CN107764428B - Constant pressure temperature measurement reference device - Google Patents
Constant pressure temperature measurement reference device Download PDFInfo
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- CN107764428B CN107764428B CN201710059174.9A CN201710059174A CN107764428B CN 107764428 B CN107764428 B CN 107764428B CN 201710059174 A CN201710059174 A CN 201710059174A CN 107764428 B CN107764428 B CN 107764428B
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- 238000009529 body temperature measurement Methods 0.000 title claims abstract description 30
- 239000007789 gas Substances 0.000 claims description 51
- 238000005259 measurement Methods 0.000 claims description 14
- 239000001307 helium Substances 0.000 claims description 11
- 229910052734 helium Inorganic materials 0.000 claims description 11
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000009530 blood pressure measurement Methods 0.000 abstract description 18
- 238000000691 measurement method Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 24
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000007430 reference method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000007123 defense Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- OMEXLMPRODBZCG-UHFFFAOYSA-N iron rhodium Chemical compound [Fe].[Rh] OMEXLMPRODBZCG-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
Abstract
The invention provides a constant pressure temperature measurement reference device, which comprises: a refrigerator comprising at least one coldhead; the refrigerator is used for refrigerating the pressure cavity; and the pressure control pipeline part is used for controlling the pressure of the working gas in the reference device, a quasi-spherical microwave resonant cavity is arranged in the pressure cavity, and the quasi-spherical microwave resonant cavity is connected with the pressure control pipeline part. The invention has high relative pressure control precision, and overcomes the disadvantage that the temperature measurement accuracy of the traditional measurement method is limited by the absolute pressure measurement accuracy; the measuring precision of the resonant frequency of the quasi-spherical microwave resonant cavity is 3-4 orders of magnitude higher than that of absolute pressure, and the establishment of a high-precision temperature measuring reference device is facilitated.
Description
Technical Field
The invention relates to a reference device, in particular to a constant pressure temperature measurement reference device.
Background
Thermodynamic temperature is one of seven basic units of the international system of units. The high-accuracy thermodynamic temperature measurement at low temperature, especially at the temperature range below 24.5561K, has important supporting significance for leading-edge scientific research, scientific research equipment development, national defense safety guarantee and development of high and new technology. The temperature magnitude tracing system can be divided into a reference device (accuracy 1 mK), a standard device (accuracy 3 mK) and an industrial application device in sequence according to the temperature measurement accuracy from high to low. At present, in the 0.65K-24.5561K temperature region, three main methods are used for establishing a thermodynamic temperature measurement reference device: a gas constant volume method, a gas dielectric constant method and a gas acoustic method.
The gas constant volume method is based on ideal gas state equation, and under constant volume condition, the temperature measurement accuracy directly depends on absolute working medium in the systemAccuracy of pressure measurement, non-ideal correction, and the like. The accuracy of the absolute pressure measurement is only 1 out of 10 accuracy assessment terms, but the weight is greatest. The accuracy of the gas permittivity method, relative to the gas constant volume method, depends on the measurement accuracy of the capacitance bridge in addition to the absolute pressure measurement. Currently, the national pressure benchmark has a measurement uncertainty of 21ppm (1 ppm=10) in the range of 0.1MPa-10MPa -6 ). If the accuracy is better than 1mK measurement in the temperature range of 5.0K-24.5561K, the total accuracy of temperature measurement is controlled within 41ppm at the temperature of 24.5561K. Therefore, it is difficult to establish a thermodynamic temperature measurement reference device by using a gas constant volume method and a gas dielectric constant method, limited by absolute pressure measurement accuracy.
The gas acoustic method utilizes the relation between ideal gas sound velocity and thermodynamic temperature to carry out measurement, compared with the former two reference methods, the gas acoustic method reduces the dependence on absolute pressure measurement, and the sound velocity is obtained by measuring the resonant frequency (acoustic wave resonant frequency measurement) and the cavity size (microwave resonant frequency measurement) of the gas in a specific cavity under different pressures, and then extrapolated to an ideal gas state. The method integrates the measurement of the acoustic resonance frequency and the measurement of the microwave resonance frequency, is the method with the minimum accuracy of measuring the thermodynamic temperature in the temperature region, but greatly improves the measurement difficulty due to the non-negligible influence of noise of a constant temperature system on the acoustic measurement at low temperature.
In summary, the three existing thermodynamic temperature measurement reference methods in the world have advantages and disadvantages, wherein the accuracy of the gas constant volume method and the gas dielectric constant method depend on the absolute pressure measurement level, and the accuracy of the gas acoustic method is easily influenced by environmental noise during low-temperature measurement. Currently, absolute pressure measurement accuracy is low, and it is difficult to achieve measurement accuracy better than 1 mK. Therefore, innovations must be made in the principle of testing to obtain high accuracy thermodynamic temperature measurements.
Disclosure of Invention
The patent aims to solve the problems that the traditional gas constant volume method and the gas dielectric constant method depend on absolute pressure measurement level and the gas acoustic method is easily affected by environmental noise at low temperature and the like.
The invention provides a constant pressure temperature measurement reference device, which comprises: a refrigerator comprising at least one coldhead; the refrigerator is used for refrigerating the pressure cavity; and the pressure control pipeline part is used for controlling the pressure of the working gas in the reference device, a quasi-spherical microwave resonant cavity is arranged in the pressure cavity, and the quasi-spherical microwave resonant cavity is connected with the pressure control pipeline part.
Wherein the working gas is high purity helium.
Wherein, be provided with the pressure chamber flange on the pressure chamber.
Wherein, be provided with the spring damper between refrigerator and the zero-order flange.
Wherein the refrigerator is a low vibration pulse tube refrigerator.
Wherein at least one radiation shield is also included.
The constant pressure temperature measurement reference device of the present invention reduces the uncertainty of the pressure measurement from 21ppm to 3.4ppm (1 ppm=10) by converting the absolute pressure measurement into the relative pressure control -6 ) Overcomes the disadvantage that the traditional gas constant volume method and the gas dielectric constant method depend on absolute pressure measurement; by the microwave resonance measurement technique, higher accuracy than absolute pressure measurement can be obtained, and uncertainty of microwave resonance measurement can reach 2ppb (1 ppb=10) -9 ) The method comprises the steps of carrying out a first treatment on the surface of the The problem of deformation of the quasi-spherical microwave resonant cavity in vacuum and inflation states is solved by adopting the communication structure of the pressure cavity and the quasi-spherical microwave resonant cavity, and the influence of non-ideal factors is reduced.
Drawings
Fig. 1 is a schematic structural diagram of a constant pressure temperature measurement reference device of the present invention.
Detailed Description
In order to facilitate understanding of the invention, embodiments of the invention are described below with reference to the accompanying drawings, it being understood by those skilled in the art that the description below is for ease of explanation of the invention only and is not intended to limit the scope of the invention in any way.
Fig. 1 is a schematic structural diagram of a constant pressure temperature measurement reference device of the present invention. The constant pressure temperature measurement reference device comprises: the refrigerator 1 is a pulse tube refrigerator with low vibration, and provides a high-efficiency stable cold source for the pressure cavity 26 and the quasi-spherical microwave resonant cavity 31, and provides cold for the quasi-spherical microwave resonant cavity 31 to reduce the internal temperature to a set temperature. In order to reduce slight vibration of the refrigerator 1 during operation, a spring damper 2 is additionally arranged on the zero-order flange 3, and a first-order flexible thermal connection 9 and a second-order flexible thermal connection 18 are additionally arranged on the first-order cold head 8 and the second-order cold head 17; the zero-order flange 3 and the vacuum cylinder 4 are communicated with the primary flange 12 and the primary radiation-proof screen 13 to jointly construct a closed space, the secondary flange 21 and the secondary radiation-proof screen 22 jointly construct a closed space, and the two closed spaces together provide stable vacuum insulation working environments for the pressure cavity 26 and the quasi-spherical microwave resonant cavity 31.
As shown in fig. 1, the refrigerator 1 comprises a primary cold head 8 and a secondary cold head 17, wherein the primary cold head 8 is connected with a primary flange 12, a primary cold head thermometer 6 and a primary cold head heater 7 are connected to the primary cold head 8, the temperature of the primary cold head 8 is measured by the primary cold head thermometer 6, and the temperature of the primary cold head 8 is finely adjusted by the primary cold head heater 7; the secondary cold head 17 is connected with a secondary flange 21, a secondary cold head thermometer 15 and a secondary cold head heater 16 are connected to the secondary cold head 17, the temperature of the secondary cold head 17 is measured through the secondary cold head thermometer 15, and the temperature of the secondary cold head 17 is finely adjusted through the secondary cold head heater 16.
A primary flexible thermal connection 9 is arranged below the primary cold head 8, a secondary flexible thermal connection 18 is additionally arranged below the secondary cold head 17, and vibration influence caused by elastic deformation of a pipe wall due to periodic pressure fluctuation of gas in the pulse pipe can be effectively reduced through the primary flexible thermal connection 9 and the secondary flexible thermal connection 18; the vibration problem of the refrigerator 1 is effectively solved through the double vibration reduction measures of the spring damper 2, the primary flexible thermal connection 10 and the secondary flexible thermal connection 19, the flexible connection is made of elastic materials and has good heat transfer performance, vibration can be eliminated, refrigeration transfer can be carried out well, and a good low-temperature environment is created for the microwave resonance system.
The lower part of the spring damper 2 is connected with a zero-order flange 3, a zero-order suspender 5 is arranged between the first-order flange 12 and the zero-order flange 3, a first-order suspender 14 is arranged between the second-order flange 21 and the first-order flange 12, the flanges are connected through the zero-order suspender 5 and the first-order suspender 14, the two-layer suspender is simple in structure and very convenient to install and detach, the suspender is made of a heat-insulating material, and meanwhile, heat transfer between different-order flanges can be reduced. In addition, the primary flange 12, the primary radiation protection screen 13, the secondary flange 21 and the secondary radiation protection screen 22 are all of gold plating structures, so that radiation heat exchange can be effectively reduced; in order to control the temperature of the flange, a primary flange thermometer 10 and a primary flange heater 11 are arranged on the primary flange 12, the temperature of the primary flange is measured through the primary flange thermometer 10, and the temperature of the primary flange 12 is finely adjusted through the primary flange heater 11; the secondary flange 21 is provided with a secondary flange thermometer 19 and a secondary flange heater 20, the temperature of the secondary flange 21 is measured by the secondary flange thermometer 19, and the temperature of the secondary flange 21 is finely adjusted by the secondary flange heater 20.
In fig. 1, a pressure chamber 26 is arranged below the secondary flange 21, the pressure chamber 26 and the pressure chamber flange 25 form a working test environment, the pressure chamber flange 25 is provided with an inlet port, the inlet port is connected with an air inlet pipe 32, an air outlet pipe 33 and a vacuum lead interface 34, and the secondary flange 21 is connected with the pressure chamber flange 25 through a secondary suspender 23. The vacuum cylinder 4, the zero-order flange 3, the primary radiation-proof screen 13, the primary flange 12, the secondary radiation-proof screen 22, the secondary flange 21, the pressure cavity 26 and the pressure cavity flange 25 can be connected by bolts and can be freely disassembled; the vacuum system formed by the zero-order flange 3, the vacuum cylinder 4, the primary flange 12, the primary radiation-proof screen 13, the secondary flange 21 and the secondary radiation-proof screen 22 has good heat insulation effect, and the uniformity of temperature fields in the pressure cavity 26 and the quasi-spherical microwave resonant cavity 31 at the peripheral parts of the primary radiation-proof screen 13, the secondary radiation-proof screen 22 and the like is ensured.
The constant pressure temperature reference device comprises a pressure control pipeline part, the pressure control pipeline part is connected with the air inlet pipe 32 and the air outlet pipe 33, the gas pressure in the whole reference device is kept stable through the pressure control pipeline part, the pressure control pipeline part comprises an air source 35, high-purity helium is stored in the air source 35, the air source 35 is connected with a cold trap 39 through a pipeline, the cold trap 39 is used for reducing the temperature of the helium, when the temperature of the helium needs to be reduced, a valve 36 is closed, a valve 37 and a valve 38 are opened, the helium in the air source 35 passes through the pipeline of the cold trap 39, a gas purifying device 44 is further arranged in the pipeline, a valve 41, a valve 42 and a valve 43 are arranged in the surrounding pipeline of the gas purifying device 44, impurities in the helium can be removed through the gas purifying device 44, so that the purity of the helium entering the air inlet pipe 32 is improved, and the helium entering the air inlet pipe 32 has high purity. A flow meter 40 and a flow meter 46 are arranged on the pressure control pipeline part, and the mass flow of the pipeline is measured in real time through the two flow meters; the helium gas emitted from the gas source 35 enters the pressure cavity 26 and the quasi-spherical microwave resonant cavity 31 through the flowmeter 40, the valve 41, the gas purifying device 44, the valve 43 and the gas inlet pipe 32, and flows into the pressure gauge 47 and the feedback loop 48 through the gas outlet pipe 33, when the flow rate of the flowmeter 40 is too large, part of the helium gas is pumped out to the external environment through the flowmeter 46 by the vacuum pump 45, so that all the components together form a pressure compensation loop for compensating the pressure loss caused by gas leakage in the gap of the pressure gauge 47, thereby enabling the pressure gauge to be in a stable state for a long time and providing a long-term and stable pressure environment for the pressure cavity 26 and the interior of the quasi-spherical microwave resonant cavity 31.
The quasi-spherical microwave resonant cavity 31 in the microwave resonant system can successfully separate association modes through a stable pressure environment formed by the peripheral pressure control pipeline part, so that the frequency measurement precision is improved, microwaves are emitted through the microwave antenna 28, the resonant frequency of the quasi-spherical microwave resonant cavity 31 in a vacuum state and an inflation state is finally obtained through measuring the resonant frequency, the resonant frequency of the quasi-spherical microwave resonant cavity 31 and the gas refractive index in the quasi-spherical microwave resonant cavity 31 under the constant pressure condition meet a certain relation, the gas refractive index under the constant pressure condition can be obtained through the relation, and another relation which meets the gas refractive index and the thermodynamic temperature under the constant pressure condition can be obtained through the relation under the condition that the gas refractive index under the constant pressure condition is known; the intelligent control system completes data acquisition and processing through an automatic data acquisition system connected with a lead interface 34, provides a stable and reliable experimental environment for the pressure cavity 26 and the quasi-spherical microwave resonant cavity 31, realizes synchronous acquisition, recording and automatic processing of parameters such as the primary cold head thermometer 6, the primary flange thermometer 10, the secondary cold head thermometer 15, the secondary flange thermometer 19, the standard rhodium-iron thermometer 29 and the like, and therefore realizes high-accuracy thermodynamic temperature measurement.
In the embodiment shown in fig. 1, the air inlet pipe 32 and the air outlet pipe 33 are connected with the pressure control system through a clamp, so as to provide a long-term stable pressure environment for the quasi-spherical microwave resonant cavity 31, and the uncertainty of pressure measurement is reduced by converting absolute pressure measurement into relative pressure control, so that the disadvantage that the traditional gas determination method and the gas dielectric constant method depend on absolute pressure measurement is overcome. Below the pressure chamber flange 25 is mounted a quasi-spherical microwave cavity 31 on which a communication structure 27, a microwave antenna 28 are arranged, wherein: one of the communication structures 27 is connected with the air inlet pipe 32 through a capillary tube, so that the pressure in the pressure cavity 26, the quasi-spherical microwave resonant cavity 31, the pressure control air inlet pipe 32 and the air outlet pipe 33 are equal everywhere, dead space correction caused by pressure sharing of a pressure measuring pipeline in the gas thermometer is effectively avoided, the problem of deformation of the quasi-spherical microwave resonant cavity 31 in vacuum and inflation states is solved, and the influence of nonideal on temperature measurement accuracy is reduced; the resonant frequency of the quasi-spherical microwave resonant cavity 31 in the vacuum state and the inflation state is obtained by transmitting and receiving microwave signals through the microwave antenna 28, the precision is higher than that of absolute pressure measurement, the uncertainty reaches 2ppb, and then the high-precision gas refractive index and thermodynamic temperature are obtained. In the embodiment, the primary cooling head 8, the primary flange 12, the secondary cooling head 18, the secondary flange 21 and the quasi-spherical microwave resonant cavity 31 are provided with thermometers (6, 10, 15, 19 and 29) and heaters (7, 11, 16, 20 and 30), and the temperature can be controlled by a control system in a combined way, so that the temperature can be quickly reduced to the target temperature, and the high-precision temperature control effect can be obtained.
The intelligent control system can realize the control, acquisition and processing of parameters including temperature, pressure, frequency, mass flow, voltage, current, resistance and the like in each subsystem through developing and writing LabVIEW programs, and realizes the cooperative control and data acquisition of each subsystem, real-time data processing and analysis feedback.
The invention has high relative pressure control precision, and overcomes the disadvantage that the temperature measurement accuracy of the traditional measurement method is limited by the absolute pressure measurement accuracy; the measuring precision of the resonant frequency of the quasi-spherical microwave resonant cavity is 3-4 orders of magnitude higher than the absolute pressure measuring precision and can reach 2ppb (1 ppb=10) -9 ) The establishment of a high-precision temperature measurement reference device is facilitated; the quasi-spherical microwave resonant cavity has small deformation under vacuum and inflation states, and the non-ideal factors have small influence on the temperature measurement accuracy.
It will be appreciated that although the invention has been described above in terms of preferred embodiments, the above embodiments are not intended to limit the invention. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art without departing from the scope of the technology, or the technology can be modified to be equivalent. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.
Claims (6)
1. A constant pressure temperature measurement reference device, comprising: a refrigerator comprising at least one coldhead; the refrigerator is used for refrigerating the pressure cavity; the pressure control pipeline part is used for controlling the pressure of the working gas in the reference device and is characterized in that: a quasi-spherical microwave resonant cavity is arranged in the pressure cavity and is connected with the pressure control pipeline part;
the pressure control pipeline part comprises an air source, a flowmeter, a pressure gauge, a feedback loop and a vacuum pump, wherein the number of the flowmeter is two, the air source is connected with the pressure cavity and the quasi-spherical resonant cavity through a first flowmeter and an air inlet pipe, the pressure cavity and the quasi-spherical resonant cavity are connected with the pressure gauge through an air outlet pipe, the pressure gauge is connected with the feedback loop, the vacuum pump is connected with the air outlet pipe through a second flowmeter, and when the flow rate of the first flowmeter is too large, the vacuum pump pumps out air in an air pipe to the external environment;
the quasi-spherical microwave resonant cavity in the microwave resonant system can successfully separate association modes through a stable pressure environment formed by the peripheral pressure control pipeline part, the resonant frequency of the quasi-spherical microwave resonant cavity in a vacuum state and an inflation state is finally obtained through microwave antenna emission and resonant frequency measurement, the resonant frequency of the quasi-spherical microwave resonant cavity and the gas refractive index in the quasi-spherical microwave resonant cavity under the constant pressure condition meet a certain relational expression, the gas refractive index under the constant pressure condition can be obtained through the relational expression, and another relational expression meeting the gas refractive index and the thermodynamic temperature under the constant pressure condition can be obtained through the gas wiry equation, so that the corresponding thermodynamic temperature under the constant pressure condition can be obtained through the relational expression under the condition of knowing the gas refractive index under the constant pressure condition.
2. The constant pressure temperature measurement reference device of claim 1, wherein: the working gas is high purity helium.
3. The constant pressure temperature measurement reference device of claim 1, wherein: a pressure chamber flange is disposed on the pressure chamber.
4. The constant pressure temperature measurement reference device of claim 1, wherein: a spring damper is arranged between the refrigerator and the zero-order flange.
5. The constant pressure temperature measurement reference device of claim 1, wherein: the refrigerator is a low vibration pulse tube refrigerator.
6. The constant pressure temperature measurement reference device of claim 1, wherein: at least one radiation shield is also included.
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| CN201710059174.9A CN107764428B (en) | 2017-01-23 | 2017-01-23 | Constant pressure temperature measurement reference device |
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| CN201710059174.9A CN107764428B (en) | 2017-01-23 | 2017-01-23 | Constant pressure temperature measurement reference device |
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| CN107764428B true CN107764428B (en) | 2024-03-08 |
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| CN108225618A (en) * | 2018-04-08 | 2018-06-29 | 中国科学院理化技术研究所 | A kind of width warm area high-precision temperature caliberating device |
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