CN113447874B - Calibration device and method for semiconductor test system - Google Patents
Calibration device and method for semiconductor test system Download PDFInfo
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- CN113447874B CN113447874B CN202111021590.2A CN202111021590A CN113447874B CN 113447874 B CN113447874 B CN 113447874B CN 202111021590 A CN202111021590 A CN 202111021590A CN 113447874 B CN113447874 B CN 113447874B
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Abstract
The invention discloses a calibration device and a calibration method of a semiconductor test system, which comprises an upper computer, a communication unit, more than one function board card, a calibration unit and a data storage unit, wherein the data storage unit is used for storing parameter specifications designed by a system calibration project into variable parameters, when test system software runs, a calibration project parameter table head required to be called is automatically identified according to the function board card and version ID information, the calibration project parameter table head is loaded into a system software clock, when a user executes the calibration operation of the test system, a calibration function meeting established rules is uniformly compiled in the system software, and the function board card and an external instrument are driven to complete the calibration operation by executing the calibration project parameters. The invention has the advantages of simple software function, convenient maintenance, high upgrading efficiency, rapid test and the like, can reduce human errors in code compiling and modifying and improves the stability and compatibility of the system.
Description
Technical Field
The invention relates to the technical field of semiconductor test, in particular to a calibration device and a calibration method of a semiconductor test system.
Background
In the application of integrated circuit mass production test in the semiconductor industry, in order to ensure the authenticity and validity of a test result, a semiconductor test system needs to be regularly calibrated and verified to determine whether indexes such as functions and precision of the semiconductor test system meet design specifications and test requirements. And then selecting a corresponding calibration item through test system software to carry out calibration and verification operation, finally generating corresponding calibration data, and after the calibration is qualified, storing a calibration correction coefficient in a memory circuit of the system by the test system, thereby completing the operation of calibrating and verifying the semiconductor test equipment.
In a conventional test system, a designer usually writes calibration certification items in corresponding software modules through specific functions. If the function of the functional board card structure is modified and upgraded, the corresponding function module needs to be updated synchronously, the test equipment is a very complex system and comprises a plurality of function modules, a part of program modified can affect other function modules, and subsequent system software test can take a large amount of time, so that the maintenance and upgrading are inconvenient, and the compatibility is poor. And can result in a slow system software upgrade iteration.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention provides the calibration device and the calibration method of the semiconductor test system, which have good compatibility and high upgrading iteration speed.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
the utility model provides a calibrating device of semiconductor test system, includes host computer, communication unit, more than one function integrated circuit board, calibration unit, data memory cell, wherein:
the data storage unit is used for storing system calibration item parameters and system calibration item parameters
，
The number of the functional board cards is shown,
is shown as
The parameters of the board card with the functions are,
，
is shown as
A functional board card
The number of the individual versions is,
is shown as
The version number of each functional board card. First, the
A functional board card
Version of a program
The detection items are
，
，
Is shown as
A functional board card
Version one
The number of the items to be detected is,
first, the
A functional board card
Number of items detected by version
A functional board card
Version one
Item of personal examination
Detected value of
，
，
Is shown as
A functional board card
Version one
First of a test item
The number of the detected values is determined,
is shown as
A functional board card
Version one
The number of detection values of each detection item.
The communication unit is used for communication between the upper computer and the functional board card.
And the upper computer is used for loading the system calibration project parameters stored in the data storage unit. The device is used for reading the function board card and the version information through the communication unit and reading calibration correction data in the function board card at the same time. And calling a system calibration item parameter corresponding to the function board card according to the identified function board card and the version information. And obtaining the driving parameters of the functional board card according to the system calibration item parameters and the calibration correction data corresponding to the functional board card. And executing the calibration function according to the driving parameters of the function board card to drive the function board card, the calibration unit and the external instrument to finish the application and measurement operation of the calibration function, and obtaining a calibration result. And reading the calibration result for judgment, if the calibration data is qualified, generating a calibration data file and storing the calibration correction data in the memory of the corresponding functional board card, so as to finish the calibration operation of the functional board card.
Preferably: the function board comprises a board main control module, a board driving module and a board measuring module, wherein the board main control module is respectively connected with the board driving module and the board measuring module.
Preferably: the calibration unit comprises a calibration interface module, a calibration control module, a calibration switch module and a calibration load module, wherein the calibration control module is respectively connected with the calibration interface module, the calibration switch module and the calibration load module.
A calibration method of a calibration device of a semiconductor test system includes the following steps:
And 2, loading the system calibration item parameters in the data storage unit by the upper computer.
And 3, reading and identifying the functional board card and the version information by the upper computer through the communication unit.
And 4, calling system calibration project parameters corresponding to the function board card by the upper computer according to the identified function board card and the version information, and simultaneously loading calibration correction data of the function board card by the upper computer. And the upper computer obtains the driving parameters of the functional board card according to the system calibration item parameters and the calibration correction data corresponding to the functional board card.
And 5, the upper computer executes the calibration function according to the driving parameters of the function board card to drive the function board card, the calibration unit and the external instrument to complete the application and measurement operation of the calibration function, and a calibration result is obtained.
And 6, reading the calibration result by the upper computer for judgment, if the calibration data is qualified, generating a calibration data file, and storing the calibration correction data in the memory of the corresponding functional board card, so as to finish the calibration operation of the functional board card.
Preferably: and 6, if the calibration data is unqualified, selecting to modify the calibration item parameter values in the calibration database file, and after the upper computer reloads the calibration database file, performing calibration operation again, and if the calibration database file is not selected to be modified, finishing the calibration operation, wherein the calibration correction data cannot be stored.
Compared with the prior art, the invention has the following beneficial effects:
the invention has the advantages of simple software function, convenient maintenance, high upgrading efficiency, rapid test and the like, can reduce human errors in code compiling and modifying and improves the stability and compatibility of the system.
Drawings
FIG. 1 is a block diagram of a test system.
Fig. 2 is a diagram of a calibration database structure, in which A, B, C indicates different systems, D, E, F indicates different boards, G, H, I indicates different versions, and J, K, L indicates different project parameters.
FIG. 3 is a table header of calibration database entries, in which V1, V2, …, and V9 represent different variable values, and l1, l2, …, and l9 represent different entries.
Fig. 4 is a flow chart of system calibration.
Detailed Description
The present invention is further illustrated by the following description in conjunction with the accompanying drawings and the specific embodiments, it is to be understood that these examples are given solely for the purpose of illustration and are not intended as a definition of the limits of the invention, since various equivalent modifications will occur to those skilled in the art upon reading the present invention and fall within the limits of the appended claims.
A calibration device of a semiconductor test system is shown in figures 1-2 and comprises an upper computer 1, a communication unit 2, more than one functional board card 3, a calibration unit 5, an external measuring instrument 6 and a data storage unit, wherein:
the communication unit 2 is used for communication between the upper computer 1 and the functional board card 3, and realizes control over the functional board card module and the calibration module; the upper computer is connected with an external instrument 6 through a USB interface.
As shown in fig. 1, the functional board 3 includes a board main control module 31, a board driving module 32, and a board measuring module 33, and the board main control module 31 is connected to the board driving module 32 and the board measuring module 33 respectively.
The calibration unit 5 includes a calibration interface module 51, a calibration control module 52, a calibration switch module 54, and a calibration load module 53, where the calibration control module 52 is connected to the calibration interface module 51, the calibration switch module 54, and the calibration load module 53, respectively.
The data storage unit is used for storing system calibration item parameters and system calibration item parameters
，
The number of the functional board cards is shown,
is shown as
The parameters of the board card with the functions are,
，
is shown as
A functional board card
The number of the individual versions is,
is shown as
The version number of each functional board card. First, the
A functional board card
Version of a program
The detection items are
，
，
Is shown as
A functional board card
Version one
The number of the items to be detected is,
first, the
A functional board card
Number of items detected by version
A functional board card
Version one
Item of personal examination
Detected value of
，
，
Is shown as
A functional board card
Version one
First of a test item
The number of the detected values is determined,
is shown as
A functional board card
Version one
The number of detection values of each detection item.
As shown in fig. 2 and 3, the data storage unit stores data by using a database structure, where the database structure is composed of a parent entity, a child entity, a grandchild entity, and a grandchild item header, the grandchild item header of the calibration item includes calibration items of the column function module, and the grandchild item header of the calibration item includes parameter setting values of the horizontal calibration items.
The upper computer 1 is used for loading system calibration project parameters stored in the data storage unit. The device is used for reading the functional board 3 and the version information through the communication unit 2, and simultaneously reading calibration correction data in the functional board 3. And calling a system calibration item parameter corresponding to the function board card according to the identified function board card and the version information. And obtaining the driving parameters of the functional board card according to the system calibration item parameters and the calibration correction data corresponding to the functional board card. And executing a calibration function according to the driving parameters of the functional board card to drive the functional board card 3, the calibration unit 5 and the external instrument 6 to complete the application and measurement operation of the calibration function, and obtaining a calibration result. And reading the calibration result for judgment, if the calibration data is qualified, generating a calibration data file and storing the calibration correction data in the memory of the corresponding functional board card, so as to finish the calibration operation of the functional board card.
A calibration method of a calibration apparatus of a semiconductor test system, as shown in fig. 4, comprises the steps of:
And 2, loading the system calibration project parameters in the data storage unit by the upper computer 1.
And 3, reading and identifying the functional board card and the version information by the upper computer 1 through the communication unit 2.
And 4, calling system calibration project parameters corresponding to the function board card by the upper computer 1 according to the identified function board card and the version information, and simultaneously loading calibration correction data of the function board card (the calibration correction data comprises Gain and Offset correction coefficients) by the upper computer 1. The upper computer 1 obtains the driving parameters of the function board card according to the system calibration project parameters and the calibration correction data corresponding to the function board card.
And 5, the upper computer 1 executes a calibration function according to the driving parameters of the function board card to drive the function board card 3, the function board card 3 applies voltage or current to a load of the calibration unit 5 through a DA (digital-to-analog) converter, meanwhile, an external instrument 6 completes measurement operation of the voltage or current applied to the calibration unit 5, the measured result is compared with a preset value, data obtained through comparison are obtained, the upper computer 1 adjusts the input value of the DA converter on the function board card 3, the cyclic correction is carried out in such a way, the voltage or current applied to the calibration unit 5 is finally output to be within a preset deviation range, calibration of the applied part of the source is completed, and a calibration result meeting the project specification requirement is obtained.
And 6, reading the calibration result by the upper computer for judgment, if the calibration data is qualified, generating a calibration data file, and storing the calibration correction data in the memory of the corresponding functional board card, so as to finish the calibration operation of the functional board card. If the calibration data is unqualified, the user can select to modify the calibration item parameter values in the calibration database file, the upper computer performs the calibration operation again after reloading the calibration database file, and if the user does not select to modify the calibration database file, the calibration operation is ended, and the calibration correction data cannot be stored at the moment.
Examples of the invention
As shown in fig. 1 to 4, when the user performs the voltage driving function calibration of the function board 3 by using the present invention, the system starts initialization setting after starting the system software, loads the calibration database file to read the preset value of the variable parameter of the calibration item, and then reads the function board and the version ID through the function and loads the calibration correction data at the same time; and then, the software completes the setting of the calibration interface module 51, the calibration switch module 54 and the calibration load module 53 of the calibration unit 5, then the board main control module 31 of the functional board 3 controls the board driving module 32 to apply voltage, at this time, the external instrument 6 is controlled to complete the measurement of the voltage value, meanwhile, the upper computer 1 analyzes and judges the read measurement data, if the judged calibration result is qualified, a calibration file is generated, and the calibration correction data is stored in the memory of the functional board 3. And if the calibration result is unqualified, triggering to interrupt to finish the calibration operation. The board card measuring module 33 is used for measuring the voltage or current input from the outside, and the calibration method is as follows: firstly, the board card control module 32 applies voltage to the calibration load module 53, then the external instrument 6 and the board card measuring module 33 are used for measuring the voltage value on the calibration load module 53, the voltage measured by the external instrument 6 is used as a reference to compare the voltage value measured by the board card measuring module 33 with the voltage value measured by the upper computer 1, the compared difference value is converted into measurement compensation data, and the cyclic correction is carried out in such a way, so that the voltage value measured by the board card measuring module 33 and the voltage value measured by the external instrument 6 are within a preset deviation range, and the calibration of the voltage measuring function is completed.
The invention adopts a unique data storage structure, defines the parameter specification designed by the system calibration project into variable parameters, summarizes all the variable parameters into a database file, the parent directory of the database file is different functional module combinations, the child directories under the parent directory are different versions of the functional modules, the columns in the child directory table are calibration projects corresponding to the functional board cards, and the columns are setting values of the parameters corresponding to the calibration projects, including the range, time, times and the like. And after all the project parameters are set according to a set rule, generating an encrypted database file for the test system to call.
When the test system software runs, the calibration item parameter table header needing to be called is automatically identified according to the board card and the version ID information, and is loaded into a system software clock. And if the calibration items and parameters of the module function board card need to be adjusted subsequently, the database file is only required to be modified to complete the upgrade.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.
Claims (5)
1. A calibration apparatus for a semiconductor test system, comprising: including host computer (1), communication unit (2), more than one function integrated circuit board (3), calibration unit (5), data storage unit, wherein:
the data storage unit is used for storing system calibration item parameters and system calibration item parameters
，
The number of the functional board cards is shown,
is shown as
The parameters of the board card with the functions are,
，
is shown as
A functional board card
The number of the version parameters is such that,
is shown as
The number of versions of each functional board card; first, the
A functional board card
Version of a program
The detection items are
，
，
Is shown as
A functional board card
Version one
The number of the items to be detected is,
is shown as
A functional board card
Number of items detected by version
A functional board card
Version one
Item of personal examination
Detected value of
，
，
Is shown as
A functional board card
Version one
First of a test item
The number of the detected values is determined,
is shown as
A functional board card
Version one
The number of detection values of each detection item;
the communication unit (2) is used for communication between the upper computer (1) and the functional board card (3);
the upper computer (1) is used for loading system calibration project parameters stored by the data storage unit; the device is used for reading the functional board card (3) and the version information through the communication unit (2), and simultaneously reading calibration correction data in the functional board card (3); calling a system calibration item parameter corresponding to the function board card according to the identified function board card and the version information; obtaining a driving parameter of the function board card according to the system calibration item parameter and the calibration correction data corresponding to the function board card; executing a calibration function according to the driving parameters of the functional board card to drive the functional board card (3), the calibration unit (5) and the external instrument (6) to complete the application and measurement operation of the calibration function, and obtaining a calibration result; and reading the calibration result for judgment, if the calibration data is qualified, generating a calibration data file and storing the calibration correction data in the memory of the corresponding functional board card, so as to finish the calibration operation of the functional board card.
2. The calibration device for a semiconductor test system according to claim 1, wherein: the functional board card (3) comprises a board card main control module (31), a board card driving module (32) and a board card measuring module (33), wherein the board card main control module (31) is respectively connected with the board card driving module (32) and the board card measuring module (33).
3. The calibration device for a semiconductor test system according to claim 1, wherein: the calibration unit (5) comprises a calibration interface module (51), a calibration control module (52), a calibration switch module (54) and a calibration load module (53), wherein the calibration control module (52) is respectively connected with the calibration interface module (51), the calibration switch module (54) and the calibration load module (53).
4. A method for calibrating a calibration device of a semiconductor test system according to claim 1, comprising the steps of:
step 1, starting an upper computer (1);
step 2, the upper computer (1) loads system calibration project parameters in the data storage unit;
step 3, the upper computer (1) reads and identifies the function board card and the version information through the communication unit (2);
step 4, the upper computer (1) calls system calibration project parameters corresponding to the function board card according to the identified function board card and version information, and meanwhile, the upper computer (1) loads calibration correction data of the function board card; the upper computer (1) obtains driving parameters of the function board card according to the system calibration item parameters and the calibration correction data corresponding to the function board card;
step 5, the upper computer (1) executes the calibration function according to the driving parameters of the function board card to drive the function board card (3), the calibration unit (5) and the external instrument (6) to complete the application and measurement operation of the calibration function, and a calibration result is obtained;
and 6, reading the calibration result by the upper computer for judgment, if the calibration data is qualified, generating a calibration data file, and storing the calibration correction data in the memory of the corresponding functional board card, so as to finish the calibration operation of the functional board card.
5. The calibration method according to claim 4, wherein: and 6, if the calibration data is unqualified, selecting to modify the calibration item parameter values in the calibration database file, and after the upper computer reloads the calibration database file, performing calibration operation again, and if the calibration database file is not selected to be modified, finishing the calibration operation, wherein the calibration correction data cannot be stored.
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| CN115078950B (en) * | 2022-07-28 | 2022-10-25 | 南京宏泰半导体科技有限公司 | Method for controlling peripheral equipment test by upper computer |
| CN115856750B (en) * | 2023-02-23 | 2024-01-30 | 南京宏泰半导体科技股份有限公司 | Quick calibration device and method for SOC test system |
| CN117612594B (en) * | 2024-01-19 | 2024-04-09 | 悦芯科技股份有限公司 | Calibration data storage and calling method for improving precision |
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