CN113340476B - 一种二维解耦力矩触觉传感器及mems制备方法 - Google Patents
一种二维解耦力矩触觉传感器及mems制备方法 Download PDFInfo
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- CN113340476B CN113340476B CN202110499686.3A CN202110499686A CN113340476B CN 113340476 B CN113340476 B CN 113340476B CN 202110499686 A CN202110499686 A CN 202110499686A CN 113340476 B CN113340476 B CN 113340476B
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- 239000003990 capacitor Substances 0.000 claims abstract description 31
- 238000005259 measurement Methods 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 47
- 229910052710 silicon Inorganic materials 0.000 claims description 47
- 239000010703 silicon Substances 0.000 claims description 47
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 22
- 238000004140 cleaning Methods 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
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- 238000001259 photo etching Methods 0.000 claims description 9
- 238000004026 adhesive bonding Methods 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
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- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
- G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
- G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
Abstract
Description
Claims (6)
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CN202110499686.3A CN113340476B (zh) | 2021-05-08 | 2021-05-08 | 一种二维解耦力矩触觉传感器及mems制备方法 |
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CN202110499686.3A CN113340476B (zh) | 2021-05-08 | 2021-05-08 | 一种二维解耦力矩触觉传感器及mems制备方法 |
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CN113340476B true CN113340476B (zh) | 2023-10-27 |
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Citations (13)
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GB1562766A (en) * | 1977-03-25 | 1980-03-19 | Electric Power Res Inst | Biaxial capacitance strain transducer |
DE3837776A1 (de) * | 1988-11-08 | 1990-05-10 | Bran & Luebbe | Kraftmessfeder niedriger bauhoehe |
US6532824B1 (en) * | 1999-07-09 | 2003-03-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
CN101710006A (zh) * | 2009-07-07 | 2010-05-19 | 西安交通大学 | 一种三维微力测量装置 |
CN102759637A (zh) * | 2011-04-26 | 2012-10-31 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度传感器及其制造方法 |
CN102798734A (zh) * | 2011-05-24 | 2012-11-28 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度计及其制造方法 |
CN103604533A (zh) * | 2013-11-27 | 2014-02-26 | 东南大学 | 一种偏转电容式表面微机械加工残余应力的测试结构 |
CN104101373A (zh) * | 2013-04-09 | 2014-10-15 | 飞思卡尔半导体公司 | 校准包含传感器的器件的方法及设备 |
DE102014019547B3 (de) * | 2014-12-23 | 2016-05-12 | Samson Ag | Drehmoment- und Winkelsensor und Stellantrieb |
DE102015102013A1 (de) * | 2015-02-12 | 2016-08-18 | Valeo Schalter Und Sensoren Gmbh | Sensorvorrichtung mit einer Drehmomentsensoreinrichtung und einer Inkrementalsensoreinrichtung und Kraftfahrzeug mit einer solchen Sensorvorrichtung |
CN107884100A (zh) * | 2017-11-23 | 2018-04-06 | 燕山大学 | 一种基于电容感知的集成微型六维力传感器 |
CN207832823U (zh) * | 2018-01-26 | 2018-09-07 | 成都信息工程大学 | 一种大质量块梳齿电容式三轴加速度传感器 |
CN109641741A (zh) * | 2016-08-29 | 2019-04-16 | 罗伯特·博世有限公司 | 用于制造微机械传感器的方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007022871A1 (de) * | 2007-05-14 | 2008-11-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Taktilsensor mit entkoppelten Sensorzellen |
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2021
- 2021-05-08 CN CN202110499686.3A patent/CN113340476B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1562766A (en) * | 1977-03-25 | 1980-03-19 | Electric Power Res Inst | Biaxial capacitance strain transducer |
DE3837776A1 (de) * | 1988-11-08 | 1990-05-10 | Bran & Luebbe | Kraftmessfeder niedriger bauhoehe |
US6532824B1 (en) * | 1999-07-09 | 2003-03-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
CN101710006A (zh) * | 2009-07-07 | 2010-05-19 | 西安交通大学 | 一种三维微力测量装置 |
CN102759637A (zh) * | 2011-04-26 | 2012-10-31 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度传感器及其制造方法 |
CN102798734A (zh) * | 2011-05-24 | 2012-11-28 | 中国科学院上海微系统与信息技术研究所 | Mems三轴加速度计及其制造方法 |
CN104101373A (zh) * | 2013-04-09 | 2014-10-15 | 飞思卡尔半导体公司 | 校准包含传感器的器件的方法及设备 |
CN103604533A (zh) * | 2013-11-27 | 2014-02-26 | 东南大学 | 一种偏转电容式表面微机械加工残余应力的测试结构 |
DE102014019547B3 (de) * | 2014-12-23 | 2016-05-12 | Samson Ag | Drehmoment- und Winkelsensor und Stellantrieb |
DE102015102013A1 (de) * | 2015-02-12 | 2016-08-18 | Valeo Schalter Und Sensoren Gmbh | Sensorvorrichtung mit einer Drehmomentsensoreinrichtung und einer Inkrementalsensoreinrichtung und Kraftfahrzeug mit einer solchen Sensorvorrichtung |
CN109641741A (zh) * | 2016-08-29 | 2019-04-16 | 罗伯特·博世有限公司 | 用于制造微机械传感器的方法 |
CN107884100A (zh) * | 2017-11-23 | 2018-04-06 | 燕山大学 | 一种基于电容感知的集成微型六维力传感器 |
CN207832823U (zh) * | 2018-01-26 | 2018-09-07 | 成都信息工程大学 | 一种大质量块梳齿电容式三轴加速度传感器 |
Non-Patent Citations (2)
Title |
---|
Shi-Te Chuang 等.Asymmetric fan-shape-electrode for high-angle-detection-accuracy tactile sensor.《2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)》.2015,第740-743页. * |
董林玺 等.倾斜梳齿的MEMS 电容式加速度传感器自我标定特性研究.《传感技术学报》.2013,第26卷(第10期),第1357-1363页. * |
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