CN113233780A - Liquid crystal glass substrate thinning and etching equipment - Google Patents
Liquid crystal glass substrate thinning and etching equipment Download PDFInfo
- Publication number
- CN113233780A CN113233780A CN202110371271.8A CN202110371271A CN113233780A CN 113233780 A CN113233780 A CN 113233780A CN 202110371271 A CN202110371271 A CN 202110371271A CN 113233780 A CN113233780 A CN 113233780A
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- liquid crystal
- etching
- plate
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 130
- 239000000758 substrate Substances 0.000 title claims abstract description 117
- 238000005530 etching Methods 0.000 title claims abstract description 53
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 45
- 238000005507 spraying Methods 0.000 claims abstract description 21
- 239000007921 spray Substances 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 9
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 16
- 238000006243 chemical reaction Methods 0.000 abstract description 9
- 239000002244 precipitate Substances 0.000 abstract description 5
- 238000005406 washing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 4
- 239000013049 sediment Substances 0.000 description 3
- 238000002791 soaking Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- ZERVJPYNQLONEK-UHFFFAOYSA-N canthin-6-one Chemical compound C12=CC=CC=C2N2C(=O)C=CC3=NC=CC1=C32 ZERVJPYNQLONEK-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
Landscapes
- Chemical & Material Sciences (AREA)
- Liquid Crystal (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
Abstract
The invention discloses a liquid crystal glass substrate thinning and etching device which comprises a mounting device for mounting a glass substrate and a spraying device for spraying etching liquid, wherein the mounting device comprises a pivot end and a free end which are oppositely arranged, the free end rotates by taking the pivot end as an axis, the inclination angle of the glass substrate arranged on the mounting device is changed, the spraying device is arranged at the upper part of the upper end of an inclined glass substrate, and the etching liquid is uniformly sprayed onto the glass substrate from the upper end of the inclined glass substrate; according to the liquid crystal glass substrate thinning and etching equipment, the liquid crystal glass substrate is inclined, so that one side of the liquid crystal glass substrate can be thinned, etching liquid flows on the surface of the liquid crystal glass substrate, white powdery precipitates generated by washing reaction and the like are washed, and the surface quality of the thinned liquid crystal glass substrate is improved.
Description
Technical Field
The invention belongs to the field of liquid crystal glass substrate production equipment, and particularly relates to liquid crystal glass substrate thinning and etching equipment.
Background
With the development of portable electronic devices, electronic devices such as mobile phones, flat panels, televisions, and computers are becoming increasingly finer and thinner, and therefore thinner and ultrathin glass substrates are required as accessories. The ultra-thin glass substrate is obtained mainly in two modes, one mode is to directly produce ultra-thin glass, the ultra-thin glass obtained in the mode has high requirements on production and processing technology and equipment, the production cost is high, most manufacturers cannot produce the ultra-thin glass, a carrier is required to be used for protecting the ultra-thin glass during transportation, in the production of the glass substrate, the glass and the carrier are required to be simultaneously processed into a liquid crystal glass substrate, and finally the carrier on the glass is removed, so that the processing procedures are multiple, and the production efficiency is low. The other method is to produce the glass with the conventional thickness, firstly form the liquid crystal glass substrate and finally thin the glass on the two sides of the liquid crystal glass substrate, and the method has the advantages of low requirements on the production and processing of the glass and low production and transportation costs of the glass, and is the most common method in the prior art.
At present, mainstream liquid crystal glass substrate thinning processes are divided into two major types, one type is a physical thinning method, the purpose of glass thinning is mainly achieved by utilizing the friction effect between a display screen glass substrate and grinding powder, and the method is not good in control precision, long in time consumption and low in yield. The second method is a chemical thinning method, which utilizes the mutual reaction between the display screen glass substrate and the corrosive liquid to achieve the effect of chemical thinning, and the method has the advantages of short thinning time, small equipment investment, high product yield, simple components of the thinning liquid and low cost, and gradually becomes the mainstream technical method for thinning the display screen glass substrate.
In the prior art, the glass thinning technology mostly adopts a plurality of vertical soaking type thinning, namely, a glass substrate to be thinned is put into a reaction tank of thinning equipment, and the glass substrate reacts with an etching solution for a period of time, so that the thinning can be realized. The vertical soaking type thinning method can simultaneously treat a plurality of pieces of glass, and is high in efficiency. However, in the multi-piece vertical soaking type thinning method, white powdery precipitates generated by reaction are easy to deposit and adhere to the lower end of the glass substrate, and further the lower end of the glass is uneven and unsmooth, so that the product quality is influenced.
Disclosure of Invention
The invention aims to provide a liquid crystal glass substrate thinning and etching device, which can thin one surface of a liquid crystal glass substrate on one hand and enable etching liquid to flow on the surface of the liquid crystal glass substrate on the other hand to wash white powdery precipitates and the like generated by reaction by inclining the liquid crystal glass substrate, so that the surface quality of the thinned liquid crystal glass substrate is improved.
The invention provides liquid crystal glass substrate thinning and etching equipment, which comprises a mounting device for mounting a glass substrate and a spraying device for spraying etching liquid, wherein the mounting device comprises a pivot end and a free end which are oppositely arranged, the free end rotates by taking the pivot end as an axis to change the inclination angle of the glass substrate arranged on the mounting device, the spraying device is arranged at the upper part of the upper end of the inclined glass substrate, and the etching liquid is uniformly sprayed on the glass substrate from the upper end of the inclined glass substrate.
Preferably, the center end comprises a center pivot and at least two first support plates sleeved on the center pivot, the cross section of each first support plate is L-shaped, the L-shaped inner surface of each first support plate is a lower support surface, and the center pivot is penetrated through and fixed by the back surface of each first support plate.
Preferably, the middle pivot shaft comprises a first square shaft and first cylindrical shafts which are integrally and coaxially connected to two ends of the first square shaft, the diameter of each first cylindrical shaft is smaller than the minimum width of the square shaft, a first square connecting hole which is matched with the square shaft is formed in the back face of the first supporting plate, the middle pivot shaft penetrates through the first square connecting hole, and two ends of the middle pivot shaft are rotatably connected with the rack.
Preferably, the free end comprises a second support plate arranged at the bottom of the glass substrate, two ends of the second support plate respectively extend from two sides of the glass substrate, two ends of the second support plate are respectively provided with a connecting end, two connecting ends respectively penetrate through a connecting shaft, the connecting shaft comprises a second square shaft fixedly connected with the connecting ends and a second cylindrical shaft fixedly connected with the outer end of the second square shaft, two lifting connecting plates are respectively sleeved on the second cylindrical shafts, a connecting groove is formed in each lifting connecting plate, and each lifting connecting plate is connected with the rack through the connecting groove.
Preferably, the connecting end is the U type of invering, connects end curb plate and second backup pad tip rigid coupling, the second square shaft passes another curb plate of connecting the end, second backup pad length is greater than one time glass substrate width, the ascending surface of second backup pad is last holding surface, go up holding surface and bottom suspension face on the coplanar, be provided with in the frame and pass two the connecting screw of the spread groove on the lift connecting plate, the cover is equipped with the fastener of locking lift connecting plate in the frame on the connecting screw.
Preferably, two opposite side surfaces of the second support plate and the first support plate are respectively provided with a coaxial limiting hole, and a limiting rod is connected between the two opposite limiting holes.
Preferably, spray set includes shower and shower installation component that length is greater than glass substrate width, the equipartition is provided with decurrent hole that sprays on the shower, shower installation component includes two horizontal poles of being connected with the frame, shower both ends overlap joint is two on the horizontal pole.
Preferably, at least two glass substrates with the same length are arranged on the mounting device.
The liquid crystal glass substrate thinning and etching equipment has the beneficial effects that:
1. through setting up the slope of liquid crystal glazing base plate, can realize carrying out the attenuate to liquid crystal glazing base plate one side on the one hand, on the other hand makes etching solution flow on liquid crystal glazing base plate surface, washes white powdery sediment etc. that the reaction produced, improves liquid crystal glazing base plate surface quality after the attenuate.
2. The inclination angle of the liquid crystal glass substrate is adjustable, and different inclination angles are adopted in the unused etching reaction time to change the flowing speed of the etching liquid on the liquid crystal glass substrate, so that the sediment in the reaction is washed, and the surface quality of the etched and thinned liquid crystal glass substrate is improved.
Drawings
FIG. 1 is a schematic structural diagram of an etching apparatus for thinning a liquid crystal glass substrate according to a technical solution of the present invention,
FIG. 2 is a perspective view of an etching apparatus for thinning a liquid crystal glass substrate according to an embodiment of the present invention,
FIG. 3 is a schematic view of a back structure of an etching apparatus for thinning a liquid crystal glass substrate according to a preferred embodiment of the present invention,
FIG. 4 is a side view of an etching apparatus for thinning a liquid crystal glass substrate according to an embodiment of the present invention,
figure 5 is a schematic view of the structure of the center end,
figure 6 is a schematic view of the free end structure,
FIG. 7 is a schematic view showing the mounting of a plurality of liquid crystal glass substrates on a mounting apparatus.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be further described with reference to the drawings attached to the specification.
As shown in fig. 1 and fig. 2, the liquid crystal glass substrate thinning and etching apparatus according to the technical solution of the present invention includes a frame 4, a liquid collecting tank 5 disposed at the bottom of the frame 4, a mounting device for mounting a glass substrate 100, and a spraying device 3 for spraying an etching solution. The mounting device comprises a central end 1 and a free end 2 which are oppositely arranged, wherein the free end 2 rotates by taking the central end 1 as an axis, and the inclination angle of the glass substrate 100 arranged on the mounting device is changed. The shower unit 3 is disposed at an upper position of an upper end of the inclined glass substrate 100, and uniformly sprays the etching solution onto the glass substrate 100 from the upper end of the inclined glass substrate 100.
Based on the technical scheme, the glass substrate 100 is installed on the installation device, the free end 2 of the installation device rotates around the pivot end 1 to drive the glass substrate 100 on the installation device to rotate, so that the glass substrate is in an inclined state to be etched and thinned, only one side of the glass substrate can be thinned and etched, the influence on the other side of the glass substrate is effectively avoided, the basic quality of glass is ensured, meanwhile, the etching liquid flows downwards from the end part of the glass substrate and etches the glass substrate in the flowing process, reactant precipitates and the like generated by etching on the glass substrate are washed in the etching process, the etching uniformity of all positions on the glass substrate is ensured, and the etching surface quality of the glass substrate is improved. The glass substrate can be driven to rotate by the mounting device, the inclination angle of the glass substrate is changed, different angles are selected according to different etching time or processes, the flowing speed of the etching liquid on the glass substrate is changed, the flushing force and speed of the etching liquid are changed, and the etching quality is improved.
As shown in fig. 1, 2 and 5, the center end 1 includes a center pivot 11 and at least two first support plates 12 fitted around the center pivot 11. The cross section of the first supporting plate 12 is L-shaped, the L-shaped inner surface of the first supporting plate 12 is a lower supporting surface 10, and the middle pivot 11 passes through and is fixed by the back surface of the first supporting plate 12. The center pivot 11 includes a first square shaft 111 and a first cylindrical shaft 112 integrally and coaxially connected to both ends of the first square shaft 111, and the diameter of the first cylindrical shaft 112 is smaller than the minimum width of the square shaft 111, so that the center pivot 11 can pass through the first support plate 12 and the first support plate 12 can be fixed with the center pivot 11. The back of the first supporting plate 12 is provided with a first square connecting hole adapted to the square shaft 11, the middle pivot 11 passes through the first square connecting hole, two ends of the middle pivot 11 are rotatably connected with the frame 4, and two first cylindrical shafts 112 of the middle pivot 11 are connected with the frame 4.
Based on the above technical solution, when the free end 2 rotates around the pivot end 1, i.e. rotates around the axis of the first cylindrical shaft 112, the direction and angle of the lower support surface 10 of the first support plate 12 are changed, i.e. the inclination angle of the glass substrate 100 can be changed.
Based on the above technical scheme, the center end 1 has a simple structure, and does not need to be fixed by clamping and the like in the installation of the glass substrate 100, the operation is simple and quick, and the glass substrate structure cannot be damaged because the glass substrate is not pressed by the clamping and the like.
Based on above-mentioned technical scheme, according to sizes such as glass substrate width, length, rationally set up two or more than two first backup pads 12, can also adjust the distance between two first backup pads 12 simultaneously to and can select the length that first backup pad 12 is located the face of glass substrate 100 bottom, ensure that the bottom suspension face 10 that first backup pad 12 is constituteed realizes stable support and the support to the glass substrate.
As shown in fig. 1, 3 and 6, the free end 2 includes a second support plate 21 disposed at the bottom of the glass substrate 100, and both ends of the second support plate 21 extend from both sides of the glass substrate 100. Two ends of the second support plate 21 are respectively provided with a connecting end 22, and a connecting shaft 23 passes through each of the two connecting ends 22. The connecting shaft 23 includes a second square shaft 231 fixedly connected to the connecting end 22 and a second cylindrical shaft 232 fixedly connected to an outer end of the second square shaft 231. The two second cylindrical shafts 232 are respectively sleeved with a lifting connecting plate 24, the lifting connecting plate 24 is provided with a connecting groove 29, and the lifting connecting plate 24 is connected with the rack 4 through the connecting groove 29.
Based on above-mentioned technical scheme, the position that sets up of second backup pad 21 realizes the support to glass substrate 100 on the one hand, can realize the support to the glass substrate of more different models and size, and on the other hand avoids taking place to interfere with spray set 3, ensures that spray set 3 can be by glass substrate 100 upper end border spray etching liquid downwards, ensures that every position of glass substrate can both carry out even etching attenuate.
As shown in fig. 1, 3 and 6, the connecting end 22 is in an inverted U shape, one side plate of the connecting end 22 is fixedly connected with the end of the second supporting plate 21, and the second square shaft 23 passes through the other side plate of the connecting end 22. The length of the second support plate 21 is greater than one time of the width of the glass substrate 100, the upward surface of the second support plate 21 is an upper support surface 20, and the upper support surface 20 and the lower support surface 10 are on the same plane. As shown in fig. 1 and 4, the frame 4 is provided with a connecting screw 25 passing through a connecting slot 29 on the two lifting connecting plates 24, and a fastening member 28 for locking the lifting connecting plates 24 on the frame 4 is sleeved on the connecting screw 25.
As shown in fig. 4, the lifting connection plate 24 can rotate around the axis of the second cylindrical shaft 232 of the second square shaft 23, when the up-down position of the free end 2 needs to be adjusted, the fastener 28 is locked, the connection groove 29 on the lifting connection plate 24 and the connection screw 25 are adjusted to suitable positions, so that the second support plate 21 and the upper support surface 20 reach the specified positions, and then the fastener 28 is locked, so that the second support plate 21 and the lifting connection plate 24 can be fixed.
Based on above-mentioned technical scheme, free end 2 goes up and down, realizes the regulation to the etching attenuate face inclination of glass substrate 100 for the etching liquid flows on liquid crystal glazing substrate surface, washes white powdered sediment etc. that the reaction produced, improves liquid crystal glazing substrate surface quality after the attenuate. Meanwhile, the flowing speed of the etching solution on the liquid crystal glass substrate can be changed by adopting different inclination angles in the unused etching reaction time, so that the precipitate in the reaction is washed, and the surface quality of the etched and thinned liquid crystal glass substrate is improved.
As shown in fig. 7, two opposite side surfaces of the second support plate 21 and the first support plate 12 are respectively provided with a coaxial limiting hole, and a limiting rod 26 is connected between the two opposite limiting holes. The setting of gag lever post 26 has ensured that second backup pad 21 and the respective last holding surface 20 of first backup pad 12 and bottom suspension fagging 10 are located the coplanar all the time, is convenient for to the support of glass substrate 100, increases glass substrate 100's holding area, improves the stability of proportion base plate, avoids the appearance of glass substrate deformation scheduling problem simultaneously.
As shown in fig. 1 and 4, the shower device 3 includes a shower pipe 31 having a length greater than the width of the glass substrate 100 and a shower pipe mounting assembly 33. Downward spraying holes 32 are uniformly distributed on the spraying pipe 31, the spraying pipe mounting component 33 comprises two horizontal cross rods connected with the rack 4, and two ends of the spraying pipe 31 are lapped on the two horizontal cross rods. The shower pipe 31 moves by lifting the free end 2, so that the shower pipe 31 is always positioned at the edge of the upper end of the glass substrate 100, etching liquid is enabled to flow downwards from the top edge of the glass substrate 100, uniform etching of all positions of the glass substrate 100 is ensured, and the etching thinning efficiency and the surface quality of the etched and thinned glass substrate are improved.
As shown in fig. 7, at least two glass substrates 100 and 101 having appropriate lengths are provided on the mounting device. In order to improve the etching thinning processing efficiency, the number of the first supporting plates 22 and the length of the first supporting plate 21 can be increased in a state shown in fig. 7, the length of the spray pipe 31 is prolonged, and a plurality of glass substrates with the same length can be installed at one time.
Technical solution of the invention is described above with reference to the accompanying drawings, it is obvious that the specific implementation of the invention is not limited by the above-mentioned manner, and it is within the scope of the invention to adopt various insubstantial modifications of the inventive method concept and technical solution, or to apply the inventive concept and technical solution to other occasions without modification.
Claims (8)
1. The utility model provides a liquid crystal glazing base plate attenuate etching equipment, its characterized in that, including the installation device who is used for installing the glass substrate and the spray set who is used for spraying the etching solution, installation device is including the relative center end and the free end that sets up, the free end with the center end is rotatory as the axle, changes the inclination of arranging the glass substrate on the installation device in, spray set sets up the upper portion position in the glass substrate upper end of slope, evenly sprays the etching solution on to the glass substrate by the glass substrate upper end of slope.
2. The apparatus of claim 1, wherein the pivot end comprises a center pivot and at least two first support plates sleeved on the center pivot, the cross section of the first support plate is L-shaped, the L-shaped inner surface of the first support plate is a lower support surface, and the center pivot is penetrated and fixed by the back surface of the first support plate.
3. The liquid crystal glass substrate thinning and etching equipment according to claim 2, wherein the pivot comprises a first square shaft and a first cylindrical shaft integrally and coaxially connected to two ends of the first square shaft, the diameter of the first cylindrical shaft is smaller than the minimum width of the square shaft, a first square connecting hole adapted to the square shaft is formed in the back of the first supporting plate, the pivot penetrates through the first square connecting hole, and two ends of the pivot are rotatably connected with the rack.
4. The liquid crystal glass substrate thinning and etching equipment according to claim 1, wherein the free end comprises a second support plate disposed at the bottom of the glass substrate, two ends of the second support plate respectively extend from two sides of the glass substrate, two ends of the second support plate are respectively provided with a connecting end, connecting shafts respectively pass through the two connecting ends, the connecting shafts comprise a second square shaft fixedly connected with the connecting ends and a second cylindrical shaft fixedly connected to the outer end of the second square shaft, two lifting connecting plates are respectively sleeved on the two second cylindrical shafts, a connecting groove is disposed on each lifting connecting plate, and each lifting connecting plate is connected with the rack through the connecting groove.
5. The liquid crystal glass substrate thinning and etching equipment according to claim 4, wherein the connecting end is in an inverted U shape, one side plate of the connecting end is fixedly connected with the end part of a second supporting plate, the second square shaft penetrates through the other side plate of the connecting end, the length of the second supporting plate is larger than one time of the width of the glass substrate, the upward surface of the second supporting plate is an upper supporting surface, the upper supporting surface and the lower supporting surface are on the same plane, a connecting screw rod penetrating through connecting grooves in the two lifting connecting plates is arranged on the rack, and a fastener for locking the lifting connecting plates on the rack is sleeved on the connecting screw rod.
6. The liquid crystal glass substrate thinning and etching equipment according to claim 4, wherein two opposite side surfaces of the second support plate and the first support plate are respectively provided with a coaxial limiting hole, and a limiting rod is connected between the two opposite limiting holes.
7. The liquid crystal glass substrate thinning and etching equipment according to claim 1, wherein the spraying device comprises spraying pipes and spraying pipe mounting assemblies, the length of each spraying pipe is larger than the width of the glass substrate, downward spraying holes are uniformly distributed in the spraying pipes, each spraying pipe mounting assembly comprises two horizontal cross rods connected with the rack, and two ends of each spraying pipe are lapped on the two horizontal cross rods.
8. The liquid crystal glass substrate thinning and etching device according to claim 1, wherein at least two glass substrates with appropriate lengths are arranged on the mounting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110371271.8A CN113233780A (en) | 2021-04-07 | 2021-04-07 | Liquid crystal glass substrate thinning and etching equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110371271.8A CN113233780A (en) | 2021-04-07 | 2021-04-07 | Liquid crystal glass substrate thinning and etching equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113233780A true CN113233780A (en) | 2021-08-10 |
Family
ID=77131008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110371271.8A Pending CN113233780A (en) | 2021-04-07 | 2021-04-07 | Liquid crystal glass substrate thinning and etching equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113233780A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2090587A (en) * | 1981-01-07 | 1982-07-14 | Wtb Wirtschaftsglas Veb | Immersion cage for acid polishing of glass articles |
| JPH02316A (en) * | 1987-06-12 | 1990-01-05 | Agency Of Ind Science & Technol | Surface flattening method and soi substrate forming method using said surface flattening method |
| US20070090092A1 (en) * | 2003-06-16 | 2007-04-26 | Saint-Gobain Glass France | Method and device for removing layers in some areas of glass plates |
| CN101265030A (en) * | 2007-03-15 | 2008-09-17 | 宇进先行技术株式会社 | Substrate thinning apparatus and method for thinning substrate |
| CN101417862A (en) * | 2007-10-23 | 2009-04-29 | 光捷国际股份有限公司 | Waterfall type lamellar flow etching apparatus |
| CN211595440U (en) * | 2019-10-21 | 2020-09-29 | 东莞泰升玻璃有限公司 | Glass etching equipment with feeding structure |
| CN112358194A (en) * | 2020-11-16 | 2021-02-12 | 凯盛科技集团有限公司 | Etching and thinning device and method for extremely-thin glass |
-
2021
- 2021-04-07 CN CN202110371271.8A patent/CN113233780A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2090587A (en) * | 1981-01-07 | 1982-07-14 | Wtb Wirtschaftsglas Veb | Immersion cage for acid polishing of glass articles |
| JPH02316A (en) * | 1987-06-12 | 1990-01-05 | Agency Of Ind Science & Technol | Surface flattening method and soi substrate forming method using said surface flattening method |
| US20070090092A1 (en) * | 2003-06-16 | 2007-04-26 | Saint-Gobain Glass France | Method and device for removing layers in some areas of glass plates |
| CN101265030A (en) * | 2007-03-15 | 2008-09-17 | 宇进先行技术株式会社 | Substrate thinning apparatus and method for thinning substrate |
| CN101417862A (en) * | 2007-10-23 | 2009-04-29 | 光捷国际股份有限公司 | Waterfall type lamellar flow etching apparatus |
| CN211595440U (en) * | 2019-10-21 | 2020-09-29 | 东莞泰升玻璃有限公司 | Glass etching equipment with feeding structure |
| CN112358194A (en) * | 2020-11-16 | 2021-02-12 | 凯盛科技集团有限公司 | Etching and thinning device and method for extremely-thin glass |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110589486B (en) | Streamline type automatic surface treatment equipment for glass plate of liquid crystal display screen | |
| CN104220924B (en) | Panel attachment device | |
| CN204948517U (en) | The Etaching device of printed circuit board (PCB) | |
| CN212018371U (en) | Manipulator point gum machine of tilting rotation | |
| CN113233780A (en) | Liquid crystal glass substrate thinning and etching equipment | |
| CN105235116A (en) | Roll-to-roll dipping and film coating system | |
| CN207605901U (en) | A kind of waste and old steel drum renovation spray equipment | |
| CN205044040U (en) | Volume to volume dip plating membrane system | |
| CN106298595A (en) | The acid dip pickle of solar battery sheet | |
| CN214781507U (en) | Spray swinging device and etching system | |
| CN213519883U (en) | Adjustable high-precision wafer edge grinding carrying platform | |
| CN213255247U (en) | System for spraying magnesium oxide edge of oriented silicon steel | |
| CN111708259B (en) | Tackifying unit of spin coating developing machine | |
| CN215147647U (en) | Glass edging water jet equipment | |
| CN209906641U (en) | Spray type glass substrate thinning line | |
| CN213409227U (en) | Rotary plane spraying equipment structure for mobile phone rear cover | |
| CN212418400U (en) | Automobile decoration strip paint spraying device | |
| CN209663654U (en) | Accurate modified gear and dispenser with the precision modified gear | |
| CN208194735U (en) | A kind of Workpiece painting turntable | |
| CN221094357U (en) | Electroplating line spray set with impeller | |
| CN205082068U (en) | Manual paster tool | |
| CN211053124U (en) | Novel automobile engine cylinder block machining clamp | |
| CN209829373U (en) | Plastic part sprays paint and uses swivel mount | |
| CN218308674U (en) | Surface spraying device for hub machining | |
| CN217990189U (en) | Cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210810 |
|
| RJ01 | Rejection of invention patent application after publication |