CN103913479A - Device for detecting thermal expansion coefficient of grating ruler - Google Patents
Device for detecting thermal expansion coefficient of grating ruler Download PDFInfo
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- CN103913479A CN103913479A CN201410116780.6A CN201410116780A CN103913479A CN 103913479 A CN103913479 A CN 103913479A CN 201410116780 A CN201410116780 A CN 201410116780A CN 103913479 A CN103913479 A CN 103913479A
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- grating scale
- temperature
- thermal expansivity
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- 238000005259 measurement Methods 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 2
- 239000003550 marker Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 4
- 238000009529 body temperature measurement Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000886545 Leptodea leptodon Species 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007572 expansion measurement Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to a device for detecting a thermal expansion coefficient of a grating ruler and solves the problem of thermal expansion in an existing grating measurement technology. The device comprises a constant-temperature device, a length measurement device, a grating ruler fixing frame and a signal processing circuit, wherein the constant-temperature device comprises a temperature measurement element and a temperature control element. The length measurement device is used for measuring a position value subjected to temperature correction of a reading head of the grating ruler; the grating ruler fixing frame is used for fixing a grating ruler to be detected; the grating ruler to be detected is a grating ruler of a position reading which is not subjected to temperature compensation; the signal processing circuit is used for processing length signals from the grating ruler and the length measurement device and a temperature signal from a temperature sensor, so as to obtain the thermal expansion coefficient of the grating ruler to be detected.
Description
Technical field
The present invention relates to a kind of device for detection of grating scale thermal expansivity, for the thermal expansivity of Measurement accuracy grating scale.
Background technology
Grating scale (also claiming optical grid line displacement sensor) is the position read out device that modern displacement measurement system generally adopts, be divided into open type and closed from structure, comprise steel belt grating chi and glass raster chi from material point, divide and comprise increment type grating scale and absolute grating scale from function, the grating scale of these types is widely used in machine tool industry and other processing, in manipulation and pilot system, because processing environment complexity is various, temperature contrast is large, add that to produce the part of temperature man-hour inhomogeneous etc., all there is thermal expansion effects, if thermal expansion is not compensated, machining precision will be subject to larger impact.
Thermal expansion is compensated, first will know the thermal expansivity of grating scale, just can revise grating scale reading by thermal expansivity.
The measurement of typical thermal expansivity comprises optical lever survey expansion coefficients of metal wire, and application is now that in constant temperature oven, interferometric method is measured thermal expansivity more widely.But these measuring methods are to be mainly all for specific material, and often for be a kind of material, the complex of many kinds of substance often of grating scale, such as closed glass grating scale is the complex of glass bonding to metal scale shell, its thermal expansivity is no longer the thermal expansivity that simplification studies timesharing, but the interactional result of multiple material, secondly, grating scale global shape is irregular, glass main scale is in chi shell inside, the thermal expansivity usual way that detects glass in grating scale has larger difficulty, even not applicable.If can utilize the feature of grating scale own and reading, detect thermal expansivity in conjunction with laser interferometer, so not only simple in structure, easy to operate, and reliable results.
Summary of the invention
The present invention is the problem that solves the thermal expansion occurring in existing grating measuring technology, and reliable temperature compensation coefficient is provided, and a kind of device for detection of grating scale thermal expansivity based on grating scale product is provided.
A kind of device for detection of grating scale thermal expansivity, comprise enclosed housing, described case is for the thermostat of air themperature in constant casing, for measuring the standard measuring motion of grating ruler reading head to be measured position, for measuring the second temperature-measuring element and the signal processing apparatus of main scale material temperature of grating scale to be measured; It is characterized in that, by the same tested point of different temperatures on point location main scale identical grating scale reading to be measured; Standard measuring motion is measured the distance between different tested points on grating scale to be measured, described signal processing apparatus is according on different temperature spots, and the distance between the measurement point that standard measuring motion is measured and the variable quantity of this distance under different temperatures calculate the thermal expansivity of grating scale section between these two measurement points.
Beneficial effect of the present invention: the structure of device of the present invention and measuring method are specially for the feature of grating scale compound substance, utilize the positioning function of grating scale reading itself, effectively solve two ends orientation problem crucial in thermal expansion measurement technology, matching standard measuring motion, utilize multimetering, the thermal expansivity of grating scale can not only be measured, and the variation of thermal expansivity on grating scale can be obtained.
Brief description of the drawings
Fig. 1 is the structural representation of a kind of device for detection of grating scale thermal expansivity of the present invention;
Fig. 2 is of the present invention a kind of for detection of signal connection diagram in the device of grating scale thermal expansivity;
Fig. 3 is the operating process block diagram that adopts a kind of device for detection of grating scale thermal expansivity of the present invention.
Embodiment
Embodiment one, in conjunction with Fig. 1 to Fig. 3, present embodiment is described, a kind of device for detection of grating scale thermal expansivity, comprises, a pick-up unit casing 1, as the closed box of whole device; One thermostat 2, for the air themperature of constant pick-up unit casing 1 inside, this thermostat further comprises the first temperature-measuring element 2-2, for measuring the air themperature of this measurement box house, one temperature control component 2-1, according to the reading of the first temperature-measuring element, this pick-up unit casing is heated or freezed; One standard measuring motion 3, measures grating scale to be measured 5 read head positions; One grating scale stationary installation 6, for fixing grating scale 5 to be detected; Be fixed on worktable 7; One second temperature-measuring element, for measuring the material temperature of grating scale main scale to be measured; One signal processing apparatus, for the treatment of the signal from grating scale 5 to be detected, standard side growth device 3, temperature-measuring element and obtain Coefficient of Thermal Expansion value; The same tested point under upper point location grating scale main scale to be detected 5-1 identical grating scale 5 readings to be detected different temperatures, standard measuring motion 3 is measured the distance between different tested points on grating scale 5 to be measured, the second temperature-measuring element 4 is measured the material temperature of grating scale main scale 5-1 to be measured, signal processing apparatus 9 is according on different temperature spots, and the distance between the measurement point that standard measuring motion 3 is measured and the variable quantity of this distance under different temperatures calculate the thermal expansivity of grating section between these two measurement points.
Grating scale to be measured described in present embodiment is absolute grating scale, or is the increment type grating scale with reference marker.Described standard measuring motion 3 can be laser interferometer or the grating scale with temperature compensation function.Described grating scale to be measured can be reflective or transmission-type.
In present embodiment, near same temperature point, for the tested point of two of a grating scale section to be detected, two different temperatures, measure respectively the distance between these two temperature values and this two tested points, as one group of measurement data, and calculate corresponding thermal expansivity, repeat altogether n time (n is more than or equal to 2) of this process, the thermal expansivity using the arithmetic mean of the thermal expansivity obtaining for n time as between these two tested points.Near same temperature, m tested point (m is more than or equal to 3) is set on grating scale to be measured, adjacent tested point is measured to thermal expansivity, the thermal expansivity of different sections at this temperature.
In conjunction with Fig. 2, present embodiment is described, described signal processing apparatus 9, for the treatment of the signal from grating scale to be measured, standard side growth device 3, the second temperature-measuring element 4 and obtain Coefficient of Thermal Expansion value; The same tested point under different temperatures on grating scale main scale 5 to be measured point location identical grating scale reading to be measured, in the middle of the practical operation of present embodiment, reading can be differed much smaller than two different readings of swell increment and is approximately same point, such as, for aluminium, expansion coefficient is about 2.3 × 10
-5dEG C
-1, for the grating scale of measuring 1m, 1 DEG C
-1swell increment be 23 microns, described criterion can be set as being less than or equal to 0.1 micron, the point that differs absolute value and be less than or equal to 0.1 micron is approximately to same point.Standard measuring motion 3 is measured the distance between two different tested points on grating scale 5 to be measured, the second temperature-measuring element 4 is measured the material temperature of glass main scale in grating scale 5 to be measured, signal processing apparatus 9 is according on two different temperature spots, and the variable quantity between these two different temperature points of the distance between the measurement point that standard measuring motion 3 is measured and this distance calculates the thermal expansivity of grating section between these two measurement points.Operating process is in conjunction with Fig. 3,
In the present embodiment, in supposing to measure for the first time, by whole measuring system constant temperature to 20 degree Celsius, it is that T1(changes measured temperature and approaches very much 20 degrees Celsius that the second temperature-measuring element 4 records temperature), in grating scale section to be measured, standard measuring equipment 3 records this section of two ends reading and is respectively S1_1, S1_2, and recording this section of two ends reading, grating scale 5 to be measured is respectively D1_1, D1_2.Change temperature, in the present embodiment, the relative value of temperature change should be more than or equal to 2 degrees Celsius, for example temperature raises approximately 5 degrees Celsius, and now to record temperature be T2 to the second temperature-measuring element 4, in grating scale section to be measured, standard measuring equipment 3 records this section of two ends reading and is respectively S2_1, S2_2, and grating scale to be measured 5 records, this section of two ends reading is respectively D2_1(and D1_1 differs less than 0.1 micron), D2_2(and D2_1 differ less than 0.1 micron).Measure for this, below realizing, calculate in signal processing apparatus 9, the thermal expansivity lt that obtains this grating scale section is:
In the middle of present embodiment, grating scale 5 to be measured has absolute measurement function, on grating scale to be measured, the reading of every bit is all unique, it can be absolute grating scale, can obtain at any time current absolute position reading, or with the increment type grating scale of reference bit, in the middle of reading process, can obtain the absolute location information of current location.The thermal expansivity measuring like this can with grating scale a certain definite section corresponding.
The invention is not restricted to above-mentioned embodiment, as utilize above-mentioned ultimate principle, this standard measuring motion can be the high precision grating scale with temperature compensation function, can greatly reduce like this cost of device, and more easily installs.This grating scale to be measured can be not only transmission-type grating chi, and can be reflective gratings chi, has so greatly improved the range of application of this device.Near same temperature point, for the tested point at the two ends of a grating scale section to be detected, two different temperatures, measure respectively the distance between these two temperature values and this two tested points, as one group of measurement data, and calculate corresponding thermal expansivity, repeat this process n time (n is more than or equal to 2) altogether, thermal expansivity using the arithmetic mean of the thermal expansivity obtaining for n time as between these two tested points, the thermal expansivity measuring like this has higher stability.Near same temperature, m tested point (m is more than or equal to 3) is set on grating scale to be measured, adjacent tested point is measured to thermal expansivity, the thermal expansivity of different sections at this temperature, so not only can obtain the different expansion coefficient of each grating scale section, the relatively homogeneity of grating scale expansion coefficient, can make grating scale obtain more accurate temperature compensation simultaneously.
Claims (8)
1. the device for detection of grating scale thermal expansivity, comprise enclosed housing (1), described case is for the thermostat (2) of the interior air themperature of constant casing (1), for measuring the standard measuring motion (3) of grating ruler reading head to be measured position, for measuring the second temperature-measuring element (4) and the signal processing apparatus of main scale (5-1) material temperature of grating scale to be measured; It is characterized in that, by the same tested point of the upper different temperatures of point location main scale (5-1) identical grating scale reading to be measured; Standard measuring motion is measured the distance between different tested points on grating scale to be measured, described signal processing apparatus (9) is according on different temperature spots, and the distance between the measurement point that standard measuring motion (3) is measured and the variable quantity of this distance under different temperatures calculate the thermal expansivity of grating scale section between these two measurement points.
2. a kind of device for detection of grating scale thermal expansivity according to claim 1, it is characterized in that, described thermostat (2) comprises the first temperature-measuring element (2-2), for measuring the air themperature of this measurement box house, temperature control component (2-1), according to the reading of the first temperature-measuring element (2-2), casing (1) is heated or freezed.
3. a kind of device for detection of grating scale thermal expansivity according to claim 1, is characterized in that, also comprises grating scale stationary installation (6), for fixing grating scale to be detected.
4. a kind of device for detection of grating scale thermal expansivity according to claim 1, is characterized in that, grating scale to be measured is absolute grating scale, or is the increment type grating scale with reference marker.
5. a kind of device for detection of grating scale thermal expansivity according to claim 1, is characterized in that, described standard measuring motion (3) is for having laser interferometer or the grating scale of temperature compensation function.
6. a kind of device for detection of grating scale thermal expansivity according to claim 1, is characterized in that, described grating scale to be detected (5) is reflective or transmission-type.
7. a kind of device for detection of grating scale thermal expansivity according to claim 1, it is characterized in that, near same temperature point, for the tested point of two of grating scale to be detected (5), with two different temperatures, measure respectively the distance between two temperature values and the tested point at two ends, as one group of measurement data, and calculate corresponding thermal expansivity, duplicate measurements n time, n is more than or equal to 2, the thermal expansivity using the arithmetic mean of the thermal expansivity obtaining for n time as between these two tested points.
8. a kind of device for detection of grating scale thermal expansivity according to claim 1, is characterized in that, near same temperature, m tested point is set on grating scale to be detected (5), and m is more than or equal to 3; Adjacent tested point is measured to thermal expansivity, obtain the thermal expansivity of different sections at this temperature.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410116780.6A CN103913479B (en) | 2014-03-26 | 2014-03-26 | A kind of device for detecting grating scale thermal coefficient of expansion |
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| CN201410116780.6A CN103913479B (en) | 2014-03-26 | 2014-03-26 | A kind of device for detecting grating scale thermal coefficient of expansion |
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| CN103913479A true CN103913479A (en) | 2014-07-09 |
| CN103913479B CN103913479B (en) | 2016-08-17 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425635A (en) * | 2017-08-31 | 2019-03-05 | 株式会社三丰 | MEASURING THE THERMAL EXPANSION COEFFICIENT device and MEASURING THE THERMAL EXPANSION COEFFICIENT method |
| CN111692976A (en) * | 2020-06-08 | 2020-09-22 | 中国科学院合肥物质科学研究院 | Digital display length reference device with temperature deformation self-compensation function |
| CN113701658A (en) * | 2021-09-01 | 2021-11-26 | 中国科学院长春光学精密机械与物理研究所 | Thermal deformation detection device and method for absolute grating ruler in non-uniform temperature field |
| CN114353435A (en) * | 2022-01-12 | 2022-04-15 | 重庆国际复合材料股份有限公司 | Method for guiding glass fiber drying process and drying device |
| CN117783199A (en) * | 2024-02-27 | 2024-03-29 | 中国科学院长春光学精密机械与物理研究所 | Device and method for detecting linear expansion coefficient |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101140249A (en) * | 2007-10-23 | 2008-03-12 | 北京科技大学 | Double light beam laser interferometry method of material thermal expansion coefficient |
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2014
- 2014-03-26 CN CN201410116780.6A patent/CN103913479B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101140249A (en) * | 2007-10-23 | 2008-03-12 | 北京科技大学 | Double light beam laser interferometry method of material thermal expansion coefficient |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425635A (en) * | 2017-08-31 | 2019-03-05 | 株式会社三丰 | MEASURING THE THERMAL EXPANSION COEFFICIENT device and MEASURING THE THERMAL EXPANSION COEFFICIENT method |
| CN109425635B (en) * | 2017-08-31 | 2022-08-02 | 株式会社三丰 | Thermal expansion coefficient measuring device and thermal expansion coefficient measuring method |
| CN111692976A (en) * | 2020-06-08 | 2020-09-22 | 中国科学院合肥物质科学研究院 | Digital display length reference device with temperature deformation self-compensation function |
| CN113701658A (en) * | 2021-09-01 | 2021-11-26 | 中国科学院长春光学精密机械与物理研究所 | Thermal deformation detection device and method for absolute grating ruler in non-uniform temperature field |
| CN113701658B (en) * | 2021-09-01 | 2022-08-09 | 中国科学院长春光学精密机械与物理研究所 | Thermal deformation detection device and method for absolute grating ruler in non-uniform temperature field |
| CN114353435A (en) * | 2022-01-12 | 2022-04-15 | 重庆国际复合材料股份有限公司 | Method for guiding glass fiber drying process and drying device |
| CN117783199A (en) * | 2024-02-27 | 2024-03-29 | 中国科学院长春光学精密机械与物理研究所 | Device and method for detecting linear expansion coefficient |
| CN117783199B (en) * | 2024-02-27 | 2024-05-14 | 中国科学院长春光学精密机械与物理研究所 | Device and method for detecting linear expansion coefficient |
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| CN103913479B (en) | 2016-08-17 |
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