CN113281910A - Method and device for correcting position of light spot of laser - Google Patents
Method and device for correcting position of light spot of laser Download PDFInfo
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- CN113281910A CN113281910A CN202110602258.9A CN202110602258A CN113281910A CN 113281910 A CN113281910 A CN 113281910A CN 202110602258 A CN202110602258 A CN 202110602258A CN 113281910 A CN113281910 A CN 113281910A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
- C23C24/10—Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Abstract
The embodiment of the invention discloses a method and a device for correcting the position of a light spot of a laser. The method for correcting the spot position of the laser comprises the following steps: acquiring the position of the center of a target area to be irradiated of a device to be processed through an image acquisition module, and recording the position as a first position; acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of a spot center before a laser does not emit a laser beam; and if the first distance is not within the preset range, adjusting the position of the laser and/or adjusting the emission direction of the laser so as to enable the first distance to be within the preset range. The technical scheme provided by the embodiment of the invention can enable the center of the light spot of the laser to be aligned with the center of the sealing material, and avoids the phenomena of poor sealing effect, burning and the like near the sealing material caused by deviation of the laser or deviation of the coated sealing material.
Description
Technical Field
The invention relates to the technical field of laser application, in particular to a method and a device for correcting the position of a light spot of a laser.
Background
With the increasing application fields of display panels and the increasing manufacturing processes of display panels, the application range of display panels is also increasing. In the manufacturing process of the display panel, a substrate and a cover plate of the display panel need to be hermetically sealed (sealing). The process of sealing and packaging comprises the following steps: coating a sealing material such as Glass frit (Glass frit) on the cover plate, and covering the cover plate on the substrate; and then, melting the sealing material through laser irradiation, and solidifying the molten sealing material to bond the cover plate and the substrate so as to isolate the devices on the substrate from the outside.
In the process of sealing and packaging, the sealing material is irradiated by laser at a constant speed along a certain direction. In the prior art, due to the problems of deviation of a laser head of a laser, deviation of a coated sealing material and the like, the sealing effect is poor, and phenomena such as burning and the like exist near the sealing material.
Disclosure of Invention
The embodiment of the invention provides a method and a device for correcting the position of a light spot of a laser, which aims to align the center of the light spot of the laser to the center of a sealing material, and avoids the phenomena of poor sealing effect, burning near the sealing material and the like caused by deviation of the laser or deviation of the coated sealing material.
In a first aspect, an embodiment of the present invention provides a method for correcting a spot position of a laser, including:
acquiring the position of the center of a target area to be irradiated of a device to be processed through an image acquisition module, and recording the position as a first position;
acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of a spot center before a laser does not emit a laser beam;
if the first distance is not within the preset range, the position of the laser is adjusted, and/or the emission direction of the laser is adjusted, so that the first distance is within the preset range, the center of a light spot of a laser beam to be emitted of the laser is aligned with the center of a target area to be irradiated, the center of the light spot of the laser is aligned with the center of the sealing material, poor sealing effect caused by deviation of the laser or deviation of the coated sealing material is avoided, and phenomena such as burning and the like exist near the sealing material.
Further, the method for correcting the spot position of the laser further includes:
and if the first distance is within the preset range, enabling the laser to emit laser beams.
Furthermore, the emitting direction of the laser is unchanged, and the lens direction of the image acquisition module is unchanged; the relative position of the laser and the image acquisition module is unchanged,
after the position of the laser is adjusted, returning to execute the following operations: the image acquisition module is used for acquiring the position of the center of a target area to be irradiated of the device to be processed, so that the second position of the center of the light spot in an image acquired before the position of the laser is adjusted is the same as the second position of the center of the light spot in an image acquired after the position of the laser is adjusted, the second position does not need to be repeatedly calculated, and the program is simplified.
Further, before the image acquisition module acquires the position of the center of the target area to be irradiated of the device to be processed, the method further comprises the following steps:
the center of the visual field of the image acquisition module is overlapped with the center of a light spot of a laser beam to be emitted of the laser, so that the second position of the center of the light spot is always the center position of the image in the image, and the second position is always the origin coordinate of the image, and the calculation is simplified.
Further, adjusting the position of the laser comprises:
acquiring position correction information of the laser according to the first position and the second position;
and adjusting the position of the laser according to the position correction information of the laser.
Further, the lens direction of the image acquisition module is unchanged; the relative position of the laser and the image acquisition module is unchanged, and after the emission direction of the laser is adjusted, the operation is returned to be executed: the position of the center of a target area to be irradiated of the device to be processed is obtained through an image acquisition module,
after adjusting the emitting direction of the laser, before acquiring the first distance between the first position and the second position, the method further comprises the following steps:
the second position is determined based on the firing direction of the laser.
Further, adjusting the emission direction of the laser comprises:
acquiring the transmitting direction correction information of the laser according to the first position and the second position;
and adjusting the emission direction of the laser according to the emission direction correction information of the laser.
Further, adjusting the emission direction of the laser comprises: the emitting direction of the laser is adjusted by adjusting the position and/or the inclination angle of an optical element in the optical path system in the laser.
In a second aspect, an embodiment of the present invention further provides a device for correcting a spot position of a laser, including:
the image acquisition module is used for acquiring the position of the center of a target area to be irradiated of the device to be processed and recording the position as a first position;
the distance acquisition module is used for acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of a light spot center before the laser does not emit a laser beam;
and the correction module is used for adjusting the position of the laser and/or adjusting the emission direction of the laser so as to enable the first distance to be within a preset range.
Further, the spot position correction device of the laser further includes:
a transmission enabling module for enabling the laser to transmit laser beam;
and the adjusting module is used for setting the center of the visual field of the image acquisition module and the center of a light spot of a laser beam to be emitted of the laser to be coincident.
According to the technical scheme of the embodiment of the invention, the position of the center of a target area to be irradiated of a device to be processed is obtained through an image acquisition module and recorded as a first position; acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of a spot center before a laser does not emit a laser beam; if the first distance is not within the preset range, the position of the laser is adjusted, and/or the emission direction of the laser is adjusted, so that the first distance is within the preset range, the center of a light spot of a laser beam to be emitted of the laser is aligned with the center of a target area to be irradiated, the center of the light spot of the laser is aligned with the center of the sealing material, poor sealing effect caused by deviation of the laser or deviation of the coated sealing material is avoided, and phenomena such as burning and the like exist near the sealing material.
Drawings
Fig. 1 is a flowchart of a method for correcting a spot position of a laser according to an embodiment of the present invention;
fig. 2 is a schematic top view of a display panel according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram before adjustment according to an embodiment of the present invention;
fig. 4 is a schematic diagram of an image acquired by an image acquisition module before adjustment according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of an adjusted structure according to an embodiment of the present invention;
fig. 6 is a schematic diagram of an image acquired by an image acquisition module after adjustment according to an embodiment of the present invention;
fig. 7 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention;
FIG. 8 is a schematic structural diagram of another embodiment of the present invention before adjustment;
FIG. 9 is a schematic diagram of an image captured by another image capturing module according to an embodiment of the present invention before adjustment;
FIG. 10 is a schematic view of another modified structure provided in the embodiments of the present invention;
FIG. 11 is a schematic view of another modified structure provided in the embodiments of the present invention;
fig. 12 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention;
fig. 13 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention;
FIG. 14 is a schematic view of the center of the field of view of the image acquisition module and the center of the spot of the laser beam emitted by the laser being positioned to coincide;
fig. 15 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention;
fig. 16 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention;
FIG. 17 is a flow chart of a sealing method provided by an embodiment of the present invention;
fig. 18 is a schematic view of an application scenario provided in the embodiment of the present invention;
fig. 19 is a schematic view illustrating a moving mechanism driving a laser to move along a first direction according to an embodiment of the present invention;
fig. 20 is a schematic diagram of another application scenario provided in the embodiment of the present invention;
fig. 21 is a schematic view illustrating a laser moving along a first direction by a moving mechanism according to another embodiment of the present invention;
fig. 22 is a schematic structural diagram of a spot position correction apparatus for a laser according to an embodiment of the present invention;
fig. 23 is a schematic structural diagram of a spot position correction apparatus for a laser according to another embodiment of the present invention;
fig. 24 is a schematic structural diagram of a spot position correction apparatus for a laser according to another embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The embodiment of the invention provides a method for correcting the position of a light spot of a laser. Fig. 1 is a flowchart of a method for correcting a spot position of a laser according to an embodiment of the present invention. The method may be performed by a spot position correction device of the laser, which may be implemented by software and/or hardware. The method specifically comprises the following steps:
and 110, acquiring the position of the center of a target area to be irradiated of the device to be processed through an image acquisition module, and recording the position as a first position.
The first position may be a position of a center of the target area to be irradiated in the image acquired by the image acquisition module. The image acquisition module may include a CCD (charge coupled device) or the like. The device to be processed may include an organic light emitting display panel or a liquid crystal display panel, etc. The target area to be irradiated may be provided with a sealing material or the like. The lens direction of the image acquisition module can be fixed. The image acquisition module is fixed relative to the position of the laser, and the image acquisition module can be fixedly connected with the laser.
For example, the method for correcting the spot position of the laser provided by the embodiment can be applied to the packaging process of the display panel. Fig. 2 is a schematic top view of a display panel according to an embodiment of the present invention. Fig. 3 is a schematic structural diagram before adjustment according to an embodiment of the present invention. The display panel in fig. 3 may be a schematic cross-sectional view along a direction A1a2 in fig. 2. Fig. 3 exemplarily shows a case where the center 301 of the target area to be irradiated (a first position in the actual physical space) is misaligned with the spot center 11 (a second position in the actual physical space) of the laser beam to be emitted (indicated by a dotted line in fig. 3), and the center 301 of the target area to be irradiated is located on the left side of the spot center 11 of the laser beam to be emitted. Fig. 4 is a schematic diagram of an image acquired by an image acquisition module before adjustment according to an embodiment of the present invention. Fig. 4 is an image captured by the image capturing module 2 in the state shown in fig. 3. The display panel includes a first substrate 10 and a second substrate 20 disposed opposite to each other, and a sealing material 30 disposed between the first substrate 10 and the second substrate 20. A ring of sealing material 30 is continuously disposed at the edge of the display panel 100; the target region to be irradiated is the region where the sealing material 30 under the laser 1 is present. The thickness direction of the display panel is parallel to the third direction Z, and the extension direction of the sealing material 30 under the laser 1 is parallel to the second direction Y. The first direction X, the second direction Y, and the third direction Z may be perpendicular to each other.
And 120, acquiring a first distance between the first position and a second position, wherein the second position is a virtual position of the center of the light spot before the laser emits no laser beam.
The first distance may be a distance D between the first position 301 and the second position 11 in the image, or may be an actual distance D between the first position 301 and the second position 11 in an actual physical space. The actual distance D between the first position 301 and the second position 11 in the actual physical space may be obtained from the distance D between the first position 301 and the second position 11 in the image and the ratio k of the actual physical space size to the image size, which is, for example, equal to the product of the distance D and the ratio k, i.e., D ═ kd.
Since the laser does not emit the laser beam in step 110, and no light spot exists in the obtained image, before step 110, the second position 11 representing the center of the light spot in the image may be obtained, for example, the emitting direction of the laser may be set to a preset direction in advance, so that the laser emits the laser beam in the preset direction to irradiate the test device, the second image including the light spot is obtained through the image acquisition module 2, and then the position of the center of the light spot 11 in the second image is obtained, so as to obtain the second position of the center of the light spot 11 in the image. The preset direction may be a vertically downward direction (parallel to the third direction Z), or a direction having an angle with the vertically downward direction. Optionally, the second position 11 is in the center position of the image. The position relation between the image acquisition module 2 and the laser 1, the lens direction of the image acquisition module 2, and the like are reasonably set as required, so that the second position 11 is in the center of the image. Optionally, the emission direction of the laser is unchanged.
As shown in fig. 3 and 4 in conjunction, the center 301 of the target area to be irradiated is misaligned with the spot center 11 of the laser beam to be emitted, and the distance between the first position 301 of the center of the target area to be irradiated in the image and the second position 11 of the spot center in the image is d.
Step 130, if the first distance is not within the preset range, adjusting the position of the laser to make the first distance within the preset range.
If the first distance is not within the preset range, which indicates that the center 301 of the target area to be irradiated is not aligned with the spot center 11, the position of the laser 1 needs to be adjusted, for example, the position of the laser in the first direction X may be adjusted.
The corresponding relationship between the first distance and the position adjustment amount of the laser 1 may be established in advance through experiments, formula derivation, and the like, so as to determine the size of the position adjustment amount of the laser 1 corresponding to the current first distance according to the current first distance and the corresponding relationship between the first distance and the position adjustment amount of the laser 1. By adjusting the position of the laser 1, the light spot center 11 of the laser beam to be emitted of the laser 1 is close to the center 301 of the target area to be irradiated until the light spot center 11 of the laser beam to be emitted of the laser 1 is aligned with the center 301 of the target area to be irradiated, and then the laser 1 can emit the laser beam, and the moving mechanism drives the laser to move from the initial position to the end position along the extending direction of the sealing material for one circle. Alternatively, the position of the laser 1 is adjusted by the position adjusting mechanism 3.
Fig. 5 is a schematic diagram of an adjusted structure according to an embodiment of the present invention. Fig. 6 is a schematic diagram of an image acquired by an image acquisition module after adjustment according to an embodiment of the present invention. Fig. 6 may be an image captured by the image capture module 2 in the state shown in fig. 5. Fig. 5 shows an exemplary case of adjusting the position of the laser. Referring to fig. 2 to 6, after the position of the laser 1 is adjusted, the center 301 of the target area to be irradiated is aligned with the spot center 11 of the laser beam to be emitted, the first position 301 of the center of the target area to be irradiated in the image is aligned with the second position 11 of the spot center in the image, and the actual distance D or the distance D is within the preset range.
In the technical scheme of the embodiment, the position of the center of a target area to be irradiated of a device to be processed is obtained through an image acquisition module and is recorded as a first position; acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of a spot center before a laser does not emit a laser beam; if the first distance is not within the preset range, the position of the laser is adjusted to enable the first distance to be within the preset range, so that the center of a light spot of a laser beam to be emitted of the laser is aligned to the center of a target area to be irradiated, the center of the light spot of the laser is aligned to the center of the sealing material, poor sealing effect caused by deviation of the laser or deviation of the coated sealing material is avoided, and phenomena such as burning and the like exist near the sealing material.
The embodiment of the invention provides a light spot position correction method of a laser. Fig. 7 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention. On the basis of the above embodiment, the method includes:
step 210, acquiring, by an image acquisition module, a position of a center of a target area to be irradiated of the device to be processed, and recording the position as a first position.
The lens direction of the image acquisition module can be fixed and unchanged. The image acquisition module is fixed relative to the position of the laser, and the image acquisition module can be fixedly connected with the laser.
Fig. 8 is a schematic structural diagram before another adjustment according to an embodiment of the present invention. Fig. 8 exemplarily shows a case where the center 301 of the target area to be irradiated is misaligned with the spot center 11 of the laser beam to be emitted (indicated by a dotted line in fig. 8), and the center 301 of the target area to be irradiated is located on the right side of the spot center 11 of the laser beam to be emitted. Fig. 9 is a schematic diagram of an image acquired by another image acquisition module before adjustment according to an embodiment of the present invention. Fig. 9 is an image captured by the image capturing module 2 in the state shown in fig. 8.
And step 220, acquiring a first distance between the first position and a second position, wherein the second position is a virtual position of the center of the light spot before the laser emits no laser beam.
Since the laser does not emit the laser beam in step 210, and no spot exists in the obtained image, the position representing the center of the spot when the laser emits the laser beam in the preset direction may be obtained before step 210. For example, the emitting direction of the laser may be set to a preset direction in advance, the laser emits a laser beam in the preset direction, the laser beam irradiates the test device, the second image including the light spot is obtained through the image acquisition module 2, and the position of the light spot center 11 in the second image is further obtained, so that the second position of the light spot center 11 in the image is obtained.
As shown in fig. 8 and 9, the center 301 of the target region to be irradiated is not aligned with the spot center 11 of the laser beam to be emitted, and the distance D or the actual distance D between the first position of the center 301 of the target region to be irradiated in the image and the second position 11 of the spot center in the image is not within the preset range.
Step 230, if the first distance is not within the preset range, adjusting the emitting direction of the laser to make the first distance within the preset range.
After the emission direction of the laser is adjusted, if the emission direction of the laser can be adjusted once, the center of a light spot of a laser beam to be emitted of the laser can be aligned to the center of a target area to be irradiated, then, the laser 1 can emit the laser beam, and the moving mechanism drives the laser to start from the initial position and move for a circle along the extension direction of the sealing material to the end position, and then the process is finished.
Before step 230, a corresponding relationship between the first distance and the adjustment amount of the emitting direction of the laser may be established in advance through experiments, formula derivation, and the like, so as to determine the adjustment amount of the emitting direction of the laser corresponding to the current first distance according to the current first distance and the corresponding relationship between the first distance and the adjustment amount of the emitting direction of the laser. By adjusting the emitting direction of the laser 1, the light spot center 11 of the laser beam to be emitted of the laser 1 is close to the center 301 of the target area to be irradiated until the light spot center 11 of the laser beam to be emitted of the laser 1 is aligned with the center 301 of the target area to be irradiated, and then the laser 1 can emit the laser beam, and the moving mechanism drives the laser to start from the initial position and move for one circle along the extending direction of the sealing material to the end position and then finish.
Fig. 10 is a schematic diagram of another adjusted structure according to an embodiment of the present invention. Fig. 10 is an exemplary diagram illustrating the case where the emission direction of the laser is adjusted. As shown in fig. 8 to 10, after the emission direction of the laser 1 is adjusted, the center 301 of the target area to be irradiated is aligned with the spot center 11 of the laser beam to be emitted. The image captured by the image capture module 2 in the state shown in fig. 10 is the same as or similar to that of fig. 6.
According to the technical scheme provided by the embodiment, the position of the center of a target area to be irradiated of a device to be processed is obtained through an image acquisition module and is recorded as a first position; acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of a spot center before a laser does not emit a laser beam; if the first distance is not within the preset range, the emission direction of the laser is adjusted to enable the first distance to be within the preset range, so that the center of a light spot of a laser beam to be emitted of the laser is aligned with the center of a target area to be irradiated, the center of the light spot of the laser is aligned with the center of the sealing material, poor sealing effect caused by deviation of the laser or deviation of the coated sealing material is avoided, and phenomena such as burning and the like exist near the sealing material.
Optionally, on the basis of the foregoing embodiment, fig. 11 is a schematic view of a further adjusted structure provided in the embodiment of the present invention, where adjusting the emission direction of the laser 1 includes: the emission direction (i.e., the focusing direction) of the laser 1 is adjusted by adjusting the position and/or inclination angle θ of the optical element 12 in the optical path system within the laser 1. Fig. 11 is an exemplary diagram illustrating the case where the emission direction of the laser is adjusted. The optical element 12 may comprise a focusing mirror or the like within the laser lens. The laser spot of the laser beam is a focus point where the laser is converged through the focusing lens, and the laser power density is most concentrated at the focus point. Adjusting the position of the optical element 12 in the optical path system within the laser 1 may comprise at least one of: the position of the optical element 12 in the thickness direction Z of the display panel, the position of the optical element 12 in the first direction X, and the like. The first direction X may be perpendicular to an extending direction of the sealing material under the laser, and the first direction X may be perpendicular to a thickness direction Z of the display panel.
The embodiment of the invention provides a light spot position correction method of a laser. Fig. 12 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention. On the basis of the above embodiment, the method includes:
step 310, acquiring the position of the center of the target area to be irradiated of the device to be processed through an image acquisition module, and recording the position as a first position.
And step 320, acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of the center of the light spot before the laser emits no laser beam.
Step 330, determining whether the first distance is within a preset range.
If the first distance is not within the predetermined range, step 340 may be executed. If the first distance is within the predetermined range, step 350 may be performed.
And 340, adjusting the position of the laser, and/or adjusting the emission direction of the laser so that the first distance is within a preset range.
After step 340 is performed, step 350 may be performed. Step 350 may be performed by adjusting once to make the first distance within the preset range, so that the center of the spot of the laser beam to be emitted by the laser is aligned with the center of the target area to be irradiated.
Step 350, causing the laser to emit a laser beam.
After the laser emits the laser beam, the moving mechanism can drive the laser to start from the initial position and move for one circle along the extending direction of the sealing material to the end position, and then the operation is finished.
The method comprises the steps of collecting an image before a laser emits a laser beam to correct a laser spot, collecting the image when the laser beam is emitted to correct the laser spot, avoiding poor sealing effect caused by deviation of the laser or deviation of a coated sealing material and the like, avoiding phenomena of burning and the like near the sealing material, and avoiding influence on image definition caused by overhigh brightness of the laser beam.
The embodiment of the invention provides a light spot position correction method of a laser. Fig. 13 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention. On the basis of the above embodiment, the method includes:
and step 410, setting the center of the visual field of the image acquisition module to be coincident with the center of a light spot of a laser beam to be emitted of the laser.
Wherein the emission direction of the laser 1 is unchanged. The lens direction 22 of the image acquisition module 2 is fixed. Fig. 14 is a schematic view showing a view center of an image acquisition module and a spot center of a laser beam emitted by a laser being set to coincide. Accessible is experimental, make the laser beam that laser instrument 1 sent shine to test device 200 on, acquire the second image that includes the facula through image acquisition module 2, and then acquire the position of facula center 11 in the second image, through the position relation of reasonable setting image acquisition module 2 and laser instrument 1, image acquisition module's camera lens direction 22 etc. so that the position of facula center 11 in the second image is the center of second image, be equivalent to image acquisition module's field of vision center 23 and the coincidence of the facula center 11 of the laser beam that the laser instrument sent, so that second position 11 is the central point (the position that corresponds with image acquisition module's field of vision center 23) of image, second position 11 is the original point coordinate of image all the time, in order to simplify the calculation.
Step 420, acquiring the position of the center of the target area to be irradiated of the device to be processed through the image acquisition module, and recording the position as a first position.
And 430, acquiring a first distance between the first position and a second position, wherein the second position is a virtual position of the center of the light spot before the laser emits no laser beam.
Step 440, determining whether the first distance is within a preset range.
If the first distance is not within the predetermined range, step 450 may be executed. If the first distance is within the predetermined range, step 470 may be performed.
And 450, acquiring position correction information of the laser according to the first position and the second position.
The position correction information may include a moving direction and a moving distance of the laser. Illustratively, the first position 301 is located at the left side of the second position 11, and the moving direction of the laser is toward the left, and the moving distance may be the distance D between the first position 301 and the second position 11 in the actual physical space. Before step 450, the corresponding relationship between the position correction information and the first position and the second position may be established in advance through experiments, formula derivation, and the like, so as to determine the position correction information of the laser corresponding to the current first position and the current second position according to the current first position and the current second position and the corresponding relationship between the position correction information and the first position and the current second position.
And step 460, adjusting the position of the laser according to the position correction information of the laser, so that the first distance is within a preset range.
After the position of the laser is adjusted once, the first distance is within the preset range, so that the center of the spot of the laser beam to be emitted of the laser is aligned with the center of the target area to be irradiated, and after step 460 is executed, step 470 can be executed.
Step 470, cause the laser to emit a laser beam.
The embodiment of the invention provides a light spot position correction method of a laser. Fig. 15 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention. On the basis of the above embodiment, the method includes:
and step 510, setting the center of the visual field of the image acquisition module to be coincident with the center of a light spot of a laser beam to be emitted of the laser.
And step 520, acquiring the position of the center of the target area to be irradiated of the device to be processed through the image acquisition module, and recording the position as a first position.
And step 530, acquiring a first distance between a first position and a second position, wherein the second position is a virtual position of the center of the light spot before the laser emits no laser beam.
And 540, judging whether the first distance is within a preset range.
If the first distance is not within the predetermined range, step 550 may be executed. If the first distance is within the predetermined range, step 570 may be performed.
And step 550, acquiring position correction information of the laser according to the first position and the second position.
The position correction information may include a moving direction and a moving distance of the laser. Illustratively, the first position 301 is located at the right side of the second position 11, and the moving direction of the laser is towards the right, and the moving distance can be a set step size.
And step 560, adjusting the position of the laser according to the position correction information of the laser.
The position of the laser can be adjusted once or repeatedly for multiple times, so that the first distance is within a preset range. After adjusting the position of the laser, the process returns to step 520 to verify whether the adjusted first distance is within the predetermined range.
Step 570, cause the laser to emit a laser beam.
Optionally, the emitting direction of the laser is unchanged, the lens direction of the image acquisition module is unchanged, and the relative position between the laser and the image acquisition module is unchanged, so that the second position in the image acquired by the spot center before the position of the laser is adjusted and the second position in the image acquired after the position of the laser is adjusted are the same, and may be the center position of the image or other positions in the image, and thus the second position does not need to be repeatedly calculated, so as to simplify the program.
The embodiment of the invention provides a light spot position correction method of a laser. Fig. 16 is a flowchart of a spot position correction method for a laser according to another embodiment of the present invention. On the basis of the above embodiment, the method includes:
step 610, acquiring the position of the center of the target area to be irradiated of the device to be processed through an image acquisition module, and recording the position as a first position.
Step 620, a first distance between the first location and the second location is obtained. And the second position is a virtual position of the center of the facula before the laser does not emit the laser beam.
Step 630, determine whether the first distance is within a predetermined range.
If the first distance is not within the predetermined range, step 640 may be executed. If the first distance is within the predetermined range, step 670 may be performed.
And step 640, acquiring emission direction correction information of the laser according to the first position and the second position.
The emission direction correction information may include, among other things, the position and/or inclination angle θ of the optical element 12 in the optical path system within the laser 1, so as to adjust the angle between the emission direction of the laser and the vertically downward direction. Before step 640, the corresponding relationship between the transmission direction correction information and the first position and the second position may be established in advance through experiments, formula derivation, and the like, so as to determine the transmission direction correction information corresponding to the current first position and the current second position according to the current first position and the current second position and the corresponding relationship between the transmission direction correction information and the first position and the current second position.
And step 650, adjusting the emission direction of the laser according to the emission direction correction information of the laser.
The emitting direction of the laser can be adjusted once or repeatedly for multiple times, so that the first distance is within a preset range. After adjusting the emitting direction of the laser, the execution of step 610 may be returned, or after the execution of steps 650 and 660, the execution of step 610 may be returned to verify whether the adjusted first distance is within the preset range.
Step 660 determines a second position based on the firing direction of the laser.
Wherein step 660 may be performed after step 650 is performed and before step 620 is performed. Optionally, the lens direction of the image acquisition module is unchanged; the relative position of the laser and the image acquisition module is unchanged, so that the position of the second position in the image is only related to the emission direction of the laser, and the structure and the procedure are simplified.
Step 670, causing the laser to emit a laser beam.
The embodiment of the invention provides a sealing method. Fig. 17 is a flowchart of a sealing method according to an embodiment of the present invention. The sealing method comprises a spot position correction method of the laser provided by any embodiment of the invention. The sealing method can be executed by the sealing processing device provided by any embodiment of the invention, and the sealing processing device can be realized by software and/or hardware. On the basis of the above embodiment, the sealing method includes:
and 710, acquiring the position of the center of the target area to be irradiated of the device to be processed, which is recorded as a first position, through an image acquisition module arranged corresponding to the laser.
The target area to be irradiated is the area where the sealing material below the laser is located.
And 720, acquiring a first distance between the first position and a second position, wherein the second position is a virtual position of the center of the light spot before the laser emits no laser beam.
And 730, if the first distance is not within the preset range, adjusting the position of the laser, and/or adjusting the emission direction of the laser to enable the first distance to be within the preset range.
And 740, if the first distance is within the preset range, enabling the laser to emit laser beams.
And 750, driving the laser to move for one circle along the extending direction of the sealing material in the corresponding display panel unit area by the moving mechanism.
The laser device comprises a laser device, a sealing material, a moving mechanism and a sealing material, wherein the laser device is used for emitting laser beams, the moving mechanism is used for moving the laser device along the extending direction of the sealing material of the corresponding display panel, and the laser device is driven to move for a circle by the moving mechanism according to preset parameters.
The device to be processed includes a first substrate 10 and a second substrate 20 disposed opposite to each other, and a sealing material 30 disposed between the first substrate 10 and the second substrate 20. The sealing material 30 may include frit, etc.
Optionally, fig. 18 is a schematic view of an application scenario provided in an embodiment of the present invention, where the device to be processed 100 includes a display panel unit area 101. Compared with a scheme that one display panel unit area corresponds to a plurality of lasers, any display panel unit area 101 corresponds to one laser 1, and the situation that secondary sealing (sealing) is generated to influence the packaging effect and the interface is possibly subjected to overlarge stress collapse can be avoided.
A ring of sealing material 30 is continuously provided at the edge in any one of the display panel unit areas 101. The shape of the sealing material 30 in any display panel unit region 101 may be a parallelogram frame, specifically, a rectangular frame, or the like. The target region to be irradiated is the region where the sealing material 30 under the laser 1 is present. Fig. 18 exemplarily shows a case where the moving mechanism moves the laser along the second direction Y. Fig. 19 is a schematic view illustrating a moving mechanism driving a laser to move along a first direction according to an embodiment of the present invention. The moving mechanism 4 can drive the laser 1 to move along the four sides 31, 32, 33 and 34 of the sealing material 30 in sequence to complete the irradiation of the whole sealing material 30.
The sealing method provided by the embodiment of the invention includes the method for correcting the spot position of the laser provided by the embodiment of the invention, so that the sealing method provided by the embodiment of the invention also has the beneficial effects described in the embodiments, and details are not repeated here.
Optionally, on the basis of the above embodiment, the moving mechanism 4 may include a gantry 41, a first direction driving module 43, and a second direction driving module 42, the laser 1 is disposed on the corresponding first direction driving module 43, the first direction driving module 43 is disposed on a cross beam of the gantry 41, the first direction driving module 43 may be configured to drive the laser 1 to move along a first direction X, the second direction driving module 42 is connected to the gantry 41, the second direction driving module 42 may be configured to drive the gantry 41 to drive the laser 1 to move along a second direction Y, and the first direction X and the second direction Y are respectively parallel to two adjacent sides of the sealing material 30. The edge 31 of the sealing material 30 is parallel to the second direction Y. The edge 32 of the sealing material 30 is parallel to the first direction X. The beam of the gantry 41 is parallel to the first direction X. The first direction driving module 43 moves along the beam of the gantry 41. Optionally, the moving mechanism drives the laser to move for one circle along the extending direction of the sealing material in the corresponding display panel unit area, including: a first operation, a second operation, a third operation, and a fourth operation, wherein the first operation includes: the second direction driving module 42 drives the portal frame 41 to drive the laser 1 to move along the negative direction Y-of the second direction Y, and the moving distance is equal to the side length of the sealing material 30 parallel to the second direction Y; the second operation includes: the first direction driving module 43 drives the laser 1 to move along a positive direction X + of the first direction X by a distance equal to a side length of the sealing material 30 parallel to the first direction X; the third operation includes: the second direction driving module 42 drives the portal frame 41 to drive the laser 1 to move along the positive direction Y + of the second direction Y, and the moving distance is equal to the side length of the sealing material 30 parallel to the second direction Y; the fourth operation includes: the first direction driving module 43 drives the laser 1 to move in the negative direction X-of the first direction X by a distance equal to the side length of the sealing material 30 parallel to the first direction X. The order of execution of the first operation, the second operation, the third operation, and the fourth operation may be changed. The first operation, the second operation, the third operation, and the fourth operation may be sequentially performed in this order. The second operation, the third operation, the fourth operation, and the first operation may be sequentially performed. The third operation, the fourth operation, the first operation, and the second operation may be sequentially performed. The fourth operation, the first operation, the second operation, and the third operation may be sequentially performed. The moving speed may be set as required, which is not limited in the embodiment of the present invention, and the movement in the first operation, the second operation, the third operation, and the fourth operation may be a uniform movement.
Optionally, fig. 20 is a schematic view of another application scenario provided by the embodiment of the present invention, fig. 21 is a schematic view of another moving mechanism provided by the embodiment of the present invention driving a laser to move along a first direction, and the device to be processed 100 includes a plurality of display panel unit regions 101 arranged in an array. Optionally, there are at least two lasers 1. Different lasers 1 may correspond to different image acquisition modules 2. The first direction driving modules 43 correspond to the lasers 1 one to one. Different lasers 1 correspond to different first direction drive modules 43. Fig. 20 and 21 exemplarily show a case where the laser 1-1 corresponds to the image capturing module 2-1, the laser 1-1 corresponds to the first direction driving module 43-1, the laser 1-2 corresponds to the image capturing module 2-2, and the laser 1-2 corresponds to the first direction driving module 43-2. At least two lasers 1 are arranged on a beam of the portal frame 41 at intervals. In the same row of display panel unit areas 101, different display panel unit areas 101 may correspond to different lasers. At least two lasers 1 share one portal frame and the second direction driving module 42, and the second direction driving module does not need to be arranged for each laser independently, so that the mechanical structure is simplified. The second direction driving module 42 can be used to drive the gantry 41 to drive the laser 1 corresponding to one row of the display panel unit area 101 to move along the second direction Y. The beams of the gantry 41 are parallel to the row direction. The second direction Y is parallel to the column direction. The laser welding of the sealing material in one row of the display panel unit area 101 can be simultaneously performed by the moving mechanism 4.
The same row of display panel unit areas 101 may correspond to the same laser. After the moving mechanism 4 drives each laser to move for one circle along the extending direction of the sealing material 30 in the display panel unit area 101 in the previous row, the laser stops emitting the laser beam, the moving mechanism 4 drives each laser to move to the display panel unit area 101 in the next row, and performs laser spot correction on the laser at the preset initial position of the sealing material, so that the laser 1 is aligned with the center of the initial position of the sealing material 30 in the corresponding display panel unit area 101, then the laser emits the laser beam, and further the moving mechanism 4 drives each laser to move for one circle along the extending direction of the sealing material 30 in the display panel unit area 101 in the current row, and the process is repeated until the laser welding of the sealing material 30 in all the display panel unit areas 101 in all the rows is completed.
After the packaging of the display panel is completed, referring to fig. 20 and 21, the display panel may be cut into a plurality of sub-display panels along cutting lines 105.
If the position of the laser is adjusted so that the center of the spot of the laser beam to be emitted of the laser 1 is aligned with the center of the target area to be irradiated, the laser can be arranged on the corresponding position adjusting mechanism 3, and the position adjusting mechanism 3 is arranged on the portal frame. The position adjusting mechanism 3 may include a servo motor or the like. The position adjusting mechanism 3 and the first direction driving module 43 may be the same mechanism or different mechanisms. If the edge of the initial welding position of the sealing material is perpendicular to the beam of the gantry 41, the position adjusting mechanism 3 and the first direction driving module 43 may be the same mechanism.
If the center of the spot of the laser beam to be emitted of the laser is aligned with the center of the target area to be irradiated only by adjusting the emitting direction of the laser, the position adjusting mechanism 3 does not need to work, so that the requirement on a mechanical device can be reduced, and the operation stability of a laser transmission mechanism can be improved.
The embodiment of the invention provides a device for correcting the position of a light spot of a laser. Fig. 22 is a schematic mechanism diagram of a spot position correction apparatus for a laser according to an embodiment of the present invention. The device for correcting the laser spot position can be used for executing the method for correcting the laser spot position provided by the embodiment of the invention. The spot position correction device of the laser comprises: image acquisition module 2, distance determination module 810, and correction module 820.
The image acquisition module 2 is used for acquiring the position of the center of a target area to be irradiated of the device to be processed, and recording the position as a first position; the distance obtaining module 810 is configured to obtain a first distance between a first position and a second position, where the second position is a virtual position of a spot center before the laser does not emit a laser beam; the correction module 820 is used for adjusting the position of the laser and/or adjusting the emitting direction of the laser so that the first distance is within a preset range.
The device for correcting the position of the laser spot provided by the embodiment of the present invention can be used for executing the method for correcting the position of the laser spot provided by the embodiment of the present invention, and therefore, the device for correcting the position of the laser spot provided by the embodiment of the present invention also has the beneficial effects described in the above embodiments, and details are not repeated herein.
Optionally, the modification module 820 is configured to adjust the position of the laser and/or adjust the emitting direction of the laser if the first distance is not within the preset range, so that the first distance is within the preset range.
Optionally, the correction module 820 is configured to obtain position correction information of the laser according to the first position and the second position; and adjusting the position of the laser according to the position correction information of the laser.
Optionally, the correction module 820 is configured to obtain the transmission direction correction information of the laser according to the first position and the second position; and adjusting the emission direction of the laser according to the emission direction correction information of the laser.
Optionally, on the basis of the foregoing embodiment, fig. 23 is a schematic mechanism diagram of a spot position correction apparatus for a laser according to another embodiment of the present invention, where the spot position correction apparatus for a laser further includes: the determining module 850 is configured to determine whether the first distance is not within a preset range.
FIG. 23 may correspond to the scheme: only the position of the laser is adjusted so that the spot center of the laser beam to be emitted of the laser is aligned with the center of the target area to be irradiated.
Optionally, on the basis of the foregoing embodiment, with continuing reference to fig. 23, the spot position correction apparatus for a laser further includes: a transmission enabling module 830 for enabling the laser to transmit a laser beam.
Optionally, the emission enabling module 830 is configured to enable the laser to emit a laser beam if the first distance is within a preset range. Optionally, the emission enabling module 830 is configured to adjust the position of the laser by the modification module 820, and/or enable the laser to emit a laser beam after adjusting the emission direction of the laser.
Optionally, on the basis of the foregoing embodiment, with continuing reference to fig. 23, the spot position correction apparatus for a laser further includes: and the adjusting module 840 is used for setting the center of the visual field of the image acquisition module and the center of the spot of the laser beam to be emitted of the laser to be coincident.
Optionally, the adjusting module 840 is configured to set a center of a field of view of the image acquisition module and a center of a spot of a laser beam to be emitted of the laser to coincide with each other before the position of the center of the target area to be irradiated of the device to be processed is acquired by the image acquisition module 2.
The image acquisition module 2 is configured to acquire an image of a target area to be irradiated of the device to be processed, which is located below the current laser 1, and identify a position of a center of the target area to be irradiated in the image.
Optionally, the emission direction of the laser is unchanged. Optionally, the lens direction of the image acquisition module is unchanged, and the relative position of the laser and the image acquisition module is unchanged.
Optionally, the correction module 820 includes a position adjusting mechanism 3, and the position adjusting mechanism 3 is configured to adjust the position of the laser if the distance is not within the preset range.
Optionally, the correction module 820 is used to adjust the emitting direction of the laser by adjusting the position and/or tilt angle of the optical element in the optical path system in the laser.
Optionally, on the basis of the foregoing embodiment, fig. 24 is a schematic mechanism diagram of a spot position correction apparatus for a laser according to another embodiment of the present invention, where the spot position correction apparatus for a laser further includes: a second position determination module 860 for determining the second position according to the emitting direction of the laser before the distance obtaining module 810 obtains the first distance between the first position and the second position after the modification module 820 adjusts the emitting direction of the laser.
FIG. 24 may correspond to the scheme: only the emitting direction of the laser is adjusted so that the spot center of the laser beam to be emitted of the laser is aligned with the center of the target area to be irradiated.
Optionally, there are at least two lasers 1. The image acquisition modules 2 are arranged in one-to-one correspondence with the lasers 1.
The device for correcting the position of the light spot of the laser can execute the method for correcting the position of the light spot of the laser provided by any embodiment of the invention, and has corresponding functional modules and beneficial effects of the execution method.
Alternatively, the apparatus to be processed 100 includes a first substrate 10 and a second substrate 20 disposed opposite to each other, and a sealing material 30 disposed between the first substrate 10 and the second substrate 20.
The apparatus to be processed 100 includes one display panel unit region 101, or a plurality of display panel unit regions 101 arranged in an array. Compared with a scheme that one display panel unit area corresponds to a plurality of lasers, the display panel unit area can avoid secondary sealing (sealing) from occurring, the packaging effect is influenced, and the situation that the interface is possibly cracked due to overlarge stress can occur.
A ring of sealing material 30 is continuously arranged on the edge in any display panel unit area 101; the target region to be irradiated is the region where the sealing material 30 under the laser 1 is present.
The embodiment of the invention provides a sealing treatment device. The sealing processing device can execute the sealing method provided by any embodiment of the invention. On the basis of the above embodiments, the sealing processing apparatus includes the laser spot position correction apparatus and the moving mechanism 4 according to any of the embodiments of the present invention.
The moving mechanism 4 is used for driving one or at least two lasers to move one circle along the extending direction of the sealing material in the corresponding display panel unit area after the emission enabling module 830 enables the lasers to emit laser beams.
The sealing processing device provided by the embodiment of the present invention includes the light spot position correction device of the laser device provided by the embodiment of the present invention, and therefore, the sealing processing device provided by the embodiment of the present invention also has the beneficial effects described in the above embodiments, and details are not described here.
The sealing processing apparatus provided in the embodiment of the present invention may perform the sealing method provided in any embodiment of the present invention, and therefore the sealing processing apparatus provided in the embodiment of the present invention also has the beneficial effects described in the above embodiments, and details are not described herein again.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A spot position correction method for a laser, comprising:
acquiring the position of the center of a target area to be irradiated of a device to be processed through an image acquisition module, and recording the position as a first position;
acquiring a first distance between the first position and a second position, wherein the second position is a virtual position of a spot center before the laser emits no laser beam;
and if the first distance is not within a preset range, adjusting the position of the laser, and/or adjusting the emission direction of the laser to enable the first distance to be within the preset range.
2. The spot position correction method for a laser according to claim 1, further comprising:
and if the first distance is within a preset range, enabling the laser to emit laser beams.
3. The method for correcting the position of a light spot of the laser according to claim 1, wherein the emitting direction of the laser is unchanged, and the lens direction of the image acquisition module is unchanged; the relative position of the laser and the image acquisition module is unchanged,
after adjusting the position of the laser, returning to perform the operations of: and acquiring the position of the center of a target area to be irradiated of the device to be processed through an image acquisition module.
4. The method of correcting the spot position of the laser according to claim 3, wherein before the acquiring, by the image acquisition module, the position of the center of the target area to be irradiated of the device to be processed, the method further comprises:
and setting the center of the visual field of the image acquisition module and the center of a light spot of a laser beam to be emitted of the laser to be coincident.
5. The spot position correction method for a laser according to claim 1, wherein adjusting the position of the laser comprises:
acquiring position correction information of the laser according to the first position and the second position;
and adjusting the position of the laser according to the position correction information of the laser.
6. The method according to claim 1, wherein a lens direction of the image capturing module is unchanged; the relative position of the laser and the image acquisition module is unchanged, and after the emission direction of the laser is adjusted, the operation is returned to be executed: the position of the center of a target area to be irradiated of the device to be processed is obtained through an image acquisition module,
after adjusting the emitting direction of the laser, before acquiring the first distance between the first position and the second position, further comprising:
and determining a second position according to the emission direction of the laser.
7. The spot position correction method for a laser according to claim 1, wherein adjusting the emission direction of the laser comprises:
acquiring the transmitting direction correction information of the laser according to the first position and the second position;
and adjusting the emission direction of the laser according to the emission direction correction information of the laser.
8. The spot position correction method for a laser according to claim 1, wherein adjusting the emission direction of the laser comprises: the emission direction of the laser is adjusted by adjusting the position and/or inclination angle of an optical element in an optical path system in the laser.
9. A spot position correction apparatus for a laser, comprising:
the image acquisition module is used for acquiring the position of the center of a target area to be irradiated of the device to be processed and recording the position as a first position;
the distance acquisition module is used for acquiring a first distance between the first position and a second position, wherein the second position is a virtual position of a spot center before the laser does not emit a laser beam;
and the correction module is used for adjusting the position of the laser and/or adjusting the emission direction of the laser so as to enable the first distance to be within a preset range.
10. The spot position correction apparatus for a laser according to claim 9, characterized by further comprising:
a transmission enabling module for enabling the laser to transmit laser beams;
and the adjusting module is used for setting the center of the visual field of the image acquisition module and the center of a light spot of a laser beam to be emitted of the laser to be coincident.
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| CN117270202A (en) * | 2023-11-22 | 2023-12-22 | 上海频准激光科技有限公司 | Method and device for adjusting light power passing area of light guide component |
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