CN113340476A - 一种二维解耦力矩触觉传感器及mems制备方法 - Google Patents
一种二维解耦力矩触觉传感器及mems制备方法 Download PDFInfo
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- CN113340476A CN113340476A CN202110499686.3A CN202110499686A CN113340476A CN 113340476 A CN113340476 A CN 113340476A CN 202110499686 A CN202110499686 A CN 202110499686A CN 113340476 A CN113340476 A CN 113340476A
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- 229910052710 silicon Inorganic materials 0.000 claims description 48
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Pressure Sensors (AREA)
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Citations (14)
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---|---|---|---|---|
GB1562766A (en) * | 1977-03-25 | 1980-03-19 | Electric Power Res Inst | Biaxial capacitance strain transducer |
DE3837776A1 (de) * | 1988-11-08 | 1990-05-10 | Bran & Luebbe | Kraftmessfeder niedriger bauhoehe |
US6532824B1 (en) * | 1999-07-09 | 2003-03-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
CN101710006A (zh) * | 2009-07-07 | 2010-05-19 | 西安交通大学 | 一种三维微力测量装置 |
US20110036181A1 (en) * | 2007-05-14 | 2011-02-17 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Tactile sensor with decoupled sensor cells |
CN102759637A (zh) * | 2011-04-26 | 2012-10-31 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度传感器及其制造方法 |
CN102798734A (zh) * | 2011-05-24 | 2012-11-28 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度计及其制造方法 |
CN103604533A (zh) * | 2013-11-27 | 2014-02-26 | 东南大学 | 一种偏转电容式表面微机械加工残余应力的测试结构 |
CN104101373A (zh) * | 2013-04-09 | 2014-10-15 | 飞思卡尔半导体公司 | 校准包含传感器的器件的方法及设备 |
DE102014019547B3 (de) * | 2014-12-23 | 2016-05-12 | Samson Ag | Drehmoment- und Winkelsensor und Stellantrieb |
DE102015102013A1 (de) * | 2015-02-12 | 2016-08-18 | Valeo Schalter Und Sensoren Gmbh | Sensorvorrichtung mit einer Drehmomentsensoreinrichtung und einer Inkrementalsensoreinrichtung und Kraftfahrzeug mit einer solchen Sensorvorrichtung |
CN107884100A (zh) * | 2017-11-23 | 2018-04-06 | 燕山大学 | 一种基于电容感知的集成微型六维力传感器 |
CN207832823U (zh) * | 2018-01-26 | 2018-09-07 | 成都信息工程大学 | 一种大质量块梳齿电容式三轴加速度传感器 |
CN109641741A (zh) * | 2016-08-29 | 2019-04-16 | 罗伯特·博世有限公司 | 用于制造微机械传感器的方法 |
-
2021
- 2021-05-08 CN CN202110499686.3A patent/CN113340476B/zh active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1562766A (en) * | 1977-03-25 | 1980-03-19 | Electric Power Res Inst | Biaxial capacitance strain transducer |
DE3837776A1 (de) * | 1988-11-08 | 1990-05-10 | Bran & Luebbe | Kraftmessfeder niedriger bauhoehe |
US6532824B1 (en) * | 1999-07-09 | 2003-03-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
US20110036181A1 (en) * | 2007-05-14 | 2011-02-17 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Tactile sensor with decoupled sensor cells |
CN101710006A (zh) * | 2009-07-07 | 2010-05-19 | 西安交通大学 | 一种三维微力测量装置 |
CN102759637A (zh) * | 2011-04-26 | 2012-10-31 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度传感器及其制造方法 |
CN102798734A (zh) * | 2011-05-24 | 2012-11-28 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度计及其制造方法 |
CN104101373A (zh) * | 2013-04-09 | 2014-10-15 | 飞思卡尔半导体公司 | 校准包含传感器的器件的方法及设备 |
CN103604533A (zh) * | 2013-11-27 | 2014-02-26 | 东南大学 | 一种偏转电容式表面微机械加工残余应力的测试结构 |
DE102014019547B3 (de) * | 2014-12-23 | 2016-05-12 | Samson Ag | Drehmoment- und Winkelsensor und Stellantrieb |
DE102015102013A1 (de) * | 2015-02-12 | 2016-08-18 | Valeo Schalter Und Sensoren Gmbh | Sensorvorrichtung mit einer Drehmomentsensoreinrichtung und einer Inkrementalsensoreinrichtung und Kraftfahrzeug mit einer solchen Sensorvorrichtung |
CN109641741A (zh) * | 2016-08-29 | 2019-04-16 | 罗伯特·博世有限公司 | 用于制造微机械传感器的方法 |
CN107884100A (zh) * | 2017-11-23 | 2018-04-06 | 燕山大学 | 一种基于电容感知的集成微型六维力传感器 |
CN207832823U (zh) * | 2018-01-26 | 2018-09-07 | 成都信息工程大学 | 一种大质量块梳齿电容式三轴加速度传感器 |
Non-Patent Citations (2)
Title |
---|
SHI-TE CHUANG 等: "Asymmetric fan-shape-electrode for high-angle-detection-accuracy tactile sensor" * |
董林玺 等: "倾斜梳齿的MEMS 电容式加速度传感器自我标定特性研究" * |
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