CN113263646B - Silicon crystal bar processing device for chip manufacturing - Google Patents
Silicon crystal bar processing device for chip manufacturing Download PDFInfo
- Publication number
- CN113263646B CN113263646B CN202110539789.8A CN202110539789A CN113263646B CN 113263646 B CN113263646 B CN 113263646B CN 202110539789 A CN202110539789 A CN 202110539789A CN 113263646 B CN113263646 B CN 113263646B
- Authority
- CN
- China
- Prior art keywords
- plate
- fixed
- rod
- sliding
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
The invention discloses a silicon crystal bar processing device for chip manufacturing, which comprises a clamping unit for clamping a silicon crystal bar, an overturning unit for overturning the silicon crystal bar, a lifting unit for driving the clamping unit to lift up and down, and a pushing unit; the clamping unit is arranged on the lifting unit, when the lifting unit drives the clamping unit to be located at a low position, the first pushing end of the pushing unit can push the clamping unit to move towards the overturning unit along the horizontal direction, meanwhile, the second pushing end of the pushing unit pushes the silicon crystal bar turned over in the overturning unit to move towards the clamping unit along the horizontal direction, and the discharge port of the overturning unit corresponds to the feed port of the clamping unit.
Description
Technical Field
The invention relates to a silicon crystal bar processing device, in particular to a silicon crystal bar processing device for chip manufacturing.
Background
The silicon single crystal rod is formed by shaping or pulling in a hearth through a zone melting or czochralski process, the silicon single crystal rod of the polycrystalline silicon is generally a rectangular silicon rod, the silicon single crystal rod is cylindrical, and the monocrystalline silicon is an active non-metallic element, is an important component of a crystal material and is in the front edge of the development of new materials. The monocrystalline silicon is used for the production and deep processing manufacture of chips, diode levels, rectifier device levels, circuit levels and solar cell level monocrystalline products, and the subsequent products of integrated circuits and semiconductor separation devices are widely applied to various fields and also play an important role in military electronic equipment.
The chip, also called microcircuit (microcircuit), microchip (microchip), integrated Circuit (IC), refers to a silicon chip containing an integrated circuit, the volume is small, and is often a part of a computer or other electronic equipment, in the manufacturing process of the chip, the production and processing of the silicon chip, especially the cutting of a silicon rod to obtain a qualified silicon chip, is an important ring in the whole industrial chain, the processing is performed through the steps of slicing the silicon rod into wafers, coating the wafers, photoetching, developing, testing and the like, and since the waste of edge scraps is large when the circular chip cuts a wafer, the chip is a product with extremely high precision, the requirement of arc cutting on a cutting tool is high, the crystal nucleus of monocrystalline silicon has directionality, the edge of the chip is easy to be cut by arc cutting, therefore, the wafer is made into a rectangle (including a square), the waste of edge scraps can be minimized, when the wafer cutting is performed, the straight line cutting is convenient, the silicon rod is cut into the wafer, the step of cutting the edge scraps is the step of the wafer, most of cutting is the silicon rod in the manufacturing process of cutting, the silicon chip is not capable of manually cutting the silicon rod, the silicon rod in the process of cutting, the silicon chip, the silicon rod cutting is not capable of the same batch, and the problem of the high efficiency of cutting is caused by the high cutting of the existing silicon chip cutting is that the silicon rod cutting is not the problem that the silicon rod cutting is caused by the high cutting efficiency.
Disclosure of Invention
Based on the defects in the prior art mentioned in the background art, the invention provides the silicon crystal bar processing device for manufacturing the chip, the silicon crystal bar is turned over by the turning unit and then moves towards the clamping unit under the action of the pushing unit, and the clamping unit cuts the clamped silicon crystal bar into the silicon crystal square pieces through the slicing unit and the square cutting unit in sequence by the rotatable lifting unit, so that the silicon crystal square pieces are convenient to use subsequently.
The invention overcomes the technical problems by adopting the following technical scheme, and specifically comprises the following steps: a silicon crystal bar processing device for chip manufacturing comprises a clamping unit for clamping a silicon crystal bar, an overturning unit for overturning the silicon crystal bar, a lifting unit for driving the clamping unit to lift up and down, and a pushing unit;
the clamping unit is arranged on the lifting unit, when the lifting unit drives the clamping unit to be located at a low position, the first pushing end of the pushing unit can push the clamping unit to move towards the overturning unit along the horizontal direction, meanwhile, the second pushing end of the pushing unit pushes the silicon crystal bar turned over in the overturning unit to move towards the clamping unit along the horizontal direction, and a discharge port of the overturning unit corresponds to a feed port of the clamping unit.
As a further scheme of the invention, the clamping unit comprises an upper clamping plate, a lower clamping plate, a mounting column, an L-shaped vertical plate, a first nitrogen spring, a first sliding chute, a first sliding rod, a rotating plate, an opening and a first bolt;
the mounting column is fixed at a first pushing end of the pushing unit, the upper end face of the mounting column is fixed to the bottom end of a long plate of the L-shaped vertical plate, a lower clamping plate is fixed to the lower end face of the long plate of the L-shaped vertical plate, the lower end face of a short plate of the L-shaped vertical plate is fixed to one end of a first nitrogen spring, a first sliding groove is formed in the side wall of the long plate of the L-shaped vertical plate, the upper clamping plate and the lower clamping plate are arranged oppositely, one end of the upper clamping plate is arranged in the first sliding groove in a sliding mode, a rotating plate is arranged on the opposite face, away from one end of the mounting column, of the upper clamping plate and the opposite face, away from the mounting column, of the lower clamping plate in a rotating mode, a first bolt is arranged on the upper clamping plate, a plurality of holes clamped with the first bolt are formed in the upper end face of the rotating plate on the upper clamping plate, one end of the first sliding rod is fixed to the lower end face of the upper clamping plate, the other end of the first nitrogen spring sequentially slides through the mounting column and the lower clamping plate and is provided with a guide inclined plane.
As a further scheme of the invention, the overturning unit comprises an inclined groove, a first vertical plate, a second vertical plate, a guide plate, a conveying table, a positioning table, a first push plate, a first telescopic rod, a first spring, a third vertical plate, a second sliding groove and a first mounting plate;
the first vertical plate and the second vertical plate are oppositely arranged and fixed on the upper end face of the first mounting plate, the inclined groove is obliquely arranged between the first vertical plate and the second vertical plate, the high end position of the inclined groove is that a feed inlet is arranged on the upper end face of the first vertical plate, the low end position of the inclined groove is that a discharge outlet is arranged on the upper end face of the second vertical plate, a plurality of silicon crystal rods capable of rolling along the inclined direction are arranged in the inclined groove, a conveying table fixed on the upper end face of the first mounting plate is arranged on one side wall of the second vertical plate far away from the first vertical plate, the upper end face of the conveying table is an inclined plane, a guide plate is fixed on the inclined plane, the guide plate and the second vertical plate are oppositely arranged, the high end position of the inclined plane of the conveying table is positioned under the discharge outlet of the inclined groove, the positioning table is fixed on the upper end face of the first mounting plate and is positioned under the bottom end position of the inclined plane of the conveying table, the silicon crystal bar is positioned between the guide plate and the second vertical plate and slides on the inclined surface of the conveying table from top to bottom along the length direction of the silicon crystal bar, the upper end surface of the first mounting plate is provided with a second sliding groove along the sliding direction of the silicon crystal bar on the inclined surface of the conveying table, the first push plate is arranged in the second sliding groove in a sliding manner through a first sliding block fixed on the lower end surface of the first push plate, one side wall of the first push plate is fixed with one end of a first telescopic rod, the other end of the first telescopic rod is fixed on the side wall of a third vertical plate, the third vertical plate is fixed on the upper end surface of the first mounting plate, a first spring is sleeved on the first telescopic rod, one end of the first spring is fixed with the side wall of the first push plate, the other end of the first spring is fixed with the side wall of the third vertical plate, the first push plate is arranged opposite to the conveying table, a discharge channel is formed between the first push plate and the side wall of the conveying table, and the positioning table is positioned in the discharge channel, three adjacent edges of the first push plate are respectively attached to the side walls of the second vertical plate, the conveying table and the first push plate.
As a further scheme of the invention, the pushing unit comprises a first pushing block, a second sliding rod, a second spring, a third sliding groove, a third sliding rod, an L-shaped pushing plate, a hinged plate, a fixed rod, a push rod, a second nitrogen spring, a first through groove, a second through groove, a side plate and a T-shaped sliding groove;
the two side plates are oppositely arranged and are fixed on the lifting unit, one end of the second sliding rod is fixed with one side wall of the mounting column, the other end of the second sliding rod penetrates through one side plate to be in contact with the guide inclined plane arranged on the first pushing block in a sliding manner, one end of the second spring sleeve is fixed with the side wall of the mounting column, the other end of the second spring sleeve is fixed with the side wall of the side plate, a third sliding groove is formed in the first mounting plate along the discharging direction of the discharging channel, the third sliding groove is positioned in the discharging channel, the second pushing block is arranged in the third sliding groove in a sliding manner, one side edge of the second pushing block is provided with the guide inclined plane and is in contact with the guide inclined plane at one end of the first sliding rod, the other side wall of the second pushing block is fixed with one end of the third sliding rod, the other end of the third sliding rod penetrates through the positioning table in a sliding manner, the second vertical plate is hinged with a second sliding block, and a first through groove is formed in the second vertical plate, the long plate of the L-shaped push plate is arranged in the first through groove in a sliding mode, the side wall of the long plate is attached to one side wall of the conveying table, the short plate of the L-shaped push plate can penetrate through the first through groove in a sliding mode and slide on the upper end face of the positioning table, one side wall of the short plate is fixed with one end of the push rod, the other side wall of the short plate can be in contact with the silicon crystal bar, the other end of the push rod penetrates through the first through groove and is hinged with a third sliding block, one end of the fixed rod is fixed on the side wall of the second vertical plate, the other end of the fixed rod is hinged with a hinged plate, a T-shaped sliding groove is formed in one side wall of the hinged plate along the length direction of the side wall of the hinged plate, the second sliding block and the third sliding block are arranged in the T-shaped sliding groove in a sliding mode, the first mounting plate is provided with a second through groove, the second through groove is located between the first vertical plate and the second vertical plate, the bottom end of the hinged plate is arranged in the second through groove in a sliding mode, one end of the hinge plate is fixed on the side wall of the first vertical plate, and the other end of the hinge plate is in sliding contact with one side wall of the hinge plate.
As a further scheme of the invention, the lifting unit comprises a lifting plate, a positioning rod, a third through groove, a baffle, a second telescopic rod, a third spring, a cylinder, a limiting rod and a bearing plate;
two relative settings the curb plate is all fixed at the lifter plate up end, the cylinder is fixed accepting the board up end, and its flexible end slides in proper order and passes first mounting panel, lifter plate and fixed with first promotion piece, set up on the lifter plate and promote a sliding fit's third through groove with first, the up end at first promotion piece is fixed to the baffle, and second telescopic link one end is fixed under the baffle the terminal surface other end and is fixed at the lifter plate up end, the third spring housing is established on the second telescopic link, the gag lever post is fixed on the telescopic link of cylinder and is located lifter plate lower terminal surface, the lower terminal surface of lifter plate is provided with two locating levers relatively.
As a further scheme of the invention, the device further comprises a slicing unit for slicing along the diameter direction of the silicon crystal bar, a squaring unit for trimming along the length direction of the silicon crystal bar, a second mounting plate, a third mounting plate, a motor, a first bevel gear, a second bevel gear, a third bevel gear, a fourth bevel gear, a fifth bevel gear, a sixth bevel gear, a first transmission rod, a second transmission rod, a third transmission rod, a first sleeve, a second plug pin and a third plug pin;
the second mounting plate is mounted on the upper end face of the third mounting plate through a mounting frame, the first mounting plate is arranged between the second mounting plate and the third mounting plate, the motor is fixed on the upper end face of the third mounting plate, an output shaft of the motor is rotatably sleeved with one end of the first transmission rod, a second bolt is arranged at the position where the output shaft of the motor is sleeved with one end of the first transmission rod, the first bevel gear is fixed on the output shaft of the motor and meshed with a second bevel gear fixed at one end of the second transmission rod, a third bevel gear is fixed at the other end of the second transmission rod, one end of the first sleeve is rotatably arranged on the third mounting plate, a third bolt is arranged at the position where the output shaft of the motor is rotatably sleeved with one end of the third transmission rod, the other end of the third transmission rod is fixed with the lower end face of the bearing plate, a fourth bevel gear is fixed on the first sleeve and meshed with the third bevel gear, a fifth bevel gear is fixed at the other end of the first transmission rod, and the sixth bevel gear is connected with the power input end of the squaring unit and meshed with the fifth bevel gear.
As a further scheme of the invention, the slicing unit comprises a first diamond wire, a first rotating shaft, a first lead groove, a fixed magnet and a movable magnet;
more than three first pivot one end all rotates the setting terminal surface under the second mounting panel, and the other end all rotates the setting at first mounting panel up end, more than three impartial interval be provided with the first wire recess of a plurality of in the first pivot, every first buddha's warrior attendant line all is located a first wire recess on many first pivots simultaneously, a plurality of the equal top-down of first diamond wire is equidistant to be arranged, two of them first pivot is rotated the one end of being connected with first mounting panel up end and is all connected with the power take off end of tangent square unit, two relative settings curb plate up end all is fixed with moving magnet, terminal surface is fixed with two and moving magnet matched with fixed magnet under the second mounting panel.
As a further scheme of the present invention, the square cutting unit includes a second diamond wire, a second sleeve, a third sleeve, a second rotating shaft, a second wire groove, a threaded sleeve, a fourth through groove, and a fourth plug;
the first rotating shaft and the first mounting plate are rotatably connected, one end of the first rotating shaft, which is close to the adjacent lifting unit, is rotatably sleeved with a second sleeve, a fourth bolt is arranged at the rotating and sleeved position, two ends of the second sleeve, which are far away from the first rotating shaft, are rotatably arranged on the upper end face of the first mounting plate, one end of one second sleeve extends out of the first mounting plate and is connected with a sixth bevel gear, two parallel fourth through grooves are further formed in the first mounting plate, two third sleeves are slidably arranged in each fourth through groove, the upper end of each third sleeve is rotatably sleeved with one end of the second rotating shaft, the lower end of each third sleeve penetrates out of the corresponding fourth through groove and is provided with threads, the third through groove is in threaded connection with the threaded sleeves, and second wire grooves are formed in the upper end of the second rotating shaft and the two second sleeves and are respectively positioned on the same horizontal plane, and the second wires are simultaneously positioned in the second wire grooves.
After adopting the structure, compared with the prior art, the invention has the advantages that:
1. the cylindrical silicon crystal rods to be processed are transversely arranged in the inclined grooves, under the inclined action, the silicon crystal rods automatically roll to the upper end face of the conveying table in sequence and are positioned between the second vertical plate and the guide plate, under the action of the inclined plane arranged on the upper end face of the conveying table and the self gravity of the silicon crystal rods, the silicon crystal rods slide on the inclined plane of the conveying table along the length direction of the silicon crystal rods, silicon crystal stick one end contacts earlier through first telescopic link, first spring with first push pedal when sliding to the inclined plane low-end position of carrying the platform with the gliding speed buffering, and the silicon crystal stick is vertical direction by horizontal upset, then through the central point that first push pedal pushed away the silicon crystal stick to discharging channel and was located the transport platform under the effect that first spring reset put, mechanical degree of automation is high, be convenient for press from both sides and get, work efficiency is high, low in production cost.
2. The clamping unit can be pushed to horizontally move towards the direction close to the discharge channel under the action of the first pushing end of the pushing unit, the second pushing end of the pushing unit pushes the silicon crystal rods which are turned to be vertical in the turning unit to move towards the direction close to the clamping unit, and the clamping unit is high in efficiency, convenient to clamp and good in transmission effect.
3. The clamping unit is under the effect of the first promotion end of the pushing unit, the guide inclined plane at the bottom end of the first sliding rod is firstly contacted with the guide inclined plane of the second promotion block, the first sliding rod is pushed to flower, the upper clamping plate and the lower clamping plate are increased in distance, then the second promotion block is pushed to slide in the third sliding groove under the effect of the limiting plate at the lower end of the first sliding rod, the third sliding rod, the hinged plate, the L-shaped push plate and the push plate push the silicon crystal bar after turning to the upper clamping plate and the lower clamping plate in the discharging channel, the synchronism is good, the structure is novel, and the working efficiency is high.
Drawings
FIG. 1 is a schematic view of the present invention.
Fig. 2 is a schematic structural view of the gripping unit of the present invention.
Fig. 3 is an enlarged view of a in fig. 2.
Fig. 4 is a schematic structural diagram of the lifting unit of the present invention.
Fig. 5 is a schematic structural diagram of the first vertical plate and the second vertical plate of the present invention.
Fig. 6 is a schematic structural view of the conveying table and the first through groove of the present invention.
FIG. 7 is a schematic view of the structure of the tapping channel of the present invention.
Fig. 8 is a schematic structural view of a slicing unit and a squaring unit according to the present invention.
In the figure: 1-a silicon crystal bar; 3, upper splint; 4-lower splint; 5, mounting a column; 6-L-shaped vertical plates; 7-a first nitrogen spring; 8-a first chute; 9-a first slide bar; 10-a rotating plate; 11-opening holes; 12-a first bolt; 13-an inclined groove; 14-a first riser; 15-a second vertical plate; 16-a guide plate; 17-a transport table; 18-a positioning table; 19-a first push plate; 20-a first telescopic rod; 21-a first spring; 22-a third vertical plate; 23-a second runner bar; 24-a first mounting plate iron; 25-a first pusher block iron; 26-a second pusher block; 27-a second slide bar; 28-a second spring; 29-a third runner; 30-a third slide bar; a 31-L shaped pusher plate; 32-hinge plate; 33-a fixation rod; 34-a push rod; 35-a second gas spring; 36-a first through slot; 37-a second through slot; 38-side plate; 39-T shaped chute; 40-a lifting plate; 41-a positioning rod; 42-a third through slot; 43-a baffle; 44-a second telescoping rod; 45-a third spring; 46-a cylinder; 47-a limiting rod; 48-bearing plate; 49-a second mounting plate; 50-a third mounting plate; 51-a motor; 52-a first bevel gear; 53-second bevel gear; 54-a third bevel gear; 55-a fourth bevel gear; 56-fifth bevel gear; 57-sixth bevel gear; 58-a first transfer lever; 59-a second transmission rod; 60-a third drive link; 61-a first sleeve; 62-a second bolt; 63-a third bolt; 64-first diamond wire; 65-a first shaft; 66-first wire groove; 67-fixed magnet; 68-a moving magnet; 69-second diamond wire; 70-a second sleeve; 71-a third sleeve; 72-a second shaft; 73-a second wire groove; 74-a threaded sleeve; 75-a fourth through slot; 76-fourth latch.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
In addition, an element of the present invention may be said to be "fixed" or "disposed" to another element, either directly on the other element or with intervening elements present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
As shown in fig. 1 to 8, in an embodiment of the present invention, a silicon crystal bar processing apparatus for manufacturing a chip includes a clamping unit for clamping a silicon crystal bar 1, an overturning unit for overturning the silicon crystal bar 1, a lifting unit for driving the clamping unit to lift up and down, and a pushing unit;
the clamping unit is arranged on the lifting unit, when the lifting unit drives the clamping unit to be located at a low position, a first pushing end of the pushing unit can push the clamping unit to move towards the overturning unit along the horizontal direction, meanwhile, a second pushing end of the pushing unit pushes the silicon crystal bar 1 overturned in the overturning unit to move towards the clamping unit along the horizontal direction, and a discharge hole of the overturning unit corresponds to a feed hole of the clamping unit;
when the lifting unit drives the clamping unit to be located at a low position, the first pushing end of the pushing unit pushes the clamping unit to move towards the direction close to the discharge port of the overturning unit, and meanwhile, the second pushing end of the pushing unit pushes the silicon crystal rod 1 box overturned in the overturning unit to move towards the direction close to the feed port of the clamping unit.
In one embodiment of the invention, the clamping unit comprises an upper clamping plate 3, a lower clamping plate 4, a mounting column 5, an L-shaped vertical plate 6, a first nitrogen spring 7, a first chute 8, a first sliding rod 9, a rotating plate 10, an opening 11 and a first bolt 12;
the mounting column 5 is fixed at a first pushing end of the pushing unit, the upper end face of the mounting column is fixed with the bottom end of a long plate of the L-shaped vertical plate 6, the lower end face of the mounting column is fixed with one end of a first nitrogen spring 7, a first chute 8 is formed in the side wall of the long plate of the L-shaped vertical plate 6, the upper clamping plate 3 and the lower clamping plate 4 are arranged oppositely, one end of the upper clamping plate is arranged in the first chute 8 in a sliding manner, rotating plates 10 are respectively and rotatably arranged on opposite faces of one ends, far away from the mounting column 5, of the upper clamping plate 3 and the lower clamping plate 4, first bolts 12 are arranged on the upper clamping plate 3, a plurality of openings 11 clamped with the first bolts 12 are formed in the upper end face of the rotating plate 10 on the upper clamping plate 3, one end of each first sliding rod 9 is fixed on the lower end face of the upper clamping plate 3, the other end of each sliding rod sequentially penetrates through the mounting column 5 and the lower clamping plate 4 and is provided with a guide inclined plane, and the other end of the first nitrogen spring 7 is fixed on the upper end face of the upper clamping plate 3;
when the telescopic end of the lifting unit drives the mounting column 5 to be located at a low position, the first pushing end of the pushing unit pushes the mounting column 5 to move towards the direction close to the discharge port of the overturning unit along the horizontal direction, the lower end of the first sliding rod 9 is pushed, the lower clamping plate 4 is driven to slide in the first sliding groove 8, so that the first nitrogen spring 7 is compressed, the distance between the upper clamping plate 3 and the lower clamping plate 4 is increased, the silicon crystal bar 1 can be conveniently clamped, when the first bolt 12 is clamped with one of the holes 11, the rotating plate 10 cannot drive the clamped silicon crystal bar 1 to rotate, and when the first bolt 12 is loosened, the rotating plate 10 is rotated, so that the clamped silicon crystal bar 1 can be driven to rotate around the center of a circle.
In one embodiment of the present invention, the turning unit includes an inclined groove 13, a first vertical plate 14, a second vertical plate 15, a guide plate 16, a conveying table 17, a positioning table 18, a first push plate 19, a first telescopic rod 20, a first spring 21, a third vertical plate 22, a second sliding groove 23, and a first mounting plate 24;
the first vertical plate 14 and the second vertical plate 15 are opposite to each other and fixed on the upper end face of the first mounting plate 24, the inclined groove 13 is obliquely arranged between the first vertical plate 14 and the second vertical plate 15, the high end of the inclined groove 13 is that a feed inlet is arranged on the upper end face of the first vertical plate 14, the low end of the inclined groove 13 is that a discharge outlet is arranged on the upper end face of the second vertical plate 15, a plurality of rods 1 capable of rolling along the oblique direction are arranged in the inclined groove 13, a conveying table 17 fixed on the upper end face of the first mounting plate 24 is arranged on one side wall of the second vertical plate 15 far away from the first vertical plate 14, the upper end face of the conveying table 17 is an inclined plane, a guide plate 16 is fixed on the inclined plane, the guide plate 16 and the second vertical plate 15 are opposite to each other, the high end of the inclined plane of the conveying table 17 is positioned right below the discharge outlet of the inclined groove 13, the positioning table 18 is fixed on the upper end surface of the first mounting plate 24 and located right below the bottom end position of the inclined surface of the conveying table 17, the silicon crystal bar 1 is located between the guide plate 16 and the second vertical plate 15 and slides on the inclined surface of the conveying table 17 from top to bottom along the length direction of the silicon crystal bar, the upper end surface of the first mounting plate 24 is provided with a second chute 23 along the direction that the silicon crystal bar 1 slides on the inclined surface of the conveying table 17, the first push plate 19 is arranged in the second chute 23 in a sliding manner through a first sliding block fixed on the lower end surface of the first push plate, one side wall of the first push plate 19 is fixed with one end of the first telescopic rod 20, the other end of the first telescopic rod 20 is fixed on the side wall of the third vertical plate 22, the third vertical plate 22 is fixed on the upper end surface of the first mounting plate 24, the first spring 21 is sleeved on one end of the first telescopic rod 20 and fixed with the side wall of the first push plate 19, the other end is fixed with the side wall of the third vertical plate 22, the first push plate 19 is arranged opposite to the conveying platform 17, a discharge channel is formed between the first push plate 19 and the side wall of the conveying platform 17, the positioning platform 18 is positioned in the discharge channel, and three adjacent edges of the positioning platform are respectively attached to the second vertical plate 15, the conveying platform 17 and the side of the first push plate 19;
the silicon crystal rods 1 to be processed are sequentially and transversely arranged in the inclined groove 13, the inclined groove 13 is arranged in an inclined mode, the silicon crystal rods 1 can sequentially roll down on the conveying table 17 from high to low along the inclined direction of the inclined groove 13, the upper end face of the conveying table 17 is arranged to be an inclined plane, the silicon crystal rods 1 rolled down on the conveying table 17 slide on the conveying table 17 from high to low along the length direction through the self gravity action of the silicon crystal rods, the speed of the silicon crystal rods is increased in the sliding process, one end of each silicon crystal rod is firstly contacted with the side wall of the first push plate 19 when sliding to the position above the positioning table 18 through the first telescopic rod 20, the first spring 21 buffers the falling speed, the silicon crystal rods vertically fall on the upper end face of the positioning table 18, the first push plate 19 pushes the vertical silicon crystal rods 1 to be located in the discharging channel under the reset action of the first spring 21, and the second pushing end of the pushing unit is convenient to push the vertical silicon crystal rods 1 to enter the position between the upper clamping plate 3 and the lower clamping plate 4.
In one embodiment of the present invention, the pushing unit includes a first pushing block 25, a second pushing block 26, a second sliding rod 27, a second spring 28, a third sliding groove 29, a third sliding rod 30, an L-shaped pushing plate 31, a hinge plate 32, a fixing rod 33, a push rod 34, a second gas spring 35, a first through groove 36, a second through groove 37, a side plate 38, and a T-shaped sliding groove 39;
the two side plates 38 are oppositely arranged and fixed on the lifting unit, one end of the second sliding rod 27 is fixed with one side wall of the mounting column 5, the other end of the second sliding rod passes through one of the side plates 38 and contacts with the guide inclined plane arranged on the first pushing block 25 in a sliding manner, the second spring 28 is sleeved on one end of the second sliding rod 27 and is fixed with the side wall of the mounting column 5, the other end of the second sliding rod is fixed with the side wall of the side plate 38, the first mounting plate 24 is provided with a third sliding groove 29 along the discharging direction of the discharging channel, the third sliding groove 29 is positioned in the discharging channel, the second pushing block 26 is arranged in the third sliding groove 29 in a sliding manner, one side edge of the second pushing block 26 is provided with a guide inclined plane and contacts with the guide inclined plane at one end of the first sliding rod 9, the other side wall of the second pushing block 26 is fixed with one end of the third sliding rod 30, and the other end of the third sliding rod 30 sequentially passes through the positioning table 18 and the second vertical plate 15 to be hinged with a second sliding block, the second vertical plate 15 is provided with a first through groove 36, the long plate of the L-shaped push plate 31 is slidably arranged in the first through groove 36, the side wall of the long plate is attached to one side wall of the conveying table 17, the short plate of the L-shaped push plate 31 can slidably penetrate through the first through groove 36 and slide on the upper end surface of the positioning table 18, one side wall of the short plate is fixed with one end of a push rod 34, the other side wall of the short plate can be contacted with the silicon crystal bar 1, the other end of the push rod 34 is hinged with a third sliding block through the first through groove 36, one end of the fixed rod 33 is fixed on the side wall of the second vertical plate 15, the other end of the fixed rod is hinged with a hinged plate 32, one side wall of the hinged plate 32 is provided with a T-shaped sliding groove 39 along the length direction, the second sliding block and the third sliding block are both slidably arranged in the T-shaped sliding groove 39, the first mounting plate 24 is provided with a second through groove 37, and the second through groove 37 is positioned on the first vertical plate 14, between the second vertical plates 15, the bottom ends of the hinge plates 32 are slidably arranged in the second through grooves 37, the second nitrogen spring 35 is positioned in the second through grooves 37, one end of the second nitrogen spring is fixed on the side wall of the first vertical plate 14, and the other end of the second nitrogen spring is in sliding contact with one side wall of the hinge plates 32;
when the lifting unit drives the clamping unit to be located at the bottom end position, the first pushing block 25 moves up and down to drive the second sliding rod 27 to slide left and right on one side plate 38, so that the mounting column 5 is pushed to move towards the direction close to the discharging channel, when the mounting column 5 moves horizontally, the guide inclined surface at the lower end of the first sliding rod 9 is in contact with the guide inclined surface of the second pushing block 26, so that the first sliding rod 9 is pushed to slide upwards, the upper clamping plate 3 is driven to slide in the first sliding groove 8, so that the first nitrogen spring 7 is compressed, when the increasing distance between the upper clamping plate 3 and the lower clamping plate 4 is large enough, a limit block is fixed at the lower end of the first sliding rod 9, so that the first sliding rod 9 cannot ascend again, the guide inclined surface at the lower end of the first sliding rod 9 pushes the second pushing block 26 to slide in the third sliding groove 29, the second pushing block 26 slides in the third sliding groove 29, the third sliding rod 30 pushes the second nitrogen to rotate around a hinge point, so that the second nitrogen is compressed, the second nitrogen slides in the discharging rod 32 pushes the short plate 31 of the L-shaped pushing plate 31 to slide in the first sliding plate 31 in the discharging channel 36 and pushes the silicon spring plate 1 to move towards the discharging channel L-shaped pushing plate 1, and the discharging channel 18 to prevent the silicon crystal plate from falling down in the vertical conveying plate 1, and blocking plate 1, and the discharging channel.
In one embodiment of the present invention, the lifting unit includes a lifting plate 40, a positioning rod 41, a third through slot 42, a baffle 43, a second telescopic rod 44, a third spring 45, a cylinder 46, a limiting rod 47, and a receiving plate 48;
the two side plates 38 are oppositely arranged and fixed on the upper end surface of the lifting plate 40, the air cylinder 46 is fixed on the upper end surface of the bearing plate 48, the telescopic ends of the air cylinder 46 sequentially slide through the first mounting plate 24 and the lifting plate 40 and are fixed with the first pushing block 25, the lifting plate 40 is provided with a third through groove 42 in sliding fit with the first pushing block 25, the baffle plate 43 is fixed on the upper end surface of the first pushing block 25, one end of the second telescopic rod 44 is fixed on the lower end surface of the baffle plate 43, the other end of the second telescopic rod is fixed on the upper end surface of the lifting plate 40, the third spring 45 is sleeved on the second telescopic rod 44, the limiting rod 47 is fixed on the telescopic rod of the air cylinder 46 and is positioned on the lower end surface of the lifting plate 40, and the lower end surface of the lifting plate 40 is oppositely provided with two positioning rods 41;
when the clamping unit needs to clamp the silicon crystal bar 1 to be processed, the telescopic end of the cylinder 46 drives the lifting plate 40 to move downwards through the second telescopic rod 44, the third spring 45 and the limiting rod 47 until the lower end of the positioning rod 41 contacts with the upper end face of the first mounting plate 24, the lifting plate 40 cannot move downwards continuously under the action of the positioning rod 41, the telescopic end of the cylinder 46 drives the baffle 43 to move downwards continuously to compress the third spring 45, so that the first pushing block 25 is driven to slide in the third through groove 42, and the second sliding rod 27 is pushed to slide on one side plate 38.
In one embodiment of the invention, the device further comprises a slicing unit for slicing in the diameter direction of the silicon crystal bar, a cutting unit for trimming in the length direction of the silicon crystal bar, a second mounting plate 49, a third mounting plate 50, a motor 51, a first bevel gear 52, a second bevel gear 53, a third bevel gear 54, a fourth bevel gear 55, a fifth bevel gear 56, a sixth bevel gear 57, a first transmission rod 58, a second transmission rod 59, a third transmission rod 60, a first sleeve 61, a second plug 62 and a third plug 63;
the second mounting plate 49 is mounted on the upper end face of the third mounting plate 50 through a mounting bracket, the first mounting plate 24 is arranged between the second mounting plate 49 and the third mounting plate 50, the motor 51 is fixed on the upper end face of the third mounting plate 50, an output shaft of the motor 51 is rotatably sleeved with one end of the first transmission rod 58, a second bolt 62 is arranged at the sleeved position, the first bevel gear 52 is fixed on the output shaft of the motor 51 and is meshed with a second bevel gear 53 fixed at one end of the second transmission rod 59, a third bevel gear 54 is fixed at the other end of the second transmission rod 59, one end of the first sleeve 61 is rotatably arranged on the third mounting plate 50, the other end of the first sleeve 61 is rotatably sleeved with one end of the third transmission rod 60, a third bolt 63 is arranged at the sleeved position, the other end of the third transmission rod 60 is fixed with the lower end face of the bearing plate 48, the fourth bevel gear 55 is fixed on the first sleeve 61 and is meshed with the third bevel gear 54, the other end of the first transmission rod 58 is fixed with a fifth bevel gear 56, and the sixth bevel gear 57 is connected with the power input end of the squaring unit and is meshed with the fifth bevel gear 56;
the output shaft of the motor 51 is driven by the first bevel gear 52 and the second bevel gear 53 to drive the second transmission rod 59, so as to drive the third bevel gear 54 and the fourth bevel gear 55 to drive the first sleeve 61 to rotate, and then drive the bearing plate 48 to rotate by the third transmission rod 60, and finally drive the air cylinder 46 to rotate, and the second bolt 62 and the third bolt 63 are both selectively operated.
In one embodiment of the present invention, the slicing unit includes a first diamond wire 64, a first rotating shaft 65, a first wire groove 66, a fixed magnet 67, and a moving magnet 68;
more than three first rotating shafts 65 are rotatably arranged on the lower end face of the second mounting plate 49 at one end, and are rotatably arranged on the upper end face of the first mounting plate 24 at the other end, a plurality of first wire grooves 66 are uniformly arranged on the more than three first rotating shafts 65 at equal intervals, each first diamond wire 64 is simultaneously positioned in one first wire groove 66 on the plurality of first rotating shafts 65, and the plurality of first diamond wires 64 are uniformly arranged from top to bottom at equal intervals, wherein the ends of the two first rotating shafts 65, which are rotatably connected with the upper end face of the first mounting plate 24, are connected with the power output end of the squaring unit, the upper end faces of the two oppositely arranged side plates 38 are respectively fixed with a moving magnet 68, and the lower end face of the second mounting plate 49 is fixed with two fixed magnets 67 matched with the moving magnet 68;
the first rotating shaft 65 rotates to drive the first diamond wire 64 to rotate, after the clamping unit clamps the silicon crystal bar 1, the output shaft of the motor 51 drives the bearing plate 48 to rotate to drive the cylinder 46 to rotate so as to drive the clamping unit to rotate, meanwhile, the telescopic end of the cylinder 46 drives the clamping unit to ascend to the movable magnet 68 and the fixed magnet 67 to generate attraction, the lifting plate 40 is fixed on the lower end face of the second mounting plate 49, at the moment, the telescopic end of the cylinder 46 retracts to drive the baffle 43 to move downwards continuously, the lifting plate 40 does not move, the first pushing block 25 is driven to push the second sliding rod 27 to slide on one side plate 38, and the silicon crystal bar 1 is made to move in the direction perpendicular to the first diamond wire 64 under the action of the clamping unit to perform slicing processing.
In one embodiment of the present invention, the square cutting unit includes a second diamond wire 69, a second sleeve 70, a third sleeve 71, a second rotating shaft 72, a second wire groove 73, a threaded sleeve 74, a fourth through groove 75, and a fourth plug 76;
two ends, which are close to the adjacent two first rotating shafts 65 of the lifting unit, of the first mounting plate 24 are rotatably sleeved with second sleeves 70, the rotating sleeved positions are provided with fourth bolts 76, one ends, which are far away from the first rotating shafts 65, of the two second sleeves 70 are rotatably arranged on the upper end surface of the first mounting plate 24, one end of one second sleeve 70 extends out of the first mounting plate 24 and is connected with a sixth bevel gear 57, the first mounting plate 24 is further provided with two parallel fourth through grooves 75, two third sleeves 71 are slidably arranged in each fourth through groove 75, the upper ends of the third sleeves 71 are rotatably sleeved with one end of a second rotating shaft 72, the lower ends of the third sleeves pass through the fourth through grooves 75 and are provided with threads and are connected with the threaded sleeves 74 in a threaded manner, the upper ends of the four second rotating shafts 72 and the two second sleeves 70 are provided with second wire grooves 73, a plurality of the second wire grooves 73 are all located on the same horizontal plane, and the second diamond wires 69 are simultaneously located in the second wire grooves 73;
after the silicon crystal bar 1 is sliced, because one side of the silicon crystal bar 1 close to the mounting column 5 is not completely cut off, the lifting unit drives the silicon crystal bar 1 after slicing to move downwards above the second diamond wire 69, the third sleeve 71 in the fourth through groove 75 can adjust the tightness of the second diamond wire 69 and the distance for cutting the edge of the silicon crystal bar 1, then the lifting unit drives the silicon crystal bar 1 after slicing to move upwards and downwards on the second diamond wire 69 and rotates the angle of the rotating plate 10 to cut the edge, and the connected wafers are cut into scattered square wafers.
The foregoing is merely illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the claims. The present invention is not limited to the above embodiments, and the specific structure thereof is allowed to vary. But all changes which come within the scope of the invention are intended to be embraced therein.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Claims (5)
1. A silicon crystal bar processing device for chip manufacturing is characterized by comprising a clamping unit for clamping a silicon crystal bar (1), an overturning unit for overturning the silicon crystal bar (1), a lifting unit for driving the clamping unit to lift up and down, and a pushing unit;
the clamping unit is arranged on the lifting unit, when the lifting unit drives the clamping unit to be positioned at a low position, a first pushing end of the pushing unit can push the clamping unit to move towards the overturning unit along the horizontal direction, meanwhile, a second pushing end of the pushing unit pushes a silicon crystal rod (1) overturned in the overturning unit to move towards the clamping unit along the horizontal direction, and a discharge hole of the overturning unit corresponds to a feed hole of the clamping unit;
the clamping unit comprises an upper clamping plate (3), a lower clamping plate (4), a mounting column (5), an L-shaped vertical plate (6), a first nitrogen spring (7), a first sliding groove (8), a first sliding rod (9), a rotating plate (10), an opening (11) and a first bolt (12);
the mounting column (5) is fixed at a first pushing end of the pushing unit, the upper end face of the mounting column is fixed with the bottom end of a long plate of the L-shaped vertical plate (6), a lower clamping plate (4) is fixed at the lower end face of the long plate, the lower end face of a short plate of the L-shaped vertical plate (6) is fixed with one end of a first nitrogen spring (7), a first sliding groove (8) is formed in the side wall of the long plate of the L-shaped vertical plate (6), the upper clamping plate (3) is arranged opposite to the lower clamping plate (4), one end of the upper clamping plate is arranged in the first sliding groove (8) in a sliding mode, a rotating plate (10) is rotatably arranged on the opposite surfaces of the upper clamping plate (3) and the lower clamping plate (4) far away from one end of the mounting column (5), a first bolt (12) is arranged on the upper clamping plate (3), a plurality of open holes (11) clamped with the first bolt (12) are formed in the upper end face of the rotating plate (10) on the upper clamping plate (3), one end face of the first sliding rod (9) is fixed on the lower clamping plate (3), the other end face of the mounting column (5) sequentially penetrates through the mounting column (4) and the lower clamping plate (4) in a guide way, and the other end face of the nitrogen spring (7) is fixed on the other end face of the upper clamping plate (7);
the overturning unit comprises an inclined groove (13), a first vertical plate (14), a second vertical plate (15), a guide plate (16), a conveying table (17), a positioning table (18), a first push plate (19), a first telescopic rod (20), a first spring (21), a third vertical plate (22), a second sliding groove (23) and a first mounting plate (24);
the first vertical plate (14) and the second vertical plate (15) are opposite to each other and are fixed on the upper end face of the first mounting plate (24), the inclined groove (13) is obliquely arranged between the first vertical plate (14) and the second vertical plate (15), the high end position of the inclined groove (13) is a feeding hole and is arranged on the upper end face of the first vertical plate (14), the low end position of the inclined groove is a discharging hole and is arranged on the upper end face of the second vertical plate (15), a plurality of silicon crystal bars (1) capable of rolling along the oblique direction are arranged in the inclined groove (13), and a conveying table (17) fixed on the upper end face of the first mounting plate (24) is arranged on one side wall, far away from the first vertical plate (14), of the second vertical plate (15), the upper end surface of the conveying table (17) is an inclined surface, a guide plate (16) is fixed on the inclined surface, the guide plate (16) and a second vertical plate (15) are arranged oppositely, the high end position of the inclined surface of the conveying table (17) is positioned right below a discharge port of the inclined groove (13), the positioning table (18) is fixed on the upper end surface of a first mounting plate (24) and positioned right below the bottom end position of the inclined surface of the conveying table (17), a silicon crystal rod (1) is positioned between the guide plate (16) and the second vertical plate (15) and slides on the inclined surface of the conveying table (17) from top to bottom along the length direction of the silicon crystal rod, the upper end surface of the first mounting plate (24) slides on the inclined surface of the conveying table (17) along the direction of the silicon crystal rod (1) A second sliding groove (23) is formed, the first push plate (19) is arranged in the second sliding groove (23) in a sliding mode through a first sliding block fixed on the lower end face of the first push plate (19), one side wall of the first push plate (19) is fixed with one end of a first telescopic rod (20), the other end of the first telescopic rod (20) is fixed on the side wall of a third vertical plate (22), the third vertical plate (22) is fixed on the upper end face of a first mounting plate (24), a first spring (21) is sleeved on one end of the first telescopic rod (20) and fixed with the side wall of the first push plate (19), the other end of the first telescopic rod is fixed with the side wall of the third vertical plate (22), the first push plate (19) and the conveying table (17) are arranged oppositely, a discharging channel is formed between the first push plate (19) and the side wall of the conveying table (17), the positioning table (18) is located in the discharging channel, and three adjacent edges of the positioning table (18) are attached to the side walls of the second vertical plate (15), the conveying table (17) and the first push plate (19);
the pushing unit comprises a first pushing block (25), a second pushing block (26), a second sliding rod (27), a second spring (28), a third sliding groove (29), a third sliding rod (30), an L-shaped pushing plate (31), a hinge plate (32), a fixing rod (33), a pushing rod (34), a second spring (35), a first through groove (36), a second through groove (37), a side plate (38) and a T-shaped sliding groove (39);
the two side plates (38) are oppositely arranged and are fixed on the lifting unit, one end of a second sliding rod (27) is fixed with one side wall of the mounting column (5), the other end of the second sliding rod slides through one side plate (38) to be in contact with a guide inclined plane arranged on the first pushing block (25), a second spring (28) is sleeved on the second sliding rod (27), one end of the second sliding rod is fixed with the side wall of the mounting column (5), the other end of the second sliding rod is fixed with the side wall of the side plate (38), a third sliding chute (29) is arranged on the first mounting plate (24) along the discharging direction of the discharging channel, the third sliding chute (29) is positioned in the discharging channel, a second pushing block (26) is arranged in the third sliding chute (29) in a sliding manner, one side edge of the second pushing block is provided with a guide inclined plane and is in contact with the guide inclined plane at one end of the first sliding rod (9), the other side wall of the second pushing block (26) is fixed with one end of a third sliding rod (30), the other end of the third sliding rod (30) slides through a positioning platform (18) and a second vertical plate (15), a second pushing plate (15) is provided with a L-shaped through groove (31), a first pushing plate (17) which can be positioned in a sliding way, and a first pushing plate (31) which passes through a short through groove (36) and is arranged in a sliding way which is arranged on one side wall of the first pushing plate (17), one side wall of the hinged plate is fixed with one end of a push rod (34), the other side wall of the hinged plate can be in contact with a silicon crystal bar (1), the other end of the push rod (34) penetrates through a first through groove (36) to be hinged with a third sliding block, one end of a fixed rod (33) is fixed on the side wall of a second vertical plate (15), the other end of the fixed rod is hinged with a hinged plate (32), a T-shaped sliding groove (39) is formed in one side wall of the hinged plate (32) along the length direction of the hinged plate, the second sliding block and the third sliding block are arranged in the T-shaped sliding groove (39) in a sliding mode, a second through groove (37) is formed in the first mounting plate (24), the second through groove (37) is located between the first vertical plate (14) and the second vertical plate (15), the bottom end of the hinged plate (32) is arranged in the second through groove (37) in a sliding mode, the second nitrogen spring (35) is located in the second through groove (37), one end of the hinged plate is fixed on the side wall of the first vertical plate (14), and the other end of the hinged plate (32) is in sliding contact with one side wall of the hinged plate.
2. The silicon crystal bar processing device for chip manufacturing according to claim 1, wherein the lifting unit comprises a lifting plate (40), a positioning rod (41), a third through groove (42), a baffle plate (43), a second telescopic rod (44), a third spring (45), a cylinder (46), a limiting rod (47) and a bearing plate (48);
two relative settings curb plate (38) are all fixed at lifter plate (40) up end, cylinder (46) are fixed and are being accepted board (48) up end, and its flexible end slides in proper order and passes first mounting panel (24), lifter plate (40) and fixed with first promotion piece (25), set up on lifter plate (40) and lead to groove (42) with first promotion piece (25) sliding fit's third, baffle (43) are fixed at the up end of first promotion piece (25), and second telescopic link (44) one end is fixed and is fixed at the baffle (43) lower extreme face other end and fix lifter plate (40) up end, third spring (45) cover is established on second telescopic link (44), terminal surface under stopper rod (47) are fixed on the telescopic link of cylinder (46) and are located lifter plate (40), the lower extreme face of lifter plate (40) is provided with two locating levers (41) relatively.
3. The silicon crystal bar processing device for chip manufacture according to claim 2, wherein the device further comprises a slicing unit for slicing along the diameter direction of the silicon crystal bar, a cutting unit for trimming along the length direction of the silicon crystal bar, a second mounting plate (49), a third mounting plate (50), a motor (51), a first bevel gear (52), a second bevel gear (53), a third bevel gear (54), a fourth bevel gear (55), a fifth bevel gear (56), a sixth bevel gear (57), a first transmission rod (58), a second transmission rod (59), a third transmission rod (60), a first sleeve (61), a second bolt (62) and a third bolt (63);
the power transmission mechanism is characterized in that the second mounting plate (49) is mounted on the upper end face of the third mounting plate (50) through a mounting frame, the first mounting plate (24) is arranged between the second mounting plate (49) and the third mounting plate (50), the motor (51) is fixed on the upper end face of the third mounting plate (50), the output shaft of the motor is rotatably sleeved with one end of the first transmission rod (58), a second bolt (62) is arranged at the sleeved position, the first bevel gear (52) is fixed on the output shaft of the motor (51) and is meshed with a second bevel gear (53) fixed at one end of the second transmission rod (59), the other end of the second transmission rod (59) is fixed with the third bevel gear (54), one end of the first sleeve (61) is rotatably arranged on the third mounting plate (50), the other end of the first sleeve (61) is rotatably sleeved with one end of the third transmission rod (60), a third bolt (63) is arranged at the sleeved position, the other end of the third transmission rod (60) is fixed with the lower end face of the bearing plate (48), the fourth bevel gear (55) is fixed on the first sleeve (61) and is meshed with the third bevel gear (54), and the other end of the fifth bevel gear (56) is connected with a power transmission rod (57) and is connected with a power transmission rod (56).
4. The silicon crystal bar processing device for manufacturing the chip according to claim 3, wherein the slicing unit comprises a first diamond wire (64), a first rotating shaft (65), a first wire groove (66), a fixed magnet (67) and a movable magnet (68);
more than three first pivot (65) one end all rotates and sets up terminal surface under second mounting panel (49), and the other end all rotates and sets up at first mounting panel (24) up end, three above equal interval be provided with a plurality of first wire recess (66) on first pivot (65), every first diamond line (64) all lie in a first wire recess (66) on many first pivot (65) simultaneously, a plurality of equal interval arrangement of equal top-down of first diamond line (64), two of them first pivot (65) and first mounting panel (24) up end rotate the one end of being connected all be connected with the power take off end of tangent square unit, two relative settings curb plate (38) up end all is fixed with moving magnet (68), terminal surface is fixed with two and moving magnet (68) matched with decide magnet (67) under second mounting panel (49).
5. The silicon crystal bar processing device for chip manufacturing according to claim 4, wherein the square cutting unit comprises a second diamond wire (69), a second sleeve (70), a third sleeve (71), a second rotating shaft (72), a second wire groove (73), a threaded sleeve (74), a fourth through groove (75) and a fourth plug pin (76);
two ends, which are close to the adjacent lifting unit, of the first rotating shafts (65) and are rotatably connected with the first mounting plate (24) are rotatably sleeved with second sleeves (70), a fourth bolt (76) is arranged at a rotating sleeved position, one end, which is far away from the first rotating shaft (65), of each second sleeve (70) is rotatably arranged on the upper end face of the first mounting plate (24), one end of each second sleeve (70) extends out of the first mounting plate (24) and is connected with a sixth bevel gear (57), two parallel fourth through grooves (75) are further formed in the first mounting plate (24), two third sleeves (71) are slidably arranged in each fourth through groove (75), the upper ends of the third sleeves (71) are rotatably sleeved with one end of the second rotating shaft (72), the lower ends of the third sleeves penetrate through the second through grooves (75) and are provided with threads and are in threaded connection with the threaded sleeves (74), second wire grooves (73) are arranged in the upper ends of the four second rotating shafts (72) and the two second sleeves (70), a plurality of second wires (73) are positioned in the same horizontal plane, and are positioned in the second wire grooves (73) at the same horizontal plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110539789.8A CN113263646B (en) | 2021-05-18 | 2021-05-18 | Silicon crystal bar processing device for chip manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110539789.8A CN113263646B (en) | 2021-05-18 | 2021-05-18 | Silicon crystal bar processing device for chip manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113263646A CN113263646A (en) | 2021-08-17 |
| CN113263646B true CN113263646B (en) | 2022-11-29 |
Family
ID=77231427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110539789.8A Active CN113263646B (en) | 2021-05-18 | 2021-05-18 | Silicon crystal bar processing device for chip manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113263646B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116766419B (en) * | 2023-06-07 | 2024-04-19 | 徐州顺泰新能源发电有限公司 | Automatic cutting device for solar cell |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011002242A2 (en) * | 2009-07-03 | 2011-01-06 | 다이섹(주) | Square cutting device for solar cell ingots |
| CN208361271U (en) * | 2018-05-18 | 2019-01-11 | 佛山市源田床具机械有限公司 | Mattress turnover device |
| CN208683769U (en) * | 2018-08-09 | 2019-04-02 | 江苏华能墙材有限公司 | A kind of turnover mechanism of adobe transport |
| CN110303608A (en) * | 2019-07-10 | 2019-10-08 | 陈惠丽 | A kind of semiconductor silicon rod intercept unit based on wire cutting |
| CN210524520U (en) * | 2019-08-21 | 2020-05-15 | 廖明光 | Clamping device for engineering machinery |
| CN111168867A (en) * | 2020-02-26 | 2020-05-19 | 青岛高测科技股份有限公司 | Novel monocrystalline silicon double-rod double-station squaring machine |
| CN111376393A (en) * | 2020-04-14 | 2020-07-07 | 福州天瑞线锯科技有限公司 | Single silicon crystal bar cutting and grinding all-in-one machine |
| CN212578936U (en) * | 2020-06-15 | 2021-02-23 | 天通日进精密技术有限公司 | Flaw-piece discharging device applied to silicon rod squaring equipment and silicon rod squaring equipment |
| CN112660689A (en) * | 2020-11-26 | 2021-04-16 | 问晓勤 | Automatic upward-turning-prevention device for bottle cap |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140137794A1 (en) * | 2012-11-19 | 2014-05-22 | Memc Singapore, Pte. Ltd (Uen200614797D) | Method of Preparing A Directional Solidification System Furnace |
-
2021
- 2021-05-18 CN CN202110539789.8A patent/CN113263646B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011002242A2 (en) * | 2009-07-03 | 2011-01-06 | 다이섹(주) | Square cutting device for solar cell ingots |
| CN208361271U (en) * | 2018-05-18 | 2019-01-11 | 佛山市源田床具机械有限公司 | Mattress turnover device |
| CN208683769U (en) * | 2018-08-09 | 2019-04-02 | 江苏华能墙材有限公司 | A kind of turnover mechanism of adobe transport |
| CN110303608A (en) * | 2019-07-10 | 2019-10-08 | 陈惠丽 | A kind of semiconductor silicon rod intercept unit based on wire cutting |
| CN210524520U (en) * | 2019-08-21 | 2020-05-15 | 廖明光 | Clamping device for engineering machinery |
| CN111168867A (en) * | 2020-02-26 | 2020-05-19 | 青岛高测科技股份有限公司 | Novel monocrystalline silicon double-rod double-station squaring machine |
| CN111376393A (en) * | 2020-04-14 | 2020-07-07 | 福州天瑞线锯科技有限公司 | Single silicon crystal bar cutting and grinding all-in-one machine |
| CN212578936U (en) * | 2020-06-15 | 2021-02-23 | 天通日进精密技术有限公司 | Flaw-piece discharging device applied to silicon rod squaring equipment and silicon rod squaring equipment |
| CN112660689A (en) * | 2020-11-26 | 2021-04-16 | 问晓勤 | Automatic upward-turning-prevention device for bottle cap |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113263646A (en) | 2021-08-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113263646B (en) | Silicon crystal bar processing device for chip manufacturing | |
| US6155247A (en) | Method for sawing wafers employing multiple indexing techniques for multiple die dimensions | |
| EP1042201B1 (en) | Method and apparatus for inverting a tray | |
| KR20100071550A (en) | Transfer apparatus for wafer cassette | |
| KR850700238A (en) | Operation and Handling of Integrated Circuit Dies | |
| CN111687642A (en) | Equipment for drilling and multi-groove machining of synchronous pulleys in batches | |
| CN110666618A (en) | Positioning, cutting and edge grinding equipment for round glass | |
| CN111730097A (en) | Satellite antenna panel perforating device | |
| CN210160728U (en) | Full-automatic groove milling equipment | |
| CN216026985U (en) | Collecting device of candy leftovers | |
| CN217280722U (en) | Turntable device for various wafers | |
| CN216657044U (en) | Automatic SPE plate assembling device | |
| CN212704393U (en) | Multi-station machining device for precise parts | |
| CN214055946U (en) | Polycrystalline silicon cutting device with clamping function | |
| CN210359345U (en) | Drilling equipment is used in nonstandard automated processing | |
| KR20020021556A (en) | Apparatus and method for singularizing chip size package | |
| CN2051137U (en) | Automatic arrangement equipment for flat shape workpiece | |
| JP2719218B2 (en) | Workpiece horizontal cutting method | |
| TWI687289B (en) | Electronic component crimping device and test classification equipment containing the same | |
| CN113178712A (en) | Wiring terminal wire clamp, processing machine and processing method | |
| JP2742861B2 (en) | Pier cutting device | |
| CN114217205A (en) | Full-automatic test equipment for packaged semiconductor chip | |
| CN220092933U (en) | Turning mechanism of riveting machine | |
| KR100916538B1 (en) | Wafer align and ID reading apparatus for use of multi sorter | |
| CN219665201U (en) | Positioning and clamping device for punching aluminum wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |