounting states. On the second side of the mounting bracket, the mounting seat B516 is installed and arranged on the second side plate 5013, the second end of the driven shaft 504 extends out of the second side plate 5013 and passes through the mounting seat B516, the swinging rod B518 is arranged on the mounting seat B516 through the rolling bearing B517, and the specific steps are as follows:
fig. 9 is a schematic structural diagram of a mounting seat B according to the present invention. As shown in figure 9 of the drawings,the mount B516 includes a base plate 5161 and a journal 5162, the journal being disposed perpendicular to the base plate on one side of the base plate; the bottom plate 5161 is provided with a fixing hole O 4 The mounting seat B516 passes through a fixing hole O 4 Is fixedly arranged on the second side plate 5013; the mounting seat B516 is provided with a through hole O along the shaft neck 3 The driven shaft 504 passes through the through hole O 3 Through the mount B516.
The rolling bearing B517 comprises an inner ring and an outer ring (not shown); the rolling bearing B517 is sleeved and fixed on a journal 5162 of the mounting seat B through an inner ring, and the outer ring is provided with the swing rod B518 and rotates with the swing rod B518.
Fig. 10 is a schematic structural view of a swing lever B according to the present invention. As shown in fig. 10, a convex circular truncated cone 5181 is provided at one end of the swing lever B518, and a mounting hole O is provided along the circular truncated cone 5 The oscillating rod B518 is fixedly installed on the outer ring of the rolling bearing B517 in an interference connection mode and passes through an installation hole O 5 A transmission gear pair BC514 is fixedly arranged; the other end of the swinging rod B518 is provided with a mounting hole O 6 One end of the connecting rod 519 is disposed at the mounting hole O 6 And is fixedly connected with the swinging rod B518.
On the first side of the mounting rack, the mounting seat a509 is fixedly arranged on the first side plate 5012, the first end of the driven shaft 504 extends out of the first side plate 5012 and penetrates through the mounting seat a509, the swing rod a511 is arranged on the mounting seat a509 through the rolling bearing a510, and is symmetrically arranged with the second side of the mounting rack, and the specific connection mode can refer to the related contents of the mounting seat B516, the rolling bearing B517 and the swing rod B518, which are not repeated herein. The mount a509 and the mount B516 have the same structure, the rolling bearing a510 and the rolling bearing B517 have the same structure, and the swing lever a511 and the swing lever B518 have the same structure.
The second end of the driven shaft 504 is fixedly provided with a transmission gear pair BD515, the transmission gear pair BD515 is meshed with a transmission gear pair BB513, the transmission gear pair BB513 rotates to drive the transmission gear pair BD515 to rotate, the driven shaft 504 rotates along with the transmission gear pair BD515, a second reflecting mirror 505 arranged on the driven shaft 504 rotates synchronously, so that the angle of the second reflecting mirror is adjusted, the second reflecting mirror 505 reflects modulated laser incident in a set direction, and the reflection direction of the modulated laser is changed accordingly.
In the embodiment of the present invention, the laser head 520 and the second angle sensor 521 are disposed on the connecting rod 519; one end of the connecting rod 519 is fixedly connected with the swing lever a511, and the other end is fixedly connected with the swing lever B518. The swing lever B passes through the mounting hole O 5 The transmission gear pair BC514 is fixedly arranged, the transmission gear pair BC514 is meshed with the transmission gear pair BA512, the transmission gear pair BC514, the swinging rod B518 and the connecting rod 519 are driven to rotate through the rotation of the transmission gear pair BA512, and meanwhile, the swinging rod a511 rotates along with the connecting rod 519. The laser head 520 provided on the connecting rod rotates in synchronization with the connecting rod 519, so that the modulated laser reflected by the second reflecting mirror 505 in the direction of reflection of the modulated laser by the laser head 520 can be projected to the inner wall of the hole of the workpiece to process the inner wall of the hole at different positions. The second angle sensor 521 is used for feeding back the deflection angle of the modulated laser emitted by the laser head 520 in real time.
Fig. 11 is a schematic diagram of the movement principle of the laser deflection assembly according to the present invention. According to the principle shown in fig. 11, in order to make the modulated laser reflected by the second reflecting mirror 505 to be accurately emitted to the workpiece through the laser head 520, the rotation angle of the laser head 520 should be 2 times the rotation angle of the second reflecting mirror 505, in other words, the swing angle of the connecting rod 519 should be 2 times the rotation angle of the driven shaft 504. In practical application, the radius of the transmission gear pair is adjusted to make the transmission ratio I between the transmission gear pair BA512 and the transmission gear pair BC514 1 Transmission ratio I with transmission gear pair BB513 and transmission gear pair BD515 2 Satisfies the following conditions: i is 1 :I 2 1: 2, the modulated laser reflected by the second mirror 505 can accurately pass through the laser head 520.
The six-degree-of-freedom combined displacement table 700 is arranged on the base 800, and the six-degree-of-freedom combined displacement table 700 is used for driving a workpiece, so that the workpiece can be close to or far away from the laser deflection assembly 500, and can be moved or deflected at multiple angles to realize position adjustment, and the inner walls of holes at different parts of the workpiece can be conveniently processed.
FIG. 12 is a schematic view of a partial structure of a six-DOF combined displacement table according to the present invention. As shown in fig. 12, the six-degree-of-freedom combined translation stage 700 includes an X-axis angular translation stage 701, a Y-axis angular translation stage 702, a Z-axis electric rotation stage 703, an X-axis electric translation stage 704, a Y-axis electric translation stage 705, and a Z-axis electric lift stage 706. The X-axis angular displacement table 701 and the Y-axis angular displacement table 702 are combined to form a first combined translation table, and the first combined translation table is arranged on the Z-axis electric rotating table 703; the X-axis electric displacement table 704 and the Y-axis electric displacement table 705 are combined to form a second combined translation table, and the second combined translation table is arranged on the Z-axis electric lifting table 706; and, the Z-axis electric rotating table 703 is installed on the second combination translation table. The six-degree-of-freedom combined displacement table 700 further comprises a third angle sensor 707; in the embodiment of the present invention, the third angle sensor 707 is installed on the X-axis angular displacement table 701, and is used to monitor the deflection angles of the X-axis angular displacement table 701 and the Y-axis angular displacement table 702 in real time.
In the embodiment of the present invention, the X-axis angular displacement stage 701 is configured to rotate around an X-axis, the Y-axis angular displacement stage 702 is configured to rotate around a Y-axis, the Z-axis electric rotating stage 703 is configured to rotate around a Z-axis, the X-axis electric displacement stage 704 is configured to move along the X-axis, the Y-axis electric displacement stage 705 is configured to move along the Y-axis, and the Z-axis electric lifting stage 706 is configured to move along the Z-axis, so that the six-degree-of-freedom combined displacement stage can carry the workpiece 900 to approach or depart from the laser deflection assembly 500, perform multi-angle movement or deflection to realize position adjustment, and complete processing on the inner wall of the hole at different positions of the workpiece.
In the invention, the laser processing system for the inner wall of the small-caliber deep hole further comprises an auxiliary tool 600, and the auxiliary tool 600 is used for connecting and fixing the workpiece 900 and the six-degree-of-freedom combined displacement table 700. Fig. 13 and 14 are schematic structural views of the auxiliary tool according to the present invention. Referring to fig. 13 and 14, the auxiliary tool 600 is a top hat structure having a groove. Referring to fig. 2, the notch of the auxiliary tool 600 is upward, the groove bottom is fixedly disposed on the six-degree-of-freedom combined displacement table 700, and the workpiece is disposed in the groove of the auxiliary tool 600. The laser processing system for the inner wall of the small-caliber deep hole is suitable for a workpiece 900 with a through type variable-section multistage hole-shaped structure, as shown in 15. Fig. 15 is a schematic view of a workpiece structure according to the present invention.
While the present invention has been described in detail with reference to the preferred embodiments, it should be understood that the above description should not be taken as limiting the invention. Various modifications and alterations to this invention will become apparent to those skilled in the art upon reading the foregoing description. Accordingly, the scope of the invention should be determined from the following claims.

Claims (7)

1. A laser processing system for the inner wall of a small-caliber deep hole is characterized in that,
the device comprises an optical vibration isolation platform, a femtosecond laser, a laser modulation component, a laser incidence adjustment component, a laser deflection component, a six-degree-of-freedom combined displacement platform and a base;
the femtosecond laser is positioned on the optical vibration isolation platform and used for generating laser beams; the laser beam passes through the laser modulation assembly;
the laser modulation assembly is positioned on the optical vibration isolation platform and used for modulating the laser beam to form modulated laser; the modulated laser passes through the laser incidence adjusting component;
the laser incidence adjusting assembly is arranged on the base and used for adjusting the propagation direction of the modulated laser and enabling the modulated laser to enter the laser deflection assembly along the set incidence direction;
the laser deflection assembly is fixedly connected with the laser incidence adjusting assembly and is used for adjusting the reflection direction of the modulated laser, so that the modulated laser is incident into a workpiece along different directions and the inner wall of a hole of the workpiece is processed;
the six-degree-of-freedom combined displacement platform is arranged on the base and drives the workpiece to enable the workpiece to be close to or far away from the laser deflection assembly, and the workpiece can move or deflect at multiple angles to process the inner wall of the hole of the workpiece; wherein,
the laser incidence adjusting assembly comprises a lens barrel;
the laser deflection assembly comprises a mounting frame, a flange plate, a driven shaft and a second reflector;
the mounting frame is provided with a groove structure, and the groove opening is downwards arranged; the mounting rack comprises a top plate, a first side plate and a second side plate;
the flange plate is fixedly arranged on the top plate, is fixedly connected with the lens cone and is used for realizing the connection between the laser deflection assembly and the laser incidence adjusting assembly; the modulated laser emitted into the lens cone passes through the through holes of the flange plate and the top plate and enters the groove of the mounting frame;
the first side or the first end of each part is close to the first side plate, and the second side or the second end of each part is close to the second side plate; the driven shaft horizontally penetrates through the first side plate and the second side plate of the mounting frame, and a first end of the driven shaft extends out of the first side plate and a second end of the driven shaft extends out of the second side plate;
the second reflector is positioned in the groove of the mounting rack, is fixedly arranged on the driven shaft and rotates along with the driven shaft; the modulated laser entering the groove is reflected by the second reflecting mirror, and the surface of the hole wall of the workpiece is processed;
the laser deflection assembly also comprises a servo motor, a reduction gear pair AA, a reduction gear pair AB, a mounting seat A, a rolling bearing A and a swing rod A which are positioned on the first side of the mounting frame,
a transmission gear pair BA, a transmission gear pair BB, a transmission gear pair BC, a transmission gear pair BD, a mounting seat B, a rolling bearing B and a swing rod B which are positioned at the second side of the mounting rack,
the driving shaft, the connecting rod, the laser head and the second angle sensor; the driving shaft horizontally penetrates through the first side plate and the second side plate of the mounting frame, and the first end of the driving shaft extends out of the first side plate while the second end of the driving shaft extends out of the second side plate;
the servo motor is fixedly arranged on the first side plate and used for controlling the rotation of the reduction gear pair AA; the reduction gear pair AB is fixedly arranged at the first end of the driving shaft and is meshed with the reduction gear pair AA; the reduction gear pair AA rotates to drive the reduction gear pair AB, and the driving shaft rotates along with the reduction gear pair AB; the transmission gear pair BA and the transmission gear pair BB are fixedly arranged at the second end of the driving shaft, and the driving shaft rotates to drive the transmission gear pair BA and the transmission gear pair BB to rotate;
the mounting seat A is fixedly arranged on the first side plate and penetrates through the first end of the driven shaft; the swing rod A is arranged on the mounting seat A through a rolling bearing A, wherein the inner ring of the rolling bearing A is arranged on the shaft neck of the mounting seat A, and the outer ring of the rolling bearing A is provided with the swing rod A; the mounting seat B is fixedly arranged on the second side plate and penetrates through the second end of the driven shaft; the swing rod B is arranged on the mounting seat B through a rolling bearing B, wherein the inner ring of the rolling bearing B is arranged on the shaft neck of the mounting seat B, and the outer ring of the rolling bearing B is provided with the swing rod B; the first end of the connecting rod is fixedly arranged in the mounting hole of the swinging rod A, and the second end of the connecting rod is fixedly arranged in the mounting hole of the swinging rod B; the laser head and the second angle sensor are arranged on the connecting rod;
a transmission gear pair BD is arranged at the second end of the driven shaft and is meshed with a transmission gear pair BB, the transmission gear pair BB rotates to drive the transmission gear pair BD to rotate, the driven shaft rotates along with the transmission gear pair BD, and a second reflecting mirror arranged on the driven shaft synchronously rotates, so that the angle of the second reflecting mirror and the reflecting direction of the second reflecting mirror to modulated laser are changed;
the oscillating rod B is provided with a transmission gear pair BC, the transmission gear pair BC is meshed with a transmission gear pair BA, the transmission gear pair BA rotates to drive the transmission gear pair BC to rotate, the oscillating rod B rotates along with the transmission gear pair BC, the connecting rod and a laser head arranged on the connecting rod synchronously rotate, so that modulated laser reflected by the second reflector can be shot to the inner wall of the hole of the workpiece through the laser head to process the inner walls of the holes at different positions;
the second angle sensor is used for feeding back the deflection angle of the modulated laser emitted by the laser head in real time;
the transmission ratio I1 of the transmission gear pair BA and the transmission gear pair BC and the transmission ratio I2 of the transmission gear pair BB and the transmission gear pair BD satisfy that: i1: i2 ═ 1: 2.
2. the small-caliber deep-hole inner wall laser processing system of claim 1,
the laser modulation assembly comprises a mounting adjusting frame, and a shutter, a glass slide, a beam reducer and an attenuator which are arranged on the mounting adjusting frame; the mounting adjusting frame is arranged on the optical vibration isolation platform;
the laser beam generated by the femtosecond laser forms modulated laser through a shutter, a glass slide, a beam reducer and an attenuator; the shutter is used for controlling the on-off of the laser beam; the slide is used for adjusting the polarization direction of the laser; the beam reducer is used for adjusting the beam diameter of the laser beam; the attenuator is used for stepless adjustment of laser energy.
3. The small-caliber deep-hole inner wall laser processing system according to claim 1,
the laser incidence adjusting assembly comprises a truss, an installation platform arranged on the truss, a first reflector, a first angle sensor and a lens barrel, wherein the first reflector and the first angle sensor are arranged on the installation platform;
the truss is fixedly arranged on the base; the truss is of a door-shaped structure and comprises a cross beam and two support legs, the two support legs are respectively arranged at two ends of the cross beam, one end of each support leg is fixedly connected with the cross beam, and the other end of each support leg is fixedly arranged on the base; the mounting table is arranged on the cross beam; one end of the lens cone is arranged on the cross beam, and the other end of the lens cone extends to the base and is provided with the laser deflection assembly;
the modulated laser which is injected into the laser injection adjusting assembly is reflected by the first reflecting mirror, enters the lens barrel and is injected into the laser deflection assembly along the central axis of the lens barrel; the first angle sensor is used for monitoring the deflection angle of the first reflector in real time;
the set injection direction of the modulated laser entering the laser deflection assembly is the direction of injecting the modulated laser into the laser deflection assembly along the central axis of the lens barrel.
4. The small-caliber deep-hole inner wall laser processing system according to claim 1,
the mounting seat A and the mounting seat B comprise bottom plates and shaft necks which are arranged on one sides of the bottom plates and perpendicular to the bottom plates, the mounting seat A and the mounting seat B are provided with through holes which are formed along the shaft necks, and the driven shaft penetrates through the through holes; the bottom plate is provided with a fixing hole, the mounting seat A is fixedly mounted on the first side plate through the fixing hole, and the mounting seat B is fixedly mounted on the second side plate;
one end of each of the oscillating rod A and the oscillating rod B is provided with a convex circular truncated cone and a first mounting hole formed along the circular truncated cone, and the oscillating rod B is fixedly provided with a transmission gear pair BC through the first mounting hole and is fixedly arranged on the outer ring of the rolling bearing B through interference connection; the swinging rod A is fixedly arranged on the outer ring of the rolling bearing A through interference connection; the other ends of the swing rod A and the swing rod B are provided with a second mounting hole, the swing rod A fixes one end of the connecting rod through the second mounting hole, and the swing rod B fixes the other end of the connecting rod through the second mounting hole.
5. The small-caliber deep-hole inner wall laser processing system of claim 1,
the six-degree-of-freedom combined displacement platform comprises an X-axis angular displacement platform, a Y-axis angular displacement platform, a Z-axis electric rotating platform, an X-axis electric displacement platform, a Y-axis electric displacement platform, a Z-axis electric lifting platform and a third angle sensor; the X-axis angular displacement table and the Y-axis angular displacement table are combined to form a first combined translation table, and the first combined translation table is arranged on the Z-axis electric rotating table; the X-axis electric displacement table and the Y-axis electric displacement table are combined to form a second combined translation table, and the second combined translation table is arranged on the Z-axis electric lifting table; the Z-axis electric rotating table is arranged on the second combined translation table;
the six-degree-of-freedom combined displacement platform comprises an X-axis angular displacement platform, a Y-axis angular displacement platform, a Z-axis electric rotating platform, an X-axis electric displacement platform, a Y-axis electric lifting platform and a Z-axis electric lifting platform, wherein the X-axis angular displacement platform is used for rotating around an X axis, the Y-axis angular displacement platform is used for rotating around a Y axis, the Z-axis electric rotating platform is used for rotating around a Z axis, the X-axis electric displacement platform is used for moving along the X axis, the Y-axis electric displacement platform is used for moving along the Y axis, and the Z-axis electric lifting platform is used for moving along the Z axis, so that workpieces arranged on the six-degree-of-freedom combined displacement platform move or rotate in different directions;
the third angle sensor is arranged on the X-axis angular displacement table and used for monitoring the deflection angles of the X-axis angular displacement table and the Y-axis angular displacement table in real time.
6. The small-caliber deep-hole inner wall laser processing system of claim 1, further comprising an auxiliary tool;
the auxiliary tool is of a hat-shaped structure and is provided with a groove and used for arranging a workpiece on the six-degree-of-freedom combined displacement table.
7. The small-caliber deep-hole inner wall laser processing system according to claim 1, wherein the small-caliber deep-hole inner wall laser processing system is suitable for a workpiece with a through-type variable-section multistage hole-shaped structure.
CN202110641768.7A 2021-06-09 2021-06-09 Small-caliber deep hole inner wall laser processing system Active CN113458588B (en)

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