CN113390897A - Automatic optical detection system and method for detecting surface flaws of contact lens - Google Patents
Automatic optical detection system and method for detecting surface flaws of contact lens Download PDFInfo
- Publication number
- CN113390897A CN113390897A CN202010171753.4A CN202010171753A CN113390897A CN 113390897 A CN113390897 A CN 113390897A CN 202010171753 A CN202010171753 A CN 202010171753A CN 113390897 A CN113390897 A CN 113390897A
- Authority
- CN
- China
- Prior art keywords
- contact lens
- image
- defect
- suspected
- system host
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 230000003287 optical effect Effects 0.000 title claims abstract description 10
- 238000001514 detection method Methods 0.000 title abstract description 12
- 230000007547 defect Effects 0.000 claims abstract description 101
- 239000000523 sample Substances 0.000 claims description 14
- 230000036571 hydration Effects 0.000 claims description 13
- 238000006703 hydration reaction Methods 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 5
- 238000005286 illumination Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Geometry (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses an automatic optical detection system and a method for detecting surface flaws of a contact lens. When the distance between the first suspicious defect position and the circle center of the contact lens is not changed, the system host judges that the first suspicious defect position is a defect on the surface of the contact lens. Therefore, the automatic optical detection system and the method for detecting the surface flaws of the contact lens can avoid misjudging the impurities in the water and the background dirt of the carrying disc which do not move along with the contact lens as the flaws on the surface of the contact lens, so as to improve the detection accuracy.
Description
Technical Field
The present invention relates to Inspection systems, and more particularly, to an Automated Optical Inspection (AOI) system and a method for inspecting defects on a surface of a contact lens.
Background
Defects on the surface of contact lenses include holes, scratches, and contaminants, and in order to improve the efficiency of manual visual inspection, the industry currently uses AOI systems for automated inspection. The AOI system can be divided into two major parts, namely hardware and software, wherein the hardware part uses a camera device to capture an image of a contact lens with a suitable light source, and the software part focuses on the development of an algorithm, for example, the AOI system can detect whether the surface of the contact lens has defects through the developed surface detection algorithm.
However, the conventional surface inspection algorithms usually capture the contact lens image in the hydration process and compare the image with the qualified reference image to detect the defects on the contact lens surface, but have the disadvantage that some impurities in water and the background dirt on the carrier plate carrying the contact lens are easily mistaken for the defects on the contact lens surface. In addition, the detection accuracy is also affected by uneven illumination. Therefore, how to design an AOI system and a method for detecting surface defects of a contact lens becomes an important issue in the art.
Disclosure of Invention
In view of the above, an embodiment of the present invention provides an AOI system, which includes a carrying tray, at least one probe, an image capturing module, and a system host. The carrier tray is used for carrying the contact lens in a hydration procedure, and the probe is used for moving the contact lens in the hydration procedure. The image acquisition module is arranged above the carrying disc and is used for acquiring a first image before the contact lens is moved and a second image after the contact lens is moved. The system host is coupled with the image acquisition module and used for finding out at least one suspicious defect position on the surface of the contact lens according to the first image, then checking whether the distance between the at least one suspicious defect position and the circle center of the contact lens is unchanged or not according to the first image and the second image, and judging whether the at least one suspicious defect position is a defect on the surface of the contact lens or not according to a checking result.
In addition, the present invention provides a method for detecting surface defects of a contact lens, which is performed in an AOI system, the AOI system including a carrier, at least one probe, an image capturing module and a system mainframe, the method comprising the following steps. Firstly, a carrying disc is used for carrying the contact lens in a hydration procedure, and an image acquisition module is used for acquiring a first image of the contact lens before the contact lens is moved. Then, the system host is used to find out at least one suspected defect on the surface of the contact lens according to the first image. Then, the contact lens in the hydration program is moved by the probe, the second image of the contact lens after the movement is obtained by the image acquisition module, and then whether the distance between the at least one suspicious defect position and the circle center of the contact lens is unchanged or not is checked by the system host according to the first image and the second image, and whether the at least one suspicious defect position is a defect on the surface of the contact lens or not is judged according to the checking result.
For a better understanding of the features and technical content of the present invention, reference should be made to the following detailed description of the invention and accompanying drawings, which are provided for purposes of illustration and description only and are not intended to limit the invention.
Drawings
FIG. 1 is a schematic diagram of an AOI system provided by an embodiment of the present invention.
Fig. 2A is a schematic view of a first image of a contact lens provided by an embodiment of the present invention before the contact lens is moved.
Fig. 2B is a schematic view of a second image of a contact lens after it has been moved according to an embodiment of the present invention.
FIG. 3 is a flowchart illustrating the steps of a method for detecting defects on the surface of a contact lens according to an embodiment of the present invention.
FIG. 4 is a flowchart illustrating a preferred embodiment of step S360 of the method of FIG. 3.
Detailed Description
The following is a description of embodiments of the present invention with reference to specific embodiments, and those skilled in the art will understand the advantages and effects of the present invention from the contents provided in the present specification. The invention is capable of other and different embodiments and its several details are capable of modification and various other changes, which can be made in various details within the specification and without departing from the spirit and scope of the invention. The drawings of the present invention are for illustrative purposes only and are not intended to be drawn to scale. The following embodiments will further explain the related art of the present invention in detail, but the contents are not provided to limit the scope of the present invention.
It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. In addition, the term "or" as used herein should be taken to include any one or combination of more of the associated listed items as the case may be.
Referring to fig. 1, fig. 1 is a schematic diagram of an AOI system according to an embodiment of the present invention. As shown in fig. 1, the AOI system 1 includes a carrier 10, at least one probe 11, a light source module 12, an image capturing module 14, and a system host 16, wherein the light source module 12 and the image capturing module 14 can be implemented by pure hardware or implemented by hardware and firmware or software, but the invention is not limited thereto. In this embodiment, the tray 10 is used to carry the contact lens 20 in a hydration procedure, and the probe 11 is used to move the contact lens 20 in a hydration procedure. For convenience of the following description, the number of probes in fig. 1 is only one, but it is not intended to limit the present invention, and the present invention is not limited to the specific implementation of the contact lens 20 moved by the probe 11. In practice, the probe 11 can move the contact lens 20 without disturbing the water, and the movement amplitude should preferably be larger than a predetermined distance, but the invention is not limited thereto. In addition, the light source module 12 is disposed under the boat 10 and is used to emit parallel light onto the contact lens 20. It should be noted that the parallel light is also called directional light, which is a group of parallel light rays without attenuation. Thus, the AOI system 1 will avoid being affected by illumination non-uniformities.
The image capturing module 14 is disposed above the tray 10 for obtaining a first image of the contact lens 20 before moving, as shown in fig. 2A, and obtaining a second image of the contact lens 20 after moving, as shown in fig. 2B. In practice, the image capturing module 14 may be composed of a Charge Coupled Device (CCD) and a lens, for example, but the invention is not limited thereto. In addition, the image capturing module 14 is coupled to the system host 16, and transmits the captured first image and the captured second image to the system host 16. In the embodiment, the system host 16 may be composed of a personal computer and peripheral devices, for example, but the invention is not limited thereto. In summary, it should be understood by those skilled in the art that the system host 16 includes an operating system (not shown in fig. 1), and the operating system is loaded with a surface detection algorithm to instruct the system host 16 to find at least one suspected defect on the surface of the contact lens 20 according to the first image, check whether the at least one suspected defect is located at a constant distance from the center of the contact lens 20 according to the first image and the second image, and determine whether the at least one suspected defect is a defect on the surface of the contact lens 20 according to the check result.
For example, the present embodiment is only described by the example of the system host 16 finding three suspected defects, i.e., the suspected defects S1-S3, but the present invention is not limited thereto. In addition, because the suspected defects are not easily maintained by the disturbed water S1-S3, the probe 11 moves the contact lens 20 without disturbing the water, and if a suspected defect is indeed a defect on the surface of the contact lens 20, the suspected defect is displaced synchronously with the movement of the contact lens 20, so that the distance between the suspected defect and the center of the contact lens 20 is kept constant. In contrast, if another suspected defect is not actually present on the surface of the contact lens 20, the another suspected defect is not displaced synchronously with the movement of the contact lens 20, so that the distance from the center of the contact lens 20 to the another suspected defect is changed. Therefore, in the present embodiment, when the system host 16 finds the suspected defects S1-S3, the system host 16 can further calculate and record the distances R1-R3 between the suspected defects S1-S3 and the center of the contact lens 20, respectively. Please note that the present invention is not limited to the specific implementation of the system host 16 for finding the suspected defect S1-S3 according to the first image, and for the convenience of the following description, the first image of FIG. 2A and the second image of FIG. 2B are only examples including the surrounding frames, and the second image of FIG. 2B is only an example in which the contact lens 20 moves to the right.
As shown in FIG. 2B, when the system host 16 receives the second image, the system host 16 may further recalculate and record the (new) distances R1R 3 between the suspected defect locations S1S 3 and the center of the contact lens 20, respectively. However, as shown in FIG. 1, since the suspected defect S1 is actually a hole H1 on the surface of the contact lens 20, when the contact lens 20 moves to the right, the hole H1 is displaced synchronously with the movement of the contact lens 20, so that the distance R1 between the suspected defect S1 and the center of the contact lens 20 remains the same. Therefore, when the system host 16 checks that the distance R1 between the suspected defect S1 and the center of the contact lens 20 is not changed, the system host 16 determines that the suspected defect S1 is a defect on the surface of the contact lens 20. In contrast, as shown in fig. 1, since the suspected defect S2 is actually a water impurity F1, even if the contact lens 20 moves to the right, the water impurity F1 does not synchronously shift with the movement of the contact lens 20, so that the distance R2 between the suspected defect S2 and the center of the contact lens 20 changes, as shown in fig. 2A-2B. Therefore, when the system host 16 checks that the distance R2 between the suspected defect S2 and the center of the contact lens 20 is changed, the system host 16 determines that the suspected defect S2 is not a defect on the surface of the contact lens 20.
Similarly, as shown in fig. 1, since the suspected defect S3 is actually the background dirt F2 of the carrier 10, even if the contact lens 20 moves to the right, the background dirt F2 of the carrier 10 does not synchronously shift with the movement of the contact lens 20, so that the distance R3 between the suspected defect S3 and the center of the contact lens 20 changes, as shown in fig. 2A-2B. Therefore, when the system host 16 checks that the distance R3 between the suspected defect S3 and the center of the contact lens 20 is changed, the system host 16 also determines that the suspected defect S3 is not a defect on the surface of the contact lens 20. In addition, as mentioned above, the AOI system 1 uses the parallel light to illuminate the contact lens 20, so that the first image and the second image are sharper, thereby overcoming the problem of uneven illumination affecting the detection.
Finally, to further illustrate the operation of the AOI system 1, the present invention further provides an embodiment of the operation method thereof. Referring to fig. 3, fig. 3 is a flowchart illustrating steps of a method for detecting defects on a contact lens according to an embodiment of the present invention. It should be noted that the method of fig. 3 may be implemented in the AOI system 1 of fig. 1, and therefore, please refer to fig. 1 for understanding, but the present invention does not limit that the method of fig. 3 can only be implemented in the AOI system 1 of fig. 1.
As shown in fig. 3, in step S310, the contact lens 20 in the hydration process is carried by the carrier 10, and in step S320, the image capturing module 14 obtains the first image of the contact lens 20 before the movement. Next, in step S330, the system host 16 is used to find at least one suspected defect on the surface of the contact lens 20 according to the first image, and in step S340, the contact lens 20 in the hydration process is moved by the probe 11. Then, in step S350, the image capturing module 14 obtains a second image of the contact lens 20 after the movement. Finally, in step S360, the system host 16 checks whether the distance between the at least one suspected defect and the center of the contact lens 20 is constant according to the first image and the second image, and determines whether the at least one suspected defect is a defect on the surface of the contact lens 20 according to the checking result. In addition, as mentioned above, the method of the present embodiment may further include emitting parallel light onto the contact lens 20 by using the light source module 12 disposed below the boat 10.
On the other hand, referring to fig. 4, fig. 4 is a flowchart of step S360 of the method of fig. 3 according to a preferred embodiment. In the embodiment of fig. 4, step S360 may include steps S410 to S470. In step S410, the system host 16 may first initialize the variable K to 1, and in step S420, the system host 16 checks whether the distance between the K-th suspected defect and the center of the contact lens 20 is constant according to the first image and the second image. If not, the system host 16 executes step S430 to determine that the K-th suspected defect is a defect on the surface of the contact lens 20; otherwise, the system host 16 executes step S440 to determine that the K-th suspected defect is not a defect on the surface of the contact lens 20. Next, in step S430 or step S450 after step S440, the system host 16 determines whether the K-th suspected defect is the last suspected defect it found. If not, the system host 16 executes step S460 to add 1 to the variable K, and returns to step S420 after adding 1 to K; if so, the system host 16 proceeds to step S470 to end the surface detection algorithm.
For the sake of the following description, the suspected defect S1 is taken as the first suspected defect (i.e., K ═ 1), and the suspected defect S2 and the suspected defect S3 are taken as the second suspected defect and the third suspected defect (i.e., K ═ 2 and 3), respectively. Therefore, when the system host 16 checks that the distance R1 from the center of the contact lens 20 is not changed, the system host 16 determines that the first suspected defect is a defect on the surface of the contact lens 20. Then, since the first suspected defect is not the last suspected defect found by the system host 16, the system host 16 will return to step S420 after K is added by 1, check whether the distance R2 between the second suspected defect and the center of the contact lens 20 is constant, and when the system host 16 checks that the distance R2 between the second suspected defect and the center of the contact lens 20 is changed, the system host 16 will determine that the second suspected defect is not a defect on the surface of the contact lens 20, and so on, the third suspected defect will also be determined by the system host 16 as not a defect on the surface of the contact lens 20, and the system host 16 will end the process further because the third suspected defect is the last suspected defect found by the system host 16. Since the details are as described above, further description is omitted here.
In summary, the AOI system and the method for detecting defects on a contact lens surface thereof according to the embodiments of the present invention can find at least one suspected defect on the contact lens surface according to a first image of the contact lens before moving, and then check whether a distance between the at least one suspected defect and a center of the contact lens is constant according to the first image and a second image of the contact lens after moving. When the distance between the first suspicious defect position and the circle center of the contact lens is not changed, the system host judges that the first suspicious defect position is a defect on the surface of the contact lens. Therefore, the AOI system and the method for detecting the surface flaws of the contact lenses can avoid misjudging the impurities in the water and the background dirt of the carrying disc which do not move along with the contact lenses as the flaws on the surfaces of the contact lenses so as to improve the detection accuracy. In addition, the invention uses the parallel light to irradiate the contact lens, so that the first image and the second image are sharper, and the problem of influence on detection caused by uneven illumination is solved.
The disclosure is only a preferred embodiment of the invention and should not be taken as limiting the scope of the invention, so that the invention is not limited by the disclosure of the invention.
Claims (6)
1. An automated optical inspection system, comprising:
a carrier tray for carrying a contact lens in a hydration process;
at least one probe for moving said contact lens during said hydration process;
the image acquisition module is arranged above the carrying disc and is used for acquiring a first image of the contact lens before movement and a second image of the contact lens after movement; and
and the system host is coupled with the image acquisition module and used for finding out at least one suspicious defect position on the surface of the contact lens according to the first image, then checking whether the distance between the at least one suspicious defect position and the circle center of the contact lens is unchanged according to the first image and the second image, and judging whether the at least one suspicious defect position is a defect on the surface of the contact lens according to a checking result.
2. The automated optical inspection system of claim 1, further comprising:
and the light source module is arranged below the carrying disc and is used for emitting parallel light to the contact lens.
3. The automated optical inspection system of claim 1, wherein said system host determines that a first suspected defect is said defect on said contact lens surface when said distance from said contact lens center is constant, and determines that a second suspected defect is not said defect on said contact lens surface when said distance from said contact lens center is variable.
4. A method for detecting surface defects of a contact lens, the method being implemented in an automatic optical inspection system, the automatic optical inspection system comprising a carrier, at least one probe, an image capture module, and a system host, the method comprising:
the carrying disc is used for carrying the contact lens in a hydration program, and the image acquisition module is used for acquiring a first image of the contact lens before the contact lens is moved;
finding at least one suspected flaw on the surface of the contact lens according to the first image by using the system host;
moving the contact lens in the hydration process by using the at least one probe, and acquiring a second image of the contact lens after the contact lens is moved by using the image acquisition module; and
and checking whether the distance between the at least one suspected flaw and the circle center of the contact lens is unchanged by utilizing the system host according to the first image and the second image, and judging whether the at least one suspected flaw is the flaw on the surface of the contact lens according to a checking result.
5. The method of claim 4, further comprising:
and emitting parallel light onto the contact lens by using a light source module arranged below the carrying disc.
6. The method of claim 4, wherein said system host determines that a first suspected defect is said defect on said contact lens surface when said distance from said contact lens center is inspected to be constant, and determines that a second suspected defect is not said defect on said contact lens surface when said distance from said contact lens center is inspected to be variable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010171753.4A CN113390897A (en) | 2020-03-12 | 2020-03-12 | Automatic optical detection system and method for detecting surface flaws of contact lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010171753.4A CN113390897A (en) | 2020-03-12 | 2020-03-12 | Automatic optical detection system and method for detecting surface flaws of contact lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113390897A true CN113390897A (en) | 2021-09-14 |
Family
ID=77615800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010171753.4A Pending CN113390897A (en) | 2020-03-12 | 2020-03-12 | Automatic optical detection system and method for detecting surface flaws of contact lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113390897A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1285910A (en) * | 1997-11-14 | 2001-02-28 | 韦斯利－杰森公司 | Automatic lens inspection system |
| JP2002090305A (en) * | 2000-09-19 | 2002-03-27 | Nkk Corp | Surface defect inspection device |
| CN1950669A (en) * | 2004-05-10 | 2007-04-18 | 皇家飞利浦电子股份有限公司 | Device and method for optical precision measurement |
| TW201350838A (en) * | 2012-06-08 | 2013-12-16 | Power Assist Instr Scient Corp | Device for inspecting contact lens edge |
| TWM483169U (en) * | 2014-04-15 | 2014-08-01 | Gainner Company Ltd | Contact lenses transfer apparatus |
| CN204666534U (en) * | 2015-04-23 | 2015-09-23 | 明基材料有限公司 | Optical mirror slip detection system |
| CN105115989A (en) * | 2015-10-09 | 2015-12-02 | 南京爱丁堡环保科技有限公司 | Automatic defect detecting equipment and detecting method for contact lenses |
| US20180246044A1 (en) * | 2015-10-26 | 2018-08-30 | Huawei Technologies Co., Ltd. | Display defect detection method, apparatus, and device for display screen |
-
2020
- 2020-03-12 CN CN202010171753.4A patent/CN113390897A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1285910A (en) * | 1997-11-14 | 2001-02-28 | 韦斯利－杰森公司 | Automatic lens inspection system |
| JP2002090305A (en) * | 2000-09-19 | 2002-03-27 | Nkk Corp | Surface defect inspection device |
| CN1950669A (en) * | 2004-05-10 | 2007-04-18 | 皇家飞利浦电子股份有限公司 | Device and method for optical precision measurement |
| TW201350838A (en) * | 2012-06-08 | 2013-12-16 | Power Assist Instr Scient Corp | Device for inspecting contact lens edge |
| TWM483169U (en) * | 2014-04-15 | 2014-08-01 | Gainner Company Ltd | Contact lenses transfer apparatus |
| CN204666534U (en) * | 2015-04-23 | 2015-09-23 | 明基材料有限公司 | Optical mirror slip detection system |
| CN105115989A (en) * | 2015-10-09 | 2015-12-02 | 南京爱丁堡环保科技有限公司 | Automatic defect detecting equipment and detecting method for contact lenses |
| US20180246044A1 (en) * | 2015-10-26 | 2018-08-30 | Huawei Technologies Co., Ltd. | Display defect detection method, apparatus, and device for display screen |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8472697B2 (en) | Method and apparatus for visual inspection | |
| EP3361239B1 (en) | Display defect detection method, device and equipment | |
| KR102379872B1 (en) | Detecting defects on a wafer using defect-specific information | |
| US20040223146A1 (en) | Optical inspection of a specimen using multi-channel responses from the specimen | |
| JP7058324B2 (en) | Inspection equipment, inspection methods, learning methods, and programs | |
| WO2020105319A1 (en) | Defect inspection device and defect inspection method | |
| US20150043805A1 (en) | Image processing system, image processing method, and computer-readable recording medium | |
| JP2006284471A (en) | Pattern inspection method, pattern inspection device and pattern inspecting program | |
| JPH10148619A (en) | Method and device for inspecting face defect of substrate under inspection | |
| US7756318B2 (en) | Pattern inspection apparatus and method with local critical dimension error detectability | |
| TW201510517A (en) | Method and system for improving wafer surface inspection sensitivity | |
| US20130111417A1 (en) | Database-Driven Cell-to-Cell Reticle Inspection | |
| CN113390897A (en) | Automatic optical detection system and method for detecting surface flaws of contact lens | |
| TWI722817B (en) | Automated optical inspection system and metod for inspecting defect on contact lens surface the same | |
| CN116678895A (en) | Screen scratch detection method, system and storage medium | |
| JP2009103494A (en) | Surface inspection apparatus | |
| JP5104346B2 (en) | Surface defect inspection method and apparatus | |
| JP7554154B2 (en) | DEFECT DETECTION APPARATUS, DEFECT DETECTION METHOD, IMAGE PROCESSING APPARATUS, AND IMAGE PROCESSING PROGRAM | |
| JP2007147376A (en) | Inspection device | |
| TWI728708B (en) | Automated optical inspection system and metod for inspecting defect in contact lens edge the same | |
| KR20210143648A (en) | An apparatus for detecting internal defects in an electronic component and method thereof | |
| CN113311006A (en) | Automatic optical detection system and method for detecting edge defects of contact lens | |
| JP2009025004A (en) | Inspection device and method for plane substrate | |
| CN111316090A (en) | Microscopic defect detection system and method for transparent or semitransparent material | |
| CN111183351A (en) | Image sensor surface defect detection method and detection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |