CN206450339U - A kind of level pressure temperature survey standard apparatus - Google Patents

A kind of level pressure temperature survey standard apparatus Download PDF

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Publication number
CN206450339U
CN206450339U CN201720100247.XU CN201720100247U CN206450339U CN 206450339 U CN206450339 U CN 206450339U CN 201720100247 U CN201720100247 U CN 201720100247U CN 206450339 U CN206450339 U CN 206450339U
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pressure
level
standard apparatus
ball
quasi
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高波
罗二仓
张海洋
林鹏
陈燕燕
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Technical Institute of Physics and Chemistry of CAS
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Technical Institute of Physics and Chemistry of CAS
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Abstract

The utility model provides a kind of level pressure temperature survey standard apparatus, and it includes:Refrigeration machine, it includes at least one cold head;Pressure chamber, the refrigeration machine freezes to the pressure chamber;Pressure control pipeline portions, it carries out pressure control to the working gas in the standard apparatus, quasi- ball-type microwave cavity is provided with the pressure chamber, the quasi- ball-type microwave cavity is connected with pressure control pipeline portions.Relative pressure control accuracy of the present utility model is high, overcomes the inferior position that traditional measurement method temperature measurement accuracy is limited by absolute pressure accuracy of measurement;Quasi- high 34 orders of magnitude of ball-type microwave cavity resonant frequency measuring ratio of precision absolute pressure measurement accuracy, are conducive to the foundation of high-resolution hydrocode standard apparatus.

Description

A kind of level pressure temperature survey standard apparatus
Technical field
The utility model is related to a kind of standard apparatus, more particularly to a kind of level pressure temperature survey standard apparatus.
Background technology
Thermodynamic temperature is one of seven base units of the International System of Units.Low temperature is especially in below 24.5561K warm areas High accuracy thermodynamic temperature is measured, the development of research, Scientific research equipment, the guarantee of national defense safety for front line science and high-new The development of technology has important support meaning.Temperature value traceability system, from high to low, can be drawn successively according to the thermometric degree of accuracy It is divided into standard apparatus (degree of accuracy 1mK), standard set-up (degree of accuracy 3mK) and commercial Application device.At present, in 0.65K- 24.5561K warm areas, setting up thermodynamic temperature measuring basis device mainly has three kinds of methods:Gas constant volume method, Gases dielectric constant Method and gas acoustic method.
Gas constant volume method is that, according to The Ideal-Gas Equation, under the conditions of constant volume, the accuracy of measurement of temperature directly takes The factors such as the degree of accuracy and non-ideal amendment certainly measured in working medium absolute pressure in system.Absolute pressure measurement the degree of accuracy be 1 in 10 Accuracy evaluations, but weight is maximum.Relative to gas constant volume method, the degree of accuracy of Gases dielectric constant method except The accuracy of measurement of capacitance bridge is additionally depended on depending on absolute pressure measurement.At present, national pressure reference is in 0.1MPa-10MPa In the range of uncertainty of measurement be 21ppm (1ppm=10-6).If wanting to realize that the degree of accuracy is better than in 5.0K-24.5561K warm areas 1mK measurement, when temperature is 24.5561K, thermometric overall accuracy should be controlled within 41ppm.Therefore, surveyed by absolute pressure The limitation of accuracy of measurement, is difficult with gas constant volume method and gas Method of Dielectric Coefficient sets up thermodynamic temperature measuring basis device.
Gas acoustic method carries out measurement using the relation between the perfect gas velocity of sound and thermodynamic temperature, relative to first two Pedestal method, gas acoustic method reduces the dependence measured absolute pressure, by measuring in particular cavity body gas in different pressures Resonant frequency (sound wave resonance frequency measurement) and cavity size (microwave resonance frequency measurement) under power obtain the velocity of sound, and then extrapolate To ideal gas behavior.This method is integrated with sound wave resonance frequency measurement and microwave resonance frequency measurement, is surveyed in the warm area The minimum method of calorimetric mechanics temperature accuracy, but be due to that the noise of constant temperature system under low temperature is produced to acoustic measurement and can not neglected Influence slightly so that it measures difficulty and greatly improved.
To sum up, existing three kinds of thermodynamic temperature measuring basis method each has advantage and disadvantage in the world, and wherein gas is determined Appearance method and the degree of accuracy of gas Method of Dielectric Coefficient measure level dependent on absolute pressure, and the degree of accuracy of gas acoustic method is in low-temperature measurement Easily by Environmental Noise Influence.Currently, absolute pressure accuracy of measurement is relatively low, is difficult to realize the accuracy of measurement better than 1mK.Cause This, to obtain the measurement of high accuracy thermodynamic temperature must be innovated on test philosophy.
Utility model content
This patent aim to solve the problem that traditional gas constant volume method and gas Method of Dielectric Coefficient dependent on absolute pressure measurement level with And gas acoustic method in low temperature easily by Environmental Noise Influence the problems such as.
The utility model provides a kind of level pressure temperature survey standard apparatus, and it includes:Refrigeration machine, it is cold that it includes at least one Head;Pressure chamber, the refrigeration machine freezes to the pressure chamber;Pressure control pipeline portions, it is to the work in the standard apparatus Make gas and carry out pressure control, quasi- ball-type microwave cavity, the quasi- ball-type microwave cavity and control are provided with the pressure chamber Pressure pipeline portions are connected.
Wherein, the working gas is high-purity helium.
Wherein, pressure chamber flange is provided with the pressure chamber.
Wherein, it is provided with spring damper between refrigeration machine and zero level flange.
Wherein, the refrigeration machine is the pulse tube refrigerating machine of low vibration.
Wherein, in addition at least one protective shield of radiation.
Level pressure temperature survey standard apparatus of the present utility model by by absolute pressure measures conversion be relative pressure control, So that pressure measxurement uncertainty is reduced to 3.4ppm (1ppm=10 by 21ppm-6), overcome traditional gas constant volume method and gas Method of Dielectric Coefficient depends on the inferior position that absolute pressure is measured;By microwave resonance e measurement technology, it can obtain than measurement absolute pressure Li Genggao precision, microwave resonance uncertainty of measurement is up to 2ppb (1ppb=10-9);It is micro- by using pressure chamber and quasi- ball-type The connectivity structure of wave resonance chamber solves problem on deformation of the quasi- ball-type microwave cavity under vacuum and inflated condition, reduces unreasonably Think the influence of factor.
Brief description of the drawings
Fig. 1 is the structural representation of level pressure temperature survey standard apparatus of the present utility model.
Embodiment
For the ease of understanding the utility model, embodiment of the present utility model is illustrated below in conjunction with the accompanying drawings, ability Field technique personnel should be appreciated that following explanations only to facilitate being explained to utility model, and not as to its scope Specific restriction.
Fig. 1 is the structural representation of level pressure temperature survey standard apparatus of the present utility model.The level pressure temperature survey benchmark Device includes:Refrigeration machine 1, the refrigeration machine 1 is the pulse tube refrigerating machine of low vibration, is pressure chamber 26 and quasi- ball-type microwave resonance Chamber 31 provides the low-temperature receiver of efficient stable, and the ball-type microwave cavity 31 that is defined, which provides cold, makes its internal temperature be down to design temperature. In order to reduce slight vibrations when refrigeration machine 1 works, spring damper 2 is added on zero level flange 3, in the He of one-level cold head 8 Two grades of cold heads 17 add one-level flexibility thermally coupled 9 and two grades of flexibilities thermally coupled 18;Zero level flange 3 and vacuum cylinder 4 and one-level method Orchid 12 is connected with one-level protective shield of radiation 13 builds a confined space jointly, and two grades of flanges 21 and two grades of protective shield of radiations 22 are common A confined space is built, the two confined spaces are that pressure chamber 26 and quasi- ball-type microwave cavity 31 provide the true of stabilization together Empty adiabatic working environment.
As shown in fig. 1, refrigeration machine 1 includes one-level cold head 8 and two grades of cold heads 17, wherein one-level cold head 8 and one-level flange 12 are connected, and one-level cold head thermometer 6 and one-level cold head heater 7 are connected with one-level cold head 8, passes through the one-level cold head temperature The temperature of degree 6 pairs of one-level cold heads 8 of meter is measured, and is entered by the temperature of 7 pairs of one-level cold heads 8 of one-level cold head heater Row fine setting;Two grades of cold heads 17 are connected with two grades of flanges 21, and two grades of Hes of cold head thermometer 15 are connected with two grades of cold heads 17 Two grades of cold head heaters 16, are measured by the temperature of 15 pairs of two grades of cold head thermometers, two grades of cold heads 17, passed through The temperature of two grades of 16 pairs of cold head heater, two grades of cold heads 17 is finely adjusted.
The lower section of the one-level cold head 8 is provided with one-level flexibility thermally coupled 9, and the lower section of two grades of cold heads 17 adds two Level flexibility thermally coupled 18, can be effectively reduced in pulse tube by one-level flexibility thermally coupled 9 and two grades of flexible hot links 18 Gases cycle pressure oscillation causes the vibration effect that tube wall elasticity deformation band comes;Connected by spring damper 2, one-level flexible thermal Connect 10 and the thermally coupled 19 dual shock absorption measure of two grades of flexibilities efficiently solve the vibration problem of refrigeration machine 1, the flexible connection is Elastomeric material and with preferable heat transfer performance, can eliminate vibration and can preferably carry out refrigeration transmission, be microwave resonance System builds a good low temperature environment.
Be connected with zero level flange 3 in the lower section of the spring damper 2, the one-level flange 12 and zero level flange 3 it Between be provided with zero level suspension rod 5, one-level suspension rod 14 is set between two grades of flanges 21 and one-level flange 12, passes through the zero level Flange is connected by suspension rod 5 with one-level suspension rod 14, and the simple in construction of two layers suspension rod, installing/dismounting are very convenient, and suspension rod is by exhausted Hot material is made, while the heat transfer between flange not at the same level can also be reduced.In addition, the one-level flange 12, one-level protective shield of radiation 13rd, two grades of flanges 21 and two grades of protective shield of radiations 22 are gold-plated structure, can effectively reduce radiation heat transfer;For the temperature to flange It is controlled, one-level flange thermometer 10 and one-level flange heater 11 is set on the one-level flange 12, pass through one-level method The temperature of blue 10 pairs of the thermometer one-level flange is measured, and passes through 11 pairs of one-level flanges 12 of one-level flange heater Temperature is finely adjusted;Two grades of flange thermometers 19 and two grades of flange heaters 20 are set on two grades of flanges 21, pass through two The temperature of level flange 19 pairs of two grades of flanges 21 of thermometer is measured, and passes through two grades of 20 pairs of flange heaters, two grades of methods The temperature of orchid 21 is finely adjusted.
In Fig. 1, pressure chamber 26 is provided with the lower section of two grades of flanges 21, the pressure chamber 26 is constituted with pressure chamber flange 25 Work test environment, has inlet port, the inlet port and air inlet pipe 32, escape pipe 33 on the pressure chamber flange 25 It is connected with vacuum feedthroughs interface 34, two grades of flanges 21 are connected by two grades of suspension rods 23 with the pressure chamber flange 25 Connect.Vacuum cylinder 4 and zero level flange 3, one-level protective shield of radiation 13 and one-level flange 12, two grades of protective shield of radiations 22 and two grades of flanges 21, Pressure chamber 26 can be by bolt connection, detachable with pressure chamber flange 25;Zero level flange 3, vacuum cylinder 4, one-level flange 12, The vacuum system that one-level protective shield of radiation 13, two grades of flanges 21 and two grades of protective shield of radiations 22 are constituted has good insulation effect, protects Demonstrate,prove in one-level protective shield of radiation 13 and two grades of grade peripheries of protective shield of radiation 22 and pressure chamber 26 and quasi- ball-type microwave cavity 31 The uniformity of thermal field.
The level pressure temperature reference device includes pressure control pipeline portions, the pressure control pipeline portions and the air inlet pipe 32 with And escape pipe 33 is attached, the gas pressure in whole standard apparatus is caused to keep stable by the pressure control pipeline portions, The pressure control pipeline portions include the helium that storage in source of the gas 35, the source of the gas 35 has high-purity, and the source of the gas 35 is connected by pipeline Cold-trap 39 is connect, the cold-trap 39 is used to reduce helium temperature, when needing to enter helium trip temperature reduction, valve 36 is closed Close, valve 37 and valve 38 are opened so that the helium in source of the gas 35 passes through from the pipeline of cold-trap 39, in order to improve the pure of helium Degree, gas purification apparatus 44 can be further provided with pipeline, valve is set in pipeline around gas purification apparatus 44 41st, valve 42 and valve 43, can remove the impurity in helium to improve helium purity by the gas purification apparatus 44 so that Helium into air inlet pipe 32 has high purity.Pressure control pipeline portions are provided with flowmeter 40 and flowmeter 46, by this Two flowmeters measure the mass flow of pipeline in real time;Wherein, the helium sent from source of the gas 35 by flowmeter 40, valve 41, Gas purification apparatus 44, valve 43 and air inlet pipe 32 enter pressure chamber 26 and quasi- ball-type microwave cavity 31, are flowed through escape pipe 33 Enter pressure gauge 47 and feedback control loop 48, when the flow of flowmeter 40 is excessive, part helium can be taken out through flowmeter 46 by vavuum pump 45 Go out to external environment, so each part constitutes a pressure compensation loop together, to compensate the leakage of the gap gas of pressure gauge 47 The caused pressure loss, so that pressure gauge is chronically at stable state, it is in pressure chamber 26 and quasi- ball-type microwave cavity 31 Portion provides long-term, stable pressure environment.
Quasi- ball-type microwave in the steady pressure environment formed by the pressure control pipeline portions of periphery, microwave resonance system Resonator 31 can be successfully separated association pattern to improve frequency measurement accuracy, launch microwave by microwave antenna 28, measure humorous Vibration frequency finally obtains standard under the conditions of resonant frequency of the quasi- ball-type microwave cavity 31 under vacuum state and inflated condition, level pressure The resonant frequency of spherical microwave cavity 31 meets certain relational expression with gas refracting index therein, and thus relational expression can be obtained Gas refracting index under the conditions of level pressure, and by gas virial equation can obtain level pressure under the conditions of gas refracting index and thermodynamic temperature Another relational expression met, so that in the case of gas refracting index under the conditions of known level pressure thus relational expression level pressure bar can be obtained Corresponding thermodynamic temperature under part;The automated data acquisition system that intelligence control system is connected by pin interfaces 34 completes number According to collection and processing, be that pressure chamber 26 and quasi- ball-type microwave cavity 31 provide reliable and stable experimental situation, realize one-level Cold head thermometer 6, one-level flange thermometer 10, two grades of cold head thermometers 15, two grades of flange thermometers 19, standard rhodium iron thermometers Synchronous acquisition, record and the automatic business processing of each parameters such as 29, so as to realize that high accuracy thermodynamic temperature is measured.
In case study on implementation as shown in Figure 1, air inlet pipe 32 and escape pipe 33 are connected by clip with control pressurer system, are Quasi- ball-type microwave cavity 31 provides pressure environment steady in a long-term, by being relative pressure control by absolute pressure measures conversion System, reduces pressure measxurement uncertainty, overcomes traditional gas and determines method and gas Method of Dielectric Coefficient dependent on absolute pressure survey The inferior position of amount.Quasi- ball-type microwave cavity 31 is mounted below in pressure chamber flange 25, connectivity structure 27, microwave are disposed with thereon Antenna 28, wherein:One of connectivity structure 27 is connected with air inlet pipe 32 by capillary so that pressure chamber 26, quasi- ball-type microwave are humorous Shake chamber 31, pressure control air inlet pipe 32, pressure is equal everywhere in escape pipe 33, effectively prevent pressure-measuring pipe present in gas thermometer Dead space amendment caused by pressure is shared on road, is solved deformation of the quasi- ball-type microwave cavity 31 under vacuum and inflated condition and is asked Topic, reduces influence of the imperfection to temperature measurement accuracy;Microwave signal is received by the transmitting of microwave antenna 28 and obtains accurate Resonant frequency of the ball-type microwave cavity 31 under vacuum state and inflated condition, has higher precision than measurement absolute pressure, Uncertainty reaches 2ppb, and then obtains high-precision gas refracting index and thermodynamic temperature.It is cold in one-level in the implementation case First 8, one-level flange 12, be provided with two grades of cold heads 18, two grades of flanges 21 and quasi- ball-type microwave cavities 31 thermometer (6,10, 29) and heater (7,11,16,20 and 30) 15,19 and, temperature control is combined by control system, can fast cooling to target temperature Degree, and obtain high accuracy temperature control effect.
Intelligence control system can write LabVIEW programs by exploitation includes temperature, pressure to each subsystem to realize Control, collection and the processing, real subsystems Collaborative Control of the parameters such as power, frequency, mass flow, voltage, electric current, resistance With data acquisition, real time data processing and analysis feedback.
Relative pressure control accuracy of the present utility model is high, overcomes traditional measurement method temperature measurement accuracy and is limited by The inferior position of absolute pressure accuracy of measurement;Quasi- ball-type microwave cavity resonant frequency measuring ratio of precision absolute pressure measurement accuracy is high The 3-4 order of magnitude, up to 2ppb (1ppb=10-9), be conducive to the foundation of high-resolution hydrocode standard apparatus;Quasi- ball-type microwave Resonator deformation under vacuum and inflated condition is small, and influence of the non-ideal factor to temperature measurement accuracy is small.
Although it is understood that the utility model is disclosed as above with preferred embodiment, but above-described embodiment is not To limit the utility model.For any those skilled in the art, the utility model technical side is not being departed from Under case ambit, technical solutions of the utility model all are made with many possible variations using the technology contents of the disclosure above And modification, or it is revised as the equivalent embodiment of equivalent variations.Therefore, every content without departing from technical solutions of the utility model, According to technical spirit of the present utility model to any simple modifications, equivalents, and modifications made for any of the above embodiments, still belong to In the range of technical solutions of the utility model protection.

Claims (6)

1. a kind of level pressure temperature survey standard apparatus, it includes:Refrigeration machine, it includes at least one cold head;Pressure chamber, the system Cold is freezed to the pressure chamber;Pressure control pipeline portions, it carries out pressure control to the working gas in the standard apparatus, its It is characterised by:Quasi- ball-type microwave cavity, the quasi- ball-type microwave cavity and pressure control pipeline are provided with the pressure chamber Part is connected.
2. level pressure temperature survey standard apparatus as claimed in claim 1, it is characterised in that:The working gas is high-purity helium Gas.
3. level pressure temperature survey standard apparatus as claimed in claim 1, it is characterised in that:Pressure is provided with the pressure chamber Power cell method is blue.
4. level pressure temperature survey standard apparatus as claimed in claim 1, it is characterised in that:Between refrigeration machine and zero level flange It is provided with spring damper.
5. level pressure temperature survey standard apparatus as claimed in claim 1, it is characterised in that:The refrigeration machine is the arteries and veins of low vibration Tube cooler.
6. level pressure temperature survey standard apparatus as claimed in claim 1, it is characterised in that:Also include at least one radiation proof Screen.
CN201720100247.XU 2017-01-23 2017-01-23 A kind of level pressure temperature survey standard apparatus Active CN206450339U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107764428A (en) * 2017-01-23 2018-03-06 中国科学院理化技术研究所 A kind of level pressure temperature survey standard apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107764428A (en) * 2017-01-23 2018-03-06 中国科学院理化技术研究所 A kind of level pressure temperature survey standard apparatus
CN107764428B (en) * 2017-01-23 2024-03-08 中国科学院理化技术研究所 Constant pressure temperature measurement reference device

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