CN113458588B - A small diameter deep hole inner wall laser processing system - Google Patents

Abstract

The invention discloses a small-caliber deep hole inner wall laser processing system which comprises an optical vibration isolation platform, a femtosecond laser, a laser modulation assembly, a laser incidence adjustment assembly, a laser deflection assembly, an auxiliary tool, a six-degree-of-freedom combined displacement platform and a base. According to the small-caliber deep hole inner wall laser processing system, the reflection direction of laser is adjusted through the laser deflection assembly, so that the laser is injected into a workpiece hole from different angles and the inner wall of the hole is processed, the workpiece can be driven by the six-degree-of-freedom combined displacement table to be close to or far away from the workpiece, and the workpiece can be moved or deflected in multiple angles, so that the inner walls of different holes are processed by the laser, the laser processing capacity and the processing effect are greatly improved, the use range of the system is expanded, and the small-caliber deep hole inner wall laser processing system has a good application prospect.

Description

A small diameter deep hole inner wall laser processing system

technical field

The invention belongs to the field of precision special processing, in particular to a laser processing system for the inner wall of a small-diameter deep hole.

Background technique

Laser processing has many applications in the inner wall treatment of tubular parts, such as decontamination cleaning, pattern and microstructure etching, and processing. Patent No. 201611075111 discloses a laser decontamination system for cleaning the inner wall of a pipeline. The system moves along the inside of the pipeline through a driving device. The device has a relatively simple structure and a large volume. The patent No. CN201510195584 discloses a laser processing head for the inner wall of a pipe. The laser head can generate a ring-shaped focused line beam with adjustable focal length, and the inner wall processing of the tubular structure can be completed without the rotation of the pipe or the processing head. Fixed and not adjustable, the volume is also large. Patent No. 201510041886 discloses a laser etching processing device for the inner wall of an internal combustion engine cylinder. The device is used for laser processing of the inner wall of a pipe-shaped structure with a small aperture, but the angle of the laser head cannot be adjusted and is not suitable for inclined plane corners. Processing of other characteristic structures.

Through the analysis of the above-mentioned published patents, it can be known that the size of the laser head and the moving device used in the laser processing device for the inner wall of the tubular part is relatively large, and the laser head is generally fixed, the output angle of the laser beam cannot be changed, and it can only be used for large Machining of pipe parts with no complex internal slope and corner and other structural features in the caliber and cavity. There is currently no suitable laser processing solution for laser processing of the inner wall of cylindrical structural parts with complex curved surfaces, small-diameter deep holes, and inclined surfaces and corners in the cavity.

SUMMARY OF THE INVENTION

In order to realize laser processing of the inner wall of cylindrical structural parts with complex curved surface, small-diameter deep hole, and inclined surface and corner features in the cavity, the present invention provides a small-diameter deep hole inner wall laser processing system.

The small-diameter deep hole inner wall laser processing system provided by the present invention comprises an optical vibration isolation platform, a femtosecond laser, a laser modulation component, a laser incident adjustment component, a laser deflection component, a six-degree-of-freedom combined displacement stage and a base;

The femtosecond laser is located on an optical vibration isolation platform for generating a laser beam; the laser beam passes through the laser modulation component;

The laser modulation component is located on the optical vibration isolation platform, and is used to modulate the laser beam to form a modulated laser; the modulated laser passes through the laser incident adjustment component;

The laser incident adjustment component is arranged on the base, and is used to adjust the propagation direction of the modulated laser light, so that the modulated laser light enters the laser deflection component along the set incident direction;

The laser deflecting component is fixedly connected with the laser incident adjustment component, and is used to adjust the reflection direction of the modulated laser light, so that the modulated laser light is injected into the workpiece in different directions, and the inner wall of the hole of the workpiece is processed;

The six-degree-of-freedom combined displacement table is arranged on the base, and the six-degree-of-freedom combined displacement table drives the workpiece, so that the workpiece is close to or away from the laser deflection assembly, and can move or deflect at multiple angles to process the inner wall of the hole of the workpiece deal with.

Preferably, the laser modulation assembly includes an installation and adjustment frame, and a shutter, a glass slide, a beam reducer and an attenuator arranged on the installation and adjustment frame; the installation and adjustment frame is arranged on the optical vibration isolation platform;

The laser beam generated by the femtosecond laser will pass through a shutter, a glass slide, a beam reducer and an attenuator to form a modulated laser; wherein the shutter is used to control the on-off of the laser beam; the glass slide is used to adjust the polarization of the laser direction; the beam reducer is used to adjust the beam diameter of the laser beam; the attenuator is used to steplessly adjust the laser energy.

Preferably, the laser introduction assembly includes a truss, an installation platform arranged on the truss, a first reflector and a first angle sensor arranged on the installation platform, and a lens barrel;

The truss is fixedly arranged on the base; the truss is a portal structure, including a beam and two legs, the two legs are respectively arranged at both ends of the beam, and one end of each leg is fixedly connected to the beam, and the other leg is fixedly connected to the beam. One end is fixedly arranged on the base; the mounting platform is arranged on the beam; one end of the lens barrel is arranged on the beam, and the other end extends toward the base and is provided with the laser deflection component;

The modulated laser injected into the laser introduction assembly is reflected by the first reflecting mirror, enters the lens barrel, and enters the laser deflection assembly along the central axis of the lens barrel; the first angle sensor is used to monitor the deflection angle of the first reflecting mirror in real time;

The set incident direction of the modulated laser entering the laser deflecting assembly is the direction of entering the laser deflecting assembly along the central axis of the lens barrel.

Preferably, the laser deflection assembly includes a mounting frame, a flange, a driven shaft and a second mirror;

Wherein, the mounting frame has a groove structure, and the notch is arranged downward; the mounting frame includes a top plate, a first side plate and a second side plate;

The flange plate is fixedly arranged on the top plate and is fixedly connected with the lens barrel, which is used to realize the connection between the laser deflecting component and the laser introduction component; the modulated laser entering the lens barrel will pass through the flange plate and the through hole of the top plate, into the groove of the mounting frame;

The first side or first end of each component is close to the first side plate, and the second side or second end is close to the second side plate;

The driven shaft horizontally passes through the first side plate and the second side plate of the mounting frame, and the first end of the driven shaft extends out of the first side plate, and the second end extends out of the second side plate;

The second reflecting mirror is located in the groove of the mounting frame, and is fixedly arranged on the driven shaft and rotates with the driven shaft; the modulated laser entering the groove is reflected by the second reflecting mirror and will reach the hole wall of the workpiece Surface is processed.

Preferably, the laser deflection assembly further comprises a servo motor, a reduction gear pair AA, a reduction gear pair AB, a mounting seat A, a rolling bearing A, and a swing rod A located on the first side of the mounting frame,

The transmission gear pair BA, the transmission gear pair BB, the transmission gear pair BC, the transmission gear pair BD, the mounting seat B, the rolling bearing B, the swing rod B located on the second side of the mounting frame,

and a driving shaft, a connecting rod, a laser head and a second angle sensor; wherein, the driving shaft horizontally passes through the first side plate and the second side plate of the mounting frame, and the first end of the driving shaft extends Out of the first side plate, the second end extends out of the second side plate;

The servo motor is fixedly arranged on the first side plate and is used to control the rotation of the reduction gear pair AA; the reduction gear pair AB is fixedly arranged on the first end of the driving shaft and meshes with the reduction gear pair AA; the reduction gear pair AA The rotation of AA drives the reduction gear pair AB, and the driving shaft rotates with the reduction gear pair AB; the transmission gear pair BA and the transmission gear pair BB are fixedly arranged on the second end of the driving shaft, and the rotation of the driving shaft drives the transmission gear pair BA and the transmission gear pair BB to rotate ;

The mounting seat A is fixedly arranged on the first side plate and passes through the first end of the driven shaft; the swing rod A is arranged on the mounting seat A through the rolling bearing A, wherein the inner ring of the rolling bearing A is installed The pivot rod A is installed on the journal of the mounting seat A and its outer ring;

The mounting seat B is fixedly arranged on the second side plate and passes through the second end of the driven shaft; the swing rod B is arranged on the mounting seat B through the rolling bearing B, wherein the inner ring of the rolling bearing B is installed The swing rod B is installed on the journal arranged on the mounting seat B and on the outer ring thereof;

The first end of the connecting rod is fixedly arranged in the installation hole of the swing rod A, and the second end is fixedly arranged in the installation hole of the swing rod B; the laser head and the second angle sensor are arranged on the connecting rod;

The second end of the driven shaft is provided with a transmission gear pair BD, and the transmission gear pair BD meshes with the transmission gear pair BB, the transmission gear pair BB rotates and drives the transmission gear pair BD to rotate, and the driven shaft follows the transmission gear pair BD. The second reflecting mirror arranged on the driven shaft rotates synchronously, thereby changing the angle of the second reflecting mirror and the reflection direction of the modulated laser light by the second reflecting mirror;

The swing rod B is provided with a transmission gear pair BC, and the transmission gear pair BC meshes with the transmission gear pair BA. The rotation of the transmission gear pair BA drives the transmission gear pair BC to rotate, and the swing rod B rotates with the transmission gear pair BC. The connecting rod and the laser head arranged on the connecting rod rotate synchronously, so that the modulated laser reflected by the second mirror can be directed to the inner wall of the hole of the workpiece through the laser head, and the inner wall of the hole in different positions can be processed;

The second angle sensor is used for real-time feedback of the deflection angle of the modulated laser emitted by the laser head.

Preferably, the mounting seat A or the mounting seat B comprises a bottom plate and a journal arranged on one side of the bottom plate and perpendicular to the bottom plate, the mounting seat A or the mounting seat B has a through hole opened along the journal, and the driven The shaft passes through the through hole; the bottom plate is provided with a fixing hole, through which the mounting seat A is mounted and fixed on the first side plate, and the mounting seat B is mounted and fixed on the second side plate;

One end of the swinging rod A or the swinging rod B is provided with a protruding round table and has a mounting hole opened along the round table. The outer ring of the rolling bearing B; the swing rod A is installed and fixed on the outer ring of the rolling bearing A through an interference connection; the other end of the swing rod A or the swing rod B is also provided with a mounting hole, through which the swing rod A is installed One end of the connecting rod is fixed through the hole, and the other two ends of the connecting rod are fixed by the swing rod B through the mounting hole.

Preferably, the transmission ratio I 1 of the transmission gear pair BA and the transmission gear pair BC and the transmission ratio I ₂ of the transmission gear pair BB and the transmission gear pair BD satisfy: I ₁ :I ₂ =1: ₂ .

Preferably, the six-degree-of-freedom combination stage comprises an X-axis angular stage, a Y-axis angular stage and a Z-axis electric rotary stage, an X-axis electric stage, a Y-axis electric stage and a Z-axis electric lift, and the first Three-angle sensor; wherein, the X-axis angular displacement stage and the Y-axis angular displacement stage are combined to form the first combined translation stage, and the first combined translation stage is installed on the Z-axis electric rotary table; the X-axis electric displacement stage and the Y-axis electric The displacement platform is combined to form a second combined translation platform, and the second combined translation platform is installed on the Z-axis electric lifting platform; the Z-axis electric rotating platform is installed on the second combined translation platform;

Among them, the X-axis angular displacement stage is used to rotate around the X-axis, the Y-axis angular displacement stage is used to rotate around the Y-axis, the Z-axis electric rotary table is used to rotate around the Z-axis, and the X-axis electric displacement stage is used to move along the X-axis, The Y-axis electric displacement table is used to move along the Y-axis, and the Z-axis electric lift table is used to move along the Z-axis, so that the workpiece arranged on the six-degree-of-freedom combined displacement table can move or rotate in different directions;

The third angle sensor is installed on the X-axis angular displacement stage, and is used for real-time monitoring of the deflection angles of the X-axis angular displacement stage and the Y-axis angular displacement stage.

Preferably, the small-diameter deep hole inner wall laser processing system further comprises auxiliary tooling;

The auxiliary tooling is a hat-shaped structure with a groove, and is used for setting the workpiece on the six-degree-of-freedom combined displacement table.

Preferably, the small-diameter deep hole inner wall laser processing system is suitable for workpieces having a through-type variable cross-section multi-level hole structure.

Compared with the prior art, the laser processing system for the inner wall of a small-diameter deep hole provided by the present invention can adjust the reflection direction of the laser light through the laser deflection component, so that the laser can be injected into the workpiece hole from different angles, and the inner wall of the hole can be processed. The workpiece is driven by the six-degree-of-freedom combined displacement stage, so that the workpiece is close to or away from the workpiece, and the workpiece can be moved or deflected at multiple angles, so that the inner walls of different holes can be processed by laser, which greatly improves the laser processing capacity and efficiency. The processing effect expands the use range of the system and has a good application prospect.

Description of drawings

1 is a schematic structural diagram of a laser processing system for the inner wall of a small-diameter deep hole according to the present invention;

2 is a partial enlarged schematic view of the laser processing system for the inner wall of a small-diameter deep hole according to the present invention;

FIG. 3 is a partially enlarged schematic view of the laser introduction assembly according to the present invention;

4 and 5 are schematic diagrams of the structure of the laser deflection assembly according to the present invention;

6 and 7 are schematic diagrams of the structure of the mounting frame according to the present invention;

Figure 8 is a cross-sectional view of the mounting seat B, the rolling bearing B and the swing rod B;

9 is a schematic structural diagram of the mounting seat B according to the present invention;

10 is a schematic structural diagram of the swing rod B according to the present invention;

FIG. 11 is a schematic diagram of the motion principle of the laser deflection assembly according to the present invention;

12 is a schematic diagram of the partial structure of the six-degree-of-freedom combined displacement stage according to the present invention;

13 and 14 are schematic diagrams of the auxiliary tooling structure according to the present invention;

FIG. 15 is a schematic diagram of the structure of the workpiece according to the present invention.

Detailed ways

Hereinafter, the present invention will be further introduced by describing the preferred specific embodiments in detail with reference to the accompanying drawings.

FIG. 1 is a schematic structural diagram of the laser processing system for the inner wall of a small-diameter deep hole according to the present invention. As shown in Figure 1, the small-diameter deep hole inner wall laser processing system includes an optical vibration isolation platform 100, a femtosecond laser 200, a laser modulation component, a laser incident adjustment component, a laser deflection component 500, an auxiliary tool 600, and six degrees of freedom. Combine stage 700 and base 800.

The femtosecond laser 200 and the laser modulation component are arranged on the optical vibration isolation platform 100 . In the embodiment of the present invention, the optical vibration isolation platform 100 adopts standard parts, including a base 101 and four legs 102 . It should be noted that the structure of the optical vibration isolation platform 100 of the present invention is not limited to this, and its structure can be designed or adjusted according to application requirements.

The femtosecond laser 200 is located on the base 101, and the femtosecond laser is used to generate a laser beam.

The laser modulation assembly includes a mounting frame 301 , a shutter 302 , a glass slide 303 , a beam reducer 304 and an attenuator 305 . In the embodiment of the present invention, the installation and adjustment frame 301 includes an upper top plate 3011, a lower bottom plate 3012, and a plurality of connecting rods 3013 between the upper top plate and the lower bottom plate. The present invention does not limit the specific structure of the installation and adjustment frame 301, and can be designed accordingly in practical applications, which is hereby described. The installation and adjustment frame 301 is located on the base 101 , and the shutter 302 , the glass slide 303 , the beam reducer 304 and the attenuator 305 are sequentially installed on the installation and adjustment frame 301 . In the embodiment of the present invention, the laser beam generated by the femtosecond laser passes through the shutter 302, the glass slide 303, the beam reducer 304 and the attenuator 305 in sequence to form a modulated laser; wherein the shutter 302 is used to control the laser beam The glass slide 303 is used to adjust the polarization direction of the laser light; the beam reducer 304 is used to adjust the beam diameter of the laser beam; the attenuator 305 is used to steplessly adjust the laser energy.

The laser introduction component is disposed on the base 800 and is used to adjust the propagation direction of the modulated laser light so that the modulated laser light enters the laser deflection component 500 along the set incident direction. FIG. 2 is a partial enlarged schematic diagram of the laser processing system for the inner wall of a small-diameter deep hole according to the present invention; FIG. 3 is a partial enlarged schematic diagram of the laser introduction assembly according to the present invention. Referring to FIG. 2 and FIG. 3 , the laser introduction assembly includes a truss 401 , a mounting table 402 , a first reflection mirror 403 , a first angle sensor 404 and a lens barrel 405 . The truss 401 is fixedly arranged on the base 800; in the embodiment of the present invention, the truss 401 is a portal structure, including a beam 4011 and two legs 4012; the two legs 4012 are distributed at both ends of the beam 4011; One end of each leg 4012 is fixedly connected to the beam 4011 , and the other end is fixedly arranged on the base 800 . The mounting table 402 is arranged on the beam 4011 of the truss; the first reflecting mirror 403 and the first angle sensor 404 are arranged on the mounting table 402; the beam 4011 is provided with a through hole O ₁ , and one end of the lens barrel 405 It is disposed in the through hole and is fixedly connected with the beam 4011 , and the other end extends toward the base 800 and is provided with the laser deflecting assembly 500 .

The modulated laser light formed by the laser modulation component is directed to the first reflecting mirror 403 , is reflected by the first reflecting mirror 403 and enters the lens barrel 405 , and then enters the laser deflecting component 500 along the central axis of the lens barrel. The first angle sensor 404 is used to monitor the deflection angle of the first mirror 403 in real time. In the present invention, the set incident direction of the modulated laser entering the laser deflection assembly is the direction of entering the laser deflection assembly 500 along the central axis of the lens barrel.

The laser deflection assembly 500 is fixedly connected to the lens barrel 405, and the laser deflection assembly 500 adjusts the propagation direction of the modulated laser light incident in the set direction, so that the modulated laser light enters the workpiece 900 in different directions, and the The inner wall of the hole of the workpiece is processed. FIG. 4 and FIG. 5 are schematic diagrams of the structure of the laser deflection assembly according to the present invention. Referring to FIG. 4 and FIG. 5 , the laser deflection assembly 500 includes a mounting frame 501 , a flange 502 , a driven shaft 504 and a second mirror 505 . In the embodiment of the present invention, the mounting bracket 501 has a groove structure, and the notch is arranged downward; the mounting bracket 501 includes a top plate 5011 , a first side plate 5012 and a second side plate 5013 , as shown in FIGS. 6 and 7 . shown. The top plate 5011 is provided with a through hole O ₂ , and a flange plate 502 is arranged at the through hole O ₂ ; the flange plate 502 is fixedly arranged on the top plate 5011 and is fixedly connected with the lens barrel 405 through the flange plate 502 The lens barrel 405 is communicated with the groove of the mounting frame 501 to realize the connection between the laser deflecting assembly 500 and the laser introduction assembly, so that the modulated laser in the lens barrel 405 passes through the flange 502 and the through hole O ₂ of the top plate 5011, into the groove of the mounting bracket.

The first side or first end of each component is close to the first side plate 5012 of the mounting frame, and the second side or second end is close to the second side plate 5013 of the mounting frame. The driven shaft 504 horizontally passes through the first side plate and the second side plate of the mounting frame, and the first end of the driven shaft protrudes from the first side plate 5012, and the second end protrudes from the second side plate 5012. Side plate 5013.

The second reflecting mirror 505 is located inside the groove of the mounting frame, and is fixedly arranged on the driven shaft 504 , and can rotate with the driven shaft 504 to realize angle adjustment; the modulated laser entering the groove is reflected by the second reflecting mirror 505 The surface of the hole wall reaching the workpiece is processed.

Referring to FIG. 4 and FIG. 5 , the laser deflection assembly 500 further includes a servo motor 506 , a reduction gear pair AA507 , a reduction gear pair AB508 , a mounting seat A509 , a rolling bearing A510 , and a swing rod A511 located on the first side of the mounting frame. The transmission gear pair BA512, the transmission gear pair BB513, the transmission gear pair BC514, the transmission gear pair BD515, the mounting seat B516, the rolling bearing B517, the swing rod B518, and the driving shaft 503, the connecting rod 519, the laser head 520 on the second side of the mounting frame and the second angle sensor 521.

In the embodiment of the present invention, the drive shaft 503 horizontally passes through the first side plate and the second side plate of the mounting frame, and the first end of the drive shaft 503 protrudes from the first side plate 5012, and the second The end protrudes from the second side plate 5013 . On the first side of the mounting frame, the reduction gear pair AB508 is fixedly arranged on the first end of the driving shaft 503, and the servo motor 506 is fixedly arranged on the first side plate 5012; the servo motor 506 is connected with the output shaft through its output shaft. The reduction gear pair AA507 is connected to control the rotation of the reduction gear pair AA507, and the reduction gear pair AA507 meshes with the reduction gear pair AB508 to start the servo motor 506. The output shaft of the servo motor drives the reduction gear pair AA507 to rotate, and the reduction gear pair AA507 rotates to drive the deceleration. Gear pair AB508, the drive shaft 503 rotates with the reduction gear pair AB508. On the second side of the mounting frame, the transmission gear pair BA512 and the transmission gear pair BB513 are fixedly arranged on the second end of the drive shaft 503, and the drive shaft 503 rotates to drive the transmission gear pair BA512 and the transmission gear pair BB513.

FIG. 8 is a cross-sectional view of the mounting seat B, the rolling bearing B and the swing rod B, which is used to illustrate the relative positional relationship in the mounted state. On the second side of the mounting frame, the mounting seat B516 is mounted on the second side plate 5013, and the second end of the driven shaft 504 protrudes from the second side plate 5013 and passes through the mounting seat B516, so The swing rod B518 is set on the mounting seat B516 through the rolling bearing B517, and the details are as follows:

FIG. 9 is a schematic structural diagram of the mounting seat B according to the present invention. As shown in FIG. 9 , the mounting seat B516 includes a bottom plate 5161 and a journal 5162, the journal is arranged on one side of the bottom plate and is perpendicular to the bottom plate; the bottom plate 5161 is provided with a fixing hole O ₄ , The mounting seat B516 is installed and fixed on the second side plate 5013 through the fixing hole _O4 ; the mounting seat B516 is provided with a through hole _O3 along the journal, and the driven shaft 504 passes through the through hole _O3 Mount B516.

The rolling bearing B517 includes an inner ring and an outer ring (not shown); the rolling bearing B517 is threaded through the inner ring and fixed on the journal 5162 of the mounting seat B, and the swing rod is mounted on the outer ring. B518, and rotates with the swing rod B518.

FIG. 10 is a schematic structural diagram of the swing rod B according to the present invention. As shown in FIG. 10 , one end of the swinging rod B518 is provided with a protruding circular table 5181 and a mounting hole O ₅ opened along the circular table. The swinging rod B518 is installed and fixed on the outside of the rolling bearing B517 by means of interference connection. The other end of the swing rod B518 is provided with a mounting hole O ₆ , and one end of the connecting rod 519 is arranged in the mounting hole O ₆ and is connected with the swinging rod _B518 . Rod B518 fixed connection.

On the first side of the mounting frame, the mounting seat A509 is fixed on the first side plate 5012, and the first end of the driven shaft 504 protrudes from the first side plate 5012 and passes through the mounting seat A509, so The swinging rod A511 is arranged on the mounting seat A509 through the rolling bearing A510, which is symmetrically arranged with the second side of the mounting frame. For the specific connection method, please refer to the above-mentioned related content of the mounting seat B516, rolling bearing B517 and swinging rod B518. Repeat. It should be noted that the mounting seat A509 has the same structure as the mounting seat B516, the rolling bearing A510 has the same structure as the rolling bearing B517, and the swing rod A511 has the same structure as the swing rod B518.

The second end of the driven shaft 504 is fixedly provided with a transmission gear pair BD515, and the transmission gear pair BD515 meshes with the transmission gear pair BB513. The transmission gear pair BB513 rotates to drive the transmission gear pair BD515 to rotate, and the driven shaft 504 follows the transmission. The gear pair BD515 rotates, and the second mirror 505 arranged on the driven shaft 504 rotates synchronously, so as to realize the adjustment of the angle of the second mirror. The second mirror 505 reflects the modulated laser light incident in the set direction, and modulates the laser beam. The direction of reflection changes accordingly.

In the embodiment of the present invention, the laser head 520 and the second angle sensor 521 are disposed on the connecting rod 519; one end of the connecting rod 519 is fixedly connected to the swing rod A511, and the other end is fixedly connected to the swing rod B518. The swing rod B is fixedly installed with the transmission gear pair _BC514 through the installation hole O5, and the transmission gear pair BC514 is meshed with the transmission gear pair BA512, and the transmission gear pair BC514, the swing rod B518 and the connecting rod are driven by the rotation of the transmission gear pair BA512. 519 rotates, and the swing rod A511 rotates with the link 519 at the same time. The laser head 520 arranged on the connecting rod rotates synchronously with the connecting rod 519, so that in the reflection direction of the modulated laser light, the modulated laser light reflected by the second mirror 505 of the laser head 520 can be directed to the inner wall of the hole of the workpiece through the laser head 520, and the opposite The inner wall of the hole at different positions is processed. The second angle sensor 521 is used to feed back the deflection angle of the modulated laser emitted by the laser head 520 in real time.

FIG. 11 is a schematic diagram of the movement principle of the laser deflection assembly according to the present invention. According to the principle shown in FIG. 11 , in order to enable the modulated laser reflected by the second mirror 505 to accurately pass through the laser head 520 to the workpiece, the rotation angle of the laser head 520 should be twice the rotation angle of the second mirror 505 , in other words In other words, the swing angle of the link 519 should be twice the rotation angle of the driven shaft 504 . In practical application, adjust the radius of the transmission gear pair so that the transmission ratio I ₁ of the transmission gear pair BA512 and the transmission gear pair BC514 and the transmission ratio I ₂ of the transmission gear pair BB513 and the transmission gear pair BD515 satisfy: I ₁ : I ₂ = 1:2, that is, the modulated laser reflected by the second mirror 505 can pass through the laser head 520 accurately.

The six-degree-of-freedom combined displacement stage 700 is disposed on the base 800, and the six-degree-of-freedom combined displacement stage 700 is used to drive the workpiece, so that the workpiece can be close to or away from the laser deflection assembly 500, and can be moved or deflected at multiple angles. The position adjustment is convenient for processing the inner wall of the hole in different parts of the workpiece.

FIG. 12 is a schematic diagram of the partial structure of the six-degree-of-freedom combined displacement stage according to the present invention. As shown in FIG. 12 , the six-degree-of-freedom combined translation stage 700 includes an X-axis angular translation stage 701, a Y-axis angular translation stage 702, a Z-axis electric rotation stage 703, an X-axis electric translation stage 704, and a Y-axis electric translation stage 705 and Z-axis electric lift table 706. The X-axis angular displacement stage 701 and the Y-axis angular displacement stage 702 are combined to form a first combined translation stage, and the first combined translation stage is installed on the Z-axis electric rotary table 703 ; the X-axis electric displacement stage 704 and the Y-axis electric displacement stage 705 Combining to form a second combined translation stage, the second combined translation stage is installed on the Z-axis electric lifting platform 706; and the Z-axis electric rotary table 703 is installed and arranged on the second combined translation stage. The six-degree-of-freedom combined displacement stage 700 further includes a third angle sensor 707; in the embodiment of the present invention, the third angle sensor 707 is installed on the X-axis angular displacement stage 701 to monitor the X-axis angular displacement stage 701 and the X-axis angular displacement stage 701 in real time. The deflection angle of the Y-axis angular displacement stage 702 .

In the embodiment of the present invention, the X-axis angular displacement stage 701 is used to rotate around the X-axis, the Y-axis angular displacement stage 702 is used to rotate around the Y-axis, the Z-axis electric rotary stage 703 is used to rotate around the Z-axis, and the X-axis electric displacement stage is used to rotate around the Z-axis. 704 is used to move along the X-axis, the Y-axis motorized stage 705 is used to move along the Y-axis, and the Z-axis motorized lift table 706 is used to move along the Z-axis, so that the six-DOF combination stage can carry the workpiece 900 The position adjustment is achieved by moving or deflecting at multiple angles near or far from the laser deflecting assembly 500, and completing the processing of the inner wall of the hole in different parts of the workpiece.

In the present invention, the small-diameter deep hole inner wall laser processing system further includes an auxiliary tool 600 , and the auxiliary tool 600 is used to connect and fix the workpiece 900 and the six-degree-of-freedom combined displacement stage 700 . 13 and 14 are schematic diagrams of the structure of the auxiliary tooling according to the present invention. Referring to FIG. 13 and FIG. 14 , the auxiliary tooling 600 is a hat-shaped structure with grooves. Referring to FIG. 2 , it can be seen that the notch of the auxiliary tool 600 is upward, the groove bottom is fixedly arranged on the six-degree-of-freedom combined displacement table 700 , and the workpiece is arranged in the groove of the auxiliary tool 600 . The small-diameter deep hole inner wall laser processing system according to the present invention is suitable for the workpiece 900 having a through-type variable cross-section multi-level hole structure, as shown in 15. FIG. 15 is a schematic diagram of the structure of the workpiece according to the present invention.

While the content of the present invention has been described in detail by way of the above preferred embodiments, it should be appreciated that the above description should not be construed as limiting the present invention. Various modifications and alternatives to the present invention will be apparent to those skilled in the art upon reading the foregoing. Accordingly, the scope of protection of the present invention should be defined by the appended claims.

Claims (7)

1. a small diameter deep hole inner wall laser processing system, is characterized in that, Including optical vibration isolation platform, femtosecond laser, laser modulation component, laser incident adjustment component, laser deflection component, 6-DOF combined stage and base; The femtosecond laser is located on an optical vibration isolation platform for generating a laser beam; the laser beam passes through the laser modulation component; The laser modulation component is located on the optical vibration isolation platform, and is used to modulate the laser beam to form a modulated laser; the modulated laser passes through the laser incident adjustment component; The laser incident adjustment component is arranged on the base, and is used to adjust the propagation direction of the modulated laser light, so that the modulated laser light enters the laser deflection component along the set incident direction; The laser deflecting component is fixedly connected with the laser incident adjustment component, and is used to adjust the reflection direction of the modulated laser light, so that the modulated laser light is injected into the workpiece in different directions, and the inner wall of the hole of the workpiece is processed; The six-degree-of-freedom combined displacement table is arranged on the base, and the six-degree-of-freedom combined displacement table drives the workpiece, so that the workpiece is close to or away from the laser deflection assembly, and can move or deflect at multiple angles to process the inner wall of the hole of the workpiece processing; wherein, The laser incident adjustment component includes a lens barrel; The laser deflection assembly includes a mounting frame, a flange, a driven shaft and a second mirror; Wherein, the mounting frame has a groove structure, and the notch is arranged downward; the mounting frame includes a top plate, a first side plate and a second side plate; The flange plate is fixedly arranged on the top plate and is fixedly connected with the lens barrel, so as to realize the connection between the laser deflection component and the laser incident adjustment component; the modulated laser entering the lens barrel will pass through the lens barrel. The through holes of the flange plate and the top plate enter the groove of the mounting frame; The first side or first end of each component is close to the first side plate, and the second side or second end is close to the second side plate; the driven shaft horizontally passes through the first and second side plates of the mounting frame , and the first end of the driven shaft protrudes from the first side plate, and the second end protrudes from the second side plate; The second reflecting mirror is located in the groove of the mounting frame, and is fixedly arranged on the driven shaft and rotates with the driven shaft; the modulated laser entering the groove is reflected by the second reflecting mirror and will reach the hole wall of the workpiece surface treatment; The laser deflection assembly also includes a servo motor, a reduction gear pair AA, a reduction gear pair AB, a mounting seat A, a rolling bearing A, and a swing rod A located on the first side of the mounting frame, The transmission gear pair BA, the transmission gear pair BB, the transmission gear pair BC, the transmission gear pair BD, the mounting seat B, the rolling bearing B, the swing rod B located on the second side of the mounting frame, and a driving shaft, a connecting rod, a laser head and a second angle sensor; wherein, the driving shaft horizontally passes through the first side plate and the second side plate of the mounting frame, and the first end of the driving shaft extends Out of the first side plate, the second end extends out of the second side plate; The servo motor is fixedly arranged on the first side plate and is used to control the rotation of the reduction gear pair AA; the reduction gear pair AB is fixedly arranged on the first end of the driving shaft and meshes with the reduction gear pair AA; the reduction gear pair AA The rotation of AA drives the reduction gear pair AB, and the driving shaft rotates with the reduction gear pair AB; the transmission gear pair BA and the transmission gear pair BB are fixedly arranged on the second end of the driving shaft, and the rotation of the driving shaft drives the transmission gear pair BA and the transmission gear pair BB to rotate ; The mounting seat A is fixedly arranged on the first side plate and passes through the first end of the driven shaft; the swing rod A is arranged on the mounting seat A through the rolling bearing A, wherein the inner ring of the rolling bearing A is installed The pivot rod A is installed on the journal of the mounting seat A and its outer ring; the mounting seat B is fixedly arranged on the second side plate and passes through the second end of the driven shaft; The swing rod B is arranged on the mounting seat B through the rolling bearing B, wherein the inner ring of the rolling bearing B is mounted on the journal of the mounting seat B, and the swing rod B is mounted on the outer ring; The first end of the connecting rod is fixedly arranged in the installation hole of the swing rod A, and the second end is fixedly arranged in the installation hole of the swing rod B; the laser head and the second angle sensor are arranged on the connecting rod; The second end of the driven shaft is provided with a transmission gear pair BD, and the transmission gear pair BD meshes with the transmission gear pair BB, the transmission gear pair BB rotates and drives the transmission gear pair BD to rotate, and the driven shaft follows the transmission gear pair BD. The second reflecting mirror arranged on the driven shaft rotates synchronously, thereby changing the angle of the second reflecting mirror and the reflection direction of the modulated laser light by the second reflecting mirror; The swing rod B is provided with a transmission gear pair BC, and the transmission gear pair BC meshes with the transmission gear pair BA. The rotation of the transmission gear pair BA drives the transmission gear pair BC to rotate, and the swing rod B rotates with the transmission gear pair BC. The connecting rod and the laser head arranged on the connecting rod rotate synchronously, so that the modulated laser reflected by the second mirror can be directed to the inner wall of the hole of the workpiece through the laser head, and the inner wall of the hole in different positions can be processed; The second angle sensor is used for real-time feedback of the deflection angle of the modulated laser emitted by the laser head; The transmission ratio I1 of the transmission gear pair BA and the transmission gear pair BC and the transmission ratio I2 of the transmission gear pair BB and the transmission gear pair BD satisfy: I1:I2=1:2. 2. The laser processing system for the inner wall of a small-diameter deep hole as claimed in claim 1, characterized in that, The laser modulation assembly includes an installation and adjustment frame, and a shutter, a glass slide, a beam reducer and an attenuator arranged on the installation and adjustment frame; the installation and adjustment frame is arranged on the optical vibration isolation platform; The laser beam generated by the femtosecond laser will pass through a shutter, a glass slide, a beam reducer and an attenuator to form a modulated laser; wherein the shutter is used to control the on-off of the laser beam; the glass slide is used to adjust the polarization of the laser direction; the beam reducer is used to adjust the beam diameter of the laser beam; the attenuator is used to steplessly adjust the laser energy. 3. The laser processing system for the inner wall of a small-diameter deep hole as claimed in claim 1, characterized in that, The laser incident adjustment component includes a truss, an installation platform arranged on the truss, a first reflector and a first angle sensor arranged on the installation platform, and a lens barrel; The truss is fixedly arranged on the base; the truss is a portal structure, including a beam and two legs, the two legs are respectively arranged at both ends of the beam, and one end of each leg is fixedly connected to the beam, and the other leg is fixedly connected to the beam. One end is fixedly arranged on the base; the mounting platform is arranged on the beam; one end of the lens barrel is arranged on the beam, and the other end extends toward the base and is provided with the laser deflection assembly; The modulated laser entering the laser incident adjustment component is reflected by the first mirror, enters the lens barrel, and enters the laser deflection component along the central axis of the lens barrel; the first angle sensor is used to monitor the deflection of the first reflector in real time angle; The set incident direction of the modulated laser entering the laser deflecting assembly is the direction of entering the laser deflecting assembly along the central axis of the lens barrel. 4. The laser processing system for the inner wall of a small-diameter deep hole as claimed in claim 1, characterized in that, The mounting seat A and the mounting seat B include a bottom plate and a journal arranged on one side of the bottom plate and perpendicular to the bottom plate, the mounting seat A and the mounting seat B have through holes opened along the journal, and the driven shaft passes through. the through hole; the bottom plate is provided with a fixing hole, through which the mounting seat A is mounted and fixed on the first side plate, and the mounting seat B is mounted and fixed on the second side plate; One end of the swing rod A and the swing rod B is provided with a protruding round table, and has a mounting hole 1 opened along the round table, the swing rod B is fixedly installed with a transmission gear pair BC through the installation hole 1, and is installed and fixed by an interference connection. On the outer ring of the rolling bearing B; the swing rod A is installed and fixed on the outer ring of the rolling bearing A through an interference connection; the other ends of the swing rod A and the swing rod B are provided with two mounting holes, and the swing rod A is installed by The second hole fixes one end of the connecting rod, and the swing rod B fixes the other end of the connecting rod through the mounting hole two. 5. The laser processing system for the inner wall of a small-diameter deep hole as claimed in claim 1, characterized in that, The six-degree-of-freedom combination stage includes an X-axis angular stage, a Y-axis angular stage and a Z-axis electric rotary stage, an X-axis electric stage, a Y-axis electric stage and a Z-axis electric lift, and a third angle sensor ; Among them, the X-axis angular displacement platform and the Y-axis angular displacement platform are combined to form the first combined translation platform, and the first combined translation platform is installed on the Z-axis electric rotary table; the X-axis electric displacement platform and the Y-axis electric displacement platform are combined , form a second combined translation platform, the second combined translation platform is installed on the Z-axis electric lifting platform; the Z-axis electric rotating platform is installed on the second combined translation platform; Among them, the X-axis angular displacement stage is used to rotate around the X-axis, the Y-axis angular displacement stage is used to rotate around the Y-axis, the Z-axis electric rotary table is used to rotate around the Z-axis, and the X-axis electric displacement stage is used to move along the X-axis, The Y-axis electric displacement table is used to move along the Y-axis, and the Z-axis electric lift table is used to move along the Z-axis, so that the workpiece arranged on the six-degree-of-freedom combined displacement table can move or rotate in different directions; The third angle sensor is installed on the X-axis angular displacement stage, and is used for real-time monitoring of the deflection angles of the X-axis angular displacement stage and the Y-axis angular displacement stage. 6. The small-diameter deep hole inner wall laser processing system according to claim 1, wherein the small-diameter deep hole inner wall laser processing system further comprises auxiliary tooling; The auxiliary tooling is a hat-shaped structure with a groove, and is used for setting the workpiece on the six-degree-of-freedom combined displacement table. 7 . The laser processing system for the inner wall of a small-diameter deep hole according to claim 1 , wherein the laser processing system for the inner wall of a small-diameter deep hole is suitable for workpieces with a through-type variable cross-section multi-level hole structure. 8 .

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