CN108731661B - Air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope - Google Patents
Air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope Download PDFInfo
- Publication number
- CN108731661B CN108731661B CN201810417615.2A CN201810417615A CN108731661B CN 108731661 B CN108731661 B CN 108731661B CN 201810417615 A CN201810417615 A CN 201810417615A CN 108731661 B CN108731661 B CN 108731661B
- Authority
- CN
- China
- Prior art keywords
- heating
- air chamber
- chamber
- vacuum chamber
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/60—Electronic or nuclear magnetic resonance gyrometers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention relates to an air chamber heating integrated unit structure for a miniature nuclear magnetic resonance gyroscope. Wherein, heating plate and temperature sensor constitute the little unit of heating control by temperature change, heat for the air chamber through the heating member, and air chamber gland and base all adopt no magnetism, high temperature resistance polyimide material, keep apart with external temperature as central heating unit, and the base passes through the high temperature vacuum glue with the vacuum chamber lid and is in the same place. The vacuum chamber body and the vacuum chamber cover are bonded by using a glass melting mode, and the heating integrated unit structure is obtained by vacuumizing the cavity after the vacuum chamber body and the vacuum chamber cover are integrated. Compared with the prior art, the invention has better heat preservation and disturbance resistance, more compact structure, good manufacturability and easy installation and use.
Description
Technical Field
The invention relates to the technical field of heating temperature control and miniaturization of a miniature nuclear magnetic resonance gyroscope, in particular to an air chamber heating integrated unit structure for the miniature nuclear magnetic resonance gyroscope, which is used for providing an integrated and miniaturized air chamber and a heater component and can be applied to strategic and tactical weaponry, a miniature space vehicle and the like.
Background
The micro nuclear magnetic resonance gyroscope has the characteristics of small volume, low power consumption, high performance, large dynamic range and the like, and becomes a research focus and a hot spot of a novel inertia device.
The nuclear magnetic resonance gyroscope senses the rotation information of an object by utilizing Larmor precession of nuclear spin magnetic moment, the performance of the gyroscope mainly depends on the preparation of the nuclear spin magnetic moment and the working state of the nuclear spin magnetic moment, and an atomic gas chamber is heated to be higher than 100 ℃ in preparation and normal working of the nuclear spin magnetic moment, so that high-density alkali metal steam is obtained. As a core component of the gyroscope, the gas chamber and the heating temperature control part must have extremely high structural stability and cannot generate relative displacement in the experiment and disassembly processes, so that the performance is changed, the gyroscope has no repeatability, and the performance of the gyroscope is changed because the prior discrete assembly type structure generates relative change between all the devices of the gyroscope during each disassembly and assembly.
Because the working principle of the gyroscope relates to the macroscopic effect of tiny atoms, the gyroscope has extremely high stability requirements on the working environment and the control means of the gyroscope, and particularly the temperature stability of an atomic gas chamber further influences the signal-to-noise ratio of the gyroscope. At present, a plurality of heating body structures exposed in the air cannot control the diffusion and conduction of heat, and a good heat preservation effect does not exist, so that the overall performance of the gyroscope is limited, and a novel structure with a good heat preservation effect is urgently needed to be improved. The vacuum structure has a good heat preservation effect, and is a key way for further improving the performance of the gyroscope in the future.
Meanwhile, in the face of the requirement for the rapid development of weaponry, the demand for miniaturization of inertial devices is more and more urgent, and the size of a smaller gyroscope cannot be realized due to the fact that installation hole sites are reserved in the split-assembly type structure, so that integration and unitization of device parts become an effective way for reducing the size of the gyroscope, and the split-assembly type structure is also the development direction for miniaturization of the gyroscope in the future.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an air chamber heating integrated unit structure for a miniature nuclear magnetic resonance gyroscope, the unit structure integrates core device components of an air chamber and a heating temperature control gyroscope, a vacuum chamber is added to insulate the internal air chamber, the integral control of the air chamber and the heating is realized, the unit structure has extremely high stability, and meanwhile, the unit structure can be used for a plurality of different nuclear magnetic resonance gyroscopes, and is convenient to disassemble and assemble. The integrated vacuum unit is high in structural stability, compact in structure and strong in applicability.
The technical scheme of the invention is as follows: an air chamber heating integrated unit structure for a miniature nuclear magnetic resonance gyroscope comprises an air chamber, a heating body, a heating sheet, a temperature sensor, a base, a vacuum chamber cover, an air chamber gland and a vacuum chamber body; the gas chamber is filled with alkali metal atoms, inert gas atoms and buffer gas atoms required by the sensitive angular velocity of the nuclear magnetic resonance gyroscope; the upper surface of the heating body is provided with a groove for limiting the air chamber, and the lower surface of the heating body is provided with a groove for sticking the heating sheet and the temperature sensor; the heating sheet and the temperature sensor are stacked, and form a heating temperature control small unit for heating the air chamber together with the heating body; the upper surface of the base is provided with a groove for placing the small heating temperature control unit and limiting the small heating temperature control unit, and the lower surface of the base is provided with a strip-shaped groove; a round hole is formed in the center of the air chamber gland to limit the protruded air sealing port on the upper surface of the air chamber; pressing and fixing the air chamber gland by utilizing the pressure when the vacuum chamber body is connected with the vacuum chamber cover; the vacuum chamber body and the vacuum chamber lid are bonded by melting glass.
The air chamber is the cube, and the gas port setting is used for leading to light on the air chamber upper surface, and the lateral wall four sides, pumping light and detection light pass the air chamber through this four sides perpendicularly respectively, take place the interact with the atom.
And the vacuum chamber cover is provided with a round hole for enabling the heating sheet and the electric connecting wire of the temperature sensor to penetrate out, and after the heating sheet and the electric connecting wire penetrate out, the round hole is bonded and sealed by high-temperature vacuum glue.
The heating body adopts a square structure which is larger than the air chamber; the heating body is made of an aluminum alloy material with the brand number of 2A 12.
The heating body, the heating sheet and the temperature sensor are uniformly coated and bonded by using heat-conducting silicone grease.
The base is a cylindrical structure with a round hole in the center; the air chamber gland is of a hollow cylindrical structure; the material of the air chamber gland and the base is non-magnetic material, the high temperature resistance is higher than 150 ℃, and the heat conductivity is lower than 10W/(m DEG C).
After all the components are assembled to form a whole, an air chamber formed by the vacuum chamber body and the vacuum chamber cover is vacuumized to obtain an integrated vacuum unit structure, the temperature control performance and the temperature control stability of the air chamber are further improved, and the vacuum air sealing port is positioned on the upper surface of the vacuum chamber body.
The vacuum chamber body and the vacuum chamber cover are made of high-position silicon glass.
Compared with the prior art, the invention has the following advantages:
(1) the gas chamber heating integrated unit structure integrates the gas chamber and the heating temperature control two parts of gyroscope core device components, has the advantage of miniaturization, is used as an integral device, does not need to be disassembled and assembled when the gyroscope is disassembled and assembled, has high structural stability, and can be suitable for a plurality of gyroscopes with different specifications;
(2) the invention adopts the air chamber and the heating part inside the vacuum chamber for packaging, greatly reduces the conduction and the diffusion of heat, has good heat insulation performance, ensures that the heating efficiency of the air chamber is higher, and is very important for improving the signal-to-noise ratio and the output stability of the gyroscope. The vacuum chamber is made of high-position silicon glass, the flatness of four side walls is high, and the transmittance and the polarization state of laser can be ensured;
(3) the air chamber gland and the base are made of polyimide materials, so that the air chamber gland and the base have good high-temperature resistance and thermal insulation on the premise of ensuring no magnetism, the central air chamber and the heating part are formed by the two structural parts and are isolated from the outside by one layer of temperature, and the structural design adopts a hollow-out form (hole digging and slotting), so that the heat conduction is further reduced, and the power consumption in the heat insulation process can be effectively reduced;
(4) according to the invention, the heating sheet, the temperature sensor and the heating body are uniformly coated and bonded by using the heat-conducting silicone grease, a good heat channel is constructed, the damage of the heating sheet due to overheating of local temperature can be avoided, the phenomenon that the temperature sensor feeds back the measured local temperature to cause inaccurate temperature control can also be prevented, meanwhile, the air chamber is heated more uniformly by coating the heat-conducting silicone grease, the better working state of atoms is ensured, and the performance of the gyroscope is improved.
Drawings
FIG. 1 is an exploded view of the structure of a gas chamber heating integrated unit structure for a micro-nuclear magnetic resonance gyroscope according to the present invention;
FIG. 2 is a schematic view of a heating temperature control small unit of the gas chamber heating integrated unit structure for the micro nuclear magnetic resonance gyroscope of the present invention;
FIG. 3 is a three-dimensional view of a base 5 of the gas chamber heating integrated unit structure for a micro-nuclear magnetic resonance gyroscope according to the present invention;
fig. 4 is a three-view of the gas chamber gland 7 of the gas chamber heating integrated unit structure for the micro nuclear magnetic resonance gyroscope of the invention.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples:
as shown in the structural explosion diagram of fig. 1, the gas chamber heating integrated unit structure for the micro nmr gyroscope of the present invention comprises a gas chamber 1, a heating body 2, a heating sheet 3, a temperature sensor 4, a base 5, a vacuum chamber cover 6, a gas chamber gland 7 and a vacuum chamber body 8, wherein:
the gas chamber 1 is a cube with the side length of 10mm, alkali metal atoms, inert gas atoms and buffer gas atoms required by the sensitive angular velocity of the nuclear magnetic resonance gyroscope are filled in the gas chamber, a gas sealing port is arranged on the upper surface of the gas chamber, and after the required gas is filled in the gas chamber, glass at the gas sealing port is melted and sealed. The four sides of the side wall are used for light passing, and the pumping light and the detection light vertically penetrate through the gas chamber through the four sides respectively and interact with atoms.
As shown in fig. 2, the heating body 2 is of a square structure slightly larger than the air chamber, the upper surface of the heating body is provided with a groove with the depth of 0.5mm for placing the air chamber 1, the lower surface of the heating body is provided with a groove with the depth of 2mm for placing the heating sheet 3 and the temperature sensor 4, and the heating body is made of non-magnetic pure aluminum because the thermal conductivity of the pure aluminum is high. The heating sheet 3 and the temperature sensor 4 are stacked, and form a heating temperature control small unit together with the heating body 2 to heat the air chamber. Heating member 2, heating plate 3 and temperature sensor 4 use heat conduction silicone grease to paint the bonding each other evenly, can make the air chamber be heated more evenly, avoid the heating plate local temperature overheated and damage, prevent that temperature sensor from feeding back local temperature and leading to the accuse temperature inaccurate.
As shown in fig. 3, the base 5 is a cylindrical structure with a circular hole in the center, and a square groove with a depth of 3mm is formed on the upper surface of the base for placing the above-mentioned small heating and temperature control unit; the lower surface is also provided with corresponding strip-shaped grooves which are mainly used for reducing the contact area with the vacuum chamber cover 6 and reducing heat conduction. The base 5 and the vacuum chamber cover 6 are fixed by high-temperature vacuum glue which has the characteristics of high temperature resistance and low air release rate.
As shown in FIG. 4, the air chamber gland 7 is a hollow cylindrical structure with a height of 3mm, and a circular hole with a diameter of 6mm at the center of the air chamber gland can well limit the protruded air sealing port on the upper surface of the air chamber 1. The air chamber gland 7 is fixed by pressure pressing when the vacuum chamber body 8 is connected with the vacuum chamber cover 6.
The air chamber gland 7 and the base 5 are used for first heavy isolation between the central heating temperature control part and the outside, and a hollow structure (digging holes and slotting) is adopted in structural design so as to reduce heat conduction. The material is non-magnetic material, polyimide material is selected, and the heat resistance is higher than 150 deg.C and the heat conductivity is lower than 10W/(m DEG C).
The vacuum chamber body 8 and the vacuum chamber cover 6 are made of Gaojia silicon glass, the glass is bonded in a melting mode, the transmittance, the temperature characteristic and the structural strength are good, and the flatness of four side walls is emphatically ensured during manufacturing so as to ensure the transmittance when laser passes through. 4 round holes with the diameter of 1mm are formed in the vacuum chamber cover 6 and used for enabling the electric connecting wires of the heating sheet and the temperature sensor to penetrate out, and after the electric connecting wires penetrate out, the 4 holes are also sealed by high-temperature vacuum glue in a bonding mode.
During actual installation and operation, the heating body 2, the heating sheet 3 and the temperature sensor 4 are uniformly coated and bonded by utilizing heat-conducting silicone grease, whether the heating, temperature measurement, feedback control and other performances are normal is tested, after the test is normal, the base 5 and the vacuum chamber cover 6 are bonded by utilizing high-temperature vacuum glue, after the test is completely dried, the air chamber gland 7, the air chamber 1, the bonded heating temperature control unit and the base vacuum chamber cover unit are sequentially installed according to corresponding limiting grooves, meanwhile, the electric leading-out wires of the heating sheet 3 and the temperature sensor 4 are led out from the small hole of the vacuum chamber cover 6, the vacuum chamber body 8 is covered, and the glass at the intersection of the heating sheet 3 and the edge of the vacuum chamber cover 6 is fused and bonded. And then sealing and bonding 4 small holes on the vacuum chamber cover 6 by using high-temperature vacuum glue, basically assembling all the components of the integrated unit structure at this time, finally vacuumizing the vacuum chamber, positioning a vacuum sealing port on the upper surface of the vacuum chamber body 8, and melting glass at the sealing port to seal the sealing port after the vacuum degree reaches a certain degree, thereby completing the assembly and the manufacture of the integrated unit structure.
The air chamber heating integrated unit structure for the miniature nuclear magnetic resonance gyroscope is an integral unit structure integrating core device components such as heating, temperature control, air chambers, vacuum heat preservation and the like, has higher stability and heat preservation performance, and can be directly used in different miniature nuclear magnetic resonance gyroscopes as one device component.
Those skilled in the art will appreciate that the details of the invention not described in detail in this specification are well within the skill of those skilled in the art.
Claims (7)
1. The utility model provides an air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope which characterized in that: comprises an air chamber (1), a heating body (2), a heating sheet (3), a temperature sensor (4), a base (5), a vacuum chamber cover (6), an air chamber gland (7) and a vacuum chamber body (8); the gas chamber (1) is filled with alkali metal atoms, inert gas atoms and buffer gas atoms required by the sensitive angular velocity of the nuclear magnetic resonance gyroscope; the upper surface of the heating body (2) is provided with a groove for limiting the air chamber (1), and the lower surface is provided with a groove for sticking the heating sheet (3) and the temperature sensor (4); the heating sheet (3) and the temperature sensor (4) are stacked and form a small heating temperature control unit for heating the air chamber (1) together with the heating body (2); the upper surface of the base (5) is provided with a groove for placing the small heating temperature control unit and limiting the small heating temperature control unit, and the lower surface is provided with a strip-shaped groove; a round hole is formed in the center of the air chamber gland (7) to limit the protruded air sealing port on the upper surface of the air chamber (1); the air chamber gland (7) is pressed and fixed by the pressure when the vacuum chamber body (8) is connected with the vacuum chamber cover (6); the vacuum chamber body (8) and the vacuum chamber cover (6) are bonded by melting glass;
the air chamber (1) is a cube, the air sealing port is formed in the upper surface of the air chamber (1), the four sides of the side wall are used for light passing, and the pumping light and the detection light vertically penetrate through the air chamber through the four sides respectively and interact with atoms.
2. The gas chamber heating integrated unit structure for the miniature nuclear magnetic resonance gyroscope according to claim 1, wherein: and a round hole is formed in the vacuum chamber cover (6) and used for enabling the electric connecting wire of the heating sheet and the temperature sensor to penetrate out, and after the electric connecting wire penetrates out, the round hole is bonded and sealed by high-temperature vacuum glue.
3. The gas chamber heating integrated unit structure for the miniature nuclear magnetic resonance gyroscope according to claim 1, wherein: the heating body (2) adopts a square structure which is larger than the air chamber (1); the heating body (2) is made of an aluminum alloy material with the brand number of 2A 12.
4. The gas chamber heating integrated unit structure for the miniature nuclear magnetic resonance gyroscope according to claim 1, wherein: the heating body (2), the heating sheet (3) and the temperature sensor (4) are uniformly coated and bonded by using heat-conducting silicone grease.
5. The gas chamber heating integrated unit structure for the miniature nuclear magnetic resonance gyroscope according to claim 1, wherein: the base (5) is a cylindrical structure with a round hole in the center; the air chamber gland (7) is of a hollow cylindrical structure; the air chamber gland (7) and the base (5) are made of non-magnetic materials, the high temperature resistance is higher than 150 ℃, and the heat conductivity is lower than 10W/(m DEG C).
6. The gas chamber heating integrated unit structure for the micro nuclear magnetic resonance gyroscope according to claim 2, characterized in that: after all the components are assembled to form a whole, an air chamber formed by the vacuum chamber body (8) and the vacuum chamber cover (6) is vacuumized to obtain an integrated vacuum unit structure, the temperature control performance and the temperature control stability of the air chamber are further improved, and the vacuum air sealing port is positioned on the upper surface of the vacuum chamber body (8).
7. The gas chamber heating integrated unit structure for the micro nuclear magnetic resonance gyroscope according to claim 2, characterized in that: the vacuum chamber body (8) and the vacuum chamber cover (6) are made of Gappon silicon glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810417615.2A CN108731661B (en) | 2018-05-04 | 2018-05-04 | Air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810417615.2A CN108731661B (en) | 2018-05-04 | 2018-05-04 | Air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108731661A CN108731661A (en) | 2018-11-02 |
| CN108731661B true CN108731661B (en) | 2020-06-09 |
Family
ID=63937001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810417615.2A Active CN108731661B (en) | 2018-05-04 | 2018-05-04 | Air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108731661B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738836A (en) * | 2019-01-09 | 2019-05-10 | 北京航空航天大学 | It is a kind of to be evenly heated oven applied to atom magnetometer |
| CN110986908B (en) * | 2019-12-16 | 2021-07-20 | 武汉大学 | Elliptical resonant mode piezoelectric MEMS (micro-electromechanical systems) ring gyroscope |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103208992A (en) * | 2012-01-11 | 2013-07-17 | 精工爱普生株式会社 | Optical module for atomic oscillator and atomic oscillator |
| CN104505273A (en) * | 2014-12-16 | 2015-04-08 | 北京航天控制仪器研究所 | Non-magnetic heating device for nuclear magnetic resonance gyroscope |
| CN105263197A (en) * | 2015-08-31 | 2016-01-20 | 北京航天控制仪器研究所 | Uniform non-magnet heating device for nuclear magnetic resonance gyroscope |
| CN105430770A (en) * | 2015-10-30 | 2016-03-23 | 北京航天控制仪器研究所 | Multilayer nonmagnetic heating device used for miniature nuclear magnetic resonance gyroscope |
| CN205718992U (en) * | 2016-06-03 | 2016-11-23 | 中国工程物理研究院总体工程研究所 | A kind of Micro Core magnetic resonance gyroscope air chamber |
| CN107063226A (en) * | 2017-06-07 | 2017-08-18 | 中国工程物理研究院总体工程研究所 | A kind of pair of air chamber nuclear spin gyroscope and its control method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006069115A1 (en) * | 2004-12-20 | 2006-06-29 | Northrop Grumman Corporation | Micro-cell for nmr gyroscope |
-
2018
- 2018-05-04 CN CN201810417615.2A patent/CN108731661B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103208992A (en) * | 2012-01-11 | 2013-07-17 | 精工爱普生株式会社 | Optical module for atomic oscillator and atomic oscillator |
| CN104505273A (en) * | 2014-12-16 | 2015-04-08 | 北京航天控制仪器研究所 | Non-magnetic heating device for nuclear magnetic resonance gyroscope |
| CN105263197A (en) * | 2015-08-31 | 2016-01-20 | 北京航天控制仪器研究所 | Uniform non-magnet heating device for nuclear magnetic resonance gyroscope |
| CN105430770A (en) * | 2015-10-30 | 2016-03-23 | 北京航天控制仪器研究所 | Multilayer nonmagnetic heating device used for miniature nuclear magnetic resonance gyroscope |
| CN205718992U (en) * | 2016-06-03 | 2016-11-23 | 中国工程物理研究院总体工程研究所 | A kind of Micro Core magnetic resonance gyroscope air chamber |
| CN107063226A (en) * | 2017-06-07 | 2017-08-18 | 中国工程物理研究院总体工程研究所 | A kind of pair of air chamber nuclear spin gyroscope and its control method |
Non-Patent Citations (3)
| Title |
|---|
| Predictive thermal model for indirect temperature measurement inside atomic cell of nuclear magnetic resonance gyroscope;Salleras M 等;《TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference》;20091013;第304-307页 * |
| 核磁共振陀螺中原子气室温度场的研究;易鑫 等;《中国光学》;20161231;第9卷(第06期);第671-677页 * |
| 核磁共振陀螺技术发展展望;万双爱 等;《导航定位与授时》;20170131;第04卷(第01期);第7-13页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108731661A (en) | 2018-11-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105430770B (en) | A kind of multilayer for miniature nuclear magnetic resonance gyroscope is without magnetic heating device | |
| CN108731661B (en) | Air chamber heating integrated unit structure for miniature nuclear magnetic resonance gyroscope | |
| CN103487176B (en) | Structure and method for packaging pressure sensor | |
| CN103323488B (en) | A kind of enhanced boiling heat transfer proving installation and method of testing | |
| JP4681205B2 (en) | Test gas detector for leak detection device with sensor for helium or hydrogen | |
| TW201105972A (en) | Radio frequency identification based thermal bubble type accelerometer | |
| CN102205941A (en) | Micro electro mechanical system (MEMS) process-based micro atomic cavity device air tightness package and method | |
| TWI405710B (en) | Radio frequency identification based thermal bubble type accelerometer | |
| CN102308078A (en) | A microsatellite comprising a propulsion module and an imaging device | |
| CN103500749B (en) | A kind of super long alignment InGaAs detector encapsulating structure of thermoelectric cooling | |
| JP2004361386A (en) | Infrared emission-detecting device | |
| WO2022142738A1 (en) | Sensor, valve device, and thermal management system | |
| CN106370203B (en) | Optical fiber ring temperature excitation device | |
| CN102053167B (en) | Hot air bubble type angular accelerometer applying radio frequency identification tag technology | |
| JP2007086038A (en) | Optical gas sensor | |
| CN203519214U (en) | Packaging structure of pressure sensor | |
| CN111964657A (en) | Double-layer vacuum heat-insulation structure for atomic gyroscope | |
| CN113267831B (en) | Constant temperature device for testing MEMS gravimeter | |
| CN102865967B (en) | Device for testing temperature characteristic of pressure sensor | |
| CN110672556A (en) | Thermal control device of Doppler differential interferometer with high thermal stability | |
| CN108061547B (en) | Air chamber nuclear spin relaxation testing device | |
| CN107101726A (en) | A kind of high temperature resistant radiation sensor and its manufacture method based on T-shaped thermopile | |
| CN105610045B (en) | A kind of temperature control device in laser resonator | |
| CN216927054U (en) | Heat preservation chamber of compact weak magnetic probe | |
| US9175884B2 (en) | System, apparatus and method for pulse tube cryocooler |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |