CN113701658B - Thermal deformation detection device and method for absolute grating ruler in non-uniform temperature field - Google Patents
Thermal deformation detection device and method for absolute grating ruler in non-uniform temperature field Download PDFInfo
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- CN113701658B CN113701658B CN202111018680.6A CN202111018680A CN113701658B CN 113701658 B CN113701658 B CN 113701658B CN 202111018680 A CN202111018680 A CN 202111018680A CN 113701658 B CN113701658 B CN 113701658B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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Abstract
The invention relates to a device and a method for detecting thermal deformation of an absolute grating ruler under a non-uniform temperature field, which relate to the technical field of absolute grating ruler detection and solve the problem that the accuracy of a thermal deformation detection result of the absolute grating ruler in a full measurement range is difficult to guarantee because a constant temperature and the non-uniform temperature field of the actual operation of the absolute grating ruler are different in the prior art. In addition, by setting reasonable loading temperature and position and considering the aging effect of temperature, the detection device can also carry out an accelerated life test of the absolute grating ruler and is used for researching the performance degradation mechanism of the absolute grating ruler in actual working conditions. The invention is used as a laboratory detection device for the full measurement range error of the absolute grating ruler, and the result shows that the detection precision is greatly improved.
Description
Technical Field
The invention relates to the technical field of absolute grating ruler detection, in particular to a thermal deformation detection device of an absolute grating ruler in a non-uniform temperature field.
Background
The absolute grating ruler is widely applied to machine tool machining, operation and test systems, and due to unstable measurement accuracy in a life cycle of the domestic absolute grating ruler, approximately 85% of domestic market share is occupied by foreign brands, so that key functional devices such as gratings, servo motors and the like are listed as key targets of attacking and customs in 2025 (China manufacture). The absolute grating ruler has complex and various working environments, and the continuous change of environmental stress such as temperature, humidity, vibration and the like can cause the precision degradation phenomenon to gradually occur in the service life, wherein 40% -70% of the precision degradation phenomenon is caused by thermal deformation.
At present, all absolute grating ruler thermal deformation measuring devices measure several appointed positions on a grating ruler by using the characteristics and readings of the grating ruler in a constant temperature environment, and finish detection by comparing the measured results with the measured results of a laser interferometer. However, the constant temperature and the non-uniform temperature field of the absolute grating ruler in actual operation have a large difference, so that the accuracy of the thermal deformation detection result of the absolute grating ruler in the full measurement range is difficult to guarantee. Therefore, it is necessary to establish a thermal deformation detection device for an absolute grating ruler under a non-uniform temperature field.
Based on the above description, the invention provides a thermal deformation detection device for an absolute grating ruler under a non-uniform temperature field, which simulates the non-uniform temperature field in the actual working condition of the absolute grating ruler, detects the thermal deformation of the absolute grating ruler in the whole measurement range, is used for exploring the thermal deformation rule of the absolute grating ruler in the actual working condition, and improves the measurement precision of the absolute grating ruler. In addition, by setting reasonable loading temperature and position and considering the aging effect of temperature, the detection device can also carry out an accelerated life test of the absolute grating ruler and is used for researching the performance degradation mechanism of the absolute grating ruler in actual working conditions.
Disclosure of Invention
The invention provides a thermal deformation detection device of an absolute grating ruler under a non-uniform temperature field, aiming at solving the problem that the accuracy of a thermal deformation detection result of the absolute grating ruler in a full measurement range is difficult to guarantee due to the fact that the non-uniform temperature field which adopts constant temperature and actually runs by the absolute grating ruler in the prior art has larger difference.
The device for detecting the thermal deformation of the absolute grating ruler in the non-uniform temperature field comprises a temperature control box, a carrying platform and a bracket thereof, a laser interferometer, a directional infrared heating device, a temperature sensor, the absolute grating ruler, a sliding block, a guide rail, an SLP25 high-precision displacement system, a displacement system carrying platform, a data acquisition card and an upper computer;
the non-uniform temperature field is a detection environment generated by collecting environment temperature and external heat source information in a typical working condition of the absolute grating ruler, such as motor heat dissipation and front and rear bearing heat conduction in machine tool machining, simulating the environment and the external heat source of the typical working condition of the absolute grating ruler by using a solid heat conduction module of finite element simulation software, then carrying out thermal deformation analysis on a simulation model of the absolute grating ruler by using a solid mechanics module and a multi-physical field coupling analysis module, obtaining an external temperature loading spectrum of the absolute grating ruler according to a simulation analysis result, and finally applying the external temperature loading spectrum to the absolute grating ruler by using a test device.
The temperature control box is used for providing a detection space, monitoring the temperature of the box body and heating or refrigerating the temperature in the box.
The carrying platform and the bracket thereof are fixed in the temperature control box and are used for supporting various detection devices.
The laser emitter is arranged outside the temperature control box, a laser transmission window is reserved on the temperature control box, the measuring head is fixed on the carrying platform, and the reflector is fixed on the sliding block and used for measuring the position information of the absolute grating ruler in the whole measuring range under the non-uniform temperature field.
The directional infrared heating device is fixed on a box body of the temperature control box and used for simulating an external heat source to heat two ends of the main scale of the absolute type grating scale, and the directional infrared heating device and the control cabinet are arranged outside the temperature control box.
The temperature sensor is arranged on the main scale of the absolute grating scale and used for collecting the temperature change of the main scale of the absolute grating scale in the detection process.
The main scale of the absolute grating scale is arranged on the object carrying platform, and the reading head is arranged on the sliding block and used for measuring the position information of the full measuring range of the absolute grating scale under the non-uniform temperature field.
The slider is installed on the guide rail and is connected with SLP25 high accuracy displacement system, drives reflector and reading head through the slider and removes the detection that realizes absolute grating chi full measurement range.
The SLP25 high-precision displacement system is installed on a displacement system bearing platform, and the detection requirement of the absolute grating ruler in the full measurement range is met by utilizing the characteristics of simple structure, high precision, high movement speed and high movement acceleration of the SLP25 high-precision displacement system.
The displacement system bearing platform is fixed on the support and used for supporting the SLP25 high-precision displacement system to operate.
The data acquisition card is used for acquiring data of the absolute grating ruler and the temperature sensor and generating operation instructions to the laser interferometer, the directional infrared heating device and the SLP25 high-precision displacement system.
The upper computer is used for sending an instruction for starting or finishing detection to the data acquisition card and receiving detection data from the laser interferometer and the data acquisition card, and determining the thermal deformation of the absolute grating ruler in the non-uniform temperature field in the whole measurement range by comparing the position information measured by the reading head and the position information measured by the laser interferometer in the whole measurement range of the absolute grating ruler.
The invention has the beneficial effects that:
the detection device for detecting the thermal deformation of the absolute grating ruler under the nonuniform temperature field improves the accuracy of the detection result and is beneficial to improving the measurement precision of the absolute grating ruler by simulating the nonuniform temperature field close to the actual working condition and detecting the thermal deformation of the absolute grating ruler within the whole measurement range. In addition, by setting reasonable loading temperature and position and considering the aging effect of temperature, the detection device can also carry out an accelerated life test of the absolute grating ruler and is used for researching the performance degradation mechanism of the absolute grating ruler in actual working conditions.
The invention is used as one of absolute grating ruler full-measurement-range error laboratory detection devices, and the result shows that the detection precision is greatly improved.
Drawings
FIG. 1 is a schematic structural diagram of a thermal deformation detection device of an absolute grating ruler in a non-uniform temperature field;
FIG. 2 is a schematic diagram of signal processing of a thermal deformation detection device of an absolute grating ruler in a non-uniform temperature field;
fig. 3 is an operation flowchart of the thermal deformation detection device of the absolute grating ruler in the non-uniform temperature field.
Detailed Description
The present embodiment is described with reference to fig. 1 to 3, in which the non-uniform temperature field in the present embodiment refers to a detection environment generated by collecting environmental temperature and external heat source information in a typical working condition of the absolute grating scale, such as heat dissipation of a motor and heat conduction of front and rear bearings in machine tool processing, simulating an environment and an external heat source of the typical working condition of the absolute grating scale by using a "solid heat conduction" module of finite element simulation software, then performing thermal deformation analysis of a simulation model of the absolute grating scale by using a "solid mechanics" and "multi-physical field coupling analysis" module, obtaining an external temperature loading spectrum of the absolute grating scale according to a simulation analysis result, and finally applying the external temperature loading spectrum to the absolute grating scale by using a test device.
The thermal deformation detection device of the absolute grating ruler in the non-uniform temperature field in the embodiment comprises a test device in a temperature control box, as shown in fig. 1, a temperature control box 1 is used for providing a detection space and controlling the air temperature, a loading platform 2 is used for bearing the detection device and is fixed on a support, a laser emitter 3-1 is arranged outside the temperature control box 1, a laser transmission window is reserved on the temperature control box 1, a measuring head 3-2 is fixed on the loading platform 2-1, a reflector 3-3 is fixed on a sliding block 7 and is used for simulating an external heat source to heat two ends of a main ruler 6-1 of the absolute grating ruler, a control cabinet 4-3 of a directional infrared heating device 4-1 and a control cabinet 4-3 of the directional infrared heating device 4-2 are arranged outside the temperature control box 1, the main ruler 6-1 of the absolute grating ruler is installed on the loading platform 2, a reading head 6-2 is installed on the sliding block 7, a plurality of temperature sensors 5 (more than 10) are installed on the main scale 6-1 of the absolute grating scale and used for collecting temperature changes of the main scale 6-1 of the absolute grating scale in the detection process, a sliding block 7 is installed on a guide rail 8 and connected with an SLP25 high-precision displacement system 9, a reflector 3-3 and a reading head 6-2 are driven to move through the sliding block to achieve detection of the whole measurement range of the absolute grating scale, and a displacement system bearing platform 10 is fixed on a support and used for supporting operation of the SLP25 high-precision displacement system 9.
The device for detecting the thermal deformation of the absolute grating ruler in the non-uniform temperature field is also composed of a signal processing circuit outside a temperature control box, and comprises a data acquisition card 11, a laser interferometer 3, a control cabinet 4-3 of a directional infrared heating device and an SLP25 high-precision displacement system 9, wherein the data acquisition card 11 is used for acquiring data of the absolute grating ruler 6 and a temperature sensor 5 and generating an operation instruction to the laser interferometer 3, the control cabinet 4-3 of the directional infrared heating device and the SLP25 high-precision displacement system 9, and an upper computer 12 is used for sending an instruction for starting or finishing detection to the data acquisition card 11 and receiving detection data from the laser interferometer 3 and the data acquisition card 11, and determining the thermal deformation of the absolute grating ruler in the non-uniform temperature field in the full measurement range by comparing position information measured by a reading head 6-2 and position information measured by the laser interferometer 3 in the full measurement range of the absolute grating ruler.
The operation flow of the absolute grating ruler thermal deformation detection device under the non-uniform temperature field is shown in fig. 3, the environment temperature and external heat source information under the typical working condition of the absolute grating ruler are collected, the environment and the external heat source under the typical working condition of the absolute grating ruler are simulated by using a solid heat conduction module of finite element simulation software, then the thermal deformation analysis of an absolute grating ruler simulation model is carried out by using a solid mechanics module and a multi-physical field coupling analysis module, and the external temperature loading spectrum of the absolute grating ruler is obtained according to the simulation analysis result. The upper computer 12 sends a detection starting instruction and then sends the temperature loading spectrum to the temperature control box 1 and the control cabinet 4-3 of the directional infrared heating device, the two ends of the absolute grating ruler main scale 6-1 are heated through the directional infrared devices 4-1 and 4-2, air temperature is set, and a non-uniform temperature field required by detection is generated. The upper computer 12 sets a detection starting point and sends a moving instruction to the SLP25 high-precision displacement system 9, and the SLP25 high-precision displacement system 9 is used for controlling the reflector 3-3 and the reading head 6-2 on the slider 7, so that the detection of the full measurement range of the absolute grating ruler is realized. The data acquisition card 11 records the position information of the absolute grating ruler provided by the reading head 6-2 and the temperature information of the main ruler 6-1 of the absolute grating ruler measured by the temperature sensor 5, and simultaneously sends a fast pulse to the laser interferometer 3 to guide the laser interferometer 3 to complete the position information measurement of the absolute grating ruler at the same time. The laser interferometer 3 sends the position information of the absolute grating ruler to the upper computer 12, and after the detection of the full measurement range of the absolute grating ruler is completed, the upper computer 12 sends a detection ending instruction and calculates the thermal deformation of the full measurement range of the absolute grating ruler in the non-uniform temperature field by using the following formula.
Δδ(x,T)＝|δ 1 (x,T)-δ 2 (x,T)| (1)
Wherein, x represents the measuring point on the full measuring range of the absolute grating ruler, T represents the main ruler temperature corresponding to each measuring point, delta 1 (x, T) is absolute grating ruler position information measured by a laser interferometer, delta 2 (x, T) is position information measured by the reading head, delta (x, T) represents the thermal deformation of the absolute grating ruler in the whole measuring range, and delta is taken 1 (x, T) and delta 2 Absolute value of (x, T) difference. By analyzing delta (x, T), the relation between the same thermal deformation position and temperature of the absolute grating ruler can be explored in a non-uniform temperature field, so that a more effective thermal compensation algorithm can be provided, and the measurement precision of the absolute grating ruler can be improved.
Claims (3)
1. The device for detecting the thermal deformation of the absolute grating ruler in the nonuniform temperature field comprises a temperature control box (1), a bracket type carrying platform (2), a laser interferometer (3), a directional infrared heating device (4), a temperature sensor (5), the absolute grating ruler (6), a sliding block (7), a guide rail (8), a high-precision displacement system (9), a displacement system bearing platform (10), a data acquisition card (11) and an upper computer (12); it is characterized in that;
the bracket type carrying platform (2) is fixed in the temperature control box (1),
the displacement system bearing platform (10) is fixed on a support of the support type carrying platform (2), and the high-precision displacement system (9) is fixed on the displacement system bearing platform (10);
a measuring head (3-2) of the laser interferometer (3) is fixed on the bracket type carrying platform (2);
the absolute grating ruler (6) and the guide rail (8) are both fixed on the loading platform (2-1) and are arranged in parallel with the high-precision displacement system (9); the sliding block (7) is installed on the guide rail (8) and connected with the high-precision displacement system (9), the reflector (3-3) and the reading head (6-2) are fixed on the sliding block (7), and the reflector (3-3) and the reading head (6-2) are driven to move by the sliding block (7) to realize the detection of the full measurement range of the absolute grating ruler to be detected;
the directional infrared heating device (4) is fixed on a box body of the temperature control box (1), and the temperature sensor (5) is arranged on a main scale (6-1) of the absolute grating scale (6);
the data acquisition card (11) is used for acquiring data of the absolute grating ruler (6) and the temperature sensor (5) and sending an operation instruction to the laser interferometer (3), the directional infrared heating device (4) and the high-precision displacement system (9);
the upper computer (12) sends an instruction for starting or ending detection to the data acquisition card (11) and receives detection data from the laser interferometer (3) and the data acquisition card (11), and thermal deformation of the absolute grating ruler in the non-uniform temperature field in the full measurement range is determined by comparing position information measured by the reading head (6-2) and position information measured by the laser interferometer (3) in the full measurement range of the absolute grating ruler;
the specific detection method is realized by the following steps:
step one, after an upper computer (12) sends a detection starting instruction, a temperature loading spectrum is sent to a temperature control box (1) and a control cabinet (4-3) of a directional infrared heating device, two directional infrared devices are used for heating two ends of a main scale (6-1) of an absolute grating scale and setting air temperature, and a non-uniform temperature field required by detection is generated;
the upper computer (12) is provided with a detection starting point and sends a moving instruction to the high-precision displacement system (9), and the high-precision displacement system (9) is used for controlling the reflector (3-3) and the reading head (6-2) on the sliding block (7) to realize the detection of the full measurement range of the absolute grating ruler to be detected;
step two, the data acquisition card (11) records the absolute grating ruler position information read by the reading head (6-2) and the temperature information of the absolute grating ruler main ruler (6-1) measured by the temperature sensor (5), and simultaneously sends a pulse signal to the laser interferometer (3) to guide the laser interferometer (3) to complete the measurement of the absolute grating ruler position information to be measured at the same time;
step three, the laser interferometer (3) sends the position information of the absolute grating ruler to be measured to an upper computer (12), and after the detection of the full measurement range of the absolute grating ruler to be measured is completed, the upper computer (12) sends a detection ending instruction and calculates the thermal deformation of the full measurement range of the absolute grating ruler to be measured in the non-uniform temperature field;
calculating the thermal deformation of the absolute grating ruler to be measured in the non-uniform temperature field in the full measurement range by the following formula:
Δδ(x,T)＝|δ 1 (x,T)-δ 2 (x,T)|
in the formula, x is a measuring point on the full measuring range of the absolute grating ruler to be measured, T is the main ruler temperature of the absolute grating ruler corresponding to each measuring point, and delta 1 (x, T) is the absolute grating ruler position information to be measured by the laser interferometer, delta 2 And (x, T) is position information measured by the reading head, and delta (x, T) is the thermal deformation of the full measurement range of the absolute grating ruler to be measured.
2. The device for detecting the thermal deformation of the absolute grating ruler under the nonuniform temperature field according to claim 1, wherein:
the two directional infrared heating devices are fixed on the box body of the temperature control box (1) and used for simulating an external heat source to heat the two ends of the main scale (6-1) of the absolute grating scale, and the control cabinets (4-3) of the two directional infrared heating devices are arranged outside the temperature control box (1).
3. The device according to claim 1, wherein the device comprises: the laser emitter (3-1) of the laser interferometer (3) is arranged outside the temperature control box (1).
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