CN113447787B - Power semiconductor device aging on-line diagnosis method - Google Patents
Power semiconductor device aging on-line diagnosis method Download PDFInfo
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Abstract
本发明公开了一种功率半导体器件老化在线诊断方法,该方法基于功率半导体器件不同老化程度下特定电气参数对应不同结温的特性,建立其关于结温的老化诊断模型;根据实际工况中功率半导体器件的电气数据,结合热敏感电参数法和热阻网络法分别进行结温估计,通过对获得的两个估计结温的比较,实现功率半导体器件的老化种类的判定,继而实现老化程度的诊断和寿命估计;该方法提高了功率半导体器件的安全性和经济效益,是功率半导体器件老化预诊断领域的一条新思路。
The invention discloses an aging online diagnosis method for power semiconductor devices. The method is based on the characteristics of specific electrical parameters corresponding to different junction temperatures under different aging degrees of power semiconductor devices, and establishes its aging diagnosis model about junction temperature; The electrical data of the semiconductor device is combined with the heat-sensitive electrical parameter method and the thermal resistance network method to estimate the junction temperature respectively. By comparing the two estimated junction temperatures obtained, the judgment of the aging type of the power semiconductor device is realized, and then the aging degree is realized. Diagnosis and life estimation; this method improves the safety and economic benefits of power semiconductor devices, and is a new idea in the field of aging pre-diagnosis of power semiconductor devices.
Description
技术领域technical field
本发明涉及电力电子设备健康管理技术领域,具体涉及一种功率半导体器件老化在线诊断方法。The invention relates to the technical field of power electronic equipment health management, in particular to an on-line aging diagnosis method for power semiconductor devices.
背景技术Background technique
由电力电子系统可靠性调研报告可知,功率半导体器件是变流系统中失效率最高的,约占34%。在各类失效因素中,由温度因素诱发的电力电子系统失效占比高达55%。大量试验统计数据与失效机理分析得到,功率器件的结温摆动幅度、最大结温、平均结温、最低壳温以及周期内导通时间等因素共同决定了其在失效前所能经历的最大温度循环周期数。因此,功率半导体器件中IGBT的结温的精准提取与检测是其老化状态诊断、使用寿命估计、健康状态管理与可靠性状态评估的基础。According to the research report on the reliability of power electronic systems, power semiconductor devices have the highest failure rate in the converter system, accounting for about 34%. Among various failure factors, the failure of power electronic systems induced by temperature factors accounts for as high as 55%. A large number of test statistical data and failure mechanism analysis show that factors such as the swing range of junction temperature, maximum junction temperature, average junction temperature, minimum case temperature and cycle conduction time of power devices determine the maximum temperature they can experience before failure. number of cycles. Therefore, the accurate extraction and detection of the junction temperature of IGBT in power semiconductor devices is the basis for its aging state diagnosis, service life estimation, health state management and reliability state assessment.
功率半导体器件老化主要可分为芯片老化和封装老化,现有老化分析技术的研究大多从热敏感参数角度研究器件的结温变化,并离线分析映射到器件失效程度,并没有达到实用化,尚缺乏一种兼顾功率半导体器件老化种类判定和老化程度估计的在线诊断方法。The aging of power semiconductor devices can be mainly divided into chip aging and package aging. Most of the existing research on aging analysis technology studies the junction temperature change of the device from the perspective of thermally sensitive parameters, and offline analysis is mapped to the failure degree of the device, which has not yet reached practicality. There is a lack of an online diagnostic method that takes into account both the determination of the aging type and the estimation of the aging degree of power semiconductor devices.
发明内容Contents of the invention
为了解决现有技术问题,本发明的目的在于克服已有技术存在的不足,提供一种功率半导体器件老化在线诊断方法,以IGBT为例,拟在不破坏模块封装的前提下,通过加速老化实验,对功率器件老化特性的测试分析,研究IGBT的失效过程中的结温变化,包括热敏感电参数法和热阻网络法,对比两种方法的结温检测结果,确定IGBT的老化种类和程度,以获得一种兼顾经济效益、设备可靠性的多目标控制,进而为功率半导体器件的健康管理主要是老化因素故障的预诊断技术提供参考。In order to solve the problems of the prior art, the purpose of the present invention is to overcome the deficiencies of the prior art and provide an on-line diagnosis method for the aging of power semiconductor devices. Taking IGBT as an example, it is proposed to pass the accelerated aging test without destroying the module package. , test and analyze the aging characteristics of power devices, study the junction temperature change in the failure process of IGBT, including thermal sensitive electrical parameter method and thermal resistance network method, compare the junction temperature detection results of the two methods, and determine the type and degree of IGBT aging In order to obtain a multi-objective control that takes into account both economic benefits and equipment reliability, and then provides a reference for the health management of power semiconductor devices, mainly the pre-diagnosis technology of aging factor failures.
为达到上述发明创造目的,本发明采用如下技术方案:In order to achieve the above invention creation purpose, the present invention adopts the following technical solutions:
一种功率半导体器件老化在线诊断方法,采用结温估计方法,判断导通功率偏移程度,从而判断老化程度;包括两种情况:An on-line diagnosis method for the aging of power semiconductor devices, which uses a junction temperature estimation method to judge the degree of conduction power offset, thereby judging the degree of aging; it includes two situations:
(1)基于功率半导体器件电热特性,根据功率半导体器件不同老化程度下特定电气参数对应不同结温的特性,比较热敏感电参数法和热阻网络法获得的两个结温参数的大小,判断功率半导体器件的老化种类,即芯片老化或封装老化;(1) Based on the electrothermal characteristics of power semiconductor devices, according to the characteristics of specific electrical parameters corresponding to different junction temperatures under different aging degrees of power semiconductor devices, compare the size of the two junction temperature parameters obtained by the heat-sensitive electrical parameter method and the thermal resistance network method, and judge The type of aging of power semiconductor devices, that is, chip aging or package aging;
(2)在老化种类判定的基础上,比较实际工况中功率半导体器件的导通功率数据和正常功率半导体器件的导通功率数据的偏差程度,实现功率半导体器件老化程度的诊断。(2) On the basis of the determination of the aging type, compare the deviation degree of the conduction power data of the power semiconductor device in the actual working condition and the conduction power data of the normal power semiconductor device, and realize the diagnosis of the aging degree of the power semiconductor device.
优选功率半导体器件为IGBT。Preferably the power semiconductor device is an IGBT.
优选地,所述功率半导体器件结温监测方法包括:Preferably, the method for monitoring the junction temperature of a power semiconductor device includes:
(1)热敏感电参数法估计结温的方法,选定导通功率P0为导通状态末即关断过程开始前这一时刻t0的功率,则P0=vce(t0)·ic(t0)为热敏感电参数,建立导通功率-电流-结温的三维映射关系;根据实际工况中功率半导体器件的导通电流Ic=ic(t0)和导通功率P0,得到第一估计结温Tj1;(1) The thermally sensitive electrical parameter method is used to estimate the junction temperature. The conduction power P 0 is selected as the power at the moment t 0 at the end of the conduction state, that is, before the start of the turn-off process, then P 0 =v ce (t 0 ) ·ic ( t 0 ) is a thermally sensitive electrical parameter, and establishes the three-dimensional mapping relationship of conduction power-current-junction temperature; according to the conduction current I c = ic (t 0 ) and conduction Pass power P 0 to obtain the first estimated junction temperature T j1 ;
(2)热阻网络法估计结温的方法,提取未封装老化的功率半导体器件热阻参数,构建电热模型即热阻网络Zth=(Tj-Tc)/P=ΔT/ΔP,将壳温Tc=Tc(t0)和热功率数据p(t0)代入获得第二估计结温Tj2。(2) The method of estimating the junction temperature by the thermal resistance network method extracts the thermal resistance parameters of unpackaged and aging power semiconductor devices, and constructs an electrothermal model, that is, the thermal resistance network Z th = (T j -T c )/P = ΔT/ΔP. Case temperature T c =T c (t 0 ) and thermal power data p(t 0 ) are substituted to obtain a second estimated junction temperature T j2 .
优选地,所述老化种类的判定实现如下:Preferably, the determination of the type of aging is implemented as follows:
采用两个结温参数:基于导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1,基于热阻网络结温估计方法得到的第二估计结温Tj2;Two junction temperature parameters are used: the first estimated junction temperature T j1 obtained by the thermally sensitive electrical parameter junction temperature estimation method based on conduction power, and the second estimated junction temperature T j2 obtained by the thermal resistance network junction temperature estimation method;
若Tj1<Tj2,功率半导体器件老化种类为芯片老化。当功率半导体器件发生芯片老化而未发生封装老化时,芯片老化后基于正常模型所建立的导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1小于此时该功率半导体器件的实际结温,而芯片老化不影响封装固有特性,即封装的热阻抗参数不变,基于热阻网络结温估计方法得到的第二估计结温Tj2为此时该功率半导体器件的实际结温;If T j1 <T j2 , the aging type of the power semiconductor device is chip aging. When the power semiconductor device has chip aging but no package aging, the first estimated junction temperature T j1 obtained by the thermally sensitive electrical parameter junction temperature estimation method based on the conduction power established by the normal model after chip aging is less than the power semiconductor at this time The actual junction temperature of the device, while the aging of the chip does not affect the inherent characteristics of the package, that is, the thermal impedance parameters of the package remain unchanged, and the second estimated junction temperature T j2 obtained based on the thermal resistance network junction temperature estimation method is the actual junction temperature of the power semiconductor device at this time. junction temperature;
若Tj1>Tj2,功率半导体器件老化种类为封装老化。当功率半导体器件发生封装老化而未发生芯片老化时,封装老化不影响芯片内部固有特性,基于正常模型所建立的导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1为此时该功率半导体器件的实际结温,基于正常热阻网络结温估计方法得到的第二估计结温Tj2小于此时该功率半导体器件的实际结温。If T j1 >T j2 , the aging type of the power semiconductor device is packaging aging. When the package aging of the power semiconductor device occurs without chip aging, the package aging does not affect the inherent characteristics of the chip, and the first estimated junction temperature T j1 is obtained based on the thermally sensitive electrical parameter junction temperature estimation method of the conduction power established by the normal model For the actual junction temperature of the power semiconductor device at this time, the second estimated junction temperature T j2 obtained based on the normal thermal resistance network junction temperature estimation method is smaller than the actual junction temperature of the power semiconductor device at this time.
优选地,所述老化程度的估计实现如下:Preferably, the estimation of the aging degree is realized as follows:
保持功率半导体器件的壳温Tc恒定,温度标定实验中开关周期内导通状态末即关断过程开始前这一时刻t0的导通电流Ic对应的导通功率P1;实际运行条件下同等壳温Tc和同等导通电流Ic对应另一导通功率P2;Keep the shell temperature Tc of the power semiconductor device constant, and the conduction power P1 corresponding to the conduction current Ic at the moment t0 at the end of the conduction state in the switching cycle, that is, before the start of the turn - off process in the temperature calibration experiment; actual operating conditions The same case temperature T c and the same conduction current I c correspond to another conduction power P 2 ;
P2-P1,发生老化,通过导通功率的偏差ΔP=P2-P1表征功率半导体器件的老化程度。P 2 -P 1 , aging occurs, and the aging degree of the power semiconductor device is characterized by the deviation of conduction power ΔP=P 2 -P 1 .
优选地,基于导通功率的热敏感电参数法和热阻网络法的结温估计模型建立包括以下四个步骤:Preferably, the establishment of the junction temperature estimation model based on the heat-sensitive electrical parameter method of conduction power and the thermal resistance network method includes the following four steps:
步骤一:温度标定实验,正常IGBT固有参数提取,选取特定一个IGBT在温度标定平台进行试验,采取控制变量法,分别在一定的电流梯度和结温梯度下测得该IGBT单个开关周期内的集电极电流ic和集射极电压vce参数信号;Step 1: Temperature calibration experiment, extraction of normal IGBT inherent parameters, select a specific IGBT to test on the temperature calibration platform, adopt the control variable method, and measure the set value of the IGBT in a single switching cycle under a certain current gradient and junction temperature gradient respectively. Electrode current ic and collector-emitter voltage v ce parameter signals;
步骤二:离线数据处理,获得各实验样本的导通功率,建立导通功率-电流-结温的三维映射关系表;Step 2: Offline data processing, obtaining the conduction power of each experimental sample, and establishing a three-dimensional mapping relationship table of conduction power-current-junction temperature;
步骤三:根据所试验的IGBT数据手册,提取该IGBT的热阻网络参数;Step 3: Extract the thermal resistance network parameters of the IGBT according to the tested IGBT data sheet;
步骤四:根据所提取的热阻网络参数,搭建该IGBT的电热模型。Step 4: Build the electrothermal model of the IGBT according to the extracted thermal resistance network parameters.
优选地,基于导通功率的热敏感电参数法和热阻网络法的结温估计实现包括以下两个步骤:Preferably, the realization of the junction temperature estimation based on the heat-sensitive electrical parameter method of conduction power and the thermal resistance network method includes the following two steps:
步骤一:数据采样,传感功率半导体器件在一个开关周期内导通状态末即关断过程开始前这一时刻t0的壳温Tc、集射极电压vce、集电极电流ic,进而获得导通电流Ic、对应的导通功率P1和热功率数据p(t0)=vce(t0)·ic(t0);Step 1: Data sampling, sensing the case temperature T c , collector-emitter voltage v ce , and collector current ic of the power semiconductor device at the moment t 0 at the end of the conduction state within a switching cycle, that is, before the start of the turn-off process, Then obtain the conduction current I c , the corresponding conduction power P 1 and thermal power data p(t 0 )=v ce (t 0 )·ic ( t 0 );
步骤二:获取结温,将导通电流Ic和对应的导通功率P1代入权利要求5建立的导通功率-电流-结温的三维映射关系表得到的第一估计结温Tj1;将壳温Tc和热功率数据p(t0)代入权利要求5建立的电热模型得到的第二估计结温Tj2。Step 2: Obtaining the junction temperature, substituting the conduction current Ic and the corresponding conduction power P1 into the first estimated junction temperature Tj1 obtained from the three-dimensional mapping relationship table of conduction power-current-junction temperature established in claim 5; The second estimated junction temperature T j2 is obtained by substituting the case temperature T c and the thermal power data p(t 0 ) into the electrothermal model established in claim 5 .
优选地,在将导通电流Ic和对应的导通功率P1代入导通功率-电流-结温的三维映射关系表得到的第一估计结温Tj1时,采用基于导通功率的热敏感电参数结温估计方法;在将壳温Tc和热功率数据p(t0)代入权利要求5建立的电热模型得到的第二估计结温Tj2时,采用基于热阻网络结温估计方法。Preferably, when the conduction current Ic and the corresponding conduction power P1 are substituted into the first estimated junction temperature T j1 obtained from the three-dimensional mapping relationship table of conduction power-current-junction temperature, the thermal power based on conduction power is used. Sensitive electrical parameter junction temperature estimation method; when substituting the case temperature T c and thermal power data p(t 0 ) into the second estimated junction temperature T j2 obtained by the electrothermal model established in claim 5, the junction temperature estimation based on the thermal resistance network is used method.
优选地,所述基于导通功率P0的热敏感电参数结温估计方法,根据实际情况采用其他热敏感电参数替代,如:导通压降vce、关断延迟时间td_off。Preferably, the thermally sensitive electrical parameter junction temperature estimation method based on conduction power P 0 is replaced by other thermally sensitive electrical parameters according to actual conditions, such as conduction voltage drop v ce and turn-off delay time t d_off .
本发明与现有技术相比较,具有如下显而易见的突出实质性特点和显著优点:Compared with the prior art, the present invention has the following obvious outstanding substantive features and significant advantages:
1.本发明功率半导体器件老化在线诊断方法,以关键老化因素——结温进行老化诊断;1. The online diagnosis method for power semiconductor device aging of the present invention uses the key aging factor—junction temperature for aging diagnosis;
2.本发明分别基于导通功率的热敏感电参数结温估计方法和热阻网络结温估计方法进行结温监测,通过两个估计结温的比较,实现功率半导体器件的老化种类的判定,继而实现老化程度的诊断和寿命估计,提高了功率半导体器件的安全性和经济效益,为今后的功率半导体器件老化在线诊断研究提供了新思路;2. The present invention monitors the junction temperature based on the thermally sensitive electrical parameter junction temperature estimation method of conduction power and the thermal resistance network junction temperature estimation method, and realizes the determination of the aging type of the power semiconductor device by comparing the two estimated junction temperatures. Then realize the diagnosis of aging degree and life estimation, improve the safety and economic benefits of power semiconductor devices, and provide a new idea for the future online diagnosis research of power semiconductor device aging;
3.本发明方法简单易行,成本低,适合推广使用。3. The method of the present invention is simple and easy to implement, low in cost, and suitable for popularization and use.
附图说明Description of drawings
图1为本发明的一种功率半导体器件老化在线诊断方法示意图。FIG. 1 is a schematic diagram of an on-line diagnosis method for power semiconductor device aging according to the present invention.
图2为本发明的老化种类判定和该老化程度诊断实现流程图。Fig. 2 is a flow chart of the present invention for determining the type of aging and diagnosing the degree of aging.
图3为本发明的结温估计模型建立示意图。FIG. 3 is a schematic diagram of establishing a junction temperature estimation model of the present invention.
图4为本发明的温度标定试验平台示意图。Fig. 4 is a schematic diagram of the temperature calibration test platform of the present invention.
图5为本发明的温度标定试验系统原理图。Fig. 5 is a schematic diagram of the temperature calibration test system of the present invention.
图6为本发明的一个开关周期内集射极电压vce、集电极电流ic波形示意图。Fig. 6 is a schematic diagram of the waveforms of the collector-emitter voltage v ce and the collector current ic in one switching cycle of the present invention.
图7为本发明的导通功率-电流-结温三维关系图。FIG. 7 is a three-dimensional relationship diagram of conduction power-current-junction temperature in the present invention.
具体实施方式detailed description
以下结合具体的实施例子对上述方案做进一步说明,本发明的优选实施例详述如下:Below in conjunction with specific implementation example, above-mentioned scheme is described further, and preferred embodiment of the present invention is described in detail as follows:
实施例一:Embodiment one:
在本实施例中,参见图1,一种功率半导体器件老化在线诊断方法,采用结温估计方法,判断导通功率偏移程度,从而判断老化程度;包括两种情况:In this embodiment, referring to FIG. 1 , an on-line diagnosis method for the aging of power semiconductor devices uses a junction temperature estimation method to judge the degree of conduction power offset, thereby judging the degree of aging; it includes two situations:
(1)基于功率半导体器件电热特性,根据功率半导体器件不同老化程度下特定电气参数对应不同结温的特性,比较热敏感电参数法和热阻网络法获得的两个结温参数的大小,判断功率半导体器件的老化种类,即芯片老化或封装老化;(1) Based on the electrothermal characteristics of power semiconductor devices, according to the characteristics of specific electrical parameters corresponding to different junction temperatures under different aging degrees of power semiconductor devices, compare the size of the two junction temperature parameters obtained by the heat-sensitive electrical parameter method and the thermal resistance network method, and judge The type of aging of power semiconductor devices, that is, chip aging or package aging;
(2)在老化种类判定的基础上,比较实际工况中功率半导体器件的导通功率数据和正常功率半导体器件的导通功率数据的偏差程度,实现功率半导体器件老化程度的诊断。(2) On the basis of the determination of the aging type, compare the deviation degree of the conduction power data of the power semiconductor device in the actual working condition and the conduction power data of the normal power semiconductor device, and realize the diagnosis of the aging degree of the power semiconductor device.
其中,功率半导体器件结温监测方法包括:Among them, the power semiconductor device junction temperature monitoring method includes:
(1)热敏感电参数法估计结温的方法,选定导通功率P0为导通状态末即关断过程开始前这一时刻t0的功率,则P0=vce(t0)·ic(t0)为热敏感电参数,建立导通功率-电流-结温的三维映射关系;根据实际工况中功率半导体器件的导通电流Ic=ic(t0)和导通功率P0,得到第一估计结温Tj1;(1) The thermally sensitive electrical parameter method is used to estimate the junction temperature. The conduction power P 0 is selected as the power at the moment t 0 at the end of the conduction state, that is, before the start of the turn-off process, then P 0 =v ce (t 0 ) ·ic ( t 0 ) is a thermally sensitive electrical parameter, and establishes the three-dimensional mapping relationship of conduction power-current-junction temperature; according to the conduction current I c = ic (t 0 ) and conduction Pass power P 0 to obtain the first estimated junction temperature T j1 ;
(2)热阻网络法估计结温的方法,提取未封装老化的功率半导体器件热阻参数,构建电热模型即热阻网络Zth=(Tj-Tc)/P=ΔT/ΔP,将壳温Tc=Tc(t0)和热功率数据p(t0)代入获得第二估计结温Tj2。(2) The method of estimating the junction temperature by the thermal resistance network method extracts the thermal resistance parameters of unpackaged and aging power semiconductor devices, and constructs an electrothermal model, that is, the thermal resistance network Z th = (T j -T c )/P = ΔT/ΔP. Case temperature T c =T c (t 0 ) and thermal power data p(t 0 ) are substituted to obtain a second estimated junction temperature T j2 .
如图2所示,功率半导体器件的所述老化种类的判定实现如下:As shown in Figure 2, the determination of the aging type of the power semiconductor device is implemented as follows:
采用两个结温参数:基于导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1,基于热阻网络结温估计方法得到的第二估计结温Tj2;Two junction temperature parameters are used: the first estimated junction temperature T j1 obtained by the thermally sensitive electrical parameter junction temperature estimation method based on conduction power, and the second estimated junction temperature T j2 obtained by the thermal resistance network junction temperature estimation method;
若Tj1<Tj2,功率半导体器件老化种类为芯片老化。当功率半导体器件发生芯片老化而未发生封装老化时,芯片老化后基于正常模型所建立的导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1小于此时该功率半导体器件的实际结温,而芯片老化不影响封装固有特性,即封装的热阻抗参数不变,基于热阻网络结温估计方法得到的第二估计结温Tj2为此时该功率半导体器件的实际结温;If T j1 <T j2 , the aging type of the power semiconductor device is chip aging. When the power semiconductor device has chip aging but no package aging, the first estimated junction temperature T j1 obtained by the thermally sensitive electrical parameter junction temperature estimation method based on the conduction power established by the normal model after chip aging is less than the power semiconductor at this time The actual junction temperature of the device, while the aging of the chip does not affect the inherent characteristics of the package, that is, the thermal impedance parameters of the package remain unchanged, and the second estimated junction temperature T j2 obtained based on the thermal resistance network junction temperature estimation method is the actual junction temperature of the power semiconductor device at this time. junction temperature;
若Tj1>Tj2,功率半导体器件老化种类为封装老化。当功率半导体器件发生封装老化而未发生芯片老化时,封装老化不影响芯片内部固有特性,基于正常模型所建立的导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1为此时该功率半导体器件的实际结温,基于正常热阻网络结温估计方法得到的第二估计结温Tj2小于此时该功率半导体器件的实际结温。If T j1 >T j2 , the aging type of the power semiconductor device is packaging aging. When the package aging of the power semiconductor device occurs without chip aging, the package aging does not affect the inherent characteristics of the chip, and the first estimated junction temperature T j1 is obtained based on the thermally sensitive electrical parameter junction temperature estimation method of the conduction power established by the normal model For the actual junction temperature of the power semiconductor device at this time, the second estimated junction temperature T j2 obtained based on the normal thermal resistance network junction temperature estimation method is smaller than the actual junction temperature of the power semiconductor device at this time.
所述老化程度的估计实现如下:The estimation of the degree of aging is achieved as follows:
保持功率半导体器件的壳温Tc恒定,温度标定实验中开关周期内导通状态末即关断过程开始前这一时刻t0的导通电流Ic对应的导通功率P1;实际运行条件下同等壳温Tc和同等导通电流Ic对应另一导通功率P2;Keep the shell temperature Tc of the power semiconductor device constant, and the conduction power P1 corresponding to the conduction current Ic at the moment t0 at the end of the conduction state in the switching cycle, that is, before the start of the turn - off process in the temperature calibration experiment; actual operating conditions The same case temperature T c and the same conduction current I c correspond to another conduction power P 2 ;
P2-P1,发生老化,通过导通功率的偏差ΔP=P2-P1表征功率半导体器件的老化程度。P 2 -P 1 , aging occurs, and the aging degree of the power semiconductor device is characterized by the deviation of conduction power ΔP=P 2 -P 1 .
如图3所示,基于导通功率的热敏感电参数法和热阻网络法的结温估计模型建立主要包括以下四个步骤:As shown in Figure 3, the establishment of the junction temperature estimation model based on the thermally sensitive electrical parameter method of the conduction power and the thermal resistance network method mainly includes the following four steps:
步骤一:温度标定实验,正常IGBT固有参数提取,选取特定一个IGBT在温度标定平台进行试验,采取控制变量法,分别在一定的电流梯度和结温梯度下测得该IGBT单个开关周期内的集电极电流ic和集射极电压vce参数信号;Step 1: Temperature calibration experiment, extraction of normal IGBT inherent parameters, select a specific IGBT to test on the temperature calibration platform, adopt the control variable method, and measure the set value of the IGBT in a single switching cycle under a certain current gradient and junction temperature gradient respectively. Electrode current ic and collector-emitter voltage v ce parameter signals;
步骤二:离线数据处理,获得各实验样本的导通功率,建立导通功率-电流-结温的三维映射关系表;Step 2: Offline data processing, obtaining the conduction power of each experimental sample, and establishing a three-dimensional mapping relationship table of conduction power-current-junction temperature;
步骤三:根据所试验的IGBT数据手册,提取该IGBT的热阻网络参数;Step 3: Extract the thermal resistance network parameters of the IGBT according to the tested IGBT data sheet;
步骤四:根据所提取的热阻网络参数,搭建该IGBT的电热模型。Step 4: Build the electrothermal model of the IGBT according to the extracted thermal resistance network parameters.
其中,步骤一和步骤二在如图4所示的温度标定平台上实现,图5所示的原理图,采用单相逆变器电路进行双脉冲测试,选择英飞凌的IGBT模块(型号:FF50R12RT4)进行测试,实验时将待测模块两侧加热片启动,待温控器显示温度稳定并维持15分钟后,可认为模块内芯片与箱内温度相同,通过改变第一个脉冲的脉宽宽度实现关断时刻集电极电流10A、15A、20A、25A、30A、35A、40A可调,分别测试30、60、90、120℃下IGBT单个开关周期内集射极电压vce、集电极电流ic,记录试验数据,单个开关周期内集射极电压vce、集电极电流ic波形如图6所示;离线进行数据分析,建立导通功率-电流-结温的映射关系表,进行数据拟合,填充空白数据,绘制导通功率-电流-结温的三维关系图。Among them,
如图7所示的导通功率-电流-结温三维关系图,利用老化试验验证本专利所提的一种功率半导体器件老化在线诊断方法的正确性。可见,在相同工况下,不同老化程度下基于导通功率的热敏感电参数结温估计方法得到的第一估计结温Tj1和基于热阻网络结温估计方法得到的第二估计结温Tj2具有一定的偏差。结果表明,IGBT的结温受到老化程度的影响,对于IGBT的老化状态研究,可以应用热阻网络法和热敏感电参数法结合建立联合模型,最终确定IGBT的老化状态。As shown in FIG. 7 , the three-dimensional relationship diagram of conduction power-current-junction temperature is used to verify the correctness of an online diagnosis method for aging of power semiconductor devices proposed in this patent by using aging tests. It can be seen that under the same working conditions, the first estimated junction temperature T j1 obtained by the thermally sensitive electrical parameter junction temperature estimation method based on conduction power and the second estimated junction temperature obtained by the junction temperature estimation method based on thermal resistance network under different aging degrees T j2 has a certain deviation. The results show that the junction temperature of IGBT is affected by the degree of aging. For the research on the aging state of IGBT, the thermal resistance network method and the thermal sensitive electrical parameter method can be used to establish a joint model to finally determine the aging state of IGBT.
本实施例根据实际工况中功率半导体器件的电气数据,结合热敏感电参数法和热阻网络法进行分别结温估计,通过两个估计结温的比较,实现功率半导体器件的老化种类的判定,继而实现老化程度的诊断和寿命估计。In this embodiment, according to the electrical data of the power semiconductor device in the actual working condition, the junction temperature is estimated separately by combining the heat-sensitive electrical parameter method and the thermal resistance network method, and the judgment of the aging type of the power semiconductor device is realized by comparing the two estimated junction temperatures , and then realize the diagnosis of aging degree and life estimation.
实施例二:Embodiment two:
本实施例中基本与实施例一相同,区别之处在于:In this embodiment, it is basically the same as in
所述的一种功率半导体器件老化在线诊断方法中的基于导通功率的热敏感电参数结温估计方法,可根据实际情况采用其他热敏感电参数替代,如:导通压降vce、关断延迟时间td_off。降低系统采样、运算成本,更具经济性和实时性。The thermally sensitive electrical parameter junction temperature estimation method based on conduction power in the described online diagnosis method for aging of power semiconductor devices can be replaced by other thermally sensitive electrical parameters according to the actual situation, such as: conduction voltage drop v ce , off Off delay time t d_off . Reduce system sampling and computing costs, more economical and real-time.
上述实施例功率半导体器件老化在线诊断方法,该方法基于功率半导体器件不同老化程度下特定电气参数对应不同结温的特性,建立其关于结温的老化诊断模型;根据实际工况中功率半导体器件的电气数据,结合热敏感电参数法和热阻网络法进行分别结温估计,通过两个估计结温的比较,实现功率半导体器件的老化种类的判定,继而实现老化程度的诊断和寿命估计;该方法提高了功率半导体器件的安全性和经济效益,是功率半导体器件老化预诊断领域的一条新思路。The online diagnostic method for power semiconductor device aging in the above-mentioned embodiment, this method is based on the characteristics of specific electrical parameters corresponding to different junction temperatures under different aging degrees of power semiconductor devices, and establishes its aging diagnosis model about junction temperature; according to the actual operating conditions of power semiconductor devices Electrical data, combined with heat-sensitive electrical parameter method and thermal resistance network method to estimate the junction temperature separately, through the comparison of the two estimated junction temperatures, the judgment of the aging type of the power semiconductor device is realized, and then the diagnosis of the aging degree and the life estimation are realized; the The method improves the safety and economic benefits of power semiconductor devices, and is a new idea in the field of aging pre-diagnosis of power semiconductor devices.
上面对本发明实施例结合附图进行了说明,但本发明不限于上述实施例,还可以根据本发明的发明创造的目的做出多种变化,凡依据本发明技术方案的精神实质和原理下做的改变、修饰、替代、组合或简化,均应为等效的置换方式,只要符合本发明的发明目的,只要不背离本发明的技术原理和发明构思,都属于本发明的保护范围。The embodiment of the present invention has been described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned embodiment, and various changes can also be made according to the purpose of the invention of the present invention. The changes, modifications, substitutions, combinations or simplifications should all be equivalent replacement methods, as long as they meet the purpose of the invention, as long as they do not deviate from the technical principle and inventive concept of the invention, they all belong to the protection scope of the invention.
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