CN113219907B - 一种精密运动台扰动力辨识方法 - Google Patents
一种精密运动台扰动力辨识方法 Download PDFInfo
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- CN113219907B CN113219907B CN202110272790.9A CN202110272790A CN113219907B CN 113219907 B CN113219907 B CN 113219907B CN 202110272790 A CN202110272790 A CN 202110272790A CN 113219907 B CN113219907 B CN 113219907B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/414—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller
- G05B19/4142—Structure of the control system, e.g. common controller or multiprocessor systems, interface to servo, programmable interface controller characterised by the use of a microprocessor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/34—Director, elements to supervisory
- G05B2219/34013—Servocontroller
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CN202110272790.9A CN113219907B (zh) | 2021-03-13 | 2021-03-13 | 一种精密运动台扰动力辨识方法 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114153148A (zh) * | 2021-11-30 | 2022-03-08 | 哈尔滨工业大学 | 一种变学习步长的梯度迭代前馈整定方法 |
CN114759859B (zh) * | 2022-05-18 | 2022-11-29 | 哈尔滨工业大学 | 分段直线电机推力波动拟合方法 |
CN115755627B (zh) * | 2022-12-16 | 2023-06-02 | 哈尔滨工业大学 | 基于模型预测的纳米级精密运动台前馈控制方法 |
CN116678605B (zh) * | 2023-06-09 | 2023-11-07 | 哈尔滨工业大学 | 一种精密运动台质量-阻尼-刚度特性软测量系统及方法 |
Citations (2)
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CN102710214A (zh) * | 2012-06-11 | 2012-10-03 | 桂林电子科技大学 | 永磁同步直线电机非线性干扰的控制方法及控制系统 |
CN109617485A (zh) * | 2018-12-04 | 2019-04-12 | 南京工程学院 | 一种基于Tabu和DOB的永磁直线电机推力波动复合抑制方法 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102710214A (zh) * | 2012-06-11 | 2012-10-03 | 桂林电子科技大学 | 永磁同步直线电机非线性干扰的控制方法及控制系统 |
CN109617485A (zh) * | 2018-12-04 | 2019-04-12 | 南京工程学院 | 一种基于Tabu和DOB的永磁直线电机推力波动复合抑制方法 |
Non-Patent Citations (3)
Title |
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Cogging Compensation Piecewise Iterative Learning Control for Variable Setpoints with Application to a Wafer Stage;Berkel K;《Eindhoven, Holland:Technische Universiteit Eindhoven》;20061231;全文 * |
Time-Frequency Adaptive Iterative Learning Control with Application to a Wafer Stage;Ellenbroek R M L;《Einhoven,Holland:Technische Universiteit Eindhoven》;20031231;全文 * |
永磁同步直线电机推力波动建模与抑制;张明超;《清华大学学报(自然科学版)》;20100831;第50卷(第8期);第1253-1257页 * |
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