CN113432563B - Extreme environment linear sensor calibration device and method - Google Patents
Extreme environment linear sensor calibration device and method Download PDFInfo
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- CN113432563B CN113432563B CN202110719703.XA CN202110719703A CN113432563B CN 113432563 B CN113432563 B CN 113432563B CN 202110719703 A CN202110719703 A CN 202110719703A CN 113432563 B CN113432563 B CN 113432563B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention discloses an extreme environment linear sensor calibration device and method. The device comprises an upper computer module, an electrical control module, a displacement driving module, an extreme environment module, a standard length measuring module, a calibrated sensor supporting module, a displacement transmission module and an experiment platform module. In the calibration process, each module is electrically connected, a test control system is debugged to ensure that the device works normally, a pre-experiment is performed, and the system error of linear change in the normal temperature environment is determined; and then the high-low temperature box is started to set a verification temperature point, after the parts in the high-temperature box are thermally stable, the horizontal movement of the displacement driving module is precisely controlled through the upper computer module, and the indication difference between the calibrated sensor and the standard length measuring module is read and calculated, so that the verification and the calibration of the calibrated sensor under the temperature point are realized. The invention adopts the vertically installed displacement transmission module, can calibrate the linear sensor in the polar environment, and trace the final measurement result to the national length standard.
Description
Technical Field
The present invention relates to an extreme environment linear sensor calibration device, and more particularly, to an extreme environment linear sensor calibration device and method.
Background
Along with the rapid development of science and technology in China, more and more precise instruments and equipment are used in extreme environments, and before the precise instruments and the mechanical parts are used, the performance of the precise instruments and the mechanical parts is required to be detected in a laboratory simulation extreme environment so as to prevent faults in actual production and application, cause huge economic loss and damage the physical health of staff. Linear sensors are often used as high-precision measuring devices for measuring length variables.
At present, the domestic calibration and calibration of the linear sensor mainly uses a laser interferometer or a long grating comparator and other devices. In verification calibration, the sensor is first required to be kept at a constant temperature (20 ℃ +/-2 ℃) for more than 1 hour, and then the sensor can be subjected to subsequent verification calibration.
In summary, the existing linear sensor calibration device in China can only carry out verification and calibration under the environment temperature of a laboratory (20 ℃ +/-2 ℃), and cannot carry out magnitude transmission and tracing of length parameters under extreme environments.
Disclosure of Invention
In view of the shortcomings described in the background art, an object of the present invention is to provide an extreme environment linear sensor calibration device and method.
The technical scheme adopted by the invention is as follows:
the utility model provides an extreme environment rectilinear sensor calibrating device, includes host computer module, electric control module, displacement drive module, extreme environment module, standard length measurement module, by school sensor support module, displacement transmission module, experiment platform module.
The standard length measurement module comprises a tripod and a laser interferometer consisting of a laser interferometer reflecting mirror, a laser interferometer reference mirror and a laser emission head of the laser interferometer.
The displacement driving module consists of a servo motor and a two-dimensional air floatation moving table and is used for controlling the calibrated sensor to synchronously move with the standard length measuring module. The displacement transmission module consists of a displacement transmission rod and is vertically arranged on the two-dimensional air floatation moving table.
The upper computer module is used for controlling the motion of the two-dimensional air floatation moving platform, reading the data of the calibrated sensor, storing and analyzing the data and printing a report. The electric control module consists of an industrial controller, a data acquisition card, a high-precision power supply and other modules so as to realize real-time acquisition of data and instruction release.
The extreme environment module adopts a high-low temperature box and consists of a heating module, a refrigerating module and a temperature detection module, wherein the heating module adopts a resistance wire for heating, the temperature detection is carried out through a platinum thermal resistor, and the temperature environment of-100 ℃ can be realized through a three-stage air compressor.
The calibrated sensor supporting module consists of an L-shaped supporting plate and two portal frames, wherein the calibrated sensor is arranged on the L-shaped supporting plate, and the L-shaped supporting plate provides a workbench surface for the calibrated sensors with different structures. Two sides of the L-shaped supporting plate are arranged in the high-low temperature box through two portal frames; a limiting block is arranged on the L-shaped supporting plate and is connected with a displacement transmission rod through threads; the calibrated sensor is connected with the displacement transmission rod through a limiting block so as to achieve the purpose of synchronous displacement. The reflecting mirror of the laser interferometer is arranged at the lower end of the displacement transmission rod, and the reflecting mirror of the laser interferometer and the calibrated sensor are arranged on the same vertical line, so that the effect of transmitting displacement is achieved.
The experiment platform module comprises a marble platform and an optical precision platform.
The upper computer module, the electrical control module, the displacement driving module and the standard length measuring module are electrically connected. The extreme environment module, the displacement driving module, the laser interferometer reflecting mirror and the calibrated sensor supporting module are arranged on the experiment platform module.
The calibration method of the linear sensor calibration device based on the extreme environment comprises the following specific steps:
step 1: the two-dimensional air floatation moving table, the calibrated sensor supporting module and the extreme environment module are arranged on the experiment platform module, and the displacement transfer rod, the laser interferometer and the calibrated sensor are arranged on the experiment platform module.
Step 2: the cables of the calibrated sensor, the laser interferometer, the displacement driving module, the upper computer module, the electric control module and the like are connected and grounded, and the device can work normally after debugging.
Step 3: performing a pre-experiment, setting the temperatures of a laboratory environment and a high-low temperature box to be 20+/-2 ℃, and determining the angle between the light of the laser interferometer and the motion direction of the two-dimensional air floatation moving table in a normal-temperature environment to obtain a linear-change system error; after the temperature is stable, reading an indication value l2 of the laser interferometer and an indication value l1 of the calibrated sensor, and obtaining the verification and calibration value of the calibrated sensor at the room temperature point by calculating Deltal=l1-l 2.
Step 4: after the pre-experiment data are reasonable, starting a formal experiment: setting corresponding verification temperature points of the high-low temperature box, and heating (cooling) the high-low temperature box to 100 ℃ (-100 ℃) by taking 20 ℃ as a step length; after the heat stability of the parts in the high-low temperature box, the upper computer module controls the two-dimensional air floatation moving table to move to a displacement point required by verification and calibration, reads the indication value l2' of the laser interferometer and the indication value l1' of the calibrated sensor, and calculates Deltal ' =l1 ' -l2' to obtain the verification and calibration value of the calibrated sensor at the set temperature point.
Compared with the prior art, the invention has the following beneficial effects:
1. the calibration device for the linear sensor in the extreme environment can calibrate the linear sensor in the high-low temperature environment (-100 ℃), and trace the measurement result to the national length standard.
2. According to the invention, the vertical displacement transmission rod is adopted to install the reflecting mirror and the calibrated sensor in the laser interferometer on the same vertical line, and because the expansion and contraction quantity of the transmission rod is vertical to the displacement direction, the expansion quantity of the displacement transmission rod in the vertical direction caused by high and low temperature does not influence the precision of displacement measurement in the horizontal direction.
3. The invention uses the two-dimensional air-floating moving table as a transmission part, the two-dimensional air-floating moving table has high precision (+ -0.3 mu m) and smaller self-angle pendulum (+ -1.0 arc sec), and the whole moving process can be ensured to be stable and accurate.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an extreme environment linear sensor calibration device of the present invention;
FIG. 2 is a schematic diagram of the mounting structure on the experimental platform module of the extreme environment linear sensor calibration device of the present invention;
FIG. 3 is a schematic view of the support structure of the in-line sensor calibration apparatus of the extreme environment of the present invention;
FIG. 4 is a flow chart of uncertainty analysis and assessment of an extreme environment linear sensor calibration apparatus of the present invention.
In the figure: 1. an electric control box; 2. an experiment platform module; 3. a high-low temperature box; 4. a portal frame; 5. an L-shaped support plate; 6. a displacement transmission rod; 7. a two-dimensional air-floating motion platform; 8. a laser interferometer reference mirror; 9. a tripod; 10. a laser emission head of a laser interferometer; 11. an optical precision stage; 12. a calibrated sensor; 13. a laser interferometer mirror; 14. a portal frame bottom support; 15. a portal frame cross plate; 16. a portal frame upright post; 17. a limiting block; 18. reinforcing ribs.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
The device for calibrating the linear sensor in the extreme environment comprises an upper computer module, an electric control module, a displacement driving module, an extreme environment module, a standard length measuring module, a calibrated sensor supporting module, a displacement transmission module and an experiment platform module, wherein the upper computer module, the electric control module, the displacement driving module and the standard length measuring module are electrically connected, and the extreme environment module, the displacement driving module, the standard length measuring module and the calibrated sensor supporting module are arranged on the experiment platform module 2.
In this embodiment, the upper computer module is used for controlling the motion of the two-dimensional air-floating motion platform, reading the data of the calibrated sensor 12, storing and analyzing the data, and printing the report, and is installed in the electric cabinet 1.
In this embodiment, the electrical control module is composed of modules such as an industrial controller, a data acquisition card, a high-precision power supply, etc., so as to realize real-time acquisition and instruction issue of data, and the electrical control module is integrally installed in the electric cabinet 1.
In this embodiment, the displacement driving module is composed of a servo motor and a two-dimensional air-floating moving table 7, so as to control the calibrated sensor 12 to move synchronously with the standard length measuring module. The two-dimensional air floatation moving table has high precision (+ -0.3 mu m) and small self-angle pendulum (+ -1.0 arc sec), and can ensure the stability and accuracy of the whole moving process.
In this embodiment, the extreme environment module adopts a high-low temperature box 3, and is composed of a heating module, a refrigerating module and a temperature detection module, so as to realize the extreme environment conditions required during calibration and detection. The refrigerating module adopts an air compressor, and can realize the temperature environment of minus 100 ℃ through three-stage air compressors. The heating module adopts a resistance wire to heat and carries out temperature detection through a platinum thermal resistor, so that the internal environment temperature of the high-low temperature box 3 can be heated to 100 ℃ at most.
The bottom of the high-low temperature box 3 is provided with a moving groove, and the purpose of heat preservation in the box body is achieved by adopting a folding heat insulation material.
In this embodiment, the standard length measurement module includes a laser interferometer composed of a laser interferometer mirror 13, a laser interferometer reference mirror 8, a laser interferometer laser emission head 10, and a tripod 9.
In this embodiment, the calibrated sensor support module is composed of an L-shaped support plate 5 and two portal frames 4, wherein the portal frames comprise a portal frame bottom support 14, a portal frame transverse plate 15 and a portal frame upright rod 16, and the structural materials are all processed by Q235 materials. The portal frame is provided with the strengthening rib 18 at the footing, can guarantee the stability of whole structure, and L type backup pad still provides table surface simultaneously, can satisfy the sensor of being proofreaded of different structures, has promoted the universality of device. The stopper 17 is arranged on the L-shaped supporting plate and is connected with the displacement transmission rod through threads.
In this embodiment, the displacement transmission module is composed of a displacement transmission rod 6.
In this embodiment, the experimental platform module 2 includes a marble platform with higher stability and an optical precision platform 11 with better flatness, and the influence of temperature variation on the experimental platform module is reduced to the greatest extent while the extreme environment module is supported.
In this embodiment, the displacement transfer rod 6 is vertically installed on the two-dimensional air-floating moving table 7, and the reflecting mirror 13 of the laser interferometer and the calibrated sensor 12 are installed on the same vertical line, so as to play a role in transferring displacement, and the expansion amount of the displacement transfer rod in the vertical direction caused by high and low temperatures does not affect the precision of displacement measurement in the horizontal direction.
Specifically, the portal frame 4 is installed and fixed on the optical precision platform 11, the high-low temperature box 3 is arranged on the experimental platform module 2, and two sides of the L-shaped supporting plate 5 are installed in the high-low temperature box 3 through the two portal frames 4. The displacement transfer rod 6 is vertically arranged on the two-dimensional air floatation moving table 7 through threaded connection, the calibrated sensor 12 is arranged on the L-shaped supporting plate, and the calibrated sensor is connected with the displacement transfer rod 6 through a limiting block 17, so that the aim of synchronous displacement is fulfilled. The laser interferometer reference mirror 8 is arranged on the tripod 9 so as to adjust the light path; the laser interferometer laser emission head 10 is mounted on the tripod 9 by a threaded connection. The L-shaped supporting plate is provided with a limiting block 17, and the calibrated sensor 12 is prevented from adopting a slightly larger limiting block 17 to control the calibrated sensor to move, so that the up-down asynchronous movement is prevented.
The calibration method of the extreme environment linear sensor calibration device comprises the following steps:
step 1: the method comprises the steps of installing a two-dimensional air floatation moving table, a calibrated sensor supporting module and an extreme environment module, vertically installing a displacement transmission rod on the two-dimensional air floatation moving table, and installing a laser interferometer, wherein a laser interferometer reflecting mirror is installed at the lower end of the displacement transmission rod, and a calibrated sensor is installed on an L-shaped cross beam in a high-low temperature box.
Step 2: the calibrated sensor, the laser interferometer, the displacement driving module, the upper computer module, the electric control module and other cables are connected, the grounding is ensured, the upper computer module, the electric control module, the displacement driving module and the standard length measuring module are debugged, and the device can work normally.
Step 3: and (3) carrying out a pre-experiment to determine the angle between the light of the laser interferometer and the motion direction of the two-dimensional air floatation moving platform in the normal temperature environment, thereby determining the linear change system error. Setting the temperature of a laboratory environment and a high-low temperature box to be 20+/-2 ℃, reading an indication value l2 of a laser interferometer and an indication value l1 of a calibrated sensor after the temperature is stable, and obtaining the verification calibration value of the calibrated sensor at a room temperature point by calculating delta l=l1-l 2.
Step 4: after the pre-experiment data are reasonable, starting a formal experiment: and opening the high-low temperature box to set corresponding verification temperature points. In the detection process, the temperature of the high-low temperature box is raised (lowered) to 100 ℃ (-100 ℃) by taking 20 ℃ as a step length. After the parts in the high-low temperature box are thermally stable, the upper computer module controls the two-dimensional air floatation moving table to move to a displacement point required by verification and calibration. Reading an indication value l2' of the laser interferometer and an indication value l1' of the calibrated sensor, and obtaining the verification calibration value of the calibrated sensor at the current temperature point by calculating Deltal ' =l1 ' -l2 '.
Specifically, the final measurement result of the linear displacement sensor to be detected can be traced to the national length reference.
The uncertainty evaluation flow and method for the device are shown in fig. 4. The main components affecting the uncertainty of the extreme environmental length standard device are respectively: uncertainty component u caused by single frequency laser interferometer 1 The method comprises the steps of carrying out a first treatment on the surface of the Uncertainty component u caused by parallelism of laser interferometer and two-dimensional air floatation platform 2 The method comprises the steps of carrying out a first treatment on the surface of the Uncertainty component u caused by parallelism of two-dimensional air bearing table and installation position of calibrated sensor 3 The method comprises the steps of carrying out a first treatment on the surface of the Uncertainty component u caused by resolution of device itself 4 The method comprises the steps of carrying out a first treatment on the surface of the Uncertainty component u caused by repeatability of the overall device 5 . Wherein the uncertainty component u 1 ～u 4 Adopting a standard uncertainty B type evaluation method, wherein an uncertainty component u 5 And adopting a standard uncertainty class A assessment method. The uncertainty components are not related to each other, and the transfer coefficient can be regarded as 1, so that the synthetic standard uncertainty of the length standard device is
When the expansion factor k is taken, the expansion uncertainty of the length standard device is obtained as follows: u=ku c Thus, the uncertainty assessment of the whole device is completed.
The foregoing is only a preferred embodiment of the present invention, and the present invention is not limited thereto, and any simple modification, variation and equivalent structural changes made to the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.
Claims (1)
1. A calibration method of an extreme environment linear sensor calibration device is characterized by comprising the following steps of: the device comprises an upper computer module, an electrical control module, a displacement driving module, an extreme environment module, a standard length measuring module, a calibrated sensor supporting module, a displacement transmission module and an experiment platform module;
the standard length measurement module comprises a tripod and a laser interferometer consisting of a laser interferometer reflecting mirror, a laser interferometer reference mirror and a laser emission head of the laser interferometer;
the displacement driving module consists of a servo motor and a two-dimensional air floatation moving table and is used for controlling the calibrated sensor to synchronously move with the standard length measuring module;
the displacement transmission module consists of a displacement transmission rod and is vertically arranged on the two-dimensional air floatation moving platform;
the upper computer module is used for controlling the motion of the two-dimensional air floatation moving platform, reading the data of the calibrated sensor, storing and analyzing the data and printing a report;
the electric control module consists of an industrial controller, a data acquisition card and a high-precision power module so as to realize real-time acquisition of data and instruction release;
the extreme environment module adopts a high-low temperature box and consists of a heating module, a refrigerating module and a temperature detection module, wherein the heating module adopts a resistance wire for heating, the temperature detection is carried out through a platinum thermal resistor, and the temperature environment of-100 ℃ can be realized through a three-stage air compressor;
the calibrated sensor supporting module consists of an L-shaped supporting plate and two portal frames, wherein the calibrated sensor is arranged on the L-shaped supporting plate, and the L-shaped supporting plate provides a workbench surface for the calibrated sensors with different structures;
the experiment platform module comprises a marble platform and an optical precision platform; the upper computer module, the electrical control module, the displacement driving module and the standard length measuring module are electrically connected;
the extreme environment module, the displacement driving module, the laser interferometer reflector and the calibrated sensor supporting module are arranged on the experiment platform module;
two sides of the L-shaped supporting plate are arranged in the high-low temperature box through two portal frames; a limiting block is arranged on the L-shaped supporting plate and is connected with a displacement transmission rod through threads; the calibrated sensor is connected with the displacement transmission rod through a limiting block so as to achieve the purpose of synchronous displacement;
the laser interferometer reflector is arranged at the lower end of the displacement transmission rod, and the laser interferometer reflector and the calibrated sensor are arranged on the same vertical line;
the calibration method comprises the following steps:
step 1, a two-dimensional air floatation moving table, a calibrated sensor supporting module and an extreme environment module are installed, a displacement transmission rod is vertically installed on the two-dimensional air floatation moving table, a laser interferometer is installed, wherein a reflecting mirror of the laser interferometer is installed at the lower end of the displacement transmission rod, and a calibrated sensor is installed on an L-shaped cross beam in a high-low temperature box;
step 2, connecting cables of the calibrated sensor, the laser interferometer, the displacement driving module, the upper computer module and the electric control module, ensuring the grounding, debugging the upper computer module, the electric control module, the displacement driving module and the standard length measuring module, and ensuring the normal operation of the device;
step 3, performing a pre-experiment to determine the angle between the light of the laser interferometer and the motion direction of the two-dimensional air floatation moving platform in the normal temperature environment, thereby determining the linear change system error; setting the temperatures of a laboratory environment and a high-low temperature box to be 20+/-2 ℃, reading an indication value l2 of a laser interferometer and an indication value l1 of a calibrated sensor after the temperatures are stable, and obtaining a verification calibration value of the calibrated sensor at a room temperature point by calculating delta l=l1-l 2;
and 4, after the pre-experiment data are reasonable, starting a formal experiment: starting a high-low temperature box to set corresponding verification temperature points; in the detection process, the temperature of the high-low temperature box is raised to 100 ℃ or lowered to-100 ℃ by taking 20 ℃ as a step length; after the parts in the high-low temperature box are thermally stable, the upper computer module controls the two-dimensional air floatation moving table to move to a displacement point required by verification and calibration; reading an indication value l2' of the laser interferometer and an indication value l1' of the calibrated sensor, and obtaining a verification calibration value of the calibrated sensor at the current temperature point by calculating Deltal ' =l1 ' -l2 ';
acquiring uncertainty components of the device: an uncertainty component u1 caused by the single-frequency laser interferometer itself; uncertainty component u2 caused by parallelism of the laser interferometer and the two-dimensional air floatation platform; uncertainty component u3 caused by parallelism of the two-dimensional air bearing table and the installation position of the calibrated sensor; an uncertainty component u4 caused by the resolution of the device itself; an uncertainty component u5 caused by the repeatability of the whole device; all uncertainty components are not related to each other, and the transfer coefficient is 1, so the synthetic standard uncertainty of the length standard device is
When the expansion factor k is taken, the expansion uncertainty of the length standard device is obtained as follows: u=ku c 。/>
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