CN207439356U - A kind of calibrating installation of high and low temperature environment grating displacement sensor - Google Patents
A kind of calibrating installation of high and low temperature environment grating displacement sensor Download PDFInfo
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- CN207439356U CN207439356U CN201721651737.5U CN201721651737U CN207439356U CN 207439356 U CN207439356 U CN 207439356U CN 201721651737 U CN201721651737 U CN 201721651737U CN 207439356 U CN207439356 U CN 207439356U
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- temperature environment
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- grating displacement
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Abstract
The utility model discloses a kind of high and low temperature environment grating displacement sensor calibrating installations.Device in the utility model includes insulating box, clutch shaft bearing, stiff shaft, high-low-temperature environmental testing case, first support bar, laser head, spectroscope, speculum, second bearing, second support bar, the first micro-adjustment platform, ambient compensation device and the second micro-adjustment platform and the length parameter variation under high and low temperature environment is transferred to normal temperature environment using mechanically operated mode.In a calibration process, the heat distortion amount of stiff shaft is measured using laser interferometer and ambient compensation device；Then the reading of reading head of high and low temperature environment grating displacement sensor and the reading of laser interferometer are recorded under each temperature measuring point；And compensate the error of indication that can obtain grating displacement sensor under each measuring condition.The utility model can calibrate the grating displacement sensor under high and low temperature environment, and the measurement result of high and low temperature environment grating displacement sensor is traced to the source to national length standard.
Description
Technical field
The utility model is related to a kind of grating displacement sensor calibrating installation, more particularly, to a kind of high and low temperature environment grating
Calibrating device for displacement sensor.
Background technology
With the rapid industrial development in our country, more and more accurate, complex instrument mechanism application environments expand from room temperature
High and low temperature environment (- 100~100 DEG C) is opened up.In order to ensure the reliability and stability of mechanism, it is necessary to carry out assembling essence to it
Degree, transmission efficiency, vibration, power and torque, rigidity and the more performance tests of unit for electrical property parameters.Due to the ring of grating displacement sensor
Border anti-interference is preferable, and the application under high and low temperature environment is more and more extensive.
At present, the domestic calibrating to grating displacement sensor is mainly according to JJG 341-1994《Optical grid line displacement measures
Device》Vertification regulation examines and determine grating displacement sensor using laser interference length-measuring instrument or long grating comparator.Use laser
When interference length-measuring instrument examines and determine the accuracy of grating device, grating scale at least isothermal (20 DEG C) 1h on the table need to be made, reach one
It can be calibrated after requirement in secondary measurement to the fluctuation of ruler temperature and temperature fluctuation；With long grating comparator calibrating grating device
During accuracy, master grating device and tested grating device need to be mounted on long grating comparator, dynamic or string is indulged using parallel connection
Connection indulges dynamic mode and is compared measurement, and needs equilibrium temperature (20 DEG C) 2h, treats that temperature reaches in one-shot measurement and ruler temperature is fluctuated
It can be calibrated after requirement with temperature fluctuation.
In conclusion pattern displacement when the existing grating displacement sensor calibration method in China is only capable of to 20 DEG C at present passes
Sensor is examined and determine, and the calibrating to grating displacement sensor cannot be still completed under high and low temperature environment.
The content of the invention
For the deficiency of background technology, the purpose of this utility model is to provide a kind of high and low temperature environment pattern displacement sensings
Device calibrating installation.
Technical solution is used by the utility model solves its technical problem：
The utility model includes host computer, insulating box, clutch shaft bearing, stiff shaft, high-low-temperature environmental testing case, the first support
Bar, cellular workbench, laser head, spectroscope, speculum, second bearing, second support bar, the first micro-adjustment platform, ring
Border compensator and the second micro-adjustment platform.
The laser head is fixed on the second micro-adjustment platform, and the second micro-adjustment platform is fixed on the second platform
On fixed frame；The second platform fixed frame is fixed in insulating box internal backplane.
The spectroscope is fixed on the first micro-adjustment platform, and reference mirror is fixed on spectroscopical one side；Institute
The the first micro-adjustment platform stated is by being fixed on the first platform fixed frame；The first platform fixed frame is fixed on insulating box
In internal backplane.
The speculum is fixed on mirror mount；The mirror mount is connected with one end of stiff shaft
It connects；The stiff shaft is connected by second bearing with one end of second support bar；The other end of the second support bar
It is connected with second support bar fixed station, the second support bar fixed station is fixed in the insulating box internal backplane.
The stiff shaft is connected by clutch shaft bearing with one end of first support bar；The one of the first support bar
End is connected with first support bar fixed station, and the first support bar fixed station is fixed on cellular workbench；Described
Cellular workbench is positioned in the Shitai County of Dali.
The other end of the stiff shaft is connected with the reading head of the grating displacement sensor in high and low temperature environment experimental box
It connects；Ambient compensation device is directly anchored in the insulating box internal backplane, the input terminal of the ambient compensation device respectively with
Material temperature sensor is connected with air temperature sensor, and the output terminal of the ambient compensation device is connected with host computer；It is described
Material temperature sensor be fixed in the insulating box internal backplane；The air temperature sensor is fixed on described
In insulating box internal backplane；The insulating box is positioned on the cellular workbench.
The stiff shaft is formed by connecting by the stiff shaft of two sections of different materials, one section be low thermal conductivity material, the section
A part be located in high and low temperature environment experimental box, i.e., half section left, another part is exposed in air, i.e. changeover portion, Ling Yiduan
It is for low-expansion material, i.e., half section right, in insulating box；Stiff shaft is as mechanical transmission component by high-low-temperature environmental testing
Displacement in case is transferred to outside case.
Furtherly, the grating displacement sensor for optical grid line displacement sensor, open type grating displacement sensor,
Closed grating displacement sensor or increment type grating displacement sensor.
Compared with background technology, the beneficial effects of the utility model are：
1. the utility model can be to the grating position of (0~100) mm measurement ranges under (- 100~100) DEG C high and low temperature environment
Displacement sensor is calibrated, and the measurement result of high and low temperature environment grating displacement sensor is traced to the source to national length standard.
2. the utility model can effectively demarcate the heat distortion amount under stiff shaft arbitrary temp, any position, and
It is compensated into the displacement obtained by laser interferometer measurement.
3. whole device is mounted with ambient compensation device and air using the optical maser wavelength of laser interferometer as measurement criteria
Temperature sensor and material temperature sensor, it greatly improves the measurement accuracy of laser interferometer.
4. the optical system of device is placed in insulating box internal backplane, it ensure that the stability of optical system, improve
Environment anti-interference, convenient for carrying out field calibration in complicated industry spot.
Description of the drawings
Fig. 1 is the structural front view of the utility model；
Fig. 2 is the insulating box inner structure figure of the utility model；
Fig. 3 stiff shaft schematic diagrames；
Fig. 4 high and low temperature environments grating displacement sensor calibrates schematic diagram；
Fig. 5 is FB(flow block) of tracing to the source；
In figure：1st, host computer；2nd, insulating box；3rd, clutch shaft bearing；4th, stiff shaft；5th, high-low-temperature environmental testing case；6th, first
Supporting rod；7th, first support bar fixed station；8th, cellular workbench；9th, Dali Shitai County；10th, laser head；11st, spectroscope；12、
Speculum；13rd, mirror mount；14th, second bearing；15th, ambient compensation device；16th, second support bar；17th, second support bar
Fixed station；18th, the first micro-adjustment platform；19th, the first platform fixed frame；20th, the second micro-adjustment platform；21st, the second platform is fixed
Frame.
Specific embodiment
Below in conjunction with attached drawing, the utility model is described in further detail.
As depicted in figs. 1 and 2, the laser head 10 in the utility model device, which is threaded, is fixed on the second micro-adjustment
On platform 20, the second micro-adjustment platform 20 is bolted on the second platform fixed frame 21；Described second is flat
Platform fixed frame 21 is bolted in the internal backplane of insulating box 2.Spectroscope 11 is fixed on the first micro-adjustment platform 18,
Reference mirror is fixed on the one side of the spectroscope 11；The first micro-adjustment platform 18 is bolted on the first platform
On fixed frame 19；The first platform fixed frame 19 is bolted in the internal backplane of insulating box 2.Speculum 12 passes through
Bolt is fixed on mirror mount 13；The mirror mount 13 is connected with one end of stiff shaft 4；Described is firm
Property axis 4 is connected by bearing 14 with one end of second support bar 16；The other end of the second support bar 16 and second
Strut fixed station 17 connects, and the second support bar fixed station 17 is bolted on the inner bottom of the insulating box 2
On plate.The stiff shaft 4 is connected by clutch shaft bearing 3 with one end of first support bar 6；The stiff shaft by two sections not
Stiff shaft with material is formed by connecting, and one section is low thermal conductivity material, and another section is low-expansion material；Described first
The other end of supporting rod 6 is connected with first support bar fixed station 7, and the first support bar fixed station 7 is bolted on
On cellular workbench 8.The cellular workbench 8 is positioned in Dali Shitai County 9；The stiff shaft 4 it is another
End is connected with the reading head of the high and low temperature environment grating displacement sensor in high and low temperature environment experimental box 5；Ambient compensation device 15
Be directly anchored in the internal backplane of the insulating box 2, the input terminal of the ambient compensation device 15 respectively with material temperature
Sensor is connected with air temperature sensor, and the output terminal of the ambient compensation device 15 is connected by USB line with host computer 1,
The host computer 1 is positioned in described Dali Shitai County 9；The material temperature sensor is fixed on the insulating box 2
Internal backplane on；The air temperature sensor is fixed in the internal backplane of the insulating box 2；The insulating box
2 are positioned on the cellular workbench 8.
As shown in figure 3, stiff shaft is made of two sections of axis of different materials, (i.e. left half section and transition a, b sections in one section such as figure
Section) shown in, it is process by the very low heat-insulating material of thermal conductivity factor, initial length is respectively l1、l2；C in another section such as Fig. 3
Shown in section (i.e. half section right), it is process by low-expansion material, initial length l3.Before starting calibrating, whole
Stiff shaft is in t0Length when (20 DEG C) is l (wherein, l=l1+l2+l3), the initial length of a sections of axis in high and low temperature environment case
For l1, the b sections of aerial length of exposure are l2, the initial length of c sections of axis is l in normal temperature environment chamber3, a sections and b sections
It is the very low heat-insulating material of thermal conductivity factor.When high and low temperature environment the temperature inside the box changes △ t, a sections of stiff shaft is heated to be generated axially
Deflection △ l1；Again because of conduction of heat, the partial heat that a sections of stiff shaft is transferred to b sections of stiff shaft, and the part is caused to generate axis
To deflection △ l2。
The axial deflection of a sections of axis can be calculated by thermal expansion amount calculation formula (1)：
Δl1=a1×l1×Δt (1)
a1--- the linear expansivity (m/K) of a, b sections of materials；
It is made of for a, b sections, a sections of parts can all be completely cut off because of the heat that thermal convection current absorbs heat-insulating material because of stiff shaft,
The temperature that c sections of stiff shaft is consistent with room temperature, therefore the axial deflection of b sections of stiff shaft is calculated by formula (2)：
t0——20℃；
Making the axial deflection of whole stiff shaft, then there are following relational expressions for △ l：
Δ l=Δs l1+Δl2=a1l1Δt+Δl2 (3)
Cause is under same temperature, fixed dimension, the linear expansivity a of a, b sections of stiff shaft1It is a fixed value, b sections of stiff shaft
Axial heat distortion amount △ l2Also remain unchanged, and the axial deflection △ l of stiff shaft show as its displacement in the axial direction, it should
Displacement can be measured by the laser interferometer in normal temperature environment insulating box；The initial length value of a sections of stiff shaft can be in normal temperature environment
Under, it is measured by I grade of standard steel tape, and because of temperature variation △ t it is known that can then obtain the α under assigned temperature1With △ l2's
Value, detailed process are as follows：
It keeps temperature variation △ t constant, changes l1Value be l1`, the axial deflection that can obtain whole stiff shaft are △ l
`.It can obtain linear equation in two unknowns group：
Equation group is solved, you can acquire high and low temperature environment the temperature inside the box variation △ t (compared with 20 DEG C of room temperature)
When, α1With △ l2Value：
Correspondingly, temperature variation △ t, l are changed1It remains unchanged, and then can be in the hope of the α under relevant temperature1With △ l2's
Value.Then the matlab2012 softwares α to measuring respectively is used1、△l2Value and interpolation calculation value carry out least square together
Method is fitted, and obtains α1With △ l2With the multinomial α of temperature variation △ t1(△ t) and △ l2(△t)。
As shown in figure 4, several measurement points are uniformly chosen in the impulse stroke of high and low temperature environment grating displacement sensor, point
The displacement on measured piece axis direction is not measured by single frequency laser interferometer and grating displacement sensor.Again because of stiff shaft
There is part in high-low-temperature environmental testing case, temperature change is easily subject to generate thermal deformation and in turn results in axial displacement △ l, therefore light
Displacement transducer can be represented in the error of the measurement point by following formula：
Δ L=L "-L ≈ L "-L'+ Δs l (6)
L represents stiff shaft real displacement in formula.And the axial displacement of stiff shaft can be represented by formula (7)：
WhereinFor a sections of length of stiff shaft under each calibrating position.Because a sections of length of stiff shaft is not easy directly to measure
It arrives, therefore with the length l of a sections of stiff shaft at 20 DEG C1It subtracts the shift value L ' that laser interferometer measurement obtains to replace, i.e.,：
Therefore measurement error of the high and low temperature environment grating displacement sensor in each measurement position can be represented by formula (9)：
ΔL≈L”-(L'+a1(Δt)(l1-L')Δt+Δl2(Δt)) (9)
The static characteristic of this method adjustable high and low temperature environment grating displacement sensor, high and low temperature environment pattern displacement sensing
Device is calibrated by laser interferometer, and laser interferometer is then through metering institute above the provincial level calibrating.
As shown in figure 5, the utility model traces to the source the measurement result of high and low temperature environment grating displacement sensor to state parent
Spend benchmark.
The course of work of the utility model is as follows：
Step1:Start insulating box, the temperature in regulating thermostatic case, as the temperature stabilization (t in case0=20 DEG C) after, it opens
Laser head, the single-frequency laser beam that laser head is sent are divided into two beams, a branch of directive and the fixed reference mirror of spectroscope after spectroscope,
Another beam to the fixed speculum of mirror mount.
Step2:It keeps grating displacement sensor motionless, the temperature in high-low-temperature environmental testing case is made to rise to 100 DEG C of (i.e. △
T=80 DEG C), a sections of stiff shaft generates certain heat distortion amount △ l because of the reason expanded with heat and contract with cold；It, should when heat distortion amount is stablized
Heat distortion amount is outwards transferred by stiff shaft, drives mirror mount movement, and then drives speculum movement so that through reflection
The light beam that mirror is reflected back is received with the light beam being reflected back through reference mirror after spectroscope by the photodetector built in laser head, light
Electric explorer is connected with host computer, and host computer shows the displacement △ L of stiff shaft0。
Step3:With 10 DEG C for step-length, each point is cooled to, respectively with the displacement △ L of laser interferometer measurement stiff shafti；
The shift value △ L measured by laser interferometeriStiff shaft compared with the axial deflection of previous temperature value rather than compared with
t0When axial deflection, therefore need to be modified it as follows：
Wherein Δ l(i)--- axial deflection of the stiff shaft in i temperature；
ΔLi--- the shift value that laser interferometer measures is negative value；
21 temperature measuring points between i --- corresponding (- 100~100) DEG C.
Step4:Stiff shaft in mobile high and low temperature environment case, the length that a sections of stiff shaft is measured with I grade of standard steel tape is l1
`, then respectively under 21 measurement points of its (- 100~100) DEG C, then with the corresponding axial deflection of laser interferometer measurement, together
Sample is converted according to the shift value that formula (10) obtains measurement, obtains the axial deflection of required stiff shaft.
Step5：After △ l and the △ l` under obtaining all temperature measuring points (i.e. △ t), due to l1And l1` passes through I grade
Standard steel tape measures, then formula (5) can use to acquire α under each temperature measuring point1With △ l2Value；Between each temperature measuring point into
Row cubic spline interpolation, then with the matlab2012 softwares α to measuring respectively1、△l2Value and interpolation calculation value together into
Row least square fitting, obtains α1With △ l2With the multinomial of temperature variation △ t.
Step6：Single frequency laser interferometer and grating displacement sensor are placed in measurement zero point simultaneously, with I grade of standard coil of strip
The length that ruler measures stiff shaft a sections in high and low temperature environment case is l1, then high and low temperature environment the temperature inside the box is heated to t DEG C, it uses
Mating Survey Software measures, after its stabilization, by measured piece movement 10mm or so, the respectively reading of reading laser interferometer
The reading L " of number L ' and grating displacement sensor record measurement data, and formula (10) calculates rigidity under the measuring condition
The heat distortion amount △ l of axis, are compensated into the shift value L ' of laser interferometer measurement.Therefore high/low temperature ring at the calibrating position
The error amount of border grating displacement sensor can by (9) calculate t DEG C at grating displacement sensor it is each measurement position measurement error.
Step7：Measured piece is continued to move to next calibrating position, repeats Step6；
Step8：After the measurement experiment of all calibrating positions at t DEG C is fully completed, make in high-low-temperature environmental testing case
Temperature is cooled to 20 DEG C, and single frequency laser interferometer and grating displacement sensor are placed in measurement zero point simultaneously again, then respectively will
After temperature in high and low temperature environment case is heated to some temperature measuring point (with 10 DEG C for step-length) between (+100~-100) DEG C, weight
Multiple Step6, Step7, until complete at each temperature grating displacement sensor in the error calculations of all calibrating positions.
So far, showing for grating displacement sensor can be obtained by carrying out error analysis to the error at different position
It is worth the performance parameters such as error, stability, completes the calibration to grating displacement sensor under high and low temperature environment.
The above is only the preferable case study on implementation of the utility model, not the utility model is imposed any restrictions, every
Changed according to any simple modification, change and the equivalent structure that the utility model technical spirit makees above example,
It still falls in the protection domain of technical solutions of the utility model.
Claims (2)
1. a kind of high and low temperature environment grating displacement sensor calibrating installation, it is characterised in that：Including
Host computer, insulating box, clutch shaft bearing, stiff shaft, high-low-temperature environmental testing case, first support bar, cellular workbench,
Laser head, spectroscope, speculum, second bearing, second support bar, the first micro-adjustment platform, ambient compensation device and the second fine tuning
Flatten platform；
The laser head is fixed on the second micro-adjustment platform, and the second micro-adjustment platform is fixed on the second platform and fixes
On frame；The second platform fixed frame is fixed in insulating box internal backplane；
The spectroscope is fixed on the first micro-adjustment platform, and reference mirror is fixed on spectroscopical one side；Described
First micro-adjustment platform is by being fixed on the first platform fixed frame；The first platform fixed frame is fixed on inside insulating box
On bottom plate；
The speculum is fixed on mirror mount；The mirror mount is connected with one end of stiff shaft；
The stiff shaft is connected by second bearing with one end of second support bar；The other end of the second support bar and
Two supporting rod fixed stations connect, and the second support bar fixed station is fixed in the insulating box internal backplane；
The stiff shaft is connected by clutch shaft bearing with one end of first support bar；One end of the first support bar with
First support bar fixed station connects, and the first support bar fixed station is fixed on cellular workbench；Described is porous
Shape workbench is positioned in the Shitai County of Dali；
The other end of the stiff shaft is connected with the reading head of the grating displacement sensor in high and low temperature environment experimental box；Ring
Border compensator is directly anchored in the insulating box internal backplane, the input terminal of the ambient compensation device respectively with material temperature
Degree sensor is connected with air temperature sensor, and the output terminal of the ambient compensation device is connected with host computer；The material
Temperature sensor is fixed in the insulating box internal backplane；The air temperature sensor is fixed on the insulating box
In internal backplane；The insulating box is positioned on the cellular workbench；
The stiff shaft is formed by connecting by the stiff shaft of two sections of different materials, one section be low thermal conductivity material, the one of this section
Part is located in high and low temperature environment experimental box, i.e., half section left, and another part is exposed in air, i.e. changeover portion, and another section is low
Expansion material, i.e., it is half section right, in insulating box；Stiff shaft will be in high-low-temperature environmental testing case as mechanical transmission component
Displacement be transferred to outside case.
2. high and low temperature environment grating displacement sensor calibrating installation according to claim 1, it is characterised in that：The light
Displacement transducer is optical grid line displacement sensor, open type grating displacement sensor, closed grating displacement sensor or increasing
Amount formula grating displacement sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721651737.5U CN207439356U (en) | 2017-12-01 | 2017-12-01 | A kind of calibrating installation of high and low temperature environment grating displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721651737.5U CN207439356U (en) | 2017-12-01 | 2017-12-01 | A kind of calibrating installation of high and low temperature environment grating displacement sensor |
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| CN207439356U true CN207439356U (en) | 2018-06-01 |
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ID=62285467
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|---|---|---|---|
| CN201721651737.5U Withdrawn - After Issue CN207439356U (en) | 2017-12-01 | 2017-12-01 | A kind of calibrating installation of high and low temperature environment grating displacement sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830808A (en) * | 2017-12-01 | 2018-03-23 | 中国计量大学 | A kind of calibration method and device of high and low temperature environment grating displacement sensor |
| CN111207908A (en) * | 2018-11-21 | 2020-05-29 | 上海电缆研究所有限公司 | Calibration grating for calibrating optical fiber test instrument and calibration method |
| CN113432563A (en) * | 2021-06-28 | 2021-09-24 | 中国计量大学 | Extreme environment linear sensor calibration device and method |
-
2017
- 2017-12-01 CN CN201721651737.5U patent/CN207439356U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830808A (en) * | 2017-12-01 | 2018-03-23 | 中国计量大学 | A kind of calibration method and device of high and low temperature environment grating displacement sensor |
| CN107830808B (en) * | 2017-12-01 | 2023-10-10 | 中国计量大学 | Calibration method and device for grating displacement sensor in high-low temperature environment |
| CN111207908A (en) * | 2018-11-21 | 2020-05-29 | 上海电缆研究所有限公司 | Calibration grating for calibrating optical fiber test instrument and calibration method |
| CN111207908B (en) * | 2018-11-21 | 2021-09-21 | 上海电缆研究所有限公司 | Calibration grating for calibrating optical fiber test instrument and calibration method |
| CN113432563A (en) * | 2021-06-28 | 2021-09-24 | 中国计量大学 | Extreme environment linear sensor calibration device and method |
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