CN113267831A - Constant temperature device for testing MEMS gravimeter - Google Patents
Constant temperature device for testing MEMS gravimeter Download PDFInfo
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- CN113267831A CN113267831A CN202110665095.9A CN202110665095A CN113267831A CN 113267831 A CN113267831 A CN 113267831A CN 202110665095 A CN202110665095 A CN 202110665095A CN 113267831 A CN113267831 A CN 113267831A
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- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V13/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices covered by groups G01V1/00 – G01V11/00
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- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
- G05D23/193—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
- G05D23/1932—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces
- G05D23/1934—Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of a plurality of spaces each space being provided with one sensor acting on one or more control means
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Abstract
The invention discloses a constant temperature device for testing an MEMS gravimeter, which comprises three levels of constant temperature units which are sequentially nested from inside to outside, wherein the temperature control areas of the constant temperature units at all levels are sequentially reduced from outside to inside, and the outermost layer adopts a vacuum cavity as a controlled cavity, so that the influence of thermal convection and thermal conduction on the MEMS gravimeter is reduced, the air buoyancy is inhibited, and the temperature control precision can be greatly improved; in addition, as the temperature control points of each level of temperature control unit are sequentially decreased from inside to outside to form a heat dissipation channel from inside to outside, the temperature of each level of constant temperature unit can be controlled in a mode of combining active temperature control and passive temperature control on the premise of not adding other heat dissipation devices, so as to maintain the dynamic balance of the temperature in the device, avoid introducing vibration noise in the test process of the MEMS gravimeter, have strong external interference resistance, and provide a high-precision constant temperature environment for the MEMS gravimeter with small volume, low cost and high external interference resistance.
Description
Technical Field
The invention belongs to the field of temperature control, and particularly relates to a constant temperature device for testing an MEMS gravimeter.
Background
The gravimeter is an instrument for measuring gravity acceleration, and is widely applied to the fields of geophysical, petroleum and mineral exploration, inertial navigation, seismology and the like. The traditional commercial gravimeter has wide application, but has limited application in many scenes due to high cost and large volume. The MEMS gravimeter is a novel relative gravimeter, which is referred to in chinese patent CN107092038A, and has the advantages of small size, light weight, and low cost, and is expected to enrich the application scenarios of gravimeters in the future.
The core unit of the MEMS gravimeter is a gravity sensor which is a spring vibrator unit based on a silicon structure. The silicon-based spring-vibrator structure with high sensitivity can be realized through MEMS (micro-electromechanical systems) process preparation, and the resolution of tens of to hundreds of mu Gal levels is realized in gravity measurement. However, the young's modulus of the silicon material is sensitive to temperature changes, and the changes in young's modulus caused by temperature changes directly contribute to the output of the gravimeter, thereby affecting the stability of the instrument. In order to ensure high sensitivity and long-term stability of the instrument, a high-precision constant-temperature environment needs to be provided for the instrument.
The existing constant temperature device for testing the MEMS gravimeter mainly realizes constant temperature control by means of active heating and active heat dissipation, and directly uses the MEMS gravimeter as a temperature control object, so that the temperature control area is large, and the temperature control precision is low. In addition, in the prior art, active heat dissipation is realized by installing heat dissipation devices such as a fan, a TEC and the like in the device, and the size is large; and the mode of radiating through the fan can bring extra vibration, influences the use of MEMS gravity appearance.
Disclosure of Invention
Aiming at the defects or the improvement requirements of the prior art, the invention provides a constant temperature device for testing an MEMS gravimeter, which is used for solving the technical problem that the prior art cannot provide a high-precision constant temperature environment for the MEMS gravimeter on the premise of meeting the requirements of smaller volume and higher external interference resistance.
In order to achieve the above object, the present invention provides a constant temperature device for MEMS gravimeter test, comprising a temperature control module and a multi-stage constant temperature module;
the multistage constant temperature module comprises a first-stage constant temperature unit, a second-stage constant temperature unit, a third-stage constant temperature unit and a heat-insulating windproof unit which are sequentially nested from inside to outside; the MEMS gravimeter is placed inside the first-stage constant temperature unit;
the temperature control module is used for respectively heating each stage of constant temperature unit when the temperature in the constant temperature unit is lower than the corresponding temperature control point so as to respectively control the temperature in the first stage of constant temperature unit, the second stage of constant temperature unit and the third stage of constant temperature unit on the corresponding temperature control point; the temperature control points of each level of temperature control unit are sequentially decreased from inside to outside to form a heat dissipation channel from inside to outside;
the temperature control units at all levels maintain the internal temperature balance through active heating and natural heat dissipation; the third-stage constant temperature unit is internally provided with a vacuum cavity to provide a vacuum constant temperature environment for the first-stage constant temperature unit and the second-stage constant temperature unit so as to reduce the influence of heat convection and heat conduction on the MEMS gravimeter and inhibit the influence of air buoyancy on the MEMS gravimeter;
the heat-insulating windproof module is used for filtering temperature fluctuation in the external environment.
Further preferably, the temperature control module comprises a first temperature control unit, a second temperature control unit and a third temperature control unit;
the first temperature control unit is connected with the first-stage constant temperature unit and used for heating the first-stage constant temperature unit when the temperature in the first-stage constant temperature unit is lower than a first temperature control point so as to control the temperature in the first-stage constant temperature unit on the first temperature control point;
the second temperature control unit is connected with the second-stage constant temperature unit and used for heating the second-stage constant temperature unit when the temperature in the second-stage constant temperature unit is lower than a second temperature control point so as to control the temperature in the second-stage constant temperature unit to be at the second temperature control point;
the third temperature control unit is connected with the third-stage constant temperature unit and used for heating the third-stage constant temperature unit when the temperature in the third-stage constant temperature unit is lower than a third temperature control point so as to control the temperature in the third-stage constant temperature unit on the third temperature control point.
Further preferably, the first temperature control point is 40 ℃; the second temperature control point is 35 ℃; the third temperature control point was 30 ℃.
Further preferably, the first-stage thermostatic unit includes: the first sealed shell, a first closed metal shell positioned in the first sealed shell, a first heating element and a first temperature sensor; the first heating element and the first temperature sensor are both connected with the first temperature control unit; the MEMS gravimeter is positioned in the first closed metal shell;
the first heating element is uniformly attached to the first closed metal shell and used for uniformly heating the first closed metal shell under the control of the first temperature control unit so as to provide a constant temperature environment for the MEMS gravimeter;
the first temperature sensor is attached to the first closed metal shell and used for detecting the temperature in the first-stage constant temperature unit and sending the temperature to the first temperature control unit;
the first sealed shell is used for fixing the first closed metal shell and insulating the first closed metal shell so as to block the fluctuation of the external temperature.
Further preferably, the first closed metal housing is a sealed metal frame made of a metal plate;
the first sealing shell comprises a clamp, a clamp front cover and a clamp rear cover, and the clamp, the clamp front cover and the clamp rear cover are combined into a closed space.
Further preferably, the second-stage thermostatic unit includes:
the second closed metal shell is used for placing the first-stage constant temperature unit;
the second heating element is uniformly attached to the second closed metal shell, is connected with the second temperature control unit and is used for uniformly heating the second closed metal shell under the control of the second temperature control unit so as to provide a constant temperature environment for the first-stage constant temperature unit;
and the second temperature sensor is attached to the second closed metal shell and used for detecting the temperature in the second-stage constant temperature unit and sending the temperature to the second temperature control unit.
Further preferably, the second closed metal casing is a seamless metal tube with metal covers attached to the top and bottom.
Further preferably, the third stage thermostatic unit includes:
the third sealed metal shell is used for placing the second-stage constant temperature unit, and a vacuum cavity is formed inside the third sealed metal shell to provide a vacuum constant temperature environment for the first-stage constant temperature unit and the second-stage constant temperature unit;
the third heating element is uniformly attached to the third closed metal shell and used for uniformly heating the vacuum cavity;
and the third temperature sensor is attached to the third closed metal shell, is used for detecting the temperature in the third-stage constant temperature unit and sends the temperature to the third temperature control unit.
Further preferably, the third-stage thermostatic unit further comprises a flange plate located on the outer wall of the third sealed metal shell, and the first sealed shell and the second sealed metal shell are both fixed on the flange plate; the flange also has attached thereto the third heating element described above.
Further preferably, the third stage thermostatic unit further comprises a support structure located at the bottom of the third closed metal housing for isolating the third closed metal housing from the ground to reduce heat dissipation caused by contact with the ground.
Generally, by the above technical solution conceived by the present invention, the following beneficial effects can be obtained:
the invention provides a constant temperature device for testing an MEMS gravimeter, which comprises three levels of constant temperature units which are sequentially nested from inside to outside, wherein the temperature control areas of the constant temperature units at all levels are sequentially reduced from outside to inside, and the outermost layer adopts a vacuum cavity as a controlled cavity, so that the influence of thermal convection and thermal conduction on the MEMS gravimeter is reduced, the air buoyancy is inhibited, and the temperature control precision can be greatly improved; in addition, as the temperature control points of each level of temperature control unit are sequentially decreased from inside to outside to form a heat dissipation channel from inside to outside, the temperature of each level of constant temperature unit can be controlled in a mode of combining active temperature control and passive temperature control on the premise of not adding other heat dissipation devices, so as to maintain the dynamic balance of the temperature in the device, avoid introducing vibration noise in the test process of the MEMS gravimeter, have strong external interference resistance and provide a high-precision constant temperature environment for the MEMS gravimeter on the premise of meeting the requirements of smaller volume and higher external interference resistance.
Drawings
FIG. 1 is a schematic structural diagram of a thermostat for MEMS gravimeter testing provided by the present invention;
FIG. 2 is a schematic structural view of a multi-stage thermostat module provided in the present invention;
FIG. 3 is a schematic structural view of a first-stage thermostatic unit provided in the present invention;
FIG. 4 is a schematic structural view of a second stage thermostatic unit provided in the present invention;
fig. 5 is a schematic structural diagram of a third-stage thermostatic unit provided by the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
In order to achieve the above object, the present invention provides a thermostatic device for MEMS gravimeter test, as shown in fig. 1, including a temperature control module and a multi-stage thermostatic module;
as shown in fig. 2, the multi-stage constant temperature module comprises a first-stage constant temperature unit, a second-stage constant temperature unit, a third-stage constant temperature unit and a heat-insulating windproof unit which are sequentially nested from inside to outside; the MEMS gravimeter is placed inside the first-stage constant temperature unit;
the temperature control module is used for respectively heating each stage of constant temperature unit when the temperature in the constant temperature unit is lower than the corresponding temperature control point so as to respectively control the temperature in the first stage of constant temperature unit, the second stage of constant temperature unit and the third stage of constant temperature unit on the corresponding temperature control point; the temperature control points of each stage of temperature control unit are sequentially decreased from inside to outside to form a heat dissipation channel from inside to outside, so that a fan or a TEC (semiconductor cooling plate) is not used for heat dissipation, vibration can be prevented at low cost, and the size of the whole device is reduced.
The temperature control units at all levels maintain the internal temperature balance through active heating and natural heat dissipation; the vacuum cavity is formed in the third-stage constant temperature unit to provide a vacuum constant temperature environment for the first-stage constant temperature unit and the second-stage constant temperature unit, so that the influence of heat convection and heat conduction on the MEMS gravimeter is reduced, and the influence of air buoyancy on the MEMS gravimeter is inhibited; the second-stage constant temperature unit can further attenuate the fluctuation of the third-stage constant temperature unit, and provides a constant temperature environment with smaller fluctuation for the first-stage constant temperature unit. The first-stage constant temperature unit at the innermost layer can provide an mK-stage constant temperature environment for the MEMS gravimeter;
the heat-insulating windproof module is used for filtering temperature fluctuation in the external environment, and is preferably a heat-insulating windproof cover in the embodiment, and is used for filtering high-frequency components in the environment temperature fluctuation.
Furthermore, because the working temperature points and the temperature control accuracy of the constant temperature units at all levels are different, the control is required to be carried out respectively so as to reduce the mutual influence among all levels and ensure the temperature control accuracy. Preferably, the temperature control module comprises a first temperature control unit, a second temperature control unit and a third temperature control unit;
the first temperature control unit is connected with the first-stage constant temperature unit and used for heating the first-stage constant temperature unit when the temperature in the first-stage constant temperature unit is lower than a first temperature control point so as to control the temperature in the first-stage constant temperature unit on the first temperature control point;
the second temperature control unit is connected with the second-stage constant temperature unit and used for heating the second-stage constant temperature unit when the temperature in the second-stage constant temperature unit is lower than a second temperature control point so as to control the temperature in the second-stage constant temperature unit to be at the second temperature control point;
the third temperature control unit is connected with the third-stage constant temperature unit and used for heating the third-stage constant temperature unit when the temperature in the third-stage constant temperature unit is lower than a third temperature control point so as to control the temperature in the third-stage constant temperature unit on the third temperature control point;
in this embodiment, the first temperature control point is 40 ℃; the second temperature control point is 35 ℃; the third temperature control point was 30 ℃.
Further, the first-stage thermostatic unit includes: a first sealed housing and a first closed metal shell, a first heating element and a first temperature sensor (i.e. temperature sensor 1) located inside the first sealed housing; the first heating element and the first temperature sensor are both connected with the first temperature control unit; the MEMS gravimeter is positioned in the first closed metal shell; the first heating element is uniformly attached to the first closed metal shell and used for uniformly heating the first closed metal shell under the control of the first temperature control unit so as to provide a constant temperature environment for the MEMS gravimeter; the first temperature sensor is attached to the first closed metal shell and used for detecting the temperature in the first-stage constant temperature unit and sending the temperature to the first temperature control unit; the first sealing shell is used for fixing the first closed metal shell and insulating the first closed metal shell so as to block the fluctuation of the external temperature; preferably, the material of the first hermetic container may be microcrystalline glass, bakelite, PLA, ABS, or the like. The invention can realize temperature control of lower temperature by placing the MEMS gravimeter in the first closed metal shell; meanwhile, the first sealing shell is additionally arranged, namely a layer of passive temperature control is additionally arranged, so that the temperature interference resistance of the device is greatly improved. Specifically, as shown in fig. 3, in the present embodiment, the first closed metal housing is a sealed metal frame made of a metal plate; the metal frame is built by a metal plate (the metal type is preferably metal with better conductivity, and is preferably a copper plate in the embodiment); the first-stage constant temperature unit takes the metal frame as a controlled object, the temperature control point is set at 40 ℃, the MEMS gravity sensor is sealed inside the metal frame with the space size of 20mm 2mm, and an mK-stage constant temperature environment is provided for the metal frame. Further, first sealed shell includes anchor clamps, anchor clamps protecgulum and anchor clamps back lid (all use 3D printing technology to make to form), and anchor clamps, anchor clamps protecgulum and anchor clamps back lid are constituteed into enclosure space. The metal frame is fixed on the clamp by using screws, and the front cover and the rear cover of the clamp are installed to form a closed space to block the fluctuation of the external temperature.
The second-stage thermostatic unit comprises a second closed metal casing, a second heating element and a second temperature sensor (i.e. temperature sensor 2); the second closed metal shell is used for placing the first-stage constant temperature unit; the second heating element is uniformly attached to the second closed metal shell, is connected with the second temperature control unit and is used for uniformly heating the second closed metal shell under the control of the second temperature control unit so as to provide a constant temperature environment for the first-stage constant temperature unit; and the second temperature sensor is attached to the second closed metal shell and used for detecting the temperature in the second-stage constant temperature unit and sending the temperature to the second temperature control unit. Because the metal has larger heat conductivity coefficient, the metal is adopted and is a closed shell, so that the uniformity of a temperature control area can be effectively improved; when the metal shell is subjected to external temperature fluctuation, the metal shell can well realize heat conduction in a short time, and the fluctuation temperature is uniformly distributed. Specifically, as shown in fig. 4, in this embodiment, the second closed metal casing is a seamless metal tube with metal covers attached to the top and the bottom. The metal type is preferably metal with better conductivity, and a seamless copper pipe and a copper cover are adopted in the embodiment, and form a sealed space together. As can be seen from the above, the second-stage thermostatic unit of this embodiment uses a seamless copper tube (2 mm in wall thickness, 50mm in diameter, and copper covers attached to the top and bottom to form a closed housing) as the controlled object, and sets the temperature control point at 35 ℃, and closes the entire first-stage thermostatic unit therein to provide a thermostatic environment with small temperature fluctuation.
The third-stage thermostatic unit comprises a third closed metal shell, a third heating element and a third temperature sensor (namely a temperature sensor 3); the third closed metal shell is used for placing a second-stage constant temperature unit; the change of the air pressure can cause the buoyancy of the silicon-based spring-vibrator structure in the MEMS gravimeter to change, thereby contributing to the output of the MEMS gravimeter. In order to inhibit the influence of air buoyancy on the MEMS gravity sensor and effectively block the influence of heat conduction and heat convection, the MEMS gravity sensor needs to be placed in a vacuum cavity; the third sealed metal shell is internally provided with a vacuum cavity (the volume of the whole cavity is 170mm x 200mm) so as to provide a vacuum environment for the first-stage constant temperature unit and the second-stage constant temperature unit, further provide a vacuum environment for the MEMS gravimeter and attenuate temperature fluctuation in the environment. The third heating element is uniformly attached to the third closed metal shell and used for uniformly heating the vacuum cavity; and the third temperature sensor is attached to the third closed metal shell, is used for detecting the temperature in the third-stage constant temperature unit and sends the temperature to the third temperature control unit. Specifically, as shown in fig. 5, in the present embodiment, the third-stage thermostatic unit further includes a support structure located at the bottom of the third enclosed metal housing, and is used for isolating the third enclosed metal housing from the ground so as to reduce heat dissipation caused by contact with the ground. In this embodiment, four ceramic screws with smaller thermal conductivity are used as the supporting structure at the bottom of the third sealed metal shell, so that the influence of the external environment temperature can be effectively reduced. For the convenience of carrying, the top of the third closed metal shell is also provided with four lifting ring structures. In addition, the third-stage thermostatic unit in this embodiment further includes a flange located on an outer wall of the third sealed metal casing, and both the first sealed housing and the second sealed metal casing are fixed to the flange;
it should be noted that the third sealed metal shell is provided with flanges all around, and the first sealed shell and the second sealed metal shell are both fixed on one of the flanges; in this embodiment, the first sealed housing and the second sealed metal shell are both fixed to a flange plate located at the bottom of the third sealed metal shell; at this time, the first heating element and the first temperature sensor are both attached to the side wall of the first closed metal casing; the second heating element and the second temperature sensor are both attached to the side wall of the second closed metal shell; the third heating element and the third temperature sensor are both attached to a side wall of the third enclosed metal housing.
Specifically, in order to reduce the temperature effect, the fixture in the first-stage thermostatic unit and the seamless copper pipe in the second-stage thermostatic unit may be fixed to the flange using M4 ceramic screws. The flange plate comprises a blind flange (the caliber is 63mm), a signal flange and an air extraction valve; the blind flange plays a role in sealing, and the signal flange is used for providing a signal and power supply path; the air exhaust flange is used for exhausting air for the third closed metal shell. The flange further having the third heating element attached thereto for enabling the third heating element to be uniformly attached to the third closed metal shell; uniform heating of the third enclosed metal housing can be achieved by heating the third heating element. In summary, the third-stage thermostatic unit uses the vacuum cavity as the controlled object, the temperature control point is set at 30 ℃, and the whole second-stage thermostatic unit is sealed to provide a vacuum constant temperature environment for the first-stage thermostatic unit and the second-stage thermostatic unit, so that the influence of thermal convection and thermal conduction on the MEMS gravimeter is reduced, and the influence of air buoyancy on the MEMS gravimeter is suppressed.
The first heating element, the second heating element and the third heating element in this embodiment are all heating sheets.
It should be noted that, in the present invention, the temperature control areas of the thermostatic units at different levels decrease from outside to inside in sequence, and the temperature control precision increases in sequence. In this embodiment, the first-stage constant temperature unit may provide a constant temperature environment with an accuracy of 1mK for the MEMS gravity sensor, the second-stage constant temperature unit may provide a constant temperature environment with an accuracy of 10mK for the first-stage constant temperature unit, and the third-stage constant temperature unit may provide a constant temperature environment with an accuracy of hundreds of mK for the second-stage constant temperature unit.
According to the invention, the mode of combining active temperature control and passive temperature control is adopted, the vacuum cavity is adopted as the controlled cavity at the outermost layer, the three-stage constant temperature unit is manufactured, and the mK-level high-precision constant temperature environment is provided for the MEMS gravimeter.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A thermostatic device for MEMS gravimeter testing, comprising: the temperature control module and the multi-stage constant temperature module;
the multistage constant temperature module comprises a first-stage constant temperature unit, a second-stage constant temperature unit, a third-stage constant temperature unit and a heat-insulating windproof unit which are sequentially nested from inside to outside; the MEMS gravimeter is placed inside the first-stage constant-temperature unit;
the temperature control module is used for respectively heating each stage of constant temperature unit when the temperature in the constant temperature unit is lower than the corresponding temperature control point so as to respectively control the temperature in the first stage of constant temperature unit, the second stage of constant temperature unit and the third stage of constant temperature unit on the corresponding temperature control point; the temperature control points of each level of temperature control unit are sequentially decreased from inside to outside to form a heat dissipation channel from inside to outside;
the temperature control units at all levels maintain the internal temperature balance through active heating and natural heat dissipation; the third-stage constant temperature unit is internally provided with a vacuum cavity to provide a vacuum constant temperature environment for the first-stage constant temperature unit and the second-stage constant temperature unit so as to reduce the influence of heat convection and heat conduction on the MEMS gravimeter and inhibit the influence of air buoyancy on the MEMS gravimeter;
the heat-insulating and windproof module is used for filtering temperature fluctuation in the external environment.
2. The thermostat device of claim 1, wherein the temperature control module comprises a first temperature control unit, a second temperature control unit, and a third temperature control unit;
the first temperature control unit is connected with the first-stage constant temperature unit and used for heating the first-stage constant temperature unit when the temperature in the first-stage constant temperature unit is lower than a first temperature control point so as to control the temperature in the first-stage constant temperature unit on the first temperature control point;
the second temperature control unit is connected with the second-stage constant temperature unit and used for heating the second-stage constant temperature unit when the temperature in the second-stage constant temperature unit is lower than a second temperature control point so as to control the temperature in the second-stage constant temperature unit on the second temperature control point;
and the third temperature control unit is connected with the third-stage constant temperature unit and used for heating the third-stage constant temperature unit when the temperature in the third-stage constant temperature unit is lower than a third temperature control point so as to control the temperature in the third-stage constant temperature unit on the third temperature control point.
3. The thermostat of claim 2, wherein the first temperature control point is 40 ℃; the second temperature control point is 35 ℃; the third temperature control point is 30 ℃.
4. A thermostatic device according to claim 2 or 3, characterized in that said first-stage thermostatic unit comprises: the first sealed shell, a first closed metal shell positioned in the first sealed shell, a first heating element and a first temperature sensor; the first heating element and the first temperature sensor are both connected with the first temperature control unit; the MEMS gravimeter is positioned inside the first closed metal shell;
the first heating element is uniformly attached to the first closed metal shell and used for uniformly heating the first closed metal shell under the control of the first temperature control unit so as to provide a constant temperature environment for the MEMS gravimeter;
the first temperature sensor is attached to the first closed metal shell, is used for detecting the temperature in the first-stage constant temperature unit and sends the temperature to the first temperature control unit;
the first sealed shell is used for fixing the first closed metal shell and insulating the first closed metal shell so as to block fluctuation of outside temperature.
5. The thermostat device according to claim 4, wherein the first closed metal housing is a sealed metal frame composed of a metal plate;
the first sealing shell comprises a clamp, a clamp front cover and a clamp rear cover, and the clamp, the clamp front cover and the clamp rear cover are combined into a closed space.
6. The thermostat device of claim 4, wherein the second-stage thermostat unit comprises:
the second closed metal shell is used for placing the first-stage constant temperature unit;
the second heating element is uniformly attached to the second closed metal shell, is connected with the second temperature control unit, and is used for uniformly heating the second closed metal shell under the control of the second temperature control unit so as to provide a constant temperature environment for the first-stage constant temperature unit;
and the second temperature sensor is attached to the second closed metal shell, is used for detecting the temperature in the second-stage constant temperature unit and sends the temperature to the second temperature control unit.
7. The thermostat device of claim 6, wherein the second closed metal housing is a seamless metal tube with metal covers attached to both the top and bottom.
8. The thermostat device of claim 6, wherein the third stage thermostat unit comprises:
the third closed metal shell is used for placing the second-stage constant temperature unit, and a vacuum cavity is formed inside the third closed metal shell to provide a vacuum constant temperature environment for the first-stage constant temperature unit and the second-stage constant temperature unit;
the third heating element is uniformly attached to the third closed metal shell and used for uniformly heating the vacuum cavity;
and the third temperature sensor is attached to the third closed metal shell, is used for detecting the temperature in the third-stage constant temperature unit and sends the temperature to the third temperature control unit.
9. The thermostat device of claim 8, wherein the third stage thermostatic element further comprises a flange on an outer wall of the third closed metal housing, the first sealed housing and the second closed metal housing each being secured to the flange; the flange also has the third heating element attached thereto.
10. The thermostat device of claim 8, wherein the third stage thermostat unit further comprises a support structure at the bottom of the third closed metal housing for isolating the third closed metal housing from the ground to reduce heat dissipation due to contact with the ground.
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| CN114779847A (en) * | 2022-06-20 | 2022-07-22 | 中国船舶重工集团公司第七0七研究所 | Constant temperature system of portable relative gravimeter |
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