CN113348557A - 显示基板及其制作方法、显示面板和显示装置 - Google Patents
显示基板及其制作方法、显示面板和显示装置 Download PDFInfo
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- CN113348557A CN113348557A CN201980002068.4A CN201980002068A CN113348557A CN 113348557 A CN113348557 A CN 113348557A CN 201980002068 A CN201980002068 A CN 201980002068A CN 113348557 A CN113348557 A CN 113348557A
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- 239000000758 substrate Substances 0.000 title claims abstract description 105
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 98
- 239000000463 material Substances 0.000 claims abstract description 97
- 239000010409 thin film Substances 0.000 claims abstract description 39
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 13
- 238000005224 laser annealing Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 230000007547 defect Effects 0.000 abstract description 3
- 230000000007 visual effect Effects 0.000 abstract description 3
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- 239000003990 capacitor Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 239000000969 carrier Substances 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 229920001621 AMOLED Polymers 0.000 description 2
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- 238000000137 annealing Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
- G09G3/3233—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the current through the light-emitting element
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
一种显示基板及其制作方法、显示面板和显示装置。显示基板包括薄膜晶体管阵列层;薄膜晶体管阵列层中的驱动晶体管的半导体材料层图形(30)包括第一沟道部(40),第一沟道部(40)包括第一子沟道部分和第二子沟道部分;半导体材料层图形(30)还包括第一导电部(41);第一子沟道部分的电流传导方向所在直线与数据线(D1)的延伸方向所在直线之间的夹角为第一夹角;第二子沟道部分的电流传导方向所在直线与数据线(D1)的延伸方向所在直线之间的夹角为第二夹角;第一导电部(41)的电流传导方向所在直线与数据线(D1)的延伸方向所在直线之间的夹角为第三夹角;第一夹角小于第二夹角,第三夹角小于第二夹角。该显示基板能降低显示亮度不均匀的视觉缺陷,提高显示基板的品质及良率。
Description
PCT国内申请,说明书已公开。
Claims (20)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/CN2019/112462 WO2021077280A1 (zh) | 2019-10-22 | 2019-10-22 | 显示基板及其制作方法、显示面板和显示装置 |
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CN113348557A true CN113348557A (zh) | 2021-09-03 |
Family
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Application Number | Title | Priority Date | Filing Date |
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CN201980002068.4A Pending CN113348557A (zh) | 2019-10-22 | 2019-10-22 | 显示基板及其制作方法、显示面板和显示装置 |
Country Status (3)
Country | Link |
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US (1) | US12021087B2 (zh) |
CN (1) | CN113348557A (zh) |
WO (1) | WO2021077280A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20220060031A (ko) * | 2020-11-02 | 2022-05-11 | 삼성디스플레이 주식회사 | 트랜지스터 기판 및 이를 포함하는 표시 장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103578426A (zh) * | 2012-08-02 | 2014-02-12 | 三星显示有限公司 | 有机发光二极管显示器 |
CN105518771A (zh) * | 2013-09-12 | 2016-04-20 | 索尼公司 | 显示装置、制造显示装置的方法,和电子设备 |
US20180286314A1 (en) * | 2017-03-31 | 2018-10-04 | Samsung Display Co., Ltd. | Organic light emitting diode display |
CN110349997A (zh) * | 2018-04-03 | 2019-10-18 | 三星显示有限公司 | 有机发光二极管显示器 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101228475B1 (ko) * | 2006-06-05 | 2013-01-31 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조 방법 |
KR20080055093A (ko) * | 2006-12-14 | 2008-06-19 | 엘지디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조방법 |
KR102049444B1 (ko) * | 2013-05-10 | 2019-11-28 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 유기 발광 표시 장치 제조용 포토 마스크 |
KR102140302B1 (ko) * | 2013-09-06 | 2020-08-03 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 유기 발광 표시 장치 제조용 포토 마스크 |
KR102606279B1 (ko) * | 2016-04-04 | 2023-11-27 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
CN106505071B (zh) | 2016-10-18 | 2019-12-06 | 武汉华星光电技术有限公司 | 薄膜晶体管阵列基板及其制作方法 |
KR102607697B1 (ko) * | 2017-02-07 | 2023-11-29 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
KR20180099976A (ko) * | 2017-02-27 | 2018-09-06 | 삼성디스플레이 주식회사 | 표시 장치 |
CN107104112A (zh) | 2017-06-20 | 2017-08-29 | 京东方科技集团股份有限公司 | 一种阵列基板及其制作方法、显示面板、显示装置 |
US10803802B2 (en) * | 2018-06-19 | 2020-10-13 | Samsung Display Co., Ltd. | Display device |
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2019
- 2019-10-22 US US17/255,815 patent/US12021087B2/en active Active
- 2019-10-22 CN CN201980002068.4A patent/CN113348557A/zh active Pending
- 2019-10-22 WO PCT/CN2019/112462 patent/WO2021077280A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103578426A (zh) * | 2012-08-02 | 2014-02-12 | 三星显示有限公司 | 有机发光二极管显示器 |
CN105518771A (zh) * | 2013-09-12 | 2016-04-20 | 索尼公司 | 显示装置、制造显示装置的方法,和电子设备 |
US20180286314A1 (en) * | 2017-03-31 | 2018-10-04 | Samsung Display Co., Ltd. | Organic light emitting diode display |
CN110349997A (zh) * | 2018-04-03 | 2019-10-18 | 三星显示有限公司 | 有机发光二极管显示器 |
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Publication number | Publication date |
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WO2021077280A1 (zh) | 2021-04-29 |
US12021087B2 (en) | 2024-06-25 |
US20210366941A1 (en) | 2021-11-25 |
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