CN201306998Y - Second grade gauge block contact type laser interferometer - Google Patents
Second grade gauge block contact type laser interferometer Download PDFInfo
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- CN201306998Y CN201306998Y CNU2008202200089U CN200820220008U CN201306998Y CN 201306998 Y CN201306998 Y CN 201306998Y CN U2008202200089 U CNU2008202200089 U CN U2008202200089U CN 200820220008 U CN200820220008 U CN 200820220008U CN 201306998 Y CN201306998 Y CN 201306998Y
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model relates to a second grade gauge block contact type laser interferometer, comprising a laser-interfering system, a location-counting system, an environmental parameter-measuring system and a computer, wherein in the laser-interfering system, a He-Ne laser is connected with a laser frequency stabilizer; a first steering prism is horizontally arranged in front of the laser frequency stabilizer; a diaphragm, a collimator, a second steering prism, a phase-shifting spectroscope and a reference mirror are vertically arranged under the first steering prism in sequence; the left horizontal side and the right horizontal side of the second steering prism are respectively provided with two first photoelectric converters; the horizontal one side of the phase-shifting spectroscope is provided with a turning mirror; a positioning controller, a measuring prism, a photoelectric control dynamometric stability sensor and a measuring head are vertically arranged under the turning mirror in sequence; and one face opposite to the face of the phase-shifting spectroscope which is provided with the turning mirror is provided with a second photoelectric converter. The utility model has the advantages of direct measurement, automatic collection, feedback, reading, high accuracy, good stability, optical flat, lapping-in without gauge block and optical flat and simple operation.
Description
Technical field
The utility model relates to a kind of calibration equipment of second-class gauge block, particularly a kind of second-class gauge block contact laser interferometer.
Background technology
According to existing gauge block standard of China and vertification regulation, gauge block is divided into one, two, three, four, five grades by its linear measure longimetry uncertainty, by international recommendation, second-class Gauge Block Length is measured and can directly be measured with optical wavelength, also can compare measurement as standard with first-class gauge block, but China does not also carry out the calibrating of first-class gauge block at present, have to adopt laser interferometer directly to measure.And use laser interferometer that two kinds of methods are also arranged, and a kind of method is with the non-contact type measuring method of Ke's formula interferometer principle, another kind is the contact type measurement method.Koster's interferometer is the interference instrument that early uses the light wave measurement gauge block, be based on the coincidence method basis, because the characteristics of coincidence method itself, Koster's interferometer will carry out preliminary survey to tested gauge block before measuring gauge block, and need gauge block and optical flat lapping-in to carry out, operator's labour intensity is bigger, operator's technical merit is required high, and the measuring method that common contact type measurement method adopts tested gauge block and the second-class gauge block of standard to compare, because manual operations is low for the measuring accuracy of second-class gauge block, error is big, the utility model has the advantages that does not need to compare with standard gauge block, directly measures, automatically gather, automatically feed back, automatic reading, the precision height, good stability, the mode of flexible probe contact location need not gauge block and the optical flat lapping-in comes, simple to operate.
Summary of the invention
The utility model provides a kind of second-class gauge block contact laser interferometer for the shortcoming that the calibrating installation that remedies second-class gauge block in the past exists, and reaches the purpose to second-class gauge block calibration accuracy height, control automatically, simple, convenient, good stability.
This device comprises laser interference system, location number system, environmental parameter measuring system and computing machine, and wherein laser interference system connects the location number system, and the location number system is connected computing machine simultaneously with the environmental parameter measuring system.Laser interference system comprises the He-Ne laser instrument, laser frequency stabilizer, first turns to prism, the light hurdle, collimating light pipe, second turns to prism, the phase shift spectroscope, reference mirror, deviation mirror, measuring prism, photoelectric control dynamometry stability sensor, gauge head, the He-Ne laser instrument connects laser frequency stabilizer, the horizontal the place ahead of laser frequency stabilizer is provided with first and turns to prism, first turns to prism vertically to be provided with the light hurdle successively in the below, collimating light pipe, second turns to prism, the phase shift spectroscope, reference mirror, second turns to the prism left and right horizontal to be respectively equipped with two first photoelectric commutators in the number system of location, phase shift spectroscope level one side is provided with deviation mirror, deviation mirror vertically below is provided with the register control of locating in the number system successively, measuring prism, photoelectric control dynamometry stability sensor and gauge head are provided with the relative one side level of deviation mirror with the phase shift spectroscope and are provided with second photoelectric commutator of locating in the number system.Photoelectric control dynamometry stability sensor, comprise parallel spring, light trap, photoelectric tube, measuring staff, photoelectricity pipe support, photoelectric control dynamometry stability sensor inside is fixedly parallel spring, light trap, photoelectric tube successively from lower to upper, wherein, parallel spring and light trap are fixed on the measuring staff, measuring staff is used to connect measuring prism and gauge head, and photoelectric tube is fixed on the photoelectricity pipe support, and the photoelectricity pipe support is fixed on the photoelectric control dynamometry stability sensor inwall.Photoelectric commutator connects phase adjusting module in the number system of location, the opposite side of phase adjusting module connects interference fringe integer tally and interference fringe decimal tally respectively, interference fringe integer tally is connected computing machine with the other end of interference fringe decimal tally, the output terminal of computing machine connects drive motor and register control respectively, and the other end of drive motor and register control is connected laser interference system.Temperature sensor, humidity sensor and baroceptor are connected computing machine respectively in the environmental parameter measuring system.
The computer software that this utility model adopts cooperates the gauge block laser interferometer to carry out second-class standard gauge block to be measured as purpose design and to write, objective interface, simple to operate, be to be workbench with Windows98, adopt Microsoft Visual Studio kit external member, integrated application ActiveX, OCX and dynamic link library technology, finish acquisition controlling to laser interferometer data-signal in the system, the contact type measurement head is the control of location automatically, the automatic collection of environmental baseline parameter and compensation control, the processes and displays of measurement result data and printout have realized directly measuring automatically of second-class standard gauge block.
The principle of work of this device for the He-Ne laser instrument produce laser after the laser frequency stabilizer frequency stabilization by turning to prism to enter Guang Lan, enter collimating light pipe again through the light hurdle and produce parallel beam, the parallel beam that produces at collimating light pipe one the tunnel is penetrated on photoelectric commutator after turning to prism, laser beam is detected, another bundle is through turning to prism to enter the phase shift spectroscope, this light beam is divided into two-way again on the phase shift spectroscope, one route reference prism is reflected into reference path, the deviation mirror that another route is connected with gauge head is reflected into the measurement light path, light trap one end connects the parallel spring other end and is connecting gauge head in photoelectric control dynamometry stability sensor, light trap is also along with gauge head moves up and down when gauge head moves up and down, because light trap is arranged in photoelectric tube, when light trap just in time blocks the desired location of photoelectric tube, gauge head will stop motion, the measuring prism that is connected with measuring staff is also along with gauge head moves, because reference path and measurement light path are to be produced by the light that same lasing light emitter sends, so frequency is identical, again because the measuring prism that moves along with gauge head will be measured light path reflects to second photoelectric commutator,, constant phase difference, this two-way light produce interference so converging.Move through second photoelectric commutator by gauge head in the number system of location and produce sin and cos electric signal, this two paths of signals through " phase adjusting module " adjust differ 90 ° just, the order of interference variable quantity of cosine and send into " interference fringe integer tally " and " interference fringe decimal tally ", this moment, the integer interference fringe was with regard to direct census, by AD transfer interface board input computing machine.The interference fringe fraction part is then by " decimal tally ", carry out the software decimal by AD transfer interface board input computing machine, calculate the corresponding umber of pulse of gauge head displacement by computing machine again, judge whether to start register control and drive motor and control gauge head stop motion in this device laser interference system.Be provided with temperature sensor, humidity sensor, baroceptor around on worktable, reaching, temperature, humidity and air pressure survey sensor output terminal are connected computing machine, in the process that gauge block is examined and determine, need compensate by humidity, temperature, the air pressure of computing machine to the calibrating environment.Before measuring beginning, do not place tested gauge block on the worktable, gauge head remains on the position that the worktable top is set, the starting switch gauge head at the uniform velocity descends automatically, ergometry increases gradually when contacting with worktable, when reaching setting value, photoelectric control dynamometry stability sensor sends signal lag, gauge head continues to descend, ergometry continues to increase, and when reaching P+ Δ P, P is the static distance that contacts tested gauge block to gauge head of gauge head, Δ P is that gauge head contacts tested gauge block compresses tested gauge block to gauge head distance, gauge head stops falling the back and promotes automatically, and ergometry reduces automatically, sends signal when another reaches P, the corresponding umber of pulse of displacement that computing machine opening entry and gauge head promote, when gauge head promotes when disengaging with worktable, ergometry drops to minimum value, when gauge head rises to than the slightly high desired location of tested gauge block, gauge head stops automatically, and the umber of pulse of establishing computer recording at this moment is f
0On worktable, put into gauge block, gauge head at the uniform velocity descends automatically, and ergometry increases gradually when contacting with tested gauge block measurement face, when reaching setting value, photoelectric control dynamometry stability sensor sends signal lag, gauge head continues to descend, and ergometry continues to increase, when reaching P+ Δ P, gauge head stops falling the automatic ergometry that promotes in back and reduces automatically, send signal when another reaches P, computing machine stops to write down the corresponding umber of pulse of displacement that descends with gauge head, establishes at this moment gauge head from f
0The umber of pulse that reduces that descends is f
1, meanwhile gauge head continue automatically to rise to tested gauge block measurement emaciated face when contacting, ergometry drops to minimum value, gauge head continues to rise to setting height and stops automatically, so the length L of tested gauge block can be expressed from the next:
L＝(f
1-f
0)q+αl(20-t)
In the formula: q-pulse equivalency (promptly the laser interferencefringes that adopts through behind the decimal, each umber of pulse representative is measured state t, the length value under the p, f);
The temperature line expansion coefficient of α-tested gauge block is decided according to unlike material;
The nominal length of l-tested gauge block;
The temperature of t-tested gauge block when its linear measure longimetry;
The utility model has the advantages that does not need to compare with standard gauge block, and the mode of directly measurement, collection automatically, automatic feedback, automatic reading, precision height, good stability, flexible probe contact location need not gauge block and optical flat lapping-in, simple to operate.
Description of drawings
Fig. 1 is the equipments overall structure block diagram;
Fig. 2 is the laser interference system structural representation;
Fig. 3 is a photoelectric control dynamometry stability sensor structural representation;
Fig. 4 is the functional module composition diagram that adopts;
Fig. 5 adopts the computer operation process flow diagram.
1He-Ne laser instrument among Fig. 2,2 laser frequency stabilizers, 3 first turn to prism, 4 smooth hurdles, 5 collimating light pipes, 6 first photoelectric commutators, 7 second turn to prism, 8 second photoelectric commutators, 9 phase shift spectroscopes, 10 reference mirrors, 11 deviation mirrors, 12 register controls, 13 measuring prisms, 14 photoelectric control dynamometry stability sensors, 15 gauge heads, 16 tested gauge blocks, 17 worktable
18 light traps among Fig. 3,19 photoelectric tubes, 20 parallel springs, 21 measuring staffs, 22 photoelectricity pipe supports
Embodiment
Device of the present utility model is laser interference system, location number system, environmental parameter measuring system and computing machine as shown in Figure 1, and wherein laser interference system connects the location number system, and the location number system is connected computing machine simultaneously with the environmental parameter measuring system.
Laser interference system He-Ne laser instrument 1 as shown in Figure 2 connects laser frequency stabilizer 2, laser frequency stabilizer 2 horizontal the place aheads are provided with first successively and turn to prism 3, light hurdle 4, collimating light pipe 5, second turns to prism 7, phase shift spectroscope 9, reference mirror 10, second turns to prism 7 left and right horizontal both sides to be respectively equipped with first photoelectric commutator 6 of two location number systems, be used for laser beam is detected, level one side of phase shift spectroscope 9 is provided with deviation mirror 11, deviation mirror 11 vertically below is provided with register control 12 successively, measuring prism 13, photoelectric control dynamometry stability sensor 14, gauge head 15, worktable 17 is provided with the relative one side level of deviation mirror 11 with phase shift spectroscope 9 and is provided with second photoelectric commutator 8 in the number system of location.The structure of photoelectric control dynamometry stability sensor 14 is its inside fixedly parallel spring 20, light trap 18, photoelectric tube 19 successively from lower to upper as shown in Figure 2, wherein, parallel spring 20 and light trap 18 are fixed on the measuring staff 21, measuring staff 21 is used to connect measuring prism 13 and gauge head 15, photoelectric tube 19 is fixed on the photoelectricity pipe support 22, and photoelectricity pipe support 22 is fixed on photoelectric control dynamometry stability sensor 14 inwalls.
Location number system second photoelectric commutator is converted into the input end that electric signal connects the analog photoelectricity signal amplifier of phase adjusting module with light signal, phase adjusting module is just differing the phase place adjustment of electric signal from 90 °, the order of interference variable quantity of cosine is sent into interference fringe integer tally and interference fringe decimal tally, interference fringe integer tally is connected the computing machine input end with interference fringe decimal tally with the order of interference that calculates, the output terminal of computing machine connects register control and drive motor, register control is used to control the gauge head location, drive motor is used to control gauge head and moves, the register control other end connects laser interference system, the drive motor other end connects laser interference system, judges whether to start register control and drive motor and controls gauge head stop motion in this device laser interference system.
The voltage output end of environmental parameter measuring system temperature sensor, humidity sensor voltage output end and baroceptor voltage output end are connected computing machine the environment in the laser interference system are detected.
This device is before measuring beginning, do not place gauge block on the worktable 17, gauge head 15 remains on the position that worktable 17 tops are set, starting switch gauge head 15 at the uniform velocity descends automatically, ergometry increases gradually when contacting with worktable 17, when reaching setting value, photoelectric control dynamometry stability sensor 14 sends signal lag, gauge head 15 continues to descend, ergometry continues to increase, and when reaching P+ Δ P, P is gauge head 15 static distances to the tested gauge block 16 of gauge head 15 contacts, Δ P is the tested gauge block 16 of gauge head 15 contacts compresses tested gauge block 16 to gauge head 15 a distance, gauge head 15 stops falling the back and promotes automatically, and ergometry reduces automatically, sends signal when another reaches P, the corresponding umber of pulse of displacement that computing machine opening entry and gauge head 15 promote, when gauge head 15 promotes when disengaging with worktable 17, ergometry drops to minimum value, when gauge head 15 rises to than the slightly high desired location of tested gauge block 16, gauge head 15 stops automatically, and the umber of pulse of establishing computer recording at this moment is f
0On worktable, put into tested gauge block 16, gauge head 15 at the uniform velocity descends automatically, ergometry increases gradually when contacting with tested gauge block 16 measurement faces, when reaching setting value, photoelectric control dynamometry stability sensor 14 sends signal lag, gauge head 15 continues to descend, ergometry continues to increase, when reaching P+ Δ P, gauge head 15 stops falling the automatic ergometry that promotes in back and reduces automatically, send signal when another reaches P, computing machine stops to write down the corresponding umber of pulse of displacement that descends with gauge head 15, establishes at this moment gauge head 15 from f
0The umber of pulse that reduces that descends is f
1, meanwhile gauge head 15 continues automatically to rise to tested gauge block 16 and measures emaciated faces when contacting, and ergometry drops to minimum value, and gauge head 15 continues to rise to setting height and stops automatically, so the length L of tested gauge block 16 can be expressed from the next:
L＝(f
1-f
0)q+αl(20-t)
In the formula: q-pulse equivalency (promptly the laser interferencefringes that adopts through behind the decimal, each umber of pulse representative is measured state t, the length value under the p, f);
The temperature line expansion coefficient of α-tested gauge block 16 is decided according to unlike material;
The nominal length of l-tested gauge block 16;
T-the temperature of tested gauge block 16 when its linear measure longimetry;
Claims (2)
1, a kind of second-class gauge block contact laser interferometer, comprise laser interference system, the location number system, environmental parameter measuring system and computing machine, wherein laser interference system connects the location number system, the location number system is connected computing machine simultaneously with the environmental parameter measuring system, photoelectric commutator connects phase adjusting module in the number system of location, the opposite side of phase adjusting module connects interference fringe integer tally and interference fringe decimal tally respectively, interference fringe integer tally is connected computing machine with the other end of interference fringe decimal tally, the output terminal of computing machine connects drive motor and register control respectively, and the other end of drive motor and register control is connected laser interference system; Temperature sensor in the environmental parameter measuring system, humidity sensor is connected computing machine respectively with baroceptor, it is characterized in that: described laser interference system comprises the He-Ne laser instrument, laser frequency stabilizer, first turns to prism, the light hurdle, collimating light pipe, second turns to prism, the phase shift spectroscope, reference mirror, deviation mirror, measuring prism, photoelectric control dynamometry stability sensor, gauge head, the He-Ne laser instrument connects laser frequency stabilizer, the horizontal the place ahead of laser frequency stabilizer is provided with first and turns to prism, first turns to prism vertically to be provided with the light hurdle successively in the below, collimating light pipe, second turns to prism, the phase shift spectroscope, reference mirror, second turns to prism left and right horizontal both sides to be respectively equipped with two first photoelectric commutators in the number system of location, phase shift spectroscope level one side is provided with deviation mirror, deviation mirror vertically below is provided with the register control of locating in the number system successively, measuring prism, photoelectric control dynamometry stability sensor and gauge head are provided with the relative one side level of deviation mirror with the phase shift spectroscope and are provided with second photoelectric commutator of locating in the number system.
2, second-class gauge block contact laser interferometer according to claim 1, it is characterized in that described photoelectric control dynamometry stability sensor, comprise parallel spring, light trap, photoelectric tube, measuring staff and photoelectricity pipe support, photoelectric control dynamometry stability sensor inside is fixedly parallel spring, light trap, photoelectric tube successively from lower to upper, wherein, parallel spring and light trap are fixed on the measuring staff, measuring staff is used to connect measuring prism and gauge head, photoelectric tube is fixed on the photoelectricity pipe support, and the photoelectricity pipe support is fixed on the photoelectric control dynamometry stability sensor inwall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202200089U CN201306998Y (en) | 2008-11-28 | 2008-11-28 | Second grade gauge block contact type laser interferometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202200089U CN201306998Y (en) | 2008-11-28 | 2008-11-28 | Second grade gauge block contact type laser interferometer |
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| Publication Number | Publication Date |
|---|---|
| CN201306998Y true CN201306998Y (en) | 2009-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202200089U Expired - Fee Related CN201306998Y (en) | 2008-11-28 | 2008-11-28 | Second grade gauge block contact type laser interferometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101701792B (en) * | 2009-11-20 | 2012-11-21 | 广州市计量检测技术研究院 | Gauge block automatic verification system and verification method |
| WO2019000260A1 (en) * | 2017-06-26 | 2019-01-03 | 深圳市樊溪电子有限公司 | Sinking value detecting device of non-contact handheld drop hammer deflectograph |
| WO2019000261A1 (en) * | 2017-06-26 | 2019-01-03 | 深圳市樊溪电子有限公司 | Non-contact type subsidence value detection system for portable falling weight deflectometer |
-
2008
- 2008-11-28 CN CNU2008202200089U patent/CN201306998Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101701792B (en) * | 2009-11-20 | 2012-11-21 | 广州市计量检测技术研究院 | Gauge block automatic verification system and verification method |
| WO2019000260A1 (en) * | 2017-06-26 | 2019-01-03 | 深圳市樊溪电子有限公司 | Sinking value detecting device of non-contact handheld drop hammer deflectograph |
| WO2019000261A1 (en) * | 2017-06-26 | 2019-01-03 | 深圳市樊溪电子有限公司 | Non-contact type subsidence value detection system for portable falling weight deflectometer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090909 Termination date: 20131128 |